JP2008502010A5

JP2008502010A5 -

Info

Publication number: JP2008502010A5
Application number: JP2007515671A
Authority: JP
Filing date: 2005-06-06
Publication date: 2008-07-24
Anticipated expiration: 2025-06-06

Claims

A method for adjusting the amplitude or energy of a plurality of continuous laser output pulses directed at a workpiece, comprising:
Generating a plurality of continuous laser pulses along the beam path that impinge on the workpiece at the beam position and having a greatly varying energy amplitude;
Diverting a portion of each of the plurality of continuous laser output pulses to an amplitude or energy detector;
Transmitting information regarding the amplitude or energy of each of the plurality of continuous laser output pulses directly or indirectly to an acousto-optic modulator controller; and prior to a predetermined one of the plurality of continuous laser output pulses. In response to the information regarding the amplitude or energy of one or more of the plurality of continuous laser output pulses, the plurality of continuous laser outputs applied to the acousto-optic modulator to affect the amplitude or energy. Modulating the radio frequency signal.

Further, the plurality of continuous laser outputs through a beam splitting element disposed along the beam path downstream of the acousto-optic modulator to divert a portion of each of the plurality of continuous laser output pulses to an amplitude or energy detector. The method of claim 1, comprising propagating a pulse.

A laser system for adjusting the amplitude or energy of a plurality of continuous laser output pulses directed to a workpiece, comprising:
A laser medium that facilitates generation of the plurality of continuous laser pulses along an optical path;
An acousto-optic modulator positioned along the optical path to propagate a plurality of continuous laser output pulses along the beam path to the workpiece;
A transducer associated with the acousto-optic modulator;
A beam splitting element that deflects a portion of each of the plurality of continuous laser output pulses away from the beam path;
An amplitude or energy detector that receives portions of the plurality of continuous laser output pulses and transmits information about the amplitude or energy of each of the plurality of continuous laser output pulses;
One of the plurality of continuous laser output pulses in response to the information regarding one or more of the amplitude or energy of the plurality of continuous laser output pulses before a predetermined one of the plurality of continuous laser output pulses. And an acousto-optic modulator radio frequency driver that modulates a radio frequency signal applied to the transducer to affect the amplitude or energy above.

4. A method or system according to claim 1, 2 or 3, wherein the amplitude or energy of a continuous laser output pulse varies by less than 5%.

5. A method or system according to claim 3 or 4, wherein the plurality of continuous laser output pulses are generated by a solid state UV harmonic laser.

7. A method or system according to any preceding claim, wherein the amplitude or energy of a continuous laser output pulse varies by less than 1%.

7. A method or system according to any preceding claim, wherein the amplitude or energy of the plurality of continuous laser output pulses varies due to laser instability or thermal drift.

The method according to any of claims 1 to 7, wherein the amplitude or energy of the plurality of continuous laser output pulses varies from radio frequency energy applied inconsistently by thermal heating of the acousto-optic modulator or system.

9. A method or system according to any preceding claim, wherein the plurality of continuous laser output pulses are generated by a solid state harmonic laser.

The beam path collides with the acousto-optic modulator at a Bragg angle with respect to the beam entrance surface of the acousto-optic modulator or at an angle close thereto, and the radio frequency signal applied to the acousto-optic modulator is Frequency modulated to affect the predetermined one exit angle of the plurality of continuous laser output pulses propagating along the beam path to a workpiece, and the radio frequency signal is the beam path from the Bragg angle 10. A method or system according to any of the preceding claims, which compensates for deviations from Bragg efficiency resulting from a shift in the exit angle.

71. A method or system according to any of claims 1-10, 54, 58-70, wherein the beam path impinging on the workpiece comprises a primary beam path propagated from the acousto-optic modulator.

60. The method or system of claim 1-10, 54, or 59, wherein the beam path impinging on the workpiece comprises a zero order beam path propagated from the acousto-optic modulator.

The method or system of claim 12, wherein the acousto-optic modulator directs the portion of the plurality of laser output pulses to the amplitude or energy detector.

The laser beam has a laser pulse energy, and the acousto-optic modulator is used to prevent the laser pulse energy greater than 10% from propagating along the beam path impinging on the workpiece; The method or system of claim 12.

15. The method or system of claim 14, wherein the acousto-optic modulator is used to prevent the laser pulse energy greater than 75% from propagating along the beam path impinging on the workpiece.

16. The method or system of claim 15, wherein the acousto-optic modulator is used to prevent propagation of the laser pulse energy greater than 90% along the beam path impinging on the workpiece.

44. A method or system according to any of claims 1-16, 25, 28-34, 37-43, wherein the acousto-optic modulator uses at least first and second transducers.

The method or system of claim 17, wherein the acousto-optic modulator has two substantially vertical axes, and the first and second transducers modulate a common transducer zone.

19. The method or laser system of any of claims 1-18, wherein the acousto-optic modulator constitutes the beam splitting element and directs a portion of a plurality of successive laser output pulses to the amplitude or energy detector.

20. A method or laser according to any preceding claim, wherein the acousto-optic modulator comprises at least two transducers responsive to the acousto-optic modulator radio frequency driver to modulate a single modulation axis. system.

An acousto-optic modulator control system for controlling an acousto-optic modulator adapted to be positioned along a beam path between a laser and a workpiece, said acousto-optic modulator comprising: a beam entrance surface; A beam exit surface; and a first transducer positioned on the first transducer surface of the acousto-optic modulator and modulating in a first transducer modulation zone, the first transducer surface Is in a first plane transverse to the beam entrance surface, and the acousto-optic modulator also provides a Bragg angle with respect to the beam entrance surface, the first transducer modulation zone, and / or the beam exit surface. And
The system
In order to shift the beam path away from the Bragg angle in the first transducer modulation zone to influence the deflection angle of the beam path along a first Cartesian axis, the first transducer A first radio frequency driver including or communicating with a variable frequency controller adapted to apply a first frequency of one radio frequency signal;
A controller for delivering information about Bragg efficiency to the first radio frequency driver to adjust the first amplitude to compensate for derivation from the Bragg efficiency resulting from a shift of the beam path from the Bragg angle. Including
An acousto-optic modulator control system, wherein the first radio frequency driver is also adapted to adjust a first amplitude of the first radio frequency signal applied to the first transducer.

The acousto-optic modulator control system of claim 21, wherein the Bragg efficiency compensation data includes a look-up table.

The acousto-optic modulator control system according to claim 21, wherein the Bragg efficiency compensation data includes an algorithm based on a function of sinc.

The laser beam comprises a pulse having a maximum peak power and / or energy;
Whenever a working pulse is desired to strike the workpiece and the first exit angle is at or close to the Bragg angle, a reduced peak power and / or energy is passed through the acousto-optic modulator and Laser indirect power is used so that it can propagate along the beam path, and the reduced peak power and / or energy is less than the maximum peak power and / or energy,
It is more desirable to cause a working pulse to strike the workpiece and to propagate through the acousto-optic modulator and along the beam path whenever the first exit angle shifts from the Bragg angle. High compensation peak power and / or energy is acceptable,
22. The acousto-optic modulator of claim 21, wherein the higher compensation peak power and / or energy is greater than the reduced peak power and / or energy and less than the maximum peak power and / or energy.

A beam deflection angle range of an acousto-optic modulator having a first transducer positioned on a first surface in response to a first radio frequency driver having a first frequency limit corresponding to the first deflection angle range limit. A method of strengthening
Generating a laser beam along the beam path that impinges on the workpiece at the first beam position;
Propagating the laser beam through the acousto-optic modulator positioned along the beam path;
Controlling a first frequency of a first radio frequency signal applied to the first transducer on the acousto-optic modulator; and a second disposed on a second surface of the acousto-optic modulator. Controlling a first frequency of a first radio frequency signal applied to the two converters;
The second transducer surface is in a second plane transverse to the entrance surface and the beam entrance surface and is substantially parallel to or coplanar with the first transducer surface, the second transducer being In a second transducer modulation zone that traverses the beam path to affect a deflection angle of the beam path along the first workpiece axis;
The method further includes a provisional beam on the workpiece to collide with the workpiece at a desired beam position resulting from a cooperative deflection angle of the beam path given by the first and second radio frequency signals. Adjusting the first and second radio frequency signals to detect the laser beam from a position.

A method of suppressing laser beam propagation along a beam path that collides with a workpiece,
Generating a laser beam,
Propagating the laser beam along an optical path to a first acousto-optic modulator having a first transducer;
A majority of the beam propagates to the first beam dump and a small portion of the beam continues to propagate along the beam path, the beam path between the first acousto-optic modulator and the workpiece. A second acousto-optic modulator, and the second acousto-optic modulator has a second transducer to suppress propagation of the laser beam along the beam path impinging on the workpiece And modulating most of the fraction of the beam to a second beam dump, thereby causing the laser beam along the beam path to impinge on the workpiece. Modulating the second transducer to suppress propagation of the fractional portion of the laser beam along the beam path impinging on the workpiece to suppress propagation.

27. The method of claim 26, wherein the beam path impinging on the workpiece comprises a zero order beam path.

A method of modulating an acousto-optic modulator in a laser system to suppress laser beam propagation along a beam path impinging on a workpiece,
Generating a laser beam,
Radio frequency applied to the acousto-optic modulator to propagate a laser beam along an optical path to the acousto-optic modulator and to prevent propagation of the laser beam along the beam path impinging on the workpiece Modulating the frequency of the signal.

30. The method of claim 28, further comprising selecting a frequency at which the laser beam propagates along the beam path for impinging on the workpiece.

30. The method of claim 29, further comprising modulating an amplitude of a signal that affects an intensity of a laser beam impinging on the workpiece.

A laser system for processing workpieces that are sensitive to stray laser radiation,
A laser medium that facilitates generation of a laser beam along the optical path;
An acousto-optic modulator positioned along the optical path;
A transducer associated with the acousto-optic modulator;
Whenever it is not desired to impinge the laser beam on the workpiece, a major portion of the laser beam is propagated to a beam dump, and whenever it is desirable to impinge the laser beam on the workpiece, the laser beam A variable frequency controller that modulates the frequency applied to the acousto-optic modulator through the transducer to propagate the main part of the to the workpiece.

32. The laser system of claim 31, wherein the amplitude of the frequency is adjusted to affect the intensity of the laser beam impinging on the workpiece.

The acousto-optic modulator includes a wave set time for establishing a sound wave in the acousto-optic modulator for propagating a laser beam along a beam path that impinges on the workpiece, and the frequency of the applied radio frequency signal 35. Any time the laser beam propagation along the beam path is prevented, it is continuously changed within a time interval shorter than the wave set time. A method or system as described.

34. The method or system of claim 33, wherein the frequency of the applied radio frequency signal is alternated between two selected frequencies within the time interval.

35. A method or system according to any of claims 1, 3, 25, 26, 28-34, wherein the frequency of the applied radio frequency signal is alternated between two selected frequencies.

35. A method or system according to any of claims 1, 3, 25, 26, 28-34, wherein the frequency of the applied radio frequency signal is alternated between multiple frequencies.

34. The method or system of any of claims 1, 3, 25, 26, 31-33, wherein the frequency of the applied radio frequency signal is varied between multiple frequencies within the time interval.

38. A method or system according to any of claims 1, 3, 25, 26, 28-33, 37, wherein the frequency is modulated to create white noise.

39. A method or system according to any of claims 1, 3, 25, 26, 28-33, 37, 38, wherein the amplitude of the radio frequency signal is reduced whenever beam propagation is prevented.

The acousto-optic modulator is a first acousto-optic modulator and a second acousto-optic modulator is used along the beam path to enhance beam extinction capability whenever the beam path is prevented 40. A method or system according to any of claims 1, 3, 25, 26, 28-33, 37-39.

41. The method or system of claim 40, wherein different frequencies are used in the first and second acousto-optic modulators.

Diverting a portion of the laser beam to a detector that transmits information directly or indirectly to a laser controller that directly or indirectly adjusts the modulation of the radio frequency signal applied to the acousto-optic modulator 42. A method or system according to any of claims 1, 3, 25, 26, 28-33, 37-41, wherein the beam splitting element is arranged downstream of the beam path of the acousto-optic modulator for this purpose.

43. The method or system of claim 42, wherein the modulation adjustment enhances pulse-to-pulse output amplitude stability of the laser beam.

18. The method or system of claim 17, wherein the at least two transducers modulate common transducer modulation across the beam path to affect a beam path deflection angle along a common Cartesian axis.

The at least two transducers modulate each first and second transducer modulation zone that traverses the beam path to affect a deflection angle of the beam path along different common Cartesian axes. 18. The method or system according to 17.

The method or system of claim 17, wherein the at least two transducers modulate at different frequencies.

47. A method or system according to any of claims 1, 3, 25, 26, 28-33, 37-46, wherein the acousto-optic modulator is used as a Q switch.

The acousto-optic modulator has a beam entrance surface, and the radio frequency signal is applied to a transducer to create a transducer modulation zone within the acousto-optic modulator, the beam path comprising the beam entrance surface or 48. Any one of claims 1, 3, 25, 26, 28-33, 37-47, impinging on the acousto-optic modulator at a Bragg angle or close to it with respect to the first transducer modulation zone. Method or system.

49. A method according to any of claims 1, 3, 25, 26, 28-33, 37-48, wherein the radio frequency signal is applied at one or more frequencies having substantially zero Bragg efficiency. Or system.

A first transducer is connected to the acousto-optic modulator and is used whenever laser beam propagation along the beam path is prevented, the acousto-optic modulator being used to impinge on the workpiece 50. A device according to any of claims 1, 3, 25, 26, 28-33, 37-49, comprising a second transducer that is used at the selected frequency whenever laser beam propagation along the path is selected. Method or laser system.

51. A method or laser system according to any of claims 1, 3, 25, 26, 28-33, 37-50, wherein the acousto-optic modulator is used as an external cavity pulse collector.

Further, applying the first frequency while preventing application of the second radio frequency signal to achieve the deflection propagation direction, or the first radio frequency to achieve the deflection propagation direction. 29. The method of claim 28, comprising applying the second frequency while preventing application of a signal.

The beam path impinges on the acousto-optic modulator at an entrance angle that is at or close to the Bragg angle relative to the beam entrance surface or the first transducer modulation zone, and the first and second transformations. The modulator modulation zones share a common zero-order beam path, and the first frequency controls the first deflection angle to be at or near the primary beam path from the first transducer modulation zone. 53. The method of claim 52, wherein the second frequency controls the second deflection angle to be in or close to a primary beam path from the second transducer modulation zone.

An acousto-optic modulator suitable for positioning along a beam path between a laser and a workpiece having first and second transverse axes, said beam entrance surface, a beam exit surface, and said acousto-optic modulation An acousto-optic modulator having a first transducer positioned on a first transducer surface of the transducer and wherein the first transducer surface is in a first plane transverse to the beam entrance surface A way to enhance performance,
Generating a laser beam along a beam path that impinges on the workpiece;
Propagating the laser beam through the acousto-optic modulator positioned along the beam path;
Applied to the first transducer that modulates within a first transducer modulation zone that traverses the beam path to affect a first exit angle of the beam path along the first plane axis. Controlling the frequency of the first radio frequency signal; and a second of the second radio frequency signal applied to a second transducer positioned on a second transducer surface of the acousto-optic modulator. Including controlling the frequency,
The second transducer surface is in a second plane that intersects the beam entrance surface and the first surface, and the second transducer is a second one of the beam path along the second surface axis. Modulating in a second transducer modulation zone that traverses the first transducer modulation zone and traverses the beam path to affect an exit angle of 2;
The method further includes:
Cooperative deflection angle resulting from the first and second exit angles provided by the first and second transducers in response to the first and second frequencies of the first and second radio frequency signals. Adjusting the first and second frequencies to deflect the beam path along the first and second plane axes to impinge on the workpiece at a desired beam position. .

And providing a low speed motion control signal and a high speed motion control signal from the positioning signal processor;
In response to the low speed motion control signal, using a low speed positioning driver to control a wide range of relative beam directing movements along the conversion axis in a conversion stage;
In response to the fast motion control signal, controlling the narrow range relative beam pointing motion of the acousto-optic modulator with the first and / or second transducer;
Performing the wide range of relative beam-directed motion between the beam path and the workpiece in the converting step, and colliding with the workpiece at a desired beam position; 55. The method of claim 54, comprising performing the narrow range of relative beam directing motion between the acousto-optic modulators.

Further, obtaining error information regarding a difference between the beam path and the desired beam position, and using the error information to compensate for the difference between the beam path and the desired beam position. 56. The method of claim 55, comprising conveying to a second transducer.

Further, obtaining error information regarding the difference between the beam path along the scan line and the desired beam position off-axis but parallel to the scan line, and parallel to the scan line above the workpiece 56. The method of claim 55, comprising conveying the error information to the first and / or second transducer to deflect the laser beam for impinging on the desired beam position.

An acoustooptic modulator control system for controlling an acoustooptic modulator adapted to be disposed along a beam path between a laser and a workpiece, said acoustooptic modulator comprising: a beam entrance surface; A beam exit surface; and a first transducer positioned on the first transducer surface of the acousto-optic modulator and modulating in a first transducer modulation zone, the first transducer surface Is in a first plane transverse to the beam entrance surface, the first transducer being adapted to modulate in a first transducer modulation zone across the beam path;
The system
A second transducer adapted to modulate in a second transducer modulation zone that traverses the beam path, the second transducer surface being in a second plane transverse to the beam entrance surface; A second transducer attached to the
A first radio at a first frequency to the first transducer for modulating within the first transducer modulation zone to affect a deflection angle of the beam path along a first Cartesian axis. A first radio frequency driver adapted to apply a frequency signal, the first radio frequency driver including or in communication with a variable frequency controller;
The second angle to influence the deflection angle of the beam path along the first Cartesian axis, such that the deflection angle results from applying the first and second radio frequency signals simultaneously. An acousto-optic modulator control system comprising a second radio frequency driver including or in communication with a variable frequency controller for applying a second radio frequency signal of a second frequency to the converter of the first.

An acousto-optic modulator control system for controlling an acousto-optic modulator suitable for being positioned along a beam path between a laser and a workpiece, said acousto-optic modulator comprising a beam entrance surface, a beam exit And a first transducer positioned on the first transducer surface of the acousto-optic modulator, the first transducer surface being in a first plane transverse to the beam entrance surface And wherein the first transducer is adapted to modulate in a first transducer modulation zone that traverses the beam path;
The system
A second transducer attached to a second transducer surface at a second surface that traverses the beam entrance surface and adapted to modulate in a second transducer modulation surface that traverses the beam path A second transducer to be
A first frequency at a first frequency is applied to the first transducer that modulates within the first transducer modulation zone to affect a first exit angle of the beam path along a first Cartesian axis. A first radio frequency driver including or in communication with a first variable frequency controller adapted to apply a radio frequency signal;
A second exit angle of the beam path along a second Cartesian axis that traverses the first Cartesian axis so that a cooperative deflection angle results from simultaneously applying the first and second radio frequency signals. Applying a second radio frequency signal of a second frequency to the second transducer that modulates a second transducer modulation zone that traverses the first transducer modulation zone to influence. An acousto-optic modulator control system that includes a second radio frequency driver that includes or is in communication with the adapted second variable frequency controller.

Further, a beam position for adjusting the first and second frequencies for deflecting the beam path with the acousto-optic modulator to collide with the workpiece at a desired beam position resulting from the deflection angle. 60. A method or acousto-optic modulator control system according to claim 58 or 59 comprising a controller.

61. The acousto-optic modulator control system of claim 58 or 60, wherein the first and second radio frequency drivers comprise a single radio frequency driver.

104. The method or acousto-optic modulator control system of claim 58, 60 or 103, wherein the first and second radio frequency drivers comprise separate radio frequency drivers.

63. A method or acousto-optic modulator control system according to any of claims 58, 60 to 62, wherein the first and second radio frequency drivers comprise different frequency ranges.

64. The method or acousto-optic modulator control system of claim 54, 58-63 or 103, wherein the first and second frequencies are different.

114. The method or acousto-optic modulator control system of claim 54, 58-64, 80 or 103, wherein the first and second frequencies are related in a harmonic fashion.

90. The method or acousto-optic modulator control system of claim 54, 58, 60-65, 80 or 89, wherein the first and second frequencies are substantially coincident.

90. The method or acousto-optic modulator control system of claim 54, 58, 60-66, 80 or 89, wherein the first and second frequencies do not substantially match.

90. The method of claim 54, 58, 60-67, 80 or 89, wherein the first and second transducer surfaces are coplanar and the first and second transducer modulation zones do not overlap. Or acousto-optic modulator control system.

90. The method or sound of claim 54, 58, 60-68, 80 or 89, wherein the first and second transducer faces are parallel and the first and second transducer modulation zones do not overlap. Optical modulator control system.

90. The method or acousto-optic modulation of claim 54, 58, 60-69, 80 or 89, wherein the deflection angle has a range that includes at least 100 milliradians relative to the plane of the first transducer modulation zone. Control system.

The acousto-optic modulator is suitable for collision by a beam path at or near the Bragg angle with respect to the beam entrance surface or the first transducer modulation zone, or claim 11, 54, 58-70, 88 or 101. A method or acousto-optic modulator control system according to 101.

102. The method or acousto-optic modulator control system of claim 11, 54, 58-71, 88 or 101, wherein the deflection angle has a range that includes at least 50 milliradians relative to the Bragg angle.

59. The first transducer is responsive to a high frequency driver for a larger Bragg angle range and the second transducer is responsive to a low frequency driver for a smaller Bragg angle range. 72. A method or acousto-optic modulator control system according to 72, 88 or 101.

102. A method or acousto-optic modulator control system according to claim 11, 54, 58-72, 88 or 101, wherein the acousto-optic modulator control system forms part of a laser system.

The acousto-optic modulator is adapted to perform a narrow range of relative beam direction motion between the beam path and the workpiece, and the first and second transducers are responsive to a high-speed motion control signal. Controlling the relative beam direction motion of the narrow range of the acousto-optic modulator,
The system further includes
A low speed positioner that provides a wide range of relative motion between the beam path and the workpiece, including a translating stage that is movable along a translating axis;
A positioning signal processor for deriving a low speed motion control signal and a high speed motion control signal from the positioning command;
Adjusting the acousto-optic modulator with the low-speed positioner detects the beam path to collide with the workpiece at a desired beam position, the conversion in response to the low-speed motion control signal 104. A method or acousto-optic modulator control system according to claim 74 or 103, comprising a slow positioner driver for controlling the relative beam direction motion of a wide range of stages.

The laser beam includes at least different first and second wavelengths, and the acousto-optic modulator is configured such that the first frequency modulates the first wavelength and the second frequency modulates the second wavelength. 104. A method or acousto-optic modulator control system according to claim 74 or 103, adapted to:

The first and second radio frequency drivers are adapted to adjust the first and second frequencies to deflect the first and second wavelengths propagating substantially along a common beam path. 77. The method or acousto-optic modulator control system of claim 76.

78. The method or acousto-optic modulator control system of claim 77, wherein the first and second wavelengths are diffracted at or close to an angle that satisfies a Bragg condition.

The beam path impinges on the acousto-optic modulator at an angle that is at or close to the Bragg angle relative to the first transducer modulation zone, and the radio frequency applied to the acousto-optic modulator A signal is a frequency that is modulated to affect an exit angle of the predetermined one of the plurality of successive laser output pulses propagating along the beam path to the workpiece; and the radio frequency signal Affects the amplitude or energy of the predetermined one of the plurality of successive laser output pulses to compensate for deviations from Bragg efficiency resulting from shifting the exit angle of the beam path from the Bragg angle. 102. A method or acousto-optic modulator control system according to claim 11, 54, 58-72, 88 or 101, modulated to provide.

The first transducer is responsive to a first radio frequency driver having a first frequency limit corresponding to a first deflection angle range limit and a second frequency limit corresponding to a second deflection angle range limit. 59, wherein the second frequency is different from the first frequency and the deflection angle is greater than the first and second deflection angle ranges. 102. The method or acousto-optic modulator control system of 72, 88 or 101.

The first transducer is responsive to a first radio frequency driver and corresponds to a first deflection angle generated by applying the first radio frequency signal to the first transducer. The second converter is responsive to a second radio frequency driver and is generated by applying the second radio frequency signal to the second converter; Having a second frequency response limit corresponding to the second deflection angle, wherein the first and second frequencies have different and different phases, and the deflection angle is the first or second resolution. 102. A method or acousto-optic modulator control system according to claim 11, 54, 58-72, 88 or 101, which provides a more accurate cooperative resolution.

The first and second transducer planes are parallel, the first and second transducer modulation zones substantially overlap, and the phase of the first and second radio frequency signals slightly reduces the deflection angle. 82. The method or acousto-optic modulator control system of claim 81, adjusted to adjust.

The first and second transducer planes are coplanar, the first and second transducer modulation zones do not overlap, and the first and second frequencies fine tune the cooperative deflection angle. 82. A method or acousto-optic modulator control system according to claim 81 tuned for.

The first and second transducer surfaces are parallel, the first and second transducer modulation zones substantially overlap, the first and second frequencies are the same frequency and increase diffraction efficiency 82. A method or acousto-optic modulator control system according to claim 81, wherein phase acquisition is performed for the purpose.

60. The method or system of claim 54 or 59, wherein the first and second transducer modulation zones are substantially orthogonal.

60. The method or system of claim 54 or 59, wherein the first and second transducer modulation zones intersect.

The first and second radio frequency signals each have first and second amplitudes, and the first and / or second amplitudes are determined from the Bragg angle to the first and / or the beam path. 72. The method or system of claim 71, adjusted to compensate for deviations from Bragg efficiency resulting from a shift in the second exit angle.

A third frequency of the third radio frequency signal is applied to a third transducer positioned on a third transducer surface of the acousto-optic modulator, the third transducer surface deviating from the beam entrance surface. Substantially across, the third transducer modulates the first exit angle in a third transducer modulation zone that traverses the beam path and the first and third radio frequency signals control the exit angle. 55. The method of claim 54, wherein the methods are influenced to cooperate.

102. The method or system of claim 88 or 101, wherein the first and third transducer modulation zones are substantially parallel.

102. The method or system of claim 88 or 101, wherein the first and third transducer modulation surfaces are coplanar.

The third transducer is oriented at a small angle and spaced from the first transducer such that the first and third transducer modulation zones are non-parallel and do not overlap. 102. The method or system according to item 88 or 101.

102. The method or system of claim 88 or 101, wherein the first and third frequencies are different.

102. The method or system of claim 88 or 101, wherein the first and third frequencies are the same.

90. The method or system of claim 89, wherein the first and third frequencies are generally related with respect to harmonics.

102. The method or system of claim 88 or 101, wherein the first and third frequencies have different phases.

The first and third radio frequency signals cooperate to control the first exit angle at a resolution that exceeds the resolution that either the first or third transducer can provide alone. 102. The method or system according to item 88 or 101.

The first and third radio frequency signals control the first exit angle to include a cooperative deflection angle range that exceeds a deflection angle range that either the first or third transducer can independently provide. 102. The method or system of claim 88 or 101, which cooperates to do so.

60. The acousto-optic modulator control system of claim 59, wherein the first and second radio frequency drivers are adapted to provide unique first and second frequencies.

60. A method according to claim 54 or 59, wherein the acousto-optic modulator is adapted to be positioned to impinge the beam path on the acousto-optic modulator at an angle that is substantially perpendicular to the beam entrance surface. Or acousto-optic modulator control system.

The first and second radio frequency drivers are configured to compensate the deviation from Bragg efficiency resulting from a shift in the first and / or second exit angle of the beam path from the Bragg angle. 72. The acousto-optic modulator control system of claim 71, adapted to adjust a first amplitude of a frequency signal and a second amplitude of the second radio frequency signal.

A third transducer for modulating within a third transducer modulation zone disposed on a third transducer surface in a third plane substantially transverse to the beam entrance surface;
The third transducer modulation zone across the beam path and affecting the first exit angle such that the first and third radio frequency signals cooperate to control the first exit angle. 60. An acousto-optic modulator control system according to claim 59, further comprising: a third radio frequency driver for modulating a third frequency of a third radio frequency signal applied to the third transducer for modulating within .

90. The method or acousto-optic modulator control system of claim 89, wherein the first and third radio frequency drivers are adapted to provide first and second frequencies that are substantially coincident.

A first acousto-optic modulator suitable for positioning along a beam path between a laser and a workpiece, the first beam entrance surface, a first beam exit surface, and traversing the beam path A first acousto-optic modulator having a first transducer having a first transducer modulation surface adapted to
A first transducer attached to a first transducer surface transverse to the first beam entry surface;
A first radio frequency driver for applying a first radio frequency signal of a first frequency to the first transducer for modulation in the first transducer modulation zone, the first variable frequency A first radio frequency driver including or in communication with a controller, wherein the first frequency affects a first deflection angle of the beam path emerging from the first beam exit surface;
A second acousto-optic modulator adapted to be positioned along the beam path between the first acousto-optic modulator and the workpiece, the second beam entry surface and the second beam exit A second acousto-optic modulator having a surface and a second transducer modulation zone adapted to traverse the beam path;
A second transducer attached to a second transducer surface transverse to the second beam entrance surface;
A second radio frequency driver for applying a second radio frequency signal of a second frequency to the second transducer for modulation within the second transducer modulation zone, wherein the second variable frequency A second radio frequency driver including or in communication with the controller, the second radio frequency driver,
The second frequency affects the second deflection angle of the beam path emerging from the second beam exit surface, and the first and second acousto-optic modulators are The first and second transducer modulation axes are along a common workpiece axis relative to the surface of the workpiece such that two deflection angles cooperate to provide a cooperative deflection angle with respect to the beam path. An acousto-optic modulator control system positioned along the beam path to affect the deflection of the beam path.

104. The acousto-optic modulator control system of claim 103, further comprising a controller that applies the first and second radio frequency signals simultaneously to create the cooperative deflection angle.

The first acousto-optic modulator is configured to reduce the loss of Bragg efficiency resulting from the second deflection angle shift in the beam path of the second beam entrance surface of the second acousto-optic modulator. 104. The acousto-optic modulator control system of claim 103, suitable for shifting the second entrance angle.

The first and second entrance angles of the beam path are modified to be close to or close to a Bragg angle with respect to the beam entrance surface and the beam exit surface of the acousto-optic modulator, and the Bragg angle Deviating the beam path from the angle reduces Bragg efficiency to lower Bragg efficiency as a function of the degree of shift of each exit angle from the Bragg angle, with larger angle shifts producing undesirable lower Bragg angles. ,
The control system applies to the workpiece at a desired beam position resulting from a cooperative deflection angle provided by the first and second acousto-optic modulators having an overall Bragg efficiency greater than the undesirable low Bragg efficiency. Adapted to adjust the second entrance angle and the second frequency of the second radio frequency signal to deviate the beam path from a nominal beam position on the workpiece for collision. 106. The acousto-optic modulator control system of claim 105.

104. The acousto-optic modulator control system of claim 103, wherein the cooperative deflection angle has a range greater than 100 milliradians.

104. The acousto-optic modulator control system of claim 103, wherein the acousto-optic modulator control system forms part of a laser system.

109. The acousto-optic modulator control system of claim 108, wherein the beam path impinging on the workpiece includes a primary beam path propagated from the first and second acousto-optic modulators.

A method for enhancing the performance of an acousto-optic modulator suitable for positioning along a beam path between a laser and a workpiece, said acousto-optic modulator comprising: a beam entrance surface; a beam exit surface; A first transducer positioned on the first transducer surface of the optical modulator and modulating within the first transducer modulation zone, wherein the first transducer surface traverses the beam entrance surface. In the first plane to
The method is
Generating a laser beam along the beam path that impinges on the workpiece at the nominal beam position;
Propagating the laser beam through the acousto-optic modulator positioned along the beam path, and a first deflection angle of the beam path along a first workpiece material axis relative to the surface of the workpiece. Controlling the application of a first frequency of a first radio frequency signal applied to the first transducer that modulates within a first transducer modulation zone that traverses the beam path to affect The second transducer surface is in a second plane transverse to the beam entrance surface, and the second transducer is a second deflection of the beam path along the first workpiece axis. Modulating in a second transducer modulation zone that traverses the beam path to affect the angle, the second transducer is not parallel to the first and second transducer modulation zones For the first converter Separated and followed by a small angle,
The method further includes:
The workpiece at a desired beam position resulting from the application of one or both of the first and second frequencies to provide a deflection propagation direction resulting from the application of the first and / or second radio frequency signals. Adjusting the application of the first and / or second radio frequency signals to divert the laser beam to impinge on.

An acousto-optic modulator adapted for positioning along a beam path between a laser and a workpiece, the acousto-optic modulator comprising: a beam entrance surface; a beam exit surface; and a first of the acousto-optic modulator. A first transducer positioned on the transducer surface, wherein the first transducer surface is in a first surface transverse to the beam entrance surface, the first transducer being a first Cartesian Adapted to modulate in a first transducer modulation zone that traverses the beam path to affect a first deflection angle of the beam path along an axis;
The acousto-optic modulator includes a second transducer disposed on a second transducer surface thereof, wherein the second transducer surface is on a second surface transverse to the beam entrance surface; The second transducer is adapted to perform modulation in a second transducer modulation zone that traverses the beam path to affect a second deflection angle of the beam path along the first Cartesian axis. The second transducer is spaced apart such that the first and second transducer modulation zones are not parallel and oriented at a small angle relative to the first transducer. An acousto-optic modulator.

A method for enhancing the performance of an acousto-optic modulator suitable for positioning along a beam path between a laser and a workpiece, said acousto-optic modulator comprising: a beam entrance surface; a beam exit surface; A first transducer positioned on a first transducer surface of an optical modulator, the first transducer surface being in a first plane transverse to the beam entrance surface;
The method is
Generating a laser beam along the beam path to impinge on the workpiece;
Propagating the laser beam through the acousto-optic modulator positioned along the beam path;
Modulating in a first transducer modulation zone traversing the beam path to affect a first deflection angle of the beam path along a first workpiece material axis relative to a surface of the workpiece. Controlling a first frequency of a first radio frequency signal applied to a first transducer and applying to a second transducer positioned on a second transducer surface of the acousto-optic modulator Controlling the second frequency of the second radio frequency signal, wherein the second transducer surface is in a second plane transverse to the entrance surface and the beam entrance surface, the second transform A modulator is modulating in a second transducer modulation zone that traverses the beam path to affect a second deflection angle of the beam path along the first workpiece axis; The transducer is such that the first and second transducer modulation zones are not parallel. The first transducer being spaced apart and oriented at a small angle;
The method further comprises:
To deflect the laser beam to impinge on the workpiece at a desired beam position resulting from a cooperative deflection angle resulting from the first and second deflection angles provided by the first and second radio frequency signals; Adjusting the frequency of the first and second radio frequency signals.

A method of using an acousto-optic modulator to adjust the amplitude or energy of a plurality of continuous laser output pulses directed at a workpiece, said acousto-optic modulator in the beam path between the laser and the workpiece And the acousto-optic modulator is disposed on a beam entrance surface, a beam exit surface, and a first transducer surface of the acousto-optic modulator and within a first transducer modulation zone A first transducer to modulate, wherein the first transducer surface is in a first surface transverse to the beam entrance surface;
The method is
Generating a laser beam along a beam path that impinges on the workpiece;
The acousto-optics positioned along the beam path that impinges on the acousto-optic modulator at a Bragg angle or close to it relative to the beam entrance surface or the first transducer modulation zone Propagating the laser beam through a modulator;
Modulate in the first transducer modulation plane that traverses the beam path to affect the first exit angle of the beam path along a first workpiece axis relative to the plane of the workpiece. Controlling a first frequency of a first radio frequency signal applied to the first transducer, and a Bragg efficiency resulting from a first shift of the first exit angle of the beam path from the Bragg angle Controlling a first amplitude of the first radio frequency signal applied to the first transducer to compensate for deviations from the first transducer.

A method for enhancing the performance of an acousto-optic modulator suitable for positioning along a beam path between a laser and a workpiece, said acousto-optic modulator comprising: a beam entrance surface; a beam exit surface; A first transducer disposed on the first transducer surface of the optical modulator and modulating within the first transducer modulation zone, the first transducer surface traversing the beam entrance surface. In the first plane,
The method is
Generating a laser beam along the beam path that impinges on the workpiece at the nominal beam position;
Propagating the laser beam through the acousto-optic modulator positioned along the beam path;
The first modulated in a first transducer modulation zone that traverses the beam path to affect a deflection angle of the beam path along a first workpiece material axis relative to the surface of the workpiece. Controlling a first frequency of a first radio frequency signal applied to the transducer, and a desired beam position resulting from a cooperative deflection angle of the beam path provided by the first and second radio frequency signals. Adjusting the first and second radio frequency signals to detect the laser beam from a temporary beam position of the workpiece to collide with the workpiece;
The second transducer surface is in a second plane transverse to the beam entrance surface and is substantially parallel to or coplanar with the first transducer surface, and the second transducer surface is the first transducer surface. A method in a second transducer modulation zone that traverses the beam path to affect a deflection angle of the beam path along a workpiece axis.

An acousto-optic modulator disposed on a first transducer surface, the first transducer being responsive to a first radio frequency driver and having a first frequency limit corresponding to a first deflection angle control limit. A method for enhancing beam deflection angle direction control in an acousto-optic modulator comprising:
Generating a laser beam along a beam path that impinges on a workpiece at a first beam position;
Propagating the laser beam through the acousto-optic modulator positioned along the beam path;
Controlling a first frequency of a first radio frequency signal applied to the first transducer;
Controlling a second frequency of a second radio frequency signal applied to a second transducer disposed on a second transducer surface of the acousto-optic modulator, and the first or second transformation To deflect the beam path and the first beam position on the workpiece with the acousto-optic modulator to collide with the workpiece at a desired beam position resulting from a cooperative deflection angle that is not available by itself. Adjusting the first and second frequencies to:
The second transducer surface is substantially parallel to or coplanar with the first surface and the second transducer is responsive to a second radio frequency driver;
The second transducer has a second frequency limit corresponding to a second deflection angle control limit;
The method wherein the first and second frequencies are different or have different phases.

A method of modulating an acousto-optic modulator in a laser system to suppress propagation of a laser beam along a beam path impinging on a workpiece,
Generating a beam,
Propagating the laser beam along an optical path into an acousto-optic modulator, and impinging on the workpiece at a frequency having substantially zero Bragg efficiency to prevent propagation of the laser beam along the beam path Applying a radio frequency signal to the transducer of the acousto-optic modulator.

A method for enhancing beam positioning control from an acousto-optic modulator suitable for positioning along a beam path between a laser and a workpiece, said acousto-optic modulator comprising: a beam entrance surface; a beam exit surface; A first transducer modulation zone that traverses the beam path and affects the deflection of the beam path along a first workpiece axis relative to the surface of the workpiece;
The method is
Generating a laser beam along a beam path to impinge on a workpiece at a nominal beam position, and propagating the laser beam through the entrance surface of the acousto-optic modulator positioned along the beam path The beam path impinges the acousto-optic modulator at an entrance angle at or near the Bragg angle with respect to the beam entrance surface of the acousto-optic modulator, and from the Bragg angle to the beam Diverting the path reduces Bragg efficiency from the Bragg angle to a lower Bragg efficiency as a function of the degree to which the exit angle is shifted,
The method further includes:
Controlling a first frequency of a first radio frequency signal applied to a first transducer disposed on a first transducer surface of the acousto-optic modulator, the first transducer A plane traverses the beam entrance surface and the first transducer modulates within the first transducer modulation zone to shift the beam path from the Bragg angle with the acousto-optic modulator. And
The method further includes:
Controlling a Bragg adjustment device upstream of the acousto-optic modulator to shift the entrance angle at the beam entrance surface of the acousto-optic modulator to reduce Bragg angle loss resulting from the shift of the exit angle And colliding the workpiece at a desired beam position resulting from a cooperative deflection angle provided by the Bragg adjustment device and the acousto-optic modulator having an overall Bragg efficiency greater than the undesirably low Bragg efficiency. Adjusting the shift of the entrance angle and the first frequency of the first radio frequency signal to divert the beam path from a nominal beam position on the workpiece.