JP2008294128A - Liquid-cooled type cooler and manufacturing method thereof - Google Patents

Liquid-cooled type cooler and manufacturing method thereof Download PDF

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JP2008294128A
JP2008294128A JP2007136546A JP2007136546A JP2008294128A JP 2008294128 A JP2008294128 A JP 2008294128A JP 2007136546 A JP2007136546 A JP 2007136546A JP 2007136546 A JP2007136546 A JP 2007136546A JP 2008294128 A JP2008294128 A JP 2008294128A
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liquid
cooled
cooling
headers
joining
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JP5194557B2 (en
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Hiroshi Miyata
博志 宮田
Yoshio Kuromitsu
祥郎 黒光
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reliable liquid-cooled type cooler that decreases the number of types of components, is mass-produced with simple machining to reduce expenses, for easy manufacturing and managing, and to provide a manufacturing method of the liquid-cooled type cooler. <P>SOLUTION: The liquid-cooled type cooler 10 is composed so that a body 50 to be cooled is cooled by mounting the body 50 to be cooled on one surface of a cooling member 11, where a channel is formed by two separated headers 1, 2 in which a cooling liquid C is circulated and the cooling member 11 having a channel for circulating the cooling liquid C while being arranged between the headers 1, 2. In the liquid-cooled type cooler 10, two rectangular saucer-shaped plates are arranged oppositely for formation in the headers 1, 2, the rectangular saucer-shaped plates comprise junction edges overlapping in both rectangular saucer-shaped plates and cutout sections 1e, 2e for inserting the edges including the channel edge of the cooling member 11 at the outer-periphery edge, and the junction edges and the cutouts 1e, 2e, and the edges are joined. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、被冷却体を冷却するための液冷式冷却器とその製造方法に関する。   The present invention relates to a liquid cooling type cooler for cooling an object to be cooled and a method for manufacturing the same.

従来、液冷式冷却器としては、例えば特許文献1に記載されたものが知られている。これは冷却器本体の内部に互いに平行に離間して形成された二つのヘッダーと、これらヘッダー間に配置され各ヘッダーの水路と連通される複数の微細水路を有する多流路管(冷却部材)と、前記多流路管の上面を覆い前記冷却器本体とともに該液冷式冷却器の外周面を形成する蓋板とを備えている。また各ヘッダーの一方端には冷却液を流入又は流出させるための各配管口が夫々備えられている。そしてこの液冷式冷却器の前記蓋板の外面に被冷却体を取り付けてパワーモジュールとされ、この被冷却体から発せられる熱を、水路を流れる冷却液が熱交換させて冷却させるようになっている。前記冷却液は、流入側の配管口からヘッダーへと流入され、ヘッダー水路を通り、該ヘッダーに連通される前記多流路管の複数の微細水路を通って流出側のヘッダー水路へと送られ、該ヘッダーに備えられる配管口から流出される道中において前記被冷却体から発せられる熱を回収し、この被冷却体を冷却するようになっている。
特開2005−274120号公報
Conventionally, as a liquid cooling type cooler, what was described, for example in patent documents 1 is known. This is a multi-channel pipe (cooling member) having two headers formed in parallel to each other in the cooler body and a plurality of fine water channels arranged between the headers and communicating with the water channels of each header. And a cover plate that covers the upper surface of the multi-channel pipe and forms the outer peripheral surface of the liquid-cooled cooler together with the cooler body. In addition, one end of each header is provided with each piping port for allowing the coolant to flow in or out. And a to-be-cooled body is attached to the outer surface of the lid plate of the liquid-cooled cooler to form a power module, and the heat generated from the to-be-cooled body is cooled by heat exchange with the coolant flowing through the water channel. ing. The coolant flows into the header from the inflow side piping port, passes through the header channel, and is sent to the outflow side header channel through the plurality of fine channels of the multi-channel pipe connected to the header. The heat emitted from the object to be cooled is recovered in the path flowing out from the piping port provided in the header, and the object to be cooled is cooled.
JP-A-2005-274120

ところで、このような液冷式冷却器では、その構成部材が上記説明したように冷却器本体、蓋板、多流路管、配管口など数種類に亘っており、また夫々の部材の形状は複雑であり、加工も鋳造後切削、押出後切削等多工程に亘り製作されるため、その生産効率は決して良いとは言えず、費用も安価とは言えない。また加工工程中も含め各部材管理が煩雑になりがちである。このような液冷式冷却器の生産効率を上げコストダウンを行うためには、いかにこれらの部材の種類を低減し、加工を簡便にして大量生産し、費用を抑え、生産・管理を容易にするかという点が課題となっていた。   By the way, in such a liquid cooling type cooler, there are several kinds of constituent members such as a cooler main body, a cover plate, a multi-channel pipe and a piping port as described above, and the shape of each member is complicated. In addition, since the process is manufactured through multiple processes such as post-casting cutting and post-extrusion cutting, the production efficiency is never good, and the cost is not low. In addition, management of each member tends to be complicated even during the machining process. In order to increase the production efficiency and reduce the cost of such a liquid-cooled cooler, how to reduce the types of these parts, simplify the mass production, reduce the cost, and make production and management easy. The question was whether to do it.

本発明は、このような事情を考慮してなされたもので、構成部材の種類を低減し、簡便な加工で大量生産して費用を抑え、生産・管理を容易にし、且つ信頼性の高い液冷式冷却器とその製造方法を提供することを目的とする。   The present invention has been made in view of such circumstances, reducing the number of components, mass-producing by simple processing, reducing costs, facilitating production and management, and having high reliability. It aims at providing a cold-type cooler and its manufacturing method.

前記目的を達成するために、本発明は以下の手段を提案している。すなわち本発明は、冷却液が流通する離間した二つのヘッダーと、これらヘッダー間に配置され冷却液を流通させる流路を備えた冷却部材とにより水路が形成され、前記冷却部材の一面に被冷却体を取り付け、この被冷却体を冷却させるよう構成される液冷式冷却器において、前記ヘッダーは、二つの矩形皿状板が対向配置されて形成されており、前記矩形皿状板は、その外周縁に、両矩形皿状板同士で重ね合わせられる接合縁部と、前記冷却部材の流路端を含む端部を嵌入するための切り欠き部とを備え、前記接合縁部同士及び前記切り欠き部と前記端部とが接合されていることを特徴とする。   In order to achieve the above object, the present invention proposes the following means. That is, according to the present invention, a water channel is formed by two spaced headers through which a coolant flows and a cooling member provided between the headers and provided with a flow path through which the coolant flows. In a liquid-cooled cooler configured to attach a body and cool the object to be cooled, the header is formed by two rectangular dish-shaped plates facing each other, and the rectangular dish-shaped plate is The outer peripheral edge includes a joining edge portion that is overlapped between both rectangular dish-shaped plates, and a notch portion for fitting an end portion including a flow path end of the cooling member. A notch part and the said edge part are joined, It is characterized by the above-mentioned.

この発明に係る液冷式冷却器によれば、前記ヘッダーは二つの矩形皿状板により形成されているので、これら矩形皿状板を極力共通部品となるよう成形してヘッダーを構成すれば、部材の種類を少なく抑えることができ、その生産・管理を容易に行うことができる。またプレス加工等を用いて該矩形皿状板を成形させることとすれば、その製作が簡便となり、安価に大量生産することが可能である。  According to the liquid-cooled cooler according to the present invention, since the header is formed by two rectangular dish-shaped plates, if the header is formed by forming these rectangular dish-shaped plates as common parts as possible, The number of types of members can be reduced, and production and management can be easily performed. Further, if the rectangular dish-shaped plate is formed by press working or the like, its production becomes simple and mass production is possible at a low cost.

本発明の液冷式冷却器において、前記対向配置される二つの矩形皿状板は、その接合位置を対称面として面対称に形成されていることとしてもよく、これにより、前記ヘッダーの構成部材の種類を極力少なく抑えることができる。また前記接合縁部は、フランジ状のリブ部で形成されていることとしてもよく、これにより、該接合縁部が広範囲に亘り接合されその接合強度及び本体強度が高められるので、信頼性を向上させることができる。  In the liquid-cooled cooler according to the present invention, the two rectangular dish plates arranged opposite to each other may be formed to be plane-symmetric with respect to the joining position as a symmetry plane. Can be reduced as much as possible. Further, the joining edge portion may be formed of a flange-like rib portion, whereby the joining edge portion is joined over a wide range, and the joining strength and the body strength are enhanced, thereby improving the reliability. Can be made.

また本発明は、液冷式冷却器を製造する方法であって、前記接合は、少なくとも接合される側の面にろう材料を介在させておき、このろう材料を加熱してろう付けさせることにより、同時に行われることとしてもよい。これにより、これら接合を一工程でまとめて行うことができるので、工程数が削減され生産性が向上する。また、前記端部に形成される端面には、予め酸化膜が形成されていることとしてもよく、これにより、前記酸化膜が、ろう付け接合時におけるろうダレによって、前記冷却部材の流路端を塞ぐことを防止し、良好に接合を行うことができる。  Further, the present invention is a method for manufacturing a liquid-cooled cooler, wherein the joining is performed by interposing a brazing material at least on a surface to be joined and heating the brazing material to braze. These may be performed simultaneously. Thereby, since these joining can be performed collectively in one process, the number of processes is reduced and productivity improves. In addition, an oxide film may be formed in advance on the end surface formed at the end, and thereby, the oxide film may be flown at the end of the flow path of the cooling member by brazing during brazing joining. Can be prevented, and good bonding can be performed.

本発明に係る液冷式冷却器とその製造方法によれば、構成部材の種類を低減し、簡便な加工で大量生産して費用を抑え、生産・管理を容易にし、且つ信頼性の高い液冷式冷却器とその製造方法を提供することができる。   According to the liquid-cooled cooler and the manufacturing method thereof according to the present invention, the number of components is reduced, mass production is simplified by simple processing, the cost is reduced, production and management are facilitated, and a highly reliable liquid A cold cooler and a method for manufacturing the same can be provided.

以下、図面を参照し、この発明の実施の形態について説明する。
図1は、この発明の一実施形態に係る液冷式冷却器を備えるパワー素子搭載用ユニットを示す平面図である。
このパワー素子搭載用ユニット20は、冷却液Cを流通させる水路を備える液冷式冷却器10と、この液冷式冷却器10に設けられる冷却部材11の一面に接合されたセラミックス絶縁層(以下「絶縁層」と省略する)52と、絶縁層52の一面に接合される回路層51とにより構成されている。また前記回路層51の一面にIGBT(Insulated Gate Bipolar Transistor)などのパワー素子53を接合することで、パワーモジュールとされる。これら絶縁層52と回路層51とパワー素子53とにより被冷却体50が構成されて、この液冷式冷却器10により冷却されるようになっている。
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a plan view showing a power element mounting unit including a liquid cooling type cooler according to an embodiment of the present invention.
The power element mounting unit 20 includes a liquid-cooled cooler 10 having a water channel for circulating the coolant C and a ceramic insulating layer (hereinafter referred to as a ceramic insulating layer) joined to one surface of a cooling member 11 provided in the liquid-cooled cooler 10. 52) and a circuit layer 51 bonded to one surface of the insulating layer 52. A power module is formed by bonding a power element 53 such as an IGBT (Insulated Gate Bipolar Transistor) to one surface of the circuit layer 51. The insulating layer 52, the circuit layer 51, and the power element 53 constitute a cooled object 50 and is cooled by the liquid cooling type cooler 10.

図1に示すように、前記液冷式冷却器10は、平行に離間される二つのヘッダー1及びヘッダー2と、これら両ヘッダー1,2間に配置され図の矢印D1方向に並列に配置される二つの冷却部材11とを備えている。前記ヘッダー1,2は、扁平した直方体状の形状を有し矢印D1方向に延在され、その長手方向の一端側に近づくに連れ平面視徐々に先が細くなる態様に形成され、その端部には冷却液Cを流入又は流出させるための配管口3,4を夫々設けている。また前記冷却部材11の形状は、図の矢印D1方向と矢印D2方向とに平たく扁平した板状とされている。該冷却部材11の矢印D2方向の両端部は、夫々前記ヘッダー1,2と接合されて支持されている。  As shown in FIG. 1, the liquid-cooled cooler 10 is disposed between two headers 1 and 2 that are spaced apart in parallel, and between these headers 1 and 2, and is disposed in parallel in the direction of the arrow D1 in the figure. Two cooling members 11 are provided. The headers 1 and 2 have a flattened rectangular parallelepiped shape, are extended in the direction of arrow D1, and are formed in such a manner that the taper gradually decreases in a plan view as they approach one end in the longitudinal direction. Are provided with piping ports 3 and 4 for allowing the coolant C to flow in or out, respectively. The shape of the cooling member 11 is flat and flat in the direction of the arrow D1 and the direction of the arrow D2 in the figure. Both ends of the cooling member 11 in the direction of arrow D2 are joined and supported by the headers 1 and 2, respectively.

図2は、図1におけるII−II線断面図を示す。また図3は、図1におけるIII−III線断面図を示す。前記ヘッダー1,2は、その長手方向の一端側に近づくに連れ、図2に示すように側面視徐々に先が太くなる態様に形成されている。そしてその胴体部分の断面形状は図3に示すように扁平した略矩形状から、前記一端側へ近づくに連れなだらかにその形状を略円筒状へと変化させるように形成されている。  FIG. 2 is a sectional view taken along line II-II in FIG. 3 shows a cross-sectional view taken along line III-III in FIG. As shown in FIG. 2, the headers 1 and 2 are formed so that their tips gradually become thicker as they approach one end in the longitudinal direction. The cross-sectional shape of the body portion is formed so as to gradually change from a flat, substantially rectangular shape as shown in FIG. 3 to a substantially cylindrical shape as it approaches the one end side.

前記ヘッダー1は、母材の両面に夫々ろう材層を有するクラッド材のアルミニウムブレージングシートをプレス成形して形成された矩形皿状板1aと、同材料で形成されこの矩形皿状板1aと矢印D3方向に対向配置され該矩形皿状板1aと対称面Oについて面対称の形状を有する矩形皿状板1bとが、この対称面Oの位置で互いに密着され接合されて形成されている。そしてこれら矩形皿状板1a,1bの密着部にあたるその外周縁には、夫々にフランジ状のリブ部1dが備えられ、互いのリブ部1d同士を接合させてこの中空状のヘッダー1を形成している。  The header 1 is a rectangular dish-shaped plate 1a formed by press-molding an aluminum brazing sheet of a clad material having a brazing material layer on each side of the base material, and the rectangular dish-shaped plate 1a formed of the same material and an arrow. The rectangular dish-shaped plate 1a and the rectangular dish-shaped plate 1b, which are opposed to each other in the direction D3 and have a plane-symmetric shape with respect to the symmetry plane O, are formed in close contact with each other at the position of the symmetry plane O. The outer peripheral edges corresponding to the close contact portions of the rectangular plates 1a and 1b are respectively provided with flange-shaped rib portions 1d, and the rib portions 1d are joined together to form the hollow header 1. ing.

前記ヘッダー2についても、上記ヘッダー1同様の構成となっている。前記アルミニウムブレージングシートをプレス成形して形成された矩形皿状板2aと、同材料で形成されこの矩形皿状板2aと対向配置される矩形皿状板2bとが、互いに密着され接合されて、その外周縁に夫々備えられるフランジ状のリブ部2d同士を接合させ、この中空状のヘッダー2を形成している。そして、こうして形成される前記ヘッダー1,2は、互いに同形状・同寸法とされている。すなわち、上記矩形皿状板1a及び前記矩形皿状板2b、上記矩形皿状板1b及び前記矩形皿状板2aは、夫々同一部品により形成されている。そして、上記対向配置される両矩形皿状板同士は、その接合位置を前記対称面Oとして面対称となるように、夫々その形状が形成されている。  The header 2 has the same configuration as the header 1 described above. A rectangular dish-shaped plate 2a formed by press-molding the aluminum brazing sheet, and a rectangular dish-shaped plate 2b formed of the same material and disposed opposite to the rectangular dish-shaped plate 2a are in close contact with each other, and joined together. This hollow header 2 is formed by joining flange-shaped rib portions 2d provided on the outer peripheral edges thereof. The headers 1 and 2 thus formed have the same shape and size. That is, the rectangular dish-shaped plate 1a and the rectangular dish-shaped plate 2b, and the rectangular dish-shaped plate 1b and the rectangular dish-shaped plate 2a are formed of the same parts. Then, the rectangular plate-like plates arranged opposite to each other are formed so as to be symmetrical with respect to the joining position as the symmetry plane O.

また前記ヘッダー1,2の、互いに向き合う内側部には、前記二つの冷却部材11を夫々支持し接合するための切り欠き部1e,2eが二つずつ形成されている。これらの切り欠き部1e,2eは、二つの冷却部材11に対応する位置に開口されており、その開口部の大きさは、前記冷却部材11の後述する端面13と略同一寸法とされている。そしてこれら二つの冷却部材11は、この端面13を夫々前記切り欠き部1e,2eに嵌入させて両ヘッダー1,2と接合され支持されている。これら冷却部材11は、押出成形により加工された押出加工品を同一寸法に切断し、同一部品に形成されている。  Further, two notches 1e and 2e for supporting and joining the two cooling members 11 are formed on the inner portions of the headers 1 and 2 facing each other. These notches 1e and 2e are opened at positions corresponding to the two cooling members 11, and the sizes of the openings are substantially the same as those of the end face 13 described later of the cooling member 11. . These two cooling members 11 are supported by being joined to both headers 1 and 2 by inserting the end face 13 into the notches 1e and 2e, respectively. These cooling members 11 are formed in the same part by cutting extruded products processed by extrusion molding into the same dimensions.

図1に示すように、前記冷却部材11には、該冷却部材11を矢印D2方向へ貫通する複数の微細水路12が備えられている。前記微細水路12の両端部には、前記微細水路12と直交する平面を形成する端面13が形成されている。この端面13は、予めワイヤ放電加工されたものであり、加工時においてその表面に酸化膜が形成されている。また図2に示すように、前記微細水路12はその水路の断面形状が矩形状に形成されており、断面の上下の向きを同一にして互いに平行に矢印D1方向に連設されている。  As shown in FIG. 1, the cooling member 11 is provided with a plurality of fine water channels 12 penetrating the cooling member 11 in the direction of arrow D2. At both ends of the fine water channel 12, end surfaces 13 that form a plane orthogonal to the fine water channel 12 are formed. This end face 13 is previously subjected to wire electric discharge machining, and an oxide film is formed on the surface at the time of machining. As shown in FIG. 2, the fine water channel 12 has a rectangular cross-sectional shape, and is arranged in parallel with each other in the direction of the arrow D <b> 1 in parallel with the same vertical direction of the cross section.

略円筒状の外形を有する前記配管口3には、そのヘッダー1側の端部に該ヘッダー1先端を嵌入させるための略円筒穴状の穴3aが設けられており、前記先端と接合されている。また同様に略円筒状の外形を有する前記配管口4にも、そのヘッダー2側の端部に該ヘッダー2先端を嵌入させるための略円筒穴状の穴4aが設けられており、前記先端と接合されている。これらの配管口3及び配管口4も、同一部品により形成されている。  The pipe port 3 having a substantially cylindrical outer shape is provided with a substantially cylindrical hole 3a for fitting the tip of the header 1 at the end on the header 1 side, and is joined to the tip. Yes. Similarly, the pipe port 4 having a substantially cylindrical outer shape is provided with a substantially cylindrical hole 4a for fitting the tip of the header 2 at the end on the header 2 side. It is joined. These piping port 3 and piping port 4 are also formed of the same parts.

また、前記両ヘッダー1,2の内部には、冷却液Cを流通させるためのヘッダー水路1c,2cが夫々形成されている。前記ヘッダー水路1c,2cの形状は、その外周面を形成する前記ヘッダー1,2より肉厚分小さく前記リブ部1d,2dを除いた略同形状に形成されている。前記ヘッダー水路1c,2cが延在される水路形成方向と、前記複数の微細水路12の水路形成方向とは、図1に示すように平面視略垂直になるよう配設されている。前記配管口3,4の内部に夫々形成される配管口水路3c,4cは、その断面形状が略円形状とされ、前記両ヘッダー水路1c,2cの一端側の端部に形成される略円形状断面と同一寸法とされ、なめらかに繋がるように接続されている。また前記両ヘッダー水路1c,2cの長手方向の他方側の端部は、夫々その水路が閉塞されている。  In addition, header water channels 1c and 2c for circulating the coolant C are formed inside the headers 1 and 2, respectively. The shapes of the header water channels 1c and 2c are substantially the same except for the rib portions 1d and 2d, which are smaller than the headers 1 and 2 that form the outer peripheral surfaces thereof. The water channel forming direction in which the header water channels 1c and 2c extend and the water channel forming direction of the plurality of fine water channels 12 are arranged so as to be substantially vertical in a plan view as shown in FIG. The pipe opening water passages 3c and 4c formed inside the pipe opening 3 and 4 are substantially circular in cross section, and are substantially circular formed at one end of the header water passages 1c and 2c. It has the same dimensions as the cross-section and is connected so that it is smoothly connected. Moreover, the water channel is obstruct | occluded at the edge part of the other side of the longitudinal direction of both said header water channels 1c and 2c, respectively.

図3に示すように、前記両ヘッダー水路1c,2cは、そのヘッダー胴体部分の断面形状が夫々矢印D2方向に長く矢印D3方向に短い扁平した略矩形状に形成されている。前記冷却部材11はその前記端面13を夫々のヘッダー1,2の前記切り欠き部1e,2eに嵌入させて接合されている。ここで前記端面13は、夫々前記ヘッダー水路1c,2cの矩形断面の短辺の一辺を構成するように配設されている。すなわち、これらの端面13は、前記ヘッダー水路1c,2cの内部に突出されないように配置されるため、冷却液Cが流通する際にその接合部分に圧力損失を発生させることを極力防止するようになっている。  As shown in FIG. 3, the header water passages 1c and 2c are formed in a substantially rectangular shape in which the cross-sectional shape of the header body portion is long in the direction of arrow D2 and short in the direction of arrow D3. The cooling member 11 is joined by fitting the end face 13 into the notches 1e and 2e of the headers 1 and 2, respectively. Here, the end face 13 is disposed so as to constitute one side of the short side of the rectangular cross section of the header water channel 1c, 2c. That is, since these end faces 13 are arranged so as not to protrude into the header water passages 1c, 2c, when the coolant C flows, it is possible to prevent as much as possible from generating a pressure loss at the joint portion. It has become.

また図示しないが、前記配管口3は、冷却液Cを流入させる冷却液流入管とその前記ヘッダー1側と反対側の端部とを接続可能に形成されている。また前記配管口4も、冷却液Cを流出させる冷却液流出管とその前記ヘッダー2側と反対側の端部とを接続可能に形成されている。そしてこれら冷却液流入管と冷却液流出管とを連結する外部の管路には、冷却液Cを冷却するための冷却手段と、冷却液Cを循環させるためのポンプ等の循環手段とが備えられ、これらにより冷却液Cが冷却され循環させられるようになっている。  Moreover, although not shown in figure, the said piping port 3 is formed so that the cooling liquid inflow tube which flows in the cooling liquid C and the edge part on the opposite side to the said header 1 side can be connected. The piping port 4 is also formed so as to be able to connect a cooling liquid outflow pipe through which the cooling liquid C flows out and an end opposite to the header 2 side. The external pipe line connecting the cooling liquid inflow pipe and the cooling liquid outflow pipe includes a cooling means for cooling the cooling liquid C and a circulating means such as a pump for circulating the cooling liquid C. Thus, the coolant C is cooled and circulated.

そして、冷却液Cは、冷却液流入側の前記配管口3よりこの液冷式冷却器10に流入され、前記ヘッダー水路1cを通り複数連設される前記微細水路12を通り、前記ヘッダー水路2cへ送られた後、冷却液流出側の前記配管口4から流出されるようになっている。  Then, the coolant C flows into the liquid-cooled cooler 10 from the piping port 3 on the coolant inflow side, passes through the fine water channel 12 provided in a plurality through the header water channel 1c, and passes through the header water channel 2c. Is sent out from the piping port 4 on the coolant outflow side.

ここで、上記各水路は、夫々の相当直径から算出した断面積が冷却液Cの流入から流出までにわたりすべて同一になるよう設定されている。すなわち、前記配管口水路3c,4Cの夫々の相当直径から算出した断面積と、前記ヘッダー水路1c,2cの各部における夫々の相当直径から算出した断面積と、前記微細水路12の相当直径から算出した断面積の総和とは、すべて等しく、一定となるように設定されている。すなわち、この液冷式冷却器10は、その水路の各断面における相当直径から算出した断面積の変化に起因する冷却液Cの圧力損失を最小限に抑えることが出来るようになっている。  Here, each water channel is set so that the cross-sectional area calculated from the corresponding equivalent diameter is the same from the inflow to the outflow of the coolant C. That is, the cross-sectional area calculated from the equivalent diameter of each of the pipe opening channels 3c and 4C, the cross-sectional area calculated from the corresponding diameter of each part of the header water channels 1c and 2c, and the equivalent diameter of the fine water channel 12 are calculated. The total sum of the cross-sectional areas is set to be equal and constant. That is, the liquid cooling type cooler 10 can minimize the pressure loss of the cooling liquid C resulting from the change in the cross-sectional area calculated from the equivalent diameter in each cross section of the water channel.

また、上記構成において、両ヘッダー1,2と、二つの冷却部材11と、両配管口3,4とは、すべてが互いにろう付け接合されて形成されている。この接合は、前記両ヘッダー1,2がアルミニウムブレージングシートで形成されていることにより、一工程において同時に行うことができるようになっている。その密閉性及び強度は、内圧をかけ試験したところ、最低でも内圧20kgf/cmに耐えうることがわかり、十分な強度を有していると言える。また前記端面13に形成される微細水路12の流路端は、その流路端の上下に形成される面を夫々挟むようにして接合される両ヘッダー1,2の内壁部からのろうダレにより閉塞される虞が考えられるが、その表面にはワイヤ放電加工により予め酸化膜が形成されているので、これらのろうダレを弾き、閉塞が防止されるようになっている。 Moreover, in the said structure, all the headers 1 and 2, the two cooling members 11, and both the piping ports 3 and 4 are formed by brazing and joining mutually. This joining can be performed simultaneously in one process because both the headers 1 and 2 are formed of an aluminum brazing sheet. The hermeticity and strength were tested by applying an internal pressure and found to be able to withstand an internal pressure of 20 kgf / cm 2 at a minimum, and thus can be said to have sufficient strength. Further, the flow path end of the fine water channel 12 formed on the end surface 13 is blocked by brazing from the inner wall portions of the headers 1 and 2 joined so as to sandwich the surfaces formed above and below the flow channel end, respectively. However, since an oxide film is previously formed on the surface by wire electric discharge machining, these brazings are repelled to prevent clogging.

前記冷却部材11の一面には、前記液冷式冷却器10により冷却される前記絶縁層52及び回路層51が、矢印D1と矢印D2の向きとに夫々間隔をあけて複数連設されている。
前記絶縁層52は、その必要とされる絶縁特性、熱伝導率及び機械的強度を満たしていればどのようなセラミックスから形成されていてもよいが、例えば窒化アルミニウムや窒化ケイ素、酸化アルミニウムにより形成される。前記回路層51は、導電性材料による層であり、例えば銀(Ag)、金(Au)、銅(Cu)若しくはアルミニウム(Al)系導電材料により形成される。そして回路層51と絶縁層52と冷却部材11との夫々の接合手段には、ろう付けが用いられる。またこのパワー素子搭載用ユニット20にパワー素子53を設けてパワーモジュールとする場合には、前記回路層51との接合手段には、はんだ付けが用いられる。本実施形態ではこれらのろう付け層及びはんだ付け層の図示は省略する。
On one surface of the cooling member 11, a plurality of the insulating layers 52 and circuit layers 51 cooled by the liquid-cooled cooler 10 are continuously provided in the directions of the arrows D1 and D2. .
The insulating layer 52 may be formed of any ceramic as long as the required insulating properties, thermal conductivity, and mechanical strength are satisfied. For example, the insulating layer 52 is formed of aluminum nitride, silicon nitride, or aluminum oxide. Is done. The circuit layer 51 is a layer made of a conductive material, and is formed of, for example, silver (Ag), gold (Au), copper (Cu), or aluminum (Al) based conductive material. And brazing is used for each joining means of the circuit layer 51, the insulating layer 52, and the cooling member 11. When the power element 53 is provided in the power element mounting unit 20 to form a power module, soldering is used as a joining means with the circuit layer 51. In this embodiment, illustration of these brazing layers and soldering layers is omitted.

以上説明したように、本実施形態に係る液冷式冷却器10を備えるパワー素子搭載用ユニット20によれば、冷却液Cが複数の前記微細水路12を流通して、冷却部材11の一面に備えられる被冷却体50から発せられる熱を回収するようになっている。  As described above, according to the power element mounting unit 20 including the liquid cooling type cooler 10 according to the present embodiment, the cooling liquid C circulates through the plurality of fine water channels 12 and is disposed on one surface of the cooling member 11. Heat generated from the object 50 to be cooled is recovered.

前記両ヘッダー1,2を構成する前記矩形皿状板1a及び前記矩形皿状板2b、上記矩形皿状板1b及び前記矩形皿状板2aは、同一型を使用したプレス成形による同一部品に成形されているので、簡便に大量生産することができる。また、前記二つの冷却部材11は、押出成形品を切断して同一部品に成形されている。前記配管口3,4も、同一部品により成形されている。よって、構成部材の種類が少なく製作が簡便とされ、安価に大量生産することが可能である。またその管理も容易とされる。  The rectangular dish-shaped plate 1a and the rectangular dish-shaped plate 2b, and the rectangular dish-shaped plate 1b and the rectangular dish-shaped plate 2a constituting the headers 1 and 2 are formed into the same part by press molding using the same mold. Therefore, it can be easily mass-produced. The two cooling members 11 are formed into the same component by cutting an extruded product. The piping ports 3 and 4 are also formed of the same parts. Accordingly, the number of types of component members is small and the manufacture is simple, and mass production is possible at a low cost. The management is also easy.

そしてこれらの両ヘッダー1,2、冷却部材11、配管口3,4が、互いにろう付け接合されており、この接合は前記両ヘッダー1,2がアルミニウムブレージングシートで形成されていることにより一工程において同時に行われるので、簡便且つ確実に行われつつ工程数が削減され、生産性を向上することができる。  The headers 1 and 2, the cooling member 11, and the piping ports 3 and 4 are brazed to each other. This joining is performed in one step by forming the headers 1 and 2 with an aluminum brazing sheet. Since the steps are simultaneously performed, the number of steps can be reduced and productivity can be improved while being performed easily and reliably.

また前記リブ部1d,2dは、フランジ状に形成されているため、これにより両ヘッダー1,2の縁部の接合強度及び本体強度、熱サイクルに対する耐久性が高められ、装置の信頼性を向上させることができる。また、前記端面13には、前記ろう付けされる以前に予め酸化膜が形成されているため、ろう付け接合時におけるろうダレによって前記微細水路12の端部が塞がれるのを防止し、良好に接合を行うことができる。  In addition, since the rib portions 1d and 2d are formed in a flange shape, this improves the joint strength and body strength of the edges of both headers 1 and 2 and durability against thermal cycling, and improves the reliability of the device. Can be made. Further, since an oxide film is formed on the end face 13 before the brazing, the end face of the fine water channel 12 is prevented from being blocked by brazing during brazing and joining. Can be joined.

また前記ろう付けは、ろう付け用の開放炉内を窒素雰囲気にしフラックスを塗布するノコロックろう付けにより行うこととすれば、その接合処理を連続的に行うことができる。これにより、さらに生産性を向上させることが可能である。またノコロックろう付けによれば、接合部に形成されるフィレットのシール性をより高めることができる。  Further, if the brazing is performed by nocolok brazing in which an open furnace for brazing is put in a nitrogen atmosphere and flux is applied, the joining process can be performed continuously. Thereby, it is possible to further improve productivity. Moreover, according to Nokolok brazing, the sealability of the fillet formed at the joint can be further enhanced.

また、前記配管口水路3c,4Cの夫々の相当直径から算出した断面積と、前記ヘッダー水路1c,2cの各部における夫々の相当直径から算出した断面積と、前記微細水路12の相当直径から算出した断面積の総和とは、すべて等しく一定となるように設定されているので、各水路を流通する冷却液Cに発生する圧力損失は極力小さく抑えられるようになっている。よって、該冷却液Cを搬送する為のポンプ出力を最小限に抑えることができ、動力ロスを低減することが可能となる。  Also, the cross-sectional area calculated from the equivalent diameter of each of the pipe opening channels 3c and 4C, the cross-sectional area calculated from the corresponding diameter of each part of the header water channels 1c and 2c, and the equivalent diameter of the fine water channel 12 are calculated. The total sum of the cross-sectional areas is set to be all equal and constant, so that the pressure loss generated in the coolant C flowing through each water channel is minimized. Therefore, the pump output for conveying the coolant C can be minimized, and power loss can be reduced.

なお、本発明は上記実施の形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。例えば、本実施形態では前記冷却部材11の水路を多穴管により形成させるものとしたがこれに限らず、水路を矩形コルゲートフィンによって形成させたり、三角インナーフィンによって形成させたり、あるいはピンフィン、オフセットフィン等いずれの形態を用いて形成させてもよい。  The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, in this embodiment, the water channel of the cooling member 11 is formed by a multi-hole tube. However, the present invention is not limited to this, and the water channel is formed by a rectangular corrugated fin, a triangular inner fin, a pin fin, or an offset. You may form using any form, such as a fin.

また両ヘッダー1,2を構成する矩形皿状板1a,1b,2a,2bとして、母材の両面に夫々ろう材層を有するクラッド材のアルミニウムブレージングシートを用いることとしたが、これに限らず、水路側の面を形成する内側の面のみに前記ろう材層が形成されているアルミニウムブレージングシートを用いてもよい。また、アルミニウムブレージングシートを用いずに、接合される面にろう材料の粉体とフラックスとを混合したものを塗布することによって、ろう付け接合を行うこととしてもよい。   In addition, the rectangular plate-like plates 1a, 1b, 2a, and 2b constituting the headers 1 and 2 are made of clad aluminum brazing sheets having brazing material layers on both sides of the base material. Alternatively, an aluminum brazing sheet in which the brazing material layer is formed only on the inner surface forming the water channel side surface may be used. Moreover, it is good also as brazing joining by apply | coating what mixed the powder and the flux of the brazing | wax material on the surface to be joined, without using an aluminum brazing sheet.

また図3に示すように、冷却部材11の他面には、微細水路12を流通する冷却液Cを冷却するためのアウターフィン5が備えられていることとしてもよい。前記アウターフィン5は極めて薄い金属帯板を波形に曲折形成することにより製作でき、その稜線は図2の矢印D1方向に形成されている。前記アウターフィン5は、例えばアルミニウムブレージングシートの帯板状素材を用いれば、該アウターフィン5の一面と前記冷却部材11の他面とを簡便にろう付け接合することができる。  As shown in FIG. 3, the other surface of the cooling member 11 may be provided with outer fins 5 for cooling the coolant C flowing through the fine water channel 12. The outer fin 5 can be manufactured by bending a very thin metal strip into a corrugated shape, and its ridgeline is formed in the direction of arrow D1 in FIG. If the outer fin 5 is made of, for example, a strip-shaped material of an aluminum brazing sheet, one surface of the outer fin 5 and the other surface of the cooling member 11 can be easily brazed and joined.

前記アウターフィン5が備えられた場合には、冷却液Cが被冷却体50から回収した熱を効率良く空気中へ放出することができる。よって冷却液Cが被冷却体50からの回収熱により各微細水路12内で沸騰し泡が発生して、該水路形成面と冷却液Cとの間に膜を作って熱交換が良好に行われなくなるのを極力防止し、効率良く熱交換を行わせることができる。またこのアウターフィン5は、放熱効果を持つものであれば図2及び図3に示すような形状に限られず、例えば該アウターフィン5の替わりに冷却部材11の他方の面の形状を凹凸形状に形成することで放熱効果を持たせる構成としてもよい。また前記アウターフィン5と前記凹凸形状とを併用した構成としても構わない。  When the outer fin 5 is provided, the heat recovered from the cooling target 50 by the coolant C can be efficiently released into the air. Therefore, the coolant C boils in each fine water channel 12 due to the heat recovered from the cooled object 50 and bubbles are generated, and a film is formed between the water channel forming surface and the coolant C so that heat exchange is performed well. It is possible to prevent heat from being lost as much as possible, and to efficiently perform heat exchange. Further, the outer fin 5 is not limited to the shape as shown in FIGS. 2 and 3 as long as it has a heat dissipation effect. For example, the shape of the other surface of the cooling member 11 is made uneven in place of the outer fin 5. It is good also as a structure which gives the heat dissipation effect by forming. The outer fin 5 and the uneven shape may be used in combination.

本発明の一実施形態に係る液冷式冷却器を備えるパワー素子搭載用ユニットを示す平面図である。It is a top view which shows the unit for power element mounting provided with the liquid cooling type cooler which concerns on one Embodiment of this invention. 図1に示すII−II線断面図である。It is the II-II sectional view taken on the line shown in FIG. 図1に示すIII−III線断面図である。It is the III-III sectional view taken on the line shown in FIG.

符号の説明Explanation of symbols

1,2 ヘッダー
1a,1b,2a,2b 矩形皿状板
1c,2c ヘッダー水路
1d,2d リブ部
1e,2e 切り欠き部
10 液冷式冷却器
11 冷却部材
12 微細水路
13 端面
50 被冷却体
51 回路層
52 セラミックス絶縁層
53 パワー素子
C 冷却液
O 対称面
DESCRIPTION OF SYMBOLS 1, 2 Header 1a, 1b, 2a, 2b Rectangular dish-shaped board 1c, 2c Header water channel 1d, 2d Rib part 1e, 2e Notch part 10 Liquid cooling type cooler 11 Cooling member 12 Fine water path 13 End surface 50 Cooled body 51 Circuit layer 52 Ceramic insulating layer 53 Power element C Coolant O Symmetric plane

Claims (5)

冷却液が流通する離間した二つのヘッダーと、これらヘッダー間に配置され冷却液を流通させる流路を備えた冷却部材とにより水路が形成され、前記冷却部材の一面に被冷却体を取り付け、この被冷却体を冷却させるよう構成される液冷式冷却器において、
前記ヘッダーは、二つの矩形皿状板が対向配置されて形成されており、
前記矩形皿状板は、その外周縁に、両矩形皿状板同士で重ね合わせられる接合縁部と、前記冷却部材の流路端を含む端部を嵌入するための切り欠き部とを備え、
前記接合縁部同士及び前記切り欠き部と前記端部とが接合されていることを特徴とする液冷式冷却器。
A water channel is formed by two spaced apart headers through which the coolant flows, and a cooling member having a flow path disposed between the headers and through which the coolant flows, and an object to be cooled is attached to one surface of the cooling member. In a liquid-cooled cooler configured to cool an object to be cooled,
The header is formed by two rectangular dish-shaped plates facing each other.
The rectangular dish-shaped plate includes, on its outer peripheral edge, a joining edge portion that is overlapped between the two rectangular dish-shaped plates, and a notch portion for fitting an end including the flow path end of the cooling member,
The liquid-cooled cooler, wherein the joining edges and the notch and the end are joined.
請求項1記載の液冷式冷却器において、
前記対向配置される二つの矩形皿状板は、その接合位置を対称面として面対称に形成されていることを特徴とする液冷式冷却器。
The liquid-cooled cooler according to claim 1,
The two rectangular dish-like plates arranged opposite to each other are formed symmetrically with respect to the joining position as a symmetry plane.
請求項1又は請求項2記載の液冷式冷却器において、
前記接合縁部は、フランジ状のリブ部で形成されていることを特徴とする液冷式冷却器。
In the liquid cooling type cooler according to claim 1 or 2,
The liquid-cooled cooler, wherein the joining edge portion is formed by a flange-like rib portion.
請求項1から請求項3のいずれかに記載の液冷式冷却器を製造する方法であって、
前記接合は、少なくとも接合される側の面にろう材料を介在させておき、このろう材料を加熱してろう付けさせることにより、同時に行われることを特徴とする液冷式冷却器の製造方法。
A method for producing a liquid-cooled cooler according to any one of claims 1 to 3,
The method for manufacturing a liquid-cooled cooler is characterized in that the joining is performed at the same time by interposing a brazing material at least on the surfaces to be joined, and heating and brazing the brazing material.
請求項4記載の液冷式冷却器の製造方法であって、
前記端部に形成される端面には、予め酸化膜が形成されていることを特徴とする液冷式冷却器の製造方法。

It is a manufacturing method of the liquid cooling type cooler according to claim 4,
A method for manufacturing a liquid-cooled cooler, wherein an oxide film is formed in advance on an end face formed at the end.

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Cited By (5)

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JP2012004356A (en) * 2010-06-17 2012-01-05 Mitsubishi Materials Corp Substrate for power module and manufacturing method thereof
JP2012086258A (en) * 2010-10-21 2012-05-10 Mitsubishi Alum Co Ltd Aluminum alloy member to be brazed to electrically insulating member, and electrically insulating member
DE102014222492A1 (en) 2013-11-05 2015-05-07 Kabushiki Kaisha Toyota Jidoshokki Heat sink device
JP2018185094A (en) * 2017-04-26 2018-11-22 レノボ・シンガポール・プライベート・リミテッド Plate type heat transport device, electronic equipment and manufacturing method of plate type heat transport device
US10304756B2 (en) 2015-06-17 2019-05-28 Fuji Electric Co., Ltd. Power semiconductor module and cooler

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JP2003086744A (en) * 2000-08-09 2003-03-20 Mitsubishi Materials Corp Power module and power module with heat sink

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2001127478A (en) * 1999-08-30 2001-05-11 Electric Boat Corp Thermal-conduction cooling plate device
JP2003086744A (en) * 2000-08-09 2003-03-20 Mitsubishi Materials Corp Power module and power module with heat sink

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012004356A (en) * 2010-06-17 2012-01-05 Mitsubishi Materials Corp Substrate for power module and manufacturing method thereof
JP2012086258A (en) * 2010-10-21 2012-05-10 Mitsubishi Alum Co Ltd Aluminum alloy member to be brazed to electrically insulating member, and electrically insulating member
DE102014222492A1 (en) 2013-11-05 2015-05-07 Kabushiki Kaisha Toyota Jidoshokki Heat sink device
US10304756B2 (en) 2015-06-17 2019-05-28 Fuji Electric Co., Ltd. Power semiconductor module and cooler
JP2018185094A (en) * 2017-04-26 2018-11-22 レノボ・シンガポール・プライベート・リミテッド Plate type heat transport device, electronic equipment and manufacturing method of plate type heat transport device
US10677539B2 (en) 2017-04-26 2020-06-09 Lenovo (Singapore) Pte Ltd Plate-type heat transport device

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