JP2009004807A - Method of manufacturing semiconductor device and apparatus for manufacturing the semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device and an apparatus for manufacturing the semiconductor device where the surface of a copper film is etched precisely, in a short time with few steps, while the surface roughness of the copper film is not progressed in the etching process of the surface of the copper film that includes oxidation of the copper film and removing the oxide thereof, with an acid or alkali. <P>SOLUTION: The method includes a step of filling a wiring groove or a contact hole, by stacking a wiring metal in the wiring groove or the contact hole formed on the insulation film on a semiconductor substrate, a step for exposing the insulating film by polishing the wiring metal, a step of cleaning the semiconductor substrate, and a step for recess etching the surface of the wiring metal embedded in the wiring groove or the contact hole. The main component of a chemical used in at least two steps, selected from among the polishing step, the cleaning step, and the recess etching step are the same. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method of manufacturing a semiconductor device such as a semiconductor integrated circuit, and a semiconductor manufacturing apparatus used in the manufacturing method.

  Currently, in semiconductor devices such as semiconductor integrated circuits, copper or a material mainly composed of copper is sometimes used for wiring. In such a case, in order to prevent copper atoms from diffusing into the insulating film and reaching the semiconductor substrate and causing a malfunction of the transistor, the insulating film wraps the copper film with titanium nitride, tantalum nitride, tungsten nitride or the like as a barrier metal layer. Often isolated from As shown in FIG. 13A, the wiring formed on the semiconductor substrate is normally buried in the wiring groove of the insulating film. FIG. 13 is a cross-sectional view of a semiconductor substrate. An interlayer insulating film 101 made of a silicon oxide film or the like is formed on a semiconductor substrate 100 such as silicon on which a semiconductor element such as an integrated circuit is formed, and a wiring groove is formed on this surface. A barrier metal layer 102 such as TiN or TaN is formed on the side wall of the wiring groove, and a copper film 103 or an alloy film containing copper as a main component is embedded therein. As described above, in the conventional wiring, copper in the wiring portion may diffuse from the upper part without the barrier metal into the interlayer insulating film, and may adversely affect the semiconductor element formed on the semiconductor substrate 100. In addition, since the surface of the interlayer insulating film 101 and the copper film 103 embedded in the interlayer insulating film 101 is flattened by a CMP method or the like, there is a problem in that pattern edges cannot be recognized during lithography and pattern deviation occurs. ing.

  To solve these problems, a method can be used in which the wiring portion, that is, the copper film 103 is retracted from the surface of the interlayer insulating film 101 by etching (FIG. 13B). With this shape, the pattern can be accurately matched. In addition, as shown in FIG. 13C, a structure may be formed in which a barrier metal layer 104 or other cap layer is buried in the upper portion to cover the lid. With such a structure, there is an effect that the diffusion of copper from the upper part is suppressed. Furthermore, when the via layer (contact wiring) with the upper layer wiring is formed by using a conductive material for the cap layer, copper is not directly exposed to the etching atmosphere, so that corrosion occurs or is etched. The risk of disconnection can be reduced.

  As a method of forming these conventional wiring structures, there are a method using wet etching and a method using dry etching. Dry etching includes anisotropic etching called RIE (Reactive Ion Etching) and isotropic etching called CDE (Chemical Dry Etching), and copper can be etched even by a method using them. However, these dry etching often uses a CF-based gas as a raw material gas, which has a problem of having a very bad influence on the global environment. In addition, since by-products are deposited after etching, there are many cases where wet processing is performed to remove the by-products, and there are many problems in terms of the number of processes and costs compared to wet processing. Therefore, attention is paid to wet etching. Copper is hardly dissolved in acids with weak oxidizing power such as hydrochloric acid, hydrofluoric acid, dilute sulfuric acid, acetic acid and hydrocyanic acid, but is etched with acidic chemicals with oxidizing power. Specifically, hot concentrated sulfuric acid, nitric acid, nitrous acid, phosphoric acid and the like. Also, for example, it dissolves in acids that have an oxidizing power by mixing hydrogen peroxide, ozone or oxygen, such as hydrochloric acid + hydrogen peroxide, hydrochloric acid + ozone, hydrofluoric acid + hydrogen peroxide. . In addition, substances that form soluble complexes with copper, such as ammonia, amino group-containing substances (ethylenediamine, etc.), cyanides (KCN, etc.), etc., are also etched, and these are mixed with hydrogen peroxide to increase the oxidizing power. In most cases, etching is accelerated.

  Usually, a mixed solution of ammonia water and hydrogen peroxide solution, and hydrochloric acid and hydrogen peroxide solution is used as a chemical solution for cleaning, and is called SC1 and SC2, respectively. The concentrations of commercially available ammonia water, hydrochloric acid, and hydrogen peroxide water are often about 20 to 35%. In most cases, SC1 and SC2 are in a volume ratio of 1: 1: 5 to pure water. It is used by mixing at about 1: 1: 7. Etching is performed when copper is immersed in a liquid mixed under such conditions. However, if copper is etched under SC1 or SC2 under the above-described conditions, the surface having metallic luster becomes cloudy and loses luster. Moreover, even if copper is etched using the various chemicals described above such as nitric acid and hot concentrated sulfuric acid, the surface becomes cloudy. This becomes more prominent if the liquid temperature is raised. The surface becomes cloudy because the copper surface has been roughened by etching. When the surface becomes rough when used in wiring, the substantial resistance increases due to film thickness variations and surface scattering. There is a possibility that a contact failure with the upper layer wiring may occur, which is a problem. Therefore, it is necessary to perform etching under such a condition that the surface is not roughened as much as possible.

As a method for etching copper, a method of oxidizing a copper film and removing the oxide with an acid or the like has been proposed. For example, Patent Document 1 proposes a method in which an oxide is formed by a method such as annealing after oxygen is ion-implanted into a copper film or oxygen plasma treatment, and etching is performed with dilute sulfuric acid or acetic acid. In Patent Document 2, a copper oxide film is formed by exposing a copper film to an oxygen (O ₂ ) or ozone (O ₃ ) atmosphere at room temperature or higher in a diffusion furnace, an RTA furnace, or an oven, and diluted hydrochloric acid or diluted sulfuric acid. There have been proposed methods of performing wet etching, removing by dry etching or CMP. However, even with these methods, the surface of copper after etching often becomes rough. In particular, this tendency is stronger as the temperature is raised to increase the thickness of the oxide film.
JP-A-2-306663 Japanese Patent Laid-Open No. 10-233397

In the method of etching the surface of the copper film by oxidizing the copper film and removing the oxide with an acid or alkali, the present invention is less likely to roughen the surface of the copper film after the etching treatment, Provided are a method for manufacturing a semiconductor device that can be accurately performed in a short time with a small number of steps, and a semiconductor manufacturing apparatus used in the manufacturing method.

  In the formation of the copper wiring, the present invention forms a copper oxide film containing an ammonia complex on the surface by exposing copper to a mixed solution (SC1) of ammonia water and hydrogen peroxide solution adjusted to pH = 8-10, Thereafter, the copper oxide film is selectively etched with an acid having a weak oxidizing power such as dilute hydrochloric acid or an alkali such as dilute aqueous ammonia. Further, in order to shorten the etching time, after immersing in pH = 8-10 to form an oxide film, it is usually immersed in SC1 adjusted to pH = 10-11 where copper should be etched, Furthermore, a copper oxide film containing a thick ammonia complex is formed, and this is selectively applied to the copper oxide film with an acid such as hydrochloric acid, acetic acid, dilute sulfuric acid, hydrocyanic acid, or an alkali such as dilute ammonia water. Etch.

  Also, copper oxide film can be selectively etched even if the solution is neutral, such as an aqueous solution of neutral amino acids such as glycine and alanine, even if it is neutral and forms a complex with copper. . Such an oxide film formation and etching process enables copper etching that has not been roughened until now, and enables oxidation and etching with a safe and inexpensive chemical solution in a short time. A barrier metal layer coated on the surface is stably formed.

  One aspect of a method for manufacturing a semiconductor device of the present invention includes a step of depositing a metal or a metal compound on a semiconductor substrate, and a step of etching away an unnecessary portion of the metal or metal compound. The step of depositing includes a plating step, and the plating solution used in the plating step is characterized in that the component that forms a salt or complex with the component to be plated is the same as the main component of the chemical used in the etching removal step. .

  According to another aspect of the present invention, there is provided a semiconductor manufacturing apparatus comprising: means for depositing a metal or a metal compound on a semiconductor substrate by plating; and means for etching away an unnecessary portion of the metal or metal compound. The main component of the chemical solution used in the above is characterized in that it is the same as the component that forms a salt or complex with the plating target component contained in the plating solution used in the plating.

  The present invention makes it possible to etch copper that does not roughen the surface, which has been difficult until now, and can perform oxidation and etching with a safe and inexpensive chemical solution in a short time, and as a result, a barrier metal that covers the surface of the wiring structure The layer is formed stably.

  Hereinafter, embodiments of the invention will be described with reference to examples. The present invention is applied to, for example, a pillar process, a single damascene structure, and a dual damascene structure in a multilayer wiring structure of a semiconductor device.

(1) Pillar Process FIG. 1 is a cross-sectional view of a semiconductor substrate on which a multilayer wiring is formed. The pillar wiring (also referred to as contact wiring) formed by this process is a wiring for connecting the lower layer wiring and the upper layer wiring. As shown in FIG. 1, a lower layer wiring embedded in an interlayer insulating film is formed. An interlayer insulating film 1 made of a silicon oxide film or the like is formed on a semiconductor substrate 10 made of silicon or the like on which a semiconductor element such as an integrated circuit is formed, and a wiring groove is formed on this surface. A barrier metal layer 2 such as a conductive nitride such as TaN, WN, or TiN is formed on the side wall of the wiring trench, and a copper film 3 or an alloy film containing copper as a main component is embedded therein. At this time, the barrier metal layer 2 exists only in the wiring trench, and is not formed on the surface of the interlayer insulating film 1 (FIG. 1A). It is also possible to form the barrier metal layer over the surface of the interlayer insulating film beyond the wiring trench. Next, the surface of the copper film 3 is retracted from the surface of the interlayer insulating film 1 by etching (FIG. 1C).
Then, a barrier metal is deposited on the upper part of the wiring groove by a method such as sputtering or CVD, and this is polished by a CMP method to bury the barrier metal layer 4 on the upper part of the wiring groove. The material of the barrier metal layer 4 may be the same as or different from that of the barrier metal layer 2 (FIG. 1R> 1 (d)). Next, a barrier metal layer 6 such as tungsten, an aluminum film 7 and, if necessary, a conductive etching stopper 8 are sequentially stacked (FIG. 2A), and these are patterned to form pillar wirings 9 (FIG. 2 (b)). Next, an interlayer insulating film 11 such as a silicon oxide film is formed on the interlayer insulating film 1 so as to cover the pillar wiring 9 (FIG. 3A). The surface of the interlayer insulating film 11 is polished by CMP to expose the pillar wiring 9. Next, an upper interlayer insulating film 12 is deposited on the interlayer insulating film 11, and an upper wiring is buried therein. The upper layer wiring is composed of a barrier metal layer 13 formed in the wiring groove, a copper film 14 embedded in the wiring groove, and a barrier metal layer 15 covering the surface of the copper film 14 (FIG. 3B). )). The pillar wiring 9 electrically connects the lower layer wiring and the upper layer wiring. In such a pillar process, the present invention is applied to the formation of the barrier metal layers 4 and 15. That is, for example, in the method of forming the barrier metal layer 4 (see FIG. 1), the exposed surface of the copper film 3 embedded in the insulating film 1 is oxidized to form the copper oxide film 5 (FIG. 1B). )). Then, the formed copper oxide film 5 is removed by etching to form a rough (not clouded) surface, and a barrier metal layer 4 is formed on this surface (FIG. 1C).

(2) Single Damascene FIG. 4 is a cross-sectional view of a semiconductor substrate on which a multilayer wiring is formed. On the semiconductor substrate 20, interlayer insulating films 21, 25 and 29 such as silicon oxide films are sequentially stacked. In each interlayer insulating film 21, 25, 29, a wiring groove and a contact hole are formed, and a lower layer wiring, a contact wiring, and an upper layer wiring are formed therein. In either case, after forming a wiring groove or contact hole in the interlayer insulating film, a barrier metal layer is formed inside and on the surface of the interlayer insulating film, and copper or an alloy film containing copper as a main component is deposited thereon. Then, this is polished by a CMP method or the like to flatten the surface, and a copper film wrapped in a barrier metal layer is embedded in the wiring groove or contact hole. Thereafter, according to the method of the present invention, the surface of the copper film is oxidized, and the formed copper oxide film is removed by etching to form a rough (non-cloudy) surface, and a barrier metal layer is formed on this surface. . That is, the present invention is applied to the formation of the barrier metal layers 24, 28, 32 in the multilayer wiring structure of the semiconductor device.

  The lower layer wiring embedded in the interlayer insulating film 21 includes a barrier metal layer 22 formed on the side wall of the wiring groove, a copper film 23 embedded in the wiring groove and wrapped in the barrier metal layer 22, and a surface of the copper film 23. The barrier metal layer 24 is covered. The contact wiring electrically connected to the lower layer wiring and embedded in the interlayer insulating film 25 includes a barrier metal layer 26 formed on the side wall of the wiring groove and a copper film embedded in the wiring groove and wrapped in the barrier metal layer 26. 27 and a barrier metal layer 28 that covers the surface of the copper film 27. The upper layer wiring electrically connected to the contact wiring and embedded in the interlayer insulating film 29 includes a barrier metal layer 30 formed on the side wall of the wiring groove, and a copper film embedded in the wiring groove and wrapped in the barrier metal layer 30 31 and a barrier metal layer 32 that covers the surface of the copper film 31. Since the barrier metal layer 24 is formed on the surface of the copper film 23 of the lower layer wiring, diffusion of copper from the upper part of the wiring can be suppressed. Further, since the surface is not rough, there is little influence of surface scattering and the like, and the increase in actual resistance is small. In addition, since the concentration of electric charges after the contact is formed is suppressed, there is an effect that electromigration hardly occurs.

  (3) Dual Damascene FIG. 5 is a cross-sectional view of a semiconductor substrate on which a multilayer wiring is formed. Interlayer insulating films 41 and 45 such as silicon oxide films are sequentially stacked on the semiconductor substrate 40. In each interlayer insulating film 41, 45, a wiring groove and a contact hole are formed, and a lower layer wiring, a contact hole and an upper layer wiring are formed therein. In either case, as in the case of single damascene, after forming a wiring groove or contact hole in the interlayer insulating film, a barrier metal layer is formed inside and on the surface of the interlayer insulating film, and copper or copper is formed thereon. An alloy film as a main component is deposited and polished by a CMP method or the like to flatten the surface, and a copper film wrapped in a barrier metal layer is embedded in a wiring groove or a contact hole. Thereafter, according to the method of the present invention, the surface of the copper film is oxidized, and the formed copper oxide film is removed by etching to form a rough (non-cloudy) surface, and a barrier metal layer is formed on this surface. . That is, the present invention is applied to the formation of the barrier metal layers 44 and 48 in the multilayer wiring structure of the semiconductor device.

  The lower layer wiring embedded in the interlayer insulating film 41 includes a barrier metal layer 42 formed on the side wall of the wiring groove, a copper film 43 embedded in the wiring groove and wrapped in the barrier metal layer 42, and the surface of the copper film 43. The barrier metal layer 44 is covered. The upper layer wiring electrically connected to the lower layer wiring through the contact wiring and embedded in the interlayer insulating film 45 includes a wiring groove and a barrier metal layer 46 formed on the side wall of the contact hole formed continuously with the groove. The copper film 47 is embedded in the wiring trench and the contact hole and is surrounded by the barrier metal layer 46, and the barrier metal layer 48 covering the surface of the copper film 47. When the present invention is applied, the same effect as a single damascene can be obtained. The embodiment of the present invention applied to the formation of the multilayer wiring structure of the semiconductor device will be described below.

  First, Embodiment 1 will be described with reference to FIGS. The feature of the present invention resides in the discovery of a method for etching a copper film without roughening the surface. That is, this is a method in which an oxide film containing an ammonia complex is formed on the surface of the copper film and then removed by etching. Specifically, a comparatively thick oxide film is formed on the surface without etching copper by adjusting the mixed solution of ammonia water and hydrogen peroxide solution between pH = 8-10 or 9-10, In this method, the oxide film is etched away with an acid having no oxidizing power such as dilute hydrochloric acid or an alkali such as dilute aqueous ammonia. As described above, the mixed solution (SC1) of normal ammonia water and hydrogen peroxide solution etches copper, and the pH at that time is about 10.5 to 11. The inventors' experiments have shown that an oxide film is formed on the surface when the pH is 10 or less, and copper is etched when the pH exceeds 10.

  Therefore, FIG. 6 shows the etching amount of copper when an oxide film is formed on the surface by immersing in SC1 whose pH is adjusted for 1 minute and the oxide film is selectively etched with dilute hydrochloric acid. In FIG. 6, the vertical axis represents the etching amount (nm) and the horizontal axis represents the pH. As shown in FIG. 6, an oxide film was formed on the copper surface even when immersed in about 18% hydrogen peroxide solution, and the etching amount at that time was about 4 nm. However, when ammonia water was added and neutralized to pH = 7, it was hardly oxidized. Further, ammonia water was added, and the etching amount increased from around pH 8 and reached 11 to 12 nm at about pH = 10. Furthermore, when the pH exceeded 10, deep blue ammonia complex ions were formed and dissolved. 7A shows the copper surface before the treatment, and (b) the copper after the oxide film is etched with hydrochloric acid after being oxidized with a mixed solution of ammonia water and hydrogen peroxide solution having a pH of 9.5 for 1 minute. FIG. 8 (a) shows the surface of copper etched with a mixed solution of ammonia water and hydrogen peroxide water having a pH of 10.2, and FIG. 8 (b) shows the relationship between hydrochloric acid and hydrogen peroxide water. Each SEM image of the surface when copper is etched with a liquid mixture (80 degreeC) is shown. From this figure, it can be seen that etching is performed without roughening the copper surface by using a mixed solution of ammonia water and hydrogen peroxide water whose pH is adjusted.

  In order to ensure alignment during lithography, etching of 30 to 50 nm is desirable, and the etching time is desirably as short as possible. Even if the treatment with only the hydrogen peroxide solution, which is considered to be relatively thick, can be performed, it takes 12 to 13 minutes to etch 50 nm. Therefore, it is good to process with the liquid of pH = 8-10, desirably 9-10. In particular, by using a solution having a pH of about 10, etching of 50 nm can be performed in about 4 minutes. However, simply adjusting the pH is not enough. That is, as shown in FIG. 6, for example, even when copper is immersed in a liquid whose pH is adjusted to 9 to 10.5 by mixing hydrogen peroxide and KOH or by mixing hydrogen peroxide and choline, it is hardly oxidized. . That is, it is important to use ammonia.

  Next, Example 2 will be described. As described in the first embodiment, the etching amount of copper is preferably 30 nm to 50 nm. However, even if copper is immersed in SC1 whose pH is adjusted to 10, only 12 nm can be etched in 1 minute. Therefore, in this embodiment, a method will be described in which the surface is not roughened while the etching amount is further increased. This is a method in which an oxide film is formed as a copper film on the surface by immersing it in a solution consisting only of hydrogen peroxide solution or at pH = 8-10, and subsequently immersing this copper film in SC1 at pH = 10-11. It is. Although pH = 10 to 11 is usually a condition for etching, a thicker oxide film is formed by forming an oxide film on the surface in advance. For example, when mixed at a mixing ratio of hydrogen peroxide water (35%): ammonia water (35%): pure water = 10: 3: 100, pH = 10. After immersing the copper film in this solution for 30 seconds, A thick oxide film is formed on the copper film by immersing it in a solution whose composition ratio is changed to 1: 1: 10 (pH = 10.5) for 1 minute and 30 seconds, and then only the oxide film containing the ammonia complex is etched with dilute hydrochloric acid. Then, the etching amount of copper becomes 50 nm. This is about twice as much as the amount of etching when immersed in the liquid of the first embodiment for 2 minutes, which is the total processing time, so that the processing time can be sufficiently shortened.

  Next, Embodiment 3 will be described with reference to FIGS. In this embodiment, for example, the actual copper wiring is etched for the buried copper wiring of FIG. 1 and the lower wiring shown in FIGS. After immersing in SC1 adjusted to pH = 10 (hydrogen peroxide water: ammonia water: pure water = 10: 3: 100) for 1 minute, the surface oxide film is removed with dilute hydrochloric acid obtained by diluting 20% hydrochloric acid 50 times. FIG. 9 shows a sectional view of a 0.25 μm line & space wiring obtained by repeating the above three times and etching copper by about 35 to 40 nm. In FIG. 9, an interlayer insulating film 51 formed on the semiconductor substrate 50 is formed, and in this interlayer insulating film 51, a wiring groove 54 in which a barrier metal layer 52 is deposited on the side wall is formed. The copper film 53 is embedded in the wiring groove 54. The copper wiring having such a structure is formed with an oxide film and etched as described above to form a rough surface. Thereafter, TaN or WN is deposited as a second barrier metal on the surface without roughening by a sputtering method, a CVD method, or the like, and a barrier metal layer 55 is formed by performing a CMP process.

  As shown in FIG. 9, the rough surface formed by etching the copper film 53 has a cross-sectional shape in which the closer to the side wall of the wiring groove 54, the larger the etching amount, and the so-called wiring shoulder has dropped. Therefore, the barrier metal layer 55 formed on the barrier metal layer 55 is thicker as it is closer to the side wall of the wiring groove 54. Such a shape is often a merit when carrying out the present invention. That is, FIG. 10 is a schematic cross-sectional view for explaining this merit. 10A shows the copper wiring with the shoulder of the wiring shown in FIG. 9 dropped, and FIG. 10B shows the barrier metal layer covering the copper wiring almost uniformly at the end of the copper wiring surface. The copper wiring in a state of being substantially flat is shown. In order to form a contact wiring that connects the upper wiring to the lower wiring, it is necessary to form a contact hole (via) in the interlayer insulating film deposited on the lower wiring. As shown in the figure, when the contact hole is formed on the barrier metal layer formed on the upper surface of the copper wiring in order to form the contact wiring, the etching region for forming the contact hole partially enters the interlayer insulating film due to misalignment. There is. When the interlayer insulating film covering the barrier metal layer of the lower layer wiring is etched in such a state, the etching rate of the interlayer insulating film (silicon oxide film) is larger than the etching rate of the copper film, so the etching of the interlayer insulating film proceeds. This portion is greatly etched to open as shown by broken lines in FIGS. 10 (a) and 10 (b).

  In FIG. 10A, the diameter of the deep part is a, and the depth is b. In FIG. 10B, the diameter of the deep portion is a ′ and the depth is b ′. Since the etching rate depends on the material, b ′ = b. When the shoulder of the wiring in FIG. 10A is dropped, the diameter of the deep portion is larger than the diameter when the surface of FIG. 10B is flat (a> a ′). That is, the deep part of FIG. 10B is like a pocket. Therefore, the aspect ratio (b ′ / a ′) of this part is the aspect ratio (b / b) of the deep part of FIG. a) significantly higher. Therefore, it is difficult to deposit a barrier metal layer in the contact hole of FIG. 10B and to form the seed copper film when using a plating method as a method of embedding copper in the contact hole. A barrier metal layer is deposited in the contact hole of FIG. 10A, and a seed copper film can be easily deposited. Of course, this is not limited to copper, but also applies to any wiring or contact metal film of a semiconductor device, and a barrier layer is not formed on the metal film but a barrier layer is formed on the entire surface. The present invention can also be applied to a case where an interlayer insulating film is directly deposited.

  Next, Example 4 will be described. After dipping in SC1 adjusted to pH = 10 (hydrogen peroxide water: ammonia water: pure = 10: 3: 100) for 30 seconds, SC1 at pH = 10.5 (mixing ratio 1: 1: 10) was 1 minute. Etching of about 50 nm becomes possible by removing the oxide film on the surface of the copper wiring immersed for 30 seconds and oxidizing the surface with dilute ammonia water obtained by diluting 35% ammonia water to 3/10 with pure water. Thereafter, similarly to Example 3, TaN or WN can be deposited as a second barrier metal layer on the upper layer by a sputtering method, and a wiring structure as shown in FIG. 3 can be formed by polishing by a CMP method.

  Next, Example 5 will be described with reference to FIG. In this embodiment, a process for forming a copper wiring to which the present invention is applied will be described. FIG. 11 is a process diagram illustrating a copper wiring formation process. As shown in the figure, in the process of forming a copper wiring, first, (1) a wiring groove is formed in an interlayer insulating film. Next, (2) a barrier metal layer made of conductive nitride such as TaN, WN, or TiN is deposited on the bottom and side surfaces of the wiring trench by sputtering, CVD, or the like. Next, (3) Cu is deposited so as to be embedded in the wiring groove by sputtering, plating, CVD or the like. Next, (4) Cu alone or Cu and the barrier metal layer are polished by CMP to form a buried Cu wiring in the interlayer insulating film. Next, (5) wafer cleaning after CMP is performed. Thereafter, bevel and backside Cu etching and cleaning are performed as necessary. Finally, (6) the Cu recess process of the present invention is performed. Since the chemical solution of the present invention can be polished while protecting the Cu surface by forming an oxide film, it can also be used as a Cu-CMP slurry. In addition, after normal CMP, physical cleaning such as roll sponge and pencil sponge is performed in the same manufacturing device or another device, but when the chemical used at this time is alkaline, the particle cleaning effect is high. Is well known. Since the pH of the chemical solution of the present invention is also on the alkali side, it is effective when used for cleaning to remove residual abrasive grains (such as alumina and silica) after CMP.

  Further, when sputtering or CVD is used, Cu is also deposited on the bevel portion and the back surface of the wafer. When depositing by plating using Cu deposited by sputtering or CVD as a seed, Cu deposited on the bevel portion is used as an electrode, but Cu in the bevel portion becomes unnecessary after plating. The bevel and the back surface of the wafer are portions where various devices come into contact with each other for transporting and chucking when a semiconductor device is manufactured. When such a portion has Cu contamination, other wafers may be contaminated through the manufacturing apparatus. Therefore, it is necessary to etch and clean Cu on the wafer bevel and the back surface after Cu-CMP. This may be performed before CMP, but the bevel and the back surface are again contaminated with Cu during CMP, so that after CMP is preferable. In order to etch and clean the back surface and the bevel at the same time, while rotating the wafer in a rotary single wafer apparatus, from the back surface side, the oxidizing power of a mixture of hydrochloric acid and hydrogen peroxide, nitric acid, hot concentrated sulfuric acid, phosphoric acid, etc. The treatment may be performed by discharging a chemical solution capable of dissolving Cu such as a certain acid. However, when etching is performed by such a method, there is a problem that Cu in the device portion on the surface is oxidized only in the vicinity of the wafer edge after the processing. This is considered to be because oxidation is promoted by vaporizing from the chemical solution or by leaving gases such as HCl, NOx, and SOx generated during etching on the Cu surface.

  In order to remove such an oxide film, processing is performed with an acid having a weak oxidizing power such as hydrochloric acid or dilute sulfuric acid, but there is a problem that the Cu film thickness is reduced only in the vicinity of the oxidized wafer edge. In order to avoid this, while rotating the wafer, a nozzle that discharges the chemical solution only on the bevel portion while flowing pure water from the front surface side is provided to treat the bevel portion, and at the same time, the chemical solution is also discharged from the back surface to remove the back surface. There is a case where a method of processing is adopted. However, there is a problem that the structure of the manufacturing apparatus becomes complicated and the price of the apparatus becomes expensive because a dedicated nozzle has to be provided from the hardware side, and pure water should be poured from the surface also from the process side. Therefore, the chemical solution cannot be collected and circulated and reused as an etching solution, which increases the amount of chemical solution used. However, if a thick oxide film is formed in advance on the Cu surface after CMP by the method of the present invention, the above-described problem does not occur even by chemical treatment from the back surface. Therefore, when forming a Cu wiring, the same chemical solution can be used in all steps from the Cu-CMP step ((4)) to the Cu recess step ((7)) in FIG. It becomes possible to process.

  The fact that the same chemical solution can be used has the advantage that the structure can be simplified when manufacturing the semiconductor device, and that the processing can be performed continuously in the same manufacturing device, Since there is no need to dry each process, there is a merit of improving throughput. For example, FIG. 14 is a schematic cross-sectional view of a semiconductor manufacturing apparatus performed in the same chamber, and a copper wiring forming process will be described using the process shown in FIG. First, (1) a wiring trench is formed in the interlayer insulating film. Next, (2) a barrier metal layer is deposited on the bottom and side surfaces of the wiring trench. Next, (3) Cu is deposited so as to be embedded in the wiring groove by plating. This step is performed in the Cu plating tank 61. Next, (4) Cu alone or Cu and the barrier metal layer are polished by CMP in the CMP apparatus 62 to form a buried Cu wiring in the interlayer insulating film. This step is performed by the CMP apparatus 62. Next, (5) wafer cleaning after CMP is performed in the post-CMP cleaning apparatus 63. After that, (6) Bevel / backside Cu etching and cleaning are performed. This step is performed in the etching bath 64. Then, (7) Cu recess processing is performed in the etching bath 64. The Cu plating tank 61, the CMP apparatus 62, the post-CMP cleaning apparatus 63, the etching tank 64, and the processing tank 65 can be disposed in one chamber 60 to perform this copper wiring forming process.

  In this chamber 60, the drainage from the Cu plating tank 61 and the etching tank 64 in each internal device is collected in the processing tank 65, the copper concentration is monitored, the oxidizing agent such as ozone is removed, and the sulfuric acid concentration is adjusted. This is returned to the plating tank 61. Thus, resources can be recycled in the semiconductor manufacturing apparatus according to the present invention.

  As shown in the schematic cross-sectional view of the semiconductor manufacturing apparatus in FIG. 15, the semiconductor manufacturing apparatus in FIG. 14 includes a plating tank 61, an etching tank 64, and a processing tank 65. The processing tank 65 includes a concentration adjusting unit and a plating solution unit that adjusts the plating solution. The drainage liquid from the etching tank 64 is adjusted while supplying pure water, a component that forms a salt / complex, or the like to the concentration adjusting unit. Then, the adjusted liquid is supplied to the plating liquid section to form the plating liquid. Then, this is supplied to a plating tank (plating chamber) 61. When the amount of drainage from the etching chamber 64 is small relative to the used plating solution from the plating chamber 61, only the draining solution from the etching chamber 64 is adjusted, and the used plating solution is collected directly in the plating solution section. May be. When the plating process is incorporated in the same device, the solution after etching copper or copper oxide is the same as the plating solution, such as sulfuric acid if the plating solution used is copper sulfate aqueous solution, or hydrocyanic acid if the copper cyanide aqueous solution is used. It is good to make it an ingredient. This is because the components contained in the chemical solution for etching and the used plating solution are almost the same, so that there is a merit that the drainage treatment can be performed simultaneously. Also, by performing the plating again using the chemical solution after etching, a process with very high copper utilization efficiency can be created.

  However, it is difficult to etch metallic copper with only an acid having weak oxidizing power such as dilute sulfuric acid or hydrocyanic acid. Therefore, it is preferable to use hydrogen peroxide or ozone which becomes water or oxygen after reaction or decomposition as an oxidizing agent for imparting oxidizing power. For example, when using a 10% aqueous solution of copper sulfate as the plating solution, the copper or copper oxide is etched with 10% sulfuric acid (+ hydrogen peroxide or ozone), and the copper concentration in the etching solution is adjusted to the ion concentration or weight. Monitor in-line with absorbance, etc., collect and circulate until it exceeds 10%. Of course, sulfuric acid having a concentration different from that of the plating solution may be used or may not be circulated. Since it is difficult to increase only the copper concentration, it is desirable that the copper concentration be equal to or higher than that of sulfuric acid. Finally, hydrogen peroxide and ozone in the etching solution are completely decomposed by activated carbon filter or UV lamp irradiation, etc., while adding copper and sulfuric acid concentrations, adding sulfuric acid and pure water, or heat treatment Then, the target 10% aqueous copper sulfate solution is prepared by concentration using a semipermeable membrane such as a reverse osmosis membrane or the like. Thereafter, additives necessary for plating are added and used for plating. At this time, the concentration of the used plating solution may be adjusted at the same time, or the concentration adjusted solution may be added to the plating solution little by little. Of course, the concentration monitor, the oxidizing agent removing mechanism, and the chemical solution concentrating mechanism are not limited to those described above, and any one may be used. The process and apparatus for reusing the solution after etching as a plating solution are not limited to copper, but can be used for any material including metals such as Au, Ag, and Ti that can be plated.

Next, Example 6 will be described with reference to FIG. FIG. 12 is a characteristic diagram for explaining the dependency of the wafer wiring resistance on the wafer rotation speed in the ammonia treatment during the Cu recess. In this embodiment, in the Cu recessing process, a rotary single wafer apparatus is used, and (1) · NH ₄ OH: H ₂ O ₂ : DIW (30: 100: 1000), 60 seconds, 1000 rpm, (2) · When a treatment of NH ₄ OH: H ₂ O ₂ : DIW (100: 100: 100), 60 seconds, 1000 rpm, (3) · HCl (30: 1000), 5 seconds, 1000 rpm is performed, a Cu recess of about 50 nm can be formed. . However, the Cu surface that was terminated by the hydrochloric acid treatment is rapidly oxidized. If the Cu surface is oxidized, there is a problem that effective Cu that can be used as a wiring is reduced and a wiring cross-sectional area is also reduced, resulting in an increase in wiring resistance. Also, if a Cu oxide film is formed between the Cu surface and the upper barrier metal, the contact resistance with the upper via increases as a device, or it causes a delay due to the capacitance. there is a possibility. In addition, when forming the upper barrier metal also in terms of process, it is necessary to manage the time after the recess processing and deposit the upper barrier metal quickly, or there is a possibility that peeling will occur during CMP. There's a problem.

However, it was found that oxidation was suppressed when treatment with aqueous ammonia was performed after treatment with hydrochloric acid. However, since ammonia water etches Cu, excessive treatment causes the surface to become rough. It has been found that when a rotary single wafer apparatus is used for Cu etching with aqueous ammonia, etching characteristics depending on the rotational speed are exhibited. The following graph shows that after forming a 0.35-μm wide Cu wire (wiring resistance of about 342 mΩ) on an 8-inch silicon wafer on 19 chips in the wafer surface, Cu was etched with 3.5% ammonia water for 10 minutes. The wiring resistance (Ω) after the plot is plotted with the wafer rotation speed as a parameter. If the Cu of the wiring is etched to reduce the cross-sectional area, the resistance increases. 3 × 10 ⁴ mΩ indicates that Cu has been completely etched. At that time, if the uniformity of etching in the wafer surface is poor, the variation in resistance increase becomes large, and if the uniformity is good, it is small. It can be seen that the variation becomes smaller at 1000 rpm or more, the minimum value is taken around 1475 rpm, and a variation equivalent to about 1000 rpm is obtained at 1600 rpm.

Etching was also performed at 2000 rpm, but in this case, 400 nm of Cu was completely etched. Since it is desired to treat only the surface, it is not desirable to perform the treatment under such a high etching rate condition. As the number of rotations is increased from 1600 rpm, the etching rate is expected to increase. Therefore, the processing condition is preferably 1600 rpm or less. Therefore, it is desirable to perform the ammonia treatment for suppressing oxidation within a range of 1000 rpm to 1600 rpm. Therefore, when the ammonia treatment was actually performed after the recess process, the surface of Cu after being stored in a clean room atmosphere for 24 hours was oxidized with a brown finish, whereas the finish with ammonia was finished with an ammonia finish. Had the same level of metallic luster as before. Processing _{conditions, (1) · NH 4 OH} : H 2 O 2: DIW (30: 100: 1000), 60 seconds, 1000rpm, (2) · NH 4 OH: H 2 O 2: DIW (100: 100: 100), 60 seconds, 1000 rpm, (3) · HCl (30: 1000), 5 seconds, 1000 rpm (4) · NH ₄ OH: DIW (30: 1000), 5 seconds, 1475 rpm.

Sectional drawing of the semiconductor substrate explaining the manufacturing process of the semiconductor device of this invention. Sectional drawing of the semiconductor substrate explaining the manufacturing process of the semiconductor device of this invention. Sectional drawing of the semiconductor substrate explaining the manufacturing process of the semiconductor device of this invention. Sectional drawing of the semiconductor substrate in which the multilayer wiring of this invention was formed. Sectional drawing of the semiconductor substrate in which the multilayer wiring of this invention was formed. The characteristic view which shows the copper etching amount at the time of forming an oxide film on the surface by immersing in SC1 which adjusted pH for 1 minute, and etching an oxide film selectively with dilute hydrochloric acid. The figure which shows each SEM image of the copper surface before an etching, and the surface when copper is etched with the etching method of this invention. The figure which shows each SEM image of the surface when etching copper with the liquid mixture of hydrochloric acid and hydrogen peroxide water, and the liquid mixture (pH = 10.2) of ammonia water and hydrogen peroxide water. The sectional view of the semiconductor substrate explaining the surface shape of the copper wiring of the wiring groove formed in the interlayer insulation film of the present invention. The schematic cross section of the semiconductor substrate explaining the effect of this invention. The schematic cross section of the semiconductor substrate explaining the effect of this invention. The characteristic view explaining the wafer rotation speed dependence of the wiring resistance of the wafer in the ammonia process at the time of Cu recess. Sectional drawing of the semiconductor substrate which shows the conventional embedded wiring structure. 1 is a schematic cross-sectional view of a semiconductor manufacturing apparatus that implements a semiconductor device manufacturing method according to the present invention. The schematic sectional drawing explaining recycling of the semiconductor manufacturing apparatus which enforces the manufacturing method of the semiconductor device of this invention.

Explanation of symbols

1, 11, 12, 21, 25, 29, 41, 45, 51, 101 ... interlayer insulating film 2, 4, 6, 13, 15, 22, 24, 26, 28, 30, 32, 42, 46 , 52, 55, 102 ... barrier metal layer 3, 7, 14, 23, 27, 31, 43, 47, 53, 103 ... copper film 5 ... copper oxide film formed on the copper film surface 8 ... Stopper film 9 ... Pillar wiring (contact wiring) 10, 20, 40, 50, 100 ... Semiconductor substrate 60 ... Chamber 61 ... Cu plating tank 62 ... CMP apparatus 63 ..Cleaning device after CMP 64 ... Etching tank 65 ... Processing tank

Claims (12)

Depositing a metal or metal compound on a semiconductor substrate;
Etching away unnecessary portions of the metal or metal compound,
The step of depositing the metal or metal compound includes a plating step, and the plating solution used in the plating step is the same as the main component of the chemical solution used in the etching removal step in the component that forms a salt or complex with the component to be plated. A method for manufacturing a semiconductor device.   The method for manufacturing a semiconductor device according to claim 1, wherein the chemical solution used in the step of removing the unnecessary portion by etching contains an oxidizing agent. Removing the oxidizing agent contained in the chemical solution after the step of removing the unnecessary portion by etching;
Adjusting the metal ion concentration in the chemical solution from which the oxidizing agent has been removed;
The method for manufacturing a semiconductor device according to claim 1, further comprising a step of using the chemical solution with the metal ion concentration adjusted as a plating solution.   4. The method of manufacturing a semiconductor device according to claim 2, wherein the oxidizing agent is hydrogen peroxide or ozone.   The metal or metal compound is any one of a copper film, an alloy film containing copper as a main component, a silver film, and an alloy film containing silver as a main component. The manufacturing method of the semiconductor device as described in 2.   6. The method of manufacturing a semiconductor device according to claim 1, wherein the chemical solution used in the etching removal step contains sulfuric acid or hydrocyanic acid as a main component.   The step of etching away the unnecessary portion of the metal or metal compound includes a step of etching away at least one of the bevel portion or the back surface of the semiconductor substrate. The manufacturing method of the semiconductor device of description. In a semiconductor manufacturing apparatus comprising: means for depositing a metal or a metal compound by plating on a semiconductor substrate; and means for etching away an unnecessary portion of the metal or metal compound.
The main component of the chemical solution used for the etching removal is the same as the component that forms a salt or complex with the plating target component contained in the plating solution used in the plating.   9. The semiconductor manufacturing apparatus according to claim 8, wherein the chemical solution used for removing the unnecessary portion by etching contains an oxidizing agent. Means for removing the oxidizing agent contained in the chemical solution after the step of etching away unnecessary portions;
Means for adjusting a metal ion concentration in the chemical solution from which the oxidizing agent has been removed;
The semiconductor manufacturing apparatus according to claim 8, further comprising means for using the chemical solution with the adjusted metal ion concentration as a plating solution.   The semiconductor manufacturing apparatus according to claim 9, wherein the oxidizing agent is hydrogen peroxide or ozone.   12. The means for etching away unnecessary portions of the metal or metal compound includes means for etching away at least one of a bevel portion or a back surface of the semiconductor substrate. Manufacturing method for semiconductor manufacturing equipment.

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