JP2008245739A - Gas purifying apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small-sized and inexpensive gas purifying apparatus, when detecting an abnormal current at either of a plurality of discharge units, shutting off only a high-voltage power supply of the discharge unit at which the abnormal current is detected, and operating the other high voltage power supplies and discharge units without change. <P>SOLUTION: This gas cleaning device 100 includes a decomposition treatment part 102 decomposing and removing chemical substances contained in a cleaned gas by activated species generated by plasma discharge, sucks the cleaned gas 1 from a suction port by an air blower 4 to send it to the decomposition process part 102, cleans the cleaned gas 1 by the decomposition treatment part 102 and blows it out from an outlet 9, wherein the decomposition treatment part 102 has a plurality of electrode unit sets consisting of an earth electrode 5 subdivided into a multiple portions and having absorbent, and a high voltage electrode 7 installed facing the earth electrode 5, and one high-voltage power supply 6 for every one set of electrode units. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a gas purification apparatus, and more particularly to a gas purification apparatus that decomposes and removes chemical substances from the atmosphere containing chemical substances such as low-concentration volatile organic compounds (VOCs; Volatile Organic Compounds) by discharge plasma. It is.

  A conventional gas purification device uses discharge plasma and an adsorbent (adsorbent) to maintain the adsorption capacity of the adsorbent over a long period of time, thereby facilitating maintenance of the gas purification device.

  That is, the conventional gas purification device collects the chemical substance contained in the gas by the adsorbent after removing the particulate substance from the gas containing the particulate substance and the chemical substance in the atmosphere, While collecting the moisture contained in the adsorbent, the adsorbent that adsorbs the chemical substance is kept at zero potential, and a discharge is generated between the adsorbent and the electrode. Alternatively, the chemical species adsorbed on the adsorbent is decomposed and removed by the active species generated by the reaction between the irradiated active species and moisture present in the atmosphere or on the surface of the adsorbent (see, for example, Patent Document 1). ).

  In addition, a ground side electrode and a high voltage side electrode, which are formed of a metal electrode covered with a dielectric material and constitute an electrode pair, a dielectric member provided between each ground side electrode and each high voltage side electrode, and the electrode A plasma processing chamber in which the pair and the dielectric member are installed, and a gap is formed between at least one electrode of the electrode pair and the dielectric member. A gas processing apparatus disposed in a plasma processing chamber so that the entire amount flows through the dielectric member in a direction perpendicular to the dielectric member, and induces glow discharge between the electrodes to perform gas processing. There is something to do (see, for example, Patent Document 2).

JP 2004-89708 A JP 2006-187766 A

  One method for increasing the decomposition and removal efficiency of the chemical substance is to reduce the space velocity of the adsorbent (SV value = treatment gas amount / adsorbent amount). It is necessary to increase the thickness. The other is to make the discharge from the high voltage electrode to the adsorbent uniform, and for this purpose, it is necessary to arrange the high voltage electrode as close as possible to the position facing the adsorbent.

  However, according to the above conventional technique, power is supplied from a single high-voltage power source to all the high-voltage electrodes or any high-voltage electrode, so that a large-capacity power source is required and the cost is increased. Also, when the dielectric is damaged, abnormal discharge concentrated on the exposed metal portion is dangerous. Therefore, there has been a problem that the entire apparatus must be stopped by the protective device.

  Further, if the surface area of the adsorbent is increased in order to increase the decomposition and removal efficiency of the chemical substance, the apparatus becomes large. In order to increase the thickness of the adsorbent and to make the discharge uniform, if a high voltage electrode is densely arranged at a position facing the adsorbent, the pressure loss increases. There was a problem that a fan motor with a capacity was required.

  The present invention has been made in view of the above, and is small and low-cost, and when an abnormal current is detected in any of a plurality of discharge units, only the high-voltage power supply of the discharge unit that has detected the abnormal current is used. An object of the present invention is to obtain a gas purification apparatus that is shut off and in which other high-voltage power supply and discharge unit are operated as they are.

  In order to solve the above-described problems and achieve the object, the present invention includes a decomposition processing unit that decomposes and removes chemical substances contained in the gas to be purified by active species generated by plasma discharge, and is blown from the suction port by a blower. In the gas purification apparatus that sucks in the gas to be purified and sends the gas to the decomposition processing unit, purifies the gas to be purified in the decomposition processing unit, and blows out the gas from the outlet, the decomposition processing unit is divided into a large number of adsorbents A plurality of electrode units each including a ground electrode having a plurality of high-voltage electrodes disposed opposite to the ground electrode are provided, and one high-voltage power source is provided for each set of the electrode units.

  According to the present invention, there is an effect that a gas purification device having a small size and low cost and good operating efficiency can be obtained.

  Embodiments of a gas purification apparatus according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
1 is a longitudinal sectional view showing a first embodiment of a gas purification apparatus according to the present invention, and FIG. 2 is a transverse sectional view showing a first arrangement example of a sirocco fan of the gas purification apparatus according to the first embodiment. 3 is a transverse sectional view showing a second arrangement example of the sirocco fan, FIG. 4 is a longitudinal sectional view showing a third arrangement example of the sirocco fan, and FIG. FIG. 6 is a cross-sectional view showing a third arrangement example, FIG. 6 is a longitudinal cross-sectional view showing an arrangement example of a mixed flow fan, and FIG. 7 is a perspective view showing a disassembly processing section (discharge space).

  As shown in FIG. 1, the gas purification apparatus 100 of Embodiment 1 includes a casing 101 formed in a vertically long rectangular parallelepiped shape. A suction port 2 for the gas to be processed 1 is provided in the upper front portion of the housing 101 and faces obliquely upward.

  At the rear of the top plate of the housing 101, a gas outlet 9 for the gas purified by the gas purification device 100 is provided. The gas 1 to be treated contains particulate matter such as dust, volatile organic compounds such as formaldehyde, acetaldehyde, toluene, and ethylene as chemical substances, ammonia, and the like.

  A control device 10 is installed in the lower front part of the casing 101, and an operation panel 11 is installed on the front plate. A gas purification chamber 102 as a decomposition processing unit is formed in the upper rear portion of the casing 101, and a sirocco fan 4 as a blower is installed in the lower rear portion.

  An air passage 103 is formed from the front upper portion to the lower portion of the housing 101, and a dust removal filter 3 as a particulate matter separation means is installed on the upstream side of the air passage 103. The sirocco fan 4 and the gas purification chamber 102 constitute a downstream portion from the midstream of the air passage 103.

  As shown in FIG. 7, around the gas purification chamber 102, a ground electrode 5 having a honeycomb-shaped catalyst-supporting conductive adsorbent as a large number of subdivided adsorbents, and a dielectric disposed so as to face the ground electrode 5 are provided. A plurality of sets (five sets) of a pair of discharge units 110 each including a high-voltage electrode 7 covered with a metal electrode with a body are installed so as to surround the air outlet 12 of the sirocco fan 4 to form a discharge space therein.

  By providing a discharge space that surrounds the fan outlet 12 with a plurality of sets of discharge units 110, even if the surface area of the adsorbent is increased, the discharge space can be compactly accommodated in the apparatus. It becomes easy for the gas 1 to be purified to pass uniformly over the entire surface of the adsorbent, and the adsorbent can act effectively. In addition, by making the discharge space a closed space, leakage of the to-be-purified gas 1 containing a chemical substance from the discharge space is prevented.

  The honeycomb-shaped catalyst-supporting conductive adsorbent as the ground electrode 5 has a very large adsorbent surface area in a small space. The ground electrode 7 is grounded 8. The honeycomb-shaped catalyst-supporting conductive adsorbent 5 is obtained by covering an outer periphery of an adsorbent having a honeycomb structure with a (conductive) power supply electrode.

  As the adsorbent, graphite, activated carbon, silica gel, zeolite, or the like is used, and pores serving as passages for the gas to be processed 1 are provided and have a honeycomb shape. The surface of the adsorbent is loaded with a substance having catalytic action such as manganese dioxide, titanium dioxide or zinc oxide, or a precious metal catalyst such as palladium, platinum or rhodium, and the catalyst is used in combination to enhance the decomposition and removal effect of chemical substances. To do.

  By using a precious metal catalyst in combination with the adsorbent, the chemical substance is decomposed and removed by silent discharge, and at the same time, it is decomposed and removed using the heat generated by the discharge, and the chemical substance is removed with low power consumption and high decomposition efficiency. It is.

  The gas to be treated 1 containing dust as particulate matter and VOCs as chemical substance is sucked into the ventilation path 103 from the suction port 2, and dust is removed by the dust removing filter 3 as the particulate matter separating means. Sirocco fan 4 sucks in. The gas to be treated 1 blown into the gas purification chamber 102 from the fan blowout port 12 of the sirocco fan 4 is purified by a plurality of sets of discharge units 110 and blown out through the blowout port 9.

  One set of discharge units 110 is provided with one high-voltage power supply 6. The to-be-purified gas 1 blown out from the sirocco fan 4 is in a pressurized state in the discharge space, and uniformly passes through the high-voltage electrode 7 and the ground electrode 5 having the honeycomb-shaped catalyst-carrying conductive adsorbent, and the entire adsorbent is effective. Take advantage of.

  In the high-voltage power supply 6, only the transformer may be arranged for each set of discharge units, and the control unit may be integrated into one. Even in this case, the current flowing through each transformer is reduced, and the high-voltage power supply 6 becomes compact.

  Although not shown, an abnormal current detection circuit is provided in each high voltage power source 6 and when an abnormal current is generated in the high voltage power source 6 due to damage to the dielectric covering the high voltage electrode 7, the high voltage power source that has detected the abnormal current is detected. Block 6 only.

  In addition, when an abnormal current of a specific high-voltage power supply among a plurality of high-voltage power supplies 6 is detected, display means for displaying the occurrence and location of the abnormal current is provided. Instead of detecting abnormal currents, abnormalities such as the temperature, light, and sound of the high-voltage power supply 6 and the discharge unit 110 are detected, the high-voltage power supply 6 is shut off, and the occurrence and location of the abnormality are displayed. May be.

  A high voltage is applied to the ground electrode 5 having the honeycomb-shaped catalyst-carrying conductive adsorbent by a high-voltage power source 6 to generate a silent discharge between the high-voltage electrode 7 and the ground electrode 5 and to generate plasma in the vicinity of the high-voltage electrode 7. Chemical substances are decomposed by active species generated by plasma discharge and removed by an adsorbent.

  The installation direction of the sirocco fan 4 is as shown in FIGS. 1 and 2, with the suction port directed to the side, as shown in FIG. 3, with the suction port directed forward, and as shown in FIGS. The mouth can be set upward or the suction port can be installed in any direction. Further, as shown in FIG. 6, a mixed flow duct fan 24 may be used instead of the sirocco fan 4.

Embodiment 2. FIG.
FIG. 8 is a cross-sectional view showing Embodiment 2 of the gas purification apparatus according to the present invention. As shown in FIG. 8, the gas purification apparatus 200 according to the second embodiment includes a double-suction sirocco fan 24 that sucks the purified gas 1 from the motor 24 b side as a sirocco fan.

  Since both the suction sirocco fans 24 suck the gas 1 to be purified from the two suction ports facing each other, the flow of the gas 1 to be purified is made uniform, and the purification in the downstream decomposition processing unit 102 is efficiently performed. The maintenance of both suction sirocco fans 24 can be performed by removing the maintenance cover 24c on the side surface of the casing 101 and taking out only the motor 24b and the blades 24a.

  It is not necessary to remove the entire suction sirocco fan 24 including the casing, and maintenance is easy. Further, the cooling effect of the motor 24b is obtained by the wind around the motor 24b, and the motor 24b can be made small.

Embodiment 3 FIG.
FIG. 9 is a diagram showing a third embodiment of the gas purification apparatus according to the present invention, and FIG. 10 is a diagram showing another example of the third embodiment.

  As shown in FIG. 9, the discharge units 130 and 131 of the gas purification apparatus 300 according to the third embodiment have a plurality of elongated thin plate-like high-voltage electrodes 37 facing a ground electrode 35 formed in a rectangular thick plate shape. Place them in parallel.

  The high-voltage electrode 37 is a rectangle in which the ratio of the vertical side of the cross section to the horizontal side facing the ground electrode 35 is vertical side / horizontal side <1/20, and the width of the horizontal side is 15% of the width of the ground electrode 35. The following. Further, the width of the horizontal side is set to 7 times or less of the distance between the high-voltage electrode 37 and the ground electrode 35, the aperture ratio of the high-voltage electrode 37 with respect to the ground electrode 35 is set to 50% or more, and the distance between the ground electrode 35 and the high-voltage electrode 37. Is a constant equal interval.

  By setting the high voltage electrode 37 to the shape and arrangement described above, the pressure loss of the gas 1 to be purified by the high voltage electrode 37 can be suppressed, and the adsorbent of the ground electrode 35 can be made to act efficiently. Further, when the high voltage electrode 37 is disposed on both sides of the ground electrode 35 as in the discharge unit 131 shown in FIG. 10, the high voltage electrode 37 on one side is opposed to the two high voltage electrodes 37 on the other side. The discharge is uniformly distributed over the entire surface of the ground electrode (adsorbent) 16.

Embodiment 4 FIG.
FIG. 11 is a diagram showing a fourth embodiment of the gas purification device according to the present invention, and FIG. 12 is a diagram showing another example of the fourth embodiment.

  As shown in FIG. 11, the discharge units 140 and 141 of the gas purification apparatus 400 according to the fourth embodiment have a plurality of elongated high-voltage electrodes 47 arranged in parallel so as to face a ground electrode 45 formed in a rectangular thick plate shape. To do.

  The high voltage electrode 47 is formed in the shape of an elongated round bar and has an outer diameter of φ1 mm to φ5 mm. Further, the aperture ratio of the high voltage electrode 47 with respect to the ground electrode 45 is set to 30% or more, and the distance between the ground electrode 45 and the high voltage electrode 47 is set to a constant equal interval.

  By setting the high voltage electrode 47 to the shape and arrangement described above, the pressure loss of the gas 1 to be purified by the high voltage electrode 47 can be suppressed, and the adsorbent 16 of the ground electrode 45 can be efficiently operated. Further, the high voltage electrode 47 may be disposed on both sides of the ground electrode 45 as in the discharge unit 141 shown in FIG.

Next, the result of the evaluation test of a plurality of high voltage electrodes having different dimensional shapes or aperture ratios will be described. The evaluation test was first performed for a rectangular cross section. The case of the high-voltage electrode plate 37 alone and the case where the high-voltage electrode plate 37 is arranged in parallel with a distance of 2 mm from the ground electrode 35 on both sides of the ground electrode (adsorbent: 190 cells / inc ² , thickness 16 mm) 35, The relationship between air volume and pressure loss was evaluated.

  For the high-voltage electrode plate 37, three types with a width of 10, 15 and 20 mm and an aperture ratio of 50% and two types with a width of 15 mm and an aperture ratio of 30% and 40% were used. For each high-voltage electrode plate 37, the air volume and pressure loss were measured without exchanging the ground electrode (adsorbent) 35, and changes in pressure loss due to changes in width dimensions and aperture ratio were examined.

  The test results are shown in FIG. 13, FIG. 14 and FIG. In FIG. 13, the vertical axis indicates the loss coefficient, and the horizontal axis indicates the plate width (mm). In FIG. 14, the vertical axis represents the ratio (b) where b represents the pressure loss when the high voltage electrode 37 and the ground electrode 35 are combined, and a represents the sum of the pressure loss of each of the high voltage electrode 37 and the ground electrode 35. / A), and the horizontal axis represents the plate width (mm).

  As a result of the test, the influence of the high-voltage electrode plate width when the aperture ratio is the same (50%) is the same level (loss factor of 5 or less) at 10 mm and 15 mm, but the pressure loss is 20 mm at the high-voltage electrode plate width. Loss increases (loss factor more than 5).

  Further, when combined with the ground electrode 35, the value is increased by 40 to 100% from the sum of the pressure loss of each of the high voltage electrode plate 37 and the ground electrode 35. This is because the gap between the high-voltage electrode plate 37 and the ground electrode 35 is as narrow as 2 mm, so that the gas reaches the ground electrode (adsorbent) 35 before diffusing through the high-voltage electrode plate 37 and the adsorbent. This is probably because the gas does not spread over the entire surface, and the gas passage area of the adsorbent is apparently reduced.

  As a matter of course, the larger the width of the high-voltage electrode plate 37 is, the more easily affected by the above-mentioned effects, so the pressure loss increases. However, the pressure loss b when combined with the ground electrode 35 and the single pressure loss are increased. When the ratio (b / a) with the sum a is compared with the increase rate of 10 mm → 15 mm, the increase rate of 15 mm → 20 mm becomes larger. In the case of the same aperture ratio (50%), when the high voltage electrode plate 37 alone and the ground electrode 35 are combined, the pressure loss increases rapidly when the width is limited to 15 mm and the width is further increased.

  Further, FIG. 15 shows changes in the loss coefficient when the width of the high-voltage electrode plate 37 is the same (15 mm) and the aperture ratio is changed to 30%, 40%, and 50%. In FIG. 15, the vertical axis represents the loss coefficient, and the horizontal axis represents the aperture ratio (%). The pressure loss decreases proportionally as the aperture ratio increases. Considering the loss factor level and the apparent reduction of the gas passage area of the ground electrode (adsorbent) 35, an aperture ratio of 50% is necessary.

Next, an evaluation test was performed on the high-voltage electrode 47 having an elongated rod shape with a circular cross section. Tests were conducted for the case where the high-voltage electrode 47 alone and the case where the high-voltage electrode rod 47 was arranged in parallel at a distance of 2 mm from the ground electrode 47 on both sides of the ground electrode (adsorbent: 190 cells / inc ² , thickness 16 mm) 45 The relationship between air volume and pressure loss was evaluated.

  Three types of high-voltage electrode rods 47 having a diameter of φ4 and an aperture ratio of 30%, 40%, and 50% were used. For each high-voltage electrode rod 47, the air volume and pressure loss were measured without exchanging the ground electrode 45, and the change in the loss factor due to the difference in aperture ratio was examined. The test results are shown in FIG. In FIG. 16, the vertical axis represents the loss coefficient, and the horizontal axis represents the aperture ratio (%).

  As a result of the test, when the aperture ratio is changed to 30%, 40%, and 50%, the pressure loss decreases proportionally as the aperture ratio increases. Using the loss coefficient level (5 or less) as a guide, the aperture ratio needs to be 30% or more from FIG.

  Further, when combined with the ground electrode 45, the value is increased by 40 to 100% from the sum of the pressure loss of each of the high-voltage electrode rod 47 and the ground electrode 45. This is because the gap between the high-voltage electrode rod 47 and the ground electrode 45 is as narrow as 2 mm, so that the gas reaches the ground electrode (adsorbent) 45 before diffusing through the high-voltage electrode rod 47, and the adsorbent. This is probably because the gas does not spread over the entire surface, and the gas passage area of the adsorbent is apparently reduced.

  Further, when combined with the ground electrode 45, the value was almost equal to the sum of the pressure loss of each of the high-voltage electrode rod 47 and the ground electrode 45. The reason for this is thought to be that since the cross section of the high voltage electrode 47 is circular, the gas that has passed through the high voltage electrode rod 47 is caught in the electrode and reaches the entire surface of the adsorbent.

Embodiment 5. FIG.
FIGS. 17-20 is a figure which shows Embodiment 5 of the gas purification apparatus concerning this invention. As shown in FIGS. 17 to 20, the discharge units 150, 151, 152, and 153 of the gas purification apparatus 500 of the fifth embodiment form the high-voltage electrodes 57 and 58 in a plate shape having substantially the same area as the ground electrode 55. The circular hole 57a or the square hole 58a is provided by punching or the like. The opening ratio of the circular hole 57a or the square hole 58a is 50% or more.

  The high voltage electrodes 57 and 58 are spaced apart from the ground electrode 55 and arranged in parallel with the ground electrode 55. The high voltage electrodes 57 and 58 may be arranged on both sides of the ground electrode 55 as in the discharge units 151 and 153 shown in FIGS. 18 and 20.

  Discharge units 150, 151, 152, and 153 of gas purification apparatus 500 of Embodiment 5 suppress the pressure loss due to high-voltage electrodes 57 and 58, and ground electrodes (adsorbents) 55 of discharge units 150, 151, 152, and 153. Can be efficiently operated.

Embodiment 6 FIG.
FIG.21 and FIG.22 is a figure which shows Embodiment 6 of the gas purification apparatus concerning this invention. As shown in FIG. 21, the discharge unit 160 of the gas purification apparatus 600 of the sixth embodiment has a plurality of elongated thin plate-like high-voltage electrodes 67 in parallel so as to face a ground electrode 65 formed in a rectangular thick plate shape. Deploy.

  The high voltage electrode 67 has a ratio of the vertical side of the cross section to the horizontal side facing the ground electrode 65 as a rectangle of vertical side / horizontal side <1/20. The high-voltage electrode 67 can be rotated by 90 ° about the vertical side (one end of the horizontal side) as a rotation axis. Further, the high voltage electrode 67 may be disposed on both sides of the ground electrode 65 as in the discharge unit 161 shown in FIG.

  The discharge units 160 and 161 of the gas purification apparatus 600 according to the sixth embodiment can suppress the pressure loss due to the high voltage electrode 67 and allow the ground electrode (adsorbent) 65 to act efficiently. When the chemical substance is adsorbed on the adsorbent 65 of the ground electrode by continuous operation of the gas purification apparatus 600, the side of the high voltage electrode 67 is perpendicular to the adsorbent 65 and the high voltage electrode 67 is opened to be purified. The flow path of the gas 1 is formed, and at the time of discharge decomposition, the horizontal side of the high voltage electrode 67 is parallel to the adsorbent 65 and the high voltage electrode 67 is closed to perform discharge decomposition.

  As described above, there is a method in which the high-pressure electrode 67 is closed, the adsorbent 65 is sealed, and discharge decomposition is performed. The discharge decomposition may be performed while flowing. Moreover, the high-voltage electrode 67 to be opened and closed is not limited to a plurality of sheets, but may be a single sheet.

  If the high voltage electrode coat | covered with the dielectric material of Embodiment 3-6 demonstrated above is used, the air path of the to-be-purified gas 1 will be ensured, and the pressure loss by a high voltage electrode will be reduced. As a result, the capacity of the fan and motor of the blower can be reduced, and the power consumption of the motor can be suppressed.

Embodiment 7 FIG.
FIG.23 and FIG.24 is a side view which shows Embodiment 7 of the gas purification apparatus concerning this invention. As shown in FIG. 23, flange portions 72 and 79 are provided at the inlet 2 and the outlet 9 of the gas purification device 700 so that a duct can be connected.

  When purifying the target gas 1 filled in the room, as shown in FIG. 23, the indoor purification is performed by forming an indoor circulation flow without connecting a duct. When the gas generation source is specified, as shown in FIG. 24, ducts 72a and 79a are connected to the flange portions 72 and 79 so that the local purification process can be performed. The ducts 72a and 79a are made detachable by the flange portions 72 and 79, and the duct is attached and detached according to the purpose of use.

  When the gas to be purified 1 filling a certain space is targeted, indoor purification is performed by forming an indoor circulation flow without connecting the ducts 72a and 79a, and when the gas generation source is specified, the duct 72a. , 78a are connected to perform a local purification process.

  As described above, the gas purification apparatus according to the present invention is useful as a device that is reduced in size, reduced in power consumption, reduced in cost, and facilitated maintenance.

It is a longitudinal cross-sectional view which shows Embodiment 1 of the gas purification apparatus concerning this invention. It is a cross-sectional view which shows the 1st example of arrangement | positioning of the sirocco fan of the gas purification apparatus of Embodiment 1. FIG. It is a cross-sectional view which shows the 2nd example of arrangement | positioning of a sirocco fan. It is a longitudinal cross-sectional view which shows the 3rd example of arrangement | positioning of a sirocco fan. It is a cross-sectional view which shows the 3rd example of arrangement | positioning of a sirocco fan. It is a longitudinal cross-sectional view which shows the example of arrangement | positioning of a mixed flow fan. FIG. 3 is a perspective view showing a decomposition processing unit of the gas purification device according to the first embodiment. It is a cross-sectional view which shows the both suction sirocco fans of the gas purification apparatus of Embodiment 2. 6 is a cross-sectional view showing a discharge unit of a gas purification apparatus according to Embodiment 3. FIG. It is sectional drawing which shows the other example of the discharge unit of the gas purification apparatus of Embodiment 3. 6 is a cross-sectional view showing a discharge unit of a gas purification apparatus according to Embodiment 4. FIG. It is sectional drawing which shows the other example of the discharge unit of the gas purification apparatus of Embodiment 4. It is a figure which shows the characteristic of the discharge unit of Embodiment 3. It is a figure which shows the characteristic of the discharge unit of Embodiment 3. It is a figure which shows the characteristic of the discharge unit of Embodiment 3. It is a figure which shows the characteristic of the discharge unit of Embodiment 4. FIG. 6 is a cross-sectional view showing a discharge unit of a gas purification device according to a fifth embodiment. It is sectional drawing which shows the other example of the discharge unit of the gas purification apparatus of Embodiment 5. It is sectional drawing which shows another example of the discharge unit of the gas purification apparatus of Embodiment 5. It is sectional drawing which shows another example of the discharge unit of the gas purification apparatus of Embodiment 5. It is sectional drawing which shows the discharge unit of the gas purification apparatus of Embodiment 6. It is sectional drawing which shows the other example of the discharge unit of the gas purification apparatus of Embodiment 6. It is a side view which shows the gas purification apparatus of Embodiment 7. It is a side view which shows the other example of the gas purification apparatus of Embodiment 7.

Explanation of symbols

1 Gas to be treated 2 Suction port 3 Dust removal filter (particulate matter separation means)
4 Sirocco fans (blowers)
14 Mixed flow fan (blower)
5 Ground electrode (adsorbent)
6 High-voltage power supply 7 High-voltage electrode 8 Grounding 9 Air outlet 10 Control circuit 11 Operation panel 12 Fan air outlet 100 Gas purification device 101 Case 102 Gas purification chamber (decomposition processing section)
DESCRIPTION OF SYMBOLS 103 Air path 110 Electrode unit 24 Both suction sirocco fan 200 Gas purification apparatus 35, 45 Ground electrode (adsorbent)
37, 47 High voltage electrode 130, 131, 140, 141 Electrode unit 300, 400 Gas purification device 55 Ground electrode (adsorbent)
57, 58 High voltage electrode 150, 151, 152, 153 Electrode unit 500 Gas purification device 65 Ground electrode (adsorbent)
67 High-voltage electrode 160, 161 Electrode unit 600 Gas purification device 72, 79 Flange 72a, 79a Duct 700 Gas purification device

Claims (16)

A decomposition processing unit that decomposes and removes chemical substances contained in the gas to be purified by active species generated by plasma discharge is provided, the gas to be purified is sucked from a suction port by a blower and sent to the decomposition processing unit. In the gas purification device that purifies the gas to be purified and blows it out from the outlet,
The decomposition processing unit
A plurality of electrode units comprising a ground electrode having a large number of subdivided adsorbents and a high-voltage electrode placed opposite to the ground electrode,
A gas purification apparatus comprising one high-voltage power supply for each set of the electrode units. The ground electrode has a honeycomb-shaped catalyst-supporting conductive adsorbent,
The gas purification apparatus according to claim 1, wherein the high voltage electrode is a metal electrode coated with a dielectric.   An abnormal current detection circuit is provided for each of the high-voltage power supplies, and when an abnormal current is generated due to damage of the dielectric of the high-voltage electrode, only the high-voltage power supply that detected the abnormal current is cut off. Item 3. The gas purification device according to Item 1 or 2.   The gas purification apparatus according to claim 3, further comprising a display unit that displays the occurrence and location of an abnormal current when an abnormal current of a specific high-voltage power supply among the high-voltage power supplies is detected.   The gas purification apparatus according to any one of claims 1 to 4, wherein the plurality of sets of discharge units are arranged so as to surround a blower outlet of the blower.   6. The method according to any one of claims 1 to 5, further comprising a particulate matter separation unit that is installed upstream of the decomposition processing unit and separates particulate matter contained in the gas to be purified. Gas purification equipment.   The gas blower according to any one of claims 1 to 6, wherein the blower is a double-suction sirocco fan.   The high-voltage electrode is formed in an elongated thin plate shape, and the ratio of the vertical side of the cross section to the horizontal side facing the ground electrode is vertical side / horizontal side <1/20, and the horizontal side is the width of the ground electrode. 8 or less, 7 times or less of the distance between the high-voltage electrode and the ground electrode, and the aperture ratio of the high-voltage electrode with respect to the ground electrode is 50% or more. Gas purifier according to one of the above.   The gas purification apparatus according to claim 8, wherein the high-voltage electrode is rotatable about the vertical side as a rotation axis.   10. The gas according to claim 9, wherein the high-voltage electrode is disposed on both sides of the ground electrode, and the high-voltage electrode on one side is disposed so as to face between the two high-voltage electrodes on the other side. Purification equipment.   The high voltage electrode is formed in an elongated rod shape, has an outer diameter of φ1 mm to φ5 mm, and an aperture ratio of the high voltage electrode with respect to the ground electrode is 30% or more. Gas purifier according to one of the above.   The gas according to any one of claims 1 to 7, wherein the high-voltage electrode is formed in a plate shape having a large number of circular holes or square holes, and the aperture ratio of the holes is 50% or more. Purification equipment.   The gas purification apparatus according to claim 11 or 12, wherein the high-voltage electrode is installed on both sides of the ground electrode.   The gas purification apparatus according to any one of claims 1 to 13, wherein a precious metal catalyst is used in combination as the adsorbent.   The gas purification apparatus according to claim 14, wherein the noble metal catalyst is palladium, platinum, or rhodium.   The gas purification apparatus according to any one of claims 1 to 15, wherein a flange portion for attaching and detaching a duct is provided at the suction port and the air outlet.

Images