JP2008261640A5 - - Google Patents

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Publication number
JP2008261640A5
JP2008261640A5 JP2007102428A JP2007102428A JP2008261640A5 JP 2008261640 A5 JP2008261640 A5 JP 2008261640A5 JP 2007102428 A JP2007102428 A JP 2007102428A JP 2007102428 A JP2007102428 A JP 2007102428A JP 2008261640 A5 JP2008261640 A5 JP 2008261640A5
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Japan
Prior art keywords
electrode
monitor
signal
detection
circuit
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JP2007102428A
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Japanese (ja)
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JP5034624B2 (en
JP2008261640A (en
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Priority claimed from JP2007102428A external-priority patent/JP5034624B2/en
Publication of JP2008261640A publication Critical patent/JP2008261640A/en
Publication of JP2008261640A5 publication Critical patent/JP2008261640A5/ja
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Publication of JP5034624B2 publication Critical patent/JP5034624B2/en
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Claims (4)

駆動電極とモニタ電極と検出電極とを有する振動子と、前記駆動電極に駆動信号を通電し前記振動子を振動させる駆動回路と、慣性力に起因して前記検出電極から出力される検出信号を増幅する検出信号増幅回路と、前記モニタ電極から出力されるモニタ信号を増幅するモニタ信号増幅回路と、前記モニタ信号増幅回路から出力される前記モニタ増幅信号を基準にして前記駆動信号の通電量を制御する振動制御回路と、前記モニタ増幅信号を基準にして前記検出増幅信号を検波する同期検波回路とを備え、
前記モニタ信号増幅回路は第１増幅器と第１帰還抵抗と第１帰還容量とを有し、前記検出信号増幅回路は第２増幅器と第２帰還抵抗と第２帰還容量とを有し、前記モニタ電極で生成される静電容量値と前記検出電極で生成される静電容量値とを等しくし、前記第１帰還抵抗と前記第２帰還抵抗とを等しくし、前記第１帰還容量と前記第２帰還容量とを等しくした角速度センサ。 A vibrator having a drive electrode, a monitor electrode, and a detection electrode, a drive circuit for passing a drive signal through the drive electrode to vibrate the vibrator, and a detection signal output from the detection electrode due to inertial force A detection signal amplification circuit for amplifying, a monitor signal amplification circuit for amplifying a monitor signal output from the monitor electrode, and an energization amount of the drive signal based on the monitor amplification signal output from the monitor signal amplification circuit A vibration control circuit for controlling, and a synchronous detection circuit for detecting the detection amplification signal based on the monitor amplification signal,
The monitor signal amplifier circuit includes a first amplifier, a first feedback resistor, and a first feedback capacitor, and the detection signal amplifier circuit includes a second amplifier, a second feedback resistor, and a second feedback capacitor, a capacitance value generated by the electrostatic capacitance value and the detection electrode that is generated at the electrode equal the previous SL first and feedback resistor equal to the second feedback resistor, the said first feedback capacitor An angular velocity sensor having the same second feedback capacity. 前記モニタ電極の電極面積と前記検出電極の電極面積とを等しくした請求項１記載の角速度センサ。 The angular velocity sensor according to claim 1, wherein an electrode area of the monitor electrode is equal to an electrode area of the detection electrode. 前記振動制御回路の前段に、前記モニタ増幅信号の振幅値を減衰させる減衰回路を設けた請求項１記載の角速度センサ。 The angular velocity sensor according to claim 1, wherein an attenuation circuit for attenuating an amplitude value of the monitor amplification signal is provided in a previous stage of the vibration control circuit. 前記第１増幅器の構成素子と前記第２増幅器の構成素子を等しくした請求項１に記載の角速度センサ。The angular velocity sensor according to claim 1, wherein the constituent elements of the first amplifier and the constituent elements of the second amplifier are made equal.
JP2007102428A 2007-04-10 2007-04-10 Angular velocity sensor Expired - Fee Related JP5034624B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007102428A JP5034624B2 (en) 2007-04-10 2007-04-10 Angular velocity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007102428A JP5034624B2 (en) 2007-04-10 2007-04-10 Angular velocity sensor

Publications (3)

Publication Number Publication Date
JP2008261640A JP2008261640A (en) 2008-10-30
JP2008261640A5 true JP2008261640A5 (en) 2010-05-13
JP5034624B2 JP5034624B2 (en) 2012-09-26

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ID=39984238

Family Applications (1)

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JP2007102428A Expired - Fee Related JP5034624B2 (en) 2007-04-10 2007-04-10 Angular velocity sensor

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JP (1) JP5034624B2 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1054722A (en) * 1996-08-12 1998-02-24 Toyota Motor Corp Angular velocity detecting device
JPH11142159A (en) * 1997-11-04 1999-05-28 Murata Mfg Co Ltd Circuit for vibrational gyro
JP3780673B2 (en) * 1997-12-11 2006-05-31 株式会社日本自動車部品総合研究所 Angular velocity sensor
JP2000321077A (en) * 1999-05-10 2000-11-24 Citizen Watch Co Ltd Angular velocity detecting device and its driving method
JP4843855B2 (en) * 2001-03-09 2011-12-21 パナソニック株式会社 Angular velocity sensor
JP2003247828A (en) * 2002-02-21 2003-09-05 Kinseki Ltd Angular velocity sensor
JP2004301786A (en) * 2003-03-31 2004-10-28 Seiko Epson Corp Sensor element package and angular velocity sensor

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