JP2009016678A5 - - Google Patents

Claims (13)

A fixed base provided with at least three levitation electromagnets arranged to face the movable base, a movable base supported by the non-contact magnetic levitation method with the levitation electromagnet, and a levitation provided in the movable base a gap sensor for control, and the two-dimensional linear sensor arranged in the center of the carriage, e Bei a linear motor for driving the carriage, optical measurement to detect the position near the center of gravity of the carriage A stage apparatus comprising means.   The opening is provided on one surface of the fixed base and the movable base parallel to the moving direction of the movable base in the Y-axis direction in order to measure the displacement of the movable base in the X-axis direction. The stage apparatus according to 1. The opening of the movable block, the stage apparatus according to claim 1 or 2, characterized in that said than the opening of the fixing stand is larger for a moving direction of the movable table in the Y-axis direction. The opening of the movable block, the stage apparatus according to any one of claims 1 to 3, characterized in that formed in the symmetrical structure with respect to the center of gravity of the movable portion. In the vicinity of the center of gravity of the movable table, the stage apparatus according to any one of claims 1 to 4, characterized in that the reflecting mirror of the optical measuring means is provided. The linear motor includes a Y-axis linear motor that moves the movable base in the Y-axis direction, and an X-axis linear motor that moves the movable base in the X-axis direction. The armature of the Y-axis linear motor includes the armature 6. The stage apparatus according to claim 1 , wherein the stage device is attached to an inner wall of a fixed base, and an armature of the X-axis linear motor is attached to an inner upper wall of the fixed base. .   7. The stage apparatus according to claim 6, wherein the Y-axis linear motor is composed of a permanent magnet having the armature attached to an inner wall of the fixed base and arranged to sandwich the armature from above and below. .   The stage apparatus according to claim 6, wherein the X-axis linear motor has the armature attached to an inner upper wall of the fixed base, and a permanent magnet disposed so as to face the armature. Wherein the X-axis linear motor, said attached to both the attachment member is a permanent magnet used in the Y-axis linear motors, the claims 6 to 8 wherein the mounting member to the movable platform is characterized in that it is fastened The stage apparatus as described. A fixed base provided with at least three levitation electromagnets arranged to face the movable base, a movable base supported by the non-contact magnetic levitation method with the levitation electromagnet, and a levitation provided in the movable base a gap sensor for control, and the two-dimensional linear sensor arranged in the center of the carriage, e Bei a linear motor for driving the movable table, wherein the gap sensor, low precision gap sensor and Z-axis optical measurement And measuring the gap between the movable table and the fixed table, and controlling the levitation using the signal of the low-precision gap sensor when the movable table ascends. A method for controlling a stage apparatus, wherein the flying height control is performed using the stage apparatus.   The linear motion actuator provided in the fixed base is rotationally corrected based on a detection signal of a rotation detection gap sensor provided in the fixed base, and the movable base is floated after the rotational correction. Item 15. A method for controlling a stage apparatus according to Item 10. A fixed base provided with at least three levitation electromagnets arranged to face the movable base, a movable base supported by the non-contact magnetic levitation method with the levitation electromagnet, and a levitation provided in the movable base based and gap sensors for control, and the two-dimensional linear sensor arranged in the center of the carriage, e Bei a linear motor for driving the movable table, the movable table is a signal of the two-dimensional linear sensor The stage apparatus control method is characterized in that the signals of the X-axis optical measuring means and the Y-axis optical measuring means are used as sensor signals when the movable table is positioned.   The exposure apparatus according to claim 1, wherein an object to be conveyed is positioned by the stage apparatus.