JP2008254112A - Polished article holding material and polishing article manufacturing method - Google Patents
Polished article holding material and polishing article manufacturing method Download PDFInfo
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本発明は、シリコンウエハ、ハードディスクなどの被研磨物を回転研磨する研磨工程において、前記被研磨物を保持するための被研磨物保持材、及びこの被研磨物保持材を用いた研磨物の製造方法に関する。 The present invention relates to an object holding material for holding the object to be polished in a polishing step of rotating and polishing an object to be polished such as a silicon wafer and a hard disk, and manufacturing of an object to be polished using the object holding material. Regarding the method.
シリコンウエハ、ハードディスクなどの製造工程には、これらの表面を研磨する工程があり、この研磨工程では、シリコンウエハ、ハードディスクなどの被研磨物を保持するための被研磨物保持材が用いられている。この被研磨物保持材は、駆動用のギアを周囲に形成した円板に、被研磨物保持用の貫通穴を１個又は複数個あけた構造を有する。前記貫通穴に被研磨物を嵌め込んで研磨装置に装着し、被研磨物保持材を平面で駆動させることにより被研磨物の研磨が行われる。
従来、被研磨物保持材として、電気絶縁用積層板を加工したものが用いられていた。この電気絶縁用積層板は、熱硬化性樹脂を含浸、乾燥させたシート状基材（プリプレグ）の層を加熱加圧成形したものである。電気絶縁用積層板としては、例えば、綿布基材フェノール樹脂積層板、ガラス繊維織布基材エポキシ樹脂積層板、ガラス繊維不織布基材エポキシ樹脂積層板、ガラス繊維織布基材とガラス繊維不織布基材を複合したコンポジットエポキシ樹脂積層板などがある。この中で、綿布基材フェノール樹脂積層板とガラス繊維織布基材エポキシ樹脂積層板が、被研磨物保持材として多用されている。
Manufacturing processes of silicon wafers, hard disks, and the like include a process of polishing these surfaces. In this polishing process, an object holding material for holding an object to be polished such as a silicon wafer, a hard disk is used. . This object to be polished has a structure in which one or a plurality of through-holes for holding an object to be polished are formed in a disk having a driving gear around it. An object to be polished is fitted into the through hole, mounted on a polishing apparatus, and the object to be polished is driven by a flat surface to polish the object to be polished.
Conventionally, what processed the laminated board for electrical insulation was used as a to-be-polished object holding material. This laminated sheet for electrical insulation is obtained by heat-pressing a layer of a sheet-like substrate (prepreg) impregnated and dried with a thermosetting resin. Examples of the laminate for electrical insulation include, for example, a cotton cloth substrate phenolic resin laminate, a glass fiber woven fabric epoxy resin laminate, a glass fiber nonwoven fabric epoxy resin laminate, a glass fiber woven fabric substrate and a glass fiber nonwoven fabric base. There are composite epoxy resin laminates with composite materials. Among these, cotton cloth base material phenolic resin laminates and glass fiber woven base material epoxy resin laminates are frequently used as materials to be polished.
被研磨物保持材に要求される特性は、耐摩耗性，板厚精度，反り特性，寸法安定性などである。被研磨物の厚みが１ｍｍ程度である場合は、ガラス繊維基材を用いた被研磨物保持材の厚みも１ｍｍ程度で十分であり、ガラス繊維基材を用いた被研磨物保持材でも十分に適用できるが、近年の被研磨物の薄肉化に対して、ガラス繊維基材を用いた被研磨物保持材は、適用が困難となっている。また、生産性の観点から、被研磨物の寸法も３００ｍｍ以上と大きくなる傾向にあるため、ガラス繊維基材を用いた被研磨物保持材に対する、反り、寸法精度、強度、耐久性及び耐摩耗性を改善する要求が強くなされている。
これらの改善のため、被研磨物保持材を形成する材料として、炭素繊維、アラミド系繊維などの繊維基材材料が検討され、採用されている（例えば、特許文献１及び２参照）。しかしながら、カーボン繊維は、軽量・高剛性の点で優れているが、その反面、高価であり、導電性を有するため、通電部分に対して絶縁処理を施す必要がある。また、アラミド系繊維も、軽量・高剛性の点で優れているが、その反面、高価であり、吸湿性が高く、高温高湿の雰囲気中で変形しやすいという問題がある。そのような状況で、汎用ガラス繊維織布基材エポキシ樹脂積層板並みの低コストで、汎用性があり、研磨物の生産性の向上に寄与する被研磨物保持材が強く要求されている。
The properties required for the workpiece holding material are wear resistance, plate thickness accuracy, warpage properties, dimensional stability, and the like. When the thickness of the object to be polished is about 1 mm, the thickness of the object holding material using the glass fiber substrate is also about 1 mm, and even the object holding material using the glass fiber substrate is sufficient. Although it can be applied, the object-holding material using a glass fiber base material is difficult to apply to the recent thinning of the object to be polished. Also, from the viewpoint of productivity, the size of the object to be polished tends to be as large as 300 mm or more, so warpage, dimensional accuracy, strength, durability and wear resistance with respect to the object holding material using a glass fiber substrate. There is a strong demand to improve sex.
For these improvements, fiber base materials such as carbon fibers and aramid fibers have been studied and adopted as materials for forming the workpiece holding material (see, for example, Patent Documents 1 and 2). However, carbon fiber is excellent in terms of light weight and high rigidity, but on the other hand, it is expensive and has electrical conductivity, so that it is necessary to insulate the energized portion. Aramid fibers are also excellent in terms of light weight and high rigidity, but on the other hand, they are expensive, have high hygroscopic properties, and are easily deformed in an atmosphere of high temperature and high humidity. Under such circumstances, there is a strong demand for an object holding material that is as low in cost as a general-purpose glass fiber woven fabric base epoxy resin laminate, has versatility, and contributes to improving the productivity of the polished object.
本発明は上記事情に鑑みなされたもので、ガラス繊維基材を用いた被研磨物保持材における強度を改善し、被研磨物に対する被研磨物保持材の反りが低減するとともに、寸法精度及び耐久性が向上し、かつ経済的に有利な被研磨物保持材を提供することを目的とするものである。 The present invention has been made in view of the above circumstances, and improves the strength of an object holding material using a glass fiber substrate, reduces warpage of the object holding material with respect to the object to be polished, and provides dimensional accuracy and durability. An object of the present invention is to provide a material to be polished that has improved properties and is economically advantageous.
本発明者らは、鋭意研究を重ねた結果、熱硬化性樹脂を含浸させた玄武岩繊維基布を加熱加圧成形してなる層を有する被研磨物保持材により、前記目的が達成されることを見出した。本発明はかかる知見に基づいて完成したものである。
すなわち本発明は、以下の被研磨物保持材、及び研磨物の製造方法を提供するものである。
１． 熱硬化性樹脂を含浸させた玄武岩繊維基布を加熱加圧成形してなる層を有することを特徴とする被研磨物保持材。
２． 熱硬化性樹脂を含浸させた玄武岩繊維基布を表面材とし、熱硬化性樹脂を含浸させたガラス繊維基布を芯材とし、これらを加圧成形してなる上記１記載の被研磨物保持材。
３． 玄武岩繊維基布が、玄武岩から得られた単糸の撚糸又は収束糸からなる連続長繊維を用いて作製された基布である上記１又は２に記載の被研磨物保持材。
４． 連続長繊維を用いて作製された基布が織布である上記３に記載の被研磨物保持材。
５． 連続長繊維の平均径が７〜２０μｍである上記３又は４に記載の被研磨物保持材。
６． 熱硬化性樹脂がエポキシ樹脂であり、少なくとも表面のエポキシ樹脂が可とう性成分を含有する上記１〜５のいずれかに記載の被研磨物保持材。
７． 周囲にギアを形成した被研磨物保持材に被研磨物を嵌め込むための貫通穴を設け、当該貫通穴に被研磨物を嵌め込んだ被研磨物保持材を、インターナルギアと太陽ギアを有する研磨装置に装着し、被研磨物保持材を遊星運動させることにより前記被研磨物を回転研磨してなる研磨物の製造方法であって、前記被研磨物保持材として上記１〜６のいずれかに記載の被研磨物保持材を用いることを特徴とする研磨物の製造方法。
As a result of intensive studies, the present inventors have achieved that the object is achieved by a workpiece holding material having a layer formed by heating and pressing a basalt fiber base fabric impregnated with a thermosetting resin. I found. The present invention has been completed based on such findings.
That is, the present invention provides the following workpiece holding material and method for producing a polished article.
1. What is claimed is: 1. A polishing object holding material comprising a layer formed by heating and pressing a basalt fiber base fabric impregnated with a thermosetting resin.
2. 2. Holding an object to be polished according to 1 above, wherein a basalt fiber base fabric impregnated with a thermosetting resin is used as a surface material, a glass fiber base fabric impregnated with a thermosetting resin is used as a core material, and these are pressure-molded. Wood.
3. 3. The material to be polished as described in 1 or 2 above, wherein the basalt fiber base fabric is a base fabric produced using continuous filaments made of single yarn twisted or convergent yarn obtained from basalt.
4). 4. The material to be polished as described in 3 above, wherein the base fabric produced using continuous long fibers is a woven fabric.
5. 5. The material to be polished as described in 3 or 4 above, wherein the continuous continuous fiber has an average diameter of 7 to 20 μm.
6). The material for holding an object to be polished according to any one of 1 to 5, wherein the thermosetting resin is an epoxy resin, and at least the epoxy resin on the surface contains a flexible component.
7). A through-hole for fitting the object to be polished is provided in the object-holding material having a gear formed around it, and the object holding material having the object to be polished inserted into the through-hole has an internal gear and a sun gear. A method for producing a polishing object, which is mounted on a polishing apparatus and rotationally polishes the object to be polished by moving the object holding material in a planetary motion. A method for producing a polished article, comprising using the workpiece holding material described in 1.
本発明によれば、被研磨物に対する反りが低減するとともに、寸法精度及び耐久性が向上し、かつ経済的に有利な被研磨物保持材を提供することができる。研磨物の製造に際して本発明の被研磨物保持材を用いると、被研磨物におけるスクラッチが低減され、研磨物の製造歩留まりの向上を図ることができるため、研磨物のコスト低減が可能となる。また、玄武岩繊維基布で被研磨物保持材を構成することにより、被研磨物保持材の強度が増し、ギア部分の摩耗が抑制されるので、本発明の被研磨物保持材は、従来の汎用品であるガラス繊維基布からなる被研磨物保持材よりも使用寿命が長くなる。 ADVANTAGE OF THE INVENTION According to this invention, while the curvature with respect to a to-be-polished object reduces, dimensional accuracy and durability can improve and the to-be-polished object holding | maintenance material which is economically advantageous can be provided. When the polished object holding material of the present invention is used in the production of the polished object, scratches in the polished object are reduced, and the production yield of the polished object can be improved, so that the cost of the polished object can be reduced. In addition, by configuring the workpiece holding material with the basalt fiber base fabric, the strength of the workpiece holding material is increased and the wear of the gear part is suppressed, so the workpiece holding material of the present invention is a conventional material holding material. The service life is longer than that of an object holding material made of a glass fiber base fabric, which is a general-purpose product.
本発明の被研磨物保持材は、熱硬化性樹脂を含浸させた玄武岩繊維基布を加熱加圧成形してなる層を有する。
本発明で用いる玄武岩繊維基布は、玄武岩から得られた単糸の撚糸又は収束糸からなる連続長繊維を用いて作製された基布であり、前記単糸は、一般的方法にて、原料である火成岩（噴出岩）の一種である玄武岩を、洗浄、粉砕溶融し、紡糸することにより、製造することができる。前記連続長繊維の平均径は、製造性の観点から、通常７〜２０μｍ程度である。
玄武岩繊維は、ガラス繊維に比べて高強度で剛性が高く、また、吸水性も小さい。一般的に、ガラス繊維の弾性率が７２００（Ｎ／ｍｍ2）程度であるのに対し、玄武岩繊維の弾性率は１００００（Ｎ／ｍｍ2）程度である。また、吸水率はガラス繊維が１．０質量％程度であるのに対して、玄武岩繊維は０．５質量％程度である。玄武岩繊維が有する前記特性により、本発明の被研磨物保持材は、ガラス繊維基布からなる被研磨物保持材における強度が改善されるとともに、被研磨物に対する反りの低減、寸法精度及び耐久性の向上を実現することが可能となる。
The material to be polished of the present invention has a layer formed by heating and pressing a basalt fiber base fabric impregnated with a thermosetting resin.
The basalt fiber base fabric used in the present invention is a base fabric produced using continuous filaments made of single yarn twisted or convergent yarn obtained from basalt, and the single yarn is a raw material by a general method. The basalt, which is a kind of igneous rock (erupted rock), can be produced by washing, crushing and melting and spinning. The average diameter of the continuous long fibers is usually about 7 to 20 μm from the viewpoint of productivity.
Basalt fiber is higher in strength and rigidity than glass fiber, and has a low water absorption. In general, the elastic modulus of glass fiber is about 7200 (N / mm 2 ), whereas the elastic modulus of basalt fiber is about 10,000 (N / mm 2 ). The water absorption is about 1.0% by mass for glass fibers, whereas it is about 0.5% by mass for basalt fibers. Due to the properties of the basalt fiber, the material to be polished of the present invention has improved strength in the material to be polished made of a glass fiber base fabric, and reduced warpage, dimensional accuracy and durability with respect to the material to be polished. It becomes possible to realize the improvement.
本発明においては、前記玄武岩から得られた連続長繊維は、樹脂との濡れ性や接着性などを良好とするために、表面処理剤で予め処理しておいてもよい。この表面処理剤としては、例えば、シラン系、チタネート系、アルミニウム系、クロム系、ジルコニウム系、ボラン系カップリング剤などが挙げられる。これらの中でシラン系カップリング剤及びチタネート系カップリング剤が好ましく、特に、シラン系カップリング剤が好適である。
このシランカップリング剤としては、例えば、トリエトキシシラン、ビニルトリス（β−メトキシエトキシ）シラン、γ−メタクリロキシプロピルトリメトキシシラン、γ−グリシドキシプロピルトリメトキシシラン、β−（３，４−エポキシシクロヘキシル）エチルトリメトキシシラン、Ｎ−β−（アミノエチル）−γ−アミノプロピルメチルジメトキシシラン、γ−アミノプロピルトリエトキシシラン、γ−メルカプトプロピルトリメトキシシラン及びγ−クロロプロピルトリメトキシシランなどが挙げられる。
In the present invention, the continuous long fibers obtained from the basalt may be pretreated with a surface treatment agent in order to improve the wettability and adhesiveness with the resin. Examples of the surface treatment agent include silane-based, titanate-based, aluminum-based, chromium-based, zirconium-based, and borane-based coupling agents. Of these, silane coupling agents and titanate coupling agents are preferred, and silane coupling agents are particularly preferred.
Examples of the silane coupling agent include triethoxysilane, vinyltris (β-methoxyethoxy) silane, γ-methacryloxypropyltrimethoxysilane, γ-glycidoxypropyltrimethoxysilane, and β- (3,4-epoxy. (Cyclohexyl) ethyltrimethoxysilane, N-β- (aminoethyl) -γ-aminopropylmethyldimethoxysilane, γ-aminopropyltriethoxysilane, γ-mercaptopropyltrimethoxysilane, and γ-chloropropyltrimethoxysilane. It is done.
本発明において、玄武岩繊維基布の形態は、不織布、織布及び編布のいずれであってもよいが、被研磨物保持材の反りを低減させ、強度及び耐摩耗性などをより向上させる観点から、織布が好ましい。不織布は、繊維同士を絡ませたり接着したりして作製される布地であって、スパンレース不織布やニードルパンチ不織布等の乾式タイプもの、湿式タイプのもの、スパンボンド不織布等の紡糸直結タイプのものなどが挙げられる。織布は、長さ方向の経糸と幅方向の緯糸とが互いに直角に上下に組み合わされて交差したものであり、例えば平織りや綾織りなどが挙げられる。編布は、緯又は経のいずれか一方の方向に糸を持ち、ループを連続させることによって作製され、例えばニット地などが挙げられる。 In the present invention, the form of the basalt fiber base fabric may be any of a non-woven fabric, a woven fabric, and a knitted fabric, but the viewpoint of reducing the warp of the workpiece holding material and further improving the strength and wear resistance, etc. Therefore, a woven fabric is preferable. Nonwoven fabrics are fabrics made by entanglement or bonding of fibers, such as spunlace nonwoven fabrics and needle punched nonwoven fabrics, dry type fabrics, wet fabric types, spunbond nonwoven fabrics, etc. Is mentioned. A woven fabric is a warp yarn in the length direction and a weft yarn in the width direction combined vertically and crossing each other at right angles, and examples thereof include plain weave and twill weave. The knitted fabric is produced by holding a yarn in either the weft or warp direction and continuing the loop, and examples thereof include a knit fabric.
本発明で用いる玄武岩繊維基布に含浸させる熱硬化性樹脂は、特に限定されるものではなく、例えば、フェノール樹脂、エポキシ樹脂、ポリエステル樹脂及びポリイミド樹脂などから選ばれる一種又は二種以上を用いることができる。しかしながら、本発明者らの研究により、比較的耐熱性の高いフェノール樹脂やポリイミド樹脂などは、樹脂自体は硬いものの、接着性が比較的低いため、研磨時に玄武岩繊維基布と樹脂との界面剥離が発生しやすかったり、樹脂自体の破壊・摩耗が起こりやすいことがわかった。なお、フェノール樹脂やポリイミド樹脂の接着性が比較的低いのは、例えば接着に関与しないベンゼン核などを分子骨格に高密度で有しているからである。 The thermosetting resin impregnated in the basalt fiber base fabric used in the present invention is not particularly limited, and for example, one or more selected from phenol resin, epoxy resin, polyester resin, polyimide resin, and the like are used. Can do. However, according to the researches of the present inventors, phenol resins and polyimide resins having relatively high heat resistance are hard to be used, but the adhesiveness is relatively low, so that the interface peeling between the basalt fiber base fabric and the resin during polishing is performed. It was found that the resin tends to occur, and the resin itself is liable to break and wear. The reason why the adhesiveness of the phenol resin or the polyimide resin is relatively low is that, for example, the molecular skeleton has a high density in the molecular skeleton, which is not involved in the adhesion.
このようなことから、本発明においては、熱硬化性樹脂としてエポキシ樹脂を使用することが好ましい。さらに、エポキシ樹脂の脆さを低減するために、ゴム成分などの可撓性成分を加えることにより変性したエポキシ樹脂も好ましく用いることができる。
前記熱硬化性樹脂には、ジシアンジアミド、酸無水物、アミン類、イミダゾール類などの硬化剤を添加することができる。硬化剤の使用量は、熱硬化性樹脂１００質量部に対して、通常０．１〜１０質量部程度である。
For this reason, in the present invention, it is preferable to use an epoxy resin as the thermosetting resin. Furthermore, in order to reduce the brittleness of the epoxy resin, an epoxy resin modified by adding a flexible component such as a rubber component can also be preferably used.
Curing agents such as dicyandiamide, acid anhydrides, amines, and imidazoles can be added to the thermosetting resin. The usage-amount of a hardening | curing agent is about 0.1-10 mass parts normally with respect to 100 mass parts of thermosetting resins.
本発明の被研磨物保持材は、公知の電気絶縁用積層板の成形と同様に行うことにより、製造することができる。すなわち、熱硬化性樹脂を含浸させ、乾燥させた玄武岩繊維基布を離型フィルムで被覆して鏡面板に挟み込み、プレス熱盤間で加熱加圧成形する。熱硬化性樹脂を含浸させた基布（プリプレグ）を加熱加圧成形してなる層は、プリプレグ１枚からなるものでも複数枚からなるものでもよく、シリコンウエハ、ハードディスクなど被研磨物の種類や研磨条件により、プリプレグの使用枚数を変えたり、熱硬化性樹脂を含浸させた玄武岩繊維基布以外のプリプレグを適宜選択して組み合わせてもよい。例えば、プリプレグ層が複数枚のプリプレグからなる場合、例えば、熱硬化性樹脂を含浸させた玄武岩繊維基布を表面材とし、熱硬化性樹脂を含浸させたガラス繊維基布などを芯材とした構成することができる。
本発明者らが検討した結果、熱硬化性樹脂を含浸させた玄武岩繊維基布を表面材とし、熱硬化性樹脂を含浸させたガラス繊維織布基布を芯材とした構成とすると、スクラッチ発生、反り及びコストなどを抑制する観点から、有利であることが分かった。
The to-be-polished material holding material of the present invention can be produced by carrying out in the same manner as the formation of a known laminate for electrical insulation. That is, a basalt fiber base fabric impregnated with a thermosetting resin and dried is covered with a release film, sandwiched between mirror plates, and heated and pressed between press hot plates. The layer formed by heating and press-molding a base fabric (prepreg) impregnated with a thermosetting resin may be composed of a single prepreg or a plurality of prepregs. Depending on the polishing conditions, the number of prepregs used may be changed, or prepregs other than the basalt fiber base fabric impregnated with a thermosetting resin may be appropriately selected and combined. For example, when the prepreg layer is composed of a plurality of prepreg layers, for example, a basalt fiber base fabric impregnated with a thermosetting resin is used as a surface material, and a glass fiber base fabric impregnated with a thermosetting resin is used as a core material. Can be configured.
As a result of studies by the present inventors, a basalt fiber base fabric impregnated with a thermosetting resin is used as a surface material, and a glass fiber woven fabric base fabric impregnated with a thermosetting resin is used as a core material. It turned out that it is advantageous from a viewpoint of suppressing generation | occurrence | production, curvature, cost, etc.
本発明の被研磨物保持材の厚みは、これを使用する被研磨物の種類や研磨条件に応じて適宜選択され、通常０．４〜２．０ｍｍ程度、好ましくは０．６〜１．０ｍｍである。
本発明の被研磨物保持材は、シリコンウエハやハードディスクなどを研磨する工程において好適に使用される。被研磨物保持材の形態としては、キャリアディスクなどが挙げられる。
本発明は、周囲にギアを形成した被研磨物保持材に被研磨物を嵌め込むための貫通穴を設け、当該貫通穴に被研磨物を嵌め込んだ被研磨物保持材を、インターナルギアと太陽ギアを有する研磨装置に装着し、被研磨物保持材を遊星運動させることにより前記被研磨物を回転研磨してなる研磨物の製造方法であって、前記被研磨物保持材として上述した被研磨物保持材を用いることを特徴とする研磨物の製造方法をも提供する。
The thickness of the object-holding material of the present invention is appropriately selected according to the type of object to be polished and the polishing conditions, and is usually about 0.4 to 2.0 mm, preferably 0.6 to 1.0 mm. It is.
The workpiece holding material of the present invention is suitably used in a process of polishing a silicon wafer, a hard disk, or the like. Examples of the form of the workpiece holding material include a carrier disk.
The present invention provides a through-hole for fitting an object to be polished in an object holding material having a gear formed around it, and an object holding material in which the object to be polished is fitted into the through hole is referred to as an internal gear. A method for producing a polishing object, which is mounted on a polishing apparatus having a sun gear and rotationally polishes the object to be polished by planetary movement of the object holding material, comprising the above-mentioned object as the object holding material. There is also provided a method for producing an abrasive, characterized by using an abrasive holding material.
次に、本発明を実施例によりさらに詳細に説明するが、本発明はこれらの例によってなんら限定されるものではない。
実施例１
玄武岩繊維基布として、玄武岩繊維織布（日本バサルトファイバー社製、バサルトファイバーからなる平均径が７μｍの繊維を用いた、目付１２０ｇ／ｍ2、厚さ０．１ｍｍの平織り織布）を用い、ガラス繊維基布として、汎用のＥガラス繊維織布（旭シェーベル社製、商品名 Ａ２１１６／ＡＳ４５０、平均径が７μｍの繊維を用いた、目付１０６ｇ／ｍ2、厚さ０．１ｍｍの平織り織布）を用いた。
ビスフェノールＡ型エポキシ樹脂（油化シェル社製、商品名 エピコート１００１）７０質量部とクレゾールノボラック型エポキシ樹脂（東都化成社製、商品名 ＹＤＣＮ−７０４Ｐ）３０質量部とジシアンジアミド３質量部との混合物に、プロピレングリコールモノメチルエーテルを加えて固形分６５質量％のワニスを調製した。
このワニスを、前記玄武岩繊維基布に樹脂比率が２６質量％となるように塗布し、含浸及び乾燥による半硬化を行うことにより、樹脂比率が４３体積％のプリプレグ１を得た。また、前記ワニスを、前記ガラス繊維基布に樹脂比率が２６質量％となるように塗布し、含浸及び乾燥による半硬化を行うことにより、樹脂比率が４３体積％のプリプレグ２を得た。
プリレグ１を１枚、プリプレグ２を８枚、プリプレグ１を１枚の順に重ねた１０枚のプリプレグを、２枚の鏡面板の間に挟み、昇温速度２．０℃／分、硬化温度１７５℃、硬化時間３０分間、圧力４．０ＭＰａの条件で、加熱加圧成形を行い、厚さ０．７５ｍｍの積層板１を得た。この積層板１をルーターマシンにて外形加工し、１２Ｂ（ＤＰ（ダイヤメトラルピッチ）１２、歯数１３４、外形２８７．８６（ｍｍ））の外周形状と、５０φの穴１２個を形成することによって、キャリアディスクを作製した。なお、上記１２Ｂとは、歯車用語であって「１２インチ区分のサイズの、Ｂ仕様区分」を意味する。
EXAMPLES Next, although an Example demonstrates this invention further in detail, this invention is not limited at all by these examples.
Example 1
As a basalt fiber base fabric, a basalt fiber woven fabric (manufactured by Nippon Basalt Fiber Co., Ltd., a plain weave woven fabric having a basis weight of 120 g / m 2 and a thickness of 0.1 mm using fibers having an average diameter of 7 μm made of basalt fiber) As a glass fiber base fabric, a general-purpose E glass fiber woven fabric (trade name A2116 / AS450, manufactured by Asahi Shovel Co., Ltd., a plain woven fabric having a basis weight of 106 g / m 2 and a thickness of 0.1 mm using fibers having an average diameter of 7 μm. ) Was used.
In a mixture of 70 parts by mass of bisphenol A type epoxy resin (trade name Epicoat 1001 manufactured by Yuka Shell Co., Ltd.), 30 parts by mass of cresol novolac type epoxy resin (trade name YDCN-704P, manufactured by Tohto Kasei Co., Ltd.) and 3 parts by mass of dicyandiamide Then, propylene glycol monomethyl ether was added to prepare a varnish having a solid content of 65% by mass.
This varnish was applied to the basalt fiber base fabric so that the resin ratio was 26% by mass, and semi-cured by impregnation and drying to obtain a prepreg 1 having a resin ratio of 43% by volume. In addition, the varnish was applied to the glass fiber base fabric so that the resin ratio was 26% by mass, and semi-cured by impregnation and drying to obtain a prepreg 2 having a resin ratio of 43% by volume.
10 prepregs, each of which has 1 prepreg 1, 8 prepregs 2, and 1 prepreg 1, stacked in this order, are sandwiched between two mirror plates, a heating rate of 2.0 ° C./min, a curing temperature of 175 ° C., Heating and pressing were performed under the conditions of a curing time of 30 minutes and a pressure of 4.0 MPa to obtain a laminate 0.75 having a thickness of 0.75 mm. By externally processing this laminated plate 1 with a router machine, by forming 12B (DP (diametral pitch) 12, tooth number 134, external shape 287.86 (mm)) outer peripheral shape and 12 50φ holes. A carrier disk was prepared. Note that the above 12B is a gear term and means “B specification category having a size of 12 inches”.
実施例２
ビスフェノールＡ型エポキシ樹脂（油化シェル社製、商品名 エピコート１００１）７０質量部とクレゾールノボラックエポキシ樹脂（東都化成社製、商品名 ＹＤＣＮ−７０４Ｐ）３０質量部とジシアンジアミド３質量部との混合物に、プロピレングリコールモノメチルエーテルを加えて固形分６５質量％のワニスを調製した。
このワニスを、実施例１で用いたものと同様の玄武岩繊維基布に樹脂比率が２６質量％となるように塗布し、含浸及び乾燥による半硬化を行うことにより、樹脂比率が４３体積％のプリプレグ１を得た。
１０枚のプリレグ１を、２枚の鏡面板の間に挟み、昇温速度２．０℃／分、硬化温度１７５℃、硬化時間３０分間、圧力４．０ＭＰａの条件で、加熱加圧成形を行い、厚さ０．７５ｍｍの積層板２を得た。この積層板２をルーターマシンにて外形加工し、１２Ｂ（ＤＰ１２、歯数１３４、外形２８７．８６（ｍｍ））の外周形状と、５０φの穴１２個を形成することによって、キャリアディスクを作製した。
Example 2
A mixture of 70 parts by mass of a bisphenol A type epoxy resin (manufactured by Yuka Shell Co., Ltd., trade name Epicoat 1001), 30 parts by mass of cresol novolac epoxy resin (manufactured by Toto Kasei Co., Ltd., trade name YDCN-704P) and 3 parts by mass of dicyandiamide, Propylene glycol monomethyl ether was added to prepare a varnish having a solid content of 65% by mass.
This varnish was applied to a basalt fiber base fabric similar to that used in Example 1 so that the resin ratio was 26% by mass, and semi-cured by impregnation and drying, whereby the resin ratio was 43% by volume. A prepreg 1 was obtained.
Ten pre-regs 1 are sandwiched between two mirror plates and heated and pressed under the conditions of a heating rate of 2.0 ° C./min, a curing temperature of 175 ° C., a curing time of 30 minutes, and a pressure of 4.0 MPa, A laminate 2 having a thickness of 0.75 mm was obtained. The laminated plate 2 was externally processed by a router machine, and a carrier disk was manufactured by forming an outer peripheral shape of 12B (DP12, number of teeth 134, external shape 287.86 (mm)) and 12 holes of 50φ. .
比較例１
ビスフェノールＡ型エポキシ樹脂（油化シェル社製、商品名 エピコート１００１）７０質量部とクレゾールノボラックエポキシ樹脂（東都化成社製、商品名 ＹＤＣＮ−７０４Ｐ）３０質量部とジシアンジアミド３質量部との混合物に、プロピレングリコールモノメチルエーテルを加えて固形分６５質量％のワニスを調製した。
前記ワニスを、実施例１で用いたものと同様のガラス繊維基布に樹脂比率が２６質量％となるように塗布し、含浸および乾燥による半硬化を行うことにより、樹脂比率が４３体積％のプリプレグ２を得た。
１０枚のプリレグ２を、２枚の鏡面板の間に挟み、昇温速度２．０℃／分、硬化温度１７５℃、硬化時間３０分間、圧力４．０ＭＰａの条件で、加熱加圧成形を行い、厚さ０．７５ｍｍの積層板３を得た。この積層板３をルーターマシンにて外形加工し、１２Ｂ（ＤＰ１２、歯数１３４、外形２８７．８６（ｍｍ））の外周形状と、５０φの穴１２個を形成することによって、キャリアディスクを作製した。
Comparative Example 1
A mixture of 70 parts by mass of a bisphenol A type epoxy resin (manufactured by Yuka Shell Co., Ltd., trade name Epicoat 1001), 30 parts by mass of cresol novolac epoxy resin (manufactured by Toto Kasei Co., Ltd., trade name YDCN-704P) and 3 parts by mass of dicyandiamide, Propylene glycol monomethyl ether was added to prepare a varnish having a solid content of 65% by mass.
The varnish was applied to a glass fiber base fabric similar to that used in Example 1 so that the resin ratio was 26% by mass, and semi-cured by impregnation and drying, whereby the resin ratio was 43% by volume. Prepreg 2 was obtained.
Ten pre-legs 2 are sandwiched between two mirror plates, and heated and pressed under the conditions of a heating rate of 2.0 ° C./min, a curing temperature of 175 ° C., a curing time of 30 minutes, and a pressure of 4.0 MPa, A laminate 3 having a thickness of 0.75 mm was obtained. The laminated plate 3 was externally processed by a router machine, and a carrier disk was manufactured by forming an outer peripheral shape of 12B (DP12, number of teeth 134, external shape 287.86 (mm)) and 12 holes of 50φ. .
上記実施例及び比較例で作製したキャリアディスクの特性を、以下に示す方法により評価した。結果を表１に示す。
（１）反り
キャリアディスクを平盤に平置きしてその浮き上がり値を測定した。
（２）傷発生率
キャリアディスクで厚さ０．８ｍｍのアルミニウムウエハを１０サイクル研磨した後、アルミニウムウエハの表面状態を観察し、傷発生率を算出した。
（３）使用寿命
キャリアディスクのギア部の摩耗の程度で評価した。すなわち、使用可能な摩耗程度における使用可能なバッチ数を調べ、比較例１における使用可能なバッチ数を１００としたときの指数で表した。
The characteristics of the carrier disks produced in the above examples and comparative examples were evaluated by the methods shown below. The results are shown in Table 1.
(1) Warpage The carrier disk was laid flat on a flat plate and the lift value was measured.
(2) Scratch occurrence rate An aluminum wafer having a thickness of 0.8 mm was polished for 10 cycles with a carrier disk, and then the surface state of the aluminum wafer was observed to calculate the scratch occurrence rate.
(3) Service life Evaluation was made based on the degree of wear of the gear portion of the carrier disk. That is, the number of usable batches at the usable wear level was examined, and the number of usable batches in Comparative Example 1 was expressed as an index when the number was 100.
研磨物の製造に際して本発明の被研磨物保持材を用いると、被研磨物におけるスクラッチが低減され、研磨物の製造歩留まりの向上を図ることができるため、研磨物のコスト低減が可能となる。本発明の被研磨物保持材は、シリコンウエハやハードディスクなどを研磨する工程において、キャリアディスクなどの形態で好適に使用される。 When the polished object holding material of the present invention is used in the production of the polished object, scratches in the polished object are reduced, and the production yield of the polished object can be improved, so that the cost of the polished object can be reduced. The workpiece holding material of the present invention is suitably used in the form of a carrier disk or the like in the step of polishing a silicon wafer, hard disk or the like.
Claims (7)
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| KR20160074296A (en) * | 2014-12-18 | 2016-06-28 | 한국세라믹기술원 | Method for manufacturing hybrid ceramic fiber reinforced composite material and hybrid ceramic fiber reinforced composite material manufactured thereby |
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| JPH11309667A (en) * | 1997-10-20 | 1999-11-09 | Shin Kobe Electric Mach Co Ltd | Holding material of ground workpiece sand manufacture of ground workpiece |
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| JP2006303971A (en) * | 2005-04-21 | 2006-11-02 | Pioneer Electronic Corp | Vibration group component for loudspeaker apparatus, and manufacturing method thereof |
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| JPS63108033A (en) * | 1986-10-23 | 1988-05-12 | Kyushu Refract Co Ltd | Inorganic fiber-reinforced resin composite material |
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| KR20160074296A (en) * | 2014-12-18 | 2016-06-28 | 한국세라믹기술원 | Method for manufacturing hybrid ceramic fiber reinforced composite material and hybrid ceramic fiber reinforced composite material manufactured thereby |
| KR101659591B1 (en) | 2014-12-18 | 2016-09-23 | 한국세라믹기술원 | Method for manufacturing hybrid ceramic fiber reinforced composite material and hybrid ceramic fiber reinforced composite material manufactured thereby |
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