JP2008522813A - 二酸化炭素雪装置 - Google Patents
二酸化炭素雪装置 Download PDFInfo
- Publication number
- JP2008522813A JP2008522813A JP2007545702A JP2007545702A JP2008522813A JP 2008522813 A JP2008522813 A JP 2008522813A JP 2007545702 A JP2007545702 A JP 2007545702A JP 2007545702 A JP2007545702 A JP 2007545702A JP 2008522813 A JP2008522813 A JP 2008522813A
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- snow
- capillary
- segment
- generation system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 306
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 153
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 153
- 238000004519 manufacturing process Methods 0.000 claims abstract description 54
- 239000007788 liquid Substances 0.000 claims abstract description 33
- 239000003990 capacitor Substances 0.000 claims abstract description 24
- 239000007787 solid Substances 0.000 claims abstract description 21
- 238000003754 machining Methods 0.000 claims abstract description 5
- 239000007921 spray Substances 0.000 claims description 71
- 239000000758 substrate Substances 0.000 claims description 43
- 239000002245 particle Substances 0.000 claims description 36
- 239000012530 fluid Substances 0.000 claims description 27
- 239000000203 mixture Substances 0.000 claims description 15
- 238000012545 processing Methods 0.000 claims description 14
- 239000002131 composite material Substances 0.000 claims 3
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 86
- 238000000034 method Methods 0.000 description 69
- 230000008569 process Effects 0.000 description 56
- 239000007789 gas Substances 0.000 description 44
- 239000000443 aerosol Substances 0.000 description 15
- 239000003380 propellant Substances 0.000 description 14
- 239000004696 Poly ether ether ketone Substances 0.000 description 12
- 229920002530 polyetherether ketone Polymers 0.000 description 12
- 238000002360 preparation method Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 8
- 239000007790 solid phase Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 238000011065 in-situ storage Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 239000012071 phase Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000005476 soldering Methods 0.000 description 5
- 229920006362 Teflon® Polymers 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000012636 effector Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000002085 persistent effect Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000012777 commercial manufacturing Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 239000013527 degreasing agent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 239000002920 hazardous waste Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000004023 plastic welding Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 230000001141 propulsive effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002937 thermal insulation foam Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US63523004P | 2004-12-13 | 2004-12-13 | |
| PCT/US2005/044863 WO2006065725A1 (en) | 2004-12-13 | 2005-12-13 | Carbon dioxide snow apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008522813A true JP2008522813A (ja) | 2008-07-03 |
| JP2008522813A5 JP2008522813A5 (enExample) | 2009-02-05 |
Family
ID=38292756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007545702A Ceased JP2008522813A (ja) | 2004-12-13 | 2005-12-13 | 二酸化炭素雪装置 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1824614A4 (enExample) |
| JP (1) | JP2008522813A (enExample) |
| MX (1) | MX2007007079A (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013078735A (ja) * | 2011-10-05 | 2013-05-02 | Air Water Inc | ドライアイススノー噴射装置およびドライアイススノーの噴射方法 |
| JP2015050402A (ja) * | 2013-09-04 | 2015-03-16 | 株式会社ディスコ | 洗浄手段を備えた切削装置 |
| JP2015518415A (ja) * | 2012-03-30 | 2015-07-02 | デュール システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 塗装設備用ドライアイス洗浄手段 |
| JP2016511135A (ja) * | 2012-12-18 | 2016-04-14 | ポステック アカデミー‐インダストリー ファウンデーション | 超高速均一ナノ粒子生成ノズル、生成装置および生成方法 |
| JP2016533517A (ja) * | 2013-09-27 | 2016-10-27 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学装置、特にプラズマ光源またはeuvリソグラフィ装置 |
| JP7447345B1 (ja) | 2023-07-28 | 2024-03-11 | リックス株式会社 | ドライアイス噴射装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019125443A1 (en) | 2017-12-20 | 2019-06-27 | Halliburton Energy Services, Inc. | Capture and recycling methods for non-aqueous cleaning materials |
| DE102019108289A1 (de) * | 2019-03-29 | 2020-10-01 | acp systems AG | Vorrichtung zum Erzeugen eines CO2-Schnee-Strahls |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1993696A (en) * | 1932-05-09 | 1935-03-05 | C O Two Fire Equipment Co | Fire extinguishing apparatus |
| JPH1172278A (ja) * | 1997-07-14 | 1999-03-16 | Praxair Technol Inc | 液体二酸化炭素から微粉雪粒子を生成する装置 |
| JP2000035269A (ja) * | 1989-03-01 | 2000-02-02 | Polar Technol Internatl Pty Ltd | 雪の形成方法及び装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2978187A (en) * | 1959-01-23 | 1961-04-04 | Chemetron Corp | Carbon dioxide fire extinguishing nozzle |
| US5456629A (en) * | 1994-01-07 | 1995-10-10 | Lockheed Idaho Technologies Company | Method and apparatus for cutting and abrading with sublimable particles |
-
2005
- 2005-12-13 EP EP05853712A patent/EP1824614A4/en not_active Withdrawn
- 2005-12-13 MX MX2007007079A patent/MX2007007079A/es not_active Application Discontinuation
- 2005-12-13 JP JP2007545702A patent/JP2008522813A/ja not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1993696A (en) * | 1932-05-09 | 1935-03-05 | C O Two Fire Equipment Co | Fire extinguishing apparatus |
| JP2000035269A (ja) * | 1989-03-01 | 2000-02-02 | Polar Technol Internatl Pty Ltd | 雪の形成方法及び装置 |
| JPH1172278A (ja) * | 1997-07-14 | 1999-03-16 | Praxair Technol Inc | 液体二酸化炭素から微粉雪粒子を生成する装置 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013078735A (ja) * | 2011-10-05 | 2013-05-02 | Air Water Inc | ドライアイススノー噴射装置およびドライアイススノーの噴射方法 |
| JP2015518415A (ja) * | 2012-03-30 | 2015-07-02 | デュール システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 塗装設備用ドライアイス洗浄手段 |
| US10279453B2 (en) | 2012-03-30 | 2019-05-07 | Durr Systems Gmbh | Dry-ice cleaning in a painting installation |
| JP2016511135A (ja) * | 2012-12-18 | 2016-04-14 | ポステック アカデミー‐インダストリー ファウンデーション | 超高速均一ナノ粒子生成ノズル、生成装置および生成方法 |
| JP2015050402A (ja) * | 2013-09-04 | 2015-03-16 | 株式会社ディスコ | 洗浄手段を備えた切削装置 |
| JP2016533517A (ja) * | 2013-09-27 | 2016-10-27 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学装置、特にプラズマ光源またはeuvリソグラフィ装置 |
| JP7447345B1 (ja) | 2023-07-28 | 2024-03-11 | リックス株式会社 | ドライアイス噴射装置 |
| JP2025019419A (ja) * | 2023-07-28 | 2025-02-07 | リックス株式会社 | ドライアイス噴射装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1824614A4 (en) | 2012-08-29 |
| EP1824614A1 (en) | 2007-08-29 |
| MX2007007079A (es) | 2007-12-07 |
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