JP2008264961A - Surface coated cutting tool - Google Patents
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この発明は、特に鋼、ステンレス鋼および鋳鉄などのターニングまたはミーリング加工を、高熱発生を伴い、繰り返しの大きな衝撃力とともに高負荷がかかる高速高送り断続切削条件で行った場合であっても、チッピング、欠損、層間剥離等を生じないすぐれた工具特性を備えた表面被覆切削工具（以下、被覆工具という）に関するものである。 This invention is particularly suitable for turning or milling of steel, stainless steel and cast iron, even when it is performed under high-speed, high-feed, intermittent cutting conditions with high heat generation and high loads with repeated large impact forces. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) having excellent tool characteristics that do not cause chipping or delamination.
従来、炭化タングステン基（ＷＣ基）超硬合金または炭窒化チタン基（ＴｉＣＮ基）サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、ＴｉＮＯ層、ＴｉＣＮＯ層のうちの１種または２種以上のＴｉ化合物層からなる下部層と、Ａｌ２Ｏ３層からなる上部層とで構成された硬質被覆層を３〜２０μｍの平均層厚で蒸着形成してなる被覆工具において、
上記Ｔｉ化合物層とＡｌ２Ｏ３層の間に、Ｔｉ２Ｏ３相とＴｉＣＯ相との混合相（以下、Ｔｉ２Ｏ３−ＴｉＣＯ混合相という）、あるいは、Ｔｉ２Ｏ３相とＴｉＣＮＯ相との混合相（以下、Ｔｉ２Ｏ３−ＴｉＣＮＯ混合相という）を中間層として介在させた被覆工具が知られており、そして、この被覆工具を、鋼や鋳鉄の断続重切削加工に用いた場合に、硬質被覆層がすぐれた耐欠損性を示すことが知られている。
Conventionally, a TiC layer, a TiN layer, a TiCN layer are formed on the surface of a substrate (hereinafter, collectively referred to as a tool substrate) made of a tungsten carbide group (WC group) cemented carbide or a titanium carbonitride group (TiCN group) cermet. 3 to 20 μm of a hard coating layer composed of a lower layer made of one or two or more Ti compound layers of a layer, a TiCO layer, a TiNO layer, and a TiCNO layer and an upper layer made of an Al 2 O 3 layer In the coated tool formed by vapor deposition with an average layer thickness of
Between the Ti compound layer and the Al 2 O 3 layer, a mixed phase of a Ti 2 O 3 phase and a TiCO phase (hereinafter referred to as a Ti 2 O 3 -TiCO mixed phase), or a Ti 2 O 3 phase and a TiCNO phase mixed phase (hereinafter, Ti 2 O 3 that -TiCNO mixed phase) are known coated tool is interposed as an intermediate layer, and, the coated tool, was used intermittently heavy cutting of steel and cast iron In some cases, it is known that the hard coating layer exhibits excellent fracture resistance.
また、上記ＴｉＣＮ層については、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度領域で蒸着することにより、縦長成長結晶組織を有するＴｉＣＮ層（以下、ｌ−ＴｉＣＮ層で示す）を形成することも知られている。
近年の切削加工の省力化および省エネ化に対する要求は強く、これに伴い、連続切削はもとより断続切削においても加工条件は一段と高速化の傾向にあるが、上記のごとき従来被覆工具において、これを鋼や鋳鉄などの通常条件での連続切削、断続切削に用いた場合には問題ないが、これを高熱発生を伴い、かつ、切刃に対して繰り返し大きな衝撃力が作用するとともに高負荷がかかる高速高送り断続切削加工に用いた場合には、Ａｌ２Ｏ３層からなる上部層、混合相からなる中間層、Ｔｉ化合物層からなる下部層の各層の層間密着強度が十分ではないため、硬質被覆層がチッピング、欠損、層間剥離等を起こしやすく、比較的短時間で使用寿命に至るのが現状である。 In recent years, there has been a strong demand for labor saving and energy saving in cutting work, and in connection with this, the cutting conditions have been on the trend of higher speed not only in continuous cutting but also in intermittent cutting. There is no problem when it is used for continuous cutting and interrupted cutting under normal conditions such as cast iron and cast iron, but this is accompanied by high heat generation, and a large impact force is repeatedly applied to the cutting edge and high load is applied. When used for high-feed intermittent cutting, the interlayer adhesion strength of each of the upper layer made of Al 2 O 3 layer, the intermediate layer made of mixed phase, and the lower layer made of Ti compound layer is not sufficient. The current situation is that the layer tends to cause chipping, chipping, delamination and the like, and reaches the service life in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記従来被覆工具の硬質被覆層の高速高送り断続切削条件下における耐チッピング性、耐欠損性、耐層間剥離性の向上を図るべく、中間層を構成する材質とその構造に着目し研究を行った結果、
（ａ）例えば、上記従来被覆工具の中間層を構成するＴｉ２Ｏ３−ＴｉＣＯ混合相は、通常の化学蒸着装置にて、
反応ガス組成（容量％）：
ＴｉＣｌ４：０．５〜１０％、
ＣＯ２：０．１〜２％、
ＣＯ：０．５〜１０％、
ＣＨ４：０．５〜１０％、
必要に応じて、ＨＣｌ：０．１〜１％、
Ｈ2またはＨ2＋Ａｒ：残り（但し、Ａｒ含有の場合は、全体に占める割合で１０〜５０％）、
反応雰囲気温度：８５０〜１１００℃、
反応雰囲気圧力：６〜５０ｋＰａ、
の条件で化学蒸着することにより形成することができ、
また、同じく、上記従来被覆工具の中間層を構成するＴｉ２Ｏ３−ＴｉＣＮＯ混合相は、通常の化学蒸着装置にて、
反応ガス組成（容量％）：
ＴｉＣｌ４：０．５〜１０％、
ＣＯ２：０．１〜２％、
ＣＯ：０．２〜８％、
Ｎ２：２０〜５０％、
ＣＨ４：０．５〜２．５％、
必要に応じて、ＨＣｌ：０．１〜１％、
Ｈ2またはＨ2＋Ａｒ：残り（但し、Ａｒ含有の場合は、全体に占める割合で５〜２０％）、
反応雰囲気温度：８５０〜１１００℃、
反応雰囲気圧力：６〜５０ｋＰａ、
の条件で化学蒸着することにより形成することができるが、すでに述べたように、上記Ｔｉ２Ｏ３−ＴｉＣＯ混合相、あるいは、上記Ｔｉ２Ｏ３−ＴｉＣＮＯ混合相を、硬質被覆層の中間層とした場合には、高熱発生を伴い、切刃に繰り返し大きな衝撃力が作用するとともに高負荷がかかる高速高送り断続切削加工においては、Ａｌ２Ｏ３層からなる上部層、あるいは、Ｔｉ化合物層からなる下部層との層間密着強度が十分ではないため、チッピング、欠損、層間剥離等を起こしやすこと。
Therefore, from the above viewpoint, the present inventors aim to improve chipping resistance, fracture resistance, and delamination resistance under the high-speed and high-feed intermittent cutting conditions of the hard coating layer of the conventional coated tool. As a result of conducting research focusing on the materials and structures that make up the intermediate layer,
(A) For example, the Ti 2 O 3 —TiCO mixed phase constituting the intermediate layer of the conventional coated tool is a normal chemical vapor deposition apparatus,
Reaction gas composition (volume%):
TiCl 4: 0.5~10%,
CO 2 : 0.1 to 2 %,
CO: 0.5-10%
CH 4: 0.5~10%,
HCl: 0.1 to 1%, if necessary
H 2 or H 2 + Ar: remaining (however, in the case of containing Ar, 10 to 50% of the total)
Reaction atmosphere temperature: 850 to 1100 ° C.
Reaction atmosphere pressure: 6-50 kPa,
It can be formed by chemical vapor deposition under the conditions of
Similarly, the Ti 2 O 3 —TiCNO mixed phase constituting the intermediate layer of the above-mentioned conventional coated tool is obtained by a normal chemical vapor deposition apparatus.
Reaction gas composition (volume%):
TiCl 4: 0.5~10%,
CO 2 : 0.1 to 2 %,
CO: 0.2-8%
N 2: 20~50%,
CH 4: 0.5~2.5%,
HCl: 0.1 to 1%, if necessary
H 2 or H 2 + Ar: remaining (however, in the case of containing Ar, 5 to 20% of the total),
Reaction atmosphere temperature: 850 to 1100 ° C.
Reaction atmosphere pressure: 6-50 kPa,
However, as described above, the Ti 2 O 3 —TiCO mixed phase or the Ti 2 O 3 —TiCNO mixed phase is used as the intermediate layer of the hard coating layer. In the case of high-speed, high-feed, intermittent cutting, in which high impact is repeatedly applied to the cutting edge and high load is applied, accompanied by generation of high heat, an upper layer made of an Al 2 O 3 layer or a Ti compound layer Since the interlayer adhesion strength with the lower layer made of is insufficient, chipping, chipping, delamination, etc. are caused.
（ｂ）そこで、上記Ｔｉ２Ｏ３−ＴｉＣＯ混合相、あるいは、上記Ｔｉ２Ｏ３−ＴｉＣＮＯ混合相の化学蒸着条件において、上記反応ガス中にＣｒＣｌ３を０．０２〜１容量％の割合で添加して蒸着を行うと、Ｔｉ２Ｏ３−ＴｉＣＯ混合相、あるいは、上記Ｔｉ２Ｏ３−ＴｉＣＮＯ混合相の代わりに、ＴｉとＣｒの複合酸化物（Ｔｉ，Ｃｒ）２Ｏ３相とＴｉＣＯのＴｉの少なくとも一部をＣｒで置換したチタンとクロムの複合炭酸化物（以下、Ｔｉ（Ｃｒ）ＣＯで示す）相との混合相（以下、（Ｔｉ，Ｃｒ）／ＣＯ混合相で示す）、あるいは、ＴｉとＣｒの複合酸化物（Ｔｉ，Ｃｒ）２Ｏ３相とＴｉＣＮＯのＴｉの少なくとも一部をＣｒで置換したチタンとクロムの複合炭窒酸化物（以下、Ｔｉ（Ｃｒ）ＣＮＯで示す）相との混合相（以下、（Ｔｉ，Ｃｒ）／ＣＮＯ混合相で示す）が蒸着形成され、
この結果形成された（Ｔｉ，Ｃｒ）／ＣＯ混合相、あるいは、（Ｔｉ，Ｃｒ）／ＣＮＯ混合相には、ＣｒがＴｉとの合量に占める割合で１〜１０原子％の割合で含有されること。
(B) Therefore, in the chemical vapor deposition conditions of the Ti 2 O 3 —TiCO mixed phase or the Ti 2 O 3 —TiCNO mixed phase, CrCl 3 is contained in the reaction gas in a ratio of 0.02 to 1% by volume. When added and vapor deposition is performed, instead of the Ti 2 O 3 —TiCO mixed phase or the Ti 2 O 3 —TiCNO mixed phase, a composite oxide of Ti and Cr (Ti, Cr) 2 O 3 phase and TiCO A mixed phase (hereinafter referred to as a (Ti, Cr) / CO mixed phase) of a composite carbonate of titanium and chromium (hereinafter referred to as Ti (Cr) CO) in which at least a part of Ti is substituted with Cr, Alternatively, a composite oxycarbonitride of titanium and chromium (hereinafter referred to as Ti (Cr) CNO) in which at least part of Ti of Ti and Cr composite oxide (Ti, Cr) 2 O 3 phase and TiCNO is replaced with Cr. ) Phase and Mixed phase (hereinafter, (Ti, Cr) / CNO shown by mixed phase) is deposited formed,
The resulting (Ti, Cr) / CO mixed phase or (Ti, Cr) / CNO mixed phase formed as a result contains Cr at a ratio of 1 to 10 atomic% in the total amount with Ti. That.
（ｃ）上記の（Ｔｉ，Ｃｒ）／ＣＯ混合相、あるいは、（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層は、層中のＣｒ成分によってすぐれた高温強度を示すとともに、Ｔｉ化合物層からなる下部層およびＡｌ２Ｏ３層からなる上部層のいずれに対しても極めて高い層間密着強度を示すことから、高熱発生を伴い、かつ、切刃に繰り返し大きな衝撃力が作用するとともに高負荷がかかる高速高送り断続切削加工においても、（Ｔｉ，Ｃｒ）／ＣＯ混合相、あるいは、（Ｔｉ，Ｃｒ）／ＣＮＯ混合相を硬質被覆層の中間層として設けた被覆工具は、チッピング、欠損、層間剥離等を生じることなく長期に亘ってすぐれた工具特性を発揮すること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) The intermediate layer composed of the above (Ti, Cr) / CO mixed phase or (Ti, Cr) / CNO mixed phase exhibits excellent high temperature strength due to the Cr component in the layer, and from the Ti compound layer. Since the interlaminar adhesion strength is extremely high for both the lower layer and the upper layer composed of the Al 2 O 3 layer, high heat generation occurs, and a large impact force acts repeatedly on the cutting blade and a high load is applied. Even in such a high-speed, high-feed intermittent cutting process, a coated tool provided with a (Ti, Cr) / CO mixed phase or (Ti, Cr) / CNO mixed phase as an intermediate layer of a hard coating layer has chipping, chipping, Demonstrate excellent tool characteristics for a long time without causing peeling.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、
「（１） ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）２〜１５μｍの合計平均層厚を有し、かつ、炭化チタン（ＴｉＣ）層、窒化チタン（ＴｉＮ）層および炭窒化チタン（ＴｉＣＮ）層のうちから選ばれる１層または２層以上のＴｉ系化合物層からなる下部層、
（ｂ）０．１〜２μｍの平均層厚を有し、チタンとクロムの複合酸化物（（Ｔｉ，Ｃｒ）２Ｏ３）相と、炭酸化チタン（ＴｉＣＯ）に含有されるチタン（Ｔｉ）の少なくとも一部をクロム（Ｃｒ）で置換したチタンとクロムの複合炭酸化物（Ｔｉ（Ｃｒ）ＣＯ）相との混合相（（Ｔｉ，Ｃｒ）／ＣＯ混合相）からなる中間層、
（ｃ）０．５〜１０μｍの平均層厚を有する酸化アルミニウム（Ａｌ２Ｏ３）層からなる上部層、
を蒸着形成したことを特徴とする表面被覆切削工具（被覆工具）。
（２） ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）２〜１５μｍの合計平均層厚を有し、かつ、炭化チタン（ＴｉＣ）層、窒化チタン（ＴｉＮ）層および炭窒化チタン（ＴｉＣＮ）層のうちから選ばれる１層または２層以上のＴｉ系化合物層からなる下部層、
（ｂ）０．１〜２μｍの平均層厚を有し、チタンとクロムの複合酸化物（（Ｔｉ，Ｃｒ）２Ｏ３）相と、炭窒酸化チタン（ＴｉＣＮＯ）に含有されるチタン（Ｔｉ）の少なくとも一部をクロム（Ｃｒ）で置換したチタンとクロムの複合炭窒酸化物（Ｔｉ（Ｃｒ）ＣＮＯ）相との混合相（（Ｔｉ，Ｃｒ）／ＣＮＯ混合相）からなる中間層、
（ｃ）０．５〜１０μｍの平均層厚を有する酸化アルミニウム（Ａｌ２Ｏ３）層からなる上部層、
を蒸着形成したことを特徴とする表面被覆切削工具（被覆工具）。」
に特徴を有するものである。
This invention was made based on the above research results,
“(1) On the surface of a tool base made of WC-based cemented carbide or TiCN-based cermet,
(A) having a total average layer thickness of 2 to 15 μm, and one or more layers selected from a titanium carbide (TiC) layer, a titanium nitride (TiN) layer, and a titanium carbonitride (TiCN) layer A lower layer composed of a Ti-based compound layer,
(B) Titanium (Ti) having an average layer thickness of 0.1 to 2 μm and contained in a titanium-chromium composite oxide ((Ti, Cr) 2 O 3 ) phase and titanium carbonate (TiCO) An intermediate layer composed of a mixed phase ((Ti, Cr) / CO mixed phase) of titanium and chromium composite carbonate (Ti (Cr) CO) phase, at least a part of which is replaced with chromium (Cr),
(C) an upper layer comprising an aluminum oxide (Al 2 O 3 ) layer having an average layer thickness of 0.5 to 10 μm,
A surface-coated cutting tool (coated tool) characterized in that is formed by vapor deposition.
(2) On the surface of the tool base composed of WC-based cemented carbide or TiCN-based cermet,
(A) having a total average layer thickness of 2 to 15 μm, and one or more layers selected from a titanium carbide (TiC) layer, a titanium nitride (TiN) layer, and a titanium carbonitride (TiCN) layer A lower layer composed of a Ti-based compound layer,
(B) Titanium (Ti) having an average layer thickness of 0.1 to 2 μm and contained in a composite oxide ((Ti, Cr) 2 O 3 ) phase of titanium and chromium and titanium carbonitride oxide (TiCNO) ), An intermediate layer composed of a mixed phase ((Ti, Cr) / CNO mixed phase) of titanium and chromium composite oxynitride (Ti (Cr) CNO) phase, in which at least a part of it is replaced with chromium (Cr),
(C) an upper layer comprising an aluminum oxide (Al 2 O 3 ) layer having an average layer thickness of 0.5 to 10 μm,
A surface-coated cutting tool (coated tool) characterized in that is formed by vapor deposition. "
It has the characteristics.
この発明の被覆工具の硬質被覆層の構成層について、上記の通りに限定した理由を以下に説明する。 The reason why the constituent layers of the hard coating layer of the coated tool of the present invention are limited as described above will be described below.
(ａ)下部層
２〜１５μｍの合計平均層厚を有し、かつ、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層のうちから選ばれる１層または２層以上のＴｉ系化合物層からなる下部層は、高い高温硬さを有するので、工具基体表面と前記（Ｔｉ，Ｃｒ）／ＣＯ混合相あるいは（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層との間に介在させることによって耐摩耗性を向上させることができるが、その合計平均層厚が２μｍ未満では、耐摩耗性向上効果を期待することはできす、一方、１５μｍを超えると高速断続切削においてチッピングなどの異常損傷が発生しやすくなることか、その合計平均層厚を２〜１５μｍとした。
(a) Lower layer A lower layer having a total average layer thickness of 2 to 15 μm and comprising one or two or more Ti-based compound layers selected from a TiC layer, a TiN layer, and a TiCN layer is high. Since it has high temperature hardness, wear resistance is improved by interposing between the tool base surface and the intermediate layer made of the (Ti, Cr) / CO mixed phase or (Ti, Cr) / CNO mixed phase. However, if the total average layer thickness is less than 2 μm, the effect of improving wear resistance can be expected, whereas if it exceeds 15 μm, abnormal damage such as chipping is likely to occur in high-speed intermittent cutting, The total average layer thickness was 2 to 15 μm.
（ｂ）中間層
チタンとクロムの複合酸化物（（Ｔｉ，Ｃｒ）２Ｏ３）相と、炭酸化チタン（ＴｉＣＯ）に含有されるチタン（Ｔｉ）の少なくとも一部をクロム（Ｃｒ）で置換したチタンとクロムの複合炭酸化物（Ｔｉ（Ｃｒ）ＣＯ）相との混合相（（Ｔｉ，Ｃｒ）／ＣＯ混合相）からなる中間層は、層中にＣｒ成分が含有されることによって、すぐれた高温強度を示すようになり、また、Ｔｉ化合物層からなる下部層およびＡｌ２Ｏ３層からなる上部層のいずれに対しても極めて高い層間密着強度を示すが、（Ｔｉ，Ｃｒ）／ＣＯ混合相全体におけるＴｉとの合量に占めるＣｒの含有割合（Ｃｒ／（Ｔｉ＋Ｃｒ）、ただし、原子比）が０．０１未満では、中間層自体の高温強度の改善効果は少なく、一方、Ｃｒ／（Ｔｉ＋Ｃｒ）の値が０．１を超えると、下部層であるＴｉ化合物層との付着強度が低下することから、（Ｔｉ，Ｃｒ）／ＣＯ混合相からなる中間層全体における、Ｔｉとの合量に占めるＣｒの含有割合（Ｃｒ／（Ｔｉ＋Ｃｒ）、ただし、原子比）は、０．０１〜０．１であることが望ましい。
また、硬質被覆層の中間層を、チタンとクロムの複合酸化物（（Ｔｉ，Ｃｒ）２Ｏ３）相と、炭窒酸化チタン（ＴｉＣＮＯ）に含有されるチタン（Ｔｉ）の少なくとも一部をクロム（Ｃｒ）で置換したチタンとクロムの複合炭窒酸化物（Ｔｉ（Ｃｒ）ＣＮＯ）相との混合相（（Ｔｉ，Ｃｒ）／ＣＮＯ混合相）で構成した場合にも、前記と同様、中間層自体の高温強度の改善効果および下部層との付着強度低下防止の点から、（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層全体における、Ｔｉとの合量に占めるＣｒの含有割合（Ｃｒ／（Ｔｉ＋Ｃｒ）、ただし、原子比）は、０．０１〜０．１であることが望ましい。
さらに、中間層の層厚が０．１μｍ未満では、層間密着性の向上効果および中間層自体の高温強度向上効果を期待できず、一方、層厚が２μｍを超えると耐摩耗性が低下することから、（Ｔｉ，Ｃｒ）／ＣＯ混合相あるいは（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層の層厚を０．１〜２μｍと定めた。
なお、中間層における（Ｔｉ，Ｃｒ）２Ｏ３相と、ＴｉＣＯ相またはＴｉ（Ｃｒ）ＣＯ相との構成比については、（Ｔｉ，Ｃｒ）２Ｏ３相と、Ｔｉ（Ｃｒ）ＣＯ相の合計面積に対して（Ｔｉ，Ｃｒ）２Ｏ３相の面積割合が５面積％未満では中間層の層間密着性向上効果および中間層自体の高温強度向上効果が少なく、一方、（Ｔｉ，Ｃｒ）２Ｏ３相の面積割合が３０面積％を超えると、強度が低下するため、（Ｔｉ，Ｃｒ）／ＣＯ混合相からなる中間層における（Ｔｉ，Ｃｒ）２Ｏ３相の面積割合は５〜３０面積％であることが望ましい。
また、中間層を、（Ｔｉ，Ｃｒ）２Ｏ３相と、Ｔｉ（Ｃｒ）ＣＮＯ相との混合相である（Ｔｉ，Ｃｒ）／ＣＮＯ混合相で構成した場合にも、前記と同様の理由から、（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層における（Ｔｉ，Ｃｒ）２Ｏ３相の面積割合は５〜３０面積％であることが望ましい。
(B) Intermediate layer Titanium and chromium composite oxide ((Ti, Cr) 2 O 3 ) phase and at least part of titanium (Ti) contained in titanium carbonate (TiCO) is replaced with chromium (Cr) An intermediate layer composed of a mixed phase of titanium and chromium composite carbonate (Ti (Cr) CO) phase ((Ti, Cr) / CO mixed phase) is excellent because the Cr component is contained in the layer. In addition, both the lower layer made of the Ti compound layer and the upper layer made of the Al 2 O 3 layer show extremely high interlayer adhesion strength, but (Ti, Cr) / CO If the Cr content (Cr / (Ti + Cr), where the atomic ratio) is less than 0.01 in the total amount of Ti in the entire mixed phase, the effect of improving the high-temperature strength of the intermediate layer itself is small, while Cr / The value of (Ti + Cr) is More than 0.1, the adhesion strength with the Ti compound layer, which is the lower layer, decreases, so the content ratio of Cr in the total amount of Ti in the entire intermediate layer composed of the (Ti, Cr) / CO mixed phase (Cr / (Ti + Cr), where the atomic ratio) is preferably 0.01 to 0.1.
Further, the intermediate layer of the hard coating layer is made of at least a part of titanium (Ti) contained in a composite oxide ((Ti, Cr) 2 O 3 ) phase of titanium and chromium and titanium carbonitride oxide (TiCNO). Even when constituted by a mixed phase ((Ti, Cr) / CNO mixed phase) of titanium and chromium composite carbonitride (Ti (Cr) CNO) phase substituted with chromium (Cr), From the point of improving the high temperature strength of the intermediate layer itself and preventing the lowering of the adhesion strength with the lower layer, the content ratio of Cr in the total amount of Ti in the total intermediate layer composed of the (Ti, Cr) / CNO mixed phase ( Cr / (Ti + Cr), where the atomic ratio is preferably 0.01 to 0.1.
Furthermore, if the layer thickness of the intermediate layer is less than 0.1 μm, the effect of improving the interlayer adhesion and the effect of improving the high-temperature strength of the intermediate layer itself cannot be expected, whereas if the layer thickness exceeds 2 μm, the wear resistance decreases. Therefore, the thickness of the intermediate layer composed of the (Ti, Cr) / CO mixed phase or the (Ti, Cr) / CNO mixed phase was determined to be 0.1 to 2 μm.
In addition, about the structural ratio of the (Ti, Cr) 2 O 3 phase and the TiCO phase or the Ti (Cr) CO phase in the intermediate layer, the (Ti, Cr) 2 O 3 phase and the Ti (Cr) CO phase When the area ratio of the (Ti, Cr) 2 O 3 phase is less than 5% by area with respect to the total area, the interlayer adhesion improvement effect of the intermediate layer and the high temperature strength improvement effect of the intermediate layer itself are small, while (Ti, Cr) When the area ratio of the 2 O 3 phase exceeds 30 area%, the strength decreases. Therefore, the area ratio of the (Ti, Cr) 2 O 3 phase in the intermediate layer composed of the (Ti, Cr) / CO mixed phase is 5 to 5%. 30% by area is desirable.
Further, when the intermediate layer is composed of a (Ti, Cr) / CNO mixed phase that is a mixed phase of a (Ti, Cr) 2 O 3 phase and a Ti (Cr) CNO phase, the same reason as described above is obtained. Therefore, the area ratio of the (Ti, Cr) 2 O 3 phase in the intermediate layer composed of the (Ti, Cr) / CNO mixed phase is preferably 5 to 30 area%.
（ｃ）上部層
Ａｌ２Ｏ３層からなる上部層は、すぐれた高温硬さと高温安定性を有し、硬質被覆層の耐摩耗性向上に寄与するが、Ａｌ２Ｏ３層の層厚が０．５μｍ未満では、すぐれた耐摩耗性を発揮することができず、また、１０μｍを超えると、硬質被覆層にチッピング、欠損等を生じやすくなることから、Ａｌ２Ｏ３層の層厚を０．５〜１０μｍと定めた。
Top layer made of (c) the upper layer Al 2 O 3 layer has excellent high-temperature hardness and high temperature stability, contributes to improvement in wear resistance of the hard coating layer, the layer thickness of the Al 2 O 3 layer If it is less than 0.5 [mu] m, can not be exhibited excellent wear resistance, also exceeds 10 [mu] m, chipping in the hard coating layer, from becoming prone to defects or the like, the thickness of the Al 2 O 3 layer It was determined to be 0.5 to 10 μm.
なお、一般的に、切削後の使用コーナーの識別を容易にする目的で、Ａｌ２Ｏ３層の上層に金色を有するＴｉＮ層を被覆することが知られているが、本発明被覆工具においても、使用コーナー識別の目的でＡｌ２Ｏ３層の表面に、ＴｉＮ層を被覆しても良い。その際のＴｉＮ層の平均層厚は０．２〜１μｍとすることが好ましい。 In general, it is known that a TiN layer having a gold color is coated on the upper layer of the Al 2 O 3 layer for the purpose of facilitating identification of a use corner after cutting. The surface of the Al 2 O 3 layer may be coated with a TiN layer for the purpose of identifying the use corner. In that case, the average thickness of the TiN layer is preferably 0.2 to 1 μm.
また、近年、硬質被覆層を被覆後、物理的な手法、具体的には砥石、ナイロン製等のブラシ、ＳｉＣ、Ａｌ２Ｏ３およびＺｒＯ２粒子等をメディアとして使用する乾式および湿式ブラスト処理等により、硬質被覆層の表面を平滑化し、耐溶着性を向上させる方法が知られているが、かかる方法を本発明被覆工具に適応することも勿論可能であり、そして、これによって、工具特性の劣化が生じるものでもない。 Further, in recent years, after coating a hard coating layer, physical methods, specifically, dry and wet blasting using a grinding stone, a brush made of nylon, etc., SiC, Al 2 O 3 and ZrO 2 particles as media, etc. Thus, there is known a method for smoothing the surface of the hard coating layer and improving the welding resistance, but it is of course possible to apply such a method to the coated tool of the present invention, and this makes it possible to improve the tool characteristics. It does not cause deterioration.
この発明の被覆工具は、その表面に、硬質被覆層の下部層を構成するＴｉ化合物層と、上部層を構成するＡｌ２Ｏ３層との間に、強固な層間密着性とすぐれた高温強度を有する（Ｔｉ，Ｃｒ）／ＣＯ混合相あるいは（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層を介在形成したので、各種の鋼、ステンレス鋼および鋳鉄などの通常条件でのターニング、ミーリング加工は勿論のこと、極めて高い熱発生を伴うとともに、大きな繰り返しの衝撃力、大きな機械的負荷がかかる鋼、ステンレス鋼および鋳鉄などのターニングまたはミーリング加工などの高速高送り断続切削加工においても、すぐれた耐チッピング性、耐欠損性、耐層間剥離性を示し、長期に亘ってすぐれた切削性能を発揮するものである。 The coated tool of the present invention has strong interlaminar adhesion and excellent high temperature strength between the Ti compound layer constituting the lower layer of the hard coating layer and the Al 2 O 3 layer constituting the upper layer on the surface thereof. Since an intermediate layer composed of (Ti, Cr) / CO mixed phase or (Ti, Cr) / CNO mixed phase having an intermediate is formed, turning and milling under normal conditions such as various steels, stainless steel and cast iron are Of course, it has excellent resistance to high-speed, high-feed intermittent cutting such as turning or milling of steel, stainless steel, and cast iron that are accompanied by extremely high heat generation and have high repetitive impact force and large mechanical load. It exhibits chipping properties, chipping resistance, delamination resistance, and exhibits excellent cutting performance over a long period of time.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末およびＣｏ粉末を準備し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアルコール中で１０時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で、ＩＳＯ・ＣＮＭＧ１２０４０８（超硬基体Ａ〜Ｄ）およびＩＳＯ・ＳＥＥＮ１２０３ＡＦＴＮ１（超硬基体Ｅ、Ｆ）の所定の形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、超硬基体Ａ〜Ｄについては、Ｒ：０．０７ｍｍのホーニング加工を、また、超硬基体Ｅ、Ｆについては、切刃部に幅０．１５ｍｍ、角度２０度のチャンフォーホーニング加工することにより、ＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder and Co powder all having an average particle diameter of 1 to 3 μm were prepared. After blending to the composition shown, adding wax, ball mill mixing in alcohol for 10 hours and drying under reduced pressure, ISO · CNMG120408 (Carbide substrate AD) and ISO · SEEN1203AFTN1 (Carbide) at 98 MPa pressure The green compact is pressed into a green compact of a predetermined shape of the substrates E and F), and the green compact is vacuum sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After the sintering, R: 0.07 mm honing is performed for the carbide substrates A to D, and for the carbide substrates E and F, the cutting edge has a width of 0.15 mm and an angle of 2 The tool bases A to F made of WC-based cemented carbide were manufactured by performing 0 degree Chamfor Honing.
ついで、これらの工具基体Ａ〜Ｆ表面に、まず、表２に示される条件かつ表６に示される目標合計層厚となるように下部層を化学蒸着で形成し、ついで表３に示される条件かつ表６に示される目標層厚となるように（Ｔｉ，Ｃｒ）／ＣＯ混合相あるいは（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層を化学蒸着で形成した後、表５に示される条件かつ表６に示される目標層厚のＡｌ２Ｏ３層を化学蒸着で形成することにより、本発明被覆工具１〜１８を製造した。 Next, a lower layer is first formed on these tool bases A to F by chemical vapor deposition so as to have the conditions shown in Table 2 and the target total layer thickness shown in Table 6, and then the conditions shown in Table 3 And after forming the intermediate layer which consists of a (Ti, Cr) / CO mixed phase or a (Ti, Cr) / CNO mixed phase by chemical vapor deposition so that it may become the target layer thickness shown in Table 6, conditions shown in Table 5 and by forming Al 2 O 3 layers of the target layer thicknesses shown in Table 6 by chemical vapor deposition, to produce a present invention coated tools 1 to 18.
比較の目的で、表４に示される条件で、かつ、表７に示される目標合計層厚で、（Ｔｉ，Ｃｒ）／ＣＯ混合相又は（Ｔｉ，Ｃｒ）／ＣＮＯ混合相からなる中間層の代わりに、Ｔｉ２Ｏ３−ＴｉＣＯ混合相、あるいは、Ｔｉ２Ｏ３−ＴｉＣＮＯ混合相を中間層として形成し、他の条件（例えば、下部層、上部層の形成条件）については上記本発明被覆工具１〜１８と同一の条件とすることにより、比較被覆工具１〜１８をそれぞれ製造した。
なお、例えば、特開平６−８０１０号公報に示されるような層の強度向上を目的として形成した縦長成長結晶組織を有するＴｉＣＮ層については、表２、６、７中では「ｌ−ＴｉＣＮ」として示している。
For the purpose of comparison, an intermediate layer composed of (Ti, Cr) / CO mixed phase or (Ti, Cr) / CNO mixed phase under the conditions shown in Table 4 and with the target total layer thickness shown in Table 7 Instead, a Ti 2 O 3 —TiCO mixed phase or a Ti 2 O 3 —TiCNO mixed phase is formed as an intermediate layer, and other conditions (for example, conditions for forming the lower layer and the upper layer) are covered by the present invention. Comparative coated tools 1 to 18 were produced by using the same conditions as the tools 1 to 18, respectively.
For example, a TiCN layer having a vertically grown crystal structure formed for the purpose of improving the strength of the layer as disclosed in JP-A-6-8010 is referred to as “l-TiCN” in Tables 2, 6, and 7. Show.
さらに、上記の本発明被覆工具１〜１８および比較被覆工具１〜１８について、これらの硬質被覆層の構成層をオージェ分光分析装置を用いて観察（層の縦断面を観察）したところ、目標組成と実質的に同じ組成を有することが確認され、また、これらの被覆工具の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（同じく縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。
また、本発明被覆工具１〜１８および比較被覆工具１〜１８の硬質被覆層の中間層については、光学顕微鏡による組織観察を行い、（Ｔｉ，Ｃｒ）／ＣＯ混合相あるいは（Ｔｉ，Ｃｒ）／ＣＮＯ混合相に占める（Ｔｉ，Ｃｒ）２Ｏ３相の面積割合が５〜３０面積％の範囲内であることを確認した。
Further, for the above-described inventive coated tools 1-18 and comparative coated tools 1-18, the constituent layers of these hard coating layers were observed using an Auger spectroscopic analyzer (observation of the longitudinal section of the layers). And the thickness of the constituent layer of the hard coating layer of these coated tools was measured using a scanning electron microscope (same longitudinal section measurement). The average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness was shown.
Moreover, about the intermediate | middle layer of the hard coating layer of this invention coated tool 1-18 and comparative coated tool 1-18, structure | tissue observation by an optical microscope is performed, (Ti, Cr) / CO mixed phase or (Ti, Cr) / It was confirmed that the area ratio of the (Ti, Cr) 2 O 3 phase in the CNO mixed phase was in the range of 5 to 30 area%.
まず、上記の本発明被覆工具１〜４、７〜１０、１３〜１６および比較被覆工具１〜４、７〜１０、１３〜１６について、次の切削条件Ａ、Ｂにより、ターニング加工評価を実施した。
[切削条件Ａ]
被削材： ＪＩＳ・Ｓ５０Ｃの長さ方向等間隔４本縦溝入丸棒、
切削速度： ３５０ ｍ／ｍｉｎ、
切り込み： １．５ ｍｍ、
送り量： ０．５ ｍｍ／ｒｅｖ．、
切削時間： ５ 分、
の条件での炭素鋼の乾式高速高送り切削試験（通常の切削速度および送り量は、それぞれ、２００ｍ／ｍｉｎ、０．２ｍｍ／ｒｅｖ．）、
[切削条件Ｂ]
被削材： ＪＩＳ・ＳＵＳ３０４の長さ方向等間隔２本縦溝入丸棒、
切削速度： ３３０ ｍ／ｍｉｎ、
切り込み： １．５ ｍｍ、
送り量： ０．４５ ｍｍ／ｒｅｖ．、
切削時間： ５ 分、
の条件でのステンレス鋼の湿式高速高送り切削試験（通常の切削速度および送り量は、それぞれ、１５０ｍ／ｍｉｎ、０．２ｍｍ／ｒｅｖ．）、
First, turning processing evaluation was performed on the above-described coated tools 1 to 4, 7 to 10, 13 to 16 and comparative coated tools 1 to 4, 7 to 10, and 13 to 16 according to the following cutting conditions A and B. did.
[Cutting conditions A]
Work material: JIS / S50C lengthwise equal 4 round grooved round bars,
Cutting speed: 350 m / min,
Cutting depth: 1.5 mm,
Feed amount: 0.5 mm / rev. ,
Cutting time: 5 minutes,
Carbon steel dry high-speed high-feed cutting test under normal conditions (normal cutting speed and feed amount are 200 m / min and 0.2 mm / rev., Respectively),
[Cutting conditions B]
Work material: JIS / SUS304 lengthwise equidistant two round grooved round bars,
Cutting speed: 330 m / min,
Cutting depth: 1.5 mm,
Feed amount: 0.45 mm / rev. ,
Cutting time: 5 minutes,
Wet high-speed high-feed cutting test of stainless steel under the following conditions (normal cutting speed and feed amount are 150 m / min and 0.2 mm / rev., Respectively),
次に、上記の本発明被覆工具５、６、１１、１２、１７、１８および比較被覆工具５、６、１１、１２、１７、１８について、次の切削条件Ｃ、Ｄにより、ミーリング加工評価を実施した。
[切削条件Ｃ]
被削材： ＪＩＳ・ＳＣＭ４４０のブロック材
切削速度： ３８０ ｍ／ｍｉｎ、
切り込み： １．５ ｍｍ、
一刃送り量： ０．２５ ｍｍ／刃、
切削時間： ５ 分、
の条件での合金鋼の乾式高速高送り切削試験（通常の切削速度および一刃送り量は、それぞれ、２５０ｍ／ｍｉｎ、０．１２ｍｍ／刃）、
[切削条件Ｄ]
被削材： ＪＩＳ・ＦＣ３００のブロック材
切削速度： ４００ ｍ／ｍｉｎ、
切り込み： ２ ｍｍ、
一刃送り量： ０．２３ ｍｍ／刃、
切削時間： ５ 分、
の条件での鋳鉄の湿式高速高送り切削試験（通常の切削速度および一刃送り量は、それぞれ、３００ｍ／ｍｉｎ、０．１５ｍｍ／刃）、
そして、上記の各切削試験Ａ〜Ｄにおける切刃の逃げ面摩耗幅を測定し、この測定結果を表８に示した。
Next, for the above-described coated tools 5, 6, 11, 12, 17, and 18 of the present invention and the comparative coated tools 5, 6, 11, 12, 17, and 18, the milling process evaluation is performed under the following cutting conditions C and D. Carried out.
[Cutting conditions C]
Work material: Block material of JIS / SCM440
Cutting speed: 380 m / min,
Cutting depth: 1.5 mm,
Single blade feed amount: 0.25 mm / tooth,
Cutting time: 5 minutes,
Dry high-speed high-feed cutting test of alloy steel under the conditions of (normal cutting speed and single-blade feed amount are 250 m / min and 0.12 mm / blade, respectively)
[Cutting conditions D]
Work material: Block material of JIS / FC300
Cutting speed: 400 m / min,
Incision: 2 mm,
Single blade feed rate: 0.23 mm / tooth,
Cutting time: 5 minutes,
Wet high-speed high-feed cutting test of cast iron under the conditions of (normal cutting speed and single-blade feed amount are 300 m / min and 0.15 mm / blade, respectively)
And the flank wear width of the cutting edge in each of the cutting tests A to D was measured, and the measurement results are shown in Table 8.
表５〜８に示される結果から、本発明被覆工具１〜１８は、Ｔｉ化合物層からなる下部層と、Ａｌ２Ｏ３層からなる上部層との間に、ＴｉとＣｒの複合酸化物（（Ｔｉ，Ｃｒ）２Ｏ３）相と、Ｔｉ（Ｃｒ）ＣＯ相との混合相（（Ｔｉ，Ｃｒ）／ＣＯ混合相）からなる中間層（請求項１）、あるいは、ＴｉとＣｒの複合酸化物（（Ｔｉ，Ｃｒ）２Ｏ３）相とＴｉ（Ｃｒ）ＣＮＯ相との混合相（（Ｔｉ，Ｃｒ）／ＣＮＯ混合相）からなる中間層（請求項２）、を化学蒸着で介在形成したので、高い発熱を伴い、かつ、繰り返しの大きな衝撃力とともに高負荷がかかる鋼、ステンレス鋼および鋳鉄などを高速高送り断続切削条件下でターニングまたはミーリング加工を行っても、硬質被覆層がすぐれた耐チッピング性、耐欠損性、耐層間剥離性を発揮するのに対して、硬質被覆層の中間層が、Ｔｉ２Ｏ３相とＴｉＣＯ相の混合相（Ｔｉ２Ｏ３−ＴｉＣＯ混合相）、あるいは、Ｔｉ２Ｏ３相とＴｉＣＮＯ相の混合相（Ｔｉ２Ｏ３−ＴｉＣＮＯ混合相）で形成された比較被覆工具１〜１８においては、高速高送り断続切削の厳しい切削条件に耐えられず、硬質被覆層にはチッピング、欠損、層間剥離が発生し、これが原因で比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 5 to 8, the coated tools 1 to 18 of the present invention are complex oxides of Ti and Cr (between a lower layer made of a Ti compound layer and an upper layer made of an Al 2 O 3 layer ( (Ti, Cr) 2 O 3 ) phase and Ti (Cr) CO phase mixed phase ((Ti, Cr) / CO mixed phase) intermediate layer (Claim 1), or a composite of Ti and Cr An intermediate layer (claim 2) composed of a mixed phase ((Ti, Cr) / CNO mixed phase) of an oxide ((Ti, Cr) 2 O 3 ) phase and a Ti (Cr) CNO phase is interposed by chemical vapor deposition. Even if turning or milling steel, stainless steel, cast iron, etc. with high heat generation and high load with repeated large impact force under high-speed, high-feed intermittent cutting conditions, the hard coating layer is formed. Excellent chipping resistance, chipping resistance, delamination resistance Whereas exhibits sex, intermediate layer of the hard coating layer, a mixed phase of Ti 2 O 3 phase and TiCO phase (Ti 2 O 3 -TiCO mixed phase), or of Ti 2 O 3 phase and TiCNO phase Comparative coated tools 1 to 18 formed with a mixed phase (Ti 2 O 3 —TiCNO mixed phase) cannot withstand severe cutting conditions of high-speed, high-feed interrupted cutting, and the hard coating layer has chipping, chipping, and delamination. It is clear that this causes a service life in a relatively short time.
上述のように、この発明の被覆工具は、各種の鋼、ステンレス鋼および鋳鉄などの通常の条件でのターニングまたはミーリング加工は勿論のこと、特に、極めて高い熱発生を伴うとともに、大きな繰り返しの衝撃力、大きな機械的負荷がかかる高速高送り断続切削条件でも、すぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化ならびに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention is not only for turning or milling under normal conditions such as various types of steel, stainless steel, and cast iron, but particularly with extremely high heat generation and large repeated impact. Even under high-speed, high-feed, intermittent cutting conditions that require a large mechanical load, it exhibits excellent chipping resistance and exhibits excellent cutting performance over a long period of time. It can be used satisfactorily for labor saving, energy saving, and cost reduction.
Claims (2)
（ａ）２〜１５μｍの合計平均層厚を有し、かつ、炭化チタン層、窒化チタン層および炭窒化チタン層のうちから選ばれる１層または２層以上のＴｉ系化合物層からなる下部層、
（ｂ）０．１〜２μｍの平均層厚を有し、チタンとクロムの複合酸化物相と、炭酸化チタンに含有されるチタンの少なくとも一部をクロムで置換したチタンとクロムの複合炭酸化物相との混合相からなる中間層、
（ｃ）０．５〜１０μｍの平均層厚を有する酸化アルミニウム層からなる上部層、
を蒸着形成したことを特徴とする表面被覆切削工具。 On the surface of the tool base composed of tungsten carbide base cemented carbide or titanium carbonitride base cermet,
(A) a lower layer having a total average layer thickness of 2 to 15 μm and comprising one or more Ti-based compound layers selected from a titanium carbide layer, a titanium nitride layer, and a titanium carbonitride layer;
(B) Titanium / chromium composite carbonate having an average layer thickness of 0.1 to 2 μm, wherein at least part of titanium contained in the titanium / chromium composite oxide phase and titanium carbonate is replaced with chromium. An intermediate layer consisting of a mixed phase with the phase,
(C) an upper layer comprising an aluminum oxide layer having an average layer thickness of 0.5 to 10 μm,
A surface-coated cutting tool characterized by being formed by vapor deposition.
（ａ）２〜１５μｍの合計平均層厚を有し、かつ、炭化チタン層、窒化チタン層および炭窒化チタン層のうちから選ばれる１層または２層以上のＴｉ系化合物層からなる下部層、
（ｂ）０．１〜２μｍの平均層厚を有し、チタンとクロムの複合酸化物相と、炭窒酸化チタンに含有されるチタンの少なくとも一部をクロムで置換したチタンとクロムの複合炭窒酸化物相との混合相からなる中間層、
（ｃ）０．５〜１０μｍの平均層厚を有する酸化アルミニウム層からなる上部層、
を蒸着形成したことを特徴とする表面被覆切削工具。 On the surface of the tool base composed of tungsten carbide base cemented carbide or titanium carbonitride base cermet,
(A) a lower layer having a total average layer thickness of 2 to 15 μm and comprising one or more Ti-based compound layers selected from a titanium carbide layer, a titanium nitride layer, and a titanium carbonitride layer;
(B) Titanium / chromium composite charcoal having an average layer thickness of 0.1 to 2 μm, wherein at least part of titanium contained in the titanium / chromium composite oxide phase and titanium carbonitride is replaced with chromium. An intermediate layer consisting of a mixed phase with a nitrided oxide phase,
(C) an upper layer comprising an aluminum oxide layer having an average layer thickness of 0.5 to 10 μm,
A surface-coated cutting tool characterized by being formed by vapor deposition.
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