JP2003021803A - Scanning system, projection device and scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scanning system, a projection device and a scanner having a simple mechanism, made small in size, inexpensive and reliable and performing projection with excellent controllability. SOLUTION: The scanner 7 where an A surface 8a and a B surface 8b having a boundary at the center 7a of a rocking shaft form the angle of <180 deg. (for example 110 deg.) is arranged on an optical path from a PLV1 to a screen 31, and light L2 reflected by the PLV1 when voltage is applied is reflected on the A surface 8a of the scanner 7 so as to be guided to the screen 31, and light L2 ' reflected by the PLV1 when the voltage is not applied is made incident on the B surface 8b of the scanner 7 so that an optical path may be changed to other direction. Therefore, the scanner 7 has both a scanning function and a light quantity control function in a projection system, and realizes simplification and miniaturization, then the inexpensive projection device excellent in the controllability is constituted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning system, a projection device and a scanner suitable for a device requiring high-speed performance such as a projection type image device and an electrophotographic printer.

[0002]

2. Description of the Related Art As a system for modulating light from a light source and guiding the modulated light to an image forming surface to project an image, Japanese Patent Nos. 2659458 and 2927545 use an inverse piezoelectric effect of a piezoelectric element. There is disclosed a system in which a light reflection angle is changed by applying a voltage and the light reflection angle is guided to a scanning unit via a clipping unit.

FIG. 12 shows a schematic configuration diagram thereof. The light emitted from the white light source 112 is the first collimation lens 128.
And then enters the three primary color separation unit 114, where R (red),
The G (green) and B (blue) colors are separated and reflected, and the reflected light is incident on the mirror array 132 in the bell-shaped beam expanding section 116 made of a piezoelectric material, and these reflected lights are opened in the aperture of the beam clip 118. After passing through 136, it is incident on a polygonal mirror 154, and its reflected light is guided to the screen via the second collimation lens 124 and the projection lens 126.

However, in this known system,
Since the reflected light is controlled from both sides of this light flux by the clipping means 118 and is guided through the slits (openings) 136, the accuracy of the light quantity adjustment is insufficient, and the means of the light quantity adjustment is complicated. There is a problem of 2). (1) A bell-shaped beam clip mechanism is required, and adjustment with a polygon mirror and a mirror array is complicated and difficult. (2) Due to the bell-shaped beam clip mechanism, the reflected light from the mirror array is partially cut and the efficiency is reduced.

[0005]

On the other hand, the present inventor has proposed in Japanese Patent Application No. 2000-352787 (filed on November 20, 2000) an optical modulator or an optical modulator capable of excellent projection using reflected light or the like. It has already been raised (hereinafter, referred to as prior invention).

According to the invention of the prior application, distortion is generated in the piezoelectric body due to the inverse piezoelectric effect of the light modulating element made of the piezoelectric body provided with the reflecting surface, depending on the presence or absence of voltage application to the piezoelectric body or the magnitude of the voltage. Since the incident light is reflected or diffracted by and is modulated, reflected light or diffracted light in a desired reflection direction is obtained, and analog control (or modulation) and line driving are possible.

FIG. 13 is a diagram showing the projection system. The light modulation element 1 is driven and controlled by the controller 24, and the emitted light L ₁ from the green laser light source 22 is guided through the reflecting mirror 23a, the collimation lens 39, and the reflecting mirror 23b to each pixel of the light modulating element 1. Of the reflected light L ₂ which is modulated by being incident on the mirror surface of No. 1 and is modulated, unnecessary reflected light L ₂ 'is guided to the light absorber 32 by the reflecting mirror 23c and absorbed, and the necessary reflected light L ₂ is optically modulated. The light is emitted from the portion 21.

The light guiding section 28 includes the above-mentioned light modulating section 21.
A blue light source 25 and a red light source 27 having the same configuration as the above are provided with a dedicated green light transmissive reflecting mirror 26a and a dedicated green light and blue light transmissive reflecting mirror 26b, respectively, and are emitted from the light modulator 21. The green light thus transmitted passes through the reflecting mirrors 26a and 26b and is emitted from the light guiding portion 28, and the red and blue lights are emitted from the respective light sources 25 and 27, and then the respective reflecting mirrors 26 are emitted.
The light is reflected by a and 26b and is emitted from the light guiding portion 28, and both are made into strip light rays L ₂ and are incident on the projection lens 29.

The light L ₃ focused by the projection lens 29 is reflected by a polygon mirror 30 as a scanner, scanned on a screen 31, and reflected by each reflection surface 30a of the polygon mirror 30.
₄ is swept on the screen 31, and an image or the like is projected on the screen 31.

FIG. 14 is a diagram showing how the amount of light is variable in this projection system. That is, the mirror surface 3 of the light modulation element 1 is set so that the reflection direction can be changed by an applied voltage at a maximum of about 0.5 degree, the mirror 23c totally reflects when no voltage is applied, and the mirror is applied when the voltage is applied at maximum. 23c is set to a state in which a part of the light is reflected (cut-off) for brightness correction, so that when the intermediate voltage is applied, the mirror 2
Since the amount of light reflected by 3c does not reach the polygon mirror 30, the amount of light can be controlled by an analog amount.

FIG. 15 is a block diagram of the drive control circuit of this projection system. Controller unit 24
The synchronous signal and the corrected data are output to the PLV1 and the mirror scanner driver 38 from the
The PLV1 and the polygon mirror scanner 30 are driven. DSP for various control or modulation signals
(Digital Signal Processor) and PLD (Programmable
Logic Device) can be supported by software, and the hardware optical system and scan system can also be supported without changing the design.

Although the invention of the prior application has the above-mentioned excellent features, as a result of further study by the present inventor, it was found that there are the following problems (1) and (2) to be improved. did. (1) It is difficult to adjust the light amount because a light modulating light shielding plate is required. (2) The volume of the polygon mirror becomes large, and it is difficult to design due to distortion of the mirror surface and life of the motor.

[0013]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a scanning system, a projection device, and a scanner which have a simple mechanism, a small size, a low cost, a high reliability, and a good controllability. To provide.

[0014]

That is, the present invention is a scanning system having a scanner, wherein the scanner has a first surface and a second surface which are adjacent to each other with a swing center as a boundary. , A scanning system configured such that incident light is reflected in a predetermined direction with the first surface as a reflecting surface and is scanned in another direction by the swing.
It is referred to as the scan system of the present invention. ).

According to the scanning system of the present invention, the incident light is reflected in the predetermined direction by the first surface with the center of the rocking as the boundary between the first surface and the second surface, and the rocking causes the other light. Since it is scanned in the direction of, the unnecessary light can be separated by the boundary, and only the necessary light can be reflected on the first surface with sufficient control and can be scanned, and the first surface can be scanned. It is also possible to control the amount of light at the boundary between the second surface and the second surface, and as a result, the usual polygon mirror and light-shielding plate can be omitted,
It is possible to provide an inexpensive scan system that is simple and lightweight.

The present invention also relates to a projection apparatus (hereinafter referred to as the projection apparatus of the present invention) which guides the scanning light by the above-described scanning system of the present invention to the image forming surface for scanning.

According to the projection apparatus of the present invention, since the scanning light of the scanning system of the present invention is guided to the image forming surface for scanning, it is possible to provide a projection apparatus which can achieve the same effect as the scanning system of the present invention.

Further, the present invention has a first surface and a second surface which are adjacent to each other with the center of swing as a boundary, and the incident light is reflected in a predetermined direction with the first surface as a reflecting surface. Configured to be scanned in the other direction by the swing,
The present invention relates to a scanner (hereinafter referred to as a scanner of the present invention).

According to the scanner of the present invention, the scanner is constructed on the basis of the above-described scanning system of the present invention, so that it is possible to provide a scanner having the same effects as those of the scanning system of the present invention.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION In the above-described scan system, projection device and scanner of the present invention, modulated light is made incident on the first surface and reflected, and unnecessary light is directed in another direction on the second surface. It is desirable to reflect, pass through, or absorb.

In this case, it is possible to cause the modulated light having the light source, the light modulation element, and the scanner and arranged by the light modulation elements arranged along the boundary to be incident on the first surface and reflected. desirable.

It is desirable that the light modulation corresponding to the image brightness level for the light modulation element and the scanning by deflection of the incident light be performed simultaneously with the light modulation.

Further, it is desirable that the deflection is performed by the swing by applying a sweep signal to the scanner corresponding to an image signal.

In this case, the angle formed by the first and second surfaces is less than 180 °, preferably 1 ° or more, more preferably 10 ° to 90 °.

The modulated light of each color light from a plurality of the light modulation elements may be reflected on the first surface, and the modulated light of each color is changed by switching the emission color in a single light modulation element. May be reflected on the first surface.

It is desirable that the incident light on the first surface is scanned during both the forward and backward movements of the swing because the light source utilization effect is enhanced by effectively utilizing the blanking period.

Further, by performing the f-θ correction by the time correction of the swing angle of the scanner, it is desirable that the f-θ lens can be omitted and the light amount loss can be suppressed.

Further, a reflecting surface for reflecting light is provided on the piezoelectric body, and the piezoelectric element for reflecting or diffracting the light from the light source on the reflecting surface by the inverse piezoelectric effect of the piezoelectric body to modulate the light is provided. It is desirable to use it as an element.

A movable mirror device or an angle variable mirror device, or another angle variable mirror device, which is composed of the light modulation element, is arranged in line, and the reflected light is guided to the image forming surface by the scanner. The projection device can be configured.

Hereinafter, preferred embodiments of the present invention will be specifically described with reference to the drawings.

The first embodiment of the present invention is compact and simple by omitting the bell-shaped beam clip mechanism in the above-mentioned known projection system and the light-shielding plate mechanism in the prior invention, and performing similar light modulation. In order to realize an inexpensive projection system that is easy to design, manufacture, adjust, maintain, etc., first, a schematic configuration thereof will be described with reference to FIG.

As shown in FIG. 4, the projection apparatus having the scan system of the present embodiment has a light modulation element (not shown) in which the emitted light L ₁ from the white light source 33 is provided in the controllers 24a, 24b, 24c. , PLV: Piezoelectric
Sometimes called Light Valve. ) Reflected on the mirror surface of
Reflected light L converted into color light by the PLV filter
₂ is the A surface 8 as the first surface of the swinging scanner 7.
The light is reflected by a to become the reflected light L ₃ , or is reflected by the B surface 8b as the second surface and the optical path can be changed as unnecessary light. The reflected light L ₃ is guided to the screen 31 via the collimation lens 29 and is scanned on the screen 31 by the swing of the scanner 7.

The controllers 24a, 24b, 24c are arranged at equal distances from the swing center of the scanner 7, and a group of PLVs 1 as shown in FIG. Arranged.

An example of the PLV1 used in this embodiment is shown in FIG. The PLV 1 is composed of a piezoelectric body 2 made of, for example, lead titanate / zirconate (PbTiO ₃ · PbZrO ₃ ), and an external electrode (+) 46 is provided on one side surface (left side in FIG. 2) of the piezoelectric body 2. An internal electrode (+) 46a that extends to the electrode separation groove 48 at the lower end of the body 2 and is connected to this external electrode (+) 46 extends in the direction of the mirror surface 3. Further, an external electrode (−) 47 provided on the other surface (right side in FIG. 2) of the piezoelectric body 2 is extended to the electrode separation groove 48 at the lower end portion of the piezoelectric body 2, and the external electrode (−) 47 is provided. Is further connected to the mirror surface 3 arranged on the upper surface of the piezoelectric body 2, the internal electrode (−) 47a connected to this mirror surface 3 is arranged to face the other internal electrode 46a, and the color filter 4 is arranged on the mirror surface 3. It is provided.

Therefore, in FIG. 4, the emitted light beam L ₁ collimated from the white light source 33 enters the mirror surface 3 of the PLV 1 with the color filter 4 provided in each controller (24a, 24b, 24c) and is reflected. Light L
₁ passes through the color filter 4 twice when it enters the mirror surface 3 and when it reflects, and becomes a color light beam with each filter color and is reflected toward the scanner 7. However, PLV
It is also possible to disperse the incident light to the PLV 1 in advance by a dichroic mirror or the like without providing the filter 4 on 1. Laser light can also be used as the light source, and in this case, the color filter on the mirror surface 3 of the PLV 1 is unnecessary. Further, it is possible to use laser light, which is expected to have high color rendering properties, which is promising in the future.

Since the PLV 1 expands and contracts due to the inverse piezoelectric effect of the piezoelectric body 2, the mirror surface 3 is proportional to the voltage applied to the PLV 1.
The reflection angle of can be changed. Therefore, it is set in advance so that when the applied voltage is applied, the A surface 8a of the scanner 7 and the reflected light L ₂ when no voltage is applied are incident on the B surface 8b of the scanner 7.

As a result, the reflected light L ₂ from the PLV ₁ is incident on the A surface 8a of the scanner 7 which oscillates and makes a pendulum motion, so that the multifunctionalized scanner 7 deflects and modulates the light, and further Enlarged by the projection lens 29,
An image proportional to the voltage applied to the PLV 1 is projected on the screen 31.

Since the three colors of red, green, and blue are aligned with the swing center axis 7a of the scanner 7, the projection centers after reflection are substantially the same, and since all three colors pass through the same optical path, no color shift occurs. . (However, the position of PLV1 is the scanner 7
Since the incident light on the image is affected and the phase shift of the image is likely to occur, it is necessary to adjust the red, green, and blue times by signal processing. )

A PLV that can be used in the embodiment
Another example of the above is shown in FIG. This PLV 1A has a laminated structure in which an aluminum (or gold) film (further, a transparent color filter 4 if necessary) is provided as a mirror surface 3 on the upper surface of a laminated piezoelectric body 2 formed of a piezoelectric material, and a substrate made of ceramics or the like. (Not shown) is laminated on. The number of stacked layers of the stacked piezoelectric body 2 is determined according to the material and thickness of the piezoelectric body, the applied voltage, and the required movable amount, and the stacked piezoelectric body 2 is formed with an arbitrary number of layers.

In this PLV 1A, as shown in FIG. 7A, a single in-line laminated piezoelectric material 2 provided with electrodes (not shown for simplification) is arranged in a pixel group at regular intervals. It is divided as 2 _{1 to} 2 _n . For example, a total of 1024 pixel groups 2 ₁ to 2 _{n each} having a length L of 350 μm and a width W of 150 μm are arranged in-line with an interval of 1 = 50 μm, and these are all cut out from a block made of the same material. They are made of the same material and have the same structure.

In the pixel groups 2 ₁ to 2 _n , the reflected light L ₁ of the incident light L _{1 is changed} by tilting the mirror surface 3 within a range of 0 to 0.5 degrees like a virtual line according to the applied voltage. _Since the direction of ₂ changes, this reflected light amount can be controlled and guided in an analog manner.

Further, another example of the PLV usable in this embodiment is shown in FIGS. Each PLV described above utilizes reflected light that has been optically modulated.
Is for generating diffracted light and utilizing the diffracted light, and has a group of laminated piezoelectric bodies 2 having a mirror surface for reflecting the light and forming a movable portion and a fixed portion for diffracting the light.

That is, this PLV 1B is composed of a large number of pixels 2 divided as shown in FIG.
IX-IX line sectional view), a positive electrode 42a, a laminated piezoelectric substance 2, and a negative electrode 42b arranged on a substrate 18 made of ceramics or the like are laminated in this order in a plurality of stages, and the uppermost surface is made of aluminum or gold. In the structure in which the mirror surface 3 is arranged by vapor deposition, one side end of the positive electrode 42a is connected so as to cover the laminated piezoelectric body 2 and is connected to the copper foil (+) 43a on the substrate surface using solder. One side end of the negative electrode 42b is formed so as to connect the copper foil (−) 43b on the substrate surface and the mirror surface 3 and is joined to the copper foil 43b by the solder 41 so as to face each other. An insulating material 45 is arranged between the electrodes in the enclosed area to insulate them.

The PLV 1B is cut out from the piezoelectric block, and the cut groove width l is 0.
The pixels 5 _{1 to} 5 _n are 648 divided by 5 to 1.0 μm.
0 pixels are arranged, for example, the pixel 5 ₁ is a fixed part and the pixel 5 ₂ is a movable part, and these are alternately arranged and line driven.

As described above, in the present embodiment, for example, the reflected light modulated by the PLVs 1 and 1A shown in FIGS. 6 and 7 and the diffracted light modulated by the PLV 1B shown in FIGS. 8 and 9 are used. You can

FIG. 1 is an enlarged view showing the light traces of the incident light L ₂ on the scanner 7 and the reflected light L ₃ by the scanner 7 in FIG. 4 described above.

That is, the scanner 7 has an A side 8a and a B side 8b.
Both sides 8a and 8b are adjacent to each other with the axis center 7a as a boundary, and the angle θ ₁ formed between the both sides 8a and 8b at the axis center (swing or rotation center) 7a is less than 180 ° (for example, 110 °. ) Is desirable to reduce the return of unnecessary light due to reflection, and is preferably 1 ° or more to maintain the mechanical strength of the shaft and prevent bending. Further, this angle is preferably 10 ° to 90 ° (particularly less than 90 °) in order to further improve the mechanical strength and the prevention of returning light. The incident light L ₂ has an incident angle θ ₂ of 10 with respect to the A surface 8a.
The scanner 7 is incident at 0 ° to 110 °, and the scanner 7 has an axis center 7a.
The operation (swing) angle θ ₃ is, for example, 20 °, and swings along the arrow to a position indicated by a broken line.

Therefore, as described above, by setting the incident light L _{2 to} be incident on the A surface 8a when a voltage is applied and on the B surface 8b when no voltage is applied, as shown in FIG. The incident light L ₂ passing through the optical path 12 at the time is reflected by the A surface 8a of the scanner 7 and travels along the optical path of the reflected light L ₃ ,
When A surface 8a is changed to the broken line position the scanner 7 is swung proceeds the optical path of the reflected light L ₃ '. The A surface 8a may be formed with minute concave surfaces on the axial center side and the peripheral surface side, but in this case, the optical path of the reflected light is slightly deflected inward on both sides of the concave surface, and f-? Correction is possible.

The incident light L ₂ ′ passing through the optical path 13 when no voltage is applied is reflected by the B surface 8 b of the scanner 7 and travels along the optical path of the reflected light L ₃ ″, and the scanner 7 swings to B Surface 8
When b changes to the position of the broken line, it travels along the optical path of the reflected light L ₃ ″ ″.

In FIG. 1, for easy understanding, the optical paths 12 and 13 of the incident light L ₂ with and without the voltage applied are divided into the A surface 8a and the B surface 8b with the axial center 7a of the scanner 7 as a boundary. Although shown separately, in reality, when a voltage is applied, the light is incident on a region including the axial center 7a, unnecessary light is incident on the B surface 8b and the optical path is changed, and necessary light is reflected by the A surface 8a in a predetermined light amount. As a result, the amount of light is controlled. In this way PL
When V1 is analog driven, the required amount of light that has been set is always reflected by simply changing the ratio of incidence on the A surface 8a and the B surface 8b, so that the amount of light guided to the screen is proportional to the applied voltage. It can be changed by the analog amount.

As described above, the scanner 7 is used in this embodiment.
Can also serve as a light shield plate, so unlike the light amount control by a light shield plate, which is difficult to control, the axis center 7a of the scanner 7
Since the reflected light is regulated at the boundary (that is, the edge), the controllability is good.

FIG. 2 shows a drive (swing) mechanism of the scanner 7. The scanner 7 is extended to the shaft 9 of the drive unit 10, and the shaft center 7a of the scanner 7 is fixed in position at the center of the shaft 9 so that no shake occurs.

The inside of the drive unit 10 is, for example, as shown in FIG.
3 as a schematic cross-sectional view taken along the line III-III of FIG. 3, a plurality of permanent magnets 1 serving as rotors around the shaft 9 in the axial direction.
4 is fixedly arranged on the shaft 9, and the number of stators 15 corresponding to the permanent magnets 14 is arranged on the outer side of the shaft 4. Electromagnetic coils 16 for exciting the respective stators 15 are provided in the respective stators 15. The magnetic pole (N, S) is inverted and changed by the control signal.

Each electromagnetic coil 16 and the control unit 17 provided outside the drive unit 10 are connected by a wiring 19, and an image signal is input to the PLV 1 while an input signal (that is, a scanning signal) is input to the control unit 17. A modulation voltage or a pulse width modulation voltage proportional to the brightness level is applied. When the scanning signal is input, the magnetic poles (N, S) of the stator 15 are switched to the (N, S) of the permanent magnets 14, so that the shaft 9 rotates by a predetermined angle, and the scanner 7 connected to the shaft 9 rotates. Swings at an angle of, for example, 20 °, and the desired scanning is performed. In this case, if the swing speed of the scanner 7 is controlled so that the speed is slower than other operations before and after the turning back (returning period) of the swing, correction equivalent to f-θ correction becomes possible, and the screen 31 A normal image is obtained at.

The scanner 7 is, for example, made of a metal having a length of 20 cm, and the A surface 8a is plated or vapor-deposited with a highly reflective substance to enhance the reflectivity, while the B surface 8b is formed.
It is desirable to treat with a light absorber or the like so that the reflected light in 1 is an ineffective light and the scattered light does not enter the projection lens or the like. The angle between the A surface 8a and the B surface 8b is 90 in FIG.
Although the value within the range of 180 ° is taken as an example, the value may be less than 90 °. Further, the illustrated scanner 7 has a cantilever structure with one bearing, but it is not suitable because the reflection position and the amount of light fluctuate when the center 7a shakes while swinging. It is desirable to provide bearings on the side as well.

The scanner 7 can be projected as it is by making the size of the A surface 8a and the B surface 8b and making the longitudinal direction the same as the length of the PLV 1. PL in the width direction
If the width of the mirror surface 3 of V1 (usually 200 to 500 μm) or more does not cause any trouble, it is desirable to widen the core so that the strength can be maintained and thicken the core.

Also, the scanner 7 can be swept in the forward and backward passes by a pendulum movement, which can reduce the loss due to no projection during the flyback period and improve the brightness. However, in this case, signal processing is required on the circuit side. Further, at that time, by controlling the drive of the scanner 7 before and / or after the blanking period by the time correction (correction of the drive amount of the drive system) processing by the electric circuit,
The f-θ correction can be performed without the f-θ lens, the loss of light due to passing through the lens is eliminated, and the deterioration of brightness can be prevented.

As described above, in this embodiment, the scanner 7 simultaneously performs the optical modulation and the deflection, so that the polygon mirror (when the polygon mirror is used, f
(-Θ lens is also required) and a method that uses a bell-shaped beam clip and a light shield plate is much simpler and has an advantage that it is easy to reduce the size and weight.

As described above, the scanner 7 of the present embodiment
Is to prevent the scattered light from being scattered by treating it with a light absorber or the like without reflecting the invalid light by making the invalid light incident on the B surface 8b. Since it only needs to be manufactured, it is lightweight and can be manufactured at low cost. Further, in FIG. 1, the light trace with respect to the applied voltage of PLV can be reversed (that is, reflected by the B surface 8b).

FIG. 5 shows a block diagram of the drive control circuit of the projection apparatus of this embodiment. The controller 24 outputs the synchronization signal and the corrected data to the PLV1 and the mirror scanner driver 38, and the PL
V1 and the scanner 7 are driven. Then, as in the previous application, the DSP for such various control or modulation signals is used.
(Digital Signal Processor) and PLD (Programmable
Logic Device) can be supported by software, and the hardware optical system and scan system can also be supported without changing the design.

As described above, according to the present embodiment, P
Light reflected from the LV 1 and incident on the scanner 7 is reflected on the A surface 8a of the oscillating scanner 7 and guided to the screen 31, so that in addition to the effects described above, the following (1) to (6) It is possible to further exhibit the effect shown in (3), and it is possible to solve the problems in the above-described conventional system and prior invention. (1) Since the bell-shaped beam clip and the light shielding plate are not required, the mechanism is simplified and the position adjustment of each component is facilitated. (2) A thick polygon mirror becomes difficult to make as the volume becomes large.
Since only one of the surfaces 8a needs to maintain the mirror surface precision, the manufacturing is simplified, and the reflection efficiency and the angle accuracy of the B surface 8b do not affect the performance. (3) Since the widths of the A surface and the B surface can be narrowed, the weight is light, the load on the drive mechanism is small, and the reliability is improved. (4) Since it is not necessary to match the three-color reflected light from the PLV on one axis, a dichroic mirror is not needed. (5) The light loss seen in the bell-shaped beam clip does not occur. (6) Since there is no building-shaped beam clip or light-shielding plate, PL
The distance between the V and the scanner can be reduced, the optical path can be shortened, and the size can be further reduced.

FIG. 10 shows a second embodiment of the present invention.

That is, in the scanner 7A, the angle formed by the A surface 8a and the B surface 8b 'is within the range of 1 ° to 90 °, and the scanner 7A is not bent (for example, 15 °).
Is formed at an acute angle (the swing angle around the shaft center 7a is within 20 ° described above). Therefore, as shown in the figure, the incident light L ₂ passing through the optical path 12 is A as in the case of FIG.
It is reflected by the surface 8a, but the incident light L ₂ passing through the optical path 13 'is the axial center 7a (surface 8a-8b' straight in contact with one end of the luminous flux to the edge between), as it passes through.

Also by this, the light when no voltage is applied or the unnecessary light L ₂ can be effectively separated from the necessary reflected light L ₂ . That is, since the unnecessary light L ₂ 'is not reflected at all, its separation efficiency is improved. Moreover, since the scanner 7A can be made thin, it is light in weight, and in this respect as well, the shake of the swing center becomes small. However, when the angle formed by the A surface 8a and the B surface 8b 'is made small as described above, it is necessary to provide the scanner 7A with such strength as not to bend.

Further, FIG. 11 shows a third embodiment of the present invention.

This example is based on the scanner 7 of the above embodiment.
Instead of the above, a silicon micro optical scanner 35 is used. That is, the reflecting surface 37 and the light absorbing surface 39 are on the same plane supported by the torsion shaft 36.
It is formed with a center line 35a connecting the torsion shafts 36, 36 as a boundary, and when a current is applied to the coil 40 while applying a magnetic field, a torque is generated to oscillate.

As a result, the light on the optical path 12 in FIG.
By making the light incident on the beam 9, the light can be separated and necessary light can be guided to the screen, and the same function as in the above-described embodiment can be achieved.

Further, the scanner 35 is a mirror such as a silicon micro-optical scanner which is the latest device, which has the same pendulum motion, a reflecting surface 37 corresponding to the A surface 8a of the scanner 7 in FIG. By providing the light absorbing surface 39 corresponding to, low consumption, high durability, and ultra lightweight can be achieved.

The above-described embodiment can be modified based on the technical idea of the present invention.

For example, although the scanner 7 of the above-described first embodiment forms the angle formed by the A surface and the B surface having a boundary at the axis center 7a to less than 180 °, the B surface 8b is subjected to the light absorption processing. It is also possible to make it 180 ° or more by applying it. In addition, in the above-described second embodiment, the shaft center 7
The edge portion between the A surface 8a and the B surface 8b 'which are at the boundary of a may be cut off to provide this cut surface as an additional B surface, for example, a total of three surfaces may be formed. It is possible to increase the strength of the scanner 7A when the angle formed by the B surface is formed to be an acute angle.

In the scanner of each of the above-mentioned embodiments, the light shielding plate 23c in FIGS. 13 and 14 can be omitted, and the scanner can be replaced with the polygon mirror 30 and arranged at the same position.

The shape of the scanner used in the above-mentioned embodiment, the driving method and its mechanism, the light source of the modulated light, and the like are not limited to those in the embodiment, and can be appropriately implemented.

[0073]

As described above, in the scanning system, the projection device and the scanner of the present invention, the center of swinging is the boundary between the first surface and the second surface, and the incident light is determined by the first surface. Since it is reflected in one direction and scanned in the other direction by its swinging, unnecessary light is separated by the boundary, and only the necessary light is reflected on the first surface in a sufficient amount and with good controllability, and scanning is performed. In addition, the light quantity can be controlled at the boundary between the first surface and the second surface, and as a result, the general polygon mirror and the light shielding plate can be omitted to simplify, reduce the weight, and reduce the cost. A scan system and a projection device can be provided.

[Brief description of drawings]

FIG. 1 is a schematic view showing a scanner according to a first embodiment of the present invention together with an optical path of incident / reflected light.

FIG. 2 is a perspective view showing the scanner and its swing mechanism.

FIG. 3 is a schematic cross-sectional view taken along the line III-III in FIG.

FIG. 4 is a schematic diagram of a projection device according to an embodiment of the present invention.

FIG. 5 is a block diagram showing a drive control circuit of the projection apparatus.

FIG. 6 is a diagram showing an example of a PLV used in the scan system of the same.

FIG. 7 is a diagram showing another example of the PLV.

FIG. 8 is a diagram showing still another example of the PLV.

9 is a sectional view taken along line IX-IX in FIG.

FIG. 10 is a schematic diagram showing the scanner according to the second embodiment of the present invention together with the optical paths of incident / reflected light.

FIG. 11 is a schematic diagram showing a scanner according to a third embodiment of the present invention.

FIG. 12 is a diagram showing an example of a projection system according to a conventional example.

FIG. 13 is a diagram showing a schematic configuration of a projection system in a prior invention.

FIG. 14 is a diagram showing variable light amount in the projection system.

FIG. 15 is a block diagram showing a drive control circuit of the projection system.

[Explanation of symbols]

1, 1B ... Optical modulation element (piezoelectric element), 2 ... Multilayer piezoelectric body,
2 _{1 to} 2 _n , 5 _{1 to} 5 _n ... Pixel, 3 ... Mirror surface (negative electrode), 4
... Color filter, 7, 7A ... Scanner, 7a ... Shaft center (swing center), 8a ... A surface (first surface), 8b, 8
b '... B side (2nd surface), 9 ... axis, 10 ... drive part, 12
... Optical path when voltage is applied, 13 ... Optical path when voltage is not applied, 14
... permanent magnet, 15 ... stator, 16 ... coil, 17 ... control section, 18 ... substrate, 19 ... wiring, 20 ... light modulator, 2
DESCRIPTION OF SYMBOLS 1 ... Optical modulator, 22 ... Green laser light source, 23a, 23
b, 23c, 26a, 26b ... Reflecting mirror, 24, 24a,
24b, 24c ... Controller, 25 ... Blue light source, 27
... red light source, 29 ... projection lens, 30 ... polygon mirror (mirror scanner), 30a ... reflective surface,
31 ... Screen, 32 ... Light absorber, 33 ... Light source, 35
... Silicon micro optical scanner, 36 ... Twist axis, 37 ... Reflecting surface, 38 ... Mirror scanner driver, 39 ... Light absorbing surface, 40 ... Coil, 41 ... Solder, 4
2a ... Electrode +, 42b ... Electrode-, 43 ... Copper foil, 45 ... Insulating material, 46 ... External electrode (+), 47 ... External electrode (-),
48 ... Separation groove, L ... Element length, L ₁ ... Emitted light (or incident light), L _{2 to} L ₄ ... Reflected light (or incident light), I ... Interval,
W: element width, θ ₁ ... angle formed by A surface and B surface, θ ₂ ... incident angle, θ ₃ ... operation (swing) angle

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2H045 AB02 AB16 AB62 AB81 DA12                       DA31                 5C058 BA35 EA02 EA13 EA25

Claims (24)

[Claims] 1. A scanning system having a scanner, wherein the scanner has a first surface and a second surface which are adjacent to each other with a swing center as a boundary, and incident light passes through the first surface. A scanning system configured to be reflected in a predetermined direction as a reflecting surface and to be scanned in another direction by the swing. 2. The modulated light is incident on the first surface to be reflected, and unnecessary light is reflected, passed or absorbed in another direction on the second surface. Scanning system. 3. A light source, a light modulation element, and the scanner, wherein the modulated light by the light modulation element arranged along the boundary is incident on the first surface and reflected.
The scanning system according to claim 1. 4. The scanning system according to claim 3, wherein the light modulation corresponding to the image brightness level to the light modulation element and the scanning by deflecting the incident light are performed simultaneously with the light modulation. 5. The scanning system according to claim 4, wherein the deflection is performed by the oscillation caused by application of a sweep signal to the scanner corresponding to an image signal. 6. The angle formed by the first and second surfaces is 18
The scanning system of claim 1, which is less than 0 °. 7. The scan system according to claim 3, wherein the modulated light of each color light from the plurality of light modulation elements is reflected by the first surface. 8. The scanning system according to claim 3, wherein the first surface reflects the modulated light of each color by switching the emission color of the single light modulation element. 9. The first movement during both forward and backward movements of the swing.
The scanning system according to claim 1, wherein the scanning system scans the reflected light from the surface. 10. The scanning system according to claim 1, wherein f-θ correction is performed by time correction of a swing angle of the scanner. 11. A piezoelectric body is provided with a reflecting surface for reflecting light,
The scan system according to claim 3, wherein a piezoelectric element that reflects or diffracts light from the light source on the reflection surface by the inverse piezoelectric effect of the piezoelectric body and modulates the light is used as the light modulation element. 12. A projection device that guides scanning light by the scanning system according to claim 1 to an image forming surface to perform scanning. 13. A movable mirror device or an angle variable mirror device comprising the light modulation element, or another angle variable mirror device is arranged in line.
The projection device according to claim 12, wherein the reflected light is guided to the image forming surface by the scanner. 14. A first surface and a second surface which are adjacent to each other with a center of swing as a boundary, and incident light is reflected in a predetermined direction by using the first surface as a reflecting surface and is caused by the swing. A scanner configured to scan in the other direction. 15. The method according to claim 14, wherein the modulated light is incident on the first surface and is reflected, and unnecessary light is reflected, passed through, or absorbed in another direction on the second surface. scanner. 16. The scanner according to claim 14, wherein the modulated light by the light modulation elements arranged along the boundary is incident on the first surface and reflected. 17. The scanner according to claim 16, wherein the light modulation corresponding to the image brightness level to the light modulation element and the scanning by the deflection of the incident light are performed simultaneously with the light modulation. 18. The deflection is performed by the oscillation caused by applying a sweep signal corresponding to an image signal.
Scanner described in. 19. The angle formed by the first and second surfaces is 1
The scanner of claim 14, which is less than 80 °. 20. The scanner according to claim 16, wherein the modulated lights of the respective color lights from the plurality of light modulation elements are reflected by the first surface. 21. The scanner according to claim 16, wherein the modulated light of each color due to the switching of the emission color in the single light modulation element is reflected by the first surface. 22. The scanner according to claim 14, wherein the reflected light from the first surface is scanned during both forward and backward movements of the swing. 23. The scanner according to claim 14, wherein the f-θ correction is performed by time correction of the swing angle. 24. A piezoelectric body is provided with a reflecting surface for reflecting light,
17. The scanner according to claim 16, wherein a piezoelectric element that reflects or diffracts light from the light source on the reflection surface by the inverse piezoelectric effect of the piezoelectric body and modulates the light is used as the light modulation element.