JP2008286496A - Fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fan filter unit without having temperature influence on clean air, by removing heating of a motor built in the fan filter unit. <P>SOLUTION: This fan filter unit is provided by installing a filter 6 under a fan unit 4 by incorporating the fan unit 4 composed of a fan 2 and the motor 3 into a chamber 5. The fan filter unit is provided without having the temperature influence on the clean air 14, by cooling the motor 3 by exhausting cooling air (exhaust air) 13, by sending cooling air (supply air) 12 by a conduit 7, by connecting the conduit 7 for introducing the cooling air (the exhaust air) 13 outside to a port, by arranging the air exhaust port 10 in an opposed position, by connecting the conduit 7 for introducing the cooling air (the supply air) 12 from the outside to a port, by arranging the air supply port 9 in a cooling cover 8, by covering the whole motor 3 with the cooling cover 8. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a fan filter unit and a system used in a clean room requiring a clean space in a semiconductor, liquid crystal, or plasma display manufacturing factory.

Conventionally, when this type of fan filter unit is used in a device called a stocker or a manufacturing device that temporarily stores semiconductors and FPDs (flat panel displays) in the manufacturing process, as shown in FIG. A system configuration in which a cooling device such as a dry coil unit 44 is provided as means for preventing temperature rise in the device due to heat generated by the motor (see, for example, Patent Document 1).
JP 2004-101027 A (FIGS. 1 and 2)

  In a system using such a conventional fan filter unit, since cooling is performed by a dry coil unit, it is necessary to draw a piping of cold water into the apparatus, and the construction becomes complicated and there is a risk of water leakage. Due to the structure, the air immediately after being blown out from the fan filter unit has a problem that the temperature rises due to the influence of heat generated by the motor, the temperature difference is caused by the portion of the blown air, and the temperature distribution is deteriorated. In addition, with the recent trend of increasing the size of FPD panels, if there are many stockers in the stocker, tens to hundreds or more of fan filter units may be used, and it is necessary to install a large number of dry coil units. In order to improve reliability and reduce risk, there is a need for a technology that suppresses heat generation of the fan filter unit.

  The present invention solves such a problem, suppresses the influence of motor heat generation on blown air, reduces the number of dry coil units installed in the apparatus, and improves the uniformity of temperature distribution. An object of the present invention is to provide a fan filter unit that can suppress the thermal influence on the semiconductor and the FPD panel.

  In order to achieve the above object, the fan filter unit of the present invention has a suction part at the upper part of a box-shaped chamber, and a fan unit composed of a fan and a motor is built in the chamber. In the fan filter unit having a filter attached to the motor, the motor is fixed to the chamber by a motor support, and a plurality of air holes are provided in the non-load side housing of the motor, and the entire anti-load side housing is provided with an air exhaust port. It is covered with a cooling cover, and an air supply port is provided in the load side housing of the motor, and a conduit for guiding air from the outside of the chamber is connected to the air supply port. A conduit for guiding air to the outside of the chamber is connected.

  With the above configuration, the cooling air (generally dry air) is supplied to the conduit connected to the air supply port to cool the inside of the motor and to cool from the plurality of air holes in the non-load side housing. After being discharged to the inside of the cover, it will be exhausted to the outside of the fan filter unit through the conduit connected to the air exhaust port, suppressing the influence of heat generation from the motor on the clean air blown out from the fan filter unit. In addition to reducing the number of units installed in the apparatus, such as a dry coil unit for cooling, the temperature influence is enhanced to suppress the thermal effect on the semiconductor and FPD panel.

  As another means, the motor is fixed to the chamber by a motor support, and the entire motor is covered with a cooling cover, and an air supply port and an air exhaust port are provided at opposite positions on the cooling cover. And a conduit for guiding air from the outside of the chamber is connected to an air supply port, and a conduit for guiding air to the outside of the chamber is connected to an air exhaust port.

  With the above configuration, by supplying cooling air (generally dry air) to the conduit connected to the air supply port, the cooling air flows into the cooling cover and cools the entire motor housing. At the same time, the air is exhausted from the duct connected to the air exhaust port to the outside of the fan filter unit, so that the effect of heat generation from the motor on the clean air blown out from the fan filter unit is suppressed, and drying for cooling is performed. In addition to reducing the number of installed coil units and the like in the apparatus, the thermal distribution on the semiconductor and FPD panel is suppressed by increasing the uniformity of the temperature distribution. Further, even if cooling air is supplied, no pressure is applied to the inside of the motor by the cooling air, so that the ejection of chemical substances used inside the motor is suppressed.

  In another means, the motor is fixed to the chamber by a motor support, and the entire motor is covered with a cooling cover. The cooling cover has an air supply port and an air exhaust port at opposite positions. A port is provided, a conduit for guiding air from the outside of the chamber is connected to an air supply port, a conduit for guiding air from the air exhaust port to the outside of the chamber is connected, and an air supply port is provided in the cooling cover. A wind direction guide that guides air from the air to the air exhaust port is provided.

  With the above configuration, by supplying cooling air (typically dry air) to the conduit connected to the air supply port, the cooling air flows into the cooling cover, and the motor housing is guided by the wind direction guide. After gradually cooling the surroundings, the air is exhausted from the duct connected to the air exhaust port to the outside of the fan filter unit, thereby suppressing the influence of heat generated by the motor on the clean air blown out from the fan filter unit. In addition to reducing the number of units installed in the apparatus, such as a dry coil unit for cooling, the temperature influence is enhanced to suppress the thermal effect on the semiconductor and FPD panel. Further, even if cooling air is supplied, no pressure is applied to the inside of the motor by the cooling air, so that the ejection of chemical substances used inside the motor is suppressed.

  Another means is that the motor is fixed to the chamber by a motor support, and the entire housing of the motor is provided with a plurality of air holes, and the entire non-load-side housing is covered with a cooling cover. The cover is provided with an air exhaust port, and an air blower is installed inside the cooling cover. The air exhaust port is connected to the discharge part of the air blower, and the air exhaust port is connected to the outside of the chamber. A conduit for guiding air is provided.

  With the above configuration, the air blower inside the cooling cover is operated by forcibly passing the air inside the motor and arranging a conduit for guiding the air to the outside of the chamber at the discharge part of the blower. Then, the air inside the chamber is sucked from the air hole of the load side housing of the motor and cooled by passing through the inside of the motor, and the air sucked from the air hole of the non-load side housing to the blower is connected to the discharge part Since the air is exhausted to the outside of the fan filter unit, the influence of heat generated by the motor on the clean air blown out from the fan filter unit is suppressed, and the number of units installed in the device such as a dry coil unit for cooling is reduced. In addition, the thermal distribution on the semiconductor and FPD panel is suppressed by increasing the uniformity of temperature distribution. A. Moreover, even if the blower is operated, no pressure is applied to the inside of the motor by the cooling air, so that the ejection of the chemical substance used inside the motor is suppressed.

  Another means is provided with a plurality of air supply ports and a plurality of air exhaust ports.

  The other means has a structure in which a conduit connected to the air supply port and a conduit connected to the air exhaust port are covered with a heat insulating material.

  Another means is that the inner diameter of the conduit connected to the air supply port is smaller than the inner diameter of the conduit connected to the air exhaust port.

  The other means has a structure in which the cooling cover is covered with a heat insulating material.

  Another means is to use a sealed bearing with an O-ring as a bearing on the load side built in the motor.

  In another means, a flow rate adjusting valve is provided at one end of a conduit connected to the air supply port.

  Another means is that a pressure regulating valve is provided at one end of a conduit connected to the air supply port.

  Further, another means is provided with an air hole in the top surface of the load side housing of the motor, a tunnel-type air supply port is provided so as to cover the air hole, and air is introduced from the top surface of the motor. It is.

  By having such means, the influence of heat generation from the motor to the clean air blown out from the fan filter unit is suppressed, and the number of units installed in the apparatus such as a dry coil unit for cooling is reduced. By increasing the uniformity of the temperature distribution, the thermal effect on the semiconductor and FPD panel is suppressed.

  Another means is to use a flexible tube for the conduit.

  By having such a means, piping can be freely performed even when the conduit path in the chamber is narrow.

  According to the present invention, the cooling air is supplied into the motor and the cooling cover through the conduit connected to the air supply port, so that the heat generated in the motor is cooled and the conduit connected to the air exhaust port is connected. In order to cool the clean air blown out from the fan filter unit, the clean air from the fan filter unit is blown out without causing a temperature rise due to the heat generated by the motor. The number of installed dry coil units can be reduced. Furthermore, since the temperature rise of clean air is suppressed, the temperature distribution when clean air is blown out becomes uniform.

  Further, according to the present invention, the blower installed inside the cooling cover cools the heat generated by the motor by sucking the air inside the chamber through the air hole of the motor housing, and is connected to the discharge part of the blower. By discharging to the outside of the chamber through the conduit, the clean air from the fan filter unit is blown out without causing a temperature rise due to the heat generated by the motor, and the clean air blown from the fan filter unit is cooled. Therefore, the number of installed dry coil units can be reduced. Furthermore, since the temperature rise of clean air is suppressed, the temperature distribution when clean air is blown out becomes uniform. Further, it is possible to obtain an effect of suppressing an increase in the internal pressure by the cooling air flowing into the motor and preventing the chemical substance used in the motor from being ejected to the outside.

  Further, according to the present invention, by providing a plurality of air supply ports and air exhaust ports, it is possible to send more cooling air into the motor and the cooling cover, thereby cooling the heat generation of the motor. Effect is obtained.

  Further, according to the present invention, the conduit for guiding the cooling air (supply air) connected to the air supply port and the conduit for guiding the cooling air (exhaust gas) connected to the air exhaust port or the discharge part of the blower are insulated. By covering with the material, an effect of suppressing the influence of radiant heat generated by cooling air (supply air) or cooling air (exhaust gas) passing through the inside of the conduit can be obtained.

  Also, the pipe diameter of the conduit connected to the air supply port is made thinner than the pipe diameter of the conduit connected to the air exhaust port, so that the internal pressure rises due to the cooling air flowing into the motor. It is possible to prevent the chemical substance used inside the motor from being ejected to the outside.

  Moreover, according to this invention, the effect which suppresses the influence of the radiant heat from a cooling cover is acquired by covering a cooling cover with a heat insulating material.

  In addition, according to the present invention, the load-side bearing built in the motor uses an O-ring sealed bearing, thereby preventing the chemical substance used inside the motor from being ejected to the outside. Effect is obtained.

  Further, according to the present invention, by providing a flow rate adjusting valve and a pressure adjusting valve at one end of the conduit connected to the air supply port, a large number of fan filter units are installed, and resistance in the cooling air supply path is reduced. In the case where the fan filter units are greatly different or the fan filter units having different motor outputs are mixedly installed, the cooling air introduction flow rate and the introduction pressure can be appropriately adjusted for each fan filter unit.

  Further, according to the present invention, the air supply port has a tunnel shape and is provided so that air is introduced from the top surface of the motor, whereby cooling air flows into the interior from the entire upper surface of the load side housing of the motor. By improving the contact efficiency, the effect of cooling the heat generation of the motor can be obtained.

  In addition, according to the present invention, by using a tube having a flexible property for the conduit, an effect of freely piping the conduit path inside the fan filter unit can be obtained.

  The invention according to claim 1 of the present invention has a suction part at the top of a box-shaped chamber, a fan unit comprising a fan and a motor is built in the chamber, and a filter is attached to the outlet side of the fan unit. The motor is fixed to the chamber by a motor support, a plurality of air holes are provided in the non-load side housing of the motor, and the entire anti-load side housing is covered with a cooling cover provided with an air exhaust port, The motor load side housing is provided with an air supply port, and a conduit for guiding air from the outside of the chamber is connected to the air supply port, and a conduit for guiding air to the outside of the chamber is connected to the air exhaust port. By supplying cooling air to the conduit connected to this air supply port, the motor The inside of the fan is cooled and discharged to the inside of the cooling cover through a plurality of air holes in the anti-load side housing, and then exhausted to the outside of the fan filter unit through a conduit connected to the air exhaust port. Suppresses the influence of heat generated by the motor on the clean air blown from the air, reduces the number of units installed in the dry coil unit, etc. for cooling, and improves the uniformity of the temperature distribution to improve the uniformity of the semiconductor and FPD The effect of heat on the panel is suppressed.

  According to a second aspect of the present invention, the motor is fixed to the chamber by a motor support, the entire motor is covered with a cooling cover, and the air supply port is located at a position opposite to the cooling cover. And an air exhaust port, a conduit for guiding air from the outside of the chamber is connected to the air supply port, and a conduit for guiding air to the outside of the chamber is connected to the air exhaust port. By supplying cooling air to the conduit connected to the port, the cooling air flows into the cooling cover, cooling the entire motor housing, and the fan filter unit from the conduit connected to the air exhaust port Exhaust air from the motor to the clean air blown out from the fan filter unit. Suppressing reverberation, while reducing the number of installed into the apparatus such as a dry coil unit for cooling is obtained by thereby suppressing thermal influence on semiconductors and FPD panels by increasing the uniformity of the temperature distribution. Further, even if cooling air is supplied, no pressure is applied to the inside of the motor by the cooling air, so that the ejection of chemical substances used inside the motor is suppressed.

  According to a third aspect of the present invention, the motor is fixed to the chamber by a motor support, and the entire motor is covered with a cooling cover, and the cooling cover has an air supply position at an opposite position. A port and an air exhaust port are provided, a conduit for guiding air from the outside of the chamber is connected to the air supply port, and a conduit for guiding air from the air exhaust port to the outside of the chamber is connected to the cooling cover. Is provided with a wind direction guide that guides air from the air supply port to the air exhaust port. By supplying cooling air to a conduit connected to the air supply port, the air is supplied into the cooling cover. Cooling air flows in and the motor guide is cooled step by step by the airflow direction guide, and then fan fan is connected to the duct connected to the air exhaust port. The air is exhausted to the outside of the air conditioning unit, the effect of heat generation from the motor on the clean air blown out from the fan filter unit is suppressed, and the number of units installed in the device such as the dry coil unit for cooling is reduced. The thermal effect on the semiconductor and FPD panel is suppressed by increasing the uniformity of the temperature distribution. Further, even if cooling air is supplied, no pressure is applied to the inside of the motor by the cooling air, so that the ejection of chemical substances used inside the motor is suppressed.

  According to a fourth aspect of the present invention, the motor is fixed to the chamber by a motor support, and a plurality of air holes are provided in the entire housing of the motor, and the entire non-load side housing is covered with a cooling cover. The cooling cover is provided with an air exhaust port, and an air blower is installed inside the cooling cover. The air exhaust port is connected to the discharge portion of the air blower, and the air exhaust port The port is provided with a conduit for guiding air to the outside of the chamber. The air is forcibly passed inside the motor, and a conduit for guiding the air to the outside of the chamber is arranged at the discharge part of the blower. By installing the air blower inside the cooling cover, the air inside the chamber is sucked from the air hole in the load side housing of the motor, and the motor The air that has been cooled by passing through the section and sucked into the blower from the air hole of the non-load side housing is exhausted to the outside of the fan filter unit through the conduit connected to the discharge section, and blown out from the fan filter unit Suppresses the effect of heat generated by the motor on the clean air, reduces the number of units installed in the equipment such as dry coil units for cooling, and increases the uniformity of the temperature distribution to increase the thermal effect on the semiconductor and FPD panel It is intended to suppress. Moreover, even if the blower is operated, no pressure is applied to the inside of the motor by the cooling air, so that the ejection of the chemical substance used inside the motor is suppressed.

  The invention according to claim 5 of the present invention is provided with a plurality of air supply ports and a plurality of air exhaust ports. While improving, it will reduce the pressure applied to the inside of a motor, and has the effect | action which can suppress the ejection to the exterior of the chemical substance currently used inside a motor.

  The invention according to claim 6 of the present invention comprises a structure in which a conduit connected to an air supply port and a conduit connected to an air exhaust port are covered with a heat insulating material, and the temperature of the cooling air is increased. Radiant heat from the conduit generated by passing through the inside of the conduit is suppressed. This suppresses the thermal influence from the conduit to the clean air blown out from the fan filter unit, reduces the number of installed dry coil units for cooling, and increases the uniformity of temperature distribution. This has the effect of suppressing the thermal effect on the semiconductor and FPD panel.

  The invention according to claim 7 of the present invention is such that the inner diameter of the conduit connected to the air supply port is narrower than the inner diameter of the conduit connected to the air exhaust port. When the amount is larger than the introduction amount, the pressure applied to the inside of the motor is prevented from increasing, and the chemical substance used inside the motor can be prevented from being ejected to the outside.

  The invention according to claim 8 of the present invention has a structure in which the cooling cover is covered with a heat insulating material, and suppresses the radiant heat from the cooling cover, and the temperature of the air blown from the fan filter unit. Prevent the rise. Accordingly, the number of installed dry coil units for cooling is reduced, and the uniformity of the temperature distribution is enhanced to suppress the thermal influence on the semiconductor and the FPD panel.

  According to the ninth aspect of the present invention, the load-side bearing built in the motor uses a sealed bearing with an O-ring, and the motor load-side housing is sealed between the bearing house inner wall and the bearing. As a result, the leakage of cooling air from the periphery of the shaft is suppressed, and it is possible to suppress the ejection of a chemical substance that occurs simultaneously with the leakage.

  In the invention according to claim 10 of the present invention, a flow rate adjusting valve is provided at one end of a conduit connected to an air supply port, and a large number of fan filter units are installed. When the fan resistance units of the fan filter units are different from each other or when fan filter units having different motor outputs are installed together, a flow rate adjusting valve is provided for each individual fan filter unit so that the introduction flow rate of the cooling air can be adjusted appropriately.

  According to an eleventh aspect of the present invention, a pressure adjusting valve is provided at one end of a conduit connected to an air supply port, and a large number of fan filter units are installed to provide a cooling air supply path. In the case where the resistances of the fan filters are greatly different or when fan filter units having different motor outputs are installed together, a pressure adjusting valve is provided for each of the fan filter units so that the introduction pressure of the cooling air can be adjusted appropriately.

  According to a twelfth aspect of the present invention, an air hole is provided in the top surface of the load side housing of the motor, a tunnel-type air supply port is provided so as to cover the air hole, and air is introduced from the motor top surface. The cooling air flows into the motor from the entire top surface of the load side housing of the motor, and the contact efficiency between the stator or rotor that is a heating element and the cooling air is improved. The heat generated by the motor is cooled, and the cooling air whose temperature has risen is exhausted to the outside of the fan filter unit through a conduit connected to the air exhaust port. As a result, the surface temperature of the motor housing is kept low, the influence of the heat generation of the motor on the clean air blown out from the fan filter unit is suppressed, and the number of dry coil units installed in the device for cooling is reduced. In addition to reducing the temperature distribution, it increases the uniformity of the temperature distribution, thereby suppressing the thermal effect on the semiconductor and FPD panel.

  In the thirteenth aspect of the present invention, the conduit uses a flexible tube.

  By having such a means, piping can be freely performed even when the conduit path in the chamber is narrow.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, in a fan filter unit having a suction chamber 1 in a box-shaped chamber 5, a fan unit 4 including a fan 2 and a motor 3 is built in the chamber 5, and a filter 6 is attached below the fan unit 4. The air supply port 9 provided in the load side housing 3a of the motor 3 is connected to the conduit 7 for leading the cooling air (supply air) 12 from the outside of the chamber 5, and the anti-load side housing 3b is provided with a motor support 15. The cooling cover 8 is attached to the cooling cover 8, and the cooling cover 8 is connected to the air exhaust port 10 and the conduit 7 for guiding the cooling air (exhaust) 13 to the outside of the chamber 5.

  In the above configuration, the cooling air (supply air) 12 introduced from the outside is guided into the load side housing 3a of the motor 3 and discharged from the plurality of air holes 11 of the anti-load side housing 3b. Will be cooled. The cooling air (exhaust) 13 whose temperature has been increased by cooling the motor 3 is exhausted from the fan filter unit by being exhausted outside the chamber 5 through the conduit 7 connected from the air exhaust port 10. The influence of the heat generation of the motor 3 on the clean air 14 can be suppressed.

  Moreover, since the air permeability of the cooling air (supply air) 12 is improved by providing the plurality of air holes 11, the flow rate of the jetting cooling air (exhaust) 13 is increased to improve the cooling effect. In addition, since the increase in pressure applied to the inside of the motor 3 can be suppressed, the chemical substance used in the motor 3 can be prevented from being ejected.

(Embodiment 2)
As shown in FIG. 2, in a fan filter unit having a suction chamber 1 in a box-shaped chamber 5, a fan unit 4 composed of a fan 2 and a motor 3 is built in the chamber 5, and a filter 6 is attached below the fan unit 4. The entire motor 3 is covered with a cooling cover 8 attached to a motor support 15, and an air supply port 9 provided in the cooling cover 8 and a conduit for leading cooling air (supply air) 12 from the outside of the chamber 5. 7 and an air exhaust port 10 are provided at opposite positions, and a conduit 7 that guides cooling air (exhaust) 13 to the outside of the chamber 5 is connected.

  In the above configuration, the cooling air (supply air) 12 introduced from the outside is guided into the cooling cover 8 and contacts the entire outer surface of the motor 3 to cool the motor 3. The cooling air (exhaust) 13 whose temperature has been increased by cooling the motor 3 is exhausted from the fan filter unit by being exhausted outside the chamber 5 through the conduit 7 connected from the air exhaust port 10. The influence of the heat generation of the motor 3 on the clean air 14 can be suppressed.

  Further, unlike the first embodiment, since the cooling air (supply air) 12 is not introduced into the motor 3, the flow rate of the cooling air (supply air) 12 is increased for the purpose of improving the cooling effect. However, no pressure is applied to the inside of the motor 3, and the chemical substance used in the motor 3 has an action of preventing the chemical substance from being ejected to the outside.

(Embodiment 3)
As shown in FIG. 3, in a fan filter unit having a suction chamber 1 in a box-shaped chamber 5, a fan unit 4 including a fan 2 and a motor 3 is built in the chamber 5, and a filter 6 is attached below the fan unit 4. A wind direction guide 17 is provided inside, and the entire motor 3 is covered with a cooling cover 16 with a built-in wind direction guide attached to a motor support 15, and the air supply port 9 provided in the cooling cover 16 with a built-in wind direction guide and the chamber 5 is connected to a conduit 7 for leading the cooling air (supply air) 12 from the outside, and is provided with an air exhaust port 10 at the opposite position to guide the cooling air (exhaust) 13 to the outside of the chamber 5. 7 is connected.

  In the above configuration, the cooling air (supply air) 12 introduced from the outside is guided to the inside of the wind direction guide built-in cooling cover 16 and turns in accordance with the wind direction guide 17 provided in a spiral shape while turning outside the motor 3. By sequentially contacting the surface, the motor 3 is efficiently cooled. The cooling air (exhaust) 13 whose temperature has been increased by cooling the motor 3 is exhausted from the fan filter unit by being exhausted outside the chamber 5 through the conduit 7 connected from the air exhaust port 10. The influence of the heat generation of the motor 3 on the clean air 14 can be suppressed.

  Further, unlike the first embodiment, since the cooling air (supply air) 12 is not introduced into the motor 3, the flow rate of the cooling air (supply air) 12 is increased for the purpose of further improving the cooling effect. Even if it is increased, no pressure is applied to the inside of the motor 3, and the chemical substance used in the motor 3 has an action of preventing the chemical substance from being ejected to the outside.

  FIG. 4 is a detailed view of the cooling cover with a built-in wind direction guide. The air direction guide built-in cooling cover 16 is provided with an air supply port 9, and an air exhaust port 10 is provided at an opposite position, and the conduit 7 is connected to each. A wind direction guide 17 is spirally arranged inside the cooling cover 16 with a built-in wind direction guide.

  In the above configuration, the cooling air (supply air) 12 introduced from the outside flows through the inside of the wind direction guide cooling cover 16 while turning along the wind direction guide 17, and sequentially contacts the outer surface of the motor 3. The cooling effect is more effective than when the wind direction guide 17 is not provided.

  In this embodiment, the spiral wind direction guide 17 is used for the cooling cover 16 with a built-in wind direction guide. However, as long as air is guided from the air supply port 9 to the air exhaust port 10. Other shapes are also possible.

(Embodiment 4)
As shown in FIG. 5, in a fan filter unit having a suction chamber 1 in a box-shaped chamber 5, a fan unit 4 including a fan 2 and a motor 3 is built in the chamber 5, and a filter 6 is attached below the fan unit 4. The load side housing 3a and the anti-load side housing 3b of the motor 3 are provided with a plurality of air holes 11, and the anti-load side housing 3b is covered with a cooling cover 8 attached to the motor support 15, and the cooling cover 8 The air blower 18 is provided inside, and the air exhaust port 10 and the conduit 7 for guiding the cooling air (exhaust) 13 to the outside of the chamber 5 are connected to the discharge portion of the air blower 18.

  In the above configuration, by operating the air blower 18, the air inside the chamber 5 is guided to the inside of the motor 3 from the plurality of air holes 11 of the load side housing 3a and is released from the plurality of air holes 11 of the counter load side housing 3b. As a result, the motor 3 is cooled. The cooling air (exhaust) 13 whose temperature has been increased by cooling the motor 3 is sucked into the blower 18 and exhausted to the outside of the chamber 5 through the conduit 7 connected from the air exhaust port 10. The influence of the heat generation of the motor 3 on the clean air 14 blown out from the fan filter unit can be suppressed. Further, since the cooling air (supply air) 12 is not required, a cooling air generator and a supply pipe are not required, leading to cost reduction.

  Further, since the cooling air (supply air) 12 passes through the motor 3 by operating the blower 18, the suction of the blower 18 prevents the pressure inside the motor 3 from increasing. In addition, the chemical substance used in the motor 3 has an action of preventing the chemical substance from being ejected to the outside.

(Embodiment 5)
A fifth embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 6, the entire motor 3 is covered with a cooling cover 8 attached to the motor support 15, and the cooling cover 8 includes a plurality of air supply ports 9 and a plurality of air exhaust ports 10. Is provided. The air supply port 9 is connected to a conduit 7 that guides cooling air (supply air) 12 from the outside of the chamber 5. The air exhaust port 10 is connected to a conduit 7 that guides cooling air (exhaust) 13 to the outside of the chamber 5.

  With the above configuration, the cooling air (supply air) 12 introduced into the motor 3 and the cooling cover 8 is increased, and the cooling effect can be improved. In addition, an increase in the discharge amount of the cooling air (exhaust) 13 suppresses an increase in pressure applied to the inside of the motor 3 and prevents a chemical substance used in the motor 3 from being ejected to the outside. Can be made.

(Embodiment 6)
A sixth embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 7, the entire conduit 7 connected to the air supply port 9 in order to guide the cooling air (supply air) 12 from the outside of the chamber 5, and the cooling air (exhaust) 13 to the outside of the chamber 5. In order to guide, the entire conduit 7 connected to the air exhaust port 10 is covered with a heat insulating material 19a.

  In the above configuration, heat of the cooling air (supply air) 12 and particularly the cooling air (exhaust gas) 13 whose temperature has been increased by cooling the motor 3 is transmitted to the conduit 7. And the influence of heat generation of the motor 3 on the clean air 14 blown out from the fan filter unit can be suppressed.

(Embodiment 7)
A seventh embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 8, the cooling air (exhaust gas) is discharged to the outside of the chamber 5 rather than the inner diameter of the conduit 7 connected to the air supply port 9 for introducing the cooling air (supply air) 12 from the outside of the chamber 5. ) The inner diameter of the inner diameter expansion conduit 7a connected to the air exhaust port 10 to guide the air 13 is larger.

  In the above configuration, by increasing the discharge amount of the cooling air (exhaust) 13, it is possible to introduce the cooling air (supply air) 12 while reducing the pressure applied to the motor 3 and the cooling cover 8. Accordingly, the cooling effect on the motor 3 becomes more effective. Further, it is possible to prevent the chemical substance used in the motor 3 from being ejected.

(Embodiment 8)
The eighth embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 9, the entire outer surfaces of the cooling cover 8 into which the cooling air (supply air) 12 is introduced and the cooling cover 16 with a built-in air direction guide are covered with a heat insulating material 19b.

  In the above-described configuration, the heat of the cooling air (exhaust) 13 whose temperature has been increased by cooling the motor 3 is prevented from being generated as radiant heat from the cooling cover 8, and the clean air 14 blown out from the fan filter unit The influence of the heat generated by the motor 3 can be suppressed.

(Embodiment 9)
A ninth embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 10, a sealed bearing 20 with an O-ring is built in the bearing of the load side housing 3 a built in the motor 3.

  In the above configuration, since the inner wall of the load-side housing 3a and the O-ring of the O-ring sealed bearing 20 are in close contact with each other, the sealing performance is improved. As a result, the cooling air (supply air) 12 introduced into the motor 3 does not leak from the outer periphery of the bearing and flows in the cooling air flow direction 12a. It is possible to prevent the chemical substance from being ejected from around the shaft.

(Embodiment 10)
A tenth embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 11, a flow rate adjusting valve 21 is provided in the course of the conduit 7 connected to the air supply port 9.

  With the above configuration, the flow rate of the cooling air (supply air) 12 supplied to the fan filter unit can be easily adjusted. When installing a fan filter unit in a stocker, several tens to several hundreds may be used at the same time. When the number of installed units is large, the flow rate of cooling air (supply air) 12 supplied to each unit varies. Therefore, easy flow rate adjustment is required.

(Embodiment 11)
The eleventh embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 12, a pressure regulating valve 22 is provided in the middle of the path of the conduit 7 connected to the air supply port 9.

  With the above configuration, the pressure of the cooling air (supply air) 12 supplied to the fan filter unit can be easily adjusted. When installing a fan filter unit in a stocker, several tens to several hundreds may be used at the same time, and when the number of installed units is large, the pressure of the cooling air (supply air) 12 supplied to each unit varies. Therefore, easy pressure adjustment is required.

(Embodiment 12)
A twelfth embodiment will be described with reference to FIGS. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 13, a tunnel-shaped port 23 is provided so as to cover the top surface of the motor 3. The tunnel-shaped port 23 is hollow to guide the cooling air (supply air) 12. An air hole for introducing air into the motor 3 is provided on the top surface of the housing 3 a on the load side of the motor 3. The tunnel-shaped port 23 is provided so as to cover the air hole on the top surface of the motor 3 so as to form a tunnel shape.

  In the above configuration, the cooling air (supply air) 12 introduced from the outside is uniformly introduced from the top surface of the motor 3 by the tunnel-shaped port 23 and discharged from the plurality of air holes 11 of the anti-load side housing 3b. The motor 3 is cooled. The cooling air (exhaust) 13 whose temperature has been increased by cooling the motor 3 is exhausted from the fan filter unit by being exhausted outside the chamber 5 through the conduit 7 connected from the air exhaust port 10. The influence of the heat generation of the motor 3 on the clean air 14 can be suppressed. In addition, the cooling air (supply air) 12 is uniformly introduced from the top surface of the motor 3, thereby uniformly contacting the heating element inside the motor 3, thereby enabling an efficient cooling effect. .

  14 and 15 are an isometric view, a front view, a cross-sectional view, and a side view of the tunnel-shaped port.

  The tunnel-shaped port 23 is provided with a cooling air inlet 26 and is hollow inside. A motor top surface opening 27 is opened at the top surface of the load side housing 3a of the motor 3 where the tunnel-shaped port 23 is disposed, and the cooling air (supply air) 12 flows uniformly into the motor 3. It has a structure.

  In the above configuration, the cooling air (supply air) 12 introduced from the cooling air introduction port 26 is uniformly spread to the top surface of the motor 3 by the tunnel-shaped port 23 and is introduced from the motor top surface port 27 to the inside of the motor 3. Is done.

(Embodiment 13)
A thirteenth embodiment will be described with reference to FIG. The same components as those in the first to third embodiments are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 16, a flexible tube 24 is connected to the air supply port 9 in order to guide the cooling air (supply air) 12 from the outside of the chamber 5, and the cooling air (exhaust) 13 is guided outside the chamber 5. The flexible tube 24 is connected to the air exhaust port 10 for the purpose. The flexible tube 24 is fixed to the motor support 15 with a binding band 25 in order to prevent interference with the fan 2.

  In the above configuration, in the fan filter unit that is desired to be thin, the inside of the chamber 5 is in a very narrow state, and it may be difficult to perform piping with a steel pipe or the like. Workability can be improved because piping can be made freely with a certain piping material.

  According to the present invention, it is possible to suppress the influence of heat generated by the motor, and by reducing the number of dry coil units installed in the apparatus, it is possible to reduce the equipment cost, reduce the risk of water leakage, and reduce the temperature distribution. By increasing the uniformity, the thermal influence on the semiconductor and the FPD panel can be suppressed, and it can be applied to a fan filter unit used for a semiconductor or FPD stocker.

1 is a longitudinal sectional view showing Embodiment 1 of the present invention. Longitudinal sectional view showing Embodiment 2 of the present invention Vertical sectional view showing Embodiment 3 of the present invention Detailed view of cooling cover with built-in wind direction guide according to embodiment 3 of the present invention Vertical section showing Embodiment 4 of the present invention Vertical section showing Embodiment 5 of the present invention Longitudinal sectional view showing Embodiment 6 of the present invention Longitudinal sectional view showing Embodiment 7 of the present invention Longitudinal sectional view showing Embodiment 8 of the present invention Vertical section inside load side housing of motor showing Embodiment 9 of the present invention Longitudinal sectional view showing Embodiment 10 of the present invention A longitudinal sectional view showing an eleventh embodiment of the present invention A longitudinal sectional view showing Embodiment 12 of the present invention Isometric view of tunnel-shaped port of embodiment 12 of the present invention The figure which shows the tunnel shape port of Embodiment 12 of this invention ((a) top view, (b) sectional drawing, (c) side view) Vertical section showing Embodiment 13 of the present invention Diagram showing a system using a conventional fan filter unit

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Suction part 2 Fan 3 Motor 3a Load side housing 3b Anti-load side housing 4 Fan unit 5 Chamber 6 Filter 7 Conduit 7a Inner diameter enlarged conduit 8 Cooling cover 9 Air supply port 10 Air exhaust port 11 Air hole 12 Cooling air ( air supply)
12a Air flow direction for cooling 13 Air for cooling (exhaust)
DESCRIPTION OF SYMBOLS 14 Clean air 15 Motor support 16 Cover for cooling with built-in air direction guide 17 Air direction guide 18 Air blower 19a, 19b Heat insulating material 20 Sealed bearing with O-ring 21 Flow rate adjusting valve 22 Pressure adjusting valve 23 Tunnel-shaped port 24 Flexible tube 25 Binding band 26 Cooling air inlet 27 Motor top surface 41 Fan filter unit 42 Blower 43 Dry coil 44 Dry coil unit 45 Semiconductor or FPD cassette

Claims (13)

In a fan filter unit that has a suction part at the top of a box-shaped chamber, a fan unit consisting of a fan and a motor is built in the chamber, and a filter is attached to the outlet side of the fan unit. A plurality of air holes are provided in the non-load-side housing of the motor, the entire anti-load-side housing is covered with a cooling cover provided with an air exhaust port, and the load-side housing of the motor The fan filter unit is provided with an air supply port, a conduit for guiding air from the outside of the chamber is connected to the air supply port, and a conduit for guiding air to the outside of the chamber is connected to the air exhaust port. In a fan filter unit that has a suction part at the top of a box-shaped chamber, a fan unit consisting of a fan and a motor is built in the chamber, and a filter is attached to the outlet side of the fan unit. The entire motor is covered with a cooling cover, and the cooling cover is provided with an air supply port and an air exhaust port at opposite positions, and a conduit for introducing air from outside the chamber is supplied with air. A fan filter unit which is connected to the air port and has a conduit for guiding air to the outside of the chamber connected to the air exhaust port. In a fan filter unit that has a suction part at the top of a box-shaped chamber, a fan unit consisting of a fan and a motor is built in the chamber, and a filter is attached to the outlet side of the fan unit. The entire motor is covered with a cooling cover, and the cooling cover is provided with an air supply port and an air exhaust port at opposite positions, and a conduit for introducing air from outside the chamber is supplied with air. A duct for guiding air to the outside of the chamber is connected to the air exhaust port, and a wind direction guide for guiding the air from the air supply port to the air exhaust port in the cooling cover Fan filter unit with In a fan filter unit that has a suction part at the top of a box-shaped chamber, a fan unit consisting of a fan and a motor is built in the chamber, and a filter is attached to the outlet side of the fan unit. The entire motor housing is provided with a plurality of air holes, and the entire non-load-side housing is covered with a cooling cover provided with an air exhaust port. A fan filter unit in which a blower is installed, the air exhaust port is connected to a discharge part of the blower, and a conduit for guiding air to the outside of the chamber is disposed in the air exhaust port. The fan filter unit according to any one of claims 1 to 4, wherein a plurality of air supply ports and a plurality of air exhaust ports are provided. 6. The fan filter unit according to claim 1, wherein the fan filter unit has a structure in which a conduit connected to the air supply port and a conduit connected to the air exhaust port are covered with a heat insulating material. 4. The fan filter unit according to claim 1, wherein an inner diameter of the conduit connected to the air supply port has a structure smaller than an inner diameter of the conduit connected to the air exhaust port. The fan filter unit according to any one of claims 1 to 7, comprising a structure in which a cooling cover is covered with a heat insulating material. The fan filter unit according to any one of claims 1 to 8, wherein the load-side bearing incorporated in the motor is configured to use an O-ring sealed bearing. The fan filter unit according to any one of claims 1 to 9, wherein the fan filter unit has a structure in which a flow rate adjusting valve is provided at one end of a conduit connected to the air supply port. The fan filter unit according to any one of claims 1 to 9, comprising a structure in which a pressure adjusting valve is provided at one end of a conduit connected to an air supply port. 2. The structure according to claim 1, wherein the top surface of the load side housing of the motor is provided with an air hole, a tunnel-type air supply port is provided so as to cover the air hole, and air is introduced from the top surface of the motor. The described fan filter unit. The fan filter unit according to any one of claims 1 to 4, wherein the conduit has a structure using a tube having a flexible property.

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