JP2008235035A - Metal nanoparticle paste and manufacturing method of metal nanoparticle paste - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a metal nanoparticle paste which prevents incidents of turbulence and disconnection of a wiring pattern, and forms the low-impedance and fine wiring pattern even if the wiring pattern is formed on a substrate by using an ink jet printing method or the like, and also to provide a manufacturing method of the metal nano particle paste. <P>SOLUTION: The metal nanoparticle paste has metal nano particles of 1 to 100 nm of the average particle diameter as a conductive medium, contains a fluorine atom or the like to adjust wettability with the substrate and alkoxide of silicon to form a matrix of the metal nanoparticles as the essential component, and in the case where a circuit pattern is formed by the ink jet printing method, incidents of turbulence and disconnection of the wiring pattern are prevented by fusion-bonding and sintering the metal nanoparticles mutually at a low temperature, and making a line width of the printed pattern uniform. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a metal nanoparticle paste and a method for producing the metal nanoparticle paste. More specifically, a metal nanoparticle paste suitable for forming a fine wiring pattern with a low impedance on a heat-resistant substrate such as a glass substrate or a ceramic substrate using an inkjet printing method or the like, and a method for producing the metal nanoparticle paste About.

  In recent years, along with the increase in size of liquid crystal displays, research for preparing a wiring pattern of a liquid crystal panel by an ink jet printing method has become active. Conventionally applied lithography methods have a problem in that the number of processes is large and the area of equipment is increased due to an increase in the size of the display. Further, in the screen printing method in which a metal screen mask is printed as a mold, there is a limit to the miniaturization of wiring and the width of adjacent wiring as the information terminal is rapidly reduced in size.

  In view of this, attention has been focused on an ink jet printing method in which a conductive paste ink can be directly sprayed onto a substrate to draw a target wiring pattern. Compared to the methods used in the past, this method does not require masking because it is formed directly, can be easily applied to large-sized substrates, can shorten the process time, and can draw patterns at the personal computer level. Therefore, there is an advantage that the machine can be downsized.

  On the other hand, the ink jet printing method requires a conductive ink (conductive paste) in addition to the equipment system (printer). In addition, in the liquid crystal panel manufacturing process, a highly conductive conductive paste for inkjet that can be sintered at a low temperature (250 ° C. or lower) is desired. In the research of the conductive paste, molten metal, conductive polymer and Studies involving metal nanoparticles have been made. The metal nanoparticles are excellent in uniformity and dispersibility, and when the metal particle size is reduced to the nano level, low temperature sinterability (for example, sintering at a temperature much lower than the original melting point of the metal) The melting point of silver is 960 ° C., but it can be reduced to 200 ° C. by making it into nanoparticles), so it is used for the synthesis of conductive paste. In the case of metal fine particles, when the particle size is sufficiently small, the proportion of atoms in the energy state present on the particle surface with respect to the whole increases, and the surface diffusion of metal atoms becomes so large that it cannot be ignored. Therefore, it is expected that a metal nanoparticle paste having sufficient conductivity even under low-temperature baking conditions can be obtained by using such metal fine particles. The Therefore, examination of the electrically conductive paste containing such a metal nanoparticle is made | formed in each direction (for example, refer patent document 1-patent document 6).

JP 2002-324966 A ([Claim 1], [Example 1]) JP 2004-247572 A ([Example 1]) JP-A-2004-273205 ([Claim 1], [Example 2]) JP 2005-26081 A ([Claim 1], [Example 1]) JP-T-2005-537386 ([Claim 38], [0027], [0051], [0102], [0318] to [0333]) JP 2006-253262 A ([Claim 3], [Claim 4])

  However, when the conductive paste containing metal nanoparticles obtained by the conventional technique is used to print a large area substrate by the inkjet printing method, the wiring pattern is disturbed or disconnected. In some cases, improvements were required.

  The present invention has been made in view of the above problems, and is a conductive paste containing metal nanoparticles, and even when a wiring pattern is formed on a substrate using an inkjet printing method or the like, the wiring An object of the present invention is to provide a metal nanoparticle paste that can prevent pattern disturbance and disconnection, and that can form a fine wiring pattern with low impedance and a method for producing the metal nanoparticle paste.

In order to solve the above-described problems, the metal nanoparticle paste according to claim 1 of the present invention includes the following components (a) to (c).
(A) metal nanoparticles (b) fluorine atom and / or fluorine compound (c) silicon alkoxide

  The metal nanoparticle paste according to claim 2 of the present invention is the metal nanoparticle paste according to claim 1, wherein the content of the metal nanoparticles is 2.0 to 30.0 mass% with respect to the entire metal nanoparticle paste. It is characterized by.

The metal nanoparticle paste according to claim 3 of the present invention is characterized in that, in the above-described claim 1 or 2, the metal nanoparticles are silver nanoparticles.
It is characterized by.

  In the method for producing a metal nanoparticle paste according to claim 4 of the present invention, a metal salt containing a target metal nanoparticle is heated to reflux in an alcohol-containing solvent in the presence of a protective agent comprising a water-soluble polymer, A first step of obtaining protective metal nanoparticles, a second step of pasting the protective metal nanoparticles obtained in the first step, a fluorine compound containing the target metal nanoparticles and an alkoxide of silicon by a sol-gel method Including a process.

  The method for producing a metal nanoparticle paste according to claim 5 of the present invention is the method according to claim 4, wherein the ratio of the molar amount of the metal salt to the protective agent in the first step (the molar amount of the protective agent / the molar amount of the metal salt). Amount = R) is characterized in that R = 0.5 to 5.0.

The method according to claim 6 in accordance with the metal nanoparticle paste of the present invention, in claim 4 or claim 5 and wherein the molecular weight of the protective agent (weight average molecular weight: M _W), characterized in that it is 20,000 to 400,000 And

  The metal nanoparticle paste manufacturing method according to claim 7 of the present invention is characterized in that, in any of the above-described claims 4 to 6, the protective agent is polyvinylpyrrolidone (PVP).

  The metal nanoparticle paste according to claim 1 of the present invention uses a metal nanoparticle having an average particle diameter of approximately 1 to 100 nm as a conductive medium, a fluorine atom for adjusting wettability with a substrate, and the like, Since it contains silicon alkoxide, which is a matrix of metal nanoparticles, as an essential component, when a circuit pattern is formed by inkjet printing, the metal nanoparticles can be fused and sintered at a low temperature and printed. Metal nano-particle paste (so-called conductive ink) that can form a fine wiring pattern with low impedance by making the line width of the formed pattern uniform, preventing the wiring pattern from being disturbed and breaking. It becomes.

  In the metal nanoparticle paste according to claim 2 of the present invention, since the content of the metal nanoparticles constituting the paste is in a specific range with respect to the entire metal nanoparticle paste, the viscosity becomes appropriate, and after heating and firing. It is possible to provide a metal nanoparticle paste capable of forming a continuous wiring without problems.

  Since the metal nanoparticle paste which concerns on Claim 3 of this invention uses the metal nanoparticle which comprises the said paste as a silver nanoparticle, the metal nanoparticle paste provided with favorable electroconductivity is provided.

  According to a fourth aspect of the present invention, there is provided a method for producing a metal nanoparticle paste, comprising subjecting a metal salt containing a target metal nanoparticle to a protective metal using an alcohol reduction method in the presence of a protective agent comprising a water-soluble polymer. A first step of obtaining nanoparticles and a second step of pasting the protective metal nanoparticles, a fluorine compound containing the target metal nanoparticles, and an alkoxide of silicon by a sol-gel method are employed. In the first step, the surface of the metal nanoparticles is coated and protected with a protective agent made of a water-soluble polymer using an alcohol reduction method so that the metal nanoparticles can be easily dispersed, and the protected metal nanoparticles By using a sol-gel method, a metal nanoparticle paste in which fluorine atoms and silicon alkoxide are present in the paste is formed by pasting with a fluorine compound containing the target metal nanoparticles and a silicon alkoxide. It can be easily prepared.

  In the method for producing a metal nanoparticle paste according to claim 5 of the present invention, since the ratio R of the molar amount of the metal salt and the protective agent in the first step is within a specific range, the amount of the protective agent and the metal salt is appropriate. The metal nanoparticles can be reliably protected with a protective agent, and the dispersibility of the protective metal nanoparticles is improved. Further, the average particle diameter of the obtained protective metal nanoparticles can be reduced, the particle size distribution can be narrowed, and silver nitrate by-product can be prevented.

In the method for producing a metal nanoparticle paste according to claim 6 of the present invention, the molecular weight (weight average molecular weight: M _W ) of the protective agent used in the first step is in a specific range. Since the distribution can be narrowed, protective nanoparticles having a small average particle diameter of about 5 to 50 nm can be obtained.

  Since the manufacturing method of the metal nanoparticle paste according to claim 7 of the present invention employs polyvinylpyrrolidone (PVP) as a protective agent used in the first step, the metal nanoparticles are coated with a relatively weak adsorption force. By protecting, the metal nanoparticles can be stabilized and easily dispersed.

The present invention will be described below. The metal nanoparticle paste of the present invention is constituted by including the following components (a) to (c).
(A) metal nanoparticles (b) fluorine atom and / or fluorine compound (c) silicon alkoxide

(A) Metal nanoparticles:
The metal nanoparticle paste of the present invention can be applied to form a very fine circuit with a low impedance, such as ultra-fine circuit printing. Therefore, the average particle size of the metal nanoparticles applied as a conductive medium is The average particle size is preferably selected from the range of 1 to 100 nm in accordance with the target line width of ultra fine printing and the film thickness after the heating and baking treatment. By selecting the average particle diameter of the contained metal nanoparticles within such a range, it is possible to apply to an extremely fine line width pattern by a conventionally known method such as an ink jet printing method or a screen printing method. The average particle size of the metal nanoparticles is particularly preferably in the range of 2 to 50 nm.

  The metal to be the metal nanoparticles constituting the metal nanoparticle paste of the present invention is not particularly limited, but from the viewpoint of obtaining a conductive film, for example, noble metals such as gold, silver, platinum, palladium, copper, It can be a metal such as nickel or aluminum. In the present invention, it is particularly preferable to select silver as the metal nanoparticles from the viewpoint of imparting good conductivity.

  It is preferable that content of the metal nanoparticle in the metal nanoparticle paste of this invention is 2.0-30.0 mass% or more with respect to the whole metal nanoparticle paste. By setting the content of the metal nanoparticles in such a range, the viscosity becomes appropriate, and a continuous wiring can be satisfactorily formed even after heating and baking. On the other hand, if the content is less than 2.0% by mass, the amount of metal nanoparticles is too small, and the metal nanoparticles may be separated from each other when heated and fired after printing, and the wiring may not be connected. On the other hand, if the content of the metal nanoparticles is larger than 30.0% by mass, the viscosity of the metal nanoparticle paste becomes too high, and it may be difficult to print the wiring. The content of the metal nanoparticles is more preferably 2.0 to 20.0% by mass, and particularly preferably 2.0 to 15.0% by mass with respect to the entire metal nanoparticle paste.

The metal nanoparticles may be coated with a protective agent made of a water-soluble polymer, and the metal nanoparticles are stabilized by protecting the metal nanoparticles with the protective agent. , Dispersibility can be improved. Examples of the protective agent include polyvinylpyrrolidone (PVP) (C ₆ H ₉ NO) _n , polyvinyl alcohol (PVA) (CH ₂ CH (OH)) _n , polyacrylic acid, cyclodextrin, and methylcellulose. Can be used.

  In the metal nanoparticle paste, metal nanoparticles coated and protected with a protective agent (protected metal nanoparticles) and metal nanoparticles that are not protected may be mixed. The ratio of the protective metal nanoparticles to the metal nanoparticles may be about protective metal nanoparticles / metal nanoparticles = 1/10 to 3/1.

(B) Fluorine atom and / or fluorine compound:
In the present invention, wettability with a substrate to be printed is poor due to the presence of fluorine components such as fluorine atoms and fluorine oxides (hereinafter sometimes referred to as “fluorine atoms”) in the metal nanoparticle paste. Thus, since the contact angle between the paste and the substrate can be increased, the line width of the printed pattern can be made uniform, and a low resistivity printed pattern can be obtained easily. As the fluorine compound, for example, fluoride, trifluoroacetate salt, trifluorometasulfonate salt, tetrafluoro acid salt, hexafluoro acid salt and the like can be used. It is preferable that content, such as a fluorine atom, in the metal nanoparticle paste of this invention is 5.0-20.0 mass% with respect to the whole metal nanoparticle paste.

(C) Silicon alkoxide:
In the present invention, silicon alkoxide (Si (OR) ₄ : R is an alkyl group) plays a matrix role to confine metal nanoparticles in the paste. In the present invention, methyl silicate (tetramethoxysilane) is used. ), Ethyl silicate (tetraethoxysilane), tetra-i-propoxysilane, tetra-n-propoxysilane, tetra-i-butoxysilane, tetra-n-natoxysilane, tetra-sec-butoxysilane, and the like. it can. The silicon alkoxide content in the metal nanoparticle paste of the present invention is preferably 1.0 to 10.0% by mass or more based on the entire metal nanoparticle paste.

  The dispersion solvent constituting the metal nanoparticle paste of the present invention is not particularly limited. For example, various solvents such as monohydric alcohol compounds such as methanol, ethanol, propanol and butanol, and polyhydric alcohol compounds such as ethylene glycol can be used. Compounds can be used. These alcohols may be used alone or in combination of two or more thereof.

  The dispersion solvent is one of those that determine the viscosity of the metal nanoparticle paste, but the metal nanoparticle paste of the present invention is applied to the substrate by, for example, applying an inkjet printing method or the like in the formation of the circuit pattern of the substrate. On the other hand, the present invention is applied to drawing a fine pattern. Therefore, it is preferable to appropriately determine the amount of the dispersion solvent so that the metal nanoparticle paste of the present invention has a liquid viscosity suitable for each, depending on the drawing method employed. For example, when an inkjet printing method is applied, it is preferable to select the viscosity of the metal nanoparticle paste in a range of approximately 5.0 mPa · s to 30.0 mPa · s (25 ° C.). In this case, the content of the dispersion solvent in the metal nanoparticle paste is preferably selected in the range of approximately 5.0 to 65.0% by mass with respect to the entire metal nanoparticle paste. The viscosity of the paste containing the metal nanoparticles is determined depending on the average particle size of the nanoparticles used, the dispersion concentration, and the type of the dispersion solvent used, and these three types are selected as appropriate to adjust the target viscosity. do it. In the metal nanoparticle paste of the present invention, the resistivity value is one index for achieving the characteristics, and there is no problem if the value after firing is approximately 500 μΩ · cm or less.

  In addition, the resin component etc. can be suitably added to the electroconductive silver nanoparticle paste of this invention in the range which does not inhibit the objective and effect of this invention.

  In the metal nanoparticle paste of the present invention, a metal salt containing a target metal nanoparticle is heated and refluxed in an alcohol-containing solvent in the presence of a protective agent made of a water-soluble polymer to obtain a protective metal nanoparticle. A manufacturing method comprising a step and a second step of pasting the protective metal nanoparticles obtained in the first step, a fluorine compound containing the target metal nanoparticles and an alkoxide of silicon by a sol-gel method is adopted. Can be obtained efficiently.

(1) Preparation of metal nanoparticles by alcohol reduction method (first step):
The alcohol reduction method generally means that a metal salt is mixed with an alcohol in the presence of a protective colloid and then heated to reflux to obtain a fine particle dispersion of a noble metal. In this method, the operation is simple, a fine particle dispersion can be easily obtained, the generated fine particles are small, the particle size distribution is narrow, the particle size can be controlled by adjusting conditions, the solvent is distilled off from the dispersion under reduced pressure and then dried. By adding another solvent, there is an advantage that the protective colloid can be dispersed in various soluble solvents. Another feature of the resulting fine particle dispersion is that it is highly active and highly selective as a catalyst.

  In the first step of the present invention, a metal salt containing the desired metal nanoparticles and a protective agent comprising a water-soluble polymer are used as aqueous solutions, respectively, and the resulting aqueous metal salt solution and aqueous protective agent solution are stirred and mixed. A mixed solution is obtained. Then, alcohol may be added to the obtained mixed solution, heated and then refluxed (reduced with alcohol) to obtain the protective metal nanoparticles as the target product.

  Examples of the metal salt containing the target metal nanoparticles include nitrates, acetates, halides, carbonates, perchlorate pyrophosphates, and the like, for example, if the target nanometal particles are silver Silver nitrate, silver acetate, silver perchlorate, silver chloride and the like can be used.

Since the metal nanoparticles have a small particle diameter, they have a very high surface activity and are aggregated, sintered between the particles, and difficult to redisperse. For this purpose, a method of preventing the aggregation by coating the surface of the metal nanoparticles with a protective agent has been put into practical use. When the metal nanoparticles covered with the protective agent are dispersed in a solvent, the surface is coated, so that they do not aggregate over a long period of time. In the present invention, examples of the water-soluble polymer that can be used as the protective agent include polyvinylpyrrolidone (PVP) (C ₆ H ₉ NO) _n , polyvinyl alcohol (PVA) (CH ₂ CH (OH). )) _N , polyacrylic acid, cyclodextrin, methylcellulose and the like can be used. These water-soluble polymers can stabilize and easily disperse metal nanoparticles by a relatively weak adsorption force.

The molecular weight of the protective agent (weight average molecular weight: M _W) is able to control the average particle size and particle size distribution of the protective metal nanoparticles produced, the molecular weight of the protecting agent, it is preferable that the 20,000 to 400,000. If the molecular weight of the protective agent is within such a range, the average particle size can be reduced (for example, 5 to 50 nm) and the particle size distribution can be narrowed. Therefore, the protective nanoparticles having a small average particle size of about 5 to 50 nm are provided. Can be obtained. The molecular weight of the protective agent is particularly preferably 40,000 to 360,000.

  Further, as a relationship between the number of moles of the protective agent and the molar amount of the metal salt, the ratio (R) of the molar amount of the metal salt to the protective agent is the molar amount of the protective agent / the molar amount of the metal salt = 0.5-5. 0.0 is preferable. When R is within such a range, the amount of the protective agent and the metal salt is appropriate, the metal nanoparticles can be reliably protected with the protective agent, and the dispersibility of the protective metal nanoparticles is improved. Moreover, the average particle diameter of the protective metal nanoparticle obtained can be made small, and a particle size distribution can also be made narrow. Furthermore, by-production of silver nitrate can be prevented. On the other hand, if R is less than 0.5, the amount of the metal salt is too large, so that the metal cannot be reliably protected with a protective agent and the dispersibility may be deteriorated. If it exceeds 5.0, the amount of the metal salt is too small, the concentration of silver contained in the solution may decrease, and the viscosity may increase. R (molar amount of protective agent / molar amount of metal salt) is particularly preferably 2.0 to 5.0.

  The metal salt and the protective agent may be made into a mixed solution by stirring and mixing the aqueous metal salt solution and the aqueous protective agent solution, using water, alcohol or the like as a solvent, respectively. In the present invention, the stirring and mixing of the metal salt aqueous solution and the protective agent aqueous solution is preferably performed in an inert gas such as argon gas or nitrogen gas.

  The alcohol added to the mixed solution functions as a reducing agent and acts as a dispersant itself. Examples of usable alcohols include various compounds such as monohydric alcohol compounds such as methanol, ethanol, propanol and butanol, and polyhydric alcohol compounds such as ethylene glycol. These alcohols may be used alone or in combination of two or more thereof. In the present invention, it is preferable to carry out stirring and mixing of the mixed solution and alcohol in an inert gas such as argon gas or nitrogen gas.

  In the first step of the present invention, alcohol is added to the mixed solution obtained by stirring and mixing the metal salt aqueous solution and the protective agent aqueous solution. The volume ratio of the mixed solution to the alcohol is: mixed solution / alcohol = It is preferable to set to 1/9 to 1/1. By setting the volume ratio in such a range, alcohol reduction can be carried out efficiently.

When the mixed solution and the alcohol are mixed and refluxed, the two are mixed and heated, for example, at about 60 to 95 ° C. or while heating. In addition, there is no restriction | limiting in particular about the specific means of recirculation | reflux, What is necessary is just to perform using a conventionally well-known method.

  In addition, after completion | finish of recirculation | reflux, a powdery protective metal nanoparticle can be obtained by drying the obtained protective metal nanoparticle. In order to remove moisture or the like in the protective metal nanoparticles, it is preferable to remove the solvent with an evaporator or the like and perform drying such as reduced pressure drying.

(2) Production of metal nanoparticle paste by the sol-gel method (second step):
In the second step constituting the production method of the present invention, the protective metal nanoparticles obtained in the first step, the fluorine compound containing the target metal nanoparticles and the silicon alkoxide are made into a paste by a sol-gel method. It is a process to do.

  Here, the sol-gel method generally uses a metal organic or inorganic compound as a solution, and hydrolyzes and polymerizes the compound in the solution to solidify the sol as a gel. It is a method of preparing. A metal alkoxide corresponding to the target oxide is dissolved in a solvent alcohol to obtain a solution. When water required for hydrolysis and acid (or ammonia) as a catalyst are added to the solution as a starting material and stirred at room temperature to 80 ° C. to cause hydrolysis and polymerization of the alkoxide, metal oxide particles are formed. As a result, the solution becomes a sol, and when the reaction proceeds, the solution becomes a solid gel as a whole.

  In the second step of the present invention, as a sol-gel method, a fluorine compound containing the target metal nanoparticles and an alcohol are mixed and stirred and mixed, and a silicon alkoxide is added to the mixed aqueous solution and further mixed. A first mixed solution is prepared, and a mixed solution (second mixed solution) of the protective metal nanoparticles and alcohol obtained in the first step is added to the first mixed solution to form a paste.

  As the fluorine compound that can be used, a fluoro acid-based fluorine compound is preferably used, and specifically, for example, a fluoroacetate salt, a fluorosulfonate salt, and the like can be used. If the target metal nanoparticles are silver, for example, silver fluoride (I), silver fluoride (II), silver trifluoroacetate, silver trifluorometasulfonate, silver tetrafluoroborate, hexafluorophosphoric acid Silver, silver hexafluoroantimonate, silver pentafluorobutyrate and the like can be used. By applying such a fluorine compound, fluorine atoms or fluorine compounds exist in the obtained metal nanoparticle paste, which deteriorates the wettability with the substrate to be printed, and increases the contact angle between the paste and the substrate. Can be made. Thereby, the line width of the printed pattern can be made uniform, and a low resistivity printed pattern can be easily obtained.

  Examples of silicon alkoxides that play a matrix-like role in confining metal nanoparticles in paste include, for example, methyl silicate, ethyl silicate, methyl silicate (tetramethoxysilane), ethyl silicate (tetraethoxysilane), Tetra-i-propoxysilane, tetra-n-propoxysilane, tetra-i-butoxysilane, tetra-n-natoxysilane, tetra-sec-butoxysilane, and the like can be used.

  The alcohol used is a dispersion solvent for the obtained metal nanoparticle paste, and is the same as the alcohol constituting the metal nanoparticle paste of the present invention as described above, and is a monovalent alcohol such as methanol, ethanol, propanol, or butanol. Various compounds such as a compound and a polyhydric alcohol compound such as ethylene glycol can be used. These alcohols may be used alone or in combination of two or more thereof. In addition, what is necessary is just to determine the application amount of these alcohols suitably according to the required viscosity of the metal nanoparticle paste which is a target object.

  In addition, in the case where the fluorine compound containing the target metal nanoparticles and the alcohol are mixed and stirred, and mixed, and the silicon alkoxide is added to the mixed aqueous solution and further mixed to prepare the first mixed solution, Even if it stirs, it may separate into two layers, and in this case, a small amount of alcohol (ethanol, propanol, etc.) may be added as a dispersion aid.

  As an application example of the method for producing a metal nanoparticle paste of the present invention, a method for producing a silver nanoparticle paste as a metal nanoparticle paste by using the substances used in the first step and the second step as follows is shown in FIG. And it demonstrates using FIG. Here, FIG. 1 is a flowchart of an aspect of the first step, and FIG. 2 is a flowchart of an aspect of the second step.

(Substance used in the first step)
Metal salt: Silver perchlorate Protective agent (water-soluble polymer): Polyvinylpyrrolidone (PVP)
Alcohol: ethanol Protected metal nanoparticles prepared: Protective silver nanoparticles

(Substance used in the second step)
Fluorine compound: Silver trifluoroacetate Silicon alkoxide: Ethyl silicate Alcohol: Ethylene glycol

(First step)
First, as shown in FIG. 1, by mixing silver perchlorate and ion exchange water, silver perchlorate is dissolved in ion exchange water to prepare a silver perchlorate aqueous solution. Separately, polyvinyl pyrrolidone (PVP) and ion-exchanged water are mixed to dissolve PVP in ion-exchanged water to prepare a PVP aqueous solution.

  A silver perchlorate aqueous solution is added to the PVP aqueous solution, followed by stirring and mixing under an argon gas atmosphere to obtain a mixed solution. Ethanol is added to this mixed solution and mixed under stirring in an argon atmosphere. Once mixed, the temperature is raised before refluxing. When the refluxing is completed, the PVP-protected silver nanoparticles can be obtained by leaving to stand at room temperature, removing the solvent with an evaporator, and drying by drying under reduced pressure.

(Second step)
Next, as shown in FIG. 2, ethylene glycol is added to the PVP-protected silver nanoparticles obtained in the first step, and the mixture is stirred to disperse the PVP-protected silver nanoparticles in ethylene glycol. Separately, ethylene glycol is added to silver trifluoroacetate and stirred to dissolve silver trifluoroacetate in ethylene glycol.

  Ethyl silicate was added to ethylene glycol in which silver trifluoroacetate was dissolved, a small amount of ethanol was added, and the mixture was stirred and mixed (first mixed solution). A silver nanoparticle paste can be obtained by adding PVP-protected silver nanoparticles (second mixed solution) dispersed in ethylene glycol and further stirring the mixed solution.

  The metal nanoparticle paste of the present invention uses metal nanoparticles having an average particle diameter of approximately 2 to 100 nm as a conductive medium, and also includes fluorine atoms and the like for adjusting wettability with a substrate, and metal nanoparticles. Since it contains silicon alkoxide as a matrix as an essential component, when a circuit pattern is formed by inkjet printing, the metal nanoparticles can be fused and sintered at a low temperature, and the printed pattern By making the line width uniform, it is possible to prevent the disturbance of the wiring pattern and the occurrence of disconnection, and the metal nanoparticle paste can be formed with a low impedance and a fine wiring pattern.

  The metallic silver nanoparticle paste of the present invention is suitable for forming a fine wiring pattern with a low impedance on a heat-resistant substrate such as a glass substrate or a ceramic substrate using an ink jet printing method or a screen printing method. However, as a specific formation method for forming a fine wiring pattern or the like, the metal nanoparticle paste of the present invention with the liquid viscosity optimized according to a conventionally known coating method is used to form a desired fine pattern. The coating layer may be formed. In order to perform fine pattern drawing with high reproducibility and drawing accuracy, the ink jet printing method is often applied, and the metal nanoparticle paste of the present invention is optimal for the printing method. In addition, there is no restriction | limiting in particular as the heat-firing method of an electrically conductive film, For example, it can carry out on the conditions of about 50-300 degreeC and 1 second-60 minutes.

  Even when the ink jet printing method or the screen printing method is used, the average thickness of the dispersion coating layer to be drawn is 4 / min with respect to the minimum wiring width with respect to the minimum wiring width of the drawn fine pattern. It is necessary to select in the range of 100 to 1/1. Therefore, the average thickness of the dense metal sintered body layer finally obtained is 10/100 of the minimum wiring width in consideration of evaporation of the dispersion solvent contained in the coating layer and aggregation / shrinkage accompanying sintering. It is more reasonable to select in the range of ~ 1/100. Corresponding to these requirements, it is preferable to appropriately select the volume ratio range of the dispersion solvent in the paste in the metal nanoparticle paste suitable for the ink jet printing method and the like.

  Also, there are no particular limitations on the substrate and base material to be applied, and examples thereof include ceramic, glass, glass epoxy substrate, BT substrate, 42 alloy for bonding semiconductors, lead frames such as copper, and the like. . Further, for example, the present invention may be applied to a capacitor, a chip resistor, a conductor circuit, a bonding portion between a lead frame and a semiconductor, or the like.

  EXAMPLES Hereinafter, although this invention is demonstrated further in detail based on an Example, this invention is not limited to these.

[Reference Examples 1 to 8]
PVP protected silver nanoparticles were produced using the following method. In addition, the used reagent and experimental apparatus are as follows.

(reagent)
(1) Silver perchlorate monohydrate (AgClO ₄ = 225.5 g / mol)
(2) Polyvinylpyrrolidone (PVP) (C ₆ H ₉ NO) _{n
M W = 10000 (PVP10-500G: Sigma} -Aldrich)
M _W = 40000 (polyvinylpyrrolidone K300: manufactured by Wako Pure Chemical Industries, Ltd.)
M _W = 360000 (polyvinylpyrrolidone K90: manufactured by Wako Pure Chemical Industries, Ltd.)

(Experimental device)
(1) Vacuum dryer (used for vacuum drying)
Product Name: VOS-200SD (Tokyo Science Machinery Co., Ltd.)
Conditions: 40 ° C x 20 hours (2) Ultrasonic cleaner (used for mixing and stirring solutions, washing with acetone, etc.)
Product name: US-1R (manufactured by ASONE)

[Reference Example 1]
Silver perchlorate aqueous solution was prepared by stirring 1.936 g (8.7965 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes with stirring. Further, 1.9686 g (0.01770 mol) of polyvinylpyrrolidone (PVP) having a molecular weight of 40,000 and 25 mL of ion-exchanged water were dissolved by stirring for 20 minutes (R = 2.0). A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

[Reference Example 2]
Silver perchlorate aqueous solution was prepared by stirring and dissolving 1.6402 g (7.27376 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes. Also, polyvinyl pyrrolidone (PVP) 0.8523 g (7.6646 × 10 ⁻³ mol) having a molecular weight of 40000 and 25 mL of ion-exchanged water were stirred for 20 minutes and dissolved to prepare a PVP aqueous solution (R = 1.0). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

[Reference Example 3]
A silver perchlorate aqueous solution was prepared by stirring and dissolving 2.2044 g (9.7756 × 10 ⁻³ mol) of silver perchlorate and 25 mL mL of ion-exchanged water for 30 minutes. Further, 0.6573 g (5.9110 × 10 ⁻³ mol) of polyvinylpyrrolidone (PVP) having a molecular weight of 40,000 and 25 mL of ion-exchanged water were stirred for 20 minutes and dissolved to prepare a PVP aqueous solution (R = 0.6). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes under an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

  3 shows the UV absorption spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 1, FIG. 4 shows the UV absorption spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 2, and PVP-protected silver obtained in Reference Example 3. The UV absorption spectra of the nanoparticles are shown in FIG. The UV absorption spectrum was measured every 9 hours during reflux, and was measured up to 9 hours after the completion of reflux (4 hours in Reference Example 6 described later). For example, “1h” in the figure "Indicates the result after 1 hour of reflux (the UV absorption spectrum described below is also the same). Silver has a specific surface plasmon, and if silver is present in the solution, an absorption spectrum can usually be observed at around 400 nm. Since the surface plasmon is absorbed more as the particle surface becomes larger, the silver nanoparticle can grow for a long time in the reference examples 1 to 3, and the peak can be confirmed. Before the reduction, the solution is transparent and no absorption spectrum is seen. After reflux, the solution turns yellow and the absorption spectrum can be confirmed.

  6 shows the X-ray diffraction spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 1, FIG. 7 shows the X-ray diffraction spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 2, and PVP obtained in Reference Example 3 The X-ray diffraction spectrum of the protective silver nanoparticles is shown in FIG. As shown in FIGS. 6 to 8, the results of R = 0.6 (Reference Example 3) and R = 1.0 (Reference Example 2) coincide with the peak of silver nitrate, and silver nitrate is generated in part. It has been confirmed that. On the other hand, at R = 2.0 (Reference Example 1), the same amorofus (amorphous) state as PVP was shown. At R = 0.6 and R = 1.0, it seems that PVP cannot play the role of a protective agent. The fact that silver nitrate is partially produced means that N (nitrogen atom) in PVP is considered to be involved in the reaction, and PVP has been decomposed. This is because a source other than the 5-membered ring containing N of PVP cannot be considered. On the other hand, in the case of R = 2.0, it is considered that the silver is completely protected by the PVP, so that it is in an amorofus state.

  The particle size distribution of the PVP-protected silver nanoparticles obtained in Reference Examples 1 to 3 is shown in FIG. As shown in FIG. 9, at R = 2.0 (Reference Example 1), small particles having a narrow distribution width and a particle size of about 17.8 nm could be synthesized. On the other hand, when R = 1.0 (Reference Example 2) or R = 0.6 (Reference Example 3), the distribution width is wide, and the average particle size is about 20 nm, 25 to 35 nm, respectively. I was able to confirm. From this result, it was found that the larger the PVP (the larger R), the narrower the distribution width and the more uniform the particle diameter.

[Reference Example 4]
Silver perchlorate aqueous solution was prepared by stirring and dissolving 1.7213 g (7.6333 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes. Moreover, 0.8594 g (7.72843 × 10 ⁻³ mol) of polyvinylpyrrolidone (PVP) having a molecular weight of 10,000 and 25 mL of ion-exchanged water were stirred for 20 minutes and dissolved to prepare a PVP aqueous solution (R = 1.01). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes under an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

[Reference Example 5]
A silver perchlorate aqueous solution was prepared by stirring and dissolving 3.4681 g (0.01538 mol) of silver perchlorate and 25 mL of ion-exchanged water for 30 minutes. Moreover, 1.7238 g (0.01550 mol) of polyvinylpyrrolidone (PVP) having a molecular weight of 360,000 and 25 mL of ion-exchanged water were dissolved by stirring for 20 minutes to prepare a PVP aqueous solution (R = 1.00). Add silver perchlorate aqueous solution to PVP aqueous solution and stir for 30 minutes under argon gas atmosphere.
mL of ethanol was added and further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

  The UV absorption spectrum of the PVP protected silver nanoparticles obtained in Reference Example 4 is shown in FIG. 10, and the UV absorption spectrum of the PVP protected silver nanoparticles obtained in Reference Example 5 is shown in FIG. As shown in FIG. 10, FIG. 11 and FIG. 4 described above, when the molecular weight of PVP is 360000 (Reference Example 5: FIG. 11) and 40000 (Reference Example 2: FIG. 4), the silver is stable in the solution. It can be confirmed that it exists. On the other hand, when the molecular weight of PVP was 10,000 (Reference Example 4: FIG. 10), it was discolored by a small amount of light, and it was difficult to confirm the UV absorption spectrum.

  FIG. 12 shows the X-ray diffraction spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 4, and FIG. 13 shows the X-ray diffraction spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 5. As shown in FIG.12 and FIG.13, the peak of silver nitrate was able to be confirmed, and even if the molecular weight of PVP was changed, it was confirmed that silver nitrate was partially generated under the condition of R = 1.0. .

  The particle size distribution of the PVP-protected silver nanoparticles obtained in Reference Example 2, Reference Example 4 and Reference Example 5 is shown in FIG. As shown in FIG. 14, regarding the particle size distribution, when the molecular weight of PVP was 360,000 (Reference Example 5), small particles having a narrow distribution width and a particle size of 7.9 nm could be synthesized. On the other hand, when the molecular weight of PVP was 40000 (Reference Example 2) and 10000 (Reference Example 4), the distribution width was wide, and the average particle size was 20 nm and 21.1 nm, respectively. From this result, it was confirmed that the larger the molecular weight of PVP, the narrower the distribution width and the more uniform particles can be obtained.

[Reference Example 6]
Silver perchlorate aqueous solution was prepared by stirring 1.9355 g (8.5831 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion-exchanged water for 30 minutes with stirring. Further, 0.955 g (8.5926 × 10 ⁻³ mol) of polyvinylpyrrolidone (PVP) having a molecular weight of 40000 and 25 mL of ion-exchanged water were dissolved by stirring for 20 minutes (R = 1.00). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 4 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

  The UV absorption spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 6 is shown in FIG. 15, and the X-ray diffraction spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 6 is shown in FIG. As shown in FIGS. 15 and 16, the silver ion spectrum could be confirmed even when the reflux time was shortened from 9 hours to 4 hours, but it was confirmed that silver nitrate was still partially formed.

[Reference Example 7]
1.5950 g (7.0732 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion-exchanged water were stirred and dissolved for 30 minutes. Moreover, polyvinyl pyrrolidone (PVP) 0.7997 g (7.1275 × 10 ⁻³ mol) having a molecular weight of 360,000 and ion-exchanged water 25 mL were stirred and dissolved for 20 minutes to prepare an aqueous PVP solution (R = 1.01). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes under an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the mixture was left for 1 hour until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

  The UV absorption spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 7 is shown in FIG. 17, and the X-ray diffraction spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 7 is shown in FIG. As shown in FIGS. 17 and 18, the silver ion spectrum can be confirmed even if the standing time until the room temperature is reduced from 13 hours to 1 hour, but it is confirmed that silver nitrate is still partially generated. did it. From the results regarding Reference Example 6 and Reference Example 7, it is considered that the reaction in which a part of the product becomes silver nitrate occurs during the removal of the solvent with an evaporator.

[Reference Example 8]
Silver perchlorate aqueous solution was prepared by stirring 1.9596 g (8.6900 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes with stirring. Further, polyvinyl pyrrolidone (PVP) 0.5829 g (5.2420 × 10 ⁻³ mol) having a molecular weight of 40000 and 25 mL of ion-exchanged water were stirred for 20 minutes and dissolved to prepare a PVP aqueous solution (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes under an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, it was allowed to stand until it reached room temperature, and the solvent was removed with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours. Acetone was added to 1.9128 g of the obtained silver nanoparticles, washed with an ultrasonic cleaner for 1 hour, filtered and dried. This operation of washing with acetone was repeated twice to obtain PVP-protected silver nanoparticles.

  An X-ray diffraction spectrum of the PVP-protected silver nanoparticles obtained in Reference Example 8 is shown in FIG. 19 (comparison before and after acetone cleaning). Although it was thought that silver nitrate disappears by removing PVP that makes silver nitrate by washing with acetone, and becomes silver, as shown in FIG. 19, the strength of silver nitrate is lower after washing with acetone than before washing, Silver nitrate was still present, and the silver nitrate could not be completely removed by washing with acetone.

[Examples 1 to 14]
The silver nanoparticle paste of the present invention was produced using the following method. In addition, the used reagent and experimental apparatus (used in Test Example 2 and Test Example 3) are as follows.

(1) Silver trifluoroacetate (CF ₃ COOAg) = 220.88 g / mol
(Purity 97.0%, Wako Pure Chemical Industries, Ltd.)
(2) Ethyl silicate Si (OC ₂ H ₅ ) ₄ = 208 g / mol
(Purity 99.0%, manufactured by Kishida Chemical Co., Ltd.)
(3) Ethylene glycol special grade (purity 99.5% or more, manufactured by Kishida Chemical Co., Ltd.)

(Experimental device)
(1) Muffle furnace: FO410 (manufactured by Yamato Science Co., Ltd.)
(Used for firing in Test Example 2 and Test Example 3)
Temperature increase rate: 100 ° C / hour

[Example 1]
10 mL of ethylene glycol was added to 4.5193 g (0.02046 mol) of silver trifluoroacetate and dissolved by stirring for 3.5 hours. 1.242 mL (5.5712 * 10 < ^-3 > mol) ethyl silicate was added here, and it stirred for 1 hour. Since this separated into two layers even when stirred, 3 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 2.2085 g of PVP-protected silver nanoparticles prepared in Reference Example 1, and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 2]
10 mL of ethylene glycol was added to 3.6298 g (0.01643 mol) of silver trifluoroacetate, and the mixture was stirred and dissolved for 2.5 hours. To this, 0.916 mL (4.1877 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. Since this separated into two layers even when stirred, 4 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 2.1186 g of PVP-protected silver nanoparticles prepared in Reference Example 2, and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 3]
10 mL of ethylene glycol was added to 3.1710 g (0.01436 mol) of silver trifluoroacetate, and the mixture was stirred for 2 hours to be dissolved. To this, 1.051 mL (4.7144 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. Since this separated into two layers even when stirred, 4 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 1.8028 g of PVP-protected silver nanoparticles prepared in Reference Example 4, and the mixture was stirred and dispersed for 3.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 4]
10 mL of ethylene glycol was added to 3.1745 g (0.01437 mol) of silver trifluoroacetate, and the mixture was stirred and dissolved for 2.5 hours. 1.044 mL (4.6683 * 10 < ^-3 > mol) ethyl silicate was added here, and it stirred for 1 hour. This is separated into two layers even if stirred, so 5 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 1.8177 g of PVP-protected silver nanoparticles prepared in Reference Example 5, and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 5]
(1) Preparation of PVP protected silver nanoparticles:
Silver perchlorate aqueous solution was prepared by stirring 2.7978 g (0.01241 mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes with stirring. Moreover, 1.3984 g (0.01258 mol) of polyvinyl pyrrolidone (PVP) having a molecular weight of 40000 and 25 mL of ion-exchanged water were dissolved by stirring for 20 minutes (R = 1.01). A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

(2) Preparation of silver nanoparticle paste:
To 3.5957 g (0.01628 mol) of silver trifluoroacetate, 5 mL of ethylene glycol was added and stirred for 3 hours to dissolve. To this, 1.065 mL (4.7769 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. Since this separated into two layers even when stirred, 4 mL of ethanol was added to improve the dispersion. On the other hand, 15 mL of ethylene glycol was added to 2.1105 g of PVP-protected silver nanoparticles prepared in (1), and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 6]
(1) Preparation of PVP protected silver nanoparticles:
A silver perchlorate aqueous solution was prepared by stirring and dissolving 1.9511 g (8.6523 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes. Further, polyvinyl pyrrolidone (PVP) 0.5770 g (5.1888 × 10 ⁻³ mol) having a molecular weight of 40000 and 25 mL of ion-exchanged water were stirred for 20 minutes and dissolved to prepare a PVP aqueous solution (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes under an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

(2) Preparation of silver nanoparticle paste:
10 mL of ethylene glycol was added to 1.2073 g (5.4659 × 10 ⁻³ mol) of silver trifluoroacetate, and the mixture was stirred and dissolved for 3.5 hours. To this, 0.983 mL (4.4107 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. This is separated into two layers even if stirred, so 5 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 2.3847 g of PVP-protected silver nanoparticles prepared in (1) and dispersed by stirring for 5.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 7]
(1) Preparation of PVP protected silver nanoparticles:
A silver perchlorate aqueous solution was prepared by stirring and dissolving 1.7875 g (7.9268 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes. Further, polyvinyl pyrrolidone (PVP) 0.5288 g (4.7553 × 10 ⁻³ mol) having a molecular weight of 40000 and 25 mL of ion-exchanged water were stirred for 20 minutes and dissolved to prepare a PVP aqueous solution (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes under an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was removed with an evaporator.

(2) Preparation of silver nanoparticle paste:
10 mL of ethylene glycol was added to 1.8879 g (8.5472 × 10 ⁻³ mol) of silver trifluoroacetate, and the mixture was stirred for 2.5 hours to be dissolved. To this, 0.976 mL (4.37377 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. Since this separated into two layers even when stirred, 6 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 1.9374 g of PVP-protected silver nanoparticles prepared in (1), and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 8]
(1) Preparation of PVP protected silver nanoparticles:
Silver perchlorate aqueous solution was prepared by stirring 2.0518 g (9.0988 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion-exchanged water for 30 minutes with stirring. Moreover, polyvinyl pyrrolidone (PVP) 0.6034 g (5.4262 × 10 ⁻³ mol) having a molecular weight of 40000 and 25 mL of ion-exchanged water were dissolved by stirring for 20 minutes (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

(2) Preparation of silver nanoparticle paste:
10 mL of ethylene glycol was added to 2.1194 g (9.5953 × 10 ⁻³ mol) of silver trifluoroacetate and dissolved by stirring for 4 hours. To this, 0.729 mL (3.2700 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. Since this separated into two layers even when stirred, 6 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 2.0826 g of PVP-protected silver nanoparticles prepared in (1) and dispersed by stirring for 5.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 9]
(1) Preparation of PVP protected silver nanoparticles:
Silver perchlorate aqueous solution was prepared by stirring 2.0755 g (9.2039 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes with stirring. Further, 0.6160 g (5.5395 × 10 ⁻³ mol) of polyvinylpyrrolidone (PVP) having a molecular weight of 40000 and 25 mL of ion-exchanged water were stirred for 20 minutes and dissolved to prepare a PVP aqueous solution (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes under an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes under an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

(2) Preparation of silver nanoparticle paste:
10 mL of ethylene glycol was added to 2.5134 g (0.01138 mol) of silver trifluoroacetate and dissolved by stirring for 2.5 hours. Ethyl silicate 0.985mL (4.4183 * 10 < ^-3 > mol) was added here, and it stirred for 1 hour. Since this separated into two layers even when stirred, 6 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 2.2555 g of PVP-protected silver nanoparticles prepared in (1), and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 10]
(1) Preparation of PVP protected silver nanoparticles:
Silver perchlorate aqueous solution was prepared by stirring and dissolving 1.8649 g (8.2700 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes. Further, polyvinyl pyrrolidone (PVP) 0.5525 g (4.9985 × 10 ⁻³ mol) having a molecular weight of 40,000 and ion-exchanged water 25 mL were stirred and dissolved for 20 minutes to prepare an aqueous PVP solution (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

(2) Preparation of silver nanoparticle paste:
10 mL of ethylene glycol was added to 2.7253 g (0.01234 mol) of silver trifluoroacetate and stirred for 2.5 hours to dissolve. To this, 0.982 mL (4.4048 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. This is separated into two layers even if stirred, so 5 mL of ethanol was added to improve the dispersion. On the other hand, 30 mL of ethylene glycol was added to 1.8077 g of PVP-protected silver nanoparticles prepared in (1), and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 11]
Ethylene glycol 5 mL was added to 1.9682 g (8.9107 × 10 ⁻³ mol) of silver trifluoroacetate, and the mixture was stirred for 2.5 hours to be dissolved. Ethyl silicate 0.988mL (4.4317 * 10 < ^-3 > mol) was added here, and it stirred for 1 hour. Since this separated into two layers even when stirred, 6 mL of ethanol was added to improve the dispersion. On the other hand, 15 mL of ethylene glycol was added to 2.0241 g of PVP-protected silver nanoparticles prepared in Reference Example 3, and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 12]
(1) Preparation of PVP protected silver nanoparticles:
A silver perchlorate aqueous solution was prepared by stirring and dissolving 1.9654 g (8.7157 × 10 ⁻³ mol) of silver perchlorate and 25 mL of ion exchange water for 30 minutes. Further, polyvinyl pyrrolidone (PVP) 0.5835 g (5.2473 × 10 ⁻³ mol) having a molecular weight of 40,000 and ion exchange water 25 mL were stirred and dissolved for 20 minutes to prepare an aqueous PVP solution (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

(2) Preparation of silver nanoparticle paste:
5 mL of ethylene glycol was added to 2.3423 g (0.01060 mol) of silver trifluoroacetate, and the mixture was stirred for 2.5 hours to dissolve. To this, 0.993 mL (4.4543 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. Since this separated into two layers even when stirred, 6 mL of ethanol was added to improve the dispersion. On the other hand, 15 mL of ethylene glycol was added to 2.0195 g of PVP-protected silver nanoparticles prepared in (1), and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 13]
(1) Preparation of PVP protected silver nanoparticles:
A silver perchlorate aqueous solution was prepared by stirring and dissolving 2.2665 g (0.01005 mol) of silver perchlorate and 25 mL of ion-exchanged water for 30 minutes. Further, 0.6727 g (6.0494 × 10 ⁻³ mol) of polyvinyl pyrrolidone (PVP) having a molecular weight of 40000 and 25 mL of ion-exchanged water were dissolved by stirring for 20 minutes (R = 0.60). . A silver perchlorate aqueous solution was added to the PVP aqueous solution, and the mixture was stirred for 30 minutes in an argon gas atmosphere. 450 mL of ethanol was added, and the mixture was further stirred for 30 minutes in an argon atmosphere. Thereafter, the temperature was raised to near 90 ° C. and then refluxed for 9 hours. When the refluxing was completed, the solution was left for 13 hours until the temperature reached room temperature, and the solvent was blown off with an evaporator, followed by drying under reduced pressure at 40 ° C. for 20 hours to obtain PVP-protected silver nanoparticles.

(2) Preparation of silver nanoparticle paste:
5 mL of ethylene glycol was added to 2.9435 g (0.01333 mol) of silver trifluoroacetate, and the mixture was stirred for 2.5 hours to dissolve. Ethyl silicate 0.991mL (4.4442 * 10 < ^-3 > mol) was added here, and it stirred for 1 hour. Since this separated into two layers even when stirred, 6 mL of ethanol was added to improve the dispersion. On the other hand, 15 mL of ethylene glycol was added to 2.0119 g of PVP-protected silver nanoparticles prepared in (1), and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Example 14]
3 mL of ethylene glycol was added to 1.1219 g (5.0792 × 10 ⁻³ mol) of silver trifluoroacetate, and the mixture was stirred and dissolved for 2.5 hours. To this, 0.399 mL (1.7899 × 10 ⁻³ mol) of ethyl silicate was added and stirred for 1 hour. Since this separated into two layers even when stirred, 3 mL of ethanol was added to improve the dispersion. On the other hand, 7 mL of ethylene glycol was added to 1.0464 g of PVP-protected silver nanoparticles prepared in Reference Example 8, and the mixture was stirred and dispersed for 4.5 hours. And both were mixed and further stirred for 1 hour, and the silver nanoparticle paste of this invention was obtained.

[Test Example 1]
Viscosity measurement:
About the silver nanoparticle paste obtained in Example 2, Example 5, Example 7, and Example 9 to Example 14, the viscosity was measured using the following measurement conditions. The measurement results are shown in Table 1, and all were good values.

(Measurement condition)
Device name: Tuning fork type vibration viscometer SV-10 (manufactured by A & D Co., Ltd.)
Measurement temperature: Measured every 2.5 ° C. at 27.5-55.0 ° C.

(viscosity)

[Test Example 2]
Resistivity measurement:
About the silver nanoparticle paste obtained in Example 2, Example 5 to Example 7, and Example 9 to Example 14, the resistivity was measured using the following measurement conditions. The measurement results are shown in Table 2. In addition, this test measured what was baked at the following temperature. As shown in Table 2, the resistivity value was 500 μm · cm or less, which was a good value.

(Measurement condition)
Device name: Resistance meter Loresta GP (manufactured by Dia Instruments)
(Conforms to JIS K7194)
Voltage: 10V
Firing temperature: 180 ° C, 200 ° C, 230 ° C, 250 ° C

(Resistivity)

[Test Example 3]
Inkjet printing test:
Using the silver nanoparticle pastes obtained in Example 2, Example 5, Example 7, and Example 10, an inkjet printing test was conducted by the following method. All tests were performed in a state where the viscosity was 10 mPa · s to 15 mP · s.

(Test conditions)
Using a slide glass irradiated with UV for 5 minutes as a substrate, 10 lines having a target line width of 150 μm and a length of 50 mm were printed on the substrate at a printing speed of 10 mm / second. Next, after drying this board | substrate for 10 minutes at 100 degreeC, it baked at 180 degreeC for 1 hour, and evaluated the state of line | wire width. 20A, FIG. 20B (immediately after printing) and FIG. 21A, FIG. 21B (after firing), and photographs of the substrate printed with the silver nanoparticle paste of Example 5 were printed. 22A, 22B (immediately after printing) and FIGS. 23A, 23B (after firing), and photographs of the substrate on which the silver nanoparticle paste of Example 7 was printed are shown in FIGS. 24A, 24B (immediately after printing), and FIGS. 25A, 25B. The photographs of the substrate on which the silver nanoparticle paste of Example 10 was printed (after firing) are shown in FIGS. 26A, 26B (immediately after printing), and FIGS. 27A, 27B (after firing), respectively. 20 to 27, (A) is an overall photograph of the substrate, and (B) is an enlarged photograph of a line.

  In Example 2 (FIGS. 20 and 21), Example 7 (FIGS. 24 and 25), and Example 10 (FIGS. 26 and 27), the amount of ethylene glycol is 40 mL, and the viscosity is lower than that of Example 5. . Immediately after printing, there was a bulge, but the connected line seemed to be drawn, but after a while, ink gathered at the bulge and the line was cut.

  On the other hand, Example 5 (FIGS. 22 and 23) had almost no bulge immediately after printing, and was able to form a continuous line even after a long time. In Example 2, Example 7 and Example 10, this is probably because the temperature at which the pressure becomes 10 to 15 mPa · s is also low, and there is not much difference in viscosity before and after printing. . Since the viscosity of Example 5 was higher than these, the end change before and after printing was large, so it was considered that bulging was not possible after printing and a good line could be drawn. The wire was connected without breaking after firing.

  The present invention is, for example, a metal nanoparticle paste for forming a low-impedance and extremely fine circuit pattern corresponding to digital high-density wiring using an inkjet printing method and the like, and a method for producing the metal nanoparticle paste. It can be used advantageously.

It is the figure which showed the flowchart of the one aspect | mode of a 1st process. It is the figure which showed the flowchart of the one aspect | mode of a 2nd process. FIG. 4 is a view showing a UV absorption spectrum of PVP-protected silver nanoparticles obtained in Reference Example 1. FIG. 4 is a view showing a UV absorption spectrum of PVP-protected silver nanoparticles obtained in Reference Example 2. FIG. 6 is a view showing a UV absorption spectrum of PVP-protected silver nanoparticles obtained in Reference Example 3. 4 is a diagram showing an X-ray diffraction spectrum of PVP-protected silver nanoparticles obtained in Reference Example 1. FIG. 4 is a diagram showing an X-ray diffraction spectrum of PVP-protected silver nanoparticles obtained in Reference Example 2. FIG. 4 is a diagram showing an X-ray diffraction spectrum of PVP-protected silver nanoparticles obtained in Reference Example 3. FIG. It is the figure which showed the particle size distribution of the PVP protection silver nanoparticle obtained by the reference example 1-the reference example 3. FIG. It is the figure which showed the UV absorption spectrum of the PVP protection silver nanoparticle obtained in Reference Example 4. It is the figure which showed the UV absorption spectrum of the PVP protection silver nanoparticle obtained in Reference Example 5. It is the figure which showed the X-ray-diffraction spectrum of the PVP protection silver nanoparticle obtained in Reference Example 4. 6 is a diagram showing an X-ray diffraction spectrum of PVP-protected silver nanoparticles obtained in Reference Example 5. FIG. It is the figure which showed the particle size distribution of the PVP protection silver nanoparticle obtained by the reference example 2, the reference example 4, and the reference example 5. FIG. It is the figure which showed the UV absorption spectrum of the PVP protection silver nanoparticle obtained in Reference Example 6. It is the figure which showed the X-ray-diffraction spectrum of the PVP protection silver nanoparticle obtained in Reference Example 6. It is the figure which showed the UV absorption spectrum of the PVP protection silver nanoparticle obtained in Reference Example 7. It is the figure which showed the X-ray-diffraction spectrum of the PVP protection silver nanoparticle obtained in Reference Example 7. 6 is a diagram showing an X-ray diffraction spectrum of PVP-protected silver nanoparticles obtained in Reference Example 8. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 2. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 2. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 2. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 2. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 5. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 5. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 5. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 5. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 7. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 7. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 7. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 7. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 10. FIG. It is a figure which shows the photograph of the board | substrate (just after printing) which printed the silver nanoparticle paste of Example 10. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 10. FIG. It is a figure which shows the photograph of the board | substrate (after baking) which printed the silver nanoparticle paste of Example 10. FIG.

Claims (7)

A metal nanoparticle paste comprising the following components (a) to (c):
(A) metal nanoparticles (b) fluorine atom and / or fluorine compound (c) silicon alkoxide   Content of the said metal nanoparticle is 2.0-30.0 mass% with respect to the whole metal nanoparticle paste, The metal nanoparticle paste of Claim 1 characterized by the above-mentioned.   The metal nanoparticle paste according to claim 1 or 2, wherein the metal nanoparticles are silver nanoparticles. A first step of heating and refluxing a metal salt containing the target metal nanoparticles in an alcohol-containing solvent in the presence of a protective agent made of a water-soluble polymer to obtain protected metal nanoparticles;
A metal nanoparticle comprising a second step of pasting the protective metal nanoparticle obtained in the first step, a fluorine compound containing the target metal nanoparticle and an alkoxide of silicon by a sol-gel method Manufacturing method of paste.   The ratio of the molar amount of the metal salt and the protective agent in the first step (the molar amount of the protective agent / the molar amount of the metal salt = R) is R = 0.5 to 5.0. 4. A method for producing a metal nanoparticle paste according to 4. The molecular weight of the protective agent (weight average molecular weight: _{M W)} are provided methods for producing the metal nanoparticle paste according to claim 4 or claim 5, characterized in that it is 20000-400000. The method for producing a metal nanoparticle paste according to any one of claims 4 to 6, wherein the protective agent is polyvinylpyrrolidone (PVP).