JP2010185739A - Thee-axis detection angular velocity sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a three-axis detection angular velocity sensor having stable output signals since output signals by angular velocities on an X-axis and a Y-axis do not interfere with each other in the three-axis detection angular velocity sensor. <P>SOLUTION: The three-axis detection angular velocity sensor for achieving this purpose is constituted in such a way that the drive frequencies of a mass part 21, which can be displaced in three directions of the X-axis, the Y-axis, and a Z-axis, may be made different in the direction of the X-axis, the direction of the Y-axis, and the direction of the Z-axis. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  In particular, the present invention relates to a triaxial detection angular velocity sensor capable of detecting angular velocities in the triaxial directions of the X axis, the Y axis, and the Z axis.

  Conventional three-axis detection angular velocity sensors of this type are configured as shown in FIGS.

  FIG. 13 is a side sectional view of a conventional triaxial detection angular velocity sensor, and FIG. 14 is a top view of the triaxial detection angular velocity sensor.

  13 and 14, reference numeral 1 denotes a rectangular parallelepiped mass portion made of Si. And this mass part 1 is comprised so that the resonant frequency of a X-axis direction and a Y-axis direction may become substantially the same. Reference numeral 2 denotes a support member made of Si, the inner periphery and the outer periphery of which are octagonal and extended over the entire periphery. The support member 2 supports the mass portion 1 from the entire outer periphery, and a plurality of support members on the upper surface. An outer drive piezoelectric body 3 and an inner drive piezoelectric body 4 made of PZT are provided. An outer detection piezoelectric member 5 and an inner detection piezoelectric member 6 are provided on the upper surface of the support member 2 between the outer drive piezoelectric member 3 and the inner drive piezoelectric member 4. Reference numeral 7 denotes a rectangular cylindrical frame made of Si. The frame 7 integrally supports the support member 2.

  Next, the operation of the conventional three-axis detection angular velocity sensor configured as described above will be described.

  When an AC voltage is applied to the outer drive piezoelectric body 3 and the inner drive piezoelectric body 4 in the support member 2, the vibrator 1 is driven to vibrate in the Z-axis direction and the Y-axis direction. In this state, when an angular velocity is generated around the X axis, Y axis, and Z axis of the vibrator 1, F = 2 mV × in the direction perpendicular to both the direction in which the vibrator 1 is driven to vibrate and the direction in which the angular speed is generated. ω Coriolis force is generated. Then, the electric charges generated from the outer detection piezoelectric member 5 and the inner detection piezoelectric member 6 are IV-converted by this Coriolis force, and then detected synchronously to detect angular velocities in the X axis direction, the Y axis direction, and the Z axis direction. Met.

As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP-A-8-145683

  However, in the above-described conventional configuration, the driving frequency in the X-axis direction of the mass unit 1 and the driving frequency in the Y-axis direction are substantially the same, so the detection frequency in the X-axis direction of the mass unit 1 and the detection in the Y-axis direction. As a result, the angular velocities around the X axis and the Y axis interfere with each other, and the output signal due to the angular velocities around the X axis and the Y axis fluctuates. Was.

  The present invention solves the above-described conventional problems, and provides a three-axis detection angular velocity sensor in which output signals due to angular velocities around the X axis and the Y axis do not interfere with each other and the output signals are stable. It is for the purpose.

  In order to achieve the above object, the present invention has the following configuration.

  According to the first aspect of the present invention, a mass part that is displaceable in the three axial directions of the X axis, the Y axis, and the Z axis, and supports the mass part, is extended in the X axis direction, and is provided at least on the upper surface. An X-axis direction support member provided with one drive piezoelectric body and at least one detection piezoelectric body, and supporting the mass portion, extending in the Y-axis direction, and having at least one drive piezoelectric body and at least one on the upper surface And a Y-axis direction support member provided with a detection piezoelectric body, wherein the drive frequencies of the mass portion in the X-axis direction, the Y-axis direction, and the Z-axis direction are made different from each other. Since the detection frequency in the X-axis direction and the detection frequency in the Y-axis direction of the mass part are not substantially the same, the angular velocities around the X-axis and the Y-axis do not interfere with each other. Around axis and Y Output signals by angular velocity around are those having the effect that is stable.

  In the invention according to claim 2 of the present invention, in particular, the drive frequencies in the X-axis, Y-axis, and Z-axis directions are compared, and the vibration is driven in the axial direction of the central drive frequency value, and the other two-axis directions By detecting synchronously the output signal generated by the angular velocity at the center drive frequency, each angular velocity in the other two axial directions is detected, and any one of the other two axial directions is driven to vibrate, The output signal generated by the angular velocity in the axial direction of the central driving frequency is detected synchronously at either one of the other two axial directions, thereby detecting the angular velocity in the axial direction of the central driving frequency. Thus, according to this configuration, the output signal generated by the angular velocity in the axial direction of the central driving frequency is synchronously detected at one of the other two axial directions, so that the axial frequency of the central driving frequency is Corner Because you have to detect the degree, it will be driving the frequency of detection approaches, thereby, those having the effect that the sensitivity of the output signal by a 3-axis angular velocity increases.

  In the invention according to claim 3 of the present invention, in particular, the output signal composed of the opposite phase of any one of the other two axial directions is output to the other axial direction of the other two axial directions. Is injected into an output signal due to the Coriolis force generated by the angular velocity applied to the output signal, and according to this configuration, an output signal consisting of the opposite phase of one of the other two axial directions is obtained, Since the output signal is generated by the Coriolis force generated by the angular velocity applied in the other axial direction of the other two axes, the other is driven by the vibration drive signal in one of the other two axes. This has the effect of preventing fluctuations that occur in the output signal that detects the angular velocity around the axis.

  As described above, the three-axis detection angular velocity sensor of the present invention has a mass part that can be displaced in the three-axis directions of the X-axis, the Y-axis, and the Z-axis, and supports the mass part and extends in the X-axis direction. An X-axis direction support member provided with at least one drive piezoelectric body and at least one detection piezoelectric body, and supporting the mass portion and extending in the Y-axis direction, and at least one drive piezoelectric body on the upper surface and at least And a Y-axis direction support member provided with one detection piezoelectric body, and the drive frequencies of the mass portion in the X-axis direction, the Y-axis direction, and the Z-axis direction are different from each other. Since the detection frequency and the detection frequency in the Y-axis direction are not substantially the same, the angular velocities around the X-axis and the Y-axis do not interfere with each other. Angular velocity Output signal by is one that has an excellent effect that it is possible to provide a three-axis angular velocities detected sensor is stable.

  Hereinafter, a three-axis detection angular velocity sensor according to an embodiment of the present invention will be described with reference to the drawings.

  1 is a side sectional view of a triaxial detection angular velocity sensor according to an embodiment of the present invention, FIG. 2 is a top view of the triaxial detection angular velocity sensor, and FIG. 3 is a first X-axis direction of the triaxial detection angular velocity sensor. FIG. 4 is a circuit diagram of the triaxial detection angular velocity sensor.

  1-4, 21 is a rectangular parallelepiped mass part which consists of Si. Reference numeral 22 denotes a first X-axis direction support member made of Si. The first X-axis direction support member 22 supports an upper portion of one side surface of the mass portion 21 and a pair of PZTs on the outer side of the upper surface. An outer drive piezoelectric body 23 is provided, and an inner drive piezoelectric body 24 made of a pair of PZTs is provided inside the upper surface. Further, on the upper surface of the first X-axis direction support member 22, an outer detection piezoelectric member 25 is provided between the pair of outer drive piezoelectric members 23. An inner detection piezoelectric body 26 is provided between them.

  Reference numeral 27 denotes a second X-axis direction support member made of Si. The second X-axis direction support member 27 is on the opposite side of the mass portion 21 from the side on which the first X-axis direction support member 22 is provided. While supporting the upper part of one side, the outer side drive piezoelectric material 28 which consists of a pair of PZT is provided in the outer side of the upper surface, and the inner side drive piezoelectric material 29 which consists of a pair of PZT is further provided inside the upper surface. Further, on the upper surface of the second X-axis direction support member 27, an outer detection piezoelectric body 30 is provided between the pair of outer drive piezoelectric bodies 28. The inner detection piezoelectric body 31 is provided between them.

  Reference numeral 32 denotes a first Y-axis direction support member made of Si. The first Y-axis direction support member 32 supports the upper part of one side surface of the mass portion 21 and is made of a pair of PZTs on the outer side of the upper surface. An outer drive piezoelectric body 33 is provided, and an inner drive piezoelectric body 34 made of a pair of PZTs is provided inside the upper surface. Further, on the upper surface of the first Y-axis direction support member 32, an outer detection piezoelectric body 35 is provided between the pair of outer drive piezoelectric bodies 33. An inner detection piezoelectric body 36 is provided between them. Further, on the upper surface of the first Y-axis direction support member 32, an outer monitor piezoelectric body 37 is provided outside the outer drive piezoelectric body 33 and is positioned outside the inner drive piezoelectric body 34. An inner monitor piezoelectric body 38 is provided.

  39 is a second Y-axis direction support member made of Si, and this second Y-axis direction support member 39 is on the opposite side of the mass portion 21 from the side where the first Y-axis direction support member 32 is provided. While supporting the upper part of one side, the outer side drive piezoelectric material 40 which consists of a pair of PZT is provided in the outer side of the upper surface, and the inner side drive piezoelectric material 41 which consists of a pair of PZT is further provided inside the upper surface. Further, on the upper surface of the second Y-axis direction support member 39, an outer detection piezoelectric body 42 is provided between the pair of outer drive piezoelectric bodies 40, and the inner drive piezoelectric body 41 is further provided. An inner detection piezoelectric body 43 is provided between them. Further, a pair of inner monitor piezoelectric bodies 67 are provided on the upper surface of the second Y-axis direction support member 39 so as to be located outside the pair of inner drive piezoelectric bodies 41.

  Further, as shown in FIG. 3, the outer drive piezoelectric body 23 and the outer detection piezoelectric body 25 located on the upper surface of the first X-axis direction support member 22 are formed of the first X-axis direction support member 22 made of Si. Provided on the upper surface of the common GND electrode 44 made of an alloy thin film of Pt and Ti provided on the upper surface, and provided with a drive electrode 45 on the upper surface of the outer drive piezoelectric member 23 and a detection electrode on the upper surface of the outer detection piezoelectric member 25. 46 is provided. The mass portion 21 is supported by the first X-axis direction support member 22, the second X-axis direction support member 27, the first Y-axis direction support member 32, and the second Y-axis direction support member 39. By doing so, the drive frequency in the X-axis direction is 39 kHz, the drive frequency in the Y-axis direction is 41 kHz, and the drive frequency in the Z-axis direction is 40 kHz. That is, the driving frequency of the mass portion 21 is set to be different in the X-axis direction, the Y-axis direction, and the Z-axis direction, and the driving frequency in the Z-axis direction is set to a central value.

  The first X-axis direction support member 22, the second X-axis direction support member 27, the first Y-axis direction support member 32, and the second Y-axis direction support member 39 are as shown in FIG. In addition, there are four holes 68 between them, an outer peripheral portion 69 integrally connected on the outer peripheral side, and a processing circuit 48 made of an IC is provided on the upper surface of the outer peripheral portion 69.

  Reference numeral 47 denotes a rectangular cylindrical frame made of Si. The frame 47 includes the first X-axis direction support member 22, the second X-axis direction support member 27, the first Y-axis direction support member 32, and the first X-axis direction support member 32. The outer peripheral part 69 connected to the two Y-axis direction support members 39 is supported.

  The processing circuit 48 provided on the upper surface of the outer peripheral portion 69 includes the outer driving piezoelectric bodies 23, 28, 33, 40, the inner driving piezoelectric bodies 24, 29, 34, 41, and the outer detection piezoelectric bodies 25, 30, 35, 42. And the inner detection piezoelectric bodies 26, 31, 36, 43 are electrically connected to each other by a circuit pattern (not shown), and an output signal from the processing circuit 48 is passed through a circuit pattern (not shown). The output is to an external circuit (not shown).

  Further, as shown in FIG. 4, the processing circuit 48 includes a drive circuit 49 and a detection circuit 50, and the drive circuit 49 includes a Z-axis direction drive circuit 51a and a Y-axis direction drive circuit 51b. It is what has been. Further, the Z-axis direction drive circuit 51a performs differential output signals from the outer monitor piezoelectric body 37 in the first Y-axis direction support member 32 and the inner monitor piezoelectric body 67 in the second Y-axis direction support member 39. Values are input to the outer drive piezoelectric bodies 23, 28, 33, 40 and the inner drive piezoelectric bodies 24, 29, 34, 41 via the IV converter 52, the band pass filter 53 and the AGC circuit 54 in the Z-axis direction drive circuit 51a. Thus, the mass portion 21 is driven to vibrate with a constant amplitude in the Z-axis direction. Similarly, the Y-axis direction drive circuit 51b outputs from the inner monitor piezoelectric body 38 in the first Y-axis direction support member 32 and the inner monitor piezoelectric body 67 in the second Y-axis direction support member 39. By inputting the differential value of the signal to the outer driving piezoelectric bodies 33 and 40 and the inner driving piezoelectric bodies 34 and 41 via the IV converter 52, the band pass filter 56 and the AGC circuit 57 in the Y-axis direction driving circuit 51b, The mass portion 21 is driven to vibrate with a constant amplitude in the Y-axis direction.

  The detection circuit 50 includes a Y-direction Coriolis force detection circuit 58 and an X-direction Coriolis force detection circuit 59. The Y-direction Coriolis force detection circuit 58 is outside the first Y-axis direction support member 32. The output signals of the detection piezoelectric member 35 and the inner detection piezoelectric member 36 are input to the IV converter 60, and the output signals of the outer detection piezoelectric member 42 and the inner detection piezoelectric member 43 in the second Y-axis direction support member 39 are IV converted. After the input to the detector 61 and the difference between the two, the synchronous detector 62 detects the angular velocity around the X axis by synchronous detection at the drive frequency in the Z-axis direction. The X-direction Coriolis force detection circuit 59 includes an IV converter 63 for inputting output signals of the outer detection piezoelectric body 25 and the inner detection piezoelectric body 26 in the first X-axis direction support member 22, and a second X-axis. The differential value of the output signal from the IV converter 64 that receives the output signals from the outer detection piezoelectric member 30 and the inner detection piezoelectric member 31 in the direction support member 27 is obtained by the synchronous detector 65 at the drive frequency in the Z-axis direction. By detecting synchronously, the angular velocity around the Y axis is detected. Further, similarly to these, the synchronous detector 66 detects the angular velocity around the Z-axis by performing synchronous detection at the drive frequency in the Y-axis direction.

  Next, a method for assembling the three-axis detection angular velocity sensor according to the embodiment of the present invention configured as described above will be described.

  First, a common GND electrode 44 made of an alloy thin film of Pt and Ti is formed by vapor deposition on the upper surface of a substrate (not shown) made of Si prepared in advance, and then made of a PZT thin film on the upper surface of the common GND electrode 44. Outer drive piezoelectric elements 23, 28, 33, 40, inner drive piezoelectric elements 24, 29, 34, 41, outer detection piezoelectric elements 25, 30, 35, 42, inner detection piezoelectric elements 26, 31, 36, 43, outer monitor The piezoelectric body 37 and the inner monitor piezoelectric bodies 38 and 67 are formed by vapor deposition.

  Next, the outer drive piezoelectric members 23, 28, 33, 40, the inner drive piezoelectric members 24, 29, 34, 41, the outer detection piezoelectric members 25, 30, 35, 42, the inner detection piezoelectric members 26, 31, 36, 43. The drive electrode 45, the detection electrode 46, and the monitor electrode (not shown) made of an alloy thin film of Ti and Au are formed on the upper surfaces of the outer monitor piezoelectric member 37 and the inner monitor piezoelectric members 38 and 67.

  Next, while applying a voltage to the common GND electrode 44 side and grounding the drive electrode 45, the detection electrode 46, and the monitor electrode (not shown), the outer drive piezoelectric bodies 23, 28, 33, 40, the inner drive The piezoelectric bodies 24, 29, 34 and 41, the outer detection piezoelectric bodies 25, 30, 35 and 42, the inner detection piezoelectric bodies 26, 31, 36 and 43, the outer monitor piezoelectric body 37 and the inner monitor piezoelectric bodies 38 and 67 are polarized. .

  Finally, by removing unnecessary portions in the base material (not shown), the mass portion 21, the first X-axis direction support member 22, the second X-axis direction support member 27, and the first Y-axis direction After forming the support member 32, the second Y-axis direction support member 39, the outer peripheral portion 69, and the frame body 47, a processing circuit 48 made of IC is soldered to a circuit pattern (not shown).

  Next, the operation of the three-axis detection angular velocity sensor according to the embodiment of the present invention constructed and assembled as described above will be described.

  First, a case where an angular velocity around the X axis is first added to the mass portion 21 will be described.

  First, when a positive voltage is applied to the inner driving piezoelectric bodies 24, 29, 34, and 41, and a negative voltage is applied to the outer driving piezoelectric bodies 23, 28, 33, and 40, as shown in FIG. 24, 29, 34, and 41 are extended, and the outer drive piezoelectric bodies 23, 28, 33, and 40 are contracted. As a result, the mass portion 21 moves upward. Next, when a negative voltage is applied to the inner drive piezoelectric bodies 24, 29, 34, and 41 and a positive voltage is applied to the outer drive piezoelectric bodies 23, 28, 33, and 40, the inner drive piezoelectric bodies 24, 29, 34, and 41 shrinks and the outer drive piezoelectric bodies 23, 28, 33, and 40 extend, and as a result, the mass portion 21 moves downward. That is, the mass unit 21 is driven to vibrate at a speed V at a drive frequency in the Z-axis direction. The vibration drive of the mass portion 21 causes the inner drive piezoelectric bodies 24, 29, 34, 41 and the outer drive piezoelectric body 23 so that output signals generated from the outer monitor piezoelectric body 37 and the inner monitor piezoelectric body 67 are constant. , 28, 33, and 40 are adjusted to control the amplitude of vibration drive.

  Further, when the mass portion 21 rotates at an angular velocity ω around the central axis in the X-axis direction in a state where the mass portion 21 is driven to vibrate at a drive frequency in the Z-axis direction, as shown in FIG. 21 generates a Coriolis force of F = 2 mV × ω in the Y-axis direction. Due to this Coriolis force, the mass portion 21 is driven to vibrate in the Y-axis direction. Therefore, as shown in FIG. 7, for example, the outer detection piezoelectric body 35 and the inner detection in the first Y-axis direction support member 32 by this vibration drive. A positive charge is generated by the expansion of the piezoelectric body 36, and a negative charge is generated by the contraction of the outer detection piezoelectric element 42 and the inner detection piezoelectric element 43 in the second Y-axis direction support member 39. The electric charges generated from the outer detection piezoelectric member 35 and the inner detection piezoelectric member 36 are converted into output signals by the IV converter 60, and the electric charges generated from the outer detection piezoelectric member 42 and the inner detection piezoelectric member 43 are converted into the IV converter 61. After the output signal is converted into the output signal and the difference between the two is obtained, the synchronous velocity is detected by the synchronous detector 62 at the vibration drive frequency in the Z-axis direction as shown in FIG. It is to detect.

  At this time, since the driving frequency of the mass part 21 in the X-axis direction and the Y-axis direction is made different from each other, the detection frequency in the X-axis direction and the detection frequency in the Y-axis direction are not substantially the same. As a result, the angular velocities around the X axis and the Y axis do not interfere with each other, so that the output signal due to the angular velocities around the X axis and the Y axis is stable.

  Next, a case where an angular velocity around the Y axis is added to the mass unit 21 will be described. Also in this case, as in the case where the angular velocity around the X axis is detected, the mass portion 21 is angularly rotated around the central axis in the Y axis direction when the mass portion 21 is driven to vibrate in the Z axis direction. 9, a Coriolis force of F = 2 mV × ω in the X-axis direction is generated in the mass portion 21 as shown in FIG. 9. Due to this Coriolis force, the mass portion 21 is driven to vibrate in the X-axis direction, so that the outer detection piezoelectric member 23 and the inner detection piezoelectric member 25 in the first X-axis direction support member 22 are extended by this vibration drive. Is generated, and the outer detection piezoelectric member 30 and the inner detection piezoelectric member 31 of the second X-axis direction support member 27 are contracted to generate a negative charge. The electric charges generated from the outer detection piezoelectric member 23 and the inner detection piezoelectric member 26 are converted into output signals by the IV converter 63, and the electric charges generated from the outer detection piezoelectric member 30 and the inner detection piezoelectric member 31 are converted into the IV converter 64. 10, and after taking the differential between them, as shown in FIG. 10, the synchronous velocity is detected by the synchronous detector 66 at the frequency of the vibration drive in the Z-axis direction, whereby the angular velocity around the Y-axis is obtained. It is to detect.

  Next, a case where an angular velocity around the Z axis is added to the mass portion 21 will be described. In order to detect the angular velocity around the Z-axis, the mass unit 21 is driven to vibrate in the Y-axis direction as shown in FIG.

  First, a positive voltage is applied to the outer drive piezoelectric body 33 and the inner drive piezoelectric body 34 in the first Y-axis direction support member 32, and at the same time, the outer drive piezoelectric body 40 and the inner drive piezoelectric element in the second Y-axis direction support member 39. When a negative voltage is applied to the body 41, the outer driving piezoelectric member 33 and the inner driving piezoelectric member 34 are extended, and the outer driving piezoelectric member 40 and the inner driving piezoelectric member 41 are contracted. It moves toward the Y-axis direction support member 32.

  Next, a negative voltage is applied to the outer drive piezoelectric body 33 and the inner drive piezoelectric body 34 in the first Y-axis direction support member 32, and at the same time, the outer drive piezoelectric body 40 and the inner drive in the second Y-axis direction support member 39. When a positive voltage is applied to the piezoelectric body 41, the outer driving piezoelectric body 33 and the inner driving piezoelectric body 34 contract, and the outer driving piezoelectric body 40 and the inner driving piezoelectric body 41 extend, and as a result, the mass unit 21 has the second portion. It moves toward the Y-axis direction support member 39. That is, the mass unit 21 is driven to vibrate at a speed V at a drive frequency in the Y-axis direction. The vibration drive of the mass portion 21 is such that the output signals generated from the inner monitor piezoelectric members 38 and 67 are constant, so that the outer drive piezoelectric member 33, the inner drive piezoelectric member 34, the outer drive piezoelectric member 40, and the inner drive piezoelectric member. The amplitude of vibration drive is controlled by adjusting the voltage applied to the body 41.

  When the mass unit 21 is driven to vibrate in the Y-axis direction and the mass unit 21 rotates at an angular velocity ω around the central axis in the Z-axis direction, the mass unit 21 has F = 2 mV × ω in the X-axis direction. Coriolis force is generated. Due to the Coriolis force, the mass portion 21 is driven to vibrate in the X-axis direction, so that the outer detection piezoelectric body 25 and the inner detection piezoelectric body 26 in the first X-axis direction support member 22 are extended by the vibration drive, thereby causing positive charge. Is generated, and the outer detection piezoelectric member 30 and the inner detection piezoelectric member 31 of the second X-axis direction support member 27 are contracted to generate a negative charge. The electric charges generated from the outer detection piezoelectric member 25 and the inner detection piezoelectric member 26 are converted into output signals by the IV converter 63, and the electric charges generated from the outer detection piezoelectric member 30 and the inner detection piezoelectric member 31 are converted into the IV converter 64. After the output signal is converted to the output signal and the difference between the two is obtained, the synchronous velocity is detected by the synchronous detector 66 at the vibration drive frequency in the Y-axis direction as shown in FIG. It is to detect.

  As described above, in order to detect the angular velocity around the Z-axis, it is necessary for the mass portion 21 to be driven to vibrate in the Y-axis direction. By injecting the detection circuit 58 before the synchronous detector 62, the fluctuation generated in the output signal for detecting the angular velocity around the X axis can be prevented by the vibration drive in the Y axis direction by the drive circuit 49. Is obtained.

  In addition, while driving in the Z-axis direction, which is the center drive frequency value, and synchronously detecting the output signal generated by the angular velocity in the two-axis direction of the X-axis and the Y-axis at the drive frequency in the Z-axis direction, By detecting the angular velocities in the two axis directions of the Y axis and the Y axis, and further driving the vibration in the other Y axis direction, and synchronously detecting the output signal generated by the angular velocity around the Z axis at the driving frequency in the Y axis direction Since the angular velocity in the axial direction around the Z axis is detected, the drive and detection frequencies are close to each other, thereby obtaining the effect of increasing the sensitivity of the output signal due to the angular velocity of the three axes. It is.

  The triaxial detection angular velocity sensor according to the present invention provides a triaxial detection angular velocity sensor in which output signals due to angular velocities around the X axis and the Y axis do not interfere with each other and the output signals are stable. In particular, the present invention is useful when applied to a three-axis detection angular velocity sensor capable of detecting angular velocities in the three-axis directions of the X, Y, and Z axes.

Side sectional view of a three-axis detection angular velocity sensor in one embodiment of the present invention Top view of the 3-axis detection angular velocity sensor Side sectional view of the first X-axis direction support member in the same three-axis detection angular velocity sensor Circuit diagram of the 3-axis detection angular velocity sensor Side sectional view showing a state in which the triaxial detection angular velocity sensor is driven to vibrate in the Z axis direction The figure which shows the state which detects the angular velocity around the X-axis of the same 3-axis detection angular velocity sensor Side sectional view showing a state in which the three-axis detection angular velocity sensor is operated by the Coriolis force in the Y-axis direction. Waveform diagram showing the state of synchronous detection of the output signal from the 3-axis detection angular velocity sensor at the drive frequency in the Z-axis direction The figure which shows the state which detects the angular velocity around the Y-axis of the same 3-axis detection angular velocity sensor Waveform diagram showing the state of synchronous detection of the output signal from the 3-axis detection angular velocity sensor at the drive frequency in the Z-axis direction The figure which shows the state which detects the angular velocity around the Z-axis of the same 3-axis detection angular velocity sensor Waveform diagram showing the state of synchronous detection of the output signal from the 3-axis detection angular velocity sensor at the drive frequency in the Y-axis direction Side sectional view of a conventional 3-axis detection angular velocity sensor Top view of the 3-axis detection angular velocity sensor

21 Mass part 22, 27 X-axis direction support member 23, 24, 28, 29, 33, 34, 40, 41 Drive piezoelectric body 25, 26, 30, 31, 35, 36, 42, 43 Detection piezoelectric body 32, 39 Y-axis direction support member 37, 38, 67 Monitor piezoelectric body

Claims (3)

An X-axis direction support that supports a mass part that is displaceable in the X-axis, Y-axis, and Z-axis directions, and that supports the mass part and that extends in the X-axis direction and is provided with at least one detection piezoelectric body on the upper surface. A member, and a Y-axis direction supporting member that supports the mass portion and extends in the Y-axis direction, and includes at least one drive piezoelectric body, at least one detection piezoelectric body, and at least one monitor piezoelectric body on the upper surface. A three-axis detection angular velocity sensor configured to vary the drive frequencies of the mass part in the X-axis direction, the Y-axis direction, and the Z-axis direction. Compares the drive frequencies in the X-axis, Y-axis, and Z-axis directions, and drives them to vibrate in the axial direction of the central drive frequency value, and synchronizes the output signal generated by the angular velocity in the other two-axis directions with the central drive frequency By detecting each angular velocity in the other two axial directions, and driving one of the other two axial directions in vibration, and an output signal generated by the axial angular velocity of the central driving frequency 2. The three-axis detection angular velocity sensor according to claim 1, wherein the angular velocity in the axial direction of the central drive frequency is detected by synchronously detecting at a drive frequency in one of the other two-axis directions. An output signal consisting of the opposite phase of the vibration drive signal in one of the other two axial directions is injected into the output signal due to the Coriolis force generated by the angular velocity applied in the other axial direction of the other two axial directions. The triaxial detection angular velocity sensor according to claim 2 which was made.

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