JP2008284441A - Liquid agent dripping device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid agent dripping device wherein the precision of the dripping amount of a liquid agent can be raised. <P>SOLUTION: A syringe 24 is placed to allow a plunger 31 to be horizontally reciprocated, and a liquid crystal is fed into the syringe 24 and discharged from a nozzle 70 by horizontally reciprocating the plunger 31. The plunger 31 is reciprocated by a linear motor 80. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a liquid agent dropping device.

Conventionally, by operating the plunger by controlling the opening and closing of the suction side valve provided between the buffer storing the liquid agent such as liquid crystal and the syringe and the discharge side valve provided between the syringe and the nozzle, There is a liquid agent dropping device that supplies a liquid agent into a syringe and drops a liquid agent stored in the syringe (for example, Patent Document 1). In general, in such a liquid agent dropping device, a plunger is operated by a ball screw driving device that rotates a ball screw by a motor and moves a member to be moved to be engaged with the ball screw to an arbitrary position.
JP 2005-125186 A

  By the way, in the ball screw driving device, due to the low processing accuracy of the ball screw, the positioning accuracy of the moved member, that is, the operation accuracy of the plunger is insufficient for the target operation accuracy, and the dripping of the liquid agent There was a problem that it was difficult to improve the accuracy of the quantity.

  This invention is made | formed in view of such a situation, The objective is to provide the liquid agent dripping apparatus which can aim at the precision improvement of the dripping amount of a liquid agent.

  In order to solve the above-mentioned problem, the invention according to claim 1 is directed to a syringe for storing a liquid agent, a plunger supported by the syringe so as to be movable, and a reciprocating movement of the plunger to dispose the liquid agent in the syringe. A first actuator for inhaling and discharging; a suction side valve for opening and closing a supply channel for supplying the liquid agent from a storage source to the syringe; and a discharge side for opening and closing a discharge channel for supplying the liquid agent from the syringe to the nozzle A syringe, the syringe is arranged so that the plunger reciprocates along a horizontal direction, and the first actuator reciprocates the plunger along a horizontal direction. It is a linear motor.

  According to this configuration, the syringe is arranged so that the plunger reciprocates along the horizontal direction, and the supply of the liquid crystal into the syringe and the liquid crystal from the nozzle by the plunger reciprocating along the horizontal direction. Discharging is performed. The plunger is reciprocated by a linear motor. In this way, when the plunger is reciprocated in the horizontal direction, unlike the case where the plunger is reciprocated in the vertical direction, the plunger cannot be pushed down by its own weight, so that the plunger can be driven by a linear motor. When the plunger is driven by a linear motor, the positioning accuracy of the plunger is not affected by the processing accuracy of the ball screw. Therefore, the positioning accuracy of the plunger, that is, the operation accuracy of the plunger is improved, and the accuracy of the dripping amount of the liquid agent is improved.

  According to a second aspect of the present invention, there is provided the liquid agent dropping device according to the first aspect, wherein the discharge side valve includes a syringe block having a syringe flow path communicating with the liquid agent storage space of the syringe, and a nozzle that discharges the liquid agent. A nozzle block having a nozzle channel communicating with the discharge port, a through hole is formed, an open position where the through hole communicates the syringe channel and the nozzle channel, and the through hole serves as the syringe flow And a slide member that reciprocates between a path and a closed position that does not communicate with the nozzle flow path. According to this configuration, the discharge-side valve that controls the discharge of the liquid agent from the syringe is opened and closed as the slide member reciprocates between the open position and the closed position. Therefore, compared with the case where a flexible tube is used for the flow path between the syringe and the nozzle, and the liquid agent is discharged by a pinch valve that opens and closes the flow path by sandwiching or releasing the tube. The pressure applied to the liquid agent is not easily dispersed, and the accuracy of the dripping amount of the liquid agent is improved.

  According to a third aspect of the present invention, in the liquid agent dropping device according to the second aspect, the slide member extends along a reciprocating direction, and the syringe flow is set when the slide member is disposed at the closed position. A concave portion communicating with the passage is formed, and an external flow path communicating the concave portion and the storage source is formed in the syringe block, whereby the discharge side valve and the suction side valve are integrally formed. According to this configuration, the syringe flow path and the external flow path are communicated with each other through the concave portion, so that the liquid agent can be supplied, and the syringe flow path and the nozzle flow path are communicated with each other through the through-hole, thereby enabling the liquid agent to be discharged. Therefore, compared with the case where the supply and discharge of the liquid agent are controlled by a pinch valve, the pressure applied to the liquid agent is hardly dispersed in the flow path between the syringe and the storage source and the flow path between the syringe and the nozzle. The accuracy of the amount of dripping can be improved.

  According to a fourth aspect of the present invention, in the liquid agent dropping device according to any one of the first to third aspects, the linear motor is provided on a motor mounting surface of a base along a vertical direction. According to this configuration, since the linear motor is provided on the motor mounting surface of the base along the vertical direction, the linear motor is disposed between the base and the syringe as in the case where the linear motor is provided on the base fixed along the horizontal direction. It is not necessary to secure a space for installing the linear motor. Therefore, it is possible to project the nozzle tip further downward compared to the case where the linear motor is provided on the base fixed in the horizontal direction without increasing the distance from the liquid agent storage space of the syringe to the nozzle tip. Therefore, when the liquid agent dropping device is provided above the substrate conveyance path, the distance between the nozzle tip and the substrate can be easily shortened.

  The invention according to claim 5 is the liquid dropping apparatus according to claim 3 or 4, wherein the second actuator that slides the slide member between the syringe and the nozzle, and the liquid agent in the syringe. In the case of supplying the syringe flow path and the external flow path, the linear motor is driven to retreat the plunger, and when the liquid agent is discharged from the nozzle, the syringe flow path and And a control device that drives the linear motor and advances the plunger in a state of communicating with the nozzle flow path. According to this configuration, the liquid agent is automatically supplied and dropped by the control device.

  ADVANTAGE OF THE INVENTION According to this invention, the liquid agent dripping apparatus which can aim at the precision improvement of the dripping amount of a liquid agent can be provided.

Hereinafter, an embodiment in which the present invention is embodied in a liquid crystal dropping device will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram of a liquid crystal dropping device 10. The liquid crystal dropping device 10 is used in a step of dropping liquid crystal on a substrate constituting the liquid crystal display panel in the manufacturing process of the liquid crystal display panel. The liquid crystal dropping device 10 is provided so as to be positioned above the transport path through which the substrate is transported, and drops liquid crystal onto the substrate that passes under the liquid crystal dropping device 10.

  The base 11 of the liquid crystal dropping device 10 is formed in a substantially rectangular plate shape, and is fixed along a horizontal direction with respect to a support base (not shown) provided near the transport path. On the base 11, a dispenser 20 and a linear motor 80 as a first actuator are fixed. A tank (not shown) is connected to the buffer 21 as a storage source of the dispenser 20, and liquid crystal is supplied from the tank to the internal space 22 of the buffer 21. A syringe 24 is connected to the buffer 21 via a tube 23, and the liquid crystal in the buffer 21 is supplied to the syringe 24. Between the tube 23 and the syringe 24, a slide valve 40 as an intake side valve and a discharge side valve is provided on the base 11. Both ends of the tube 23 are connected to the buffer 21 and the slide valve 40 via joints 25a and 25b, respectively.

  The proximal end portion 26 of the syringe 24 is formed in a hollow substantially cylindrical shape. At the distal end of the proximal end portion 26 (left side in FIG. 1), a distal end portion 27 formed in a hollow substantially cylindrical shape is fitted on the proximal end portion 26 coaxially. The internal space of the base end portion 26 and the tip end portion 27 forms a liquid agent storage space 28 for storing liquid crystal. And as for the syringe 24, the base end part 26 is fitted by the slide valve 40, and the axis line of the syringe 24 is being fixed along the horizontal direction.

  The syringe 24 has a step portion 29 formed at the tip of the tip portion 27 and an opening 30 formed at the center of the step portion 29. And the plunger 31 formed in the column shape via the opening 30 is inserted in the liquid agent storage space 28 of the syringe 24 so that it can reciprocate along an axial direction, ie, a horizontal direction. The outer diameter of the plunger 31 is formed to be substantially the same as the inner diameter of the base end portion 26. By interposing a sealing material 32 (for example, Variseal (registered trademark)) and a spacer 33 between the tip portion 27 and the plunger 31, the liquid crystal is prevented from overflowing from the tip portion 27. Further, a linear motor 80 fixed on the base 11 is connected to the grip portion 34 of the plunger 31.

  A nozzle 70 is connected to the lower end of the slide valve 40. The nozzle 70 is formed in a hollow, substantially cylindrical shape, and a discharge port 71 for discharging liquid crystal is formed at the lower end of the nozzle 70. The nozzle 70 is provided so that the discharge port 71 protrudes below the base 11 from the opening 12 formed in the base 11.

  The slide valve 40 includes a syringe block 41 to which the proximal end portion 26 is fitted, a nozzle block 42 fixed to the lower end of the syringe block 41, and a slide member 43 inserted between the syringe block 41 and the nozzle block 42. It consists of. The slide valve 40 reciprocates along the longitudinal direction (left-right direction in FIG. 1), so that the liquid crystal is supplied into the syringe 24 (liquid agent storage space 28) and the liquid crystal is discharged from the nozzle 70. Switch alternately. The slide member 43 is formed of a highly rigid member (for example, stainless steel). In the present embodiment, the slide valve 40 is provided on the base 11 via the alignment member 44, thereby securing a space for providing the linear motor 80 between the syringe 24 and the base 11.

  The syringe block 41 has an external flow path 45 communicating with the internal space 22 in the buffer 21 via the tube 23, and a syringe flow path 46 communicating with the liquid agent storage space 28 formed in the syringe 24. Is formed. In the nozzle block 42, a nozzle channel 47 communicating with the discharge port 71 of the nozzle 70 is formed. As shown in FIG. 2, a groove 49 along the longitudinal direction is formed at the center of the joint surface 48 of the syringe block 41 with the nozzle block 42. At the center of the joint surface 50 of the nozzle block 42 with the syringe block 41, a protrusion 51 having a length in the short direction (left-right direction in FIG. 2) that is substantially the same as the groove 49 is formed at a position facing the groove 49. ing. The height (depth) from the joint surface 48 of the syringe block 41 to the bottom surface 52 of the groove 49 is formed higher than the height from the joint surface 50 of the nozzle block 42 to the upper surface 53 of the protrusion 51.

  As shown in FIG. 3, the slide member 43 is formed in a substantially rectangular parallelepiped shape, and a through hole 54 is formed in the slide member 43 along the vertical direction. The through hole 54 is formed substantially at the center in the short direction of the slide member 43 and communicates the syringe channel 46 and the nozzle channel 47. The through hole 54 is formed to have substantially the same diameter as the syringe channel 46 and the nozzle channel 47. The contact surface 55 with the bottom surface 52 and the contact surface 56 with the top surface 53 of the slide member 43 are provided with first O-rings 57a and 57b as first seal members surrounding the through hole 54, respectively. . Further, the contact surface 55 is formed with a recess 58 at a position shifted from the through hole 54 along the longitudinal direction. The recess 58 is formed in a substantially elliptical shape along the longitudinal direction, and communicates the external channel 45 and the syringe channel 46. A second O-ring 59 is provided as a second seal member so as to surround the recess 58. Further, the contact surface 56 is formed with a closed portion 60 at a position corresponding to the end portion of the concave portion 58 on the longitudinal direction through hole 54 side, and surrounds the closed portion 60 to form a third seal member as a third seal member. Three O-rings 61 are provided. The syringe flow path 46, the nozzle flow path 47, and the through hole 54 constitute a discharge flow path, and the external flow path 45, the syringe flow path 46, and the recess 58 constitute a supply flow path.

  Then, the slide member 43 is inserted between the groove 49 and the protrusion 51 in a state where the syringe block 41 and the nozzle block 42 are assembled to each other. Therefore, the joining surfaces 48 and 50 of the syringe block 41 and the nozzle block 42 and the contact surfaces 55 and 56 of the syringe block 41 and the nozzle block 42 and the slide member 43 are configured not to be on the same plane.

  Further, as shown in FIG. 1, a handle portion 62 is screwed to the slide member 43, and a second actuator 91 (for example, a ball screw driving device) is connected to the handle portion 62. The slide member 43 reciprocates along the longitudinal direction when the second actuator 91 is driven. As shown in FIG. 4A, the slide valve 40 allows the liquid crystal to be supplied into the syringe 24 by connecting the syringe channel 46 and the external channel 45 through the recess 58. In this state, the nozzle channel 47 is blocked when the blocking portion 60 is located. As described above, the syringe channel 46 and the nozzle channel 47 are not communicated with each other through the through hole 54, and the position where the external channel 45 and the syringe channel 46 are communicated is the closed position of the slide member 43. Further, as shown in FIG. 4B, the slide valve 40 is configured such that the syringe channel 46 and the nozzle channel 47 communicate with each other through the through-hole 54, so that the liquid crystal stored in the liquid agent storage space 28 is nozzleed. It becomes possible to discharge from 70. Thus, the position where the syringe channel 46 and the nozzle channel 47 communicate with each other through the through hole 54 is the open position of the slide member 43.

  The liquid crystal dropping device 10 includes a control device 90, and the control device 90 is connected to the linear motor 80 and the second actuator 91. The linear motor 80 reciprocates the plunger 31 along the horizontal direction in response to a signal from the control device 90. In this embodiment, the linear motor 80 is a permanent magnet movable linear motor in which a permanent magnet is provided on the mover side. The linear motor 80 includes a stator 81 fixed on the base 11 and a mover 82 provided on the stator 81 so as to be movable along the longitudinal direction. On the inner surface of the stator 81, a coil (not shown) is wound around a plurality of magnetic pole teeth (not shown) formed along the longitudinal direction. In addition, the mover 82 is provided with permanent magnets (not shown) that are alternately arranged to have different polarities so as to face the coil, and a bracket 83 is fixed. The holding portion 34 of the plunger 31 is fixed to the bracket 83 by an attachment member 84. Then, the control device 90 supplies a drive current to the coil to generate a thrust in the longitudinal direction of the movable element 82, and the movable element 82 moves along the longitudinal direction, so that the plunger 31 moves along the horizontal direction. It is designed to reciprocate. The second actuator 91 is connected to the slide valve 40 and reciprocates the slide member 43 by a signal from the control device 90.

Next, the operation in which the liquid crystal dropping device 10 drops liquid crystal will be described.
As shown in FIG. 4A, the control device 90 drives the second actuator 91 to move the slide member 43, and the external flow path 45 and the syringe flow path 46 are communicated with each other by the recess 58. The linear motor 80 is driven to move the plunger 31 backward (move toward the distal end portion 27 side of the syringe 24). As the plunger 31 moves backward, the inside of the liquid agent storage space 28 becomes negative pressure, so that the liquid crystal stored in the buffer 21 passes through the tube 23, the external flow path 45, the recess 58, and the syringe flow path 46. To be supplied. In this state, since the second O-ring 59 surrounds the recess 58 and seals between the syringe block 41 and the slide member 43, even if the liquid agent storage space 28 becomes negative pressure, air bubbles are generated from the outside. Mixing is prevented. Further, since the third O-ring 61 surrounds the closing portion 60 that closes the nozzle flow path 47 and seals between the slide member 43 and the nozzle block 42, the liquid agent storage space 28 becomes negative pressure. In addition, bubbles are prevented from entering the through hole 54 from the tip of the nozzle 70 and entering the liquid agent storage space 28.

  Next, as shown in FIG. 4B, the control device 90 drives the second actuator 91 to move the slide member 43, and the syringe channel 46 and the nozzle channel 47 are communicated with each other through the through hole 54. In this state, the linear motor 80 is driven to move the plunger 31 forward (move toward the proximal end portion 26 of the syringe 24). As the plunger 31 moves forward, pressure is applied to the liquid crystal in the liquid agent storage space 28, and the liquid crystal is discharged from the discharge port 71 of the nozzle 70.

  As described above, when the plunger 31 is reciprocated in the horizontal direction, unlike the case where the plunger is reciprocated in the vertical direction, the plunger 31 does not move downward due to its own weight, so that the linear motor 80 can drive the plunger 31. It becomes. When the plunger 31 is driven by the linear motor 80, the positioning accuracy of the plunger 31 is not affected by the processing accuracy of the ball screw. Therefore, the positioning accuracy of the plunger 31, that is, the operation accuracy of the plunger 31, is improved, and the accuracy of the liquid crystal dropping amount is improved.

  The slide valve 40 communicates the external flow path 45 and the syringe flow path 46 with the recess 58 to enable supply of the liquid agent, and communicates the syringe flow path 46 and the nozzle flow path 47 with the through hole 54 to discharge the liquid agent. Enable. Therefore, compared to the case where a flexible tube is used and the flow path is opened and closed by releasing the clamping of the tube, the flow path between the buffer 21 and the syringe 24 and between the syringe 24 and the nozzle 70 are reduced. In this flow path, the pressure applied to the liquid crystal is difficult to disperse, and the accuracy of the dropping amount of the liquid crystal can be improved. Furthermore, since the slide member 43 is formed of a highly rigid member, the through hole 54 is not easily spread outward in the radial direction even when pressure is applied to the liquid crystal, and the pressure applied to the liquid crystal is dispersed. Is suppressed.

  Further, since the first O-rings 57a and 57b surround the through hole 54 and seal between the syringe block 41 and the slide member 43 and between the slide member 43 and the nozzle block 42, when the liquid crystal is dropped. The liquid crystal is prevented from leaking between the syringe block 41 and the slide member 43 and between the slide member 43 and the nozzle block 42.

  Furthermore, the joint surfaces 48 and 50 of the syringe block 41 and the nozzle block 42 and the contact surfaces 55 and 56 of the syringe block 41 and the nozzle block 42 and the slide member 43 are configured not to be on the same plane. Therefore, even if the liquid crystal leaks from the first O-rings 57 a and 57 b or the second O-ring 59, it is difficult to leak to the outside of the slide valve 40.

As described above, according to the present embodiment, the following effects can be obtained.
(1) The syringe 24 is arranged so that the plunger 31 reciprocates along the horizontal direction, and the plunger 31 is reciprocated along the horizontal direction to supply liquid crystal into the syringe 24 and from the nozzle 70. Liquid crystal was discharged. The plunger 31 is reciprocated by the linear motor 80. In this way, when the plunger 31 is reciprocated in the horizontal direction, unlike the case where the plunger is reciprocated in the vertical direction, the plunger 31 does not move downward due to its own weight, so that the plunger 31 can be driven by the linear motor 80. Become. When the plunger 31 is driven by the linear motor 80, the positioning accuracy of the plunger 31 is not affected by the processing accuracy of the ball screw. Accordingly, the positioning accuracy of the plunger 31, that is, the operation accuracy of the plunger 31, is improved, and the accuracy of the liquid crystal dropping amount can be improved.

  (2) The slide valve 40 communicates the external flow path 45 and the syringe flow path 46 with the recess 58 to enable supply of the liquid agent, and communicates the syringe flow path 46 and the nozzle flow path 47 with the through hole 54. Enables liquid dispensing. Therefore, compared to the case where a flexible tube is used and the flow path is opened and closed by releasing the clamping of the tube, the flow path between the buffer 21 and the syringe 24 and between the syringe 24 and the nozzle 70 are reduced. In this flow path, it is difficult to disperse the pressure applied to the liquid agent, and it is possible to improve the accuracy of the dropping amount of the liquid agent.

  (3) Since the first O-rings 57a and 57b surround the through hole 54 and seal between the syringe block 41 and the slide member 43 and between the slide member 43 and the nozzle block 42, the liquid crystal is dropped. Sometimes, the liquid crystal is prevented from leaking between the syringe block 41 and the slide member 43 and between the slide member 43 and the nozzle block 42. Therefore, the pressure drop due to the liquid crystal leaking is suppressed, and the accuracy of the dripping amount of the liquid agent can be improved.

  (4) Since the second O-ring 59 surrounds the recess 58 and seals between the syringe block 41 and the slide member 43, even if the liquid agent storage space 28 becomes negative pressure, air bubbles are mixed in from the outside. Can be prevented.

  (5) Since the third O-ring 61 surrounds the closing portion 60 that closes the nozzle flow path 47 and seals between the slide member 43 and the nozzle block 42, the liquid agent storage space 28 becomes negative pressure. However, it is possible to prevent air bubbles from entering the liquid agent storage space 28 from the tip of the nozzle 70 into the through hole 54.

  (6) The joining surfaces 48 and 50 of the syringe block 41 and the nozzle block 42 and the contact surfaces 55 and 56 of the syringe block 41 and the nozzle block 42 and the slide member 43 are configured not to be on the same plane. Therefore, even if the liquid crystal leaks from the first O-rings 57a and 57b, it is difficult to leak to the outside of the slide valve 40. Therefore, the pressure drop due to the liquid crystal leaking out of the slide valve 40 is suppressed, and the accuracy of the amount of dripping liquid can be improved.

  (7) Since the slide member 43 is formed of a highly rigid member, even if pressure is applied to the liquid crystal, the through hole 54 is not easily spread outward in the radial direction, and the pressure applied to the liquid crystal is dispersed. Is suppressed, and the accuracy of the dripping amount of the liquid agent can be improved.

In addition, you may implement this embodiment in the following aspects.
-In this embodiment, although the linear motor 80 was provided on the base 11 fixed horizontally and the plunger 31 was driven, it is not restricted to this. For example, as shown in FIG. 5A, a linear motor 80 and a substantially L-shaped valve support member 103 are provided on the motor mounting surface 102 along the vertical direction of the base 101 fixed along the vertical direction. The slide valve 40 may be fixed on the valve support member 103. By doing so, it is not necessary to provide the slide valve 40 via the alignment member 44 in order to secure a space for providing the linear motor 80 between the base 11 and the syringe 24. Therefore, compared to the case where the linear motor 80 is provided on the base 11 (see FIG. 2), the tip of the nozzle 70 is moved without changing the distance from the liquid agent storage space 28 to the tip of the nozzle 70 as shown in FIG. Compared with the case where a linear motor is provided on the base 11, the base 11 can be protruded further downward. Therefore, when the liquid crystal dropping device 10 is provided above the substrate transport path, the distance between the tip of the nozzle 70 and the substrate can be easily shortened.

  In the present embodiment, the through hole 54, the recessed portion 58, and the closing portion 60 of the slide member 43 are surrounded by the first O rings 57a and 57b, the second O ring 59, and the third O ring 61, respectively. Although the space between the syringe block 41 and the slide member 43 and the space between the slide member 43 and the nozzle block 42 are sealed, the present invention is not limited to this. For example, at least one of the first O-rings 57a and 57b, the second O-ring 59, and the third O-ring 61 may be provided. Furthermore, when the gap between the syringe block 41 and the slide member 43 and between the slide member 43 and the nozzle block 42 is sufficiently small, the O-ring need not be provided.

  In the present embodiment, the suction side valve and the discharge side valve are integrally formed by the slide valve 40. However, the present invention is not limited to this, and the discharge side valve and the suction side valve may be formed separately. Further, the discharge side valve may be formed by a slide valve including a syringe block having a syringe flow path 46, a nozzle block 42 having a nozzle flow path 47, and a slide member having a through hole 54 and a closing portion 60. Good.

  In this embodiment, the linear motor 80 uses a permanent magnet movable linear motor in which a permanent magnet is provided on the mover side. However, the present invention is not limited to this, and a coil movable type in which a permanent magnet is provided on the stator side. A linear motor may be used.

  In this embodiment, the O-ring is used as the seal member. However, the present invention is not limited to this, and any seal member can be used as long as the liquid crystal can be prevented from leaking out through the slide valve 40 and air bubbles can be prevented from entering. Also good.

-In this embodiment, although the slide member 43 was formed with stainless steel, you may form not only this but with another highly rigid member.
In the present embodiment, the ball screw driving device is used as the second actuator 91. However, any actuator may be used, for example, a linear motor may be used.

  In this embodiment, the groove 49 is formed in the syringe block 41 and the protrusion 51 is formed in the nozzle block 42. However, the present invention is not limited thereto, and the protrusion is formed in the syringe block 41 and the groove is formed in the nozzle block 42. Also good. Further, grooves may be formed in the syringe block 41 and the nozzle block 42.

  -In this embodiment, although the syringe flow path 46 and the liquid agent storage space 28 were directly connected, it is not restricted to this, Between the syringe 24 and the syringe block 41 via the pipe etc. which were formed with the highly rigid member You may make it communicate indirectly. Similarly, the nozzle channel 47 and the nozzle 70 may be indirectly communicated with each other via a pipe or the like formed of a highly rigid member between the nozzle block 42 and the discharge port 71.

  -In this embodiment, although the syringe block 41 and the nozzle block 42 were each formed from a separate member, it is not restricted to this, You may integrally form the syringe block 41 and the nozzle block 42 from one member.

  In the present embodiment, the liquid crystal dropping device 10 that drops liquid crystal is embodied, but a liquid agent other than liquid crystal may be dropped, for example, an apparatus that drops adhesive or solder paste may be realized.

The schematic block diagram of a liquid crystal dropping apparatus. The partial front view of a liquid crystal dropping device. The top view of a slide member. (A), (b) Operation | movement explanatory drawing of a slide valve. (A) Side sectional view of another liquid crystal dropping device, (b) Partial front view of another liquid crystal dropping device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11,101 ... Base, 20 ... Dispenser, 21 ... Buffer, 24 ... Syringe, 28 ... Liquid agent storage space, 31 ... Plunger, 40 ... Slide valve, 41 ... Syringe block, 42 ... Nozzle block, 43 ... Slide member, 45 ... External flow path, 46 ... syringe flow path, 47 ... nozzle flow path, 54 ... through hole, 58 ... recess, 70 ... nozzle, 71 ... discharge port, 80 ... linear motor, 90 ... control device, 91 ... second actuator 102: Motor mounting surface.

Claims (5)

A syringe for storing the liquid agent;
A plunger movably supported by the syringe;
A first actuator that reciprocates the plunger and sucks and discharges the liquid into the syringe;
A suction side valve for opening and closing a supply flow path for supplying the liquid agent from a storage source to the syringe;
A discharge-side valve that opens and closes a discharge passage for supplying the liquid agent from the syringe to the nozzle;
A liquid dropping device comprising:
The syringe is arranged so that the plunger reciprocates along a horizontal direction,
The liquid agent dropping device, wherein the first actuator is a linear motor that reciprocates the plunger along a horizontal direction. The discharge side valve is
A syringe block having a syringe channel communicating with the liquid agent storage space of the syringe;
A nozzle block having a nozzle channel communicating with a discharge port of a nozzle that discharges the liquid agent;
A through-hole is formed, and an open position where the through-hole communicates the syringe flow path and the nozzle flow path, and a closed position where the through-hole does not communicate the syringe flow path and the nozzle flow path The liquid agent dripping device according to claim 1, further comprising a slide member that reciprocates between the two. The slide member extends along a reciprocating direction, and the slide member is formed with a recess communicating with the syringe flow path when arranged at the closed position.
The discharge side valve and the suction side valve are integrally formed in the syringe block by forming an external flow path that communicates the recess and the storage source. Liquid agent dripping device.   The said linear motor is provided in the motor mounting surface of the base along a perpendicular direction, The liquid dripping apparatus as described in any one of Claims 1-3 characterized by the above-mentioned. A second actuator for sliding the slide member between the syringe and the nozzle;
When supplying a liquid agent into the syringe, when the linear motor is driven in a state where the syringe flow path and the external flow path are communicated to retract the plunger, and the liquid agent is discharged from the nozzle The liquid agent dripping device according to claim 3, further comprising: a control device that drives the linear motor in a state where the syringe flow channel and the nozzle flow channel communicate with each other to advance the plunger. .

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