JP2008530433A - 分子ドラッグ真空ポンプ用バッフル構造 - Google Patents

分子ドラッグ真空ポンプ用バッフル構造 Download PDF

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Publication number
JP2008530433A
JP2008530433A JP2007555121A JP2007555121A JP2008530433A JP 2008530433 A JP2008530433 A JP 2008530433A JP 2007555121 A JP2007555121 A JP 2007555121A JP 2007555121 A JP2007555121 A JP 2007555121A JP 2008530433 A JP2008530433 A JP 2008530433A
Authority
JP
Japan
Prior art keywords
baffle
rotor disk
flow channel
tangential flow
molecular drag
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007555121A
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English (en)
Japanese (ja)
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JP2008530433A5 (enExample
Inventor
ハブラニアン，マースベッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Publication of JP2008530433A publication Critical patent/JP2008530433A/ja
Publication of JP2008530433A5 publication Critical patent/JP2008530433A5/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/16—Sealings between pressure and suction sides
    • F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
    • F04D29/162—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of a centrifugal flow wheel

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2007555121A 2005-02-08 2006-01-27 分子ドラッグ真空ポンプ用バッフル構造 Pending JP2008530433A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/053,560 US7223064B2 (en) 2005-02-08 2005-02-08 Baffle configurations for molecular drag vacuum pumps
PCT/US2006/002948 WO2006086166A1 (en) 2005-02-08 2006-01-27 Baffle configurations for molecular drag vacuum pumps

Publications (2)

Publication Number Publication Date
JP2008530433A true JP2008530433A (ja) 2008-08-07
JP2008530433A5 JP2008530433A5 (enExample) 2009-03-05

Family

ID=36370997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007555121A Pending JP2008530433A (ja) 2005-02-08 2006-01-27 分子ドラッグ真空ポンプ用バッフル構造

Country Status (5)

Country Link
US (1) US7223064B2 (enExample)
EP (1) EP1846659B1 (enExample)
JP (1) JP2008530433A (enExample)
DE (1) DE602006013789D1 (enExample)
WO (1) WO2006086166A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US20110194950A1 (en) * 2010-02-10 2011-08-11 Shenoi Ramesh B Efficiency improvements for liquid ring pumps
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
CN111766017B (zh) * 2020-05-22 2022-12-06 中国航发贵州红林航空动力控制科技有限公司 一种喷嘴挡板密封性检查通用装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000506952A (ja) * 1996-12-19 2000-06-06 バリアン・メディカル・システムズ・インコーポレイテッド 粒子のビルドアップに対して感受性が低いターボ分子真空ポンプ
US6866488B2 (en) * 1999-10-18 2005-03-15 Sarcos Lc Compact molecular-drag vacuum pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610477B2 (ja) 1987-05-13 1994-02-09 株式会社日立製作所 タ−ボ真空ポンプ
DE3919529C2 (de) 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
GB9609281D0 (en) 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB2333127A (en) 1997-10-21 1999-07-14 Varian Associates Molecular drag compressors having finned rotor construction
GB9810872D0 (en) 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
ITTO20020370A1 (it) 2002-05-06 2003-11-06 Varian Spa Stadio di pompaggio per pompa da vuoto.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000506952A (ja) * 1996-12-19 2000-06-06 バリアン・メディカル・システムズ・インコーポレイテッド 粒子のビルドアップに対して感受性が低いターボ分子真空ポンプ
US6866488B2 (en) * 1999-10-18 2005-03-15 Sarcos Lc Compact molecular-drag vacuum pump

Also Published As

Publication number Publication date
US20060177300A1 (en) 2006-08-10
DE602006013789D1 (de) 2010-06-02
EP1846659A1 (en) 2007-10-24
WO2006086166A1 (en) 2006-08-17
US7223064B2 (en) 2007-05-29
EP1846659B1 (en) 2010-04-21

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