JP2008267989A - Holding device and measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a holding device for easily holding a measuring device with a simple constitution. <P>SOLUTION: The holding device 200 for holding a detecting head into a predetermined position of a main scale in a linear scale including the main scale and the detecting head movably provided at the main scale and having a detecting means for detecting the moving amount with respect to the main scale, has a holding body 210 having a main abutting surface 210B abutting on a head facing surface 113; claw parts 212 extending along the head facing surface 113 from the holding body 210 and inserted between the main scale and the detecting head; a piece part 220 inserted through a head moving groove 114 from the holding body 210 and having a piece engaging part 222 engaged with the head moving groove 114; and a holding-moving screw 230 for moving the piece part 220 to engage the piece engaging part 222 with the head moving groove 114. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a holding device that positions a head portion with respect to a main scale and a measuring device in a measuring device in which the head portion can move with respect to a main scale.

  2. Description of the Related Art Conventionally, a measuring apparatus that moves a head unit relative to a main scale, detects a measurement scale provided on the main scale with a detection unit provided on the head unit, and measures the amount of movement is known. In such a measuring apparatus, it is necessary to install the measuring apparatus in a state where a predetermined clearance is provided between the main scale and the head unit when the measuring apparatus is installed on the object to be measured. In order to provide such a clearance, a holding device having a configuration as shown in FIG. 9 has been conventionally used.

  That is, in FIG. 9, the measuring apparatus 900 includes a longitudinal main scale 910 and a head portion 920 that can move along the longitudinal direction of the main scale 910. The main scale 910 includes a flat surface 911 that faces the head portion 920, and a guide groove 912 that guides the movement of the head portion 920 along the longitudinal direction of the flat surface 911 is formed. In such a measuring apparatus 900, it is necessary to provide a predetermined clearance when the main scale 910 is fixed to a main scale mounting surface (not shown) and the head portion 920 is fixed to the head fixing surface. Use to ensure this clearance. The holding member 800 includes a holding main body 810 that comes into contact with the flat surface 911 of the main scale 910 and a claw portion 820 that extends along the flat surface of the holding main body 810. The holding member 800 is inserted in the claw portion 820 between the main scale 910 and the head portion 920 with the head portion 920 and the main scale 910 being positioned at a substantially central position in the longitudinal direction. It is fixed to the main scale by stopping.

As a method for fixing the head portion to the main scale, for example, a configuration shown in Patent Document 1 is also known.
The device described in Patent Document 1 is a measuring device that includes a support, a scanning device, and a holding device, and the holding device holds the scanning device on the support within a predetermined target position. In this measuring apparatus, the support is provided with a hollow molded body extending in the longitudinal direction, a measurement scale is disposed along the longitudinal direction in the hollow chamber of the hollow molded body, and scanning is slidable along the measurement scale. A device is provided. A holding device is coupled to the scanning device. In this holding device, an extension portion extending along the longitudinal direction of the hollow molded body is provided on one end side, and a base body is provided on the other end side, and a distal end portion of the extension portion and a part of the base body are engaged with the scanning device. It is provided so that it can be fixed. Moreover, the base | substrate of a holding | maintenance apparatus has the fastening leg part penetrated by the hollow formation body, and the clamping leg part is pressed and combined with the inner wall of the hollow molding body by operating the nut with a knurl.

JP 2005-114719 A

  By the way, in the conventional configuration as shown in FIG. 9, the holding device is fixed to the main scale 910 by screwing. Accordingly, when each is attached to the fixed surface with a clearance provided between the main scale and the head portion, it is necessary to move the head portion 920 to a substantially central portion of the main scale 910. At this position, the head portion 920 is moved. It is necessary to install the measuring apparatus 900 in a state in which is fixed. However, it may be difficult to install the measuring apparatus 900 in a state where the head unit 920 is fixed at a substantially central position of the main scale 910 due to the installation position and installation status of the measuring apparatus 900 and other factors. In this case, for example, it is necessary to newly provide a hole for screwing at another position of the flat surface 911 of the main scale 910, and there is a problem that complicated work is involved.

  Further, in the holding device having the conventional configuration as described in Patent Document 1, the configuration of the extension part that extends the holding device along the longitudinal direction of the scanning device is necessary, so that the configuration becomes large and complicated. Problem. In particular, there is a problem that it is inappropriate to use such a device as a holding device used only when the measuring device is installed.

  In view of the above problems, an object of the present invention is to provide a holding device that easily holds a measuring device with a simple configuration, and a measuring device.

The holding device of the present invention is formed in a longitudinal frame shape, and has a main scale provided with a moving surface provided with a groove portion along the longitudinal direction, and is engaged with the groove portion of the main scale and substantially along the moving surface. And a head unit that includes a detection unit that detects a movement amount with respect to the main scale, and a holding unit that holds the head unit at a predetermined position of the main scale. A holding body having a contact surface that contacts the moving surface, and a claw extending from the holding body along the moving surface and inserted between the main scale and the head portion A holding portion that is inserted into the groove portion from the holding main body and is engaged with the groove portion, and holding and moving means that moves the holding portion to engage with the groove portion. And wherein the door.
According to the present invention, the holding device includes a holding main body that contacts the moving surface of the main scale, a claw portion that extends from the holding main body along the moving surface and is inserted between the main scale and the head portion, A holding portion inserted into the groove portion of the scale and a holding and moving means for moving the holding portion to engage with the groove portion are provided.
For this reason, the head portion can be positioned with respect to the main scale with a simple configuration in which the claw portion is simply inserted between the main scale and the head portion while maintaining the clearance between the main scale and the head portion at a predetermined dimension. it can. Therefore, when attaching the measuring device to, for example, a pedestal part to be measured, the main scale and the head part can be easily fixed to a predetermined attachment surface in a state in which the clearance between the main scale and the head part is ensured. .
Further, the holding portion is moved in the width direction of the groove portion by the holding and moving means, and the holding portion is engaged with the groove portion. For this reason, a holding | maintenance apparatus can be fixed to the arbitrary positions along the longitudinal direction of a groove part. Therefore, the measuring device can be fixed to a predetermined mounting surface with the head portion positioned at an arbitrary position of the main scale. Therefore, even if it is difficult to install the measuring device with the head positioned at the approximate center of the main scale due to the installation position, installation status, and other factors of the measuring device, the head is moved to an arbitrary position. In the state, the measuring device can be fixed to the mounting surface.
As a result, the head unit can be positioned at an arbitrary position on the main scale with a simple configuration and a clearance of a predetermined dimension is ensured between the head unit and the main scale. Work can be performed easily.

In the holding device of the present invention, the holding portion includes an insertion portion that is inserted from the holding main body into the groove portion, and a protruding portion that protrudes from a distal end portion of the insertion portion toward a side edge of the groove portion. It is preferable that an engaging portion is provided, and the holding and moving means moves the engaging portion toward a side edge of the groove portion.
According to the present invention, the holding portion includes the engaging portion having the insertion portion that is inserted into the groove portion and the protruding portion that protrudes from the insertion portion toward the side edge of the groove portion. The part is moved toward the side edge of the groove part. Thereby, after inserting an engaging part in a groove part, a protrusion part can be engaged with the side edge of a groove part by moving an engaging part to the side edge side of a groove part by a holding | maintenance moving means. Therefore, the main scale of the holding device can be easily fixed, and the header portion can be easily held on the main scale.

Furthermore, in the holding device according to the present invention, the holding portion includes at least a pair of engaging portions in which the protruding portions protrude to different side edge sides of the groove portion, and the holding moving means protrudes to one side edge side. It is preferable to move the engaging part from which the part protrudes.
According to the present invention, in the state in which the engagement portion on one side, in which the protrusion protrudes toward one side edge of the groove portion, is engaged with the side edge of the opposite groove portion, of the pair of engagement portions, By moving the engaging portion, the holding device can be fixed to the main scale. Therefore, it is not necessary to move all the engaging portions, and the configuration can be simplified.

In the holding device of the present invention, the holding moving means is a screw member that is positioned at a predetermined position of the holding body so as to intersect the longitudinal direction of the groove portion, and the engaging portion is It is preferable that the screw member is provided so as to be able to advance and retract in the longitudinal direction of the screw member by being screwed to the tip of the screw member and rotating the screw member.
According to the present invention, the screw member is positioned at a predetermined position of the holding body so as to intersect the longitudinal direction of the groove portion, and the engaging portion is screwed to the tip of the screw member and rotated by the screw member. It is provided so as to be able to advance and retreat in the longitudinal direction of the screw member. Thereby, only by rotating a screw member, an engaging part can be moved in the direction which cross | intersects with respect to the longitudinal direction of a groove part, and a protrusion part can be advanced / retreated toward the side edge of a groove part. Therefore, the holding device can be fixed to the main scale with a simple configuration and a simple operation. Further, since the screw member is positioned in a direction intersecting with the longitudinal direction of the groove portion, the other end side where the engaging portion of the screw member is not screwed is connected to the longitudinal direction of the main scale, that is, the moving path of the head portion. It can project in the direction away from. Therefore, when installing the measuring device at a predetermined installation position, even when other members such as an installation jig are present on the moving path of the head unit, the screw member can be easily operated and measured. The efficiency of the installation work of the apparatus can be improved.

In the holding device of the present invention, the holding body includes a guide groove extending in a direction intersecting with a longitudinal direction of the groove portion, and the engagement portion is engaged with the guide groove, The holding and moving means is provided so as to be movable along the extending direction of the guide groove, and is provided so as to be able to advance and retreat in a direction substantially parallel to the longitudinal direction of the groove part or a direction substantially orthogonal to the longitudinal direction of the groove part, A pressing member that presses one end portion of the engaging portion at the distal end portion and an end portion on the opposite side to the pressing direction of the pressing member of the engaging portion, and the engaging portion toward the pressing member It is good also as a structure provided with the urging means to urge.
In the present invention, the holding body is provided with a guide groove that intersects the longitudinal direction of the groove portion, and the engaging portion is movably provided in the guide groove. The holding and moving means includes a pressing member that presses the engaging portion in a predetermined direction, and an urging means that urges the engaging portion toward the pressing member. As a result, the engaging portion can move in a direction intersecting with the longitudinal direction of the groove portion, so that the protruding portion can be moved forward and backward toward the side edge of the groove portion, as in the above invention. With the configuration, the holding device can be fixed to the main scale, and the holding device can be easily fixed only by changing the pressing state of the engaging portion with the pressing member.

Furthermore, in the holding device of the present invention, the engaging portion is provided so as to be movable in a direction substantially orthogonal to the longitudinal direction of the groove portion, and includes a slope that intersects the longitudinal direction of the groove portion, The holding and moving means is provided so as to be capable of moving forward and backward in a direction substantially parallel to the longitudinal direction of the groove portion, and a pressing member having a pressing inclined surface that contacts the inclined surface substantially parallel to the inclined surface of the engaging portion; It is good also as a structure provided with the urging means which urges | biases an engaging part toward the said press member.
In this invention, the engaging portion is provided so as to be movable in a direction substantially orthogonal to the longitudinal direction of the groove portion, and includes an inclined surface that is inclined in a direction intersecting the longitudinal direction of the groove portion. The holding and moving means is provided so as to be capable of moving forward and backward in a direction substantially parallel to the longitudinal direction of the groove portion, and includes a pressing member provided with a pressing slope that can come into contact with the slope of the engaging portion, and the engaging portion as the pressing member. Biasing means for biasing to the side. Thereby, like the said invention, a protrusion part can be moved forwards or backwards toward the side edge of a groove part, a holding | maintenance apparatus can be fixed to a main scale with simple structure, and it engages with a press member. The holding device can be easily fixed only by changing the pressing state of the part. Moreover, since the engaging part can be moved in a direction substantially orthogonal to the side edge of the groove part, the holding device can be more favorably fixed to the main scale.

In the holding device of the present invention, the groove portion of the main scale extends in a direction facing each other substantially along a pair of groove side edges substantially parallel to the longitudinal direction, and constitutes a part of the moving surface. The holding portion includes an extending portion, and the holding portion is rotatable on the holding main body about a rotation axis substantially orthogonal to the moving surface, and is formed in a longitudinal shape along a radial direction centering on the rotation axis. In addition, an engagement holding portion that is engaged with the extension portion is provided at a position facing the holding body, and the holding and moving means rotates the holding portion around the rotation shaft. It is good also as a structure which is a moving member.
According to this invention, the holding portion is rotatable about a rotation axis that is substantially orthogonal to the moving surface, and is formed in a longitudinal shape along a radial direction centered on the rotation axis. Engagement holding portions that can be engaged with extending portions that extend along the side edges of the groove portions are provided on the opposing surfaces.
Thereby, the holding device can be easily inserted into the groove portion in a state where the holding portion is rotated in a posture along the longitudinal direction of the groove portion. In addition, the holding member is rotated by rotating the rotating member in a state where the holding portion is inserted into the groove portion, so that the engaging holding portion is easily engaged with the extending portion and the holding device is easily attached to the main scale. Can be fixed to. Further, since the rotating member is provided substantially orthogonal to the moving surface, the holding portion can be easily rotated, and the holding device can be more easily fixed to the main scale.

In the holding device according to the aspect of the invention, it is preferable that the holding portion includes a tapered surface that is inclined in a direction away from the moving surface as it goes in the circumferential direction from the engagement holding portion.
According to this invention, the holding part is provided with the taper surface which inclines in the direction away from a movement surface as it goes to a circumferential direction from an engagement holding part.
Thereby, when the holding portion is rotated, the extending portion can be guided to the engagement holding portion along the tapered surface. Therefore, the engagement holding part can be easily and reliably engaged with the extension part.

Further, in the holding device of the present invention, the engagement holding portion may be formed in a tapered shape that is inclined in a direction away from the moving surface as it goes radially outward from the rotation shaft.
According to this invention, the engagement holding portion is formed in a tapered shape that is inclined in a direction away from the moving surface as it goes in the radially outward direction. Accordingly, when the holding portion is rotated, the engagement holding portion can be engaged with the extending portion along the taper, so that the engagement holding portion can be easily and reliably engaged with the extending portion. Can do.

Then, the measuring device of the present invention fixes the main scale to a predetermined first mounting surface in a state where the head portion is held on the main scale by the holding device as described above, and the head portion is It is fixed to a second mounting surface that can move relative to the first mounting surface.
According to the present invention, with the holding device as described above, the head device is held by fixing the holding device to the main scale in a state where both ends of the head portion are sandwiched, and the main scale is first attached in this state. The head is fixed to the second mounting surface. As a result, the clearance between the head portion and the main scale can be made constant, inconveniences such as the head portion being inclined with respect to the main scale can be prevented, and the head portion is held at an arbitrary position of the main scale. It is possible to fix the measuring device to the first mounting portion and the second mounting portion satisfactorily.

Hereinafter, a linear scale as a measuring apparatus according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an overall perspective view showing the configuration of the linear scale of the present embodiment. FIG. 2 is a front view of the linear scale of the embodiment. FIG. 3 is a plan view of the holding device that holds the detection head on the main scale as viewed from the head moving groove side in the linear scale of the embodiment, and FIG. 3A is a state in which the holding device is fixed to the main scale. FIG. 4B is a diagram in a state where the fixing of the holding device is released. FIG. 4 is a cross-sectional view schematically showing a state in which the holding device is fixed to the main scale.

[Configuration of linear scale]
1 and 2, reference numeral 100 denotes a linear scale. The linear scale 100 is a device that is fixed to, for example, a pedestal portion 310 of a measuring instrument 300 that measures an object to be measured, and measures the amount of movement of the pedestal portion 310. is there. Note that FIG. 1 shows a state immediately after the linear scale 100 is fixed to the pedestal, and when the measurement is performed with the measuring instrument, the holding device 200 is removed from the linear scale 100. Become. The linear scale 100 includes a main scale 110 and a detection head 120 as a head unit.

The main scale 110 includes a frame member 111 formed in a longitudinal shape. As shown in FIG. 3, the frame member 111 is formed in a substantially U-shaped cross section, and a U-shaped opening is formed on one surface side where the detection head 120 faces. In the U-shaped opening, the extending portion 112 extends in a direction close to each other to form a head facing surface 113, and a head moving groove 114 as a groove portion is formed between the extending portions 112. Yes. Further, the main scale 110 includes a main-side fixing surface (not shown) fixed to the fixed pedestal 311 in the pedestal 310 of the measuring instrument 300 on one surface along the longitudinal direction. It is fixed in contact with the side surface.
A scale portion (not shown) is formed in the frame member 111 of the main scale 110 along the head moving groove 114.

The detection head 120 includes an engagement leg (not shown), and is provided so as to be movable along the longitudinal direction of the head movement groove 114 by engaging the engagement leg with the head movement groove 114 of the main scale 110. . The detection head 120 includes a head-side fixed surface (not shown) fixed to a movable pedestal portion 312 provided on one surface side along the longitudinal direction so as to be relatively movable with respect to the fixed pedestal portion 311 of the pedestal portion 310. The side fixing surface is fixed in a state where it abuts against the movable pedestal 312. At this time, the detection head 120 is fixed to the movable pedestal portion 312 with a clearance 121 having a predetermined thickness dimension provided between the detection head 120 and the main scale 110 in order to improve the movement accuracy. The clearance 121 is formed by a holding device 200 described later.
The detection head 120 includes a detection unit (not shown). The detection unit includes, for example, a light source unit that emits light of a predetermined wavelength to the scale unit of the main scale 110, a light receiving unit that receives reflected light reflected from the scale unit, and reflected light received by the light receiving unit. And a movement amount detecting means for detecting a movement amount of the detection head 120 relative to the main scale 110 based on the above. In this embodiment, as the detection unit, a so-called optical linear scale that detects the amount of movement by reflected light is exemplified, but the present invention is not limited to this. For example, other types such as an electrostatic linear scale may be used. It is good also as a structure provided with the detection part of the structure.
A movable shaft 122 extending in the longitudinal direction is provided on one end surface of the detection head 120.

[Configuration of holding device]
Next, the configuration of the holding device 200 will be described. When the holding device 200 fixes the linear scale 100 to the pedestal portion 310, the holding device 200 is placed at an arbitrary position on the main scale 110 with a clearance 121 provided between the detection head 120 and the main scale 110. Used to hold. The holding device 200 is also used for holding the detection head 120 with respect to the main scale 110 in order to prevent the detection head 120 from rattling when the linear scale 100 is shipped from a factory, for example. As shown in FIGS. 1 to 3, the holding device 200 includes a holding main body 210, a frame portion 220 as a holding portion, a holding movement screw 230 as a holding movement means, and the like.

  The holding body 210 is formed in a substantially rectangular parallelepiped shape including a head contact surface 210 </ b> A that contacts the detection head 120 and a main contact surface 210 </ b> B that contacts the head facing surface 113 of the main scale 110.

  Further, on the head contact surface 210A of the holding main body 210, for example, a columnar positioning portion 211 is formed to protrude toward the detection head 120 side. The positioning portion 211 is fitted into positioning holes (not shown) formed on both end surfaces of the detection head 120 in the longitudinal direction, and positions the holding body 210 with respect to the detection head 120.

  Further, a claw portion 212 that protrudes from the head contact surface 210 </ b> A of the holding main body 210 and that contacts the head facing surface 113 of the main scale 110 is formed to protrude from the main contact surface 210 </ b> B. The claw portion 212 is formed to have a uniform predetermined thickness dimension, and is inserted between the main scale 110 and the detection head 120 when the detection head 120 is held with respect to the main scale 110. A dimensional clearance 121 is formed.

  On the main contact surface 210B of the holding body 210, a pair of first engaging portions 213 inserted into the head moving groove 114 are formed to protrude. Further, the first engaging portion 213 is formed with a locking portion 213A that protrudes to the one surface side of the frame member 111 of the main scale 110, and the locking portion 213A and the main contact surface 210B form the main engagement portion 213. By sandwiching the extending portion 112 of the scale 110, the head moving groove 114 is engaged.

  Further, a frame guide groove 214 is formed on the main contact surface 210B of the holding body 210. The frame guide groove 214 is formed to be inclined at a predetermined angle with respect to the longitudinal direction of the main scale 110 when the holding device 200 is fixed to the main scale 110. Specifically, the top guide groove 214 is closer to the first engagement portion 213 as it approaches the head contact surface 210A from the operation surface 210C that is the opposite side surface of the head contact surface 210A of the holding body 210. It is formed to be inclined. The frame guide groove 214 is engaged with the frame portion 220 and guides the movement of the frame portion 220 along the inclination direction.

  Furthermore, the operation surface 210C of the holding body 210 is provided with a screw operation surface 210D that is inclined toward the side surface in the protruding direction of the locking portion 213A of the first engagement portion 213. Specifically, the screw operation surface 210 </ b> D is formed to be inclined at an angle substantially orthogonal to the inclination direction of the frame guide groove 214. The screw operation surface 210D is formed with a screw insertion hole 214A communicating with the frame guide groove 214.

The top part 220 includes a body part 221 having a width dimension substantially the same as the width dimension of the top guide groove 214. In addition, the top portion 220 includes a top engaging portion 222 as an engaging portion inserted into the head moving groove 114. The top engaging portion 222 includes a substantially shaft-like insertion portion 222A and a protruding portion 222B that protrudes in a direction opposite to the protruding direction of the locking portion 213A of the first engaging portion 213. Further, the top portion 220 is a surface facing the operation surface 210C, and a female screw hole 223 is formed on the extension of the screw insertion hole 214A. A male screw portion 231 formed at the distal end portion of the holding and moving screw 230 is screwed into the female screw hole 223.
Then, the top portion 220 moves forward and backward in the top guide groove 214 by changing the screwing state of the male screw portion 231 screwed into the female screw hole 223 by the rotation of the holding movement screw 230. As a result, as shown in FIG. 3A, when the top portion 220 moves to the side away from the head contact surface 210A, the top engaging portion 222 moves toward one side surface of the frame member 111, and FIG. As shown by the solid line, the protrusion 222B is engaged with the extension 112, and the holding device 200 is fixed to the main scale 110. Further, as shown in FIG. 3B, when the piece portion 220 moves in the direction approaching the head contact surface 210A, the piece engaging portion 222 is separated from the side surface of the frame member 111, and is shown by a broken line in FIG. As shown, the engaged state of the protruding portion 222B and the extending portion 112 is released.

The holding and moving screw 230 is inserted from the screw operation surface 210D of the operation surface 210C into the top guide groove 214 through the screw insertion hole 214A. Further, as described above, the distal end portion of the holding and moving screw 230 is provided with the male screw portion 231 and screwed into the female screw hole 223 of the top portion 220. Further, the holding and moving screw 230 includes a flange portion 232 that comes into contact with the end surface of the top guide groove 214 on the operation surface 210C side. Further, the holding and moving screw 230 includes an operation portion 233 that contacts the screw operation surface 210D on the other end side where the male screw portion 231 is not provided. The holding movement screw 230 is restricted from moving in the axial direction by the flange portion 232 and the operation portion 233.
Such a holding and moving screw 230 is screwed into the female screw hole 223 of the male screw portion 231 as described above by operating and rotating the operation portion 233 protruding outward from the screw operation surface 210D. Changes, and the frame portion 220 is moved along the frame guide groove 214.

[Installation of linear scale]
Next, an example of the operation of installing the linear scale 100 on the pedestal 310 of the measuring device 300 will be described.

  When the linear scale 100 is installed on the pedestal portion 310, the detection head 120 is moved to a predetermined position on the main scale 110. At this time, for example, depending on the installation position of the linear scale 100 in the measuring instrument 300 and the installation status of surrounding members, the main scale 110 and the detection head 120 are appropriately fixed to the fixed base portion 311 and the movable base portion 312. Move to position.

  Then, both end surfaces of the detection head 120 in the longitudinal direction are sandwiched between the holding devices 200, and the positioning portions 211 of the holding device 200 are fitted into the positioning holes of the detection head 120. At this time, the claw portion 212 of the holding device 200 is inserted between the main scale 110 and the detection head 120, and a clearance 121 is formed between the main scale 110 and the detection head 120. At this time, the first engaging portion 213 of the holding device 200 and the top engaging portion of the top portion 220 are inserted into the head moving groove 114, and the locking portion 213A of the first engaging portion 213 is connected to one of the extending portions. 112 is engaged.

  Thereafter, the operation unit 233 of the holding movement screw 230 of the holding device 200 is rotated to move the frame unit 220 to the detection head 120 side. Thereby, the frame engaging part 222 of the frame part 220 is engaged with the other extending part 112, and the holding device 200 is fixed to the main scale 110.

  Then, the linear scale 100 in which the detection head 120 is held by the main scale 110 is fixed to the pedestal portion 310 by, for example, screwing or the like by the holding device 200. That is, the main scale 110 is fixed to the fixed base 311 and the detection head 120 is fixed to the movable base 312. Thereafter, the holding movement screw 230 of the holding device 200 is rotated to release the engaged state of the top engaging portion 222, and the holding device 200 is removed from the main scale 110. As a result, the linear scale 100 is installed on the pedestal portion 310 with the clearance 121 having a predetermined thickness dimension formed in the main scale 110 and the detection head 120.

[Effects of Embodiment]
As described above, the holding device 200 of the linear scale 100 according to the above embodiment includes the holding body 210 that makes contact with the head facing surface 113 of the main scale 110 at the main contact surface 210B, and the head contact of the holding body 210. A claw portion 212 formed continuously from the surface 210A to the main contact surface 210B and inserted between the main scale 110 and the detection head 120, and inserted into the head moving groove 114 from the main contact surface 210B of the holding body 210. The first engaging portion 213 and the top engaging portion 222, and the top portion 220 are moved to move the top engaging portion 222 in the width direction of the head moving groove 114, and the holding device 200 is fixed to the main scale 110. Holding and moving screw 230.
For this reason, the detection head 120 can be easily maintained in a state where the clearance 121 between the main scale 110 and the detection head 120 is maintained at a predetermined dimension simply by inserting the claw portion 212 between the main scale 110 and the detection head 120. Can be held with respect to the main scale 110.
Further, the top engaging portion 222 is moved in the width direction of the head moving groove 114 by the holding moving screw 230, and the top engaging portion 222 is engaged with the extending portion 112 constituting the head moving groove 114. . Accordingly, the holding device 200 does not need to be screwed to the main scale 110 and can be fixed at an arbitrary position along the longitudinal direction of the main scale 110. Therefore, the linear scale 100 can be fixed to the pedestal portion 310 in a state where the detection head 120 is positioned at an arbitrary position of the main scale 110, and the mounting operation of the linear scale 100 to the pedestal portion 310 is performed more efficiently. can do.

Further, the top engaging portion 222 of the holding device 200 includes an insertion portion 222A that is inserted into the head moving groove 114 and a protruding portion 222B that protrudes from the insertion portion 222A toward one side surface of the frame member 111. The holding and moving screw 230 moves the piece engaging part 222 toward the side edge of the groove part.
For this reason, the holding device 200 can be easily fixed only by moving the top part 220. At this time, the protrusion 222B of the frame engaging portion 222 is engaged with the extension 112, so that the extension 112 is sandwiched between the protrusion 222B and the main contact surface 210B of the holding body 210. There is no backlash of the apparatus 200, and the holding apparatus 200 can be fixed to the main scale 110 satisfactorily.

  Furthermore, of the first engaging portion 213 and the top engaging portion 222 that are engaged with the head moving groove 114, only the top engaging portion 222 is moved to fix the holding device 200 to the main scale 110. For this reason, it is only necessary to move the top engaging portion 222 among the engaging portions 213 and 222 engaged with the head moving groove 114, and the holding device 200 can be fixed to the main scale 110 with a simpler configuration. Can do.

The holding device 200 includes a holding movement screw 230 that is inclined so as to intersect the head movement groove 114, and the female screw hole 223 of the top portion 220 is screwed into the male screw portion 231 at the tip of the holding movement screw 230. Are combined.
Therefore, it is possible to easily move the top engaging portion 222 toward the side surface of the frame member 111 simply by rotating the holding and moving screw 230 and changing the screwed state of the female screw hole 223 and the male screw portion 231. it can. Therefore, the holding device 200 can be fixed to the main scale 110 with a simple configuration and a simple operation.

Further, the holding and moving screw 230 has an axial direction of the holding and moving screw 230 because the collar portion 232 and the operating portion 233 are in contact with the end surface on the operating surface 210C side of the top guide groove 214 and the screw operating surface 210D, respectively. Movement is restricted. For this reason, inconveniences such as the holding movement screw 230 moving in the axial direction and the engagement state of the top engaging portion 222 with the head moving groove 114 being released can be prevented.
Further, the operation portion 233 of the holding and moving screw 230 extends in a direction inclined with respect to the longitudinal direction of the linear scale 100. For this reason, even when there is another member (for example, the movable shaft 122) on the extension of the detection head 120 in the longitudinal direction, the operation unit 233 can be operated while avoiding this member. Fixing work to the scale 110 can be easily performed.

  Further, a positioning portion is provided on the head contact surface 210 </ b> A of the holding body 210, and this positioning portion is fitted in a positioning hole provided on the side surface of the detection head 120. Accordingly, the holding device 200 can be positioned on the detection head 120, and inconveniences such as the detection head 120 moving along the longitudinal direction when the linear scale 100 is attached can be prevented.

The linear scale 100 as described above is fixed to the main scale 110 by attaching the holding device 200 to both ends of the detection head 120, and the detection head 120 is held at a predetermined position of the main scale 110 by the holding device 200. It is being fixed to the base part 310 in the state which exists.
For this reason, since the holding device 200 is attached to both ends of the detection head 120, the clearance 121 between the detection head 120 and the main scale 110 can be maintained at a uniform predetermined thickness, and the linear scale 100 can be satisfactorily mounted on the pedestal. It can be fixed to the part 310.

[Other Embodiments]
In addition, this invention is not limited to the structure demonstrated by the said embodiment, The following modifications are also included.

  For example, in the above-described embodiment, the configuration in which the top portion 220 is provided at the tip of the holding and moving screw 230 that is inclined with respect to the longitudinal direction of the linear scale 100 is not limited thereto. For example, FIG. 5 and FIG. It is good also as a structure as shown.

  FIG. 5 is a plan view of a holding device according to another embodiment as viewed from the head moving groove side. FIG. 5A is a view of the holding device fixed to the main scale, and FIG. 5B is a drawing of the holding device. FIG. FIG. 6 is a plan view of the holding device in still another embodiment as viewed from the head moving groove side, (A) is a diagram in a state where the holding device is fixed to the main scale, and (B) is It is a figure in the state where fixation of a holding device was canceled.

In FIG. 5, the holding device 200 </ b> A includes a holding main body 210, a top portion 220, and a holding moving screw 230 </ b> A, as in the above embodiment.
The holding body 210 of the holding device 200A is substantially the same as that in the above embodiment, and includes a positioning portion 211, a claw portion 212, a first engaging portion 213, and a frame guide groove 215.
The top guide groove 215 is formed to be inclined from the operation surface 210C in a direction away from the first engagement portion 213 as it approaches the head contact surface 210A. Further, the top guide groove 215 is provided with a screw insertion hole 215A communicating with the operation surface 210C on the end surface on the operation surface 210C side.
The top part 220 includes a body part 224 having a width dimension substantially the same as the width dimension of the top guide groove 215 and a top engaging part 222. In the body 224, an end surface 224A on the head contact surface 210A side and an end surface 224B on the operation surface 210C side are each formed in a surface shape that is substantially orthogonal to the longitudinal direction of the head moving groove 114.
The holding movement screw 230 </ b> A is screwed into the screw insertion hole 215 </ b> A in a state where the axial direction is substantially parallel to the longitudinal direction of the head movement groove 114, and the tip part is in contact with the end surface 224 </ b> B of the top part 220.
Further, a coil spring 234 as a biasing means is provided on the end surface of the top guide groove 215 on the head contact surface 210A side between the end surface 224A of the top portion 220, and the top portion 220 is biased toward the operation surface 210C. is doing.

  In the holding device 200A having the above-described configuration, the operation portion 233 of the holding movement screw 230A is rotated to screw the holding movement screw 230A into the screw insertion hole 215A, and the screwing state is changed, whereby the top portion 220 is pivoted. Press in the direction. Specifically, when the piece portion 220 is pushed in by the holding and moving screw 230A, the piece engaging portion 222 moves toward one side surface of the frame member 111 and the protruding portion 222B extends as shown in FIG. The holding device 200 </ b> A is fixed to the main scale 110 by being engaged with the protruding portion 112. Further, when the holding and moving screw 230A is moved in the direction to be pulled out from the operation surface 210C side, as shown in FIG. 5B, the coil spring 234 urges the top portion 220 toward the operation surface 210C, and the protrusion 222B and the extension The engagement state of the protruding portion 112 is released.

  Even in the above-described configuration, the clearance 121 between the main scale 110 and the detection head 120 can be easily set by simply inserting the claw portion 212 between the main scale 110 and the detection head 120 as in the above embodiment. The detection head 120 can be easily held with respect to the main scale 110 in this state. Further, the holding device 200 can be fixed at an arbitrary position along the longitudinal direction of the main scale 110, and the linear scale 100 is fixed to the pedestal portion 310 in a state where the detection head 120 is positioned at an arbitrary position of the main scale 110. can do.

In the example shown in FIG. 6, the holding device 200B includes a holding body 210, a top portion 220, and a holding moving screw 230B, as in the above embodiment.
The holding body 210 of the holding device 200B is substantially the same as that of the above embodiment, and includes a positioning portion 211, a claw portion 212, a first engaging portion 213, and a top guide groove 216.
The frame guide groove 216 is formed so as to extend in a direction substantially orthogonal to the longitudinal direction of the head moving groove 114. Further, the frame guide groove 216 includes a screw insertion hole 216A that communicates with the operation surface 210C on the end surface on the operation surface 210C side.
The top part 220 includes a body part 225 having a width dimension substantially the same as the width dimension of the top guide groove 216 and a top engaging part 222. The body 225 includes a top inclined surface 225 </ b> A that is inclined with respect to the head moving groove 114. Specifically, the top inclined surface 225A is inclined at an angle of 45 degrees, for example, in a direction away from the first engagement portion 213 as it goes from the head contact surface 210A side to the operation surface 210C side. Further, the surface of the body 225 opposite to the top inclined surface 225 </ b> A is formed in a flat shape that contacts the end surface of the top guide groove 216 on the head contact surface 210 </ b> A side. Further, the body 225 includes an urging surface 235 </ b> B that is substantially orthogonal to the extending direction of the frame guide groove 216. The body portion 225 includes a frame engaging portion 222 that can be inserted into the head moving groove 114 in the same manner as the body portion 221 of the above embodiment.
The holding and moving screw 230B is screwed into the screw insertion hole 216A so that the axial direction is substantially parallel to the longitudinal direction of the head moving groove 114. Further, a top moving member 235 having an inclined surface 235A formed in substantially the same inclination direction as the top inclined surface 225A of the top 220 is rotated around the axis of the holding moving screw 230B at the tip of the holding moving screw 230B. It is provided as possible.
In addition, a coil spring 236 serving as an urging means is provided between the urging surface 225B of the top portion 220 and a side surface of the top guide groove 216 that faces the urging surface 225B of the top portion 220. It is biased toward the moving member 235 side.
In the holding device 200B having the above-described configuration, the operation unit 233 of the holding moving screw 230B is rotated to screw the holding moving screw 230B into the screw insertion hole 216A, and the screw moving state is changed, whereby the top moving member 235 is changed. Move in the axial direction. Thus, when the piece moving member 235 is pushed in, the piece engaging portion 222 moves toward one side surface of the frame member 111 and the protruding portion 222B is engaged with the extending portion 112 as shown in FIG. The holding device 200 </ b> B is fixed to the main scale 110. When the piece moving member 235 moves to the operation surface 210C side, as shown in FIG. 6B, the coil spring 236 urges the piece portion 220 toward the piece moving member 235 side, and the protruding portion 222B and the extending portion 112 are moved. The engagement state is released.

Even in the above-described configuration, the clearance 121 between the main scale 110 and the detection head 120 can be easily set by simply inserting the claw portion 212 between the main scale 110 and the detection head 120 as in the above embodiment. The detection head 120 can be held with respect to the main scale 110 while maintaining a predetermined dimension. Further, the holding device 200 </ b> B can be fixed at an arbitrary position along the longitudinal direction of the main scale 110, and the linear scale 100 is fixed to the pedestal portion 310 with the detection head 120 positioned at an arbitrary position of the main scale 110. can do.
Further, since the top portion 220 and the top engaging portion 222 provided on the top portion 220 move in a direction substantially orthogonal to the longitudinal direction of the head moving groove 114, the top engaging portion 222 is more reliably extended. Part 112 can be engaged.

In the above-described embodiment and the configuration shown in FIGS. 5 and 6, the piece engaging portion 222 provided on the piece portion 220 is moved by the holding and moving screws 230, 230 </ b> A, and 230 </ b> B to be engaged with the extending portion 112. Although the configuration is shown, it is not limited to this.
For example, it is good also as a structure which fixes a holding | maintenance apparatus using a holding part as shown in FIG.7 and FIG.8.

  FIG. 7 is a perspective view schematically showing a holding device in still another embodiment, and FIG. 7A is a view showing a state in which the holding device can be mounted on the head moving groove of the main scale. () Is a figure which shows the state which fixed the holding | maintenance apparatus with respect to the main scale. FIG. 8 is a perspective view schematically showing a holding device according to still another embodiment, and FIG. 8A is a view showing a state in which the holding device can be attached to the head moving groove of the main scale. These are figures which show the state which fixed the holding | maintenance apparatus with respect to the main scale.

In FIG. 7, the holding device 200 </ b> C includes a holding body 210, a rotation holding part 240 as a holding part, and a rotating shaft part 250 as a holding and moving means.
The holding main body 210 includes a positioning portion 211 and a claw portion 212. In addition, the holding body 210 includes a shaft insertion hole (not shown) that communicates with the main contact surface 210B from the rotation operation surface 210E that is opposite to the main contact surface 210B.
The rotation holding part 240 is formed integrally with, for example, the rotary shaft part 250, and is provided so as to be rotatable with respect to the holding main body 210 when the rotary shaft part 250 is inserted into the shaft insertion hole of the holding main body 210. Yes. The rotation holding portion 240 is formed in a longitudinal shape having a width dimension that is substantially the same as or smaller than the width dimension of the head moving groove 114, and the rotation shaft portion 250 is formed at a substantially central portion in the longitudinal direction. Are connected. Further, the rotation holding part 240 is formed with engagement holding parts 241 and 242 facing the main contact surface 210B. These engagement holding portions 241 and 242 are provided with the rotation shaft portion 250 interposed therebetween, and are formed in a tapered surface shape that is inclined with respect to the rotation circumferential direction of the rotation holding portion 240.
As described above, the rotation shaft portion 250 is connected to the substantially central portion of the rotation holding portion 240 and is inserted through the shaft insertion hole of the holding body 210. Further, an operation portion 251 that abuts on the rotation operation surface 210E of the holding body 210 is provided at the end of the rotation shaft portion 250. The operation portion 251 causes the rotation holding portion 240 and the rotation shaft portion 250 to move in the axial direction. Movement to is restricted.

  In the holding device 200 </ b> C having the above-described configuration, as shown in FIG. 7A, the operation portion 251 of the rotating shaft portion 250 is rotated so that the rotation holding portion 240 is substantially parallel to the longitudinal direction of the head moving groove 114. Then, the head is moved through the head moving groove 114. Then, the positioning portion 211 of the holding device 200 </ b> C is fitted into the positioning hole of the detection head 120, and the claw portion 212 is inserted between the main scale 110 and the detection head 120. Thereafter, as shown in FIG. 7B, the operation portion 251 of the rotating shaft portion 250 is rotated. Thereby, the rotation holding part 240 is also rotated, the extending part 112 is moved along the tapered surfaces of the engagement holding parts 241 and 242, and is engaged with the engagement holding parts 241 and 242.

Even in the above-described configuration, the clearance 121 between the main scale 110 and the detection head 120 can be easily set by simply inserting the claw portion 212 between the main scale 110 and the detection head 120 as in the above embodiment. The holding device 200 can be fixed at an arbitrary position along the longitudinal direction of the main scale 110.
Further, since the holding device 200C can be engaged and disengaged only by rotating the operation portion 251 of the rotating shaft portion 250 by about 90 degrees, the fixing operation of the holding device 200C can be performed more easily.

Further, the holding device 200D of FIG. 8 includes a holding main body 210, a rotation holding portion 260 as a holding portion, and a rotating shaft portion 250 as a holding and moving means, substantially the same as the holding device 200C.
The holding main body 210 includes a positioning portion 211 and a claw portion 212. In addition, the holding body 210 includes a shaft insertion hole (not shown) that communicates with the main contact surface 210B from the rotation operation surface 210E that is opposite to the main contact surface 210B.
The rotation holding part 260 is formed integrally with the rotating shaft part 250, for example, and is provided rotatably with respect to the holding body 210 by inserting the rotating shaft part 250 into the shaft insertion hole of the holding body 210. Yes. The rotation holding portion 260 is formed in a longitudinal shape having a width dimension that is substantially the same as or smaller than the width dimension of the head moving groove 114, and the rotation shaft portion 250 is substantially at the center in the longitudinal direction. Are connected. In addition, the rotation holding portion 260 is formed with an engagement holding portion 261 having a substantially arcuate surface shape so as to face the main contact surface 210B. The engagement holding portion 261 is formed in an arc shape that is closest to the main contact surface 210 </ b> B of the holding main body 210 at the connection position with the rotary shaft portion 250.

  In the holding device 200D configured as described above, as shown in FIG. 8A, the operation portion 251 of the rotating shaft portion 250 is rotated so that the rotation holding portion 260 is substantially parallel to the longitudinal direction of the head moving groove 114. Then, the head is moved through the head moving groove 114. Then, the positioning portion 211 of the holding device 200D is fitted into the positioning hole of the detection head 120, and the claw portion 212 is inserted between the main scale 110 and the detection head 120. Thereafter, as shown in FIG. 8B, the operation unit 251 of the rotary shaft unit 250 is rotated. As a result, the rotation holding portion 260 also rotates, and the extending portion 112 moves along the arc surface of the engagement holding portion 261 and is engaged with the engagement holding portion 261.

Even with the above configuration, the clearance 121 between the main scale 110 and the detection head 120 can be easily maintained at a predetermined size, and the holding device 200 can be fixed at an arbitrary position along the longitudinal direction of the main scale 110. Can do.
Further, similarly to the example shown in FIG. 7, the holding device 200D can be engaged and disengaged only by rotating the operation portion 251 of the rotating shaft portion 250 by about 90 degrees, so that the fixing operation of the holding device 200D can be performed more easily. Can be implemented.

  Furthermore, in the above-described embodiment and other embodiments shown in FIGS. 5 and 6, the holding device 200 is engaged by the pair of first engaging portions 213 and one piece engaging portion 222. Although shown, it is good also as a structure which provides the more 1st engaging part 213 and the top engaging part 222, for example.

  In addition, the holding device 200, 200A, 200B is fixed by moving only the frame engaging portion 222. However, the holding device 200, 200A is also moved by moving the first engaging portion 213 together with the frame engaging portion 222. , 200B may be fixed.

  Further, the inclination direction of the top guide groove 214 is a direction of approaching the first engagement portion 213 from the operation surface 210C which is the side surface opposite to the head contact surface 210A of the holding body 210 as it approaches the head contact surface 210A. Although an example of tilting is shown, it may be configured to tilt in the opposite direction.

  In addition, the specific structure and procedure for carrying out the present invention can be appropriately changed to other structures and the like within a range in which the object of the present invention can be achieved.

  INDUSTRIAL APPLICABILITY The present invention can be used for a holding device that positions a head portion with respect to a main scale in a measuring device in which the head portion can move with respect to the main scale.

It is a whole perspective view which shows the structure of the linear scale of this Embodiment. It is a front view of the linear scale of the said embodiment. In the linear scale of the embodiment, a plan view of the holding device that holds the detection head on the main scale as viewed from the head moving groove side, (A) is a diagram in a state in which the holding device is fixed to the main scale. B) is a diagram in a state in which the holding device is unlocked. It is sectional drawing which shows the outline of the state which fixed the holding | maintenance apparatus to the main scale. It is the top view which looked at the holding | maintenance apparatus in other embodiment from the head movement groove | channel side, (A) is the figure in the state which fixed the holding | maintenance apparatus to the main scale, (B) is the fixation of a holding | released apparatus released FIG. FIG. 6 is a plan view of a holding device according to another embodiment as viewed from the head moving groove side, (A) is a diagram in a state in which the holding device is fixed to the main scale, and (B) is a state where the fixing of the holding device is released. It is a figure in the state made. It is a perspective view which shows the outline of the holding | maintenance apparatus in other embodiment, (A) is a figure which shows the state which can mount | wear a holding | maintenance apparatus with respect to the head movement groove | channel of a main scale, (B) is a holding | maintenance apparatus. It is a figure which shows the state which fixed to the main scale. It is a perspective view which shows the outline of the holding | maintenance apparatus in other embodiment, (A) is a figure which shows the state which can mount | wear a holding | maintenance apparatus with respect to the head movement groove | channel of a main scale, (B) is a holding | maintenance apparatus. It is a figure which shows the state which fixed to the main scale. It is a perspective view which shows the structure of the conventional linear scale and a holding device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Linear scale as a measuring device 110 ... Main scale 112 ... Extension part 113 ... Head opposing surface as a moving surface 114 ... Head moving groove as a groove part 120 ... Detection head as a head part 200 ... Holding apparatus 210 ... Holding body 212: Claw portions 214, 215: Top guide groove as guide groove 220: Top portion as holding portion 222 ... Top engagement portion as engagement portion 222A ... Insertion portion 222B ... Projection portion 225A ... Top slope surface as slope 230 ... Holding / moving means and holding / moving screw as screw member 230A ... Holding / moving screw as pressing member 234 ... Coil spring as urging means 235 ... Piece moving member as pressing member 235A ... Inclined surface 236 as pressing slope Coil springs 240, 260 as a biasing means Holding portion 241,242,261 ... engagement holding portion 250 ... rotating shaft and moving the pedestal as a fixing pedestal 312 ... second mounting portion of the rotary shaft portion 311 ... first mounting portion of the pivot member

Claims (10)

The main scale is formed in a longitudinal frame shape and includes a moving surface provided with a groove portion along the longitudinal direction, and is provided to be movable along the moving surface by being engaged with the groove portion of the main scale. A measurement apparatus comprising: a head unit provided with a detection unit that detects a movement amount with respect to the main scale; and a holding device that holds the head unit at a predetermined position of the main scale,
A holding body having a contact surface that contacts the moving surface;
A claw portion extending from the holding body along the moving surface, and inserted between the main scale and the head portion,
A holding portion that is inserted into the groove portion from the holding body and engaged with the groove portion;
Holding and moving means for moving the holding portion and engaging the groove portion;
A holding device characterized by comprising: The holding device according to claim 1,
The holding portion includes an insertion portion that is inserted from the holding main body into the groove portion, and an engaging portion that includes a protruding portion that protrudes from a distal end portion of the insertion portion toward a side edge of the groove portion,
The holding device moves the engaging part toward a side edge of the groove part. The holding device according to claim 2,
The holding portion includes at least a pair of engaging portions in which the protruding portions protrude to different side edge sides of the groove portion,
The holding device moves the engaging portion from which the protruding portion protrudes to one side edge side. A holding device according to claim 2 or claim 3, wherein
The holding and moving means is a screw member that is positioned in a state intersecting the longitudinal direction of the groove at a predetermined position of the holding body,
The holding device is characterized in that the engaging portion is screwed to a tip of the screw member and is capable of moving back and forth in the longitudinal direction of the screw member by rotation of the screw member. A holding device according to claim 2 or claim 3, wherein
The holding body includes a guide groove extending in a direction intersecting the longitudinal direction of the groove portion,
The engaging portion is provided so as to be engaged with the guide groove and movable along the extending direction of the guide groove,
The holding and moving means is provided so as to be able to advance and retreat in a direction substantially parallel to the longitudinal direction of the groove part or a direction substantially orthogonal to the longitudinal direction of the groove part, and presses one end part of the engaging part at the tip part And a biasing means that biases the engaging portion toward the pressing member, and is provided at an end of the engaging portion opposite to the pressing direction of the pressing member. Holding device. A holding device according to claim 2 or claim 3, wherein
The engaging portion is provided so as to be movable in a direction substantially orthogonal to the longitudinal direction of the groove portion, and includes an inclined surface that intersects the longitudinal direction of the groove portion,
The holding and moving means is provided so as to be capable of moving forward and backward in a direction substantially parallel to the longitudinal direction of the groove portion, and a pressing member having a pressing slope that contacts the slope substantially parallel to the slope of the engagement portion; And a biasing unit that biases the engaging portion toward the pressing member. The holding device according to claim 1,
The groove portion of the main scale includes an extending portion that extends in a direction facing each other substantially along a pair of groove side edges substantially parallel to the longitudinal direction, and constitutes a part of the moving surface,
The holding portion is rotatable on the holding main body about a rotation axis that is substantially orthogonal to the moving surface, and is formed in a longitudinal shape along a radial direction around the rotation axis. An engagement holding part engaged with the extension part is provided at a position facing the main body,
The holding device is a holding member that rotates the holding portion about the rotation axis. The holding device according to claim 7,
The holding device includes a tapered surface that inclines in a direction away from the moving surface as it goes in a circumferential direction from the engagement holding portion. The holding device according to claim 7,
The holding device is characterized in that the engagement holding portion is formed in a tapered shape that inclines in a direction away from the moving surface as it goes radially outward from the rotation shaft.   In a state where the holding device according to any one of claims 1 to 9 is installed at both end positions of the head portion and held by the main scale, the main scale is fixed to a predetermined first mounting portion, A measuring apparatus, wherein the head portion is fixed to a second mounting portion that is movable relative to the first mounting portion.

Images