JP2008286302A - Rotary joint and abnormality detection mechanism of rotary valve element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To detect minute rotation abnormality by monitoring rotation torque of a rotary valve element. <P>SOLUTION: In the rotary valve element 100 having switching through holes 106 and 107 supplying or exhausting fluid and relatively rotating, a distortion sensor 201 for detecting longitudinal distortion of a pin 105A transmitting driving force is provided on a rotating moving valve element 101 side through a hole 105. A distortion detection mechanism (distortion detector 202, alarm means 204) are constituted via the distortion detector 202 and a cable 203. Change occurs in a distortion value of the distortion sensor 201 when abnormality such as seizure occurs in sliding surfaces 103 and 104 of the rotary valve element 100, and rotation abnormality can be detected. An alarm is generated by the alarm means 204 or a drive means (not shown in Figure) is stopped by a drive stop means (not shown in Figure) when abnormality is detected through the distortion detector 202. By detecting distortion of the pin 105A and monitoring change of the rotation torque, abnormality caused by damage on the sliding surfaces 103 and 104 can be accurately detected. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an abnormality detection mechanism for a rotary joint and a rotary valve body related to a fluid control mechanism used when exhaust or the like is performed in a manufacturing apparatus such as a lamp applicable to a liquid crystal display or illumination.

  As a conventional rotary joint, there is one that uses ceramic for a rotary valve body as described in Patent Document 1. FIG. 4 is a view showing a conventional rotary joint described in Patent Document 1. As shown in FIG.

  In FIG. 4, the moving valve body 101 and the fixed valve body 102 are formed in an annular shape with a ceramic material such as alumina or steatite, and are in sliding contact with each other through the lapped sliding surface 103 and sliding surface 104. . A hole 105 that engages with a pin 105A fixed to a turret (not shown) is provided on the opposite side of the sliding surface 103 of the moving valve body 101, and the moving valve body 101 rotates as the turret rotates. Is done. The moving valve body 101 and the fixed valve body 102 have a switching through hole 106 and a switching through hole 107 having one end opened on the sliding surfaces 103 and 104 and the other end opened on the outer periphery. Are provided at equal intervals on the concentric circles, and the vacuum evacuation and sealing process of the tube held on the peripheral edge of the moving valve body that rotates intermittently can be performed stepwise. Since ceramic is used for the valve body, the life of the valve body, which has a short life due to insufficient lubrication or damage to the sliding surface due to biting of glass fragments or the like, is increased.

  Moreover, there exist some which detect the rotational speed of a rotating shaft as described in patent document 2 as a conventional rotary joint. FIGS. 5A and 5B show a conventional rotary joint described in Patent Document 2. FIG.

5 (a) and 5 (b), the proximity switch 114 detects the concave portion 112 installed in the flange 111 and detects the rotational speed of the rotary shaft 113. When the proximity switch 114 uses, for example, magnetism, the metal is detected when a convex part other than the concave part 112 comes close, and the metal is not detected when the concave part 112 comes close. Therefore, the quadrant shown in FIG. The rotational speed can be detected from the timing at which the concave portion 112 arranged in the vicinity of the concave portion 112 approaches. Utilizing this fact, for example, when the rotational speed of the rotary shaft 113 decreases due to, for example, seizure of the dry bearing 115, the abnormality is detected.
Japanese Utility Model Publication No. 62-015963 Japanese Unexamined Patent Publication No. 63-195490

  However, the configuration described in Patent Document 1 has a problem that once an abnormality occurs, the damage is large and a great deal of cost and time is wasted for the repair.

  Further, since the configuration described in Patent Document 2 is a mechanism for detecting the rotational speed of the valve, the rotational speed is sufficient if the torque of the drive mechanism such as a motor is sufficiently large even if a slight abnormality occurs in the rotary valve body. However, there is a problem that a large-scale repair such as replacement of the entire rotary joint is required at the time of detecting the abnormality.

  The present invention is directed to solving the above-described problems of the prior art, and is capable of detecting a minute rotation abnormality by monitoring the rotational torque of the rotary valve body, and an abnormality detection mechanism for the rotary valve body. The purpose is to provide.

  In order to achieve the above object, a rotary joint according to claim 1 of the present invention is a pair of rotary valve bodies that are cylindrical and have a through hole for supplying or exhausting fluid on a concentric circumference and that perform relative rotation. And a pin that transmits driving force to the rotating moving valve body side of the pair of rotating valve bodies, a driving means that rotationally drives the moving valve body via the pins, and an abnormality detecting means that detects rotation abnormality It is characterized by.

  The rotary joint described in claims 2 and 3 is the rotary joint of claim 1, further comprising drive stop means connected to the abnormality detection means, and lubricating oil to be lubricated between the pair of rotary valve bodies. A plurality of lubrication mechanisms to be supplied and control means for controlling the lubrication amount of the lubricating oil are provided, and the control means is connected to the abnormality detection means.

  Further, the rotary joint described in claim 4 is the rotary joint according to claims 1 to 3, wherein the abnormality detection means includes strain measurement means, motor torque detection means, abnormal sound detection means, temperature measurement means, and iron oxide measurement means. It includes any one or more.

  Further, in the rotary joint according to claims 5 to 7, in the rotary joint according to claim 4, the strain measuring means uses a strain gauge, and the strain measuring means includes a side surface of the moving valve body, One of the upper surface and the side surface of the pin is measured for surface strain, and the strain measuring means measures strain in a direction perpendicular to the rotational direction of the moving valve body.

  An abnormality detection mechanism for a rotary valve element according to an eighth aspect of the present invention is an abnormality detection mechanism for detecting a rotation abnormality of a pair of rotary valve bodies that perform a relative rotation in a columnar shape, and includes a distortion measurement means, a motor torque detection means Any one or more of abnormal noise detection means, temperature measurement means, and iron oxide measurement means is used.

  The abnormality detection mechanism for a rotary valve body according to claim 9 is the abnormality detection mechanism according to claim 8, wherein the strain measurement means is a pin for transmitting driving force to the rotating valve body side of the pair of rotary valve bodies. Rotational abnormality is detected by measuring the distortion of the rotation.

  Further, the abnormality detection mechanism for a valve body according to claims 10 to 12 is the abnormality detection mechanism according to claim 9, wherein the strain measurement portion of the strain measurement means is on the surface of the pin along the transmission direction of the driving force. The strain measurement point of the strain measuring means is on the surface of the pin and is perpendicular to the rotation direction of the moving valve body. Any one of the upper surface and the side surface of the pin is measured for surface distortion.

  According to the said structure, a rotation abnormality can be detected in a slight damage by catching the slight abnormality of a rotary valve body.

  According to the present invention, there is an effect that it is possible to detect a slight abnormality occurring in the rotary valve body and detect the abnormality in a slight damage.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(Embodiment 1)
FIG. 1 is a cross-sectional view showing a rotary joint according to Embodiment 1 of the present invention. Here, components having the same functions corresponding to the components described in FIG. 4 showing the conventional example are given the same reference numerals, and redundant description thereof is omitted.

  In FIG. 1, a strain sensor 201 is a sensor (for example, using a strain gauge) that detects strain in the longitudinal direction (perpendicular to the rotation direction) of the pin 105 </ b> A, and is organically transmitted through the strain detector 202 and the cable 203. Relatedly, a strain detection mechanism (a strain detector 202, an alarm means 204) is configured. The moving valve body 101 transmits the driving force of the driving means (not shown) to the moving valve body 101 through the pin 105A. For example, when an abnormality such as seizure occurs on the sliding surface 103 and the sliding surface 104, A change occurs in the strain value appearing in the strain sensor 201, and rotation abnormality can be detected.

  The alarm means 204 can monitor the distortion via the distortion detector 202, detect an abnormality when the value of the distortion exceeds a threshold value, issue an alarm and prompt the operator to stop the operation, By transmitting an abnormal signal to a drive stop means (not shown), the drive means (not shown) that is rotationally driven can be stopped.

  According to such a configuration, the rotation torque change is monitored by detecting the distortion of the pin 105A, and the rotary joint abnormality caused mainly by the damage on the sliding surfaces 103 and 104 can be detected with high accuracy. Can do.

  2 (a) and 2 (b) show the waveform change of the monitored distortion when the rotary joint in Embodiment 1 is repeatedly intermittently operated, and the vertical axis shows the distortion. The horizontal axis represents time. Initially, a stable distortion waveform was shown as shown in FIG. 2 (a) during normal operation in which intermittent operation was performed with a rotary joint.

  However, when the supply of the lubricating oil was stopped and the intermittent operation was continued, an increase in the minimum value of the waveform occurred as shown in FIG. The timing at which the minimum value of this distortion waveform is observed is the stop timing in intermittent operation, but since the distortion at this point has increased, the distortion at the measurement location has not been released even when stopped. It shows that. That is, it is considered that a load is generated on the sliding surfaces 103 and 104 of the rotary valve body 100 and that the pin 105 </ b> A between the driving means that rotates and the moving valve body 101 is twisted.

  2B, after confirming the surfaces of the sliding surfaces 103 and 104 of the rotary valve body 100, slight discoloration and scratches that are considered burn-in are found, and the burn-in and distortion to the scratches are found. The effectiveness of detection was confirmed.

  As a method for detecting an abnormality from the waveform shown in FIG. 2 (b), there are a method using a peak hold value for every fixed time, a method using a minimum value for every fixed time, a method for combining these, and the like. It can be implemented in correspondence with the phenomenon. In FIG. 2B, the minimum value fluctuates, and monitoring of the minimum value within a certain period is effective.

  Further, the mounting position of the strain sensor 201 described above is preferably on the surface of the pin 105A for detection of a phenomenon that causes the twist of the pin 105A as in the first embodiment, but the other position of the moving valve body 101 is not limited. In some cases, it is possible to detect a defect with higher sensitivity when it is attached to the side surface or the upper surface of the moving valve body 101, and the same effect can be obtained even if it is attached at any location depending on the application.

  In the first embodiment described above, the moving valve body 101 is described as being made of metal such as steel, but it goes without saying that the same effect can be obtained even if ceramic is used as in the conventional example. In the first embodiment, the case where the detection of the distortion is used as the rotation abnormality detection unit is described. However, the unit for detecting the motor torque for driving the rotation unit, the unit for detecting the abnormal noise on the sliding surface, It goes without saying that the same abnormality detection can be performed by means for measuring the temperature of the rotary valve body, means for measuring iron oxide contained in the exhaust gas, and the like.

(Embodiment 2)
3A and 3B are cross-sectional views showing a rotary joint according to Embodiment 2 of the present invention. Further, components having the same functions corresponding to the components described in FIG. 1 showing the first embodiment and FIG. 4 showing the conventional example are denoted by the same reference numerals, and redundant description thereof is omitted. To do.

  In FIG. 3B, the strain sensor 301 is the same as the strain sensor 201, but is installed so as to sandwich the pin 105 </ b> A in the radial direction of the rotary valve body 100. In this way, by performing distortion detection on both sides of the pin 105A and comparing the waveforms, the cause of the rotation abnormality occurs on the inner peripheral side in the cross section of the moving valve body 101 shown in FIG. It is possible to detect whether it is occurring on the outer peripheral side. For example, when damage occurs on the outer peripheral side from the pin 105A, a large distortion on the inner peripheral side is observed, and from this result, the lubricating means 305b is selected by the control means (not shown) and additional lubricating is performed. Thus, the lack of lubricating oil can be resolved.

  Furthermore, in this Embodiment 2, the continuous operation time of an installation can be extended by determining whether the preset threshold value was reached with respect to the distortion detected continuously. For example, by setting the lubrication start level to 50 units and the lubrication stop level to 40 units in advance with respect to the strain capture value obtained from the strain detector, the capture value can be determined by monitoring the capture value. Lubricating starts when it reaches 50 units, and if lubrication is stopped when the intake value is reduced to 40 units or less by lubrication, rotation abnormality due to insufficient lubrication can be solved without stopping the equipment. Can do.

  Furthermore, if the stop level is set to 60 units in advance, the equipment can be maintained with low damage even when the rotation abnormality is not solved by lubrication. Such a type of rotation abnormality is likely to occur in equipment in which operating conditions are frequently changed, and the second embodiment is very effective.

  In the second embodiment described above, the case where the lubrication mechanism is attached only at two locations, the inner circumference and the outer circumference, has been described. However, the lubrication mechanism is located at a position that is divided into two equal parts or four equal parts in the circumferential direction. Needless to say, the same effect can be obtained when added.

  The abnormality detection mechanism for a rotary joint and a rotary valve body according to the present invention can detect an abnormality occurring in a minute rotary valve body and detect the abnormality in slight damage, and is used when exhausting a manufacturing apparatus or the like. The present invention can also be applied to a fluid control mechanism and a driving force transmission mechanism such as an internal combustion engine.

Sectional drawing which shows the rotary joint in Embodiment 1 of this invention. (A) of the distortion waveform in the first embodiment is a stable state, and (b) is a waveform diagram showing an abnormal state. (A) which shows the rotary joint in Embodiment 2 of this invention is sectional drawing, (b) is a top view. Diagram showing a conventional rotary joint (A) which shows the conventional rotary joint, sectional drawing, (b) is a front sectional view of the vicinity of the buttock

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Rotating valve body 101 Moving valve body 102 Fixed valve body 103,104 Sliding surface 105A Pin 105 Hole 106,107 Switching through hole 111 Gutter 112 Recess 113 Rotating shaft 114 Proximity switch 115 Dry bearing 116 Lead wire 201,301 Distortion Sensor 202, 302 Strain detector 203, 303 Cable 204, 304 Alarm means

Claims (12)

  A pair of rotary valve bodies that are cylindrical and have a through-hole for supplying or exhausting fluid on a concentric circumference, and that perform relative rotation; and a pin that transmits driving force to the rotating valve body side of the pair of rotary valve bodies; A rotary joint comprising drive means for rotationally driving the movable valve body via the pin and abnormality detection means for detecting a rotation abnormality.   The rotary joint according to claim 1, further comprising a drive stop unit connected to the abnormality detection unit.   A plurality of oil supply mechanisms for supplying lubricating oil to be lubricated between the pair of rotary valve bodies; and a control means for controlling the amount of oil to be supplied, wherein the control means is connected to the abnormality detecting means. The rotary joint according to claim 1.   The abnormality detection means includes at least one of strain measurement means, motor torque detection means, abnormal sound detection means, temperature measurement means, and iron oxide measurement means. The rotary joint according to item 1.   The rotary joint according to claim 4, wherein the strain measuring means uses a strain gauge.   5. The rotary joint according to claim 4, wherein the strain measuring unit measures a surface strain of any one of a side surface of the moving valve body, an upper surface of the moving valve body, and a side surface of the pin.   The rotary joint according to claim 4, wherein the strain measuring means measures strain in a direction perpendicular to a rotation direction of the moving valve body.   An abnormality detection mechanism for detecting a rotation abnormality of a pair of rotary valve bodies that perform relative rotation in a columnar shape, any one of strain measurement means, motor torque detection means, abnormal noise detection means, temperature measurement means, and iron oxide measurement means An abnormality detection mechanism for a rotary valve body, characterized by using at least one of them.   9. The rotary valve body according to claim 8, wherein the distortion measuring means detects a rotation abnormality by measuring a distortion of a pin transmitting a driving force to a rotating moving valve body side of a pair of rotary valve bodies. Anomaly detection mechanism.   10. The abnormality detecting mechanism for a rotary valve body according to claim 9, wherein the strain measuring portion of the strain measuring means is on the surface of the pin along the transmission direction of the driving force.   10. The abnormality detection mechanism for a rotary valve body according to claim 9, wherein the strain measurement portion of the strain measurement means is on the surface of the pin and is perpendicular to the rotation direction of the movable valve body.   10. The rotary valve body according to claim 9, wherein the strain measuring unit measures a surface strain of any one of a side surface of the moving valve body, an upper surface of the moving valve body, and a side surface of the pin. Anomaly detection mechanism.

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