JP2008236818A - thetaZ ACTUATOR - Google Patents

thetaZ ACTUATOR Download PDF

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JP2008236818A
JP2008236818A JP2007068145A JP2007068145A JP2008236818A JP 2008236818 A JP2008236818 A JP 2008236818A JP 2007068145 A JP2007068145 A JP 2007068145A JP 2007068145 A JP2007068145 A JP 2007068145A JP 2008236818 A JP2008236818 A JP 2008236818A
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armature winding
axis
axis armature
actuator
winding
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JP5093567B2 (en
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Kenichi Sadakane
健一 貞包
Mitsuhiro Matsuzaki
光洋 松崎
Toru Shikayama
透 鹿山
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a θZ actuator for realizing exact rotating operation and rectilinear operation with a single actuator having a simple structure. <P>SOLUTION: The θZ actuator comprises a mover 200 equipped with a permanent magnet 203 as a field magnet or iron teeth, and a stator 100 equipped with a θ-axis armature winding 102 for generating rotary magnetic field in a rotary θ-axis direction and a Z-axis armature winding 103 for generating a progress magnetic field in a rectilinear Z-axis direction, wherein current is applied to the θ-axis armature winding 102 and the Z-axis armature winding 103, and a torque is generated in a θ-axis direction and a thrust force is generated in the Z-axis direction to execute the rotation operation and the rectilinear operation of the mover 200. In the θZ actuator, a hollow core portion of the θ-axis armature winding 102 is used as a crossover processing space 110a of the θ-axis armature winding 102 and the Z-axis armature winding 103. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、回転と直進の２つのモーションを精密に行うθＺアクチュエータに関する。   The present invention relates to a θZ actuator that precisely performs two motions, rotation and rectilinear movement.

従来のθＺアクチュエータとして、回転モータとリニアモータの電機子巻線を同心円状に重ね合わせ、出力軸に直接トルクと推力を発生させ回転動作と直動動作を行うものが開示されている（例えば、特許文献１、特許文献２）
図８はＡ−Ａ断面図、図９は矢視Ｂ断面図である。
固定子１００は、中空のモータフレーム１０１、θ軸電機子巻線１０２、Ｚ軸電機子巻線１０３、Ｌ側ロータリーボールスプライン１０４、反Ｌ側ロータリーボールスプライン１０５、Ｌ側ブラケット１０６、反Ｌ側ブラケット１０７等より構成されている。中空のモータフレーム１０１内部の、同心円状外周側にθ軸電機子巻線１０２、内周側にＺ軸電機子巻線１０３が設けられている。モータフレーム１０１の負荷側端面にＬ側ブラケット１０６、反負荷側端面に反Ｌ側ブラケット１０７、またそれぞれにＬ側ロータリーボールスプライン１０４、反Ｌ側ロータリーボールスプライン１０５が設けられている。モータフレーム１０１の外周部には、図示しない電力供給用のモータ端子が設けられている。
θ軸電機子巻線１０２、内周側にＺ軸電機子巻線１０３の渡線は、図８に示す隣り合ったθ軸成形コイルとθ軸成形コイルのすきまである渡線処理スペース１１０Ｃや、モータフレーム１０１に加工等により確保された渡線処理スペース１１０ｂにて、接続されている。 As a conventional θZ actuator, there is disclosed an actuator in which armature windings of a rotary motor and a linear motor are concentrically overlapped to generate a torque and a thrust directly on an output shaft to perform a rotation operation and a linear motion operation (for example, (Patent Literature 1, Patent Literature 2)
8 is a cross-sectional view taken along the line AA, and FIG. 9 is a cross-sectional view taken along the arrow B.
The stator 100 includes a hollow motor frame 101, a θ-axis armature winding 102, a Z-axis armature winding 103, an L-side rotary ball spline 104, an anti-L-side rotary ball spline 105, an L-side bracket 106, and an anti-L side. It is comprised from the bracket 107 grade | etc.,. Inside the hollow motor frame 101, a θ-axis armature winding 102 is provided on the concentric outer circumference side, and a Z-axis armature winding 103 is provided on the inner circumference side. An L-side bracket 106 is provided on the load side end surface of the motor frame 101, an anti-L side bracket 107 is provided on the non-load side end surface, and an L-side rotary ball spline 104 and an anti-L side rotary ball spline 105 are provided on each. A motor terminal for supplying power (not shown) is provided on the outer periphery of the motor frame 101.
The connecting line of the θ-axis armature winding 102 and the Z-axis armature winding 103 on the inner peripheral side is a connecting line processing space 110C that extends between adjacent θ-axis forming coils and θ-axis forming coils shown in FIG. The motor frame 101 is connected to the motor frame 101 through a crossing processing space 110b secured by processing or the like.

一方、可動子２００は、出力軸２０１、界磁ヨーク２０２、永久磁石２０３等より構成されている。θ軸電機子巻線１０２とＺ軸電機子巻線１０３に対向する位置の出力軸２０１の外周に界磁ヨーク２０２、永久磁石２０３が同心円状に設けられており、可動子２００は、出力軸２０１において、Ｌ側ロータリーボールスプライン１０４および反Ｌ側ロータリーボールスプライン１０５により支持され、θ軸方向およびＺ軸方向に自由に移動可能となっている。   On the other hand, the mover 200 includes an output shaft 201, a field yoke 202, a permanent magnet 203, and the like. A field yoke 202 and a permanent magnet 203 are concentrically provided on the outer periphery of the output shaft 201 at a position opposite to the θ-axis armature winding 102 and the Z-axis armature winding 103. In 201, it is supported by the L-side rotary ball spline 104 and the non-L-side rotary ball spline 105, and can freely move in the θ-axis direction and the Z-axis direction.

このように構成されたθＺアクチュエータは、電流をθ軸電機子巻線１０２に流すことにより永久磁石２０３の作る磁界との作用で可動子２００にトルクを発生し、また電流をＺ軸電機子巻線１０３に流すことにより永久磁石２０３の作る磁界との作用で可動子２００に推力が発生する。このようにして、可動子２００は回転と直進の両方向の動作を実現している。
特開２００４−３４３９０３号公報 特開２００５−２０８８５号公報 The θZ actuator configured as described above generates torque in the mover 200 due to the action of the magnetic field generated by the permanent magnet 203 by passing a current through the θ-axis armature winding 102, and the current is supplied to the Z-axis armature winding. By flowing through the wire 103, a thrust is generated in the mover 200 by the action of the magnetic field created by the permanent magnet 203. In this way, the mover 200 realizes the operations in both directions of rotation and straight movement.
JP 2004-343903 A JP 2005-20885 A

θＺアクチュエータは、主にチップマウンタのヘッドや実装基板の検査装置のプローブ等に用いられ、１本で用いられるというより多数本を並べて用いられるケースが多い。電子部品の実装などを想定すると、実装密度が高くなってきており、マウンタヘッドや検査プローブの配置間隔も狭くしていくことが要望されていた。また、実装密度が高くなってきているので、マウンタヘッドや検査プローブには、高速な動作が要望されていた。このような要望を解決するためには、小さな外形寸法で高トルクのθＺアクチュエータが必要となってきている。
しかしながら、従来のθＺアクチュエータには、以下の問題があった。
複数のθ軸成形コイルおよび複数のＺ軸成形コイルを接続する際に、図８に示す隣り合ったθ軸成形コイルとθ軸成形コイルのすきまである渡線処理スペース１１０Ｃを利用した場合は、前記スペースを確保するためにθ軸成形コイルの大きさを幅方向に狭くする必要があり、そのためコイルの占める体積が減少しθ軸のトルクを大きくすることができないという問題が生じていた。
また、複数のθ軸成形コイルおよび複数のＺ軸成形コイルを接続する際に、モータフレーム１０１に加工等により確保された渡線処理スペース１１０ｂを利用した場合は、モータフレームが非対称に形成されるため磁路がアンバランスになり磁気特性が悪くなる。このような磁界が形成されると、トルクむらが発生したり、発生トルク自体が小さくなるなどの問題が生じていた。また、フレームの所定の肉厚を確保しようとすると、外形寸法が大きくなるという問題が生じていた。
本発明は、上記問題を解決するためになされたものであり、簡素な構造で精密な回転動作と直進動作を一つのアクチュエータで実現するθＺアクチュエータを提供することを目的とする。 The θZ actuator is mainly used for a chip mounter head, a probe of a mounting board inspection device, and the like. In many cases, a plurality of θZ actuators are used rather than one. Assuming the mounting of electronic components, etc., the mounting density has increased, and it has been demanded that the mounting intervals of mounter heads and inspection probes be narrowed. Further, since the mounting density has been increased, the mounter head and the inspection probe have been required to operate at high speed. In order to solve such a demand, a θZ actuator having a small outer dimension and a high torque is required.
However, the conventional θZ actuator has the following problems.
When connecting a plurality of θ-axis forming coils and a plurality of Z-axis forming coils, when using the connecting line processing space 110C that is between adjacent θ-axis forming coils and θ-axis forming coils shown in FIG. In order to secure the space, it is necessary to reduce the size of the θ-axis forming coil in the width direction, which causes a problem that the volume occupied by the coil decreases and the torque of the θ-axis cannot be increased.
Further, when connecting the plurality of θ-axis forming coils and the plurality of Z-axis forming coils, when the crossover processing space 110b secured by processing or the like is used for the motor frame 101, the motor frame is formed asymmetrically. For this reason, the magnetic path becomes unbalanced, and the magnetic characteristics are deteriorated. When such a magnetic field is formed, problems such as torque unevenness and the generated torque itself are reduced. In addition, when trying to secure a predetermined thickness of the frame, there has been a problem that the outer dimensions are increased.
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a θZ actuator that realizes a precise rotation operation and a straight-ahead operation with a single actuator with a simple structure.

上記問題を解決するため、本発明は、次のように構成したのである。
請求項１に記載の発明は、界磁とする永久磁石もしくは鉄心歯を備えた可動子と、回転θ軸方向に回転磁界を発生するθ軸電機子巻線と直進Ｚ軸方向に進行磁界を発生するＺ軸電機子巻線を備えた固定子とで構成されるとともに、前記θ軸電機子巻線と前記Ｚ軸電機子巻線に電流を通電し、θ軸方向にトルクを、Ｚ軸方向に推力を発生させて前記可動子の回転動作と直進動作を行うθＺアクチュエータにおいて、前記θ軸電機子巻線の空芯部を、前記θ軸電機子巻線および前記Ｚ軸電機子巻線の渡線処理スペースとしたものである。
また、請求項２に記載の発明は、前記θ軸電機子巻線が、前記Ｚ軸巻線に対して内周面または外周面のいずれか一方に配置されたものである。
また、請求項３に記載の発明は、前記θ軸電機子巻線の前記空芯部の長手方向の長さが前記Ｚ軸電機子巻線の長手方向の長さより長いものである。
また、請求項４に記載の発明は、前記θ軸電機子巻線が、前記Ｚ軸電機子巻線に対して内周面に配置され、前記θ軸電機子巻線の前記空芯部の長手方向の長さが前記Ｚ軸電機子巻線の長手方向の長さより長いものである。
また、請求項５に記載の発明は、前記θ軸電機子巻線が、前記Ｚ軸電機子巻線に対して外周面に配置され、前記θ軸電機子巻線の前記空芯部の長手方向の長さが前記Ｚ軸電機子巻線の長手方向の長さより長いものである。
また、請求項６に記載の発明は、前記Ｚ軸電機子巻線が、前記θ軸電機子巻線の前記空芯部で渡線処理され、前記θ軸電機子巻線の巻き始めと巻き終わりの２本のケーブルが同じ方向に引き出されるものである。
また、請求項７に記載の発明は、前記２本のケーブルが、前記Ｚ軸電機子巻線と前記θ軸電機子巻線とのすきまから引き出すものである。 In order to solve the above problem, the present invention is configured as follows.
According to the first aspect of the present invention, a mover having a permanent magnet or iron core teeth as a magnetic field, a θ-axis armature winding that generates a rotating magnetic field in the rotating θ-axis direction, and a traveling magnetic field in the straight Z-axis direction are provided. And a stator having a Z-axis armature winding that is generated, and a current is passed through the θ-axis armature winding and the Z-axis armature winding to generate torque in the θ-axis direction. In a θZ actuator that generates a thrust in a direction to perform a rotation operation and a straight movement operation of the mover, an air core portion of the θ-axis armature winding is connected to the θ-axis armature winding and the Z-axis armature winding. This is a crossover processing space.
According to a second aspect of the present invention, the θ-axis armature winding is arranged on either the inner peripheral surface or the outer peripheral surface with respect to the Z-axis winding.
According to a third aspect of the present invention, the longitudinal length of the air core portion of the θ-axis armature winding is longer than the longitudinal length of the Z-axis armature winding.
According to a fourth aspect of the present invention, the θ-axis armature winding is disposed on an inner peripheral surface with respect to the Z-axis armature winding, and the air-core portion of the θ-axis armature winding The length in the longitudinal direction is longer than the length in the longitudinal direction of the Z-axis armature winding.
The invention according to claim 5 is characterized in that the θ-axis armature winding is disposed on the outer peripheral surface with respect to the Z-axis armature winding, and the longitudinal direction of the air core portion of the θ-axis armature winding. The length in the direction is longer than the length in the longitudinal direction of the Z-axis armature winding.
According to a sixth aspect of the present invention, the Z-axis armature winding is subjected to a crossover process at the air core portion of the θ-axis armature winding, and the winding start and winding of the θ-axis armature winding are performed. The last two cables are drawn in the same direction.
According to a seventh aspect of the invention, the two cables are drawn from a gap between the Z-axis armature winding and the θ-axis armature winding.

請求項１〜７に記載の発明によると、θＺアクチュエータにおいて渡線処理スペースを確保する目的で、θ軸成形コイルの大きさを幅方向に狭くする必要がないため、同体格（同体積）でθ軸のトルク値を大きくすることが出来る。逆を言えば、同トルク値で小形化することが出来る。また、θ軸電機子巻線をＺ軸電機子巻線の内周面または外周面のいずれか一方に配置するように選択することで、回転トルクと推力のいずれかをより大きくすることを選択することが可能である。
また、渡線処理スペースを確保する目的で、モータフレームに複雑な加工等を行う必要がないため、磁気特性のアンバランス量の小さいθＺアクチュエータを提供することが出来る。 According to the first to seventh aspects of the present invention, it is not necessary to narrow the size of the θ-axis forming coil in the width direction for the purpose of securing a connecting line processing space in the θZ actuator. The torque value of the θ axis can be increased. In other words, it can be downsized with the same torque value. Also, by selecting to place the θ-axis armature winding on either the inner or outer peripheral surface of the Z-axis armature winding, select to increase either the rotational torque or thrust Is possible.
In addition, since it is not necessary to perform complicated processing or the like on the motor frame for the purpose of securing a wiring processing space, it is possible to provide a θZ actuator with a small magnetic property unbalance amount.

以下、本発明の実施の形態について図を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

本発明実施例１の図１は正面図、図２はＡ−Ａ断面図、図３は矢視Ｂ断面図である。本発明の構成要素が従来技術と同じものについては同一符号を付して説明する。 固定子１００は、中空のモータフレーム１０１、θ軸電機子巻線１０２、Ｚ軸電機子巻線１０３、Ｌ側ロータリーボールスプライン１０４、反Ｌ側ロータリーボールスプライン１０５、Ｌ側ブラケット１０６、反Ｌ側ブラケット１０７等より構成されている。中空のモータフレーム１０１内部の、同心円状外周側にθ軸電機子巻線１０２、内周側にＺ軸電機子巻線１０３が設けられている。モータフレーム１０１の負荷側端面にＬ側ブラケット１０６、反負荷側端面に反Ｌ側ブラケット１０７、またそれぞれにＬ側ロータリーボールスプライン１０４、反Ｌ側ロータリーボールスプライン１０５が設けられている。モータフレーム１０１の外周部には、図示しない電力供給用のモータ端子が設けられている。
図４にθ軸電機子巻線結線図、図５にＺ軸電機子巻線結線図を示す。θ軸電機子巻線１０２は、複数のθ軸成形コイルから構成され図４のとおり接続され、図示しない電力供給用のモータ端子に接続される。Ｚ軸電機子巻線１０３は、複数のＺ軸成形コイルから構成され図５のとおり接続され、図示しない電力供給用のモータ端子に接続される。複数のθ軸成形コイルおよび複数のＺ軸成形コイルが前記それぞれの図４および図５のように接続され、図６に示す複数のθ軸成形コイルの空芯部を渡線処理スペース１１０ａとして接続されている。たとえば、Ｕ１とＵ２の渡線１６０は渡線処理スペース１１０ａで処理され、Ｕ１の巻き始め線１６１とＵ２の巻き終わり線１６２は一方方向に引き出され、θ軸電機子巻線１０２とＺ軸電機子巻線１０３の隙間から端末処理される。また、外周に配置されたθ軸電機子巻線１０２のＺ軸方向長さを、前記θ軸電機子巻線１０２の内周に配置されたＺ軸電機子巻線１０３のＺ軸方向長さより十分長くして、図１に示したＬ１およびＬ２寸法を確保し、前記すきまを利用して端末処理を行っている。
検出器１５０は、検出器フレーム１５１、θ軸検出ヘッド１５２、Ｚ軸検出ヘッド１５３等より構成されている。検出器フレーム１５１に並べてθ軸検出ヘッド１５２、Ｚ軸検出ヘッド１５３が設けられている。 1 of the first embodiment of the present invention is a front view, FIG. 2 is a cross-sectional view taken along the line AA, and FIG. Constituent elements of the present invention that are the same as those of the prior art will be described with the same reference numerals. The stator 100 includes a hollow motor frame 101, a θ-axis armature winding 102, a Z-axis armature winding 103, an L-side rotary ball spline 104, an anti-L-side rotary ball spline 105, an L-side bracket 106, and an anti-L side. It is comprised from the bracket 107 grade | etc.,. Inside the hollow motor frame 101, a θ-axis armature winding 102 is provided on the concentric outer circumference side, and a Z-axis armature winding 103 is provided on the inner circumference side. An L-side bracket 106 is provided on the load side end surface of the motor frame 101, an anti-L side bracket 107 is provided on the non-load side end surface, and an L-side rotary ball spline 104 and an anti-L side rotary ball spline 105 are provided on each. A motor terminal for supplying power (not shown) is provided on the outer periphery of the motor frame 101.
FIG. 4 shows a θ-axis armature winding connection diagram, and FIG. 5 shows a Z-axis armature winding connection diagram. The θ-axis armature winding 102 is composed of a plurality of θ-axis forming coils and is connected as shown in FIG. 4 and is connected to a motor terminal for power supply (not shown). The Z-axis armature winding 103 is composed of a plurality of Z-axis forming coils and is connected as shown in FIG. 5 and is connected to a power supply motor terminal (not shown). A plurality of θ-axis forming coils and a plurality of Z-axis forming coils are connected as shown in FIGS. 4 and 5, respectively, and the air core portions of the plurality of θ-axis forming coils shown in FIG. 6 are connected as a connecting line processing space 110a. Has been. For example, the U1 and U2 crossover lines 160 are processed in the crossover processing space 110a, the U1 winding start line 161 and the U2 winding end line 162 are drawn out in one direction, and the θ-axis armature winding 102 and the Z-axis electric machine Terminal processing is performed from the gap between the child windings 103. Further, the length in the Z-axis direction of the θ-axis armature winding 102 disposed on the outer periphery is greater than the length in the Z-axis direction of the Z-axis armature winding 103 disposed on the inner periphery of the θ-axis armature winding 102. It is made sufficiently long to secure the dimensions L1 and L2 shown in FIG. 1, and the terminal processing is performed using the clearance.
The detector 150 includes a detector frame 151, a θ-axis detection head 152, a Z-axis detection head 153, and the like. A θ-axis detection head 152 and a Z-axis detection head 153 are provided side by side on the detector frame 151.

一方、可動子２００は、出力軸２０１、界磁ヨーク２０２、永久磁石２０３、θ軸スケール２５１、Ｚ軸スケール２５２等より構成されている。θ軸電機子巻線１０２とＺ軸電機子巻線１０３に対向する位置の出力軸２０１の外周に界磁ヨーク２０２、永久磁石２０３が同心円状に設けられており、θ軸検出ヘッド１５２、Ｚ軸検出ヘッド１５３に対向する位置の出力軸２０１の外周にθ軸スケール２５１、Ｚ軸スケール２５２が並べて設けられている。可動子２００は、出力軸２０１において、Ｌ側ロータリーボールスプライン１０４および反Ｌ側ロータリーボールスプライン１０５により支持され、θ軸方向およびＺ軸方向に自由に移動可能となっている。   On the other hand, the mover 200 includes an output shaft 201, a field yoke 202, a permanent magnet 203, a θ-axis scale 251, a Z-axis scale 252 and the like. A field yoke 202 and a permanent magnet 203 are provided concentrically on the outer periphery of the output shaft 201 at a position facing the θ-axis armature winding 102 and the Z-axis armature winding 103, and the θ-axis detection head 152, Z A θ-axis scale 251 and a Z-axis scale 252 are provided side by side on the outer periphery of the output shaft 201 at a position facing the axis detection head 153. The mover 200 is supported on the output shaft 201 by the L-side rotary ball spline 104 and the anti-L-side rotary ball spline 105, and can move freely in the θ-axis direction and the Z-axis direction.

このように構成されたθＺアクチュエータは、電流をθ軸電機子巻線１０２に流すことにより永久磁石２０３の作る磁界との作用で可動子２００にトルクを発生し、また電流をＺ軸電機子巻線１０３に流すことにより永久磁石２０３の作る磁界との作用で可動子２００に推力が発生する。このようにして、可動子２００は回転と直進の両方向の動作を実現している。   The θZ actuator configured in this manner generates torque in the mover 200 due to the action of the magnetic field generated by the permanent magnet 203 by flowing a current through the θ-axis armature winding 102, and also transmits the current to the Z-axis armature winding. By flowing through the wire 103, a thrust is generated in the mover 200 by the action of the magnetic field created by the permanent magnet 203. In this manner, the mover 200 realizes both rotational and straight movements.

本発明の実施例２を前記実施例１との相違点のみ抽出して説明する。
図７に示すように内周に配置されたθ軸電機子巻線のＺ軸方向長さを、前記θ軸電機子巻線の外周に配置されたＺ軸電機子巻線のＺ軸方向長さより十分長くして、両電機子巻線のＺ軸方向のすきまを利用して渡線処理を行っている。 The second embodiment of the present invention will be described by extracting only the differences from the first embodiment.
As shown in FIG. 7, the length in the Z-axis direction of the θ-axis armature winding arranged on the inner circumference is the length of the Z-axis armature winding arranged in the outer circumference of the θ-axis armature winding. The crossover process is performed by making use of the clearance in the Z-axis direction of both armature windings.

本発明の構成により、θＺアクチュエータにおいて渡線処理スペースを確保する目的で、θ軸成形コイルの大きさを幅方向に狭くする必要がないため、同体格（同体積）でθ軸のトルク値を大きくすることが出来る。逆を言えば、同トルク値で小形化することが出来る。また、渡線処理スペースを確保する目的で、モータフレームに複雑な加工等を行う必要がないため、比較的安価で磁気特性のアンバランス量の小さいθＺアクチュエータを提供することが出来る。
また、θ軸電機子巻線をＺ軸電機子巻線の内周面または外周面のいずれか一方に配置したことで、回転トルクをより大きくしたい場合には、θ軸電機子巻線をＺ軸電機子巻線の内周面に配置し、磁路長が短くなるようにし、推力をより大きくしたい場合には、θ軸電機子巻線をＺ軸電機子巻線の外周面に配置し、Ｚ軸電機子巻線と可動子間の磁路長が短くなるようにする。 With the configuration of the present invention, it is not necessary to reduce the size of the θ-axis forming coil in the width direction for the purpose of securing a connecting line processing space in the θZ actuator. It can be enlarged. In other words, it can be downsized with the same torque value. Further, since it is not necessary to perform complicated processing or the like on the motor frame for the purpose of securing the wiring processing space, it is possible to provide a θZ actuator that is relatively inexpensive and has a small unbalanced magnetic property.
In addition, when the θ-axis armature winding is arranged on either the inner peripheral surface or the outer peripheral surface of the Z-axis armature winding, and the rotation torque is to be increased, the θ-axis armature winding is If you want to reduce the magnetic path length and increase the thrust by placing it on the inner peripheral surface of the shaft armature winding, place the θ-axis armature winding on the outer peripheral surface of the Z-axis armature winding. The magnetic path length between the Z-axis armature winding and the mover is shortened.

本発明は、１つのアクチュエータで、精密な回転動作と直進動作を実現するθＺアクチュエータを提供することが出来る。よって、θＺの２自由度動作が要求されるチップマウンタ装置のマウンタヘッドや各種検査装置の検査ヘッドなどの用途に適用することが出来る。   The present invention can provide a θZ actuator that realizes a precise rotational operation and straight-ahead operation with a single actuator. Therefore, the present invention can be applied to applications such as a mounter head of a chip mounter device that requires two-degree-of-freedom movement of θZ and an inspection head of various inspection devices.

本発明実施例のＡ−Ａ断面図AA sectional view of an embodiment of the present invention 本発明実施例の正面図Front view of the embodiment of the present invention 本発明実施例の矢視Ｂ断面図B sectional view of the embodiment of the present invention 本発明実施例のθ軸電機子巻線結線図Θ-axis armature winding connection diagram of the embodiment of the present invention 本発明実施例のＺ軸電機子巻線結線図Z-axis armature winding connection diagram of the embodiment of the present invention 本発明実施例の電機子巻線の模式図Schematic diagram of armature winding of an embodiment of the present invention 第２の本発明実施例の断面図Sectional view of the second embodiment of the present invention 従来技術のＡ−Ａ断面図AA sectional view of the prior art 従来技術の矢視Ｂ断面図Cross-sectional view of prior art arrow B

符号の説明Explanation of symbols

１００ 固定子
１０１ モータフレーム
１０２ θ軸電機子巻線
１０３ Ｚ軸電機子巻線
１０４ Ｌ側ロータリーボールスプライン
１０５ 反Ｌ側ロータリーボールスプライン
１０６ Ｌ側ブラケット
１０７ 反Ｌ側ブラケット
１１０ａ、１１０ｂ、１１０ｃ 渡線処理スペース
１５０ 検出器
１５１ 検出器フレーム
１５２ θ軸検出ヘッド
１５３ Ｚ軸検出ヘッド
２００ 可動子
２０１ 出力軸
２０２ 界磁ヨーク
２０３ 永久磁石
２５１ θ軸スケール
２５２ Ｚ軸スケール 100 Stator 101 Motor frame 102 θ-axis armature winding 103 Z-axis armature winding 104 L-side rotary ball spline 105 Anti-L-side rotary ball spline 106 L-side bracket 107 Anti-L-side brackets 110a, 110b, 110c Space 150 Detector 151 Detector frame 152 θ-axis detection head 153 Z-axis detection head 200 Movable element 201 Output shaft 202 Field yoke 203 Permanent magnet 251 θ-axis scale 252 Z-axis scale

Claims (7)

界磁とする永久磁石もしくは鉄心歯を備えた可動子と、回転θ軸方向に回転磁界を発生するθ軸電機子巻線と直進Ｚ軸方向に進行磁界を発生するＺ軸電機子巻線を備えた固定子とで構成されるとともに、前記θ軸電機子巻線と前記Ｚ軸電機子巻線に電流を通電し、θ軸方向にトルクを、Ｚ軸方向に推力を発生させて前記可動子の回転動作と直進動作を行うθＺアクチュエータにおいて、
前記θ軸電機子巻線の空芯部を、前記θ軸電機子巻線および前記Ｚ軸電機子巻線の渡線処理スペースとしたことを特徴とするθＺアクチュエータ。 A mover having a permanent magnet or iron core teeth as a field, a θ-axis armature winding that generates a rotating magnetic field in the rotating θ-axis direction, and a Z-axis armature winding that generates a traveling magnetic field in the straight Z-axis direction And a movable current by passing a current through the θ-axis armature winding and the Z-axis armature winding to generate torque in the θ-axis direction and thrust in the Z-axis direction. In the θZ actuator that performs rotation and straight movement of the child,
An θZ actuator characterized in that the air-core portion of the θ-axis armature winding is used as a crossover processing space for the θ-axis armature winding and the Z-axis armature winding. 前記θ軸電機子巻線は、前記Ｚ軸巻線に対して内周面または外周面のいずれか一方に配置されたことを特徴とする請求項１記載のθＺアクチュエータ。   The θZ actuator according to claim 1, wherein the θ-axis armature winding is disposed on either the inner peripheral surface or the outer peripheral surface with respect to the Z-axis winding. 前記θ軸電機子巻線の前記空芯部の長手方向の長さが前記Ｚ軸電機子巻線の長手方向の長さより長いことを特徴とする請求項１記載のθＺアクチュエータ。   2. The θZ actuator according to claim 1, wherein a length in a longitudinal direction of the air core portion of the θ-axis armature winding is longer than a length in a longitudinal direction of the Z-axis armature winding. 前記θ軸電機子巻線は、前記Ｚ軸電機子巻線に対して内周面に配置され、前記θ軸電機子巻線の前記空芯部の長手方向の長さが前記Ｚ軸電機子巻線の長手方向の長さより長いことを特徴とする請求項１記載のθＺアクチュエータ。   The θ-axis armature winding is disposed on the inner peripheral surface with respect to the Z-axis armature winding, and the length in the longitudinal direction of the air core portion of the θ-axis armature winding is the Z-axis armature. The θZ actuator according to claim 1, wherein the θZ actuator is longer than a length in a longitudinal direction of the winding. 前記θ軸電機子巻線は、前記Ｚ軸電機子巻線に対して外周面に配置され、前記θ軸電機子巻線の前記空芯部の長手方向の長さが前記Ｚ軸電機子巻線の長手方向の長さより長いことを特徴とする請求項１記載のθＺアクチュエータ。   The θ-axis armature winding is disposed on the outer peripheral surface with respect to the Z-axis armature winding, and the length in the longitudinal direction of the air core portion of the θ-axis armature winding is the Z-axis armature winding. The θZ actuator according to claim 1, wherein the θZ actuator is longer than a length in a longitudinal direction of the line. 前記Ｚ軸電機子巻線は、前記θ軸電機子巻線の前記空芯部で渡線処理され、前記θ軸電機子巻線の巻き始めと巻き終わりの２本のケーブルが同じ方向に引き出されることを特徴とする請求項１記載のθＺアクチュエータ。   The Z-axis armature winding is subjected to a crossover process at the air core portion of the θ-axis armature winding, and the two cables at the start and end of winding of the θ-axis armature winding are pulled out in the same direction. The θZ actuator according to claim 1, wherein: 前記２本のケーブルは、前記Ｚ軸電機子巻線と前記θ軸電機子巻線とのすきまから引き出すことを特徴とする請求項４記載のθＺアクチュエータ。   5. The θZ actuator according to claim 4, wherein the two cables are led out from a gap between the Z-axis armature winding and the θ-axis armature winding.
JP2007068145A 2007-03-16 2007-03-16 θZ actuator Expired - Fee Related JP5093567B2 (en)

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JP2011142725A (en) * 2010-01-06 2011-07-21 Yaskawa Electric Corp thetaZ ACTUATOR
JP2011239661A (en) * 2010-04-14 2011-11-24 Yaskawa Electric Corp Linear rotary actuator
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