JP2008307873A5 - - Google Patents

Claims (24)

A first step of preparing a first adherend and a second adherend each provided with a plasma polymerized film on a substrate;
A second step of applying energy to the surface of each plasma polymerized film of the first adherend and the second adherend to activate the surface of each plasma polymerized film;
A third step of bonding the first adherend and the second adherend to obtain a joined body so that the surfaces of the activated plasma polymerization films are brought into close contact with each other; The joining method characterized by this.   The bonding method according to claim 1, wherein each of the plasma polymerized films is composed of polyorganosiloxane as a main material.   The joining method according to claim 2, wherein the polyorganosiloxane is mainly composed of a polymer of octamethyltrisiloxane.   The joining method according to any one of claims 1 to 3, wherein an average thickness of each plasma polymerization film is 10 to 10,000 nm.   5. The bonding method according to claim 1, wherein, in the second step, the surface of each plasma polymerization film is irradiated with energy rays.   The bonding method according to claim 5, wherein the energy ray is ultraviolet light having a wavelength of 150 to 300 nm.   The joining method according to claim 1, wherein the second step is performed in an air atmosphere.   The joining method according to claim 1, further comprising a step of performing a heat treatment on the joined body after the third step.   The bonding method according to claim 8, wherein a temperature of the heat treatment is 25 to 100 ° C.   The joining method according to claim 1, further comprising a step of pressurizing the joined body after the third step.   The bonding method according to claim 10, wherein a pressure when the bonded body is pressurized is 1 to 10 MPa.   The joining method according to any one of claims 1 to 11, wherein the third step is started within 60 minutes after the end of the second step.   Each of the first adherend and the second adherend is preliminarily subjected to a base treatment with plasma on each of the substrates, and then the plasma polymerized film is formed in the region subjected to the base treatment. The joining method according to any one of claims 1 to 12, wherein the joining method is as follows.   The joining method according to claim 1, wherein the two base materials have different rigidity. Two substrates,
A plasma polymerization film,
The joined body, wherein the two base materials are joined via the plasma polymerization film. The joined body according to claim 15 , wherein the plasma polymerized film is formed by joining plasma polymerized films formed on the surfaces of the two base materials in advance. The joined body according to claim 15 or 16 , wherein the joining strength between the two base materials is 5 MPa or more. An ink chamber substrate;
A nozzle plate provided on one surface of the ink chamber substrate and provided with nozzle holes for discharging ink as ink droplets;
A diaphragm provided on the other surface of the ink chamber substrate;
Having a head body comprising
A liquid droplet ejection head, wherein at least one of the ink chamber substrate and the nozzle plate and the ink chamber substrate and the vibration plate are joined via a plasma polymerization film. The liquid droplet ejection head according to claim 18, wherein the liquid droplet ejection head includes a base body that houses the head main body, and the base body and the nozzle plate are joined by the plasma polymerization film. The plasma polymerized film is formed in advance on each surface to be bonded among the ink chamber substrate, the nozzle plate, the vibration plate, and the substrate, and the plasma polymerized films are bonded to each other. 19. A liquid droplet ejection head according to item 19. 21. The liquid droplet ejection head according to claim 18, wherein the plasma polymerized film contains polyorganosiloxane. The liquid droplet ejection head according to claim 21, wherein the polyorganosiloxane contains a polymer of octamethyltrisiloxane as a component. The droplet discharge head according to any one of claims 18 to 22, wherein an average thickness of the plasma polymerization film is 10 to 10,000 nm. 24. A droplet discharge apparatus comprising the droplet discharge head according to any one of claims 18 to 23 .