JP2009058753A - Projection graphic display device using deflection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain twice the scan speed without improving a driving frequency and driving voltage in a mirror part and without making a magnet and yoke or the like large in scale, in a deflection device for deflecting light beam emitted from a light source with a movable mirror that are reciprocatingly rotated. <P>SOLUTION: The movable mirror in the deflection device comprises a V-shaped structure mirror having a first mirror surface 42a and a second mirror surface 42b having a different reflection direction from the first mirror surface 42a in an opposite direction and is symmetrically provided to a movable section 41 with the boundary between a ridge line where the first mirror surface intersects with the second mirror surface and a surface that contains a rotating axis Ax2 of the movable section 41. Accordingly, scanning for two-lines is performed on the first mirror surface 42a during a half-cycle period, that is, the first half of a reciprocating rotational motion of the V-shaped structure mirror, and also scanning for the two-lines is performed on the second mirror surface 42b during the second half thereof, thereby scanning for four-lines is performed during one cycle period of the reciprocating rotational motion of the movable section 41. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a deflecting device that performs high-speed scanning of light emitted from a light source using a movable mirror, and a projection-type image display device using the deflecting device.

  Projection-type display devices on the market currently use ultra-high pressure mercury-type arc tubes and halogen lamps as light sources, but the lifespan of these light sources is on the order of 4,000 to 6,000 hours. When used as a television, lamps have to be replaced in two to three years, which has been a problem.

  Therefore, recently, proposals for using solid state lighting elements such as LEDs and lasers as light sources are increasing. When a solid-state lighting element is used as a light source, the lifetime is considered to be 20,000 hours or more, and there are merits such as excellent color reproducibility from their emission spectrum characteristics. Above all, the laser light source has a narrow emission spectrum width and a wide color gamut, so it is superior to LEDs in color reproducibility. Also, due to the collimating characteristics of the laser light, the light utilization rate in the optical system is improved and the mechanism is downsized. Is said to be the ultimate light source from the perspective that can be expected.

  Among projection-type image display apparatuses using a laser element as a light source, there is one using a scanning method using a deflecting device. FIG. 14 shows a basic configuration of a projection-type image display apparatus using a conventional scanning method. In the projection type image display device, in the light source illumination unit, red, green, and blue (hereinafter, R, G, B) laser elements (hereinafter referred to as LD) 1R, 1G, and 1B are disposed as light sources, and downstream of the light source. The lenses (2R, 2G, 2B) are arranged to form the light beams of each color into collimated light beams. On the exit side of the lenses (2R, 2G, 2B), dichroic mirrors (hereinafter referred to as DM) 3R, 3G, 3B are arranged as optical path combining means to reflect or transmit desired wavelengths, and to emit R, G, B rays. Align on axis Ax1. Here, the upstream of the optical system is the LD light source, and the most downstream is the scanning surface 17.

  The light beam La emitted from the light source illumination unit is deflected in a horizontal direction by a deflecting device 15 including a plane mirror that reciprocates around an axis Ax9, and further includes a plane mirror that reciprocates around an axis Ax10. The light is projected on the scan surface 17 by being deflected in the vertical direction by the deflecting device 16. Specifically, if the reciprocating rotation frequency of the deflecting device 15 is 22 KHz and the reciprocating rotational frequency of the deflecting device 16 is 60 Hz, a high-resolution video display equivalent to a so-called high-definition (HD) TV with 720 vertical resolutions can be performed. The

  In general, a polygon mirror or a galvanometer mirror is used as a deflecting device. However, a high-resolution video display device includes a mirror device using a micro electric mechanical system (hereinafter, MEMS) technology that can control deflection of light at a higher speed. in use.

  FIGS. 15A and 15B show an example of a conventional deflecting device using an electromagnetic force type MEMS. FIG. 15A is a plan view and FIG. 15B is a cross-sectional view along BB. In the deflection device 4 ', a movable portion 41 having a plane mirror 42' formed by Ag, Al, Cu deposition or the like at the center is connected to an annular member 44 on the fixed portion side by a pair of hinges 43a, 43a. The magnets 45 a and 45 b provided on the left and right sides of the annular member 44 and the coil electric wires 46 provided on both sides of the mirror movable portion 41 constitute mirror driving means. Then, an electromagnetic force (Lorentz force) is generated by flowing the current through the coil wire 46 by switching between positive and negative, and the movable portion 41 is driven to reciprocately rotate about the axis Ax2.

  However, in the electromagnetic force type, there is a problem that a magnet, a yoke, and the like are increased in size when high-speed scanning is performed with a large Lorentz force. In addition, there is a problem of life reduction due to metal fatigue accompanying self-heating and twisting. As a proposal for improving the MEMS mirror device used in the deflection device of the projection type image display device, as a technique for increasing the swing angle of the MEMS, for example, as disclosed in Patent Document 1, a light beam emitted from a light source is used as the first MEMS device. The mirror surface and the second mirror surface are irradiated at the same time, and the swing angle improvement or the scan angle improvement that the position of the fulcrum of the movable mirror part is changed as in Patent Document 2, As for the high-speed scanning, there is a degree that can be improved by controlling the resonance frequency by devising the shape, size and material of the movable mirror.

  In the projection type video display device, the necessary performance of the deflection device and the laser light source LD for the target spatial resolution and temporal resolution will be described. When realizing a projection display device with a HD resolution of 1280 × 720 and a frame rate of 60 fps, first, the driving frequency (speed) of the deflecting device must draw (scan) 720 vertical lines 60 times per second. Therefore, 720 × 60 = 43 kHz or more is necessary. As shown in FIG. 15, when the hinges 43a and 43b are located at the central portion of the movable portion 41, two reciprocal lines can be drawn in one cycle, so the substantially necessary drive frequency is 21 times half of 43 kHz. .5 kHz.

  In the laser light source, the time during which one pixel can be irradiated with a laser beam is 1 / (1280 × 720 × 60) = 1 / (55 MHz) sec, and the light of each LD (1R, 1G, 1B) for each period. It is necessary to switch the output, that is, the gradation. Regarding gradation, there are a direct modulation method in which the current applied to the LD light source is variable and an indirect modulation method in which the electric power applied thereto is varied using an AOM (acousto-optic element).

  Further, as another projection means in the scanning method, as shown in FIG. 16, a solid-state light emitting element (1R, 1G, 1B) and a movable mirror array for pixels of micron order called DIGITAL MIRROR DEVICE (hereinafter DMD) are combined. There is what constitutes an image by controlling. Differences from the scanning method will be described below.

In the light source illumination unit, red, green, and blue (R, G, and B) laser elements LD (1R, 1G, and 1B) are disposed as light sources, and lenses (2R, 2G, and 2B) are disposed downstream of the light sources. Are arranged to shape each color beam into a collimated beam. A condenser lens 18, a rod integrator 19, a relay lens 20, and a mirror 21 are disposed on the exit side of the lenses (2R, 2G, 2B). The LD 1 R, 1 G, 1 B and DMD 22 are controlled in light emission timing and deflection direction by horizontal and vertical synchronization signals and image signals, and the LD 1 R emits light in the time zone in which the R image signal is input to the DMD 22. Similarly, the LDs 1G and 1B emit light sequentially in time during which the G and B image signals are input to the DMD 22. As described above, the DMD 22 also sequentially forms R, G, B images, and the R, G, B light beams enter and exit the DMD 22 to form R, G, B image light beams in time sequence. The A projection lens 23 is disposed downstream of the optical path of the DMD 22, and R, G, and B images are projected on the screen 24 in time sequence by the projection lens 23. At this time, each of the R, G, B images projected on the screen 24 is switched over at a human color resolution of 180 Hz or more, that is, one frame (R + G + B) image is switched at a speed of 60 Hz or more. Visible as a color image.
JP 2006-201350 A JP 2003-208420 A

  In the mirror type deflection device using the MEMS technology, when realizing a high-resolution display device having a high resolution of 720, 1080 or higher, a high-definition class, high-speed operation of 21.5 kHz, 33 kHz or more and wide vibrations are possible. In order to realize these, the electrostatic force type requires a voltage of several hundred volts, and a high voltage member must be used, and there is a problem that the peripheral circuit for the device becomes large. .

  The present invention has been made in view of the current situation as described above, and has a double scanning speed without increasing the driving frequency and driving voltage of the mirror section and without increasing the size of the magnet, yoke, or the like. Provided a projection-type image display device that realizes the obtained deflection device and that can be used in a small-sized, high-definition class or higher-resolution by using the deflection device, and that can also provide stereoscopic video display and stereo video display services. The purpose is that.

In order to achieve the above-described problem, a first technical means of the present invention is a deflection apparatus that deflects a light beam incident from a light source by a mirror provided on a movable part that reciprocally rotates.
The mirror is composed of a V-shaped structure mirror having a first mirror surface and a second mirror surface having a reflection direction different from that of the first mirror surface, and the first mirror surface with respect to the movable portion. Are provided symmetrically with respect to a plane including a ridge line intersecting the second mirror surface and the rotation axis of the movable part, and the first half cycle of the first half of the reciprocating rotation of the V-shaped structure mirror. A scan for 2 lines is performed on the mirror surface, and another 2 lines are scanned on the second mirror surface during the latter half of the period, so that the reciprocating motion of the movable part for 4 lines is performed for 4 lines. A feature is that scanning can be performed.

  According to a second technical means, in the first technical means, the V-shaped structure mirror is provided in a planar movable portion of the MEMS.

  According to a third technical means, in the second technical means, the movable portion has an axis orthogonal to the rotation axis, and is rotatable about the axis.

  The fourth technical means is a projection-type image display device, wherein a light source illumination unit that modulates light emission of a solid state light emitting element with a video signal, and first to first scans that horizontally scan light rays emitted from the light source illumination unit. Any one of the technical means, the first auxiliary mirror that reflects the light beam scanned by the first mirror surface of the deflection device, and the second light beam that reflects the light beam scanned by the second mirror surface. And an optical path synthesizing element that matches the optical paths of the light beams reflected by the first and second auxiliary mirrors, and projects the light beams synthesized by the optical path by vertical scanning. .

  A fifth technical means is the fourth technical means, wherein the light beam emitted from the light source illumination unit is incident on the first mirror surface and the second mirror surface of the V-shaped structure mirror at the same time. The driving of the solid state light emitting device is stopped.

  A sixth technical means is the polarization converting element according to the fourth or fifth technical means, wherein the polarization conversion element rotates the polarization direction of the light beam by 90 degrees on the optical path of any one of the first auxiliary mirror and the second auxiliary mirror. Polarized light that is arranged on the light incident side, on the mirror, or on the light emitting side of the auxiliary mirror, and combines the light beam reflected by the first auxiliary mirror and the different polarized light beam reflected by the second auxiliary mirror in the same optical path. A light combining element is arranged.

  A seventh technical means is the technical means according to any one of the fourth to sixth aspects, wherein the light source illumination unit includes a plurality of solid light emitting elements, and the light paths of the light beams emitted from the plurality of solid light emitting elements are made to coincide with each other. An optical path combining element is provided.

  According to an eighth technical means, in the sixth or seventh technical means, the modulated image signals of the light beams reflected by the first mirror surface and the second mirror surface are independently projected as a stereoscopic image. It is characterized by doing so.

  According to a ninth technical means, in the eighth technical means, one line of each of the first polarized image projected from the first auxiliary mirror and the second polarized image projected from the second auxiliary mirror. It is characterized in that it is projected in an overlapping manner.

  A tenth technical means is a projection type video display device using a deflecting device which is any one of the first to third technical means, and is emitted from a light source illumination unit which modulates light emission of a solid state light emitting element with a video signal. And the modulated image signals of the light beams scanned by the first mirror surface and the second mirror surface of the V-shaped structure mirror are made into independent images, respectively, and the first mirror The light beams scanned by the surface and the second mirror surface are each vertically scanned to project the two independent images onto different display areas.

According to the present invention, the following effects can be obtained.
・ Because the movable mirror part of the deflecting device can perform four-line scanning during one cycle of reciprocating rotation, the mirror drive frequency and driving voltage are higher than those of the conventional deflecting device with a flat mirror surface. It is possible to obtain a double scanning speed without increasing the size of the magnet and the yoke.
-By making the mirror of the V-shaped structure symmetrical with respect to the reciprocating vibration axis of the movable part of the deflecting device, it is only necessary to design one side in terms of optical design, shortening the development period, and scanning surface When displaying a line, it becomes easy to control each line length.
-By using the deflection | deviation apparatus of this invention, the projection type video display apparatus which can perform the stereo video display which projects the same or different image | video on two different projection areas easily can be provided.
The scan speed can be doubled despite the simple device configuration equivalent to the conventional device in which the mirror movable part is driven to reciprocate around the rotation axis.
-By providing the V-shaped structure mirror in a movable part that can rotate in two orthogonal axes, only one deflecting device in the projection-type image display device is required, so that the size of the device can be reduced. By using the apparatus, it is possible to provide a projection type video display device that can easily display a stereo video.
-By combining two auxiliary mirrors with the deflection device of the present invention, it becomes possible to synthesize, adjoin, and separate two projection images, and a projection type video display device and projection type stereo video display that can freely change the projection location The device can be easily manufactured.
-By combining the deflecting device of the present invention, two auxiliary mirrors, and an optical path combining element, full high-definition class projection display can be performed at a driving frequency half that of a plane mirror type deflecting device. In addition, since a P-wave image and an S-wave image can be simultaneously projected on the screen by one deflecting device, a projection type capable of providing a stereoscopic video display service by using a polarizing filter (such as glasses) corresponding to each of them. A video display device can be provided.

  Embodiments of the present invention will be described below. First, the configuration and the behavior of light rays will be described with reference to FIG. 1 which shows a basic conceptual diagram of a projection type image display device using a deflection device integrated with a V-shaped structure mirror of the present invention.

  In the light source illumination unit, red, green, and blue laser diode light sources (hereinafter referred to as LDs) 1R, 1G, and 1B are used as light sources, lens groups (2R, 2G, and 2B) are arranged, and LDs (1R, 1G) are disposed. 1B) is collimated. Light rays collimated by the lens groups (2R, 2G, 2B) pass through the same optical path by dichroic mirrors (hereinafter referred to as DM) 3R, 3G, 3B that reflect only light rays having a specific wavelength and transmit other light rays. [I] in the middle is reached. In DM (3R), the red light R is reflected, and in DM (3G), the green light G is reflected and the red light R is transmitted. In DM (3B), the blue ray B is reflected and the red ray R and the green ray G are transmitted. In addition, regarding DM (3R), the light beam behaves similarly in the total reflection mirror.

  In the present embodiment, in order to produce a projection image display device having a display resolution of 1280 × 720 dots and a frame frequency of 60 Hz, the first deflection device 4 is a type that deflects light rays in the horizontal uniaxial direction in the deflection unit. A mirror type MEMS having a driving frequency of 11 kHz was used. As the second deflecting device 7, a light deflecting light beam in one vertical axis direction and having a driving frequency of 60 Hz was used. In addition, each single mode laser diode (hereinafter referred to as LD) was used to determine the arrangement direction so that the light beam reaching the illustration [I] of the polarization part becomes P wave (P polarization).

  In the present embodiment, the behavior of the light beam is as follows. During the first driving half cycle, the light beam emitted from each LD (1R, 1G, 1B) is reflected on the first mirror surface 42a of the V-shaped structure of the first deflecting device 4. The light is horizontally scanned, reflected by the first auxiliary mirror 5 a, passes through the optical path combining element 6 that transmits the P wave, is vertically scanned by the second deflecting device 7, and reaches the screen (scan) plane 8.

  Then, the light beams emitted from the LDs (1R, 1G, 1B) during the remaining driving half cycles are horizontally scanned by the second mirror surface 42b of the V-shaped structure of the first deflecting device 4 to obtain the second auxiliary Incident on the mirror 5b. At this time, a wavelength plate (λ / 2 plate) 9 whose polarization direction is rotated by 90 degrees is inserted on the light emission side of the second auxiliary mirror 5b to convert it into S-polarized light. Reflected by the body thin film forming surface 6a, the traveling direction is changed, the P wave from the first auxiliary mirror 5a travels on the same optical path, and is vertically scanned by the second deflecting device 7 and reaches the scanning surface 8. .

  In the present embodiment, each LD (1R, 1G, 1B) is variably controlled at 1 / (1280 × 720 × 60) sec in order to express the gradation of one pixel. Regarding LD1G, a 632 nm light beam is obtained by combining an SHG element with an infrared LD of 1064 nm. In addition, as a method of changing the P-polarized light of LD (1R, 1G, 1B) to S-polarized light, a method of using a λ / 4 plate for the reflecting surface of the second auxiliary mirror 5b, and incidence of the second auxiliary mirror 5b There is a method of using a λ / 2 plate on the side or the emission side.

  FIG. 2 is a control circuit block diagram for performing signal control for the light source illumination unit and the deflection unit. In the control unit 33, the LD gradation control is performed by the horizontal synchronization signal and the vertical synchronization signal included in the video signal (input). That is, current control is performed, and at the same time, a horizontal deflection device and a vertical deflection device are sequenced, and each control signal and drive voltage are supplied to the light source illumination unit 31 and the deflection unit 32. The image signals are rearranged in advance in accordance with the scan direction at the time of being built in the frame memory. Specifically, when the first line is in the scanning direction from left to right, the image signal of the first line is constructed as it is, and when the second line is from right to left, the image signal of the second line is , Converted to an inverse array and constructed in a frame memory. When the input video signal corresponds to a stereoscopic image, image processing for stereoscopic video display described later is also performed.

  Next, the structure and optical design details of the deflecting device according to the above-described embodiment will be described with reference to FIGS. FIG. 3 shows an example in which a V-shaped structure mirror is provided on a MEMS (MECHANICAL ELECTRO MACHINE SYSTEM) in which one plane movable part vibrates by an electromagnetic (Lorentz) force that controls deflection in one axis direction. 3A is a plan view of the deflecting device, and FIG. 3B is a cross-sectional view taken along line AA in FIG. The V-shaped structure mirror 42 is provided symmetrically with respect to the movable portion 41 with respect to a plane including a ridge line where the first mirror surface 42a and the second mirror surface 42b intersect with the rotation axis Ax2 of the movable portion 41. It has been. A pair of magnets 45a, 45a are symmetrically arranged on the annular member (yoke) 44, which is a fixed part, on the left and right with respect to the rotation axis Ax2, and the planar movable part 41 has a coil around the V-shaped structure mirror 42. The electric wire 46 is formed, and the plane movable part 41 is rotationally driven by controlling the current value applied to the coil electric wire 46. In MEMS, there is a resonance frequency determined by the aforementioned Lorentz force, the material and shape of the movable part, and its own weight. By driving the planar movable part 41 including the V-shaped structure mirror 42 by resonance, a wide swing angle can be obtained with high-speed vibration. can get. The drive frequency of the MEMS used in this embodiment is 11 kHz and the swing angle is ± 15 deg. The V-shaped structure mirror was formed (adhered) to mirror surfaces 42a and 42b with an Ag total reflection thin film. In addition, although the actual V-shaped structure is provided with an ear for attaching to the planar movable portion 41 of the MEMS, it is omitted here. The V-shaped structure provided with the mirror is formed by press working. However, it may be integrally formed at the time of etching processing when a mirror is formed on a triangular prism such as a glass material or a MEMS.

  FIG. 4 is a cross-sectional view of a deflecting device according to the second embodiment of the present invention in which a V-shaped structure mirror is attached to a planar movable part of a MEMS that vibrates around two orthogonal axes. In addition, the same number is attached | subjected about the part which has the same function as the case of FIG. In the case of this embodiment, the 1st movable part 41 in which the V-shaped structure mirror 42 is provided is connected with the 2nd movable part 47 by a pair of hinges 43a and 43a, and the 2nd movable part 47 is a pair of pair. The V-shaped structure mirror 42 is connected to an annular member 44, which is a fixed portion, by hinges 43b and 43b, and is rotatable about two orthogonal axes as rotation axes by a gimbal mechanism. On the annular member 44, a pair of horizontal scanning magnets 45a and 45b and a pair of vertical scanning magnets 45c and 45d are symmetrically arranged in the left and right and up and down directions, respectively, and horizontal scanning coils 46a and 46a. Are arranged around the first movable part 41, and the coils 46b and 46b for vertical scanning are arranged around the second movable part 47, respectively, and constitute driving means for each scanning direction. By using this deflecting device 40, it is possible to provide a stereo video display service, which will be described later, with a small projection type video display device.

  Next, the behavior when the light beam from the laser light source LD is incident on the first mirror surface 42a of the V-shaped structure formed on the MEMS is incident on the second mirror surface 42b of the V-shaped structure according to FIG. This behavior will be described with reference to FIG. Here, the description regarding the vertical scan is omitted.

  FIG. 5 (1) shows the case where the drive current flowing through the coil coil wire 46 (FIG. 3) of the MEMS is 0, and is the behavior of the light beam when the movable part 41 is not rotating (optical angle 0 °). Light rays are simultaneously incident on both mirror surfaces (42a, 42b) of the V-shaped structure, and the light rays are divided into two directions. If this is the case, the image display on the scan plane will be hindered. Therefore, the LD light source is turned off and the LD light beam is emitted onto the screen during the period when the light beam is simultaneously irradiating both mirror surfaces (42a, 42b) of the V-shaped structure. It is preferable not to project. FIG. 5 (2) shows the behavior of the light beam when the amplitude of the current flowing through the coil coil wire 46 of the MEMS increases in a positive region, and when the movable portion 41 starts to rotate. At this time, the light beam from the LD is reflected by the first mirror surface 42a of the V-shaped structure, and the light beam of the LD (1R, 1G, 1B) reaches the screen (white point in the figure). FIG. 5 (3) shows a case where the drive current has a maximum amplitude in the positive region, and the movable portion 41 of the MEMS rotates to the maximum swing angle (+15 deg). At this time, scanning of the first line is completed on the scan surface 8 (between the black point and the white point in the figure). FIG. 5 (4) shows a case where the amplitude of the drive current decreases in the positive region. In addition to the fact that the MEMS movable portion 41 is deflected in the reverse direction, the scan direction of the first line is the reverse direction. To scan. Then, when the amplitude of the drive current becomes zero, the second line scan is completed. The above is the scan state during the half cycle of MEMS, and two lines are scanned on the V-shaped structure first mirror surface 42a.

  FIG. 6 (5) shows the behavior of the light beam when the amplitude of the drive current supplied to the coil coil wire 46 of the MEMS is 0 and the movable portion 41 does not rotate (optical angle 0 °). Similarly to the above, the LD light source is turned off so that the LD light beam is not irradiated onto the screen. FIG. 6 (6) shows the behavior of the light beam when the amplitude of the drive current of the coil coil wire 46 of the MEMS increases in the negative region, and when the movable portion 41 starts to rotate. At this time, the light beam from the LD is scanned by the second mirror surface 42b of the V-shaped mirror, and the light beam of the LD (1R, 1G, 1B) reaches the desired scan surface (screen) 8 (white in the drawing). point). FIG. 6 (7) shows the case where the drive current has a maximum amplitude in the negative region, and the movable portion 41 of the MEMS rotates to the maximum swing angle (−15 deg). At this time, the scanning of the third line is completed on the scanning surface 8 by the second mirror surface 42b of the V-shaped mirror (between the black point and the white point in the drawing). FIG. 6 (8) shows a case where the amplitude of the drive current decreases in the negative region, and the second line 42b of the MEMS V-shaped mirror is deflected in the reverse direction, and the third line described above. Scan in the direction opposite to the scan direction. Then, when the amplitude of the drive current becomes 0, the fourth line scan is completed. In this way, scanning for four lines or projection image display can be performed by both mirror surfaces 42a and 42b of the V-shaped mirror during one MEMS drive period.

  FIG. 7 shows a modification of the deflection device according to the invention. In this modification, the mirror unit in the deflecting device is configured by combining a plane mirror and a V-shaped mirror. In this case, the deflecting device (4-1, 4-2) is a MEMS. A flat mirror 42-1 formed by Ag vapor deposition on the movable part and a V-shaped mirror 42-2 similar to that used in the first embodiment are fixedly arranged on the outgoing light side of the flat mirror 42-1. Configured.

  As for the light source illumination unit, as in FIG. 1, LD (1R, 1G, 1B) is used, lens groups (2R, 2G, 2B) are arranged, and light rays are transmitted on the same optical path by DM (3R, 3G, 3B). 1 to reach [I] in FIG. The light beam from [I] reaches the approximate center on the plane mirror 42-1 in the planar movable part 41 ′ of the MEMS. The light beam scanned by the plane mirror 42-1 is incident on the first mirror surface 42a of the V-shaped structure mirror 42-1 for the first half cycle, and the second half of the V-shaped structure mirror 42-2 is used for the remaining half cycle. Incident on the mirror surface 42b. Since the subsequent light beam behavior is the same as that of the first embodiment, it will be omitted.

Next, details of the optical design of the deflection apparatus according to the present invention will be described with reference to FIG. FIG. 8 shows a state in which the movable part 41 of the MEMS 4 is deflected by θ2 deg from the optical axis Ax5. In the figure, the axis Ax2 is the rotation axis of the movable part 41 of the MEMS 4, and the axis Ax6 is the axis Ax2 and the V-shaped structure mirror. Represents a line connecting the vertices of the face. The angle formed by the first mirror surface 42a of the V-shaped structure mirror 42 and the reference axis Ax4 is θ3, the angle formed by the optical axis Ax5 and the axis Ax6 is θ4, and the first mirror surface 42a of the V-shaped structure 42 and the optical axis. Assuming that the angle formed by Ax5 is θ5 and the normal line Ax7 of the first mirror surface 42a of the V-shaped structure 42, the light beam La travels along the optical axis Ax5 and is reflected by the second mirror surface 42b of the V-shaped structure 42, When reflected at an angle of θy with respect to the optical axis Ax5, θy is determined as follows. That is, the normal line Ax7 is a bisector of θy, and Ax7 is a normal line of the first mirror surface 42a of the V-shaped structure 42.

θy / 2 + θ5 = 90
θy = 2 × (90−θ5) (1)

From triangles T1, T2, and T3

θ3 + θ5 + 90 = 180
θ5 = 90−θ3 (2)

From triangles T2, T3, and T4

θ1 + θ4 + θ3 + 90 = 180
θ3 = 90− (θ1 + θ4) (3)

Also, θ2 and θ4 are deflection angles.

θ4 = θ2 (4)

Therefore, equation (1) is

θy = 2 × [90− (θ1 + θ2)] (5)

Here, assuming that the half angle θ1 = 40 deg of the vertexes of the mirror surfaces 42a, 42b of the V-shaped structure and the maximum swing angle θ2 = 15 deg of the movable part at the time of design,

θy (max) = 94 deg (6)

If the light beam La is incident only on the mirror surface 42a on one side when the deflection angle is 3 deg, the equation (5) is similarly applied.

θy (min) = 70 deg (7)

Therefore, from the equations (6) and (7), the scan angle θy in this case is 94−70 = 24 deg.

  When the horizontal scan angle θy is small, that is, when the angle of view is small, the horizontal dimension of the LD light source diameter is reduced in advance by the lens design and slit by the imaging magnification, and a cylindrical lens, fθ lens, etc. are projected depending on circumstances. By using it together with the lens group, it becomes possible to widen the angle of view.

  Next, referring to FIG. 9, the optical design of the V-shaped structure mirror surfaces (42a, 42b), the auxiliary mirrors (5a, 5b), and the optical path combining element 6 (not shown for convenience) rotating about the axis Ax2 as a rotation axis. Details will be described. The angle formed between the reflected light beam reflected from the first mirror surface 42a of the V-shaped structure and the optical axis Ax5 is θ6, and the angle formed between the light beam incident on the first auxiliary mirror 5a and the reflected light beam is formed. The angle between θ7 and the reflected light beam and the optical axis Ax5 is θ8.

Assuming that the illustrated light beam is a light beam that bisects the scan angle θy (max) −θy (min), θ6 can be calculated from the above equations (6) and (7).
θ6 = θy (min) + [θy (max) −θy (min)] / 2 (8)
= 70 ° + (94 ° -70 °) / 2 = 82 °

The angle formed by the normal Ax8 of the first auxiliary mirror 5a and the optical axis Ax5 is θ9,
Suppose that the first auxiliary mirror 5a is inclined by θ10 with respect to the reference axis Ax4.

θ10 + θ9 = 90 °
θ10 = 90 ° −θ9 (9)

From the relationship of triangles T4, T5, T6

θ6 + θ9 + θ7 / 2 = 180 °
θ9 = 180 ° − (θ6 + θ7 / 2) (10)

Also, from the relationship of triangles T5, T6, and T7, θ6 + θ7 + θ8 = 180 °
θ7 = 180 ° − (θ6 + θ8) (11)
From the above, (9) is
θ10 = 90 ° − [180 ° − (θ6 + θ7 / 2)]
= 90 ° −180 ° + θ6 + [180 ° − (θ6 + θ8)] / 2
= 41 ° −θ8 / 2 (12)

Here, in FIG. 1 and FIG. 7, when designing so that the light beam (the central light beam) vertically enters the light beam incident surface of the optical path combining element 6, θ8 may be set to 45 deg. From
θ10 == 41−45 / 2 = 18.5 deg.

  FIG. 10 is an explanatory diagram of a stereo video display that uses the deflecting device 40 shown in FIG. 4 as the second embodiment and projects two pieces of video information included in the input video signal at different locations. Although the light source illumination unit is omitted, LD (1R, 1G, 1B) is used as in the case of FIG. In FIG. 10A, the V-shaped structure mirror 42 is driven to reciprocate and rotate in two orthogonal directions, so that the images of the first and second lines are projected onto the screen S1. Lines 4 and 4 are projected on the screen S2. Then, the fifth, sixth, ninth, tenth lines,... Are projected on the screen S1, and the seventh, eighth, eleventh, twelfth lines, etc. are projected on the screen S2. In this way, the same or different projection images can be simultaneously formed on two surfaces (the screens S1 and S2) having different walls and columns as shown in FIG. Therefore, by using this deflecting device 40, the number of the deflecting devices in the projection type stereo video display device can be made one, so that the size of the device can be reduced.

  FIG. 11 shows an example of a stereo video display using the deflecting device 4 shown in FIG. 3 as the first embodiment. In the case of this example, as shown in FIG. 11A, the polarizer 4 provided with the V-shaped structure mirror 42 in the movable portion is used for horizontal scanning, and the deflection device 7 for vertical scanning is separately provided. Thus, two auxiliary mirrors 5a and 5b are arranged on the optical path between the deflecting device 4 and the deflecting device 7, respectively. As in the case of FIG. 1, LD (1R, 1G, 1B) is used for the light source illumination unit. In the case of this example as well, as in the case of FIG. 10, the images of the first and second lines are projected on the screen S3, and the third and fourth lines are projected on the screen S4. Then, the fifth, sixth, ninth, tenth lines,... Are projected onto the screen S3, and the seventh, eighth line, eleventh, twelfth lines, etc. are projected onto the screen S4.

  As an application of the stereo image display, for example, as shown in FIG. 11B, a projected image can be formed on two different surfaces (screens S3 and S4) of the vehicle instrument panel, and the positions and angles of the two auxiliary mirrors 5a and 5b. The display position and the display screen size of the screens S3 and S4 can be adjusted.

  Next, an example in which stereoscopic video display is performed using the deflection apparatus according to the present invention will be described with reference to FIGS. Note that, as in the above-described embodiments, the three primary colors LD (1R, 1G, 1B) were used for the light source illumination unit. Light rays from the light source illumination unit sequentially enter the mirror surfaces 42 a and 42 b of the V-shaped structure 42 in the horizontal scanning deflecting device 4. At this time, LD (1R, 1G, 1B) is P-polarized with respect to the V-shaped structure mirror surfaces 42a, 4b, but may be S-polarized.

  The LD (1R, 1G, 1B) is horizontally scanned by the first mirror surface 42a of the V-shaped structure mirror 42 in a half cycle in which the V-shaped structure mirror 42 of the deflecting device 4 reciprocates once. Is reflected by the auxiliary mirror 5 a and enters the optical path combining element 6. The optical path synthesizing element 6 is a so-called polarization beam splitter (PBS), which uses light incident / exit reversely, and the P wave of the light reflected by the first auxiliary mirror 5a remains as it is. To Penetrate.

  The light beam transmitted through the optical path combining element 6 is vertically scanned by the second deflecting device 7 and reaches the screen 8, and the first and second lines are projected. Next, in the remaining half cycle in which the V-shaped structure mirror 42 reciprocates once, LD (1R, 1G, 1B) is horizontally scanned by the second mirror surface 42b of the V-shaped structure mirror 42, and the second Is reflected by the auxiliary mirror 5 b and enters the optical path combining element 6. In the present embodiment, a λ / 4 plate is applied to the mirror surface of the second auxiliary mirror 5b, and the P wave of the LD (1R, 1G, 1B) is emitted from the second auxiliary mirror 5b. , Converted to S wave. As a method of converting the P wave into the S wave, as described in FIG. 1, in addition to the method of providing a λ / 4 plate on the reflection surface of the second auxiliary mirror 5b, the second auxiliary mirror 5b The same effect can be obtained by a method of arranging a λ / 2 plate on the incident side or the emission side.

  The light beam converted into the S wave is incident on the optical path synthesis element 6, reflected by the dielectric thin film forming surface 6a formed inside the polarization beam synthesis element 6, and travels the same optical path as the transmitted P wave, The second scanning device 7 performs vertical scanning, reaches the screen 8 and projects the third line and the fourth line. The screen 8 is subjected to P wave and S wave as shown in FIG. , The image is displayed. Here, when stereoscopic video information is included in the input video signal, if the first filter 11 that transmits the P wave is arranged in front of the left eye of the observer, the first eye and the second line due to the P wave are placed on the left eye. If only the image of the line is visually recognized and the second filter 12 that transmits the S wave is arranged in front of the right eye, only the images of the third line and the fourth line by the S wave are visually recognized by the right eye. Therefore, the second line (P wave) and the third line (S wave) (the fourth line and the fifth line, the sixth line and the seventh line, etc.) display the same image, and the second line In this case, an image taking the parallax in the left eye into consideration and an image taking the parallax in the right eye into consideration in the third line can make the observer recognize a stereoscopic video.

  FIG. 12B shows the drive current 13a applied to the first deflecting device 4 and the second deflecting device 7 when images up to the fourth line are displayed on the screen 8 in FIG. The drive current 13b applied to is shown. One cycle of the drive current 13a is (i)-(v), and when it first shifts to (i)-(ii), that is, when the amplitude of the drive current increases in a positive region, it is displayed on the screen 8. The first line is displayed. When shifting to (ii)-(iii), that is, when the amplitude of the drive current decreases in the positive region, the second line is displayed on the screen 8. When the amplitude is in the positive region, the light beam irradiates the first mirror surface 42 a of the V-shaped structure mirror 42 of the first deflecting device 4. Next, when the amplitude of the drive current 13a during the period (iii)-(iv) increases in the negative region, the third line is displayed on the screen 8, and the drive during the period (iv)-(v) When the current amplitude decreases in the negative region, the fourth line is displayed on the screen 8. When the amplitude is in the negative region, the light beam irradiates the first mirror surface 42 b of the V-shaped structure mirror 42 of the first deflecting device 4. In FIG. 12, since the driving current of the second deflecting device 7 is a sine wave of 30 Hz or 60 Hz, the second line and the third line, which are the same image taking into account the viewing angle of each eye, are one line. By shifting the difference, the same image is shifted, which causes a slight hindrance to the stereoscopic expression ability.

  Therefore, as shown in FIG. 13B, the drive current 14b of the second deflection device 7 is a step wave. That is, after the period of (ii)-(iii) when the display of the second line by the P wave is finished, the voltage value of the drive current 14b is fixed in the period of (iii)-(iv), so that FIG. As in A), the second line can be overlapped and scanned (displayed) by the S wave, and the stereoscopic display performance is improved. 12 and 13, the drive current applied to the first deflecting device 4 and the second deflecting device 7 is a sine wave. However, a rectangular wave, a sawtooth wave, By combining, it is possible to overlap the P wave and the S wave on the same line, and the stereoscopic display performance is improved.

  Also in the case of the present embodiment, conventionally, in order to obtain a frame frequency of 60 Hz with a resolution of 1280 × 720 dots, it was necessary to use a MEMS that can be driven at 22 kHz. A 720P HD image was obtained. Furthermore, if a conventional 22 kHz MEMS is applied to the present invention, an HD image with a horizontal resolution of 1080P can be obtained, and high performance can be achieved up to a maximum horizontal resolution of 1400P.

  As described above, according to the present invention, there is provided a deflecting device capable of obtaining twice the scanning speed without increasing the driving frequency and driving voltage of the mirror section and without increasing the size of the magnet, the yoke and the like. Providing a projection-type video display device that can be realized by using the deflecting device, is small, can handle high resolutions higher than the high-definition class, and can also provide stereoscopic video display and stereo video display services with a simple configuration. Can do. Needless to say, the deflecting device of the present invention can also be used in a scanner.

It is explanatory drawing of the fundamental structure of the projection type video display apparatus using the deflection | deviation apparatus by this invention. It is explanatory drawing about the signal control of the light source illumination part and the deflection | deviation part in the projection type video display apparatus of FIG. It is explanatory drawing which concerns on 1st Embodiment of the deflection | deviation apparatus by this invention. It is explanatory drawing which concerns on 2nd Embodiment of the deflection | deviation apparatus by this invention. It is explanatory drawing about the scan performed in the first half period of the reciprocating rotational motion of the V-shaped structure mirror in the deflection | deviation apparatus of this invention. It is explanatory drawing about the scan performed in the latter half period of the reciprocating rotational motion of the V-shaped structure mirror in the deflection | deviation apparatus of this invention. It is a figure which shows the modification of 1st Embodiment of the deflection | deviation apparatus by this invention. It is explanatory drawing regarding the optical design of the V-shaped structure mirror in embodiment of this invention. It is explanatory drawing regarding an optical design in case an auxiliary | assistant mirror is arrange | positioned downstream of the V-shaped structure mirror in embodiment of this invention. It is explanatory drawing in the case of performing a stereo image display using the deflection | deviation apparatus in the 2nd Embodiment of this invention. It is explanatory drawing in the case of performing a stereo image display combining the deflection | deviation apparatus and auxiliary | assistant mirror in the 1st Embodiment of this invention. It is explanatory drawing about the three-dimensional video display using the deflection | deviation apparatus of this invention. It is explanatory drawing about the method of improving the stereoscopic display performance in the case of performing a stereoscopic display using the deflection | deviation apparatus of this invention. It is explanatory drawing of the projection type display apparatus using the conventional mirror type MEMS and a solid-state lighting element. It is explanatory drawing of the conventional plane mirror type MEMS. It is explanatory drawing of the projection type display apparatus using the conventional pixel type display device and a solid-state lighting element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1R, 1G, 1B ... Solid light emitting element, 2R, 2G, 2B ... Condensing lens, 3R, 3G, 3B ... Dichroic mirror, 4 ... 1st deflection | deviation apparatus, 41 ... Movable part, 42 ... V-shaped structure body mirror, 42a ... first mirror surface, 42b ... second mirror surface, 43a, 43b ... hinge, 44 ... annular member (yoke), 5a, 5b, 5c, 5d ... magnet, 46, 46a, 46b ... coil wire, 5a DESCRIPTION OF SYMBOLS 1st auxiliary | assistant mirror, 5b ... 2nd auxiliary | assistant mirror, 6 ... Optical path composition element, 7 ... 2nd deflection | deviation apparatus, 8 ... Scan surface (screen), 9 ... Wave plate, 11a ... 1st filter (polarization) Type), 11b ... second filter (polarization type), 12a, 13a ... drive current waveform for horizontal scan of MEMS, 12b, 13b ... drive current waveform for vertical scan of MEMS.

Claims (10)

In a deflecting device that deflects light incident from a light source by a mirror provided in a movable part that reciprocally rotates,
The mirror is composed of a V-shaped structure mirror having a first mirror surface and a second mirror surface having a reflection direction different from that of the first mirror surface, and the first mirror surface with respect to the movable portion. Are provided symmetrically with respect to a plane including a ridge line intersecting the second mirror surface and the rotation axis of the movable part, and the first half cycle of the first half of the reciprocating rotation of the V-shaped structure mirror. A scan for 2 lines is performed on the mirror surface, and another 2 lines are scanned on the second mirror surface during the latter half of the period, so that the reciprocating motion of the movable part for 4 lines is performed for 4 lines. A deflecting device characterized in that scanning can be performed.   The deflection apparatus according to claim 1, wherein the V-shaped structure mirror is provided on a planar movable portion of the MEMS.   The deflection apparatus according to claim 2, wherein the movable portion has an axis orthogonal to the rotation axis, and is rotatable about the axis. A light source illumination unit that modulates light emission of a solid state light emitting device with a video signal;
The deflecting device according to any one of claims 1 to 3, wherein the light beam emitted from the light source illumination unit is horizontally scanned.
A first auxiliary mirror that reflects the light beam scanned by the first mirror surface of the deflecting device; a second auxiliary mirror that reflects the light beam scanned by the second mirror surface; An optical path combining element that matches the optical path of the light beam reflected by the auxiliary mirror,
A projection-type image display device, wherein the light beam combined with the optical path is vertically scanned and projected.   The solid-state light emitting device is stopped during a period in which light emitted from the light source illumination unit is simultaneously incident on the first mirror surface and the second mirror surface of the V-shaped structure mirror. Item 5. A projection display apparatus according to Item 4.   A polarization conversion element that rotates the polarization direction of the light beam by 90 degrees on the optical path of either the first auxiliary mirror or the second auxiliary mirror is provided on the light incident side, the mirror, or the light emission side of the auxiliary mirror. 6. A polarized light beam combining element that combines the light beam reflected by the first auxiliary mirror and the different polarized light beams reflected by the second auxiliary mirror in the same optical path. The projection type image display apparatus described in 1.   The light source illumination unit includes a plurality of solid-state light emitting elements, and is provided with an optical path synthesizing element that matches the optical paths of light beams emitted from the plurality of solid-state light emitting elements. The projection type image display apparatus described in 1.   The modulated image signal of the light beam reflected by the first mirror surface and the second mirror surface is projected independently as a three-dimensional image, respectively. Projection-type image display device.   One line of each of the first polarized image projected from the first auxiliary mirror and the second polarized image projected from the second auxiliary mirror is projected in an overlapping manner. Item 9. A projection display apparatus according to Item 8.   Using the deflecting device according to any one of claims 1 to 3, a light beam emitted from a light source illumination unit that modulates light emission of a solid state light emitting element with a video signal is incident on the deflecting device, and the V-shaped structure mirror The modulated image signals of the light beams scanned on the first mirror surface and the second mirror surface are made independent images, respectively, and the light beams scanned on the first mirror surface and the second mirror surface are respectively vertically scanned. A projection-type image display apparatus, wherein the two independent images are projected onto different display areas.

Images