JP2009061542A5 - - Google Patents

Claims (8)

A substrate having a substrate gripping portion for holding a substrate and a plurality of arms having the substrate gripping portion at a tip and capable of rotating in a horizontal plane, and transporting the substrate between a plurality of taught positions taught in advance In the transfer robot,
The controller of the substrate transfer robot is
When the plurality of teaching positions are taught, an access standby position for each of the teaching positions is generated, and a plurality of paths from the access standby position to the minimum turning posture of the substrate transfer robot are generated and stored. A substrate transfer robot characterized by   One of the paths from the access standby position to the minimum turning posture of the substrate transfer robot maintains the vector direction of a straight line connecting the turning center of the substrate transfer robot to the rotation center of the substrate gripping portion. The substrate transfer robot according to claim 1, wherein the substrate transfer robot is a route that moves to a minimum turning posture. One of the paths from the access standby position to the minimum turning posture of the substrate transfer robot moves to the minimum turning posture while maintaining the vector direction from the rotation center of the substrate gripping portion to the tip of the substrate gripping portion. claim 1 or 2 substrate transfer robot according to, characterized in that a path for. The substrate transfer robot according to any one of claims 1 to 3 ,
Among the plurality of teaching positions, when a vector from the first teaching position to which the vector from the rotation center of the substrate gripping portion to the tip of the substrate gripping portion is parallel is designated to be conveyed to the second teaching position, Determining whether the substrate can be linearly transferred from the access standby position of the first teaching position to the access standby position of the second teaching position;
If it is determined that the determination is possible, the substrate transfer robot further stores the linear transfer path as a transfer path from the first teaching position to the second teaching position. Said controller, said plurality of each substrate transfer robot according to claim 1 to 4, characterized in that to calculate the conveyance time of the conveying time or the linear transport path of the route. The controller compares the transport times including the transport time of each of the plurality of routes and the transport time of the linear transport route, and selects the route having the shortest transport time. 6. The substrate transfer robot according to claim 5. 7. A substrate comprising: the substrate transfer robot according to claim 1; and at least two substrate storage containers for storing the substrate, wherein the substrate is transferred between the substrate storage containers. Conveying device. A semiconductor manufacturing apparatus comprising the substrate transfer robot according to claim 1.