JP2009048208A - Method for manufacturing inclined structure and mold matrix manufactured by the method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an inclined face of an inclined structure with high accuracy. <P>SOLUTION: A photoresist layer 10, an aluminum film 20 and a glass substrate 30 are integratedly prepared, and the photoresist layer 10 is irradiated with ultra-violet light UV through a pinhole 40a to form concentric annular exposure regions 11a, 12a, 13a, while the glass substrate 30 inclined from a horizontal plane is rotated around a center line CL. After the annular exposure regions 11a, 12a, 13a are removed to form multiple annular apertures 21, 22, 23 in the aluminum film 20, the photoresist layer 10 is irradiated with the ultraviolet light UV at an incident angle of 0° through the multiple annular apertures 21, 22, 23 from the glass substrate 30 side to form annular exposure regions 11b, 12b, 13b in the photoresist layer 10, and the annular exposure regions 11b, 12b, 13b are removed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a micropart having an inclined structure and a mold die manufactured by this method.

  In order to manufacture a micro component having a structure that is inclined toward the center of the lens, such as a Fresnel lens, a photolithographic technique in which exposure is performed using a cutting process by an NC machine tool or a gray scale mask is used. In three-dimensional microfabrication using a gray scale mask whose light transmittance changes continuously in the surface direction of the sheet, this gray scale mask is brought into contact with a photoresist layer formed on a substrate, and the photoresist layer is formed through the gray scale mask. Irradiate with ultraviolet light. Since the etching rate of the photoresist layer increases in proportion to the exposure amount, if etching is performed after exposure, an inclination can be formed on the surface according to the exposure amount of ultraviolet light (see, for example, Patent Document 1).

Japanese Patent Laying-Open No. 2003-15275 (pages 2, 5 and 6)

  In the three-dimensional microfabrication using the gray scale mask of Patent Document 1 described above, in order to etch the exposed photoresist layer with an etching depth that is exactly proportional to the grayscale mask's light and shade distribution, the photoresist material and etching Conditions and the like must be strictly controlled, and there is a problem that it is difficult to form the inclined surface with high accuracy.

  (1) In order to solve the above problems, the manufacturing method of the inclined structure according to the first aspect of the present invention includes a step of forming a metal film on a transparent substrate and a photosensitive resin layer on the metal film. A process and a photosensitive resin layer and a light shielding member having a minute opening are arranged close to each other, and the transparent substrate is rotated around a center line parallel to the normal, while the normal and the predetermined inclination angle are passed through the minute opening. A first exposure step in which the photosensitive resin layer is partially exposed in a trapezoidal cone by irradiating with exposure light, and a trapezoidal cone-shaped partial region of the photosensitive resin layer exposed in the first exposure step Removing the trapezoidal conical cylindrical partial region by dissolving and removing only the removed metal film to form a ring-shaped opening pattern in the metal film, and masking the metal film on which the ring-shaped opening pattern is formed Exposure light perpendicular to the photosensitive resin layer from the transparent substrate side Performing a second exposure step of partially exposing the photosensitive resin layer in a cylindrical shape by irradiation, and a step of removing the cylindrical partial region of the photosensitive resin layer exposed in the second exposure step; It is characterized by.

(2) The manufacturing method of the inclined structure of the invention according to claim 2 includes a step of forming a metal film on a transparent substrate, a step of forming multiple annular zone opening patterns concentrically on the metal film, The step of forming a photosensitive resin layer on the transparent substrate and a light shielding member having a minute opening are disposed in close proximity to each other, and the transparent substrate is rotated around a center line parallel to the normal line while the minute opening and the transparent A first exposure step of partially exposing the photosensitive resin layer in the shape of a trapezoidal cone by irradiating exposure light at a normal angle and a predetermined inclination angle through a ring-shaped opening pattern of the substrate and the metal film; The step of removing the trapezoidal cone-shaped partial region of the photosensitive resin layer exposed in the process, and exposing the exposure light perpendicularly to the photosensitive resin layer from the transparent substrate side using the metal film on which the ring-shaped opening pattern is formed as a mask By irradiating the photosensitive resin layer And performing a second exposure step of partial exposure to the tubular, and removing the cylindrical partial area of the second photosensitive resin layer which is exposed in the exposure step.
(3) The manufacturing method of the inclined structure according to the invention of claim 3 is the manufacturing method of the inclined structure according to claim 1 or 2, wherein the first exposure step uses a microscopic aperture and a photosensitive resin layer as the method. You may repeat by moving relatively along the plane orthogonal to a line.
According to a fourth aspect of the present invention, there is provided a method for manufacturing a tilted structure according to the third aspect of the present invention, wherein the first exposure step includes the step of relative movement between the minute opening and the photosensitive resin layer. By changing the predetermined inclination angle, the inclination angle of the trapezoidal conical cylinder may be made different.

(4) The manufacturing method of the inclined structure of the invention according to claim 5 includes a step of forming a photosensitive resin layer on a transparent substrate, and a transparent substrate while rotating the transparent substrate around a center line parallel to the normal line. By exposing the photosensitive resin layer to the photosensitive resin layer at a predetermined incident angle so that the light is condensed at a predetermined condensing position on the boundary surface between the substrate and the photosensitive resin layer, the photosensitive resin layer is formed into a trapezoidal conical cylindrical shape. A first exposure step for partial exposure, and a photosensitive resin layer in which the incident angle of exposure light is set to approximately 0 ° so that the transparent substrate is rotated around a center line parallel to the normal line and condensed at a condensing position. , The second exposure step of partially exposing the photosensitive resin layer in a cylindrical shape, and the step of removing the partial region of the photosensitive resin layer exposed in the first and second exposure steps. It is characterized by that.
According to a sixth aspect of the present invention, there is provided a method for manufacturing a tilted structure according to the fifth aspect of the present invention, wherein the first and second exposure steps may be repeated by changing a predetermined light condensing position. .
According to a seventh aspect of the present invention, there is provided a tilted structure manufacturing method according to the sixth aspect of the present invention, wherein the first exposure step sets a predetermined incident angle every time a predetermined condensing position is changed. By changing, the inclined surface angles of the trapezoidal conical cylinders can be made different.

  (5) The manufacturing method of the inclined structure of the invention according to claim 8 includes a step of forming a photosensitive resin layer on a transparent substrate, and an outer periphery of a plano-convex lens having a plurality of openings arranged in the radial direction on the plane side A process in which a center line parallel to the normal line of the transparent substrate is aligned with an extension line obtained by extending one point in the optical axis direction, and a photosensitive resin layer is disposed opposite to the plano-convex lens at a predetermined interval, and the transparent substrate is centered. Corresponding to the first exposure process in which the photosensitive resin layer is partially exposed in multiple trapezoidal conical cylinders by irradiating exposure light through a plurality of openings of the plano-convex lens while rotating around, and a plurality of openings of the plano-convex lens The center line parallel to the normal line of the transparent substrate is aligned with the extension line extending in the optical axis direction at one point on the outer periphery of the transparent flat plate having a plurality of openings at the position where the photosensitive resin layer is spaced at a predetermined interval. And the step of arranging the transparent substrate at the center line The photosensitive resin layer was exposed in a cylindrical exposure by irradiating exposure light through a plurality of openings in the transparent flat plate while rotating in the first and second exposure steps. And a step of removing a partial region of the photosensitive resin layer.

(6) According to a ninth aspect of the present invention, there is provided a mold mother die comprising an inclined structure formed by the manufacturing method according to any one of the first to fourth aspects on a surface of a metal film. .
According to a tenth aspect of the present invention, there is provided a mold base having an inclined structure manufactured by the manufacturing method according to any one of the fifth to eighth aspects.
According to an eleventh aspect of the present invention, there is provided a mold mother die characterized in that the inclined structure produced by the manufacturing method according to the fourth aspect has a Fresnel lens shape.
A mold according to a twelfth aspect of the present invention is a mold produced by transferring the mold master according to the ninth or tenth aspect.
A Fresnel lens mold according to a thirteenth aspect of the present invention is a Fresnel lens mold manufactured by transferring the mold base of the eleventh aspect.
A micro Fresnel lens according to a fourteenth aspect of the present invention is manufactured by the Fresnel lens mold according to the thirteenth aspect.

  According to the present invention, the photosensitive resin layer rotating around the center line is irradiated with exposure light at a predetermined inclination angle so that the photosensitive resin layer is partially exposed in a ring shape. An inclined surface corresponding to the inclination angle can be formed on the resin layer with high accuracy. In addition, by using an inclined structure having such an inclined surface as a mold mother die, an inclined surface can be formed with high accuracy in a die manufactured from this mother die.

  Hereinafter, the manufacturing method of the inclined structure by embodiment of this invention is demonstrated, referring FIGS.

<First Embodiment>
FIG. 1 is a cross-sectional view schematically showing the structure of a Fresnel lens matrix manufactured by the manufacturing method according to the first embodiment of the present invention. In the Fresnel lens matrix 1, the photoresist layer 10 having an inclined structure, the aluminum film 20 </ b> A, and the glass substrate 30 are integrated, and has a rotationally symmetric shape with respect to a center line CL perpendicular to the glass substrate 30. The photoresist layer 10 is composed of ring-shaped photoresists 11 to 15, and the inclined surface of the photoresist 11 closest to the center line CL is the gradual, and the inclined surface becomes steeper as the distance from the center line CL increases. It has the function of a convex lens with positive power. The aluminum film 20 </ b> A has a pattern of concentric and multiple ring-shaped openings 21 to 24.

FIG. 2 is a diagram for explaining a manufacturing process of the Fresnel lens mother die 1 of FIG. 1, and (a) to (j) are diagrams illustrating the order of the processes. Hereinafter, in the figure, the left-right direction is referred to as horizontal and the up-down direction is referred to as vertical.
As shown in FIG. 2A, an aluminum film 20 having a thickness of about 1 μm is formed on a glass substrate 30 by a sputtering method, and a positive photoresist layer 10 having a thickness of about 20 μm is coated on the aluminum film 20. .

As shown in FIG. 2B, the glass substrate 30 on which the aluminum film 20 and the photoresist layer 10 are formed is inclined at an angle θ1 from the horizontal plane, and a mask 40 having pinholes 40a is disposed close to the photoresist layer 10. The photoresist layer 10 is irradiated with ultraviolet light UV from the top through the pinhole 40a. That is, the incident angle of the ultraviolet light UV to the photoresist layer 10 is θ1, and the exposure region 11a by the irradiation is linear.
As shown in FIG. 2C, when the ultraviolet light UV is irradiated while rotating the glass substrate 30 around the center line CL, the exposure region 11 becomes a ring shape. More specifically, the ring-shaped exposure region 11 has a trapezoidal cone shape obtained by cutting the head of the cone tube.

As shown in FIG. 2D, the glass substrate 30 is inclined by an angle θ2 (<θ1) from the horizontal plane, and the mask 40 is slid from the position of FIG. 2C in the X direction, which is the radial direction of the glass substrate 30. Then, when the photoresist layer 10 is irradiated with ultraviolet light UV from above through the pinhole 40a, a linear exposure region 12a is formed.
As shown in FIG. 2E, the glass substrate 30 is irradiated with ultraviolet light UV while rotating around the center line CL to form a ring-shaped exposure region 12a concentric with the ring-shaped exposure region 11a. Since the ring-shaped exposure region 12a has an angle θ2 <θ1, the inclined surface is steeper than the ring-shaped exposure region 11a. The ring-shaped exposure region 12a has a trapezoidal conical cylinder shape as with the ring-shaped exposure region 11a.

FIG. 2F similarly shows a state in which the ring-shaped exposure region 13a is formed and the partial exposure of the concentric ring-shaped exposure regions 11a to 13a is completed.
As shown in FIG. 2G, the ring-shaped exposure regions 11a to 13a are dissolved and removed.
As shown in FIG. 2H, the etching solution is brought into contact with the aluminum film 20 through the dissolved and removed space, and the aluminum film 20 in the contact portion is dissolved and removed. The aluminum film 20 is formed with concentric and multiple ring-shaped openings 21, 22, and 23. The aluminum film 20 having such an opening pattern is used as the aluminum film 20A below.

As shown in FIG. 2I, when the ultraviolet light UV is irradiated to the photoresist layer 10 from the glass substrate 30 side through the ring-shaped openings 21, 22, 23 of the aluminum film 20A at an incident angle of 0 °, the photoresist layer 10 is irradiated. Ring-shaped exposure regions 11b, 12b, and 13b are formed. Each of the ring-shaped exposure areas 11b, 12b, 13b is cylindrical.
As shown in FIG. 2 (j), when the ring-shaped exposure regions 11b, 12b, and 13b are dissolved and removed, the Fresnel lens matrix 1 is completed. This process will be described in detail with reference to FIG.

  FIG. 3 is a partial cross-sectional view schematically showing the process of dissolving and removing the photoresist layer 10 of FIG. When the ring-shaped exposed regions 11b, 12b, and 13b formed in the process of FIG. 2 (i) are dissolved and removed, the unexposed regions 11c, 12c, and 13c of the photoresist layer 10 are also detached and the photoresist layer 10 remains. The regions are only ring-shaped regions 11, 12, and 13, and the Fresnel lens structure is completed.

  In the present embodiment, the ring-shaped exposure regions 11a, 12a, and 13a are formed in the first exposure process shown in FIGS. The angle can be manufactured with high accuracy. Further, by changing the inclination angles θ1 and θ2 of the glass substrate 30, the angle of the inclined surface of the Fresnel lens matrix can be freely changed.

  A method for producing a mold from the Fresnel lens master 1 will be described. On the surface of the photoresist layer 10 composed of the ring-shaped regions 11, 12, and 13 of the Fresnel lens master block 1, titanium and palladium are continuously formed as a base metal by a sputtering method. A nickel layer is deposited thickly on the two-layer film of titanium and palladium by electroplating, and the mold is manufactured by removing the Fresnel lens matrix 1. An electroless plating method may be used instead of the electroplating method.

  In order to produce a plastic micro Fresnel lens from this mold, a general manufacturing method is used in which a plastic material in a molten or fluid state is processed by injection molding, compression molding, extrusion molding, ultraviolet curing, or the like. In particular, the injection molding is suitable for processing a high-precision part having a complicated shape as compared with other molding methods, and is excellent in the dimensional stability of the part. In addition, the current injection molding machine is automated in production and can be mass-produced. Resin materials used for injection molding include thermoplastic resins such as PMMA (polymethyl methacrylate), PS (polystyrene), ABS resin, PC (polycarbonate), PET (polyethylene terephthalate), phenol resin, unsaturated polyester resin, There are thermosetting resins such as epoxy resins. For example, a glass mold method is used for the production of the glass micro Fresnel lens.

<Second Embodiment>
FIG. 4 is a diagram for explaining a manufacturing process of a Fresnel lens mother die according to the second embodiment of the present invention. In the present embodiment, components corresponding to the components and regions described in the first embodiment are denoted by the same reference numerals.

  FIG. 4A shows a state in which the aluminum film 20 is formed on the glass substrate 30 by the sputtering method. Etching is performed on the aluminum film 20 using a mask having multiple ring-shaped openings, and as shown in FIG. 4B, multiple ring-shaped openings 21, 22, and 23 having concentric center lines CL are formed. After forming the patterned aluminum film 20A, the photoresist layer 10 is formed on the patterned aluminum film 20A.

  As shown in FIG. 4C, the glass substrate 30 on which the patterned aluminum film 20A and the photoresist layer 10 are formed is inclined at an angle θ1 from the horizontal plane, and the mask 40 having the pinholes 40a is brought close to the photoresist layer 10. The glass substrate 30 is rotated around the center line CL, and ultraviolet light UV is applied from the top to the bottom to the photoresist layer 10 through the pinhole 40a at an incident angle θ1. At this time, the pinhole 40a is positioned so as to be positioned directly above the ring-shaped opening 21. The exposure area 11a by irradiation with ultraviolet light UV has a ring shape, that is, a trapezoidal cone shape.

  4D, the glass substrate 30 and the mask 40 are inclined at an angle θ2 (<θ1) from the horizontal plane, the mask 40 is slid in the X direction from the position of FIG. 4C, and the glass substrate 30 is moved around the center line CL. In this state, ultraviolet light UV is irradiated onto the photoresist layer 10 from the top to the bottom at an incident angle θ2 through the pinhole 40a while being rotated in a ring-shaped exposure region 11a and a ring-shaped exposure region 12a concentric with the ring-shaped exposure region 11a is formed. Since the ring-shaped exposure region 12a has an angle θ2 <θ1, the inclined surface is steeper than the ring-shaped exposure region 11.

FIG. 4E similarly shows a state in which the ring-shaped exposure region 13a is formed and the partial exposure of the concentric ring-shaped exposure regions 11a to 13a is completed.
As shown in FIG. 4 (f), the ring-shaped exposure regions 11a, 12a, and 13a are dissolved and removed.
FIG. 4G shows that the photoresist layer 10 is irradiated with ultraviolet light UV at an incident angle of 0 ° from the glass substrate 30 side through the multiple ring-shaped openings 21, 22, 23 of the aluminum film 20 </ b> A. The state which formed the shape | mold exposure area | region 11b, 12b, 13b is shown.
FIG. 4 (h) shows a state in which the ring-shaped exposure regions 11b, 12b, and 13b are dissolved and removed to complete the Fresnel lens matrix. 4 (f) and 4 (g) are interchanged, and after the first and second exposure steps are finished, the ring-shaped exposure regions 11a, 12a, 13a and the ring-shaped exposure regions 11b, 12b, 13b May be removed simultaneously. The method for producing a mold from the Fresnel lens mother die 1 and the method for producing a micro Fresnel lens from the die are the same as those in the first embodiment, and thus description thereof is omitted.

  Similarly to the manufacturing method of the first embodiment, the manufacturing method of the Fresnel lens mother mold of the present embodiment can produce the dimensions and angle of the inclined surface with high accuracy, and the inclination angle θ1, By changing θ2, the angle of the inclined surface of the Fresnel lens matrix 1 can be freely changed. In addition, a mold manufactured by transferring the Fresnel lens mother die 1 and a Fresnel lens manufactured in large quantities using the mold can also be manufactured with high-precision slope dimensions and angles.

<Third Embodiment>
FIG. 5 is a diagram for explaining a manufacturing process of a Fresnel lens mother die according to the third embodiment of the present invention. In the present embodiment, components corresponding to the components and regions described in the first and second embodiments are denoted by the same reference numerals.

  As shown in FIG. 5A, after the photoresist layer 10 having a thickness of about 20 μm is formed on the glass substrate 30, the ultraviolet light emitted from the laser optical system 50 while rotating the glass substrate 30 around the center line CL. The photoresist layer 10 is irradiated with a laser beam L1 at an incident angle θ3. At this time, the laser optical system 50 is arranged so that the ultraviolet laser beam L1 is focused at the focusing position F1 on the boundary surface between the photoresist layer 10 and the glass substrate 30. Thereby, the ring-shaped exposure area | region 11a by the ultraviolet laser beam L1 is formed. This ring-shaped exposure region 11a also has a trapezoidal conical cylinder shape, although the upper and lower thicknesses are slightly different. In FIG. 5, the exposure of the right half of the photoresist layer 10 is not shown.

  In FIG. 5B, after stopping the laser beam irradiation, the laser optical system 50 is rotated from the incident angle θ3 of the ultraviolet laser light L1 until the incident angle becomes approximately 0 °, and then the glass substrate 30 is moved. The state in which the ultraviolet laser beam L1 is applied to the photoresist layer 10 at an incident angle of approximately 0 ° while rotating around the center line CL is shown. Also at this time, the laser optical system 50 is positioned so that the ultraviolet laser light L1 is condensed at the condensing position F1. Thereby, the ring-shaped exposure area | region 11b by the ultraviolet laser beam L1 is formed.

  5C, the laser optical system 50 is slid from the position of FIG. 5B in the X direction, which is the radial direction of the glass substrate 30, and the ultraviolet laser beam L1 is rotated while rotating the glass substrate 30 around the center line CL. Is a state in which the photoresist layer 10 is irradiated at an incident angle θ4 (> θ3). At this time, the laser optical system 50 is positioned so that the ultraviolet laser light L1 is condensed at the condensing position F2 on the boundary surface between the photoresist layer 10 and the glass substrate 30. Thereby, the ring-shaped exposure area | region 12a by the ultraviolet laser beam L1 is formed.

  Thereafter, as described with reference to FIG. 5B, after stopping the laser beam irradiation, the laser optical system 50 is rotated from the angle of incidence angle θ4 of the ultraviolet laser beam L1 until the incident angle becomes substantially 0 °. The photoresist layer 10 is irradiated with the ultraviolet laser light L1 at an incident angle of approximately 0 ° while rotating the glass substrate 30 around the center line CL. Thereby, the ring-shaped exposure area | region 12b by the ultraviolet laser beam L1 is formed. In this embodiment, the laser optical system 50 is rotated or slid. However, since the positional relationship between the photoresist layer 10 and the laser optical system 50 is relative, the laser optical system 50 is fixed. Alternatively, the glass substrate 30 on which the photoresist layer 10 is formed may be rotated or slid. The method for manufacturing the mold and the micro Fresnel lens is the same as in the first and second embodiments, and thus the description thereof is omitted.

  If the multiple ring-shaped exposure regions are removed after the ring-shaped exposure regions are repeatedly formed in this manner, the Fresnel lens master block 1 as shown in FIG. 1 is completed. As can be seen from the above description, in the present embodiment, it is not necessary to provide the patterned aluminum film 20A between the photoresist layer 10 and the glass substrate 30. Accordingly, the same effects as those of the manufacturing methods of the first and second embodiments can be obtained, and the step of forming the patterned aluminum film 20A can be omitted.

<Fourth embodiment>
FIGS. 6A and 6B are views for explaining a manufacturing process of a Fresnel lens mother die according to the fourth embodiment of the present invention. FIG. 6A is a top view, and FIGS. 6B and 6C are side views. FIG. In the present embodiment, components corresponding to the components and regions described in the first to third embodiments are denoted by the same reference numerals.

  As shown in FIG. 6, a glass substrate 30 on which the photoresist layer 10 is formed and a plano-convex lens 60 with a mask made of a plano-convex lens substrate 60a and a patterned aluminum film 60b are arranged facing each other in the vertical direction. . The glass substrate 30 and the masked plano-convex lens 60 have substantially the same diameter. The center line CL of the glass substrate 30 and the optical axis AX of the plano-convex lens 60 with mask are parallel, the outer periphery of the plano-convex lens 60 with mask is positioned on the center line CL, and the outer periphery of the glass substrate 30 on the optical axis AX. The glass substrate 30 and the plano-convex lens 60 with mask are positioned so as to face each other. The aluminum film 60b is disposed on the plane side of the plano-convex lens 60, and minute openings 61 to 64 are formed in the aluminum film 60b so as to be arranged in the radial direction of the plano-convex lens 60 with a mask.

  With the above arrangement, the photoresist layer 10 is irradiated with ultraviolet light UV of a parallel light flux from the top to the bottom through the openings 61 to 64 while rotating the glass substrate 30 around the center line CL. The four beams of the ultraviolet light UV that have passed through the openings 61 to 64 are refracted by the plano-convex lens substrate 60a and travel so as to be condensed at the focal position F. As shown in FIG. 6B, concentric and multiple ring-shaped exposure regions 11a to 14a are formed. In FIG. 6, the illustration of the exposure of the right half of the photoresist layer 10 is omitted.

  Next, as shown in FIG.6 (c), it replaces with the plano-convex lens 60 with a mask, and the glass flat plate 70 with a mask is arrange | positioned. In the aluminum film 70b of the glass plate with mask 70, minute openings 71 to 74 are formed so as to be aligned in the radial direction of the glass plate 70 with mask. While rotating the glass substrate 30 around the center line CL, ultraviolet rays UV of a parallel light beam are vertically irradiated to the photoresist layer 10 through the openings 71 to 74 to form ring-shaped exposure regions 11 b to 14 b in the photoresist layer 10. The ring-shaped exposure regions 11a to 14a and 11b to 14b are dissolved and removed to complete the Fresnel lens matrix.

  In the present embodiment, the ring-shaped exposure regions 11a to 14a are formed by utilizing the refraction action of the plano-convex lens substrate 60a. However, instead of the plano-convex lens substrate 60a, only in one direction orthogonal to the optical axis. A cylindrical lens having refractive power may be used. Moreover, the angle of the inclined surface of the Fresnel lens matrix can be freely changed by changing the positive refractive power of the plano-convex lens substrate 60a. The method for manufacturing the mold and the micro Fresnel lens is the same as in the first to third embodiments, and thus the description thereof is omitted.

  Even in the present embodiment, the same effects as the manufacturing methods of the first to third embodiments can be obtained, and there is no step of tilting the glass substrate 30, so the tilt function is also necessary for the holder that holds the glass substrate 30. In addition, the mechanism and the process for setting the tilt angle with high accuracy can be omitted, which contributes to cost reduction. Moreover, since the ring-shaped exposure regions 11a to 14a can be formed by batch exposure using the plano-convex lens 60 with a mask, the exposure time can be shortened.

Then, the modification of embodiment of this invention is demonstrated.
FIG. 7 is a schematic diagram for explaining a first modification of the embodiment of the present invention. FIG. 7 (a) is a side view for explaining the manufacturing process of the Fresnel lens mother die, and FIG. It is a bottom view. The glass substrate 30 on which the patterned aluminum film 20A having the multiple ring-shaped openings 21 to 24 and the photoresist layer 10 are formed is disposed horizontally, and the mask 80 with slits is disposed opposite to the glass substrate 30 at a predetermined interval. As shown in FIG. 7B, the slit mask 80 is formed with a slit 80a which is a linear opening connecting the center C and one side of the rectangle. As the light source for exposure, an excimer laser is used, and the light source and the optical system are arranged so that the excimer laser light L2 is obliquely incident on the glass substrate 30 through the slit 80a of the mask 80 with the slit.

  With the above arrangement, the excimer laser beam L2 is irradiated onto the photoresist layer 10 through the slit 80a, the glass substrate 30, and the patterned aluminum film 20A sequentially while rotating the glass substrate 30 around the center line CL. The excimer laser light L2 is converged to the condensing point S by the convex lens 85, spreads using the condensing point S as a point light source, and irradiates the mask 80 with slit. The excimer laser beam L2 is exposed to the photoresist layer 10 as four beams by the slit 80a and the ring-shaped openings 21 to 24 of the patterned aluminum film 20A. Of the excimer laser light L2, the light that has passed through the regions indicated by reference numerals 21a to 24a in FIG. 7B substantially contributes to the exposure of the photoresist layer 10. In the photoresist layer 10, as shown in FIG. 7A, multiple ring-shaped exposure regions 11a to 14a are formed. In FIG. 7, the exposure of the right half of the photoresist layer 10 is not shown. Since the subsequent steps are the same as those in the first or second embodiment, description thereof will be omitted. By changing the angle of oblique incidence and the focal length of the convex lens 85, the angles of the inclined surfaces of the trapezoidal conical cylindrical ring-shaped exposure regions 11a to 14a can be freely changed.

  FIG. 8 is a schematic diagram illustrating a second modification of the embodiment of the present invention. Convex lenses 95 and 96 that condense the excimer laser light L2 above the patterned aluminum layer 90A by horizontally arranging the glass substrate 30 on which the patterned aluminum film 20A, the photoresist layer 10, and the patterned aluminum layer 90A are formed. , 97 are arranged. Ring-shaped openings 21, 22, and 23 are formed in the patterned aluminum film 20A, and ring-shaped openings 91, 92, and 93 are formed in the patterned aluminum layer 90A. The diameters of the ring-shaped openings 91, 92, 93 are set smaller than the diameters of the corresponding ring-shaped openings 21, 22, 23, respectively. That is, the angle of the inclined surface connecting the ring-shaped opening 91 and the ring-shaped opening 21, the angle of the inclined surface connecting the ring-shaped opening 92 and the ring-shaped opening 22, and the inclined surface connecting the ring-shaped opening 93 and the ring-shaped opening 23. The angles are set so that the inclination increases in order. The convex lenses 95, 96, and 97 have different focal lengths, and are configured to be movable in the Y direction.

  When the convex lens 95 is installed at the position y1 in the vertical direction, when the excimer laser beam L2 is incident on the patterned aluminum layer 90A, the excimer laser beam L2 has an expansion angle corresponding to the refractive power (focal length) of the convex lens 95. The photoresist layer 10 is exposed through the ring-shaped opening 91 to form a ring-shaped exposure region 11a. Similarly, when the convex lens 96 is installed at the position y2, the ring-shaped exposure area 12a is formed, and when the convex lens 97 is installed at the position y3, the ring-shaped exposure area 13a is formed. The patterned aluminum layer 90A is removed at the stage where all exposures are completed. Since the subsequent steps are the same as those in the first or second embodiment, description thereof will be omitted. Note that the angles of the inclined surfaces of the ring-shaped exposure regions 11a to 14a can be freely changed by changing the focal lengths of the convex lenses 95, 96, and 97. In this case, the positional relationship between the ring-shaped openings 21, 22, 23 and the ring-shaped openings 91, 92, 93 is also set in correlation with the lens power.

  FIG. 9 is a schematic diagram illustrating a third modification of the embodiment of the present invention. The glass substrate 30 on which the aluminum film 20 and the photoresist layer 10 are formed is disposed horizontally, and the optical fiber holder 100 is disposed opposite to the photoresist layer 10 at a predetermined interval. In the optical fiber holder 100, optical fibers 101, 102, and 103 are held at different inclination angles.

  While rotating the glass substrate 30 around the center line CL, the excimer laser beam L2 of a parallel light beam is irradiated from each optical fiber toward the photoresist layer 10 at each incident angle. The ring-shaped exposure region 11a is formed by the excimer laser beam L2 of the parallel light beam from the optical fiber 101. Similarly, the ring-shaped exposure region 12a is formed by the excimer laser light L2 of the parallel light beam from the optical fiber 102, and the ring-shaped exposure region 13a is formed by the excimer laser light L2 of the parallel light beam from the optical fiber 103. Since the subsequent steps are the same as those in the first embodiment, description thereof will be omitted. Note that by changing the inclination angles of the optical fibers 101, 102, 103, the angles of the inclined surfaces of the trapezoidal conical cylindrical ring-shaped exposure regions 11a to 14a can be freely changed.

FIG. 10 is a schematic diagram illustrating a fourth modification of the embodiment of the present invention. In FIG. 10, the right half of the center line CL is omitted, and only the left half is shown.
In FIG. 10A, the glass substrate 30 on which the negative photoresist layer 110 is formed is horizontally arranged, and a ring is formed in the negative photoresist layer 110 by the same method as the third or fourth embodiment described above. The state which formed the shape | mold exposure area | region 111a, 112a, 113a is shown.

FIG. 10B shows a state in which the negative photoresist layer 110 is etched and only the trapezoidal conical cylindrical ring-shaped exposure regions 111a, 112a and 113a are left. In this modification, since a negative photoresist is used, the unexposed portion is dissolved and removed in the etching solution.
FIG. 10C shows a state in which the aluminum film 120 is formed on the surfaces of the ring-shaped exposure regions 111a, 112a, and 113a by the sputtering method.

FIG. 10D shows a state in which the negative photoresist layer 130 is coated so as to completely fill the ring-shaped exposure regions 111a, 112a, and 113a where the aluminum film 120 is formed.
FIG. 10E shows a state in which the ultraviolet light UV is vertically applied to the negative photoresist layer 130 from the glass substrate 30 side, and ring-shaped exposure regions 131a, 132a, and 133a are formed on the negative photoresist layer 130. FIG. Other portions in the negative photoresist layer 130 are not exposed because they are shielded from light by the aluminum film 120.

  FIG. 10F shows a state in which the negative photoresist layer 130 is etched to leave only the ring-shaped exposed regions 1131, 132, 133, and the aluminum film 120 is dissolved and removed. A Fresnel lens matrix having an inclined structure with ring-shaped exposure regions 111a + 131a, 112a + 132a, 113a + 133a is completed.

FIG. 11 is a schematic diagram for explaining a fifth modification of the embodiment of the present invention. In FIG. 11, only the left half of the center line CL is shown.
FIG. 11A shows a state when the silicon substrate 140 is etched by ICP-RIE (inductively coupled plasma-reactive ion etching) through a mask having concentric multiple ring patterns. Concentric and multiple annular recesses 141, 142, and 143 are formed on the surface of the silicon substrate 140.

FIG. 11B shows a state in which a photoresist layer 150 is coated on the silicon substrate 140. Ring-shaped photoresist layers 151, 152, and 153 are formed in the recesses of the silicon substrate 140.
FIG. 11C shows a ring-shaped photoresist layer that is irradiated with ultraviolet light UV obliquely from the center line CL side to the outer peripheral side of the silicon substrate 140 while rotating the silicon substrate 140 around the center line CL. A state in which ring-shaped exposure regions 151b, 152b, and 153b are formed in 151, 152, and 153, respectively. In this modification, the ultraviolet light UV is obliquely incident on the photoresist layer 150, so that unexposed portions 151a, 152a, and 153a are generated in the ring-shaped photoresist layers 151, 152, and 153, respectively.

FIG. 11D shows a state when the silicon substrate 140 is etched by ICP-RIE using the ring-shaped photoresist layers 151, 152, and 153 as masks.
FIG. 11E shows a state in which an aluminum film 160 is formed on the uneven surface by a sputtering method.
FIG. 11 (f) shows a state in which ring-shaped photoresist layers 171, 172, and 173 are coated on the concave portions of the concave and convex surfaces covered with the aluminum film 160.

  In FIG. 11G, the ring-shaped photoresist layer 171 is irradiated with ultraviolet light UV obliquely from the center line CL side to the outer peripheral side of the silicon substrate 140 while rotating the silicon substrate 140 around the center line CL. , 172, and 173, ring-shaped exposure regions 171b, 172b, and 173b are formed, respectively. In the ring-shaped photoresist layers 171, 172, 173, unexposed portions 171a, 172a, 173a are generated, respectively.

  FIG. 11H shows the ring-shaped exposure regions 151b, 152b, and 153b formed by the ultraviolet UV exposure of FIG. 11C by dissolving and removing the aluminum film 160, and the UV light UV exposure of FIG. 11G. The ring-shaped exposure areas 171b, 172b, and 173b formed in (1) are removed. That is, the ring-shaped unexposed portions 151a, 152a, 153a and 171a, 172a, 173a remain, and the Fresnel lens master block having an inclined structure is completed. In this Fresnel lens matrix, a flat gap does not occur at the boundaries of the ring-shaped unexposed portions 151a, 152a, 153a, 171a, 172a, and 173a.

  The manufacturing method of the tilted structure of the present invention is not limited to the Fresnel lens master, but is a mold used for manufacturing an optical element having a tilted structure or a precision instrument part, such as a diffraction grating, an optical element for hologram, or an ink jet printer head. It can also be applied to mother molds. Further, there may be one or more inclined structures, and when a plurality of inclined structures are arranged, the inclined surfaces of the inclined structures may be the same angle or different angles. The present invention is not limited to the embodiments described above as long as the characteristics are not impaired.

It is sectional drawing which shows typically the structure of the Fresnel lens mother block produced with the manufacturing method which concerns on the 1st Embodiment of this invention. It is a figure explaining the process of the manufacturing method which concerns on the 1st Embodiment of this invention. It is a fragmentary sectional view for demonstrating one process of the manufacturing method which concerns on the 1st Embodiment of this invention. It is a figure explaining the process of the manufacturing method which concerns on the 2nd Embodiment of this invention. It is a figure explaining the process of the manufacturing method which concerns on the 3rd Embodiment of this invention. It is a figure explaining the process of the manufacturing method which concerns on the 4th Embodiment of this invention. It is a figure explaining the 1st modification of embodiment of this invention. It is a figure explaining the 2nd modification of embodiment of this invention. It is a figure explaining the 3rd modification of embodiment of this invention. It is a figure explaining the 4th modification of embodiment of this invention. It is a figure explaining the 5th modification of embodiment of this invention.

Explanation of symbols

1: Fresnel lens matrix 10: Photoresist layers 11-15: Ring-shaped photoresists 11a-14a, 11b-14b: Ring-shaped exposure regions 20, 20A: Aluminum films 21-24: Ring-shaped openings 30: Glass substrate 40: Mask 40a: Pinhole 50: Laser optical system 60: Plano-convex lens with mask 70: Glass flat plate with mask 80: Mask with slit 85, 95, 96, 97: Convex lens 90A: Aluminum layer 100: Optical fiber holder 101, 102, 103 : Optical fiber 110, 130: Negative photoresist layer 120: Aluminum film 140: Silicon substrate 150, 170: Photoresist layer AX: Optical axis CL: Center line L1: Ultraviolet laser light L2: Excimer laser light UV: Ultraviolet light

Claims (14)

Forming a metal film on a transparent substrate;
Forming a photosensitive resin layer on the metal film;
The photosensitive resin layer and a light-shielding member having a minute opening are disposed in close proximity to each other, and while rotating the transparent substrate around a center line parallel to the normal line, the normal line and a predetermined inclination through the minute opening. A first exposure step of partially exposing the photosensitive resin layer into a trapezoidal cone by irradiating exposure light at an angle;
Removing the trapezoidal conical cylindrical partial region of the photosensitive resin layer exposed in the first exposure step;
Dissolving and removing only the metal film of the removed trapezoidal conical cylindrical partial region to form a ring-shaped opening pattern in the metal film;
Second exposure of the photosensitive resin layer in a cylindrical shape is performed by irradiating the exposure light perpendicularly to the photosensitive resin layer from the transparent substrate side using the metal film having the ring-shaped opening pattern as a mask. Exposure process,
And a step of removing a cylindrical partial region of the photosensitive resin layer exposed in the second exposure step. Forming a metal film on a transparent substrate;
Forming a concentric multiple annular opening pattern in the metal film;
Forming a photosensitive resin layer on the metal film;
The transparent substrate and the light-shielding member having a minute opening are arranged close to each other and the ring of the minute opening, the transparent substrate, and the metal film is rotated while the transparent substrate is rotated around a center line parallel to the normal line. A first exposure step of partially exposing the photosensitive resin layer in a trapezoidal cone shape by irradiating exposure light at a predetermined inclination angle with the normal line through a band-shaped opening pattern;
Removing the trapezoidal conical cylindrical partial region of the photosensitive resin layer exposed in the first exposure step;
Second exposure of the photosensitive resin layer in a cylindrical shape is performed by irradiating the exposure light perpendicularly to the photosensitive resin layer from the transparent substrate side using the metal film having the ring-shaped opening pattern as a mask. Exposure process,
And a step of removing a cylindrical partial region of the photosensitive resin layer exposed in the second exposure step. In the manufacturing method of the inclination structure of Claim 1 or 2,
The method of manufacturing an inclined structure, wherein the first exposure step is repeatedly performed by relatively moving the minute opening and the photosensitive resin layer along a plane perpendicular to the normal line. In the manufacturing method of the inclined structure of Claim 3,
In the first exposure step, the angle of the inclined surface of the trapezoidal conical cylindrical body is made different by changing the predetermined inclination angle each time the minute opening and the photosensitive resin layer move relative to each other. The manufacturing method of the inclined structure characterized by doing. Forming a photosensitive resin layer on a transparent substrate;
While rotating the transparent substrate around a center line parallel to the normal line, exposure light is condensed at a predetermined incident angle so as to be condensed at a predetermined condensing position on the boundary surface between the transparent substrate and the photosensitive resin layer. Irradiating the photosensitive resin layer with a first exposure step of partially exposing the photosensitive resin layer in a trapezoidal cone shape;
By irradiating the photosensitive resin layer with the incident angle of the exposure light being approximately 0 ° so that the transparent substrate is rotated around a central line parallel to the normal line, so that the light is condensed at the condensing position. A second exposure step of partially exposing the photosensitive resin layer in a cylindrical shape;
And a step of removing a partial region of the photosensitive resin layer exposed in the first and second exposure steps. In the manufacturing method of the inclined structure of Claim 5,
The first and second exposure steps are repeatedly performed by changing the predetermined condensing position in the radial direction. In the manufacturing method of the inclined structure of Claim 6,
In the first exposure step, the angle of inclination of the trapezoidal cone cylinder is made different by changing the predetermined incident angle each time the predetermined condensing position is changed in the radial direction. A manufacturing method of an inclined structure. Forming a photosensitive resin layer on a transparent substrate;
A plano-convex lens having a center line parallel to a normal line of the transparent substrate aligned with an extension line extending in the optical axis direction at one point on the outer periphery of the plano-convex lens having a plurality of apertures arranged in the radial direction on the plane side A step of opposingly arranging the photosensitive resin layer at a predetermined interval;
A first exposure step of partially exposing the photosensitive resin layer into a plurality of trapezoidal conical cylinders by irradiating exposure light through a plurality of openings of the plano-convex lens while rotating the transparent substrate around the center line; ,
A center line parallel to the normal line of the transparent substrate is made to coincide with an extension line extending in the optical axis direction at one point on the outer periphery of the transparent flat plate having a plurality of openings at positions corresponding to the plurality of openings of the plano-convex lens, A step of opposingly arranging the photosensitive resin layer at a predetermined interval on the transparent flat plate;
A second exposure step of partially exposing the photosensitive resin layer in a cylindrical shape by irradiating exposure light through a plurality of openings of the transparent flat plate while rotating the transparent substrate around the center line;
And a step of removing a partial region of the photosensitive resin layer exposed in the first and second exposure steps.   5. A mold base, comprising a tilted structure produced by the manufacturing method according to claim 1, formed on the surface of the metal film.   A mold base having an inclined structure manufactured by the manufacturing method according to claim 5.   5. A mold base, wherein the inclined structure produced by the manufacturing method according to claim 4 has a Fresnel lens shape.   A mold produced by transferring the mold mold according to claim 9 or 10.   A mold for a Fresnel lens produced by transferring the mold matrix according to claim 11.   A micro Fresnel lens produced by the mold for Fresnel lens according to claim 13.

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