JP2008260141A5 - - Google Patents

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Publication number
JP2008260141A5
JP2008260141A5 JP2007102623A JP2007102623A JP2008260141A5 JP 2008260141 A5 JP2008260141 A5 JP 2008260141A5 JP 2007102623 A JP2007102623 A JP 2007102623A JP 2007102623 A JP2007102623 A JP 2007102623A JP 2008260141 A5 JP2008260141 A5 JP 2008260141A5
Authority
JP
Japan
Prior art keywords
film
evaluated
irradiated
electron beam
extruder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007102623A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008260141A (ja
JP5166762B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007102623A priority Critical patent/JP5166762B2/ja
Priority claimed from JP2007102623A external-priority patent/JP5166762B2/ja
Publication of JP2008260141A publication Critical patent/JP2008260141A/ja
Publication of JP2008260141A5 publication Critical patent/JP2008260141A5/ja
Application granted granted Critical
Publication of JP5166762B2 publication Critical patent/JP5166762B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007102623A 2007-04-10 2007-04-10 帯電防止フィルム Active JP5166762B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007102623A JP5166762B2 (ja) 2007-04-10 2007-04-10 帯電防止フィルム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007102623A JP5166762B2 (ja) 2007-04-10 2007-04-10 帯電防止フィルム

Publications (3)

Publication Number Publication Date
JP2008260141A JP2008260141A (ja) 2008-10-30
JP2008260141A5 true JP2008260141A5 (enExample) 2010-05-20
JP5166762B2 JP5166762B2 (ja) 2013-03-21

Family

ID=39983008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007102623A Active JP5166762B2 (ja) 2007-04-10 2007-04-10 帯電防止フィルム

Country Status (1)

Country Link
JP (1) JP5166762B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101062360B1 (ko) 2008-10-31 2011-09-05 광 석 서 계면 접착력이 개선된 3층 구조의 대전방지 쉬트 및 이를 이용한 트레이

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005194521A (ja) * 2003-12-11 2005-07-21 Sumitomo Chemical Co Ltd 接着フィルムの製造方法
JP4317161B2 (ja) * 2004-05-31 2009-08-19 三洋化成工業株式会社 帯電防止性多層フィルム
JP4526937B2 (ja) * 2004-12-02 2010-08-18 アキレス株式会社 半導体製造テープ用帯電防止基材フィルム

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