JP2009047641A - Spectrometric apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a spectrometric apparatus of a simple constitution capable of measuring the frequency response characteristics of matter. <P>SOLUTION: The spectrometric apparatus is provided with an oscillator 11 for oscillating signals of electromagnetic waves in such a way as to change within a range of prescribed frequencies; a distributor 12 for distributing oscillated signal into two signals, a first signal 1 and a second signal 2; a waveguide 13 for guiding the first signal 1; a windowed waveguide 14 provided with a window having a frequency characteristics smaller than the prescribed frequencies in its longitudinal side surface for mounting matter to be measured via the window for guiding the signal 2; sealing materials 15 and 16 formed in a crosswise direction of the windowed waveguide 14 for sealing the mounted matter so as not to flow out of the windowed waveguide 14; a first receiver 17 for receiving the signal 1 guided via the waveguide 13 and measuring the receiving strength of the signal 1; a second receiver 18 for receiving the signal 2 guided via the windowed waveguide means and measuring the receiving strength of the signal 2; and a data processing part 19 for computing the difference between the receiving strengths measured at the first receiver 17 and the second receiver 18. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a technology of a spectroscopic device that irradiates a measurement object with electromagnetic waves and measures frequency response characteristics thereof.

  A spectroscopic device is a device that irradiates a substance with electromagnetic waves of a predetermined frequency, and that the substance absorbs the electromagnetic waves and captures the phenomenon in which the structure and motion of the substance, the state, orbits, etc. of electrons and nuclei transition, In the field of research and development, it is mainly used to identify substances and their states. There are several types of spectroscopic device configurations, and an example is shown below.

  A transmitter capable of oscillating an electromagnetic wave and sweeping its frequency, and a receiver for receiving the electromagnetic wave and detecting the reception intensity thereof, and measuring an electromagnetic wave emitted by the transmitter as an object to be measured A system is constructed in which a substance is irradiated and an electromagnetic wave transmitted or reflected by the substance is received by a receiver. Then, by sweeping the oscillation frequency of the transmitter and recording the reception intensity of the electromagnetic wave input to the receiver for each frequency, an absorption spectrum of the substance can be obtained.

  For example, in the swept frequency range, when there is a frequency f at which the substance can absorb electromagnetic waves and the state of structure, motion, electrons, nuclei, etc. in the substance can transition, the spectrum shown in FIG. 13 can be obtained. At the frequency f, in addition to the propagation loss of electromagnetic waves and the loss when transmitting or reflecting the substance, there is a loss due to electromagnetic wave absorption accompanying the state transition of the substance, so the loss increases sharply. Since this absorption is specific to the substance, it is possible to identify the substance irradiated with the electromagnetic wave and its state by examining the presence / absence of the frequency at which the absorption occurs and its magnitude.

  Absorption accompanying the state transition of a substance is generally minute. For this reason, fluctuations in measurement results due to the output of the transmitter becoming unstable due to temperature, etc., and fluctuations that indicate absorption of state transitions of substances due to the appearance of noise with frequency components near the measurement frequency from outside the device. It becomes difficult to measure. Therefore, the spectroscopic device is required to reduce the measurement error of the reception intensity by operating the transmitter and the receiver stably and suppressing the frequency components other than the measurement frequency.

For example, in a near-infrared spectrometer, in order to prevent extraneous noise, a sample to be measured needs to be enclosed in a cell and installed in the apparatus. In addition, in order to suppress data fluctuation due to temperature change, it is necessary that the room in which the apparatus is installed is made constant temperature by air conditioning, and the apparatus main body and the cell are also provided with a temperature adjustment function (see Non-Patent Document 1).
Yukihiro Ozaki, "Practical Spectroscopy Series 1 Near Infrared Spectroscopy", IPC Corporation, March 20, 1998, p.80-87

  However, since the above-described solution increases the device scale, there is a problem that a large device cost and a large installation area are required. In addition, a lot of time is required from the start of measurement preparation to measurement, and there is a problem that it is not suitable for simple measurement. Furthermore, due to these problems, there is a problem that it is difficult to use for consumer sensor applications.

  The present invention has been made in view of the above, and an object thereof is to provide a spectroscopic device capable of measuring the frequency response characteristics of a substance with a simple configuration.

  The spectroscopic device according to claim 1 is a spectroscopic device that measures a frequency response characteristic of a substance, an oscillating unit that oscillates an electromagnetic wave signal variably within a predetermined frequency range, Distributing means for distributing the signal into two signals, a waveguide means for guiding the first signal, and an opening having a frequency characteristic smaller than the predetermined frequency is provided on the longitudinal side surface. , The substance loaded through the opening and guiding the second signal, and the substance formed and loaded in the short direction of the waveguide with the opening. Receiving the first signal guided through the waveguide means, and measuring the reception intensity of the first signal The first receiving means and the second wave guided through the opening-equipped waveguide means Data processing for receiving a signal and calculating a difference between reception strengths measured by the second reception means for measuring the reception strength of the second signal and the first reception means and the second reception means And a means.

  In the present invention, an oscillating unit that oscillates an electromagnetic wave signal variably within a predetermined frequency range, a distributing unit that distributes the oscillated signal to two of a first signal and a second signal, A waveguide means for guiding the first signal and an opening having a frequency characteristic smaller than the predetermined frequency are provided on the side surface in the longitudinal direction, and a substance to be measured is loaded through the opening, A waveguide means with an opening that guides the signal of 2 and a sealing means that is formed in a short direction of the waveguide means with an opening and that prevents the loaded substance from flowing out of the waveguide means with an opening. Receiving the first signal guided through the waveguide means and measuring the reception intensity of the received first signal, and being guided through the waveguide means with an opening. Second receiving means for receiving the received second signal and measuring the received intensity of the received second signal; And a data processing means for calculating a difference in received intensity measured between the means and the second receiving means. A signal propagating through the waveguide means is used as a reference signal, and the reference signal and the measurement object A spectroscopic device capable of measuring a frequency response characteristic of a substance with a simple configuration is provided in order to measure the frequency response characteristic of the substance by comparing the signal propagating through the waveguide means with an opening loaded with the substance. be able to.

  The gist of the spectroscopic device according to claim 2 is that the spectroscopic device further includes an opening / closing means for opening and closing the opening.

  In the present invention, the structure further includes opening / closing means that enables opening / closing of the opening of the waveguide means with opening, and the substance to be measured is loaded by closing the opening / closing means. The difference between the previous first signal and the second signal can be obtained. That is, by obtaining this difference, it is possible to provide a spectroscopic device capable of measuring an accurate frequency response characteristic that eliminates the influence caused by the configuration of the spectroscopic device.

  The spectroscopic device according to claim 3, wherein the first signal guided through the waveguide unit and the second signal guided through the apertured waveguide unit. The gist is to further include a phase difference detecting means for measuring the phase difference.

  In the present invention, the phase difference detection for measuring the phase difference between the first signal guided through the waveguide means and the second signal guided through the aperture-equipped waveguide means. In addition to measuring the frequency dependence of absorption for the substance to be measured and the dielectric constant of the substance to be measured by measuring the phase difference, the amount of information for the object to be measured is increased. Thus, the substance to be measured can be identified more accurately.

  The gist of the spectroscopic device according to claim 4 is that the spectroscopic device is disposed inside a casing hermetically sealed with respect to outside air except for the opening.

  In the present invention, since the spectroscopic device is disposed inside the casing that is hermetically sealed against the outside air except for the opening of the waveguide means with the opening, electromagnetic waves that are external from the measurement system It is possible to block the influence of

  The gist of the spectroscopic device according to claim 5 is that the inside of the casing is filled with a vacuum or a gas that does not absorb electromagnetic waves of a signal oscillated by the oscillating means.

  ADVANTAGE OF THE INVENTION According to this invention, the spectrometer which can measure the frequency response characteristic of a substance with simple structure can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a functional block diagram showing functional blocks of the spectroscopic device according to the first embodiment. A spectroscopic device 1 according to the present embodiment is a spectroscopic device that measures frequency response characteristics of a substance, and includes an oscillator 11 that oscillates an electromagnetic wave signal variably within a predetermined frequency range, and an oscillated signal. A distributor 12 that distributes the signal 1 and the signal 2, a waveguide 13 that guides the signal 1, a waveguide 14 with a window that guides the signal 2, and a waveguide 14 with a window Through the sealing materials 15 and 16 formed in the short direction, the first receiver 17 for measuring the reception intensity of the signal 1 guided through the waveguide 13, and the waveguide with window 14 A spectroscope comprising a second receiver 18 for measuring the reception intensity of the guided signal 2 and a data processing unit 19 for calculating a difference between the reception intensity measured by the first receiver 17 and the second receiver. This is the device 1, and each part constituting the spectroscopic device 1 is except for an opening formed on the side surface of the waveguide with window 14. It is disposed inside the housing 20.

  The oscillator 11 oscillates an electromagnetic wave having a predetermined frequency, and has a function of making the frequency variable within a range from the frequency f1 to the frequency f2. Such an oscillator 11 can be realized by, for example, a voltage-controlled oscillator having a waveguide output.

  The distributor 12 has a function of receiving an electromagnetic wave signal oscillated by the oscillator 11, equally distributing power to the signal 1 and the signal 2, and outputting them from the respective output terminals. Such a distributor 12 can be realized by, for example, a two distributor using a waveguide.

  The waveguide 13 has a function of propagating the signal 1 output from the distributor 12 and outputting it to the first receiver 17.

  The waveguide with window 14 has a function of propagating the signal 2 output from the distributor 12 and outputting it to the second receiver 18. On the side surface in the longitudinal direction of the waveguide with window 14, as shown in FIGS. 1 and 2, an opening 141 whose cut-off frequency is sufficiently smaller than the frequency f 1 and the frequency f 2 (hereinafter simply referred to as “window”). ) Is formed. The cut-off frequency means the lower limit of the frequency at which electromagnetic waves can pass through a waveguide or a hole. Since the cutoff frequency of the window 141 is sufficiently smaller than the frequency f1 to the frequency f2 that the signal 2 can take, the signal 2 does not leak out from the window 141 of the waveguide with window 14. Accordingly, the spectroscopic device 1 can replace the inside air and the outside air inside the windowed waveguide 14 through the window 141, that is, can load a substance to be measured.

  The sealing material 15 is formed between the distributor 12 and the waveguide with window 14, and has a function of sealing out the substance to be measured loaded into the waveguide with window 14 from flowing into the distributor 12. Is provided. Such a sealing material 15 can use a dielectric etc., for example. As shown in FIG. 3, the dielectric has the property of preventing the passage of gas or liquid, although it can pass the signal 2 that is an electromagnetic wave. It is possible to prevent outside air that has flowed into the attached waveguide 14 from flowing out to places other than the waveguide with window 14. The sealing material 16 formed between the windowed waveguide 14 and the second receiver 18 also has the same function.

  Here, the spectroscopic device 1 propagates one of the two branched signals through the hermetically sealed waveguide 13 and the other signal in the gas or the liquid to be measured. Since the measurement is performed by comparing the received intensities, the shape of the windowed waveguide 14 is desirably the same as that of the waveguide 13 in order to reduce measurement errors. Further, in order to match the transmission path length between the signal 1 and the signal 2 as much as possible, the length in the longitudinal direction of the waveguide 13, the thickness of the sealing material 15, the length in the longitudinal direction of the waveguide with window 14, and the sealing It is desirable to match the total length with the thickness of the material 16.

  The first receiver 17 has a function of receiving the signal 1 output from the waveguide 13, measuring the reception intensity of the signal 1, and outputting the measurement result to the data processing unit 19. The second receiver 18 receives the signal 2 that has passed through the sealing material 16 and is output from the waveguide 14 with a window, and measures the reception intensity of the signal 2 in the same manner as the first receiver 17. And a function of outputting the measurement result to the data processing unit 19. Such a receiver can be realized by using, for example, a diode square detector and an A / D converter.

  The data processing unit 19 receives the reception intensities of the signal 1 and the signal 2 output from the first receiver 17 and the second receiver 18, calculates the difference, and outputs the difference to the outside of the spectroscopic device 1. Is provided.

  The casing 20 is formed of a metal material, and as shown in FIG. 1, the oscillator 11, the distributor 12, the waveguide 13, the waveguide with window 14, the sealing material 15, the sealing material 16, and the first receiving device. The device 17, the second receiver 18, and the data processing unit 19 are stored, and a function of hermetically sealing the outside of the window 141 of the waveguide with window 14 with respect to the outside air is provided. The inside of the housing 20 is preferably filled with a gas that does not have a characteristic absorption with respect to a vacuum or electromagnetic waves in the range from the frequency f1 to the frequency f2.

  Next, the operation of the spectrometer 1 will be described. First, the oscillator 11 oscillates the electromagnetic wave having the frequency f, and the oscillated electromagnetic wave signal is distributed to the signal 1 and the signal 2 by the distributor 12 (step S101).

  The signals 1 and 2 propagated through the waveguide 13 and the windowed waveguide 14 are received by the first receiver 17 and the second receiver 18, respectively, and the received intensity is measured (step). S102).

  The data processing unit 19 calculates a difference in reception intensity between the signal 1 and the signal 2 output from the first receiver 17 and the second receiver 18 and outputs the difference to the outside (step S103).

  The measurement is repeated by performing the operations in steps S101 to S103 while sweeping the oscillation frequency of the oscillator 11 from f1 to f2 (step S104).

  Subsequently, a procedure of spectroscopic measurement using the spectroscopic device 1 will be described. First, the spectroscopic device 1 is placed in a gas to be measured. This gas is assumed to be a gas that absorbs electromagnetic waves having a predetermined frequency. An example of the graph obtained by the operations in steps S101 to S104 is shown in FIG.

  Since the signal 1 propagates through the waveguide 13 which is a propagation path cut off from the gas to be measured, the measurement result has no absorption. Here, the reason why the reception intensity of the signal 1 is not constant depending on the frequency is that the intensity of the electromagnetic wave oscillated by the oscillator 1 and the loss depending on the propagation path are not constant depending on the frequency. Since the signal 2 propagates through the waveguide 14 with a window, it propagates in the gas to be measured. Therefore, the reception intensity of the signal 2 is obtained by superimposing absorption by gas on the reception intensity of the signal 1.

Therefore, as shown in FIG. 4B, in the data processing unit 19, the signal 1 and the signal 2
By calculating the difference from the above, it is possible to obtain a measurement result in which the distortion of the graph due to the intensity of the electromagnetic wave oscillated by the oscillator 1 and the loss depending on the propagation path is corrected.

  As described above, by using this spectroscopic device, it is possible to measure the frequency response characteristics of the measurement target with a simple configuration and eliminating errors caused by the intensity of the electromagnetic wave oscillated by the oscillator 1 and the loss of the propagation path. .

  In the present embodiment, the distributor 12 and the sealing materials 15 and 16 have been described with the configuration using the waveguide, but it can be said that the same effect can be obtained without using the waveguide. Not too long. For example, the distributor 12 may be configured to use a coaxial line, and the coaxial line may be connected to the waveguide 13 and the windowed waveguide 14 using a waveguide converter.

  In the present embodiment, as an example of the waveguide 14 with a window, FIG. 2 has been described as having a single window. However, this window replaces and measures the inside air and the outside air without disturbing the propagation of electromagnetic waves. Since it is sufficient that the target can be loaded, a configuration including a plurality of windows may be used in order to efficiently perform replacement and loading.

  Finally, in the present embodiment, the gas is specified as the measurement target. However, any gas can be measured as long as it can be replaced or loaded through the window of the waveguide 14 with a window. Good.

  According to the present embodiment, an oscillator 11 that oscillates an electromagnetic wave signal variably within a predetermined frequency range, a distributor 12 that distributes the oscillated signal into two signals 1 and 2, and a signal 1 And a window having a frequency characteristic smaller than the predetermined frequency on the longitudinal side surface, a substance to be measured is loaded through the window, and the signal 2 is guided. A waveguide 14 with a window, sealing materials 15 and 16 formed in a short direction of the waveguide 14 with a window, and sealing the flow of a loaded substance out of the waveguide 14 with a window; 13 receives a signal 1 guided through 13, receives a first receiver 17 that measures the received intensity of the received signal 1, and receives a signal 2 guided through a windowed waveguide means and receives it Measured by the second receiver 18 for measuring the received intensity of the signal 2, the first receiver 17 and the second receiver 18. And a data processing unit 19 for calculating the difference between the received strengths. A signal propagating through the waveguide 13 is used as a reference signal, and a windowed guide loaded with the reference signal and a substance to be measured is loaded. Since the frequency response characteristic of the substance is measured by comparing with the signal propagating through the wave tube 14, the spectroscopic device 1 capable of measuring the frequency response characteristic of the substance with a simple configuration can be provided.

[Second Embodiment]
FIG. 5 is a functional block diagram showing functional blocks of the spectroscopic device according to the second embodiment. The spectroscopic device 1 according to the present embodiment further includes an opening / closing portion 21 that can open and close the window of the waveguide with window 14 in order to calibrate the device before spectroscopic measurement and further improve the measurement accuracy. This is a configuration provided. Since other configurations are the same as those described in the first embodiment, a duplicate description is omitted here.

  In the initial state of the spectroscopic device 1, the opening / closing part 21 is closed, and the inside of the waveguide with window 14 is similar to the waveguide 13 with respect to vacuum or electromagnetic waves in the range from the frequency f1 to the frequency f2. It is filled with gas that has no characteristic absorption. That is, in the initial state, both the signal 1 and the signal 2 propagate in the gas having no characteristic absorption with respect to the electromagnetic wave in the range from the frequency f1 to the frequency f2.

  First, the spectroscopic device 1 is placed in the gas to be measured, and measurement is performed with the open / close unit 21 closed. This gas is assumed to be a gas that absorbs electromagnetic waves having a predetermined frequency. An example of the graph obtained by this measurement is shown in FIG. Since the open / close unit 21 is closed, no characteristic absorption is observed in the received intensity of the signal 1 and the signal 2. Here, the reason why each received intensity is not constant depending on the frequency is the same reason as described in the first embodiment. However, the received strengths of signal 1 and signal 2 do not exactly match. This is because the propagation paths do not exactly match due to the presence or absence of the window 141 of the waveguide with window 14 and the sealing materials 15 and 16. FIG. 6B shows a graph of the difference between signal 1 and signal 2. The difference shown here is due to the configuration of the spectroscopic device according to the present embodiment.

  Next, measurement is performed with the opening / closing part 21 of the spectroscopic device 1 being opened. An example of a graph obtained by this measurement is shown in FIG. For signal 1, even if the opening / closing part 21 is opened, the gas in the propagation path is not replaced with the outside air, so the measurement result is the same as in FIG. Since the signal 2 propagates through the substituted outside air through the window 141 of the waveguide with window 14, characteristic absorption is observed. FIG. 7B shows a graph in which the difference between signal 1 and signal 2 is calculated. This graph is a result of superimposing the difference between the signal 1 and the signal 2 due to the configuration of the spectroscopic device 1 shown in FIG. 6B and the absorption characteristics of the gas to be measured. Therefore, by subtracting the reception intensity shown in FIG. 6B from the reception intensity shown in FIG. 7B, it becomes possible to eliminate the difference between the signal 1 and the signal 2 due to the configuration of the spectroscopic device 1. As shown in FIG. 8, only the absorption characteristics of the gas to be measured can be observed.

  As described above, by using the present spectroscopic device, the spectroscopic measurement is performed after the spectroscopic device 1 is calibrated before the measurement. Therefore, the value of the frequency at the apex of the absorption characteristic or the reception intensity in the frequency range where the absorption exists. Can be measured more accurately, and the gas to be measured can be easily identified.

  According to the present embodiment, the structure further includes the opening / closing part 21 that enables opening and closing of the window of the waveguide with window 14, and the substance to be measured can be measured by closing the opening / closing part 21. The difference between signal 1 and signal 2 before loading can be obtained. That is, by obtaining this difference, it is possible to provide a spectroscopic device 1 that can measure an accurate frequency response characteristic that eliminates the influence caused by the configuration of the spectroscopic device 1.

[Third Embodiment]
FIG. 9 is a functional block diagram showing functional blocks of the spectroscopic device according to the third embodiment. The spectroscopic device 1 according to the present embodiment is configured to measure the phase difference between the signal 1 guided through the waveguide 13 and the signal 2 guided through the windowed waveguide 14. The configuration further includes a detection unit 22. Since other configurations are the same as those described in the first embodiment, a duplicate description is omitted here.

  The dielectric constant of the gas filled in the waveguide 13 and the measurement target gas loaded in the waveguide with window 14 are equal, and the length of the propagation path of the waveguide 13 is: When the total propagation path length of the thickness of the sealing material 15, the length in the longitudinal direction of the waveguide with window 14, and the thickness of the sealing material 16 is equal, the signal 1 measured by the phase difference detection unit 22 The phase difference with the signal 2 is substantially 0 (zero) as shown in FIG. However, when the dielectric constants of the gas inside the waveguide 13 and the gas to be measured inside the windowed waveguide 14 are different, the phase difference between the signal 1 and the signal 2 changes. For example, when the dielectric constant of the gas to be measured is larger than the gas inside the waveguide 13, the phase difference is as shown in FIG. By using this property and examining the slope of the graph obtained by the phase difference detection unit 22, the dielectric constant of the gas to be measured can be obtained.

  As described above, by using this spectroscopic device, it is possible to simultaneously measure the frequency dependence of absorption and the dielectric constant of the gas to be measured. Therefore, since the amount of information for the measurement target increases, the measurement target gas can be identified accurately and easily.

  In the present embodiment, the dielectric constant of the gas filled in the waveguide 13 and the measurement target gas loaded in the waveguide with window 14 are equal, and the waveguide When the total propagation path length of the propagation path length of 13, the thickness of the sealing material 15, the length in the longitudinal direction of the waveguide with window 14, and the thickness of the sealing material 16 is equal, the phase difference detection unit Although the phase difference between the signal 1 and the signal 2 measured at 22 is described as 0 (zero), the dielectric constant can be measured even if it is not exactly 0 (zero). For example, the same effect can be obtained by obtaining a phase difference when the dielectric constant between the gas filled in the waveguide 13 and the gas to be measured is equal and subtracting from the phase difference at the time of measurement. .

  According to the present embodiment, the phase difference detection unit 22 that measures the phase difference between the signal 1 guided through the waveguide 13 and the signal 2 guided through the windowed waveguide 14. In addition to measuring the frequency dependence of absorption for the substance to be measured, and measuring the dielectric constant of the substance to be measured by measuring the phase difference, the increase in the amount of information for the object to be measured Thus, the substance to be measured can be identified more accurately.

[Fourth Embodiment]
FIG. 12 is a functional block diagram showing functional blocks of the spectroscopic device according to the fourth embodiment. The spectroscopic device 1 according to the present embodiment has a configuration further including the opening / closing unit 21 described in the second embodiment and the phase difference detection unit 22 described in the third embodiment. The operations and functions of the opening / closing unit 21 and the phase difference detection unit 22 are the same as those described in the second embodiment and the third embodiment. Other configurations are the same as those described in the first embodiment.

  Therefore, by using this spectroscopic device, the spectroscopic measurement is performed after the spectroscopic device 1 is calibrated before the measurement, so that the frequency value at the top of the absorption characteristic and the received intensity in the frequency range where the absorption exists can be more accurately determined. Therefore, the gas to be measured can be easily identified.

  In addition, by using this spectroscopic device, it is possible to simultaneously measure the frequency dependence of absorption and the dielectric constant of the gas to be measured. Therefore, since the amount of information for the measurement target increases, the measurement target gas can be identified accurately and easily.

  Finally, according to the present invention, except for the window 141 of the waveguide with window 14, the oscillator 11, the distributor 12, the waveguide 13, the waveguide with window 14, the sealing materials 15 and 16, the first reception. Since the elements of the device 17, the second receiver 18, the data processing unit 19, and the phase difference detection unit 22 are stored in one metal casing, it is possible to block the influence of electromagnetic waves that are external from the measurement system, The apparatus scale can be reduced. This reduction in the scale of the apparatus enables application to sensor heads that have been difficult to date.

  Further, according to the present invention, the signal oscillated by the oscillator 11 is branched into two, and the signal propagating through the hermetically sealed waveguide is used as a reference signal, and this reference signal is placed in the gas or liquid to be measured. Since the propagated signal is compared, it is possible to prevent the measurement result from fluctuating even if the output of the oscillator 11 fluctuates due to a change in temperature, a change with time, or the like.

  Furthermore, according to the present invention, the above-described configuration does not require the entire apparatus to be kept at a constant temperature, so that a temperature adjustment mechanism or the like can be omitted as compared with the prior art, and the cost associated with the apparatus can be reduced. In addition, since a waiting time until the temperature becomes stable is unnecessary, the measurement preparation period can be shortened.

It is a functional block diagram which shows the functional block of the spectrometer which concerns on 1st Embodiment. It is the slanting figure which showed the external appearance of the waveguide with a window. It is explanatory drawing for demonstrating the characteristic of a sealing material. It is a graph which shows the receiving strength measured in 1st Embodiment. It is a functional block which shows the functional block of the spectroscopy apparatus which concerns on 2nd Embodiment. In 2nd Embodiment, it is a graph which shows the receiving strength obtained by prior measurement. In 2nd Embodiment, it is a graph which shows the receiving strength obtained by this measurement. In 2nd Embodiment, it is the graph which remove | excluded the reception strength obtained by prior measurement from the reception strength obtained by this measurement. It is a functional block diagram which shows the functional block of the spectrometer which concerns on 3rd Embodiment. It is a graph which shows an example of the phase difference of the signal 1 and the signal 2 which were measured in 3rd Embodiment. It is a graph which shows another example of the phase difference of the signal 1 and the signal 2 which were measured in 3rd Embodiment. It is a functional block diagram which shows the functional block of the spectrometer which concerns on 4th Embodiment. It is a graph which shows an example of the spectrum acquired by a spectrometer.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Oscillator 12 ... Distributor 13 ... Waveguide 14 ... Waveguide with window 141 ... Opening (window)
DESCRIPTION OF SYMBOLS 15, 16 ... Sealing material 17 ... 1st receiver 18 ... 2nd receiver 19 ... Data processing part 20 ... Housing | casing 21 ... Opening / closing part 22 ... Phase difference detection part S101-S104 ... Step

Claims (5)

A spectroscopic device for measuring frequency response characteristics of a substance,
An oscillating means for oscillating an electromagnetic wave signal variably within a predetermined frequency range;
Distributing means for distributing the signal into two, a first signal and a second signal;
Waveguide means for guiding the first signal;
An opening having a frequency characteristic smaller than the predetermined frequency is provided on a side surface in the longitudinal direction, the substance is loaded through the opening, and the waveguide with the opening guides the second signal;
A sealing means that is formed in a short direction of the waveguide means with an opening and seals the loaded substance out of the waveguide means with an opening;
First receiving means for receiving the first signal guided through the waveguide means and measuring the reception intensity of the first signal;
Second receiving means for receiving the second signal guided through the waveguide means with an opening and measuring the reception intensity of the second signal;
Data processing means for calculating a difference in received intensity measured between the first receiving means and the second receiving means;
A spectroscopic device comprising:   The spectroscopic apparatus according to claim 1, further comprising opening / closing means that enables opening / closing of the opening.   A phase difference detecting means for measuring a phase difference between the first signal guided through the waveguide means and the second signal guided through the apertured waveguide means; The spectroscopic device according to claim 1, wherein the spectroscopic device is provided.   4. The spectroscopic device according to claim 1, wherein the spectroscopic device is disposed inside a housing that is hermetically sealed with respect to outside air except for the opening. 5. .   The spectroscopic apparatus according to claim 4, wherein the inside of the housing is filled with a vacuum or a gas that does not absorb electromagnetic waves of a signal oscillated by the oscillating means.

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