JP2009063407A - Irradiation condenser - Google Patents

Irradiation condenser Download PDF

Info

Publication number
JP2009063407A
JP2009063407A JP2007231223A JP2007231223A JP2009063407A JP 2009063407 A JP2009063407 A JP 2009063407A JP 2007231223 A JP2007231223 A JP 2007231223A JP 2007231223 A JP2007231223 A JP 2007231223A JP 2009063407 A JP2009063407 A JP 2009063407A
Authority
JP
Japan
Prior art keywords
light
irradiation
condensing
measured
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007231223A
Other languages
Japanese (ja)
Inventor
Makoto Komiyama
誠 小宮山
Kodai Murayama
広大 村山
Mitsuhiro Iga
光博 伊賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP2007231223A priority Critical patent/JP2009063407A/en
Publication of JP2009063407A publication Critical patent/JP2009063407A/en
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an irradiation condenser capable of condensing with a simple configuration irradiation to a plurality of measurement objects or a plurality of points in the measurement object. <P>SOLUTION: The irradiation condenser which irradidates light from a light source 19 at a measurement object, and which condenses and supplies reflected light from the measurement object, includes a plurality of irradiating optical fibers 21, 22 for propagating light from the light source, a condensing optical fiber 25 for propagating reflected light from the measurement object, and a lens for parallelizing emitted light from the plurality of irradiating optical fibers to irradiate at each different point on the measurement object and for condensing reflected light from each different point on the measurement object into the condensing optical fiber. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、光源からの光を被測定対象物に照射し被測定対象物からの反射光、或いは、透過光を集光して分光手段等に供給する照射集光装置に関し、特に簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能な照射集光装置に関する。   The present invention relates to an irradiation condensing apparatus that irradiates light to be measured from a light source and collects reflected light or transmitted light from the object to be measured and supplies the light to a spectroscopic means, etc. The present invention relates to an irradiation condensing apparatus capable of irradiating and condensing a plurality of measurement objects or a plurality of points in the measurement object.

従来の光源からの光を被測定対象物に照射し被測定対象物からの反射光、或いは、透過光を集光して分光手段等に供給する照射集光装置に関連する先行技術文献としては次のようなものがある。   As prior art documents related to an irradiation condensing device that irradiates light to be measured from a conventional light source and collects reflected light from the object to be measured or transmitted light and supplies it to a spectroscopic means, etc. There are the following.

特開平05−052739号公報JP 05-052739 A 特開平08−050092号公報JP 08-050092 A 特開平11−070101号公報JP-A-11-070101 特開2002−131229号公報JP 2002-131229 A

図6はこのような従来の照射集光装置を用いた分光分析装置の一例を示す構成ブロック図である。図6において、1は光源、2及び5は光ファイバ、3は照射集光装置、4は被測定対象物、6は分光手段である。また、1,2,3,5及び6は分光分析装置50を構成している。   FIG. 6 is a configuration block diagram showing an example of a spectroscopic analysis apparatus using such a conventional irradiation condensing apparatus. In FIG. 6, 1 is a light source, 2 and 5 are optical fibers, 3 is an irradiation condensing device, 4 is an object to be measured, and 6 is a spectroscopic means. 1, 2, 3, 5 and 6 constitute a spectroscopic analyzer 50.

光源1からの出力光は、光ファイバ2を伝播して照射集光装置3に供給され、照射集光手段3からの出射光が被測定対象物4に照射される。   Output light from the light source 1 propagates through the optical fiber 2 and is supplied to the irradiation condensing device 3, and emitted light from the irradiation condensing means 3 is irradiated to the object 4 to be measured.

例えば、図6中”LG01”に示すように照射集光装置3から出射された照射光は、図6中”SP01”に示す被測定対象物4上の部分に照射される。   For example, as indicated by “LG01” in FIG. 6, the irradiation light emitted from the irradiation condensing device 3 is applied to a portion on the measurement object 4 indicated by “SP01” in FIG. 6.

また、被測定対象物4からの反射光(或いは、反射光の一部)は、照射光が出射されたものと同じ照射集光装置3に入射し集光された後に、光ファイバ5を伝播して分光手段6に供給される。   Further, the reflected light (or a part of the reflected light) from the measurement object 4 is incident on the same irradiation condensing device 3 from which the irradiation light is emitted and is condensed, and then propagates through the optical fiber 5. And supplied to the spectroscopic means 6.

例えば、図6中”SP01”に示す被測定対象物4上の部分で反射された反射光(或いは、反射光の一部)は、図6中”LG02”に示すように照射集光装置3に入射される。   For example, the reflected light (or part of the reflected light) reflected by the part on the measurement object 4 indicated by “SP01” in FIG. 6 is irradiated and condensed by the irradiation light collecting device 3 as indicated by “LG02” in FIG. Is incident on.

ここで、図6に示す従来例の動作を図7を用いて説明する。図7はこのような従来の照射集光装置の一例を示す構成ブロック図であり、図7において2,4及び5は図6と同一符号を付してあり、図7において、7は集光手段であるレンズである。また、レンズ7は照射集光装置51を構成している。   Here, the operation of the conventional example shown in FIG. 6 will be described with reference to FIG. FIG. 7 is a structural block diagram showing an example of such a conventional irradiation condensing device. In FIG. 7, 2, 4 and 5 are given the same reference numerals as in FIG. 6, and in FIG. It is a lens that is a means. The lens 7 constitutes an irradiation condensing device 51.

光源1から出力光は、図7中”LG11”示すように光ファイバ2を伝播し、照射集光装置51内のレンズ7によってコリメートされ、図7中”LG12”に示すように平行光として伝播して、図7中”SP11”に示す被測定対象物4上の部分に照射される。   The output light from the light source 1 propagates through the optical fiber 2 as indicated by “LG11” in FIG. 7, is collimated by the lens 7 in the irradiation condensing device 51, and propagates as parallel light as indicated by “LG12” in FIG. Then, the portion on the measurement object 4 indicated by “SP11” in FIG. 7 is irradiated.

一方、被測定対象物4からの反射光(或いは、反射光の一部)は、図7中”LG13”に示すように照射集光装置51に入射し、射集光装置51内のレンズ7によって光ファイバ5に集光される。そして、集光された光は、図7中”LG14”に示すように光ファイバ5を伝播して分光手段6に供給され、分光分析される。   On the other hand, the reflected light (or part of the reflected light) from the measurement object 4 is incident on the irradiation condensing device 51 as indicated by “LG13” in FIG. Thus, the light is condensed on the optical fiber 5. The condensed light propagates through the optical fiber 5 as shown by “LG14” in FIG. 7 and is supplied to the spectroscopic means 6 for spectroscopic analysis.

この結果、分光分析装置に照射集光装置を用いることにより、1つの照射集光装置で被測定対象物に対する照射及び反射光の集光を行なうことが可能になる。   As a result, by using the irradiation condensing device for the spectroscopic analyzer, it becomes possible to irradiate the object to be measured and collect the reflected light with one irradiation condensing device.

ちなみに、複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光を行なう場合、照射集光装置自身の位置を移動させるか、複数個の照射集光装置を設置して照射集光装置を適宜選択しながら照射集光を行なう必要性がある。   By the way, when irradiating and condensing multiple objects to be measured or multiple points in the object to be measured, the position of the irradiating and condensing device itself is moved, or multiple irradiating and condensing devices are installed. There is a need to perform irradiation condensing while appropriately selecting an irradiation condensing device.

図8はこのような複数個の照射集光装置を適宜選択して照射集光を行なう従来の分光分析装置の他の一例を示す構成ブロック図である。   FIG. 8 is a configuration block diagram showing another example of a conventional spectroscopic analyzer that performs irradiation and collection by appropriately selecting a plurality of such irradiation and collection apparatuses.

図8において、8は光源、9及び14は光路を切り換える切換手段、10,13,16及び18は光ファイバ、11及び17は照射集光装置、12は被測定対象物、15は分光手段である。また、8,9,10,11,13,14,15,16,17及び18は分光分析装置52を構成している。   In FIG. 8, 8 is a light source, 9 and 14 are switching means for switching the optical path, 10, 13, 16 and 18 are optical fibers, 11 and 17 are irradiation condensing devices, 12 is an object to be measured, 15 is a spectroscopic means. is there. Further, 8, 9, 10, 11, 13, 14, 15, 16, 17, and 18 constitute a spectroscopic analyzer 52.

光源8からの出力光は、切換手段9に入射され、切換手段9の一方の出射端からの出射光は、光ファイバ10を伝播して照射集光装置11に供給され、照射集光手段11からの出射光が被測定対象物12に照射される。   The output light from the light source 8 is incident on the switching means 9, and the emitted light from one exit end of the switching means 9 propagates through the optical fiber 10 and is supplied to the irradiation condensing device 11. The light to be measured is irradiated onto the object 12 to be measured.

例えば、図8中”LG21”に示すように照射集光装置11から出射された照射光は、図6中”SP21”に示す被測定対象物12上の第1の部分に照射される。   For example, the irradiation light emitted from the irradiation condensing device 11 as indicated by “LG21” in FIG. 8 is applied to the first portion on the measurement target object 12 indicated by “SP21” in FIG.

また、被測定対象物12からの反射光(或いは、反射光の一部)は、照射光が出射されたものと同じ照射集光装置11に入射し集光された後に、光ファイバ13を伝播して切換手段14の一方の入射端に供給される。   Further, the reflected light (or a part of the reflected light) from the object 12 to be measured is incident on the same irradiation condensing device 11 from which the irradiation light is emitted and condensed, and then propagates through the optical fiber 13. Then, it is supplied to one incident end of the switching means 14.

例えば、図8中”SP21”に示す被測定対象物12上の第1の部分で反射された反射光(或いは、反射光の一部)は、図8中”LG22”に示すように照射集光装置11に入射される。   For example, the reflected light (or a part of the reflected light) reflected by the first portion on the measurement target object 12 indicated by “SP21” in FIG. 8 is irradiated as shown by “LG22” in FIG. The light enters the optical device 11.

同様に、切換手段9の他方の出射端からの出射光は、光ファイバ16を伝播して照射集光装置17に供給され、照射集光手段17からの出射光が被測定対象物12に照射される。   Similarly, the outgoing light from the other outgoing end of the switching means 9 propagates through the optical fiber 16 and is supplied to the irradiation condensing device 17, and the outgoing light from the irradiation condensing means 17 irradiates the measurement object 12. Is done.

例えば、図8中”LG23”に示すように照射集光装置17から出射された照射光は、図6中”SP22”に示す被測定対象物12上の第2の部分に照射される。   For example, as shown by “LG23” in FIG. 8, the irradiation light emitted from the irradiation light collecting device 17 is applied to the second portion on the measurement target object 12 shown by “SP22” in FIG.

また、被測定対象物12からの反射光(或いは、反射光の一部)は、照射光が出射されたものと同じ照射集光装置17に入射し集光された後に、光ファイバ18を伝播して切換手段14の他方の入射端に供給され、切換手段14の出射端からの出射光が分光手段15に供給される。   Further, the reflected light (or part of the reflected light) from the object 12 to be measured is incident on the same irradiation condensing device 17 from which the irradiation light is emitted and condensed, and then propagates through the optical fiber 18. Then, the light is supplied to the other incident end of the switching means 14, and the light emitted from the output end of the switching means 14 is supplied to the spectroscopic means 15.

例えば、図8中”SP22”に示す被測定対象物12上の第2の部分で反射された反射光(或いは、反射光の一部)は、図8中”LG24”に示すように照射集光装置17に入射される。   For example, the reflected light (or part of the reflected light) reflected by the second portion on the measurement target object 12 indicated by “SP22” in FIG. 8 is irradiated and collected as indicated by “LG24” in FIG. The light enters the optical device 17.

ここで、図8に示す従来例の動作を説明する。図8中”SP21”に示す被測定対象物12上の第1の部分に対して照射集光する場合、図示しない制御手段は、切換手段9を制御して光源8からの出力光を光ファイバ10に伝播させ、また、切換手段14を制御して光ファイバ13を伝播する光を分光手段15に供給させる。   Here, the operation of the conventional example shown in FIG. 8 will be described. In the case of irradiating and condensing the first portion on the measurement target object 12 indicated by “SP21” in FIG. 8, the control means (not shown) controls the switching means 9 to output light from the light source 8 to the optical fiber. 10 and controls the switching means 14 to supply the light propagating through the optical fiber 13 to the spectroscopic means 15.

また、図8中”SP22”に示す被測定対象物12上の第2の部分に対して照射集光する場合、図示しない制御手段は、切換手段9を制御して光源8からの出力光を光ファイバ16に伝播させ、また、切換手段14を制御して光ファイバ18を伝播する光を分光手段15に供給させる。   In addition, when the second portion on the measurement object 12 indicated by “SP22” in FIG. 8 is irradiated and condensed, the control means (not shown) controls the switching means 9 to output light from the light source 8. The light propagates through the optical fiber 16 and controls the switching unit 14 to supply the light propagating through the optical fiber 18 to the spectroscopic unit 15.

この結果、複数個の照射集光装置を設置して照射集光装置を適宜選択しながら照射集光を行なうことにより、複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光を行なうことができる。   As a result, a plurality of objects to be measured or a plurality of points in the object to be measured are irradiated by performing irradiation and condensing while installing a plurality of irradiation and condensing apparatuses and appropriately selecting the irradiation and condensing apparatus. Condensation can be performed.

しかし、複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光を行なう場合に、照射集光装置自身の位置を移動させることは困難(場合によっては移動不可の場合が多い。)であると言った問題点があった。   However, it is difficult to move the position of the irradiation / condensing device itself when performing irradiation / condensation on a plurality of objects to be measured or a plurality of points in the object to be measured (in some cases, it is impossible to move). There was a problem that said.

また、図8に示すように、複数個の照射集光装置を設置して照射集光装置を適宜選択しながら照射集光を行なう場合では、構成が複雑でありコストアップになってしまうと言った問題点があった。   In addition, as shown in FIG. 8, when a plurality of irradiation condensing devices are installed and irradiation condensing is performed while appropriately selecting the irradiation condensing devices, the configuration is complicated and the cost is increased. There was a problem.

さらに、複数個の照射集光装置を並べて設置しても、照射集光装置の大きさ(口径)よりも小さな間隔で、測定(照射集光)することは困難であると言った問題点があった。
従って本発明が解決しようとする課題は、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能な照射集光装置を実現することにある。
Furthermore, even if a plurality of irradiation condensing devices are installed side by side, it is difficult to measure (irradiate and condense) at an interval smaller than the size (diameter) of the irradiation condensing device. there were.
Therefore, the problem to be solved by the present invention is to realize an irradiation condensing apparatus capable of irradiating and condensing a plurality of objects to be measured or a plurality of points in the object to be measured with a simple configuration.

このような課題を達成するために、本発明のうち請求項1記載の発明は、
光源からの光を被測定対象物に照射し被測定対象物からの反射光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、被測定対象物からの反射光を伝播させる集光用光ファイバと、前記複数の照射用光ファイバの出射光を平行光にして前記被測定対象物上の異なる部分にそれぞれ照射させると共に前記被測定対象物上の異なる部分からの反射光をそれぞれ前記集光用光ファイバに集光させるレンズとを備えたことにより、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能になる。
In order to achieve such a problem, the invention according to claim 1 of the present invention is:
In the irradiation condensing device that irradiates the object to be measured with light from the light source and collects and supplies the reflected light from the object to be measured.
A plurality of irradiation optical fibers for propagating light from the light source, a condensing optical fiber for propagating reflected light from the object to be measured, and light emitted from the plurality of irradiation optical fibers are converted into parallel light and the target By providing a lens for irradiating different portions on the measurement object, respectively, and condensing the reflected light from the different portions on the measurement object on the condensing optical fiber, respectively, with a simple configuration. Irradiation condensing can be performed on a plurality of measurement objects or a plurality of points in the measurement object.

請求項2記載の発明は、
光源からの光を被測定対象物に照射し被測定対象物からの反射光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、被測定対象物からの反射光を伝播させる集光用光ファイバと、前記複数の照射用光ファイバの出射光を平行光にして前記被測定対象物上の異なる部分にそれぞれ照射させる照射用のレンズと、前記被測定対象物上の異なる部分からの反射光をそれぞれ前記集光用光ファイバに集光させる集光用のレンズとを備えたことにより、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能になる。
The invention according to claim 2
In the irradiation condensing device that irradiates the object to be measured with light from the light source and collects and supplies the reflected light from the object to be measured.
A plurality of irradiation optical fibers for propagating light from the light source, a condensing optical fiber for propagating reflected light from the object to be measured, and light emitted from the plurality of irradiation optical fibers are converted into parallel light and the target Irradiation lenses for irradiating different portions on the measurement object, and condensing lenses for condensing reflected light from the different portions on the measurement object on the condensing optical fibers, respectively. This makes it possible to irradiate and collect a plurality of objects to be measured or a plurality of points in the objects to be measured with a simple configuration.

請求項3記載の発明は、
光源からの光を被測定対象物に照射し被測定対象物からの反射光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、これら複数の照射用光ファイバの出射光を平行光にして被測定対象物上の異なる部分にそれぞれ照射させる照射用のレンズとから構成される照射装置と、前記被測定対象物からの反射光を伝播させる集光用光ファイバと、前記被測定対象物上の異なる部分からの反射光をそれぞれ前記集光用光ファイバに集光させる集光用のレンズとから構成される集光装置とを備えたことにより、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能になる。
The invention described in claim 3
In the irradiation condensing device that irradiates the object to be measured with light from the light source and collects and supplies the reflected light from the object to be measured.
It consists of a plurality of irradiation optical fibers that propagate the light from the light source, and an irradiation lens that irradiates different parts on the object to be measured by making the emitted light of the plurality of irradiation optical fibers into parallel light. An irradiating device, a condensing optical fiber for propagating reflected light from the object to be measured, and a condensing optical fiber for condensing reflected light from different parts on the object to be measured on the condensing optical fiber, respectively. By providing the condensing device including the light lens, it is possible to irradiate and collect a plurality of objects to be measured or a plurality of points in the object to be measured with a simple configuration.

請求項4記載の発明は、
光源からの光を被測定対象物に照射し被測定対象物からの透過光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、これら複数の照射用光ファイバの出射光を平行光にして被測定対象物上の異なる部分にそれぞれ照射させる照射用のレンズとから構成される照射装置と、前記被測定対象物からの透過光を伝播させる集光用光ファイバと、前記被測定対象物上の異なる部分からの透過光をそれぞれ前記集光用光ファイバに集光させる集光用のレンズとから構成される集光装置とを備えたことにより、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能になる。
The invention according to claim 4
In the irradiation condensing device that irradiates the object to be measured with the light from the light source and collects and supplies the transmitted light from the object to be measured.
It consists of a plurality of irradiation optical fibers that propagate the light from the light source, and an irradiation lens that irradiates different parts on the object to be measured by making the emitted light of the plurality of irradiation optical fibers into parallel light. An irradiating device, a condensing optical fiber for propagating transmitted light from the object to be measured, and a condensing optical fiber for condensing transmitted light from different parts on the object to be measured on the condensing optical fiber, respectively. By providing the condensing device including the light lens, it is possible to irradiate and collect a plurality of objects to be measured or a plurality of points in the object to be measured with a simple configuration.

請求項5記載の発明は、
請求項1乃至請求項4のいずれかに記載の照射集光装置を分光分析装置に適用したことにより、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能になる。
The invention according to claim 5
By applying the irradiation condensing device according to any one of claims 1 to 4 to a spectroscopic analyzer, irradiation to a plurality of measurement objects or a plurality of points in the measurement object with a simple configuration Condensation is possible.

本発明によれば次のような効果がある。
請求項1,2,3,4及び請求項5の発明によれば、複数の照射用光ファイバからの出射光を平行光にして被測定対象物上の異なる部分をそれぞれ照射し、被測定対象物上の異なる部分からの2つの反射光、或いは、透過光を1つの集光用光ファイバに集光することにより、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能になる。
The present invention has the following effects.
According to the first, second, third, fourth, and fifth aspects of the present invention, the light beams emitted from the plurality of irradiation optical fibers are converted into parallel light to irradiate different portions on the object to be measured. By condensing two reflected light or transmitted light from different parts on an object onto one condensing optical fiber, a plurality of objects to be measured or in a object to be measured can be obtained with a simple configuration. Irradiation condensing can be performed on a plurality of points.

以下本発明を図面を用いて詳細に説明する。図1は本発明に係る照射集光装置を用いた分光分析装置の一実施例を示す構成ブロック図である。   Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing the configuration of an embodiment of a spectroscopic analyzer using an irradiation condensing device according to the present invention.

図1において、19は光源、20は光路を切り換える切換手段、21及び22は照射用光ファイバ、23は照射集光装置、24は被測定対象物、25は集光用光ファイバ、26は分光手段である。また、19,20,21,22,23,25及び26は分光分析装置53を構成している。   In FIG. 1, 19 is a light source, 20 is a switching means for switching an optical path, 21 and 22 are irradiation optical fibers, 23 is an irradiation condensing device, 24 is an object to be measured, 25 is a condensing optical fiber, and 26 is a spectroscopic unit. Means. In addition, 19, 20, 21, 22, 23, 25 and 26 constitute a spectroscopic analyzer 53.

光源19からの出力光は、切換手段20に入射され、切換手段20の一方の出射端からの出射光は、光ファイバ21を伝播して照射集光装置23に供給され、照射集光手段23からの出射光が被測定対象物24に照射される。   The output light from the light source 19 enters the switching means 20, and the emitted light from one exit end of the switching means 20 propagates through the optical fiber 21 and is supplied to the irradiation condensing device 23. The light to be measured is irradiated on the measurement object 24.

例えば、図1中”LG31”に示すように照射集光装置23から出射された照射光は、図1中”SP31”に示す被測定対象物24上の第1の部分に照射される。   For example, as shown by “LG31” in FIG. 1, the irradiation light emitted from the irradiation condensing device 23 is applied to the first portion on the measurement object 24 shown by “SP31” in FIG.

同様に、切換手段20の他方の出射端からの出射光は、光ファイバ22を伝播して照射集光装置23に供給され、照射集光手段23からの出射光が被測定対象物24に照射される。   Similarly, the outgoing light from the other outgoing end of the switching means 20 propagates through the optical fiber 22 and is supplied to the irradiation condensing device 23, and the outgoing light from the irradiation condensing means 23 irradiates the measurement object 24. Is done.

例えば、図1中”LG33”に示すように照射集光装置23から出射された照射光は、図1中”SP31”に示す被測定対象物24上の第1の部分とは異なる図1中”SP32”に示す被測定対象物24上の第2の部分に照射される。   For example, as shown by “LG33” in FIG. 1, the irradiation light emitted from the irradiation light collecting device 23 is different from the first part on the measurement target 24 shown in “SP31” in FIG. The second portion on the measurement object 24 indicated by “SP32” is irradiated.

また、被測定対象物24からの反射光(或いは、反射光の一部)は、照射光が出射されたものと同じ照射集光装置23に入射し集光された後に、光ファイバ25を伝播して分光手段26に供給される。   In addition, the reflected light (or part of the reflected light) from the measurement object 24 is incident on the same irradiation condensing device 23 from which the irradiation light is emitted and is condensed, and then propagates through the optical fiber 25. And supplied to the spectroscopic means 26.

例えば、図1中”SP31”、或いは、”SP32”に示す被測定対象物12上の第1、或いは、第2の部分で反射された反射光(或いは、反射光の一部)は、図1中”LG32”、或いは、”LG34”に示すように照射集光装置23に入射される。   For example, the reflected light (or part of the reflected light) reflected by the first or second part on the measurement target object 12 indicated by “SP31” or “SP32” in FIG. 1 is incident on the irradiation condensing device 23 as indicated by “LG32” or “LG34”.

ここで、図1に示す実施例の動作を図2を用いて説明する。図2は本発明に係る照射集光装置の一実施例を示す構成ブロック図であり、図2において21,22,24及び25は図1と同一符号を付してあり、図2において、27は集光手段であるレンズである。また、レンズ27は照射集光装置54を構成する。   Here, the operation of the embodiment shown in FIG. 1 will be described with reference to FIG. FIG. 2 is a block diagram showing an embodiment of the irradiation condensing device according to the present invention. In FIG. 2, numerals 21, 22, 24 and 25 are assigned the same reference numerals as those in FIG. Is a lens which is a condensing means. The lens 27 constitutes an irradiation condensing device 54.

光源19から出力光は、切換手段20により光ファイバ21が光路として選択された場合、図2中”LG41”示すように光ファイバ21を伝播し、照射集光装置54内のレンズ27によってコリメートされ、図2中”LG42”に示すように平行光として伝播して、図2中”SP41”に示す被測定対象物24上の第1の部分に照射される。   When the optical fiber 21 is selected as the optical path by the switching means 20, the output light from the light source 19 propagates through the optical fiber 21 as shown by “LG 41” in FIG. 2 and is collimated by the lens 27 in the irradiation condensing device 54. 2 propagates as parallel light as indicated by “LG42” in FIG. 2, and is irradiated on the first portion on the measurement object 24 indicated by “SP41” in FIG.

また、光源19から出力光は、切換手段20により光ファイバ22が光路として選択された場合、図2中”LG43”示すように光ファイバ22を伝播し、照射集光装置54内のレンズ27によってコリメートされ、図2中”LG44”に示すように平行光として伝播して、図2中”SP42”に示す被測定対象物24上の第2の部分に照射される。   Further, when the optical fiber 22 is selected as the optical path by the switching means 20, the output light from the light source 19 propagates through the optical fiber 22 as indicated by “LG 43” in FIG. 2 and is output by the lens 27 in the irradiation condensing device 54. The light is collimated, propagates as parallel light as indicated by “LG44” in FIG. 2, and is applied to the second portion on the measurement object 24 indicated by “SP42” in FIG.

一方、被測定対象物24からの反射光(或いは、反射光の一部)は、図2中”LG45”若しくは図2中”LG46”に示すように照射集光装置54に入射し、照射集光装置54内のレンズ27によって光ファイバ25に集光される。そして、集光された光は、図2中”LG47”に示すように光ファイバ25を伝播して分光手段26に供給され、分光分析される。   On the other hand, the reflected light (or part of the reflected light) from the measurement object 24 enters the irradiation condensing device 54 as indicated by “LG45” in FIG. 2 or “LG46” in FIG. The light is condensed on the optical fiber 25 by the lens 27 in the optical device 54. The condensed light propagates through the optical fiber 25 as shown by “LG47” in FIG. 2 and is supplied to the spectroscopic means 26 for spectroscopic analysis.

例えば、照射集光装置54を構成するレンズ27として”f=50mm”のレンズを使用した場合、集光用光ファイバ25として”NA≒0.22”の光ファイバを用い、集光用光ファイバ25の入射端をレンズ27の焦点位置に設置すると、被測定対象物24上の直径”約22mm”の部分からの反射光を取り込むことができる。   For example, when a lens of “f = 50 mm” is used as the lens 27 constituting the irradiation condensing device 54, an optical fiber of “NA≈0.22” is used as the condensing optical fiber 25, and the condensing optical fiber is used. When the 25 incident ends are installed at the focal position of the lens 27, the reflected light from the portion of the object of measurement 24 having a diameter of “about 22 mm” can be captured.

一方、例えば、照射用光ファイバ21及び22を”NA≒0.1”の光ファイバとし、照射用光ファイバ21及び22の出射端をそれぞれレンズ27の焦点位置に設置すると、被測定対象物24上の直径”約10mm”の部分をそれぞれ別個に照射することができる。   On the other hand, for example, when the irradiation optical fibers 21 and 22 are optical fibers of “NA≈0.1” and the emission ends of the irradiation optical fibers 21 and 22 are respectively installed at the focal positions of the lenses 27, the measurement object 24 Each of the upper “about 10 mm” portions can be illuminated separately.

このような状況下で、照射用光ファイバ21及び22の出射端の間隔が”2mm”となるように配置すると、レンズ27から”約25cm”離れた地点で、2つの照射範囲(直径”約10mm”の円)が接する位置関係(例えば、図2中”SP41”と図2中”SP42”に示すような位置関係)となる。   Under such circumstances, when the distance between the emission ends of the irradiation optical fibers 21 and 22 is set to “2 mm”, the two irradiation ranges (diameters) about “about 25 cm” away from the lens 27. 10 mm ") is in a positional relationship (for example, a positional relationship as indicated by" SP41 "in FIG. 2 and" SP42 "in FIG. 2).

この結果、2つの照射用光ファイバからの出射光を平行光にして被測定対象物上の異なる部分を照射し、被測定対象物上の異なる部分からの2つの反射光を1つの集光用光ファイバに集光することにより、簡単な構成で複数の被測定対象物、或いは、被測定対象物内の複数点に対する照射集光が可能になる。   As a result, the emitted light from the two irradiation optical fibers is converted into parallel light to irradiate different parts on the object to be measured, and two reflected lights from the different parts on the object to be measured are collected into one light. By condensing on the optical fiber, it is possible to irradiate and collect a plurality of objects to be measured or a plurality of points in the object to be measured with a simple configuration.

なお、図1に示す実施例の説明に際しては、光ファイバを用いて光源からの出力光等を伝播させているが、勿論、空間伝播型等の光ガイドを用いて各種光を伝播させても構わない。   In the description of the embodiment shown in FIG. 1, the output light from the light source is propagated using an optical fiber. Of course, various types of light may be propagated using a light guide of a spatial propagation type or the like. I do not care.

また、図1に示す実施例では、照射のための光のコリメートと、反射光の集光を同一の光学系(レンズ)で行なっているが、光学系(レンズ)を照射用と集光用とに分離しても構わない。   In the embodiment shown in FIG. 1, collimation of light for irradiation and condensing of reflected light are performed by the same optical system (lens). However, the optical system (lens) is used for irradiation and for condensing. It may be separated.

図3はこのような本発明に係る照射集光装置の他の実施例を示す構成ブロック図である。図3において、28及び29は照射用光ファイバ、30は照射(コリメート)用のレンズ、31は被測定対象物、32は集光用のレンズ、33は集光用光ファイバである。また、レンズ30及びレンズ32は照射集光装置55を構成している。   FIG. 3 is a block diagram showing the construction of another embodiment of the irradiation condensing apparatus according to the present invention. In FIG. 3, 28 and 29 are irradiation optical fibers, 30 is an irradiation (collimating) lens, 31 is an object to be measured, 32 is a condensing lens, and 33 is a condensing optical fiber. Further, the lens 30 and the lens 32 constitute an irradiation condensing device 55.

光源(図示せず。)から出力光は、切換手段(図示せず。)により光ファイバ28が光路として選択された場合、図3中”LG51”示すように光ファイバ28を伝播し、照射集光装置55内の照射(コリメート)用のレンズ30によってコリメートされ、図3中”LG52”に示すように平行光として伝播して、図3中”SP51”に示す被測定対象物31上の第1の部分に照射される。   When the optical fiber 28 is selected as the optical path by the switching means (not shown), the output light from the light source (not shown) propagates through the optical fiber 28 as indicated by “LG51” in FIG. Collimated by the irradiation (collimating) lens 30 in the optical device 55 and propagated as parallel light as indicated by “LG52” in FIG. 1 part is irradiated.

また、光源(図示せず。)から出力光は、切換手段(図示せず。)により光ファイバ29が光路として選択された場合、図3中”LG53”示すように光ファイバ29を伝播し、照射集光装置55内の照射(コリメート)用のレンズ30によってコリメートされ、図3中”LG54”に示すように平行光として伝播して、図3中”SP52”に示す被測定対象物31上の第2の部分に照射される。   Further, when the optical fiber 29 is selected as an optical path by the switching means (not shown), the output light from the light source (not shown) propagates through the optical fiber 29 as indicated by “LG53” in FIG. Collimated by the irradiation (collimating) lens 30 in the irradiation condensing device 55 and propagated as parallel light as indicated by “LG54” in FIG. The second part is irradiated.

一方、被測定対象物31からの反射光(或いは、反射光の一部)は、図3中”LG55”に示すように照射集光装置55に入射し、照射集光装置55内の集光用のレンズ32によって光ファイバ33に集光される。そして、集光された光は、図3中”LG56”に示すように光ファイバ33を伝播して分光手段(図示せず。)に供給され、分光分析される。   On the other hand, the reflected light (or part of the reflected light) from the measurement object 31 is incident on the irradiation condensing device 55 as indicated by “LG55” in FIG. The light is condensed on the optical fiber 33 by the lens 32 for use. The condensed light propagates through the optical fiber 33 as shown by “LG56” in FIG. 3 and is supplied to the spectroscopic means (not shown) for spectroscopic analysis.

また、図1に示す実施例では、照射機能と集光機能が一体化して照射集光装置を構成しているが、照射装置と集光装置を分離しても構わない。   Further, in the embodiment shown in FIG. 1, the irradiation function and the light collecting function are integrated to constitute the irradiation light collecting device, but the irradiation device and the light collecting device may be separated.

図4はこのような本発明に係る照射集光装置の他の実施例を示す構成ブロック図である。図4において、34及び35は照射用光ファイバ、36は照射(コリメート)用のレンズ、37は被測定対象物、38は集光用のレンズ、39は集光用光ファイバである。また、レンズ36は照射手段56を、レンズ38は集光装置57をそれぞれ構成している。   FIG. 4 is a block diagram showing the construction of another embodiment of the irradiation condensing device according to the present invention. In FIG. 4, 34 and 35 are irradiation optical fibers, 36 is a lens for irradiation (collimation), 37 is an object to be measured, 38 is a lens for condensing, and 39 is an optical fiber for condensing. The lens 36 constitutes an irradiation means 56, and the lens 38 constitutes a condensing device 57.

光源(図示せず。)から出力光は、切換手段(図示せず。)により光ファイバ34が光路として選択された場合、図4中”LG61”示すように光ファイバ34を伝播し、照射装置56内の照射(コリメート)用のレンズ36によってコリメートされ、図4中”LG62”に示すように平行光として伝播して、図4中”SP61”に示す被測定対象物37上の第1の部分に照射される。   When the optical fiber 34 is selected as the optical path by the switching means (not shown), the output light from the light source (not shown) propagates through the optical fiber 34 as indicated by “LG61” in FIG. 56 is collimated by an irradiation (collimating) lens 36 and propagates as parallel light as indicated by “LG62” in FIG. The part is irradiated.

また、光源(図示せず。)から出力光は、切換手段(図示せず。)により光ファイバ35が光路として選択された場合、図4中”LG63”示すように光ファイバ35を伝播し、照射装置56内の照射(コリメート)用のレンズ36によってコリメートされ、図4中”LG64”に示すように平行光として伝播して、図4中”SP62”に示す被測定対象物37上の第2の部分に照射される。   Further, when the optical fiber 35 is selected as the optical path by the switching means (not shown), the output light from the light source (not shown) propagates through the optical fiber 35 as indicated by “LG63” in FIG. Collimated by the irradiation (collimating) lens 36 in the irradiation device 56, propagates as parallel light as indicated by "LG64" in FIG. 2 is irradiated.

一方、被測定対象物37からの反射光(或いは、反射光の一部)は、図4中”LG65”に示すように集光装置57に入射し、集光装置57内の集光用のレンズ38によって光ファイバ39に集光される。そして、集光された光は、図4中”LG66”に示すように光ファイバ39を伝播して分光手段(図示せず。)に供給され、分光分析される。   On the other hand, the reflected light (or part of the reflected light) from the measurement object 37 enters the light collecting device 57 as indicated by “LG65” in FIG. The light is condensed on the optical fiber 39 by the lens 38. The condensed light propagates through the optical fiber 39 as shown by “LG66” in FIG. 4 and is supplied to the spectroscopic means (not shown) for spectroscopic analysis.

また、図1に示す実施例の説明に際しては、被測定対象物からの反射光を集光していたが、被測定対象物の透過光を集光するものであっても構わない。   In the description of the embodiment shown in FIG. 1, the reflected light from the object to be measured is collected. However, the light transmitted through the object to be measured may be condensed.

図5はこのような本発明に係る照射集光装置の他の実施例を示す構成ブロック図である。図5において、40及び41は照射用光ファイバ、42は照射(コリメート)用のレンズ、43は被測定対象物、44は集光用のレンズ、45は集光用光ファイバである。また、レンズ42は照射手段58を、レンズ44は集光装置59をそれぞれ構成している。   FIG. 5 is a block diagram showing the construction of another embodiment of the irradiation condensing apparatus according to the present invention. In FIG. 5, 40 and 41 are irradiation optical fibers, 42 is an irradiation (collimating) lens, 43 is an object to be measured, 44 is a condensing lens, and 45 is a condensing optical fiber. The lens 42 constitutes the irradiation means 58, and the lens 44 constitutes the light condensing device 59.

光源(図示せず。)から出力光は、切換手段(図示せず。)により光ファイバ40が光路として選択された場合、図5中”LG71”示すように光ファイバ40を伝播し、照射装置58内の照射(コリメート)用のレンズ42によってコリメートされ、図5中”LG72”に示すように平行光として伝播して、図5中”SP71”に示す被測定対象物43上の第1の部分に照射される。   When the optical fiber 40 is selected as an optical path by the switching means (not shown), the output light from the light source (not shown) propagates through the optical fiber 40 as indicated by “LG71” in FIG. 58 is collimated by a lens 42 for irradiation (collimation), propagates as parallel light as indicated by “LG72” in FIG. The part is irradiated.

また、光源(図示せず。)から出力光は、切換手段(図示せず。)により光ファイバ41が光路として選択された場合、図5中”LG73”示すように光ファイバ41を伝播し、照射装置58内の照射(コリメート)用のレンズ42によってコリメートされ、図5中”LG74”に示すように平行光として伝播して、図5中”SP72”に示す被測定対象物43上の第2の部分に照射される。   Further, when the optical fiber 41 is selected as an optical path by the switching means (not shown), the output light from the light source (not shown) propagates through the optical fiber 41 as indicated by “LG73” in FIG. Collimated by the irradiation (collimating) lens 42 in the irradiation device 58, propagates as parallel light as indicated by “LG74” in FIG. 2 is irradiated.

一方、被測定対象物43からの透過光(或いは、透過光の一部)は、図5中”LG75”に示すように集光装置59に入射し、集光装置59内の集光用のレンズ44によって光ファイバ45に集光される。そして、集光された光は、図5中”LG76”に示すように光ファイバ45を伝播して分光手段(図示せず。)に供給され、分光分析される。   On the other hand, the transmitted light (or part of the transmitted light) from the object to be measured 43 enters the light collecting device 59 as indicated by “LG75” in FIG. The light is condensed on the optical fiber 45 by the lens 44. The condensed light propagates through the optical fiber 45 as shown by “LG 76” in FIG. 5 and is supplied to the spectroscopic means (not shown) for spectroscopic analysis.

また、図1に示す実施例の説明に際しては、被測定対象物上の照射部分を切り換えていたが、同時に照射して測定面積を広げるように用いても構わない。   In the description of the embodiment shown in FIG. 1, the irradiated part on the object to be measured is switched, but it may be used so as to expand the measurement area by irradiating simultaneously.

また、図1に示す実施例の説明に際しては、2つの照射用光ファイバからの出射光を平行光にして被測定対象物上の異なる部分を照射する旨記載しているが、照射用光ファイバ3以上の複数の照射用光ファイバを用いて、被測定対象物上の3以上の複数の異なる部分を照射しても構わない。   Further, in the description of the embodiment shown in FIG. 1, it is described that the emitted light from the two irradiation optical fibers is made into parallel light and different portions on the object to be measured are irradiated. You may irradiate a 3 or more different part on a to-be-measured object using a 3 or more several irradiation optical fiber.

また、図1に示す実施例の説明に際しては、光路を切り換える切換手段を用いて光源の出力光を切り換えていたが、複数の光源を設けて順次ON/OFFさせるものであっても構わない。   In the description of the embodiment shown in FIG. 1, the output light of the light source is switched using the switching means for switching the optical path. However, a plurality of light sources may be provided and sequentially turned on / off.

また、図1等に示す実施例のように、被測定対象物からの反射光を集光する場合、斜めから被測定対象物に照射するため、被測定対象物の照射部分は楕円状となるが、この状況を回避する必要性がある場合は、開口を入れる、或いは、プリズム等により照射光の形状を予め補正しておくことにより解決可能である。   Further, as in the embodiment shown in FIG. 1 and the like, when the reflected light from the object to be measured is collected, the object to be measured is irradiated from an oblique direction, and therefore the irradiated portion of the object to be measured is elliptical. However, if there is a need to avoid this situation, it can be solved by making an opening or correcting the shape of the irradiation light in advance by a prism or the like.

本発明に係る照射集光装置を用いた分光分析装置の一実施例を示す構成ブロック図である。1 is a block diagram showing a configuration of an embodiment of a spectroscopic analysis apparatus using an irradiation condensing apparatus according to the present invention. 本発明に係る照射集光装置の一実施例を示す構成ブロック図である。1 is a configuration block diagram showing an embodiment of an irradiation condensing device according to the present invention. 本発明に係る照射集光装置の他の実施例を示す構成ブロック図である。It is a block diagram which shows the other Example of the irradiation condensing apparatus which concerns on this invention. 本発明に係る照射集光装置の他の実施例を示す構成ブロック図である。It is a block diagram which shows the other Example of the irradiation condensing apparatus which concerns on this invention. 本発明に係る照射集光装置の他の実施例を示す構成ブロック図である。It is a block diagram which shows the other Example of the irradiation condensing apparatus which concerns on this invention. 従来の照射集光装置を用いた分光分析装置の一例を示す構成ブロック図である。It is a block diagram which shows an example of the spectroscopic analyzer using the conventional irradiation condensing apparatus. 従来の照射集光装置の一例を示す構成ブロック図である。It is a block diagram which shows an example of the conventional irradiation condensing apparatus. 従来の分光分析装置の他の一例を示す構成ブロック図である。It is a block diagram showing another example of a conventional spectroscopic analyzer.

符号の説明Explanation of symbols

1,8,19 光源
2,5,10,13,16,18,21,22,25,28,29,33,34,35,39,40,41,45 光ファイバ
3,11,17,23,51,54,55 照射集光装置
4,12,24,31,37,43 被測定対象物
6,15,26 分光手段
7,27,30,32,36,38,42,44 レンズ
9,14,20 切換手段
50,52,53 分光分析装置
56,58 照射手段
57,59 集光装置
1, 8, 19 Light source 2, 5, 10, 13, 16, 18, 21, 22, 25, 28, 29, 33, 34, 35, 39, 40, 41, 45 Optical fiber 3, 11, 17, 23 , 51, 54, 55 Irradiation condensing device 4, 12, 24, 31, 37, 43 Object to be measured 6, 15, 26 Spectroscopic means 7, 27, 30, 32, 36, 38, 42, 44 Lens 9, 14, 20 switching means 50, 52, 53 Spectroscopic analyzer 56, 58 Irradiating means 57, 59 Condensing device

Claims (5)

光源からの光を被測定対象物に照射し被測定対象物からの反射光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、
被測定対象物からの反射光を伝播させる集光用光ファイバと、
前記複数の照射用光ファイバの出射光を平行光にして前記被測定対象物上の異なる部分にそれぞれ照射させると共に前記被測定対象物上の異なる部分からの反射光をそれぞれ前記集光用光ファイバに集光させるレンズと
を備えたことを特徴とする照射集光装置。
In the irradiation condensing device that irradiates the object to be measured with light from the light source and collects and supplies the reflected light from the object to be measured.
A plurality of irradiation optical fibers for propagating light from the light source;
A condensing optical fiber that propagates reflected light from the object to be measured; and
The emitted light of the plurality of irradiation optical fibers is converted into parallel light so as to irradiate different portions on the object to be measured and reflected light from the different portions on the object to be measured, respectively. An irradiation condensing device comprising: a lens for condensing light.
光源からの光を被測定対象物に照射し被測定対象物からの反射光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、
被測定対象物からの反射光を伝播させる集光用光ファイバと、
前記複数の照射用光ファイバの出射光を平行光にして前記被測定対象物上の異なる部分にそれぞれ照射させる照射用のレンズと、
前記被測定対象物上の異なる部分からの反射光をそれぞれ前記集光用光ファイバに集光させる集光用のレンズと
を備えたことを特徴とする照射集光装置。
In the irradiation condensing device that irradiates the object to be measured with light from the light source and collects and supplies the reflected light from the object to be measured.
A plurality of irradiation optical fibers for propagating light from the light source;
A condensing optical fiber that propagates reflected light from the object to be measured; and
Irradiation lenses for irradiating different portions on the object to be measured with the emitted light of the plurality of irradiation optical fibers as parallel light,
An irradiation condensing apparatus comprising: a condensing lens that condenses reflected light from different portions on the object to be measured on the condensing optical fiber.
光源からの光を被測定対象物に照射し被測定対象物からの反射光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、これら複数の照射用光ファイバの出射光を平行光にして被測定対象物上の異なる部分にそれぞれ照射させる照射用のレンズとから構成される照射装置と、
前記被測定対象物からの反射光を伝播させる集光用光ファイバと、前記被測定対象物上の異なる部分からの反射光をそれぞれ前記集光用光ファイバに集光させる集光用のレンズとから構成される集光装置と
を備えたことを特徴とする照射集光装置。
In the irradiation condensing device that irradiates the object to be measured with light from the light source and collects and supplies the reflected light from the object to be measured.
It consists of a plurality of irradiation optical fibers that propagate the light from the light source, and an irradiation lens that irradiates different parts on the object to be measured by making the emitted light of the plurality of irradiation optical fibers into parallel light. An irradiation device;
A condensing optical fiber for propagating reflected light from the object to be measured, and a condensing lens for condensing the reflected light from different parts on the object to be measured on the condensing optical fiber, respectively. An irradiation condensing device comprising: a condensing device comprising:
光源からの光を被測定対象物に照射し被測定対象物からの透過光を集光して供給する照射集光装置において、
光源からの光を伝播させる複数の照射用光ファイバと、これら複数の照射用光ファイバの出射光を平行光にして被測定対象物上の異なる部分にそれぞれ照射させる照射用のレンズとから構成される照射装置と、
前記被測定対象物からの透過光を伝播させる集光用光ファイバと、前記被測定対象物上の異なる部分からの透過光をそれぞれ前記集光用光ファイバに集光させる集光用のレンズとから構成される集光装置と
を備えたことを特徴とする照射集光装置。
In the irradiation condensing device that irradiates the object to be measured with the light from the light source and collects and supplies the transmitted light from the object to be measured.
It consists of a plurality of irradiation optical fibers that propagate the light from the light source, and an irradiation lens that irradiates different parts on the object to be measured by making the emitted light of the plurality of irradiation optical fibers into parallel light. An irradiation device;
A condensing optical fiber for propagating transmitted light from the object to be measured, and a condensing lens for condensing the transmitted light from different parts on the object to be measured on the condensing optical fiber, respectively. An irradiation condensing device comprising: a condensing device comprising:
分光分析装置に適用したことを特徴とする
請求項1乃至請求項4のいずれかに記載の照射集光装置。
The irradiation condensing device according to any one of claims 1 to 4, wherein the irradiation condensing device is applied to a spectroscopic analyzer.
JP2007231223A 2007-09-06 2007-09-06 Irradiation condenser Withdrawn JP2009063407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007231223A JP2009063407A (en) 2007-09-06 2007-09-06 Irradiation condenser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007231223A JP2009063407A (en) 2007-09-06 2007-09-06 Irradiation condenser

Publications (1)

Publication Number Publication Date
JP2009063407A true JP2009063407A (en) 2009-03-26

Family

ID=40558108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007231223A Withdrawn JP2009063407A (en) 2007-09-06 2007-09-06 Irradiation condenser

Country Status (1)

Country Link
JP (1) JP2009063407A (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0552739A (en) * 1991-08-27 1993-03-02 Sumitomo Electric Ind Ltd Reflection spectrum measuring apparatus
JPH05288668A (en) * 1992-04-13 1993-11-02 Anelva Corp Dust detector
JPH06160272A (en) * 1992-11-19 1994-06-07 Olympus Optical Co Ltd Optical tomographic imaging system
JPH06317532A (en) * 1993-04-30 1994-11-15 Kazumi Haga Inspection device
JP2001141563A (en) * 1999-11-17 2001-05-25 Toshiba Corp Spectrometry, its device, temperature measuring device, and film pressure measurement device
JP2005265626A (en) * 2004-03-18 2005-09-29 Nokodai Tlo Kk Led lighting unit for spectrum analysis
WO2007044821A1 (en) * 2005-10-11 2007-04-19 Duke University Systems and method for endoscopic angle-resolved low coherence interferometry
JP2007170858A (en) * 2005-12-19 2007-07-05 Fuji Xerox Co Ltd Light scattering amount evaluation device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0552739A (en) * 1991-08-27 1993-03-02 Sumitomo Electric Ind Ltd Reflection spectrum measuring apparatus
JPH05288668A (en) * 1992-04-13 1993-11-02 Anelva Corp Dust detector
JPH06160272A (en) * 1992-11-19 1994-06-07 Olympus Optical Co Ltd Optical tomographic imaging system
JPH06317532A (en) * 1993-04-30 1994-11-15 Kazumi Haga Inspection device
JP2001141563A (en) * 1999-11-17 2001-05-25 Toshiba Corp Spectrometry, its device, temperature measuring device, and film pressure measurement device
JP2005265626A (en) * 2004-03-18 2005-09-29 Nokodai Tlo Kk Led lighting unit for spectrum analysis
WO2007044821A1 (en) * 2005-10-11 2007-04-19 Duke University Systems and method for endoscopic angle-resolved low coherence interferometry
JP2007170858A (en) * 2005-12-19 2007-07-05 Fuji Xerox Co Ltd Light scattering amount evaluation device

Similar Documents

Publication Publication Date Title
EP1830174A3 (en) Multi-channel fluorescence measuring optical system and multi-channel fluorescence sample analyzer
JP6689255B2 (en) Target imaging device, extreme ultraviolet light generation device, and extreme ultraviolet light generation system
ATE554416T1 (en) CALIBRATION DEVICE AND LASER SCANNING MICROSCOPE WITH SUCH A CALIBRATION DEVICE
TWI756306B (en) Optical characteristic measuring apparatus and optical characteristic measuring method
DE502004008546D1 (en) GRID MICROSCOPE WITH EVANESCENT LIGHTING
WO2010025317A3 (en) Single-channel optical processing system for energetic-beam microscopes
WO2001086257A3 (en) Ellipsometer
ATE402405T1 (en) DEVICE FOR MONITORING PARTICLES FLOWING IN A CHIMNEY
JP2009063407A (en) Irradiation condenser
TW200734600A (en) Optical measurement unit for real-time measuring angular error of platform and the method thereof
JP2005301065A5 (en)
JPWO2016174963A1 (en) Microscope equipment
JP5842652B2 (en) Tunable monochromatic light source
WO2006078397A8 (en) Method and system for remote sensing of optical instruments and analysis thereof
EP1403984A3 (en) Laser light source device and surface inspection apparatus employing the same
KR100933101B1 (en) Analysis apparatus
JP2010091428A (en) Scanning optical system
JP2007327904A (en) Reflectance measuring instrument
ATE450808T1 (en) MICROSCOPE LENS SYSTEM
JP2006214900A (en) Raman spectroscopic device and raman spectroscopic method
JP4713391B2 (en) Infrared microscope
WO2010007811A1 (en) Optical unit
JP2014525592A (en) Method and device for combining light beams in a foil
KR102116618B1 (en) Inspection apparatus for surface of optic specimen and controlling method thereof
JP2011203443A (en) Light source device

Legal Events

Date Code Title Description
A621 Written request for application examination

Effective date: 20100512

Free format text: JAPANESE INTERMEDIATE CODE: A621

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120315

A131 Notification of reasons for refusal

Effective date: 20120319

Free format text: JAPANESE INTERMEDIATE CODE: A131

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20120405