JP2008260071A - Vacuum sucking disk - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum sucking disk to perform a partial suction, or to enable only an area as required out of a surface of a suctioning material subject to be sucked according to a size and shape of such a material. <P>SOLUTION: The vacuum sucking disk provided with a number of suction holes on its surface in contact with a suctioning material comprises: a first permanent magnet having an air hole and fixed on an internal bottom portion of the respective suction holes; a second permanent magnet disposed above the first permanent magnet such that the second magnet is movable within the respective suction holes, wherein the first and second permanent magnets have magnetic poles in repulsion each other. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a vacuum suction disk for holding an object when performing processing such as grinding, polishing, and cutting, or when transporting.

  When using non-metallic members that do not receive magnetic attraction force or members that dislike magnetism, when processing such as grinding, polishing, and cutting, or when transporting, vacuum suction disks that use vacuum to hold objects are used. Has been. A typical structure of a conventional vacuum suction disk is as shown in FIG. 1 (see FIG. 4 of Patent Document 1). In FIG. 1, a vacuum suction disk 1 has a structure in which a suction member 2 formed of porous ceramic is joined and fixed by a support member 3. A suction hole 4 for suctioning by a vacuum pump is provided in the lower center of the support member 3. The object to be adsorbed 6 is adsorbed and held on the adsorbing member 2 by being sucked by a vacuum pump (air sucking 7) through the sucking hole 4 and reducing the cavity 5 between the adsorbing member 2 and the support member 3 to a reduced pressure state. The

  In the conventional vacuum suction disk as described above, the size / shape of the suction member (that is, the vacuum suction disk) needs to be adapted to the size / shape of the object to be sucked. For example, as shown in FIG. 2, when the object to be adsorbed 6 is smaller than the adsorbing member 2 (vacuum adsorbing board 1), a region not in contact with the object to be adsorbed 6 is formed on the adsorbing surface 2 a of the adsorbing member 2. In other words, even if suction is performed through the suction hole 4 by the vacuum pump, air is sucked from the non-contact area (air flow 8), so that the attracting force of the object 6 is weakened or not attracted. (FIG. 2).

  In recent manufacturing, there are many cases in which a small amount and a variety of products are handled, and it is required to produce various types of products having different sizes and shapes. If the vacuum suction plate is changed and used according to the size and shape of the individual object to be adsorbed, the equipment cost for manufacturing the vacuum adsorber increases, and the labor to change the vacuum adsorber every time the object to be adsorbed changes. There is an inconvenience that it takes.

Therefore, an example of a vacuum suction disk is disclosed that enables partial suction, that is, suction of only a necessary region of the surface of the suction member in accordance with the size and shape of the object to be sucked.
As a first example, a suction suction surface of a vacuum suction disk provided with a number of suction holes is disclosed (see Patent Document 2). When adsorbing and holding the object to be adsorbed, air leakage can be prevented by placing and closing the magnetic sphere on the suction hole that does not contact the object to be adsorbed. After the vacuum suction disk is used, it is used again by opening the suction hole by removing the magnetic sphere using a magnet.

As another example, a table body having an adsorption surface for adsorbing an object to be adsorbed, a plurality of evacuation communication passages opened on the adsorption surface, and at least some of the communication passages are closed. A vacuum suction table including a closing body that is made of a material that is attracted to or repels the magnet, and the closing body is disposed in a moving space provided on each communication path. Discloses a vacuum suction table that is movably accommodated between a closed position and an open position (see claim 1 of Patent Document 3).
JP-A-6-8086 JP-A 63-109934 Japanese Patent Laid-Open No. 10-249663

An object of the present invention is to provide a vacuum suction disk that enables partial suction, that is, suction of only a necessary region of the surface of the suction member in accordance with the size and shape of the object to be sucked.
The technique disclosed in Patent Document 2 as a conventional technique is to close a suction hole on which an object to be adsorbed is not adsorbed (not placed) with a magnetic sphere, but it takes time since such pretreatment is required. Since the suction surface is provided with a number of suction holes, when all the suction holes of the suction target are closed with magnetic spheres, if there is a mounting sphere of the magnetic spheres, air leaks and the suction force becomes weak. The adsorbate may not be adsorbed. In addition, since a post-processing of collecting the magnetic spheres every time the adsorption work is completed requires time and effort, and if the collection of the magnetic spheres is incomplete, the next object to be adsorbed may not be adsorbed.

  Furthermore, in the technique disclosed in Patent Document 3, for each of the suction holes provided in the suction surface, the suction hole is closed or opened by moving a closing body made of a magnetic material with a magnet. It is very troublesome to perform the above operation for each of the suction holes. In addition, if the position of closing / opening by the closing body is wrong, there may be a problem that air leaks or an object to be adsorbed is not adsorbed and held.

  This invention makes it a subject to provide the vacuum suction disk which eliminated the fault of these prior arts.

  The present invention is a vacuum suction disk provided with a large number of suction holes on the suction surface that comes into contact with the object to be attracted, the first permanent magnet having a vent hole is fixed to the bottom inside each of the suction holes, A magnetic pole in which a second permanent magnet is disposed above the first permanent magnet so as to be movable inside the suction hole, and opposing surfaces of the first permanent magnet and the second permanent magnet repel each other. The vacuum suction disk is provided.

  The vacuum suction disk of the present invention is preferably characterized in that a breathable member is disposed in the ventilation hole on the suction surface. In another aspect, preferably, a porous ceramic member is disposed in the vent hole on the adsorption surface.

  The vacuum suction disk of the present invention is preferably characterized in that a coating is applied to the opposing surfaces of the first permanent magnet and the second permanent magnet.

  ADVANTAGE OF THE INVENTION According to this invention, the vacuum suction disk which enables the suction of only a required area | region among adsorption | suction member surfaces according to the size and shape of a to-be-adsorbed object is provided according to partial suction. Since the vacuum suction disk of the present invention can be used as it is without depending on the size and shape of the object to be adsorbed, it can be efficiently processed and conveyed. As in the prior art, the vacuum suction disk of the present invention does not require the pre-treatment and post-treatment for each suction work, and can perform partial suction well without depending on the size and shape of the object to be adsorbed. It becomes possible. In particular, when the object to be adsorbed is a small quantity and a wide variety, efficient work is possible.

Embodiments of the vacuum suction disk of the present invention will be described below with reference to the drawings.
The vacuum suction disk of the present invention is a vacuum suction disk provided with a large number of suction holes on the suction surface that comes into contact with an object to be attracted, and a first permanent magnet having a vent hole is provided at the bottom of each suction hole. And a second permanent magnet having a magnetic pole repelling the first permanent magnet is disposed above the first permanent magnet so as to be movable inside the suction hole. Is.

  FIG. 3 is a cross-sectional view showing one embodiment of the vacuum suction disk of the present invention. In FIG. 3, the vacuum suction disk 101 includes a suction surface 102a provided with a number of suction holes 102 and a support portion 103 that supports the suction surface 102a. The support portion 103 is provided with a suction hole 104 for suction by a vacuum pump. On the suction surface 102a, a breathable member 111 is disposed in the vent hole 102, as in the case of FIG.

  A first permanent magnet 105 and a second permanent magnet 106 are disposed inside each suction hole 102. The first permanent magnet 105 has a vent hole 105 a and is fixed to the bottom of the suction hole 102. The second permanent magnet 106 is disposed above the first permanent magnet 105 so as to be movable inside the suction hole 102. The opposing surfaces of the first permanent magnet 105 and the second permanent magnet 106 have magnetic poles that repel each other.

  The dimension of the second permanent magnet 106 is smaller than the dimension of the suction hole 102 but larger than the dimension of the vent hole 105a of the first permanent magnet 105. Thereby, a ventilation path is formed from the suction hole 104 to each suction hole 102 through the ventilation hole 105 a of the first permanent magnet 105 inside the vacuum suction board 101.

  The shapes of the first permanent magnet 105 and the second permanent magnet 106 are not particularly limited, but when the second permanent magnet 106 moves to the lowest position inside the suction hole 102 and comes into contact with the first permanent magnet 105. In addition, it is assumed that the opposing surfaces of the first permanent magnet 105 and the second permanent magnet 106 are in close contact so that the ventilation is completely blocked.

  By sucking with a vacuum pump through the suction hole 104 (air suction 108) and reducing the air passage 107 inside the vacuum suction disk 101 to a reduced pressure state, the object to be adsorbed 109 is adsorbed and held on the adsorption surface 102a.

  At this time, the object to be adsorbed 109 is held on the adsorption surface 102 a by the atmospheric pressure 110. In the region that is not in contact with the object to be attracted 109 on the attracting surface 102 a, atmospheric pressure 110 is applied to the second permanent magnet 106 in the attracting hole 102, and the second permanent magnet 106 is pressed against the first permanent magnet 105. As a result, the vent hole 105a of the first permanent magnet 105 is closed. As a result, air does not flow from the suction hole 102 into the ventilation path 107 inside the vacuum suction board 101, and the ventilation path 107 inside the vacuum suction board 101 is kept in a reduced pressure state. On the other hand, in the region in contact with the object to be adsorbed 109 on the adsorption surface 102a, the atmospheric pressure 110 is applied to the object to be adsorbed 109, and air flows into the adsorption hole 102 due to the presence of the object to be adsorbed 109. There is no force that presses the second permanent magnet 106 against the first permanent magnet 105. The second permanent magnet 106 is kept floating from the first permanent magnet 105 due to the repulsion of the magnetic pole between the second permanent magnet 106 and the first permanent magnet 105, so that the inside of the vacuum suction plate 101 is maintained. The air passage 107 is kept in a reduced pressure state by air suction. Thus, in the vacuum suction disk of the present invention, the second permanent magnet 106 serves as an automatic opening / closing valve.

  Next, FIG. 4 is a top view showing an embodiment of the vacuum suction disk of the present invention. A number of suction holes 102 are provided in the suction surface 102 a of the vacuum suction disk 101. The object to be adsorbed 109 is arranged on the adsorption surface 102a, and is sucked by a vacuum pump through a suction hole (not shown) of the support portion 103, a ventilation path (not shown) inside the vacuum suction board, and each suction hole 102. The air is sucked and held on the suction surface 102a by air suction.

  Next, FIG. 5 (a)-(d) is sectional drawing which shows the various aspects of an internal structure about each suction hole of the vacuum suction disk of this invention. The mode shown in FIG. 5A has a structure in which the suction hole 102 is largely opened on the suction surface 102a. In FIG. 5A, a first permanent magnet 105 and a second permanent magnet 106 are disposed inside the suction hole 102. The first permanent magnet 105 has a vent hole 105 a and is fixed to the bottom of the suction hole 102. The second permanent magnet 106 is disposed above the first permanent magnet 105 so as to be movable inside the suction hole 102. Although the size of the second permanent magnet 106 is smaller than the size of the suction hole 102, it is larger than the size of the vent hole 105 a of the first permanent magnet 105. A ventilation path is formed from the suction hole 104 to each suction hole 102 through the ventilation hole 105 a of the first permanent magnet 105.

  The mode of FIG. 5B has a structure in which the suction hole 102 is made smaller on the suction surface 102a as compared with the mode shown in FIG. Thus, in the present invention, the size of the suction hole is particularly determined on the condition that a ventilation path is formed from the suction hole to each suction hole through the ventilation hole of the first permanent magnet inside the vacuum suction disk. It is not limited. When the size of the suction hole 102 is large on the suction surface 102a as shown in FIG. 5A, the shape of the suction hole 102 is transferred to the target object 109 by vacuum suction when the target object 109 is thin. Although the quality of the object to be adsorbed after processing may be adversely affected, the occurrence of such a problem can be prevented by reducing the size of the adsorption hole 102.

  In the mode shown in FIG. 5C, the air-permeable member 111 is disposed in the air hole 102 on the suction surface 102a. As shown in FIGS. 5 (a) and 5 (b), when the suction hole 102 is open on the suction surface 102a, the suction hole 102 is shaped by vacuum suction when the suction target 109 is thin. May be transferred to the object 109 and adversely affect the quality of the object to be adsorbed after processing. Further, dust may flow into the adsorption hole 102 and the first permanent magnet 105 and the second permanent magnet 106 may be brought into close contact with each other. There is a possibility that a problem occurs in the sex. This aspect can prevent the occurrence of such a problem.

  The breathable member 111 is porous, and the pores are continuous pores instead of independent pores. This is because air cannot flow in the independent pores, and the object to be adsorbed cannot be adsorbed as a vacuum adsorber.

  The breathable member 111 is not particularly limited, but organic, inorganic, and metal materials can be used. The material of the air-permeable member 111 is an inorganic material because it is easy to manufacture without deterioration over time, deformation at the time of adsorption, and quality deterioration of the adsorbed material due to transfer of the material from the air-permeable member. Preferably, it is a porous ceramic member. Examples of the ceramic include various ceramics such as alumina, zirconia, silicon carbide, and silicon nitride. There are various methods for making these ceramics porous. However, in order to use them as air-permeable members in the present invention, it is necessary to connect the pores so that air can flow. For this purpose, for example, ceramic may be made into particles of a predetermined size, and the particles may be hardened with glass or the like and fired. According to this method, each pore can be surely communicated, and the pore diameter can be easily adjusted by adjusting the particle diameter.

  Furthermore, as another method, pores remain without being densified by mixing the ceramic raw material with a material that disappears during firing and adjusting the firing method, firing temperature or firing time. A porous ceramic can be obtained by, for example, a method of terminating firing in a state.

The size of the pores is appropriately determined in consideration of the processing contents of the object to be adsorbed and the power of the vacuum pump.
5D, the surface of the first permanent magnet 105 facing the second permanent magnet 106 has a conical concave shape, and the first permanent magnet 105 of the second permanent magnet 106 The opposite surface has a conical convex shape. Thereby, the adhesiveness of a 1st permanent magnet and a 2nd permanent magnet can further be improved.

  Since the first permanent magnet and the second permanent magnet repeatedly collide with each other on the opposite surface each time a vacuum suction disk is used, there is a possibility that the first permanent magnet and the second permanent magnet may be damaged due to accumulated fatigue. Therefore, in order to alleviate the impact at the time of collision and prevent breakage, preferably, as shown in FIG. 6, coating processes 105 c and 106 c may be applied to the opposing surfaces of the first permanent magnet and the second permanent magnet. Good. Although a coating material is not specifically limited, A film material and resin can be apply | coated.

Next, the relationship between the first and second permanent magnets in the vacuum suction disk of the present invention will be described with reference to FIG.
In FIG. 7, the first permanent magnet 105 has a vent hole 105a. Thereby, air can be sucked by a vacuum pump through a suction hole (not shown) of the support portion. The second permanent magnet 106 is disposed above the first permanent magnet 105 so as to be movable inside the suction hole. In the present invention, the shape of the permanent magnet is not particularly limited as described above, but in FIG. 7, it is shown in a cylindrical shape for convenience of explanation. The opposing surfaces of the first permanent magnet 105 and the second permanent magnet 106 have magnetic poles that repel each other. Therefore, the magnetic poles of the opposing surfaces of the first and second permanent magnets are N pole-N pole or S pole-S pole.

  Next, the operation of the permanent magnet in the vacuum suction disk of the present invention will be described. FIG. 8A is a conceptual diagram showing a suction hole in a region in contact with the object to be adsorbed on the adsorption surface, and FIG. 8B is a region in contact with the object to be adsorbed on the adsorption surface. It is a conceptual diagram which shows the suction hole in.

  In FIG. 8A, in the region in contact with the object to be adsorbed 109 on the adsorption surface, air flows into the adsorption hole 102 from the adsorption surface 102a by the air suction (108) due to the presence of the object to be adsorbed 109. Accordingly, the atmospheric pressure 110 is applied to the object to be adsorbed 109, and the object to be adsorbed 109 is fixed on the adsorption surface 102 a by the adsorption holding force 112. Thereby, the inside of the suction hole 102 is kept in a reduced pressure state. Since the second permanent magnet 106 is in a repulsive relationship with the first permanent magnet 105, it is kept in a floating state. As a result, the decompressed state inside the suction hole 102 is maintained without blocking the vent hole 105a, and the object to be adsorbed 109 is satisfactorily fixed on the suction surface 102a.

  In FIG. 8B, in the region not in contact with the object to be adsorbed 109 on the adsorption surface, the flow of air flowing from the adsorption surface 102a to the inside of the adsorption hole 102 through the air-permeable member 111 by air suction (108). 113 is generated, and the atmospheric pressure 110 is applied to the second permanent magnet 106 in the suction hole 102. Since the first permanent magnet 105 and the second permanent magnet 106 have magnetic poles repelling each other on the opposing surfaces, the second permanent magnet 106 is in a floating state before air suction (108). When the force that pushes the permanent magnet 106 to the first permanent magnet 105 acts, the force that pushes the second permanent magnet is superior to the repulsive force of the magnet, and the second permanent magnet 106 acts on the first permanent magnet 105. The air hole 105a of the first permanent magnet 105 is closed by being pressed. As a result, the air flow 113 is blocked, and air does not flow from the suction hole 102 into the ventilation path 107 inside the vacuum suction board 101, and the ventilation path 107 inside the vacuum suction board 101 is kept in a reduced pressure state. In addition, when processing such as grinding, polishing, and cutting is performed in a wet manner, the grinding fluid flows into the suction hole 102 because the vent hole 105a of the first permanent magnet 105 is blocked by the second permanent magnet 106. In this way, the flow of grinding fluid into the vacuum pump is minimized, and the vacuum pump can be prevented from being damaged.

  In the present invention, the permanent magnets used as the first and second permanent magnets are selected according to the relationship with the suction force of the vacuum pump. In general, a conventional vacuum pump can only be reduced to a pressure reducing force (pressing pressure) of about −80 kPa, so that the repulsive force of the permanent magnet is preferably less than that. Examples of permanent magnets that can be used in the present invention include ferrites such as Ba ferrite (isotropic) and Sr ferrite (anisotropic), alnicos, and rare earths such as samariums and neodymiums. Since it is inexpensive, it is preferable to use a Ba ferrite permanent magnet.

  In the vacuum suction disk of the present invention, the size and shape of the suction hole of the support portion are appropriately determined in consideration of the equipment in which the vacuum suction disk of the present invention is used and the type of the object to be adsorbed. The applicable range of the diameter is 5 to 100 mm, preferably 7 to 50 mm, more preferably 8 to 30 mm.

  In the vacuum suction disk of the present invention, the representative diameter of the vent hole of the first permanent magnet is 30 to 70% with respect to the representative diameter of the suction hole. If it is less than 30%, the vacuum suction cannot be sufficiently performed, and if it exceeds 70%, the vent hole cannot be blocked by the second permanent magnet. Preferably, the representative diameter of the vent hole of the first permanent magnet is 40 to 60% with respect to the representative diameter of the suction hole.

  The representative diameter of the second permanent magnet needs to be smaller than the representative diameter of the suction hole so that an air passage is formed between the second permanent magnet and the suction hole during air suction. Moreover, it is also necessary that the representative diameter of the suction hole is smaller than the diagonal length of the second permanent magnet so that the second permanent magnet is not reversed and joined to the first permanent magnet. Therefore, as shown in FIG. 9, when the representative diameter of the suction hole is D, the representative diameter of the second permanent magnet is X, and the height of the second permanent magnet is Y, the following relationship is satisfied. .

The clearance between the representative diameter of the suction hole and the representative diameter of the second permanent magnet is appropriately determined depending on the specifications of the vacuum pump, the equipment used, the characteristics of the object to be adsorbed, and the like.
In the vacuum suction disk of the present invention, an organic material, a metal material, or an inorganic material can be used as a material of the support portion 103 on the condition that it has a strength that does not break due to an external force during work. In a specific aspect, as shown in FIG. 5, the suction surface 102 a and the support portion 103 may be configured as independent members, and the suction surface 102 a may be bonded and fixed by the support portion 103.

  In the present specification and drawings, the vacuum suction disk of the present invention has been described as having a circular cross section, but the shape of the vacuum suction disk of the present invention is not particularly limited. You may have a cross section of a polygon or various deformation shapes.

FIG. 1 is a view showing an example of the structure of a conventional vacuum suction disk. FIG. 2 is a diagram illustrating an example of the use of a conventional vacuum suction disk. FIG. 3 is a cross-sectional view showing one embodiment of the vacuum suction disk of the present invention. FIG. 4 is a top view showing one embodiment of the vacuum suction disk of the present invention. 5A to 5B are cross-sectional views showing various aspects of the internal structure of each suction hole of the vacuum suction disk of the present invention. FIG.5 (c)-(d) is sectional drawing which shows the various aspect of an internal structure about each suction hole of the vacuum suction disk of this invention. FIG. 6 is a cross-sectional view showing an embodiment of the vacuum suction disk according to the present invention, in which the opposing surfaces of the first and second permanent magnets are coated. FIG. 7 is a conceptual diagram showing the relationship between the first and second permanent magnets in the vacuum suction disk of the present invention. FIG. 8A is a conceptual diagram showing a suction hole in a region in contact with the object to be adsorbed on the adsorption surface, and FIG. 8B is a region in contact with the object to be adsorbed on the adsorption surface. It is a conceptual diagram which shows the suction hole in. FIG. 9 is a diagram showing dimensions of each part of the suction hole and the second permanent magnet in the vacuum suction disk of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum adsorption board 2 Porous ceramic adsorption member 3 Support member 4 Suction hole 5 Cavity part 6 Object to be adsorbed 7 Air suction (connects to vacuum pump)
8 Air Flow 101 Vacuum Suction Board 102 Suction Hole 102a Suction Surface 103 Supporting Section 104 Suction Hole 105 First Permanent Magnet 105a Vent Hole 105c Coating Process 106 Second Permanent Magnet 106c Coating Process 107 Ventilation Path 108 Air Suction (Vacuum Pump Lead to)
109 Adsorbed object 110 Atmospheric pressure 111 Breathable member 112 Adsorption holding force 113 Air flow

Claims (4)

  A vacuum suction disk provided with a number of suction holes on the suction surface in contact with the object to be attracted, wherein a first permanent magnet having a vent hole is fixed to the bottom inside each of the suction holes, and a second permanent magnet A magnet is disposed above the first permanent magnet so as to be movable inside the suction hole, and the opposing surfaces of the first permanent magnet and the second permanent magnet have magnetic poles that repel each other. The vacuum suction disk characterized by the above.   The vacuum suction disk according to claim 1, wherein a breathable member is disposed in the ventilation hole on the suction surface.   The vacuum suction disk according to claim 1, wherein a porous ceramic member is disposed in the ventilation hole on the suction surface.   The vacuum suction disk according to any one of claims 1 to 3, wherein a coating is applied to opposing surfaces of the first permanent magnet and the second permanent magnet.

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