JP2008254162A5 - - Google Patents
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- JP2008254162A5 JP2008254162A5 JP2007130619A JP2007130619A JP2008254162A5 JP 2008254162 A5 JP2008254162 A5 JP 2008254162A5 JP 2007130619 A JP2007130619 A JP 2007130619A JP 2007130619 A JP2007130619 A JP 2007130619A JP 2008254162 A5 JP2008254162 A5 JP 2008254162A5
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- swing
- mover
- elastic support
- mass
- swing axis
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- 238000004519 manufacturing process Methods 0.000 claims 9
- 230000005484 gravity Effects 0.000 claims 5
- 230000003287 optical Effects 0.000 claims 4
- 230000001678 irradiating Effects 0.000 claims 2
Claims (15)
前記揺動部は、可動子と該揺動部の質量を調整するための質量調整体とを有すると共に、前記可動子と前記質量調整体の一部との間に空隙が形成されており、
前記質量調整体にレーザ光を照射することで、該レーザ光の照射されない部分を含んで、前記空隙上の前記質量調整体の一部を除去する工程を有する、
ことを特徴とする揺動体装置の製造方法。 A method of manufacturing a rocking body device comprising a rocking part, an elastic support part, and a support body, wherein the rocking part is supported by the elastic support part so as to be rockable about a rocking axis,
The oscillating portion has a movable element and a mass adjusting body for adjusting the mass of the oscillating portion, and a gap is formed between the movable element and a part of the mass adjusting body.
Irradiating the mass adjusting body with laser light, and including a step of removing a part of the mass adjusting body on the gap including a portion not irradiated with the laser light.
The manufacturing method of the oscillator device characterized by the above-mentioned.
ことを特徴とする請求項1に記載の揺動体装置の製造方法。 The laser light is applied to the mass adjusting body in a closed curve shape, and a part of the mass adjusting body surrounded by the closed curve is removed.
2. The manufacturing method of the oscillator device according to claim 1, wherein
前記質量調整体の一部を除去して、前記固有振動モードの周波数の調整と、前記揺動部の重心位置の調整のうち少なくとも一方を行う、
ことを特徴とする請求項1に記載の揺動体装置の製造方法。 The oscillator device has at least one natural vibration mode around the oscillation axis,
Removing a part of the mass adjusting body, and performing at least one of the adjustment of the frequency of the natural vibration mode and the adjustment of the center of gravity of the swinging portion;
2. The manufacturing method of the oscillator device according to claim 1, wherein
前記揺動部は、該揺動部の質量を調整するための突出部を持つ可動子で構成されており、前記突出部は前記可動子から前記揺動軸と平行な方向に突出しており、
前記突出部の切断部にレーザ光を照射することで、該レーザ光の照射されない該切断部から先の前記突出部を含んで、前記可動子の一部を除去可能であり、
前記切断部の位置を変えることで、除去量を調整する工程を有する、
ことを特徴とする揺動体装置の製造方法。 A method of manufacturing a rocking body device comprising a rocking part, an elastic support part, and a support body, wherein the rocking part is supported by the elastic support part so as to be rockable about a rocking axis,
The swing part is composed of a mover having a protrusion for adjusting the mass of the swing part, and the protrusion protrudes from the mover in a direction parallel to the swing axis,
By irradiating the cut portion of the protruding portion with laser light, it is possible to remove a part of the mover including the protruding portion from the cutting portion that is not irradiated with the laser light,
Having a step of adjusting the removal amount by changing the position of the cutting portion;
The manufacturing method of the oscillator device characterized by the above-mentioned.
前記揺動部は、該揺動部の質量を調整するための複数の突出部を持つ可動子で構成されており、
前記突出部は、前記揺動軸に対して互いに反対側に配置され、
前記突出部の切断部を切断することで、該切断部から先の前記突出部を含んで、前記可動子の一部を除去可能であり、
前記切断部の位置を変えることで、前記揺動部の慣性モーメントと前記揺動部の重心の前記揺動軸からのオフセット距離とを調整する工程を有する、
ことを特徴とする揺動体装置の製造方法。 A method of manufacturing a rocking body device comprising a rocking part, an elastic support part, and a support body, wherein the rocking part is supported by the elastic support part so as to be rockable about a rocking axis,
The swing part is composed of a mover having a plurality of protrusions for adjusting the mass of the swing part,
The protrusions are disposed on opposite sides of the swing shaft,
By cutting the cutting portion of the protruding portion, including the protruding portion ahead of the cutting portion, it is possible to remove a part of the mover,
Adjusting the moment of inertia of the swing part and the offset distance of the center of gravity of the swing part from the swing axis by changing the position of the cutting part;
The manufacturing method of the oscillator device characterized by the above-mentioned.
前記対称な位置の突出部は、互いに異なった形状を除去される、
ことを特徴とする請求項５に記載の揺動体装置の製造方法。 The protrusions are arranged in pairs at positions symmetrical to the swing axis,
The protrusions at the symmetrical positions are removed from different shapes.
The method for manufacturing an oscillator device according to claim 5 .
前記揺動部は、可動子と該揺動部の質量を調整するための質量調整体とを有すると共に、前記可動子と前記質量調整体の一部との間に空隙が形成されている、
ことを特徴とする揺動体装置。 An oscillating device comprising an oscillating portion, an elastic support portion, and a support body, wherein the oscillating portion is supported by the elastic support portion so as to be oscillatable about an oscillation axis,
The oscillating portion includes a movable element and a mass adjusting body for adjusting the mass of the oscillating portion, and a gap is formed between the movable element and a part of the mass adjusting body.
An oscillator device characterized by the above.
前記揺動部は、該揺動部の質量を調整するための突出部を持つ可動子で構成されており、
前記突出部は前記可動子から前記揺動軸と平行な方向に突出しており、
前記突出部の前記揺動軸を法線とする断面積が、前記揺動軸方向に一定である、
ことを特徴とする揺動体装置。 An oscillating device comprising an oscillating portion, an elastic support portion, and a support body, wherein the oscillating portion is supported by the elastic support portion so as to be oscillatable about an oscillation axis,
The oscillating part is composed of a mover having a protrusion for adjusting the mass of the oscillating part,
The protrusion protrudes from the mover in a direction parallel to the swing axis,
A cross-sectional area of the protruding portion with the swing axis as a normal line is constant in the swing axis direction ;
An oscillator device characterized by the above.
前記振動系は、第1揺動部と第1弾性支持部と、第2揺動部と第2弾性支持部と、支持体で構成され、
前記第1揺動部は、前記第1揺動部の質量を調整するための突出部を持つ第1可動子で構成され、
前記第2揺動部は、前記第2揺動部の質量を調整するための突出部を持つ第2可動子で構成され、
前記突出部は前記可動子から前記揺動軸と平行な方向に突出しており、
前記突出部の前記揺動軸を法線とする断面積が、前記揺動軸方向に一定である前記第1可動子は、前記第2可動子に前記第1弾性支持部で前記揺動軸回りに揺動可能に弾性支持され、
前記第2可動子は、前記支持体に、前記第2弾性支持部で前記揺動軸回りに揺動可能に弾性支持され、
前記振動系は、前記揺動軸回りに、周波数が異なる少なくとも2つの固有振動モードを有する、
ことを特徴とする揺動体装置。 Including a vibration system and drive means for driving the vibration system;
The vibration system includes a first swing part, a first elastic support part, a second swing part, a second elastic support part, and a support,
The first swing part is composed of a first mover having a protrusion for adjusting the mass of the first swing part,
The second swing part is composed of a second mover having a protrusion for adjusting the mass of the second swing part,
The protrusion protrudes from the mover in a direction parallel to the swing axis,
The first movable element having a cross-sectional area with the swing axis as a normal line of the projecting portion being constant in the swing axis direction is configured so that the second elastic element is supported by the first elastic support portion on the swing shaft. Elastically supported to swing around,
The second mover is elastically supported on the support body so as to be swingable about the swing axis by the second elastic support portion,
The vibration system has at least two natural vibration modes having different frequencies around the swing axis.
An oscillator device characterized by the above.
前記揺動部は、該揺動部の質量を調整するための複数の突出部を持つ可動子で構成されており、
前記突出部は、前記揺動軸に対して対称な位置に対を成して配置され、
前記対称な位置の突出部は、互いに形状が異なっており、
前記揺動部の重心は、前記揺動軸上にある、
ことを特徴とする揺動体装置。 An oscillating device comprising an oscillating portion, an elastic support portion, and a support body, wherein the oscillating portion is supported by the elastic support portion so as to be oscillatable about an oscillation axis,
The swing part is composed of a mover having a plurality of protrusions for adjusting the mass of the swing part,
The protrusions are arranged in pairs at positions symmetrical to the swing axis,
The protrusions at the symmetrical positions are different in shape from each other,
The center of gravity of the swing part is on the swing axis,
An oscillator device characterized by the above.
前記突出部の前記揺動軸を法線とする断面積が、前記揺動軸方向に一定であり、
前記揺動軸に対して対称な位置の前記突出部は、前記揺動軸方向の長さが互いに異なっている、
ことを特徴とする請求項１０に記載の揺動体装置。 The plurality of protrusions protrude from the mover in a direction parallel to the swing axis,
A cross-sectional area of the protruding portion with the swing axis as a normal line is constant in the swing axis direction;
The protrusions at positions symmetrical to the swing axis are different from each other in length in the swing axis direction.
The oscillator device according to claim 10 .
前記振動系は、第1揺動部と第1弾性支持部と、第2揺動部と第2弾性支持部と、支持体で構成され、
前記第1揺動部は、該第1揺動部の質量を調整するための複数の第1突出部を持つ第1可動子で構成され、
前記第2揺動部は、該第2揺動部の質量を調整するための複数の第2突出部を持つ第2可動子で構成され、
前記複数の第1突出部及び複数の第2突出部は、前記揺動軸に対して、それぞれ対称位置に前記第1突出部と第2突出部の少なくとも一方の前記対称位置の突出部は、互いに形状が異なり、
前記第1揺動部の重心及び前記第2揺動部の重心は、前記揺動軸上にあり、
前記第1可動子は、前記第2可動子に前記第1弾性支持部で前記揺動軸回りに揺動可能に弾性支持され、
前記第2可動子は、前記支持体に、前記第2弾性支持部で前記揺動軸回りに揺動可能に弾性支持され、
前記振動系は、前記揺動軸回りに、周波数が異なる少なくとも2つの固有振動モードを有する、
ことを特徴とする揺動体装置。 Including a vibration system and drive means for driving the vibration system;
The vibration system includes a first swing part, a first elastic support part, a second swing part, a second elastic support part, and a support,
The first swing part is composed of a first mover having a plurality of first protrusions for adjusting the mass of the first swing part,
The second swing part is composed of a second mover having a plurality of second projecting parts for adjusting the mass of the second swing part,
The plurality of first projecting portions and the plurality of second projecting portions are respectively symmetrical with respect to the swing axis, and the projecting portions at least one of the first projecting portion and the second projecting portion are in the symmetrical position. The shapes are different from each other,
The center of gravity of the first swing part and the center of gravity of the second swing part are on the swing axis,
The first mover is elastically supported by the second mover so as to be swingable about the swing axis by the first elastic support portion,
The second mover is elastically supported on the support body so as to be swingable about the swing axis by the second elastic support portion,
The vibration system has at least two natural vibration modes having different frequencies around the swing axis.
An oscillator device characterized by the above.
前記第1突出部及び第2突出部の前記揺動軸を法線とする断面積が、前記揺動軸方向に一定であり、
前記第1突出部と前記第2突出部の少なくとも一方の前記揺動軸に対して対称な位置の突出部は、前記揺動軸方向の長さが互いに異なっている、
ことを特徴とする請求項１２に記載の揺動体装置。 The first protrusion and the second protrusion protrude from the first mover and the second mover in a direction parallel to the swing axis, respectively.
The cross-sectional area of the first protrusion and the second protrusion with the swing axis as a normal line is constant in the swing axis direction;
The protrusions at positions symmetrical to the swing axis of at least one of the first protrusion and the second protrusion have different lengths in the swing axis direction.
The oscillator device according to claim 12 .
前記光偏向器は、前記光源からの光を偏向し、該光の少なくとも一部を前記感光体に入射させる、
ことを特徴とする画像形成装置。 A light source, an oscillator device according to any one of claims 7 to 13, wherein the movable element or the first movable element has an optical deflection element and is configured as an optical deflector, and a photosensitive device. Have a body,
The light deflector deflects light from the light source and causes at least a part of the light to enter the photoconductor;
An image forming apparatus.
前記光偏向器は、前記光源からの光を偏向し、該光の少なくとも一部を前記画像表示体に入射させる、
ことを特徴とする画像表示装置。 A light source, the oscillator device according to any one of claims 7 to 13, wherein the movable element or the first movable element has an optical deflection element and is configured as an optical deflector, and an image Having a display,
The light deflector deflects light from the light source and causes at least a part of the light to enter the image display;
An image display device characterized by that.
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007130619A JP5121301B2 (en) | 2006-06-07 | 2007-05-16 | Oscillator device, optical deflector, and optical apparatus using the same |
| US11/756,003 US7557972B2 (en) | 2006-06-07 | 2007-05-31 | Oscillator device, optical deflector and optical instrument using the same |
| EP08151979A EP1921484B1 (en) | 2006-06-07 | 2007-06-05 | Oscillator device, optical deflector and optical instrument using the same |
| AT08151979T ATE442605T1 (en) | 2006-06-07 | 2007-06-05 | OSCILLATOR, OPTICAL DEFLECTION UNIT AND OPTICAL INSTRUMENT COMPRISING THE SAME |
| DE602007002846T DE602007002846D1 (en) | 2006-06-07 | 2007-06-05 | Oscillator, optical deflection unit and optical instrument with this |
| AT07109640T ATE446528T1 (en) | 2006-06-07 | 2007-06-05 | OSCILLATOR, OPTICAL DEFLECTION UNIT AND OPTICAL INSTRUMENT COMPRISING THE SAME |
| EP07109640A EP1865358B1 (en) | 2006-06-07 | 2007-06-05 | Oscillator device, optical deflector and optical instrument using the same |
| DE602007002362T DE602007002362D1 (en) | 2006-06-07 | 2007-06-05 | Oscillator, optical deflection unit and optical instrument with this |
| CN2007101096247A CN101086555B (en) | 2006-06-07 | 2007-06-07 | Oscillator device, optical deflector and optical instrument using the same |
| KR1020070055486A KR20070117487A (en) | 2006-06-07 | 2007-06-07 | Oscillator device, optical deflector and optical instrument using the same |
| KR1020090006183A KR101030847B1 (en) | 2006-06-07 | 2009-01-23 | Method for producing oscillator device |
| US12/481,472 US7926163B2 (en) | 2006-06-07 | 2009-06-09 | Method of producing an oscillator device |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006158004 | 2006-06-07 | ||
| JP2006158004 | 2006-06-07 | ||
| JP2007065950 | 2007-03-15 | ||
| JP2007065950 | 2007-03-15 | ||
| JP2007130619A JP5121301B2 (en) | 2006-06-07 | 2007-05-16 | Oscillator device, optical deflector, and optical apparatus using the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012130823A Division JP5400925B2 (en) | 2006-06-07 | 2012-06-08 | Oscillator device, optical deflector, and optical apparatus using the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008254162A JP2008254162A (en) | 2008-10-23 |
| JP2008254162A5 true JP2008254162A5 (en) | 2010-07-08 |
| JP5121301B2 JP5121301B2 (en) | 2013-01-16 |
Family
ID=39978264
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007130619A Expired - Fee Related JP5121301B2 (en) | 2006-06-07 | 2007-05-16 | Oscillator device, optical deflector, and optical apparatus using the same |
| JP2012130823A Expired - Fee Related JP5400925B2 (en) | 2006-06-07 | 2012-06-08 | Oscillator device, optical deflector, and optical apparatus using the same |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012130823A Expired - Fee Related JP5400925B2 (en) | 2006-06-07 | 2012-06-08 | Oscillator device, optical deflector, and optical apparatus using the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (2) | JP5121301B2 (en) |
| KR (1) | KR101030847B1 (en) |
| AT (1) | ATE446528T1 (en) |
| DE (2) | DE602007002362D1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5423680B2 (en) * | 2008-09-25 | 2014-02-19 | コニカミノルタ株式会社 | Optical scanner |
| JP2010230792A (en) * | 2009-03-26 | 2010-10-14 | Seiko Epson Corp | Optical device, optical scanner, and image forming apparatus |
| JP6060577B2 (en) * | 2012-09-13 | 2017-01-18 | Jsr株式会社 | Negative resist pattern forming method |
| JP5922603B2 (en) * | 2013-03-04 | 2016-05-24 | 日本電信電話株式会社 | Micromirror element and micromirror array |
| JP5993509B2 (en) * | 2015-10-05 | 2016-09-14 | 京セラドキュメントソリューションズ株式会社 | An optical scanning device, an image forming apparatus including the optical scanning device, and a method for adjusting the mass of a vibrating mirror portion of the optical scanning device. |
| JP6959525B2 (en) * | 2017-12-21 | 2021-11-02 | ミツミ電機株式会社 | Optical scanning device |
| JP6651110B1 (en) | 2019-05-28 | 2020-02-19 | Ｄｏｌｐｈｉｎ株式会社 | Object detection device |
| JP6890856B1 (en) * | 2020-03-04 | 2021-06-18 | 国立大学法人東北大学 | Omnidirectional scanning mirror |
| CN113495335B (en) * | 2020-03-18 | 2023-08-25 | 扬明光学股份有限公司 | Optical path adjusting mechanism and manufacturing method thereof |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0875475A (en) * | 1994-09-01 | 1996-03-22 | Omron Corp | Resonator, and optical scanning device, visual confirming device, vibration sensor, and vibration gyro, using this resonator |
| US5969465A (en) * | 1997-04-01 | 1999-10-19 | Xros, Inc. | Adjusting operating characteristics of micromachined torsional oscillators |
| US6384406B1 (en) * | 1999-08-05 | 2002-05-07 | Microvision, Inc. | Active tuning of a torsional resonant structure |
| JP4516673B2 (en) * | 2000-07-28 | 2010-08-04 | シチズンファインテックミヨタ株式会社 | Planar type galvanomirror manufacturing method |
| JP4390174B2 (en) * | 2001-09-14 | 2009-12-24 | 株式会社リコー | Optical scanning device |
| JP2005521098A (en) * | 2002-03-26 | 2005-07-14 | オプティスキャン ピーティーワイ リミテッド | Optical scanning device |
| JP2005181926A (en) * | 2003-12-24 | 2005-07-07 | Canon Inc | Optical deflector and its manufacturing method, and optical equipment using same |
| JP4027359B2 (en) * | 2003-12-25 | 2007-12-26 | キヤノン株式会社 | Micro oscillator, optical deflector, image forming device |
| JP2005326745A (en) * | 2004-05-17 | 2005-11-24 | Canon Inc | Optical deflector and its control method |
| JP2006178408A (en) * | 2004-11-25 | 2006-07-06 | Ricoh Co Ltd | Scanner element, optical scanner and image forming apparatus |
| JP2006230048A (en) * | 2005-02-15 | 2006-08-31 | Seiko Epson Corp | Adjusting method of resonance frequency of actuator, and actuator |
| JP2006243034A (en) * | 2005-02-28 | 2006-09-14 | Ricoh Co Ltd | Optical scanner and image forming apparatus |
| JP4881073B2 (en) * | 2006-05-30 | 2012-02-22 | キヤノン株式会社 | Optical deflector and optical instrument using the same |
-
2007
- 2007-05-16 JP JP2007130619A patent/JP5121301B2/en not_active Expired - Fee Related
- 2007-06-05 AT AT07109640T patent/ATE446528T1/en not_active IP Right Cessation
- 2007-06-05 DE DE602007002362T patent/DE602007002362D1/en active Active
- 2007-06-05 DE DE602007002846T patent/DE602007002846D1/en active Active
-
2009
- 2009-01-23 KR KR1020090006183A patent/KR101030847B1/en not_active IP Right Cessation
-
2012
- 2012-06-08 JP JP2012130823A patent/JP5400925B2/en not_active Expired - Fee Related
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