JP2008267927A - Apparatus for measuring physical quantity of sheet - Google Patents

Apparatus for measuring physical quantity of sheet Download PDF

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JP2008267927A
JP2008267927A JP2007109940A JP2007109940A JP2008267927A JP 2008267927 A JP2008267927 A JP 2008267927A JP 2007109940 A JP2007109940 A JP 2007109940A JP 2007109940 A JP2007109940 A JP 2007109940A JP 2008267927 A JP2008267927 A JP 2008267927A
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sheet
physical quantity
radiation
thickness
quantity measuring
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JP5266662B2 (en
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Shigeyuki Tsunoda
重幸 角田
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Yokogawa Electric Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet thickness measuring apparatus which facilitates changing its measurement area, even during on-line measurements. <P>SOLUTION: A sheet physical quantity measuring apparatus detects the amount of transmission of radiation 2 emitted to a sheet-like object 3 from a radiation source 1 with a radiation detector 14, and measures a physical quantity of the sheet-like object 3. The radiation detector 14 is composed of one-dimensional or two-dimensional array elements, and the apparatus is provided with a selection means 6 for selecting a signal output from an element corresponding to a measuring region 7 of the sheet-like object 3 from among the array elements. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、金属、プラスチック、紙などシート状物体の、厚さなどの物理量を測定するシート物理量測定装置に関する。   The present invention relates to a sheet physical quantity measuring apparatus for measuring a physical quantity such as a thickness of a sheet-like object such as metal, plastic and paper.

シート物理量測定装置の一種である、Ｘ線を用いたシート厚さ測定装置（以下Ｘ線厚さ測定装置と呼ぶ）では、上ヘッドと下ヘッドの間のギャップにシートが挿入され、下ヘッドから照射されたＸ線がシートを透過し、上ヘッドで検出される。シートを透過する際にＸ線が減衰され、Ｘ線の透過量（減衰量でもよい）とシートの厚さとの間の関係を利用して厚さを測定する。対向する上ヘッドと下ヘッドはフレーム上のレールを走行してシート上を走査するので、シートの厚さ分布を測定することができる。   In a sheet thickness measuring apparatus using X-rays (hereinafter referred to as an X-ray thickness measuring apparatus), which is a kind of sheet physical quantity measuring apparatus, a sheet is inserted into a gap between an upper head and a lower head, The irradiated X-rays pass through the sheet and are detected by the upper head. X-rays are attenuated when passing through the sheet, and the thickness is measured using the relationship between the amount of X-ray transmission (or attenuation) and the thickness of the sheet. Since the upper and lower heads facing each other run on a rail on the frame and scan the sheet, the thickness distribution of the sheet can be measured.

図６はシート物理量測定装置の一種であるＸ線厚さ測定装置の従来例を示す構成説明図である。Ｘ線源１は図６のＢ点からＡＢＥの放射角状にＸ線２を放出する。Ｘ線検出器４は、電離箱やシリコンフォトダイオード等の、ある程度の面積を持った１出力の検出器で、Ｘ線２のシート状物体３を透過した透過Ｘ線２１を検出する。   FIG. 6 is a configuration explanatory view showing a conventional example of an X-ray thickness measuring apparatus which is a kind of sheet physical quantity measuring apparatus. The X-ray source 1 emits X-rays 2 from the point B in FIG. The X-ray detector 4 is a one-output detector having a certain area, such as an ionization chamber or a silicon photodiode, and detects transmitted X-rays 21 transmitted through the sheet-like object 3 of X-rays 2.

図６のＸ線厚さ測定装置の動作を次に説明する。Ｘ線源１から出射されたＸ線２はシート状物体３を透過する際に一部のエネルギーを吸収される。シート状物体３の厚さが変化するとＸ線検出器４での検出信号が変化するので、予め厚さの分かったシート状物体を複数用いて、それぞれの場合の検出信号を測定することにより、図７に示すような検量線５を得ることができる。この検量線５を予めメモリなどに記憶させておけば、Ｘ線検出器４で検出されるＸ線２の透過量（減衰量）からシート状物体３の厚さを測定することができる。   Next, the operation of the X-ray thickness measuring apparatus shown in FIG. 6 will be described. When the X-ray 2 emitted from the X-ray source 1 passes through the sheet-like object 3, a part of energy is absorbed. Since the detection signal at the X-ray detector 4 changes when the thickness of the sheet-like object 3 changes, by using a plurality of sheet-like objects whose thicknesses are known in advance, by measuring the detection signal in each case, A calibration curve 5 as shown in FIG. 7 can be obtained. If the calibration curve 5 is stored in a memory or the like in advance, the thickness of the sheet-like object 3 can be measured from the transmission amount (attenuation amount) of the X-ray 2 detected by the X-ray detector 4.

シート物理量測定装置の１つである、Ｘ線厚さ測定装置に関連する先行技術文献としては次のようなものがある。   Prior art documents related to an X-ray thickness measuring apparatus, which is one of sheet physical quantity measuring apparatuses, include the following.

特開２００６−２７５６０５号公報JP 2006-275605 A

図６の装置において、測定面積Ａｍ（シート状物体３上の、厚さが測定される測定領域の面積）はＸ線源１からの放射角度とＸ線検出器４の大きさ及びシート状物体３の位置により決定される。   In the apparatus of FIG. 6, the measurement area Am (the area of the measurement region where the thickness is measured on the sheet-like object 3) is the radiation angle from the X-ray source 1, the size of the X-ray detector 4, and the sheet-like object. 3 position.

測定サイドの要求として、シートの種類に応じて管理する面積を変えたい場合や、シートの幅方向分解能を変えたい（例えばエッジ部分の分解能を細かくしたい等）場合、シートの流れ方向を制御開始時は大きな面積で制御し、ある程度追い込んだあとは細かくさらに小さな変動を制御したい場合などがある。   When you want to change the area to be managed according to the type of sheet, or to change the resolution in the width direction of the sheet (for example, to reduce the resolution of the edge part) as a requirement on the measurement side, when you start controlling the sheet flow direction May be controlled with a large area, and after a certain amount of control, you may want to control finer and smaller fluctuations.

しかしながら、測定面積を変更する場合、従来は、Ｘ線源１又はＸ線検出器４近傍に、必要な測定面積に合わせたマスクを置いたり、大きさの異なるＸ線検出器４に組替えたりして実現しており、ハード的な変更なので変更が容易でなかった。特に、オンライン測定中に、シート状物体３の種類ごとの測定面積の変更や、シート状物体３の幅方向及び流れ方向での測定面積の変更は非常に難しかった。 However, when changing the measurement area, conventionally, a mask corresponding to the required measurement area is placed near the X-ray source 1 or the X-ray detector 4, or the X-ray detector 4 having a different size is rearranged. Because it is a hardware change, it was not easy to change. In particular, during online measurement, it was very difficult to change the measurement area for each type of the sheet-like object 3 and change the measurement area in the width direction and the flow direction of the sheet-like object 3.

また、セラミックコンデンサなどのように非常に小さな形状の厚さや形状の測定も従来の装置では容易ではなかった。 Further, it is not easy to measure the thickness and shape of a very small shape such as a ceramic capacitor with a conventional apparatus.

また、ブロック塗工のようにベースのＡ層にＢ層が部分的に塗工される場合に、各層や複数の層の厚さ測定を行うことも、従来の装置では容易ではなかった。 Further, when the B layer is partially applied to the base A layer as in block coating, it is not easy to measure the thickness of each layer or a plurality of layers.

本発明はこのような課題を解決しようとするもので、オンライン測定中等でも測定面積の変更が容易なシート厚さ測定装置を提供することを目的とする。   An object of the present invention is to provide a sheet thickness measuring apparatus in which the measurement area can be easily changed even during online measurement.

このような課題を達成するために、本発明のうち請求項１記載の発明は、
放射線源からシート状物体に出射された放射線の透過量を放射線検出器で検出し、前記シート状物体の物理量を測定するシート物理量測定装置において、
前記放射線検出器は１次元又は２次元のアレイ素子から構成され、
前記アレイ素子のうち前記シート状物体の測定領域に対応した素子から出力される検出信号を選択する選択手段
を備えたことを特徴とする。 In order to achieve such a problem, the invention according to claim 1 of the present invention is:
In a sheet physical quantity measuring apparatus for detecting a transmission amount of radiation emitted from a radiation source to a sheet-like object with a radiation detector and measuring a physical quantity of the sheet-like object,
The radiation detector is composed of a one-dimensional or two-dimensional array element,
Selection means for selecting a detection signal output from an element corresponding to the measurement region of the sheet-like object among the array elements is provided.

請求項２記載の発明は、
請求項１記載のシート物理量測定装置において、
前記アレイ素子の手前に前記シート状物体と対向して配設され、前記放射線のエネルギーの一部をカットするフィルタ
を備えたことを特徴とする。 The invention according to claim 2
In the sheet physical quantity measuring device according to claim 1,
A filter is provided in front of the array element so as to face the sheet-like object and cuts a part of the energy of the radiation.

請求項３記載の発明は、
請求項１記載のシート物理量測定装置において、
前記放射線源と対向して配設され、前記放射線のエネルギーの一部をカットするフィルタ
を備えたことを特徴とする。 The invention described in claim 3
In the sheet physical quantity measuring device according to claim 1,
A filter is provided opposite to the radiation source and cuts a part of the energy of the radiation.

請求項４記載の発明は、
請求項２又は請求項３記載のシート物理量測定装置において、
前記フィルタは透過波長の異なる複数のフィルタである
ことを特徴とする。 The invention according to claim 4
In the sheet physical quantity measuring device according to claim 2 or 3,
The filter is a plurality of filters having different transmission wavelengths.

請求項５記載の発明は、
請求項２記載のシート物理量測定装置において、
前記フィルタは蛍光発光物質からなり、前記シート状物体内の２次Ｘ線を出す物質の量を前記物理量とする
ことを特徴とする。 The invention according to claim 5
In the sheet physical quantity measuring device according to claim 2,
The filter is made of a fluorescent material, and an amount of a substance emitting secondary X-rays in the sheet-like object is the physical quantity.

請求項６記載の発明は、
請求項１乃至請求項５のいずれかに記載のシート物理量測定装置において、
前記放射線としてＸ線を用い、前記物理量を厚さとする
ことを特徴とする。 The invention described in claim 6
In the sheet physical quantity measuring device according to any one of claims 1 to 5,
X-rays are used as the radiation, and the physical quantity is a thickness.

請求項７記載の発明は、
請求項１乃至請求項５のいずれかに記載のシート物理量測定装置において、
前記放射線としてβ線を用い、前記物理量を厚さとする
ことを特徴とする。 The invention described in claim 7
In the sheet physical quantity measuring device according to any one of claims 1 to 5,
Β rays are used as the radiation, and the physical quantity is a thickness.

請求項８記載の発明は、
請求項１乃至請求項５のいずれかに記載のシート物理量測定装置において、
前記放射線を赤外線で置き換え、前記物理量を厚さとする
ことを特徴とする。 The invention described in claim 8
In the sheet physical quantity measuring device according to any one of claims 1 to 5,
The radiation is replaced with infrared rays, and the physical quantity is a thickness.

以上説明したことから明らかなように、本発明によれば、放射線源からシート状物体に出射された放射線の透過量を放射線検出器で検出し、前記シート状物体の物理量を測定するシート物理量測定装置において、前記放射線検出器は１次元又は２次元のアレイ素子から構成され、前記アレイ素子のうち前記シート状物体の測定領域に対応した素子から出力される検出信号を選択する選択手段を備えたことにより、オンライン測定中でも測定面積の変更が容易なシート厚さ測定装置を提供することができる。   As is apparent from the above description, according to the present invention, a sheet physical quantity measurement is performed in which a transmission amount of radiation emitted from a radiation source to a sheet-like object is detected by a radiation detector and the physical quantity of the sheet-like object is measured. In the apparatus, the radiation detector includes a one-dimensional or two-dimensional array element, and includes a selection unit that selects a detection signal output from an element corresponding to a measurement region of the sheet-like object among the array elements. Thus, it is possible to provide a sheet thickness measuring device in which the measurement area can be easily changed even during online measurement.

以下本発明の実施の形態について図面を用いて詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図１は本発明の実施の形態に係るシート物理量測定装置の一実施例で、シート厚さ測定装置を構成したものを示す構成説明図である。図６と同じ部分は同一の記号を付して、重複する説明は省略する。Ｘ線検出器１４はシート状物体３を透過したＸ線２を検出する２次元のアレイ素子で構成され、各素子から検出信号を取り出すことができる。ＣＰＵ６は、Ｘ線検出器１４を構成する２次元のアレイ素子のうち、シート状物体３の測定領域に対応した素子から出力される信号を選択する選択手段としての機能を有している。ＣＰＵ６はまた、素子１つ１つについて図７に示すような検量線データをメモリなどに備え、素子の検出信号を厚さ信号に変換する変換手段としての機能も有している。
なお、上記説明において、Ｘ線２は放射線を構成し、厚さは物理量を構成する。 FIG. 1 is an explanatory diagram showing a configuration of a sheet thickness measuring apparatus as an example of a sheet physical quantity measuring apparatus according to an embodiment of the present invention. The same parts as those in FIG. 6 are denoted by the same symbols, and redundant description is omitted. The X-ray detector 14 is constituted by a two-dimensional array element that detects X-rays 2 that have passed through the sheet-like object 3, and can detect a detection signal from each element. The CPU 6 has a function as a selection unit that selects a signal output from an element corresponding to the measurement region of the sheet-like object 3 among the two-dimensional array elements constituting the X-ray detector 14. The CPU 6 also has a function as conversion means for providing calibration curve data as shown in FIG. 7 for each element in a memory and converting the detection signal of the element into a thickness signal.
In the above description, the X-ray 2 constitutes radiation, and the thickness constitutes a physical quantity.

図１の装置の動作を次に説明する。Ｘ線２は、シート状物体３を透過する際に一部のエネルギーを吸収された後、Ｘ線検出器１４に入射する。Ｘ線検出器１４を構成する２次元アレイ素子の１つ１つの素子から出力された透過量信号は、ＣＰＵ６により、シート状物体３の測定領域に対応した素子の出力のみが選択され、選択された信号は予めメモリなどに記憶された検量線データに基づいて、シート状物体３の厚さ信号に変換される。   The operation of the apparatus of FIG. 1 will now be described. The X-ray 2 is incident on the X-ray detector 14 after being partially absorbed when passing through the sheet-like object 3. For the transmission amount signal output from each of the two-dimensional array elements constituting the X-ray detector 14, only the output of the element corresponding to the measurement region of the sheet-like object 3 is selected and selected by the CPU 6. The signal is converted into a thickness signal of the sheet-like object 3 based on calibration curve data stored in advance in a memory or the like.

上記のような構成のシート物理量測定装置によれば、ＣＰＵ６において測定領域の設定をソフト的に変更することにより、測定領域（測定面積）を容易に変更することができ、ハード的な変更を必要としないので、オンライン測定中の変更も容易である。したがって、シートの種類に応じて管理する面積を変えたい場合、シートの幅方向分解能を変えたい場合（例えばシートのエッジ部分の分解能を細かくしたい等）、シートの流れ方向を制御開始時は大きな面積で制御し、ある程度追い込んだあとは細かくさらに小さな変動を制御したい場合などにも容易に対応することができる。   According to the sheet physical quantity measuring device having the above-described configuration, the measurement region (measurement area) can be easily changed by changing the setting of the measurement region in the CPU 6 by software, and a hardware change is necessary. It is easy to make changes during online measurement. Therefore, when you want to change the area to be managed according to the type of sheet, or when you want to change the resolution in the width direction of the sheet (for example, to reduce the resolution of the edge portion of the sheet), when you start controlling the flow direction of the sheet, a large area It is possible to easily cope with a case where it is desired to control finer and smaller fluctuations after controlling to a certain extent.

なお、上記の実施例ではＸ線検出器１４として２次元のアレイ素子を用いたが、代わりに１次元アレイを用いてもよい。この場合、Ｘ線検出器１４を図１の紙面と垂直な方向に走査すれば、２次元アレイと同様の測定結果を得ることができる。   In the above embodiment, a two-dimensional array element is used as the X-ray detector 14, but a one-dimensional array may be used instead. In this case, if the X-ray detector 14 is scanned in a direction perpendicular to the paper surface of FIG. 1, a measurement result similar to the two-dimensional array can be obtained.

図２は、上記実施例の一応用例で、図１の装置を小さな測定対象の厚さや形状の測定に適用する場合を示す動作説明図である。図１と同じ部分は同一の記号を付して重複する説明は省略する。図２において、測定対象７はシート状物体１３上に形成されたセラミックコンデンサであり、選択素子８はＸ線源１から出射されたＸ線２のうち、測定対象７を透過した部分によって照射される部分の２次元アレイ素子である。厚さ測定の場合、図１のＣＰＵ６は、Ｘ線検出器１４を構成する２次元アレイ素子のうち、選択素子８から出力される透過量信号を選択し、それらを厚さ信号に変換する。その結果、ＣＰＵ６からセラミックコンデンサの各部分についての厚さ信号が出力される。形状測定の場合は、ＣＰＵ６は２次元アレイ素子のどの部分に信号変化があるかを特定する。 FIG. 2 is an operation explanatory diagram showing a case where the apparatus of FIG. 1 is applied to the measurement of the thickness and shape of a small measurement object as an application example of the above embodiment. The same parts as those in FIG. 1 are denoted by the same symbols, and redundant description is omitted. In FIG. 2, the measurement target 7 is a ceramic capacitor formed on the sheet-like object 13, and the selection element 8 is irradiated by the portion of the X-ray 2 emitted from the X-ray source 1 that has passed through the measurement target 7. Part of the two-dimensional array element. In the case of thickness measurement, the CPU 6 in FIG. 1 selects a transmission amount signal output from the selection element 8 from the two-dimensional array elements constituting the X-ray detector 14 and converts them into a thickness signal. As a result, the CPU 6 outputs a thickness signal for each portion of the ceramic capacitor. In the case of shape measurement, the CPU 6 specifies which part of the two-dimensional array element has a signal change.

なお、上記の説明で、測定対象７が占める領域は測定領域を構成し、選択素子８はシート状物体の測定領域に対応した素子を構成する。また、測定面積は測定領域の面積である。 In the above description, the area occupied by the measurement object 7 constitutes a measurement area, and the selection element 8 constitutes an element corresponding to the measurement area of the sheet-like object. The measurement area is the area of the measurement region.

上記の応用例によれば、シート状物体上の小さな形状部分の厚さや形状などを測定することができる。すなわち、セラミックコンデンサなどのように非常に小さな物質を測定する場合は、その大きさに合わせてアレイ素子の全部又は一部の出力のみを利用することで実現することができる。また、一度に複数の小さな測定対象からのＸ線透過信号が２次元アレイ素子に到達している場合には、同時に複数個の測定対象について厚さや形状などの処理が可能になる。 According to the application example described above, it is possible to measure the thickness and shape of a small shape portion on a sheet-like object. That is, when a very small substance such as a ceramic capacitor is measured, it can be realized by using only the output of all or part of the array element in accordance with the size. In addition, when X-ray transmission signals from a plurality of small measurement objects reach the two-dimensional array element at a time, processing such as thickness and shape can be performed on the plurality of measurement objects at the same time.

図３は、上記実施例の第２の応用例で、図１の装置を複数層の厚さ測定に適用する場合を示す構成説明図である。図１と同じ部分は同一の記号を付して重複する説明は省略する。図３において、シート状物体２３はＡ層（ベース層）の上にＢ層（ブロック）を部分的にブロック塗工したものである。Ｘ線検出器１４を構成する２次元アレイ素子の素子１〜７のうち、素子１と素子７はＡ層の厚さと関係する検出信号群ＳＡを出力し、素子２〜６はＡ層＋Ｂ層の厚さと関係する検出信号群ＳＡＢを出力する。したがって、図１のＣＰＵ６により、上記の各素子を順次選択し、その結果得た信号群ＳＡ及び信号群ＳＡＢに基づいて演算することにより、Ｂ層の厚さと関係する信号群ＳＢを得ることができる。 FIG. 3 is a structural explanatory diagram showing a case where the apparatus shown in FIG. The same parts as those in FIG. 1 are denoted by the same symbols, and redundant description is omitted. In FIG. 3, a sheet-like object 23 is obtained by partially applying a B layer (block) on an A layer (base layer). Of X-ray detector 14 element two-dimensional array elements constituting the 1-7 element 1 and the element 7 outputs a detection signal group S A related to the thickness of the A layer, element 2-6 A layer + B A detection signal group S AB related to the layer thickness is output. Accordingly, the CPU 6 in FIG. 1 sequentially selects each of the above-described elements, and calculates the signal group S B related to the thickness of the B layer by calculating based on the signal group S A and the signal group S AB obtained as a result. Obtainable.

上記の応用例によれば、ブロック塗工のような場合についても、複数個のブロックについての層厚さ測定を同時に行うことができる。また、Ａ層、Ｂ層、Ａ層＋Ｂ層の３種類の厚さを同時に測定することができる。 According to said application example, also in the case of block coating, the layer thickness measurement about a some block can be performed simultaneously. Moreover, three types of thicknesses of A layer, B layer, and A layer + B layer can be measured simultaneously.

図４は本発明の実施の形態に係るシート物理量測定装置の第２の実施例で、図１の装置にフィルタを設けた場合を示す構成説明図である。図１と同じ部分は同一の記号を付して、重複する説明は省略する。フィルタ９はＸ線検出器１４を構成する２次元アレイ素子の手前にシート状物体３と対向して配設され、透過したＸ線２のエネルギーの一部をカットする。なお、Ｘ線検出器１４は、その窓部に前記フィルタ９を配設できる構造となっている。ここで、フィルタ９の構造、形状、エネルギー減衰領域、蛍光発光波長帯などは自由に選択できるものとする。   FIG. 4 is a structural explanatory diagram showing a case where a filter is provided in the apparatus of FIG. 1 as a second example of the sheet physical quantity measuring apparatus according to the embodiment of the present invention. The same parts as those in FIG. 1 are denoted by the same symbols, and redundant description is omitted. The filter 9 is disposed in front of the two-dimensional array element constituting the X-ray detector 14 so as to face the sheet-like object 3 and cuts a part of the energy of the transmitted X-ray 2. The X-ray detector 14 has a structure in which the filter 9 can be disposed in the window portion. Here, the structure, shape, energy attenuation region, fluorescence emission wavelength band, and the like of the filter 9 can be freely selected.

このような構成のシート物理量測定装置によれば、図１の実施例の場合と同様の特長を有するほか、シート状物体３について、フィルタ９のエネルギー減衰領域に対応した任意の波長帯の透過Ｘ線のみを検出することができる。   According to the sheet physical quantity measuring apparatus having such a configuration, in addition to the same features as in the embodiment of FIG. 1, the sheet-like object 3 has a transmission X in an arbitrary wavelength band corresponding to the energy attenuation region of the filter 9. Only lines can be detected.

また、フィルタ９として透過波長の異なる複数のフィルタを配列すれば、Ｘ線検出器１４がシート状物体３上を順次走査することにより、シート状物体３についてスペクトルの測定を行うことができる。   If a plurality of filters having different transmission wavelengths are arranged as the filter 9, the X-ray detector 14 sequentially scans the sheet-like object 3, whereby the spectrum of the sheet-like object 3 can be measured.

また、フィルタ９の減衰特性を適切に選ぶことにより、透過量の大きいものと微小なものなど、吸収感度の異なる成分を、同時測定することができる。   In addition, by appropriately selecting the attenuation characteristics of the filter 9, components having different absorption sensitivities such as a transmission amount and a minute amount can be simultaneously measured.

また、蛍光発光物質を前記フィルタ９に用いることにより、シート状物体３から出射される２次Ｘ線を検出することができるので、シート状物体３に含まれる２次Ｘ線を出す物質の量を測定することができる。   In addition, since a secondary X-ray emitted from the sheet-like object 3 can be detected by using a fluorescent light-emitting substance for the filter 9, the amount of the substance that emits the secondary X-ray contained in the sheet-like object 3 Can be measured.

図５は本発明の実施の形態に係るシート物理量測定装置の第３の実施例で、図３の装置にフィルタを設けた場合を示す構成説明図である。図３と同じ部分は同一の記号を付して、重複する説明は省略する。フィルタ１９はＸ線源１と対向して配設され、Ｘ線２のエネルギーの一部をカットする。ブロック塗工などのように、予め測定対象であるＢ層３２（ブロック）の位置が分かっている場合は、Ｘ線源１側にフィルタを配置することができる。   FIG. 5 is a structural explanatory diagram showing a case where a filter is provided in the apparatus of FIG. 3 in a third example of the sheet physical quantity measuring apparatus according to the embodiment of the present invention. The same parts as those in FIG. 3 are denoted by the same symbols, and redundant description is omitted. The filter 19 is disposed facing the X-ray source 1 and cuts a part of the energy of the X-ray 2. When the position of the B layer 32 (block) to be measured is known in advance such as block coating, a filter can be disposed on the X-ray source 1 side.

このような構成のシート物理量測定装置によれば、２次Ｘ線検出を除き、図４の実施例の場合と同様の特長を有する。 The sheet physical quantity measuring apparatus having such a configuration has the same features as the embodiment of FIG. 4 except for secondary X-ray detection.

なお、上記の各実施例において、線源としては、透過量に基づいてシート状物体の厚さを測定することができる任意の放射線を用いることができ、例えばＸ線の代わりにβ線を用いてβ線厚さ計を構成してもよい。また、放射線の代わりに例えば赤外線のような電磁波を用いて赤外線厚さ計を構成してもよい。 In each of the above embodiments, any radiation that can measure the thickness of a sheet-like object based on the amount of transmission can be used as the radiation source. For example, β rays are used instead of X rays. A β-ray thickness meter may be configured. Moreover, you may comprise an infrared thickness meter using electromagnetic waves like infrared rays, for example instead of a radiation.

また、測定される物理量は厚さに限らず、Ｘ線を用いて灰分率（％）を測定する灰分計、Ｘ線，β線，赤外線を用いて坪量（ｇ／ｍ２）を測定する坪量計、赤外線を用いて水分量を測定する水分計などにも適用することもできる。 The physical quantity to be measured is not limited to the thickness, and the basis weight (g / m 2 ) is measured using an ash meter that measures the ash content (%) using X-rays, X-rays, β-rays, and infrared rays. The present invention can also be applied to a gravimetric meter, a moisture meter that measures moisture content using infrared rays, and the like.

本発明の実施の形態に係るシート物理量測定装置の一実施例を示す構成説明図である。It is a configuration explanatory view showing an example of a sheet physical quantity measuring device according to an embodiment of the present invention. 上記実施例の一応用例を示す動作説明図である。It is operation | movement explanatory drawing which shows the example of 1 application of the said Example. 上記実施例の第２の応用例を示す構成説明図である。It is structure explanatory drawing which shows the 2nd application example of the said Example. 本発明の実施の形態に係るシート物理量測定装置の第２の実施例を示す構成説明図である。It is composition explanatory drawing which shows the 2nd Example of the sheet | seat physical quantity measuring device which concerns on embodiment of this invention. 本発明の実施の形態に係るシート物理量測定装置の第３の実施例を示す構成説明図である。It is composition explanatory drawing which shows the 3rd Example of the sheet | seat physical quantity measuring device which concerns on embodiment of this invention. シート物理量測定装置の従来例を示す構成説明図である。It is a structure explanatory view showing a conventional example of a sheet physical quantity measuring device. 従来装置の検量線を示すチャートである。It is a chart which shows the calibration curve of a conventional apparatus.

符号の説明Explanation of symbols

１ 放射線源
２ 放射線
３ シート状物体
６ 選択手段
７ 測定領域
９，１９ フィルタ
１４ 放射線検出器 DESCRIPTION OF SYMBOLS 1 Radiation source 2 Radiation 3 Sheet-like object 6 Selection means 7 Measurement area | region 9, 19 Filter 14 Radiation detector

Claims (8)

放射線源からシート状物体に出射された放射線の透過量を放射線検出器で検出し、前記シート状物体の物理量を測定するシート物理量測定装置において、
前記放射線検出器は１次元又は２次元のアレイ素子から構成され、
前記アレイ素子のうち前記シート状物体の測定領域に対応した素子から出力される検出信号を選択する選択手段
を備えたことを特徴とするシート物理量測定装置。 In a sheet physical quantity measuring apparatus for detecting a transmission amount of radiation emitted from a radiation source to a sheet-like object with a radiation detector and measuring a physical quantity of the sheet-like object,
The radiation detector is composed of a one-dimensional or two-dimensional array element,
A sheet physical quantity measuring apparatus comprising: a selecting unit that selects a detection signal output from an element corresponding to a measurement region of the sheet-like object among the array elements. 前記アレイ素子の手前に前記シート状物体と対向して配設され、前記放射線のエネルギーの一部をカットするフィルタ
を備えたことを特徴とする請求項１記載のシート物理量測定装置。 2. The sheet physical quantity measuring apparatus according to claim 1, further comprising a filter disposed in front of the array element so as to face the sheet-like object and cutting a part of the energy of the radiation. 前記放射線源と対向して配設され、前記放射線のエネルギーの一部をカットするフィルタ
を備えたことを特徴とする請求項１記載のシート物理量測定装置。 The sheet physical quantity measuring device according to claim 1, further comprising a filter that is disposed to face the radiation source and cuts a part of the energy of the radiation. 前記フィルタは透過波長の異なる複数のフィルタである
ことを特徴とする請求項２又は請求項３記載のシート物理量測定装置。 The sheet physical quantity measuring device according to claim 2 or 3, wherein the filter is a plurality of filters having different transmission wavelengths. 前記フィルタは蛍光発光物質からなり、前記シート状物体内の２次Ｘ線を出す物質の量を前記物理量とする
ことを特徴とする請求項２記載のシート物理量測定装置。 3. The sheet physical quantity measuring apparatus according to claim 2, wherein the filter is made of a fluorescent light emitting material, and an amount of a substance emitting secondary X-rays in the sheet-like object is set as the physical quantity. 前記放射線としてＸ線を用い、前記物理量を厚さとする
ことを特徴とする請求項１乃至請求項５のいずれかに記載のシート物理量測定装置。 6. The sheet physical quantity measuring apparatus according to claim 1, wherein X-ray is used as the radiation and the physical quantity is a thickness. 前記放射線としてβ線を用い、前記物理量を厚さとする
ことを特徴とする請求項１乃至請求項５のいずれかに記載のシート物理量測定装置。 The sheet physical quantity measuring device according to claim 1, wherein β-rays are used as the radiation, and the physical quantity is a thickness. 前記放射線を赤外線で置き換え、前記物理量を厚さとする
ことを特徴とする請求項１乃至請求項５のいずれかに記載のシート物理量測定装置。 6. The sheet physical quantity measuring apparatus according to claim 1, wherein the radiation is replaced with infrared rays, and the physical quantity is set to a thickness.
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TWI588446B (en) * 2013-03-14 2017-06-21 Tokyo Electron Ltd X-ray non-destructive inspection device

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