JP2008233679A - Microscope instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a low-cost microscope instrument capable of readily performing a measuring point alignment operation. <P>SOLUTION: The microscope instrument includes a Z stage 15 for moving an objective lens 11 vertically, a focus point detection system 30 for irradiating a test substance 21 with measuring light for focusing detection, a signal processing part 41 for controlling the Z stage 15 based on the focusing detection result, and a measuring part 42 for measuring the amount of movement of the objective lens 11. Two wedge prisms 51a and 51b are arranged on the optical path of the measuring light and are rotated around the optical axis by rotation mechanisms 52a and 52b. A calculation part 62 repeatedly calculates the arrangement angle of the wedge prisms 51a and 51b that makes the irradiation position of the measuring light match the measuring position directed by a direction part 63. A driver 61 drives the rotation mechanisms 52a and 52b, according to the calculated arrangement angle. Thus, the irradiation position of the measuring light follows up the directed measuring position. The calculation part 62 changes the way the irradiation position of the measuring light follows up the directed measuring position, according to the directed measuring position. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a microscope apparatus, and more particularly to a measurement microscope apparatus.

  One type of microscope apparatus is a measurement microscope apparatus. The measurement microscope apparatus has a function of measuring the height of a sample such as a fine workpiece or an electronic component under observation with an optical microscope. Some measurement microscope apparatuses have an automatic focus detection function. An example of such a measuring microscope apparatus is shown in FIG.

  In FIG. 17, the subject 21 is illuminated by an illumination system (not shown). The illuminated subject 21 is imaged by the objective lens 11 and the imaging lens 12. The formed image is visually observed through the eyepiece 13.

  A half mirror 17 is disposed on the optical path between the objective lens 11 and the imaging lens 12, and a focus detection system 30 ′ is disposed on the light path reflected by the half mirror 17. In the focus detection system 30 ′, the measurement light emitted from the LED light source 31 passes through the beam splitter 32 and the condenser lens 33 ′, is reflected by the half mirror 17, is placed on the observation optical path, and is subjected to the subject 21 by the objective lens 11. Focused on the surface. The measurement light reflected by the subject 21 is captured by the objective lens 11, reflected by the half mirror 17, returned to the focus detection system 30 ′, condensed by the condenser lens 33 ′, and reflected by the beam splitter 32. Thereafter, the beam is split into two beams by the beam splitter 34. The light amounts of the two divided beams are detected by the photodetectors 36a and 36b through the openings 35a and 35b arranged before and after the point P conjugate to the subject 21, respectively. The signal processing unit 41 compares the signals from the photodetectors 36a and 36b, determines the in-focus state and the direction of defocus from the magnitude relationship of the signals, and controls the Z stage 15 so that the defocus is eliminated. Thereby, focusing is performed.

  In this measurement microscope apparatus, the height measurement is performed at the position of the measurement light applied to the subject 21, that is, at the center of the observation field. Therefore, prior to measuring the height of the subject 21, an alignment operation is performed in which the subject 21 is moved by the XY stage 22 while observing an observation image, and a desired measurement location is aligned with the measurement light irradiation position. At that position, focusing is performed, and the height value is acquired from the amount of movement of the Z stage 15 at that time.

  In situations where it is difficult to determine the measurement location, such as the measurement light of the focus detection system 30 'being difficult to see or invisible because of invisible light, the measurement location is disclosed in Japanese Patent Laid-Open No. 2003-131116. In other words, the subject 21 is irradiated with an index superimposed on the measurement light so that it can be easily discriminated visually.

In addition, an image is captured by an image sensor such as a CCD and displayed on a monitor screen, the measurement location is indicated on the monitor screen, the subject is moved by the motorized XY stage, and the observation field of view is displayed at the designated measurement location. The height is also measured by aligning the centers of the two.
JP 2003-131116 A

  In the conventional measurement microscope device, the method of aligning the measurement location by moving the stage while observing the subject image moves the subject image during adjustment, so the operator must align the stage while gazing at the moving image. become. For this reason, the alignment operation of the measurement points is a troublesome operation that imposes a burden on the operator.

  Miniaturization of structures in electronic parts and machined parts requires many height measurement points within one field of view. The measurement object often has a similar shape. For this reason, when the image moves as the stage moves, the next measurement target position may be lost. Thus, the miniaturization of the structure makes alignment work even more difficult.

  Furthermore, miniaturization of the structure requires measurement under high magnification observation. Along with this, the actual movement amount of the subject becomes minute. For this reason, the XY stage for moving the subject requires a highly accurate stage that can adjust a minute amount. As a result, the device becomes expensive.

  Further, in the method of instructing the measurement location on the monitor screen, the burden on the operator is reduced, but the additional configuration for capturing and instructing the image is large. In addition, the XY stage needs to be motorized. As a result, the device becomes quite expensive.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide an inexpensive microscope apparatus that can easily perform alignment work of measurement points.

  A microscope apparatus according to the present invention includes an observation optical system including an objective lens disposed in the vicinity of a subject, and a moving unit that relatively moves the subject and the objective lens along the optical axis of the observation optical system. A focus detection system that irradiates the subject with measurement light through the objective lens and detects focus on the subject based on the measurement light reflected by the subject, and a detection result by the focus detection system Control means for controlling the moving means based on the above, and irradiation position changing means for moving the irradiation position of the measurement light on the subject. The irradiation position changing means has two wedge prisms arranged at or near a position conjugate with the pupil position of the objective lens, and two rotation mechanisms for rotating the wedge prisms around the optical axis, respectively. Yes.

  According to one aspect of the present invention, the microscope apparatus further includes an instruction unit that indicates a measurement position in an observation field, and a wedge prism that matches an irradiation position of the measurement light with the measurement position instructed by the instruction unit. Calculating means for calculating an arrangement angle; and driving means for driving the rotation mechanism so as to make the arrangement angle of the wedge prism coincide with the arrangement angle calculated by the calculation means. The followability of the irradiation position of the measurement light by the irradiation position changing unit is changed according to the measurement position instructed by the instruction unit.

  According to another aspect of the present invention, the microscope apparatus further includes an instruction unit that indicates a measurement position in an observation field, and a wedge prism that matches an irradiation position of the measurement light with the measurement position instructed by the instruction unit. Computing means for calculating an arrangement angle; driving means for driving the rotation mechanism so that the arrangement angle of the wedge prism matches the arrangement angle calculated by the computing means; imaging means for imaging an observation image; Display means for displaying the observation image picked up by the image pickup means, and mark display means for displaying on the display means a mark temporarily indicating the measurement position indicated by the indication means on the observation image. And the calculation means moves the mark to the measurement position instructed by the instruction means and then changes the irradiation position change means to the irradiation position changing means. The irradiation position of the serial measurement light is moved to the position of the mark.

  An inexpensive microscope apparatus that can easily perform alignment work of measurement points is provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First embodiment>
[Configuration and action]
FIG. 1 shows a measuring microscope apparatus according to a first embodiment of the present invention. As shown in FIG. 1, the measurement microscope apparatus of this embodiment includes an XY stage 22 that horizontally moves a subject 21 and an observation optical system 10 that observes the subject 21. The observation optical system 10 includes an objective lens 11 located near the subject 21, an imaging lens 12 that forms an imaging optical system together with the objective lens 11, and an image formed by the objective lens 11 and the imaging lens 12. And an eyepiece 13 for visually observing the lens.

  The measurement microscope apparatus further irradiates the subject 21 with measurement light through the Z stage 15 for moving the objective lens 11 up and down along the optical axis of the observation optical system 10 for focusing, and the objective lens 11. A focus detection system 30 that detects focus on the subject 21 based on the measurement light reflected by the sample 21, a half mirror 17 that optically couples the focus detection system 30 and the objective lens 11, and the focus detection system 30. A signal processing unit 41 that controls the Z stage 15 based on the detection result and a measurement unit 42 that measures the amount of movement of the objective lens 11 by the Z stage 15 are provided.

  The half mirror 17 is located between the imaging lens 12 and the objective lens 11, directs measurement light incident from the focus detection system 30 to the objective lens 11, and is reflected by the subject 21 incident from the objective lens 11. The measurement light is directed to the focus detection system 30.

  The focus detection system 30 includes an LED light source 31 that emits measurement light, a condensing lens 33 that changes a divergent beam of measurement light emitted from the LED light source 31 to a convergent beam, and measurement light emitted from the LED light source 31 and the subject 21. A beam splitter 32 for separating the reflected measurement light, a beam splitter 34 for branching the measurement light reflected by the subject 21 via the beam splitter 32, and an optical path branched by the beam splitter 34, respectively. And photodetectors 36a and 36b, and openings 35a and 35b arranged on the optical path between the beam splitter 34 and the photodetectors 36a and 36b, respectively.

  The beam splitter 32 is located on the optical path between the LED light source 31 and the condenser lens 33, and transmits the measurement light emitted from the LED light source 31, while reflecting the measurement light reflected by the subject 21. The beam splitter 34 is located on the reflected light path of the beam splitter 32, and partially transmits and partially reflects the measurement light reflected by the subject 21. The opening 35 a is located in front of the point P conjugate to the focal point of the objective lens 11, and the opening 35 b is located behind the point P conjugate to the focal point of the objective lens 11. The photodetector 36a detects light that has passed through the opening 35a, and the photodetector 36b detects light that has passed through the opening 35b.

  Further, the measurement microscope apparatus includes two wedge prisms 51a and 51b disposed on the optical path between the condenser lens 33 and the half mirror 17, and a rotation mechanism 52a and a wedge mechanism 51a and 51b, respectively, which rotatably hold the wedge prisms 51a and 51b. 52b and a relay lens 55 disposed on the optical path between the wedge prisms 51a and 51b and the half mirror 17. The rotation mechanisms 52a and 52b rotate the wedge prisms 51a and 51b electrically around the optical axis, respectively. The arrangement angles of the wedge prisms 51a and 51b coincide at the initial position. The wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b constitute an irradiation position changing mechanism that moves the irradiation position of the measurement light on the subject 21.

  The measurement microscope apparatus further includes an instruction unit 63 for indicating the measurement position in the observation field, and wedge prisms 51a and 51b that match the irradiation position of the measurement light on the subject 21 with the measurement position instructed by the instruction unit 63. A calculation unit 62 for calculating the arrangement angle, and a driver 61 for driving the rotation mechanisms 52a and 52b so that the arrangement angles of the wedge prisms 51a and 51b coincide with the arrangement angle calculated by the calculation unit 62 are provided. ing. The instruction unit 63 is composed of a trackball or a joystick.

  In the measurement microscope apparatus of FIG. 1, a subject 21 is illuminated by an illumination system (not shown) and imaged by an imaging optical system including an objective lens 11 and an imaging lens 12. The formed image of the subject 21 is visually observed through the eyepiece 13.

  The measurement light emitted from the LED light source 31 passes through the beam splitter 32, the condensing lens 33, the wedge prisms 51a and 51b, and the relay lens 55, is reflected by the half mirror 17, is condensed by the objective lens 11, and is collected. The specimen 21 is irradiated. The light reflected by the subject 21 enters the objective lens 11, is reflected by the half mirror 17, passes through the relay lens 55, the wedge prisms 51 a and 51 b, and the condenser lens 33, and is reflected by the beam splitter 32. Thereafter, the beam is branched by the beam splitter 34. The light that has passed through the beam splitter 34 reaches the opening 35a, and the light that has passed through the opening 35a enters the photodetector 36a. The light reflected by the beam splitter 34 reaches the opening 35b, and the light passing through the opening 35b enters the photodetector 36b.

  Each of the photodetectors 36a and 36b outputs a signal reflecting the intensity of incident light. The signal processing unit 41 compares the output signals of the photodetectors 36a and 36b, determines the in-focus state from the magnitude relationship of the signals, and drives the Z stage 15 based on the determination result. Specifically, when the output signal of the photodetector 36a is smaller than the output signal of the photodetector 36b, the signal processing unit 41 moves the Z stage 15 so as to keep the objective lens 11 away from the subject 21. On the contrary, when the output signal of the light detector 36a is larger than the output signal of the light detector 36b, the Z stage 15 is driven so that the objective lens 11 is brought closer to the subject 21, and the light detector is detected. When there is no difference between the output signals 36a and 36b, the Z stage 15 is not driven.

  As shown in FIG. 2, each of the wedge prisms 51a and 51b is a prism having a minute apex angle φw, and gives a slight declination φ0 to the incident light beam in the maximum increasing direction. When this prism is independently rotated about the optical axis, the locus of the emitted light becomes a conical shape with a half apex angle φ0. As shown in FIG. 3, the two wedge prisms 51a and 51b are arranged in series along the optical axis, and when these are independently rotated around the optical axis, when φ0 is small, the emitted light is It can be deflected in any direction within a cone with a half apex angle 2φ0.

  FIG. 4 shows a declination vector of light emitted from the wedge prisms 51a and 51b as viewed along the optical axis. In FIG. 4, a and b indicate the deflection vector by the wedge prisms 51a and 51b, respectively, and c indicates the combined deflection vector by the two wedge prisms 51a and 51b. The declination vectors a and b by the wedge prisms 51a and 51b always have a magnitude of φ0, and the combined declination vector c, which is the sum of the declination vectors a and b, is the arrangement angles θa and θb of the wedge prisms 51a and 51b. It can be seen that it has an arbitrary value within the range of 2φ0 at the maximum, depending on.

  Further, the wedge prisms 51a and 51b are arranged at a position conjugate with the pupil position of the objective lens 11 or in the vicinity thereof. For this reason, the deflection angle vector c of the emitted light corresponds to the ray angle at the pupil position, that is, the planar position on the subject 21. For example, when the arrangement angle θa of the wedge prism 51a and the arrangement angle θb of the wedge prism 51b are shifted by 180 degrees, the magnitude of the deflection angle vector c of the emitted light is 0, and the measurement light from the focus detection system 30 is the observation field of view. The center of the light is irradiated. Therefore, the center of the observation field is the height measurement position. When the arrangement angles θa and θb of the wedge prisms 51a and 51b are changed and the declination vector c has a magnitude, the irradiation position of the measurement light from the focus detection system 30 on the subject 21 changes, and the height is measured. The position is moved.

  In the present embodiment, the apex angle φw of the wedge prisms 51a and 51b is set so that 2φ0 is the outermost position of the observation field. Accordingly, by independently changing the arrangement angles θa and θb of the wedge prisms 51a and 51b, the irradiation position of the measurement light from the focus detection system 30 can be moved over the entire observation visual field range.

  In the present embodiment, the measurement position in the observation visual field is given as an instruction value (x, y) by the instruction unit 63, and this instruction value is sent to the calculation unit 62. The calculation unit 62 calculates the arrangement angles θa and θb of the wedge prisms 51a and 51b that move the irradiation position of the measurement light of the focus detection system 30 to the input measurement position (x, y).

  A method for converting the instruction value (x, y) into the arrangement angles θa and θb will be described with reference to FIG. FIG. 5 shows the declination vector of the light emitted from the wedge prisms 51a and 51b, as in FIG. “a” and “b” represent the deflection angle vectors by the wedge prisms 51 a and 51 b, respectively, and “c” represents the combined deflection angle vector by the two wedge prisms 51 a and 51 b. The outermost part is normalized by | a | + | b |.

  Also in this embodiment, as in the first embodiment, the maximum deviation angle 2φ0 formed by the two wedge prisms 51a and 51b is set so that the focus detection measurement point is at the outermost position of the observation field of the observation optical system 10. The wedge angle φw of the wedge prisms 51a and 51b is set.

  The declination vector c of the emitted light has an instruction value (x, y) at the end point, which is expressed as follows in polar coordinates.

L = (x ² + y ² ) ^1/2
θ = arctan (y / X)
Since the declination vectors a and b have the same length, the angle Δθ formed by the rotation angle θ of the emitted light and the arrangement angles θa and θb is the same. Further, Δθ is obtained geometrically from FIG. 5, and the arrangement angles θa and θb are expressed as follows.

Δθ = arccos (L) (1)
θa = θ−Δθ
θb = θ + Δθ
The calculation unit 62 outputs the calculated arrangement angles θa and θb to the driver 61, and the driver 61 rotates the rotation mechanisms 52a and 52b so that the arrangement angles of the wedge prisms 51a and 51b coincide with the input arrangement angles θa and θb. Drive. Thereby, the irradiation position of the measurement light is moved to the measurement position (instructed position) designated by the instruction unit 63. The processing for calculating the arrangement angles θa and θb by the calculation unit 62 is repeated. Thereby, the irradiation position of the measurement light is moved so as to follow the measurement position (indicated position) indicated by the instruction unit 63.

  A specific example of the rotation mechanisms 52a and 52b is shown in FIG. The rotation mechanisms 52a and 52b are arranged between annular pulleys 71a and 71b fixed to the wedge prisms 51a and 51b, rotatably supported pulleys 73a and 73b, and between the pulleys 71a and 71b and the pulleys 73a and 73b. Belts 72a and 72b, pulleys 74a and 74b fixed at the same center to the pulleys 73a and 73b, motors 77a and 77b, and pulleys 76a and 76b fixed to the rotation shafts of the motors 77a and 77b, respectively. And belts 75a and 75b that are respectively placed between the pulleys 74a and 74b and the pulleys 76a and 76b.

  The motors 77a and 77b rotate the pulleys 76a and 76b, respectively. The rotations of the pulleys 76a and 76b are transmitted to the pulleys 74a and 74b via the belts 75a and 75b, respectively, and the pulleys 73a and 73b are rotated together with the pulleys 74a and 74b. The rotations of the pulleys 73a and 73b are transmitted to the pulleys 71a and 71b via the belts 72a and 72b, respectively.

  In the measurement microscope apparatus, when the operator designates the measurement position, the measurement light is irradiated into the observation field, and the indication unit 63 observes the irradiation position of the measurement light that moves following the indication position. Indicates the measurement position. For this reason, it is preferable that the irradiation position of the measurement light quickly follows the indicated position.

  However, the closer the indicated position is to the center of the observation field, the greater the amount of rotation of the wedge prisms 51a and 51b relative to the amount of movement of the indicated position. As shown in FIG. 7, when an instruction is given to move the measurement position from the position c to the position c ′ along a trajectory passing through the center of the observation field, the wedge prisms 51a and 51b are moved even if the movement amount of the measurement position is small. Rotate 180 °. For example, when the measurement position is indicated near the center of the observation field, it is expected that the wedge prisms 51a and 51b are frequently rotated by about 180 ° due to the hand shake of the operator. This gives an excessive load to the motors 77a and 77b, and causes excessively generated heat to affect the measured value, or causes the control to become unstable due to the step-out of the motors 77a and 77b. This is not limited to the rotation mechanisms 52a and 52b shown in FIG. 6, but can be applied to all mechanisms for rotating the wedge prisms 51a and 51b (not limited to a mechanism using a motor, including a mechanism using an actuator other than a motor). .

  As countermeasures, it is conceivable to use an expensive motor capable of generating a large torque for the motors 77a and 77b for rotating the wedge prisms 51a and 51b, or to add a speed reduction mechanism for increasing the torque. However, this causes a complicated structure, obstruction of miniaturization, and an increase in cost.

  In the present embodiment, in order to avoid such a problem, the irradiation position of the measurement light by the irradiation position changing mechanism including the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b according to the measurement position instructed by the instruction unit 63. Change the following ability. The followability of the irradiation position of the measurement light is changed by changing the time interval (weight T) of processing for calculating the arrangement angle by the calculation unit 62 that is repeatedly performed.

  FIG. 8 shows a flowchart of processing by the calculation unit 62. First, the instruction value (x, y) from the instruction unit 63 is sampled. The sampled instruction value (x, y) is converted into polar coordinates, and the distance L from the origin is calculated.

  When L ≠ 0, the arrangement angles θa and θb are calculated according to the equation (1). Further, when L = 0, the combination in which the arrangement angles θa and θb are shifted by π is infinite and cannot be specified, so θa is set to the previous value and θb is set to θa + π. Thereby, the combination of the arrangement angles θa and θb satisfying the instruction value (x, y) is calculated by the calculation unit 62.

  The calculated arrangement angles θa and θb are output to the rotation mechanisms 52a and 52b via the driver 61. The rotation mechanisms 52a and 52b adjust the arrangement angles of the wedge prisms 51a and 51b to the arrangement angles θa and θb, respectively.

  This flow is repeated after waiting for the weight T time.

  FIG. 9 is a flowchart of the weight T process performed by the calculation unit 62. Similarly to the above, first, the instruction value (x, y) from the instruction unit 63 is sampled. The sampled instruction value (x, y) is converted into polar coordinates, and the distance L from the origin is calculated. As shown in FIG. 10, the observation visual field is divided into a plurality of regions in advance. Specifically, it is divided into three regions based on the distances A and B from the center of the observation field. The distance L is compared with predetermined distances A and B, and weights T = T3, T2, and T1 (wait time: T1> T2> T3) are determined according to the comparison result. As the indicated position is closer to the center of the observation field, the rotation amount of the wedge prism becomes larger with respect to the movement amount of the indicated position, so that the weight T is the outermost field → diameter B → diameter A as shown in FIG. Are set in the order of. That is, if 0 ≦ L <A, the weight T = T1, if A ≦ L <B, the weight T = T2, and if B ≦ L, the weight T = T3. As a result, as the indicated position approaches the center of the observation field, the followability of the irradiation position of the measurement light with respect to the indicated position by the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b decreases.

  That is, in this embodiment, the observation visual field is divided into a plurality of regions in advance, and the followability of the irradiation position of the measurement light according to which of the plurality of regions the measurement position designated by the instruction unit 63 is located. Can be changed.

  In this embodiment, the weight T is set according to a plurality of areas divided in advance. However, the weight T = a (constant) / L (where L ≠ 0) without setting a plurality of areas. ) And the weight T may be calculated continuously according to the distance L from the center of the observation field.

[Modification]
Here, the weight T is determined based on the distance L from the center of the observation visual field at the indicated position, but may be modified as follows.

  In the position close to the center of the observation field, the difference in the arrangement angle between the two wedge prisms 51a and 51b is close to 180 °. For this reason, the weight T is determined based on the difference between the arrangement angles of the two wedge prisms 51a and 51b, not the distance L from the center of the observation field. For example, it is determined whether the difference between the arrangement angles of the two wedge prisms 51a and 51b falls within a range of 0 ° to 100 °, 101 ° to 150 °, and 151 ° to 180 °. As for the weight T, the weights T = T3, T2, and T1 (wait time: T1> T2> T3) are determined in the order of the above-described determination conditions. That is, if the difference in arrangement angle is in the range of 0 ° to 100 °, weight T = T3, if the difference in arrangement angle is in the range of 101 ° to 150 °, weight T = T2, and the difference in arrangement angle is 151. If it is within the range of ° to 180 °, the weight T = T1.

  As shown in FIG. 11, the observation visual field is divided into three regions based on rectangles A and B in which the center of gravity is located at the center of the observation visual field. It is determined in which region the xy coordinates of the instruction value (x, y) are located. The criteria for determining the weight T are weight T = T3, T2, T1 (weight time: T1> T2> T3) in the order of the outermost visual field → rectangle B → rectangle A. That is, if the designated position is located in the area inside the rectangle A, the weight T = T1, if the designated position is located outside the rectangle A and located in the area inside the rectangle B, the weight T = T2, and the designated position is outside the rectangle B. If it is located in the innermost region outside the field of view, the weight T = T3.

  As shown in FIG. 12, the observation visual field is divided into four regions A, A ′, B, and B ′ based on the difference in the sign of the xy coordinates. The xy coordinates have the same sign in the areas A and A ', and have different signs in the areas B and B'. The signs of the xy coordinates of the current measurement position and the indicated value (x, y) are compared, and it is determined whether or not the signs of the xy coordinates are reversed. The criterion for determining the weight T is “when the sign of the current measurement position and the indicated value (x, y) is inverted” → “when the sign of the current measured position and the indicated value (x, y) is not inverted”. In order, the weights T = T1, T2 (wait time: T1> T2) are determined. That is, if the signs of the xy coordinates of the indicated value (x, y) are reversed with respect to the signs of the xy coordinates of the current measurement position, the weight T = T1, and the signs of the xy coordinates of the current measurement position. If the signs of the xy coordinates of the instruction value (x, y) are not reversed, the weight T = T2. Although the four areas have been described as rectangles, they may be other than rectangles.

[effect]
In the present embodiment, when the wedge prisms 51a and 51b are rotated, the indication region in which the rotation amount of the wedge prisms 51a and 51b is larger than the movement amount of the indication position (particularly near the center of the observation field = two wedge prisms 51a). , 51b has a large difference in arrangement angle), the followability of the irradiation position of the measurement light with respect to the indication position by the wedge prisms 51a, 51b and the rotation mechanisms 52a, 52b is lowered. As a result, the sudden rotation of the wedge prisms 51a and 51b is suppressed, and the load on the actuator that rotates the wedge prism is reduced. This increases the stability of the rotation control of the wedge prism and suppresses heat generation of the actuator. For this reason, an expensive actuator capable of generating a large load torque is not required, and stable rotation control without step-out can be performed.

<Second embodiment>
[Configuration and action]
Since the configuration is the same as that of the first embodiment, detailed description thereof is omitted. The sampling method of the instruction value (x, y) from the instruction unit 63 is different from the first embodiment, and the field of view is divided.

  In the present embodiment, as shown in FIG. 13, the position (pointable position) α that can be pointed by the pointing unit 63 is limited to a plurality of regions in the observation field. These regions are located at the intersections of grid lines that divide the observation field into a grid. It is desirable that the interval between the lattice lines be equal to or smaller than the beam diameter of the measurement light. Here, the position that can be indicated by the instruction unit 63 is set as the intersection of the grid lines. However, after the instruction value (x, y) from the instruction unit 63 is sampled, the calculation unit 62 uses a certain threshold width. It suffices that the instruction value (X, y) is converted into the instruction value (X, y) obtained by rounding the numerical value, and the instruction value (X, y) can be substantially handled as the intersection of the grid lines.

  As described above, the measurement light does not follow a minute change in the designated position that is equal to or smaller than the interval between the grid lines by setting the designated position as the intersection of the grid lines.

  Similarly to the first embodiment, the closer the indicated position is to the center of the observation field, the lower the followability of the irradiation position of the measurement light with respect to the indicated position by the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b. A weight T is set for each intersection of the grid lines.

[Modification]
The arrangement of the grid lines may be modified as follows.

  ・ The intersection of the grid lines is not located at the center of the observation field. Thereby, the indicated value does not pass near the center of the observation visual field. For this reason, a sudden change in the arrangement angles θa and θb of the wedge prisms 51a and 51b is avoided, and the load on the rotating mechanisms 52a and 52b is reduced.

  -The intersection of the grid lines is located at the center of the observation field. Thereby, the indicated value is fixed at the center of the observation field in the very vicinity of the center of the observation field. That is, when the vicinity of the center of the observation field is indicated at the measurement position, the indicated value is automatically fixed at the center of the observation field. Accordingly, the measurement light does not follow the minute change in the indicated position. For this reason, a sudden change in the arrangement angles θa and θb of the wedge prisms 51a and 51b is avoided, and the load on the rotating mechanisms 52a and 5b is reduced.

[effect]
In this embodiment, when the wedge prisms 51a and 51b are rotated, the followability of the irradiation position of the measurement light with respect to the indication positions by the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b is discontinuous. For this reason, the measurement light does not follow a minute change in the indicated position. As a result, rapid rotation of the wedge prism is suppressed, and the load on the actuator that rotates the wedge prism is reduced. Thereby, the stability of the control of the wedge prism is increased, and the heat generation of the actuator is suppressed. For this reason, an expensive actuator capable of generating a large load torque is not required, and stable rotation control without step-out can be performed.

<Third embodiment>
[Configuration and action]
Since the configuration is the same as that of the first embodiment, detailed description thereof is omitted. The sampling process in the flowchart of the arrangement angle calculation process by the calculation part 62 of the instruction value (x, y) from the instruction part 63 is different from the first embodiment.

  FIG. 14 is a flowchart showing the (x, y) sampling process according to the third embodiment. The instruction value (x, y) instructed by the instruction unit 63 is acquired, and it is determined whether the same instruction value (x, y) as in the previous time is obtained. If the same value is obtained, the counter value is added, and if not obtained, the counter value is cleared to zero. Next, when the counter value reaches an arbitrarily set number of times, the counter value is cleared to 0 and is output as an instruction value (x, y) to the process of calculating L in FIG. If not satisfied, the flow waits for an arbitrarily set weight T ′, and this flow is repeated.

  The operation of changing the followability of the irradiation position of the measurement light with respect to the indication position by the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b is the same as the weight T process by the calculation unit 62 in the first embodiment. You may carry out by performing by. Alternatively, as the indicated position becomes closer to the center of the observation field, the number of counter values (the indicated value (X, y) is continuously increased) is increased, whereby the indicated position by the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b. The followability of the irradiation position of the measurement light with respect to may be reduced.

[effect]
In the present embodiment, the same effect as the second embodiment can be obtained.

<Fourth embodiment>
[Configuration and action]
FIG. 15 shows a measuring microscope apparatus according to the fourth embodiment of the present invention. In FIG. 15, members indicated by the same reference numerals as those shown in FIG. 1 are similar members, and detailed description thereof is omitted.

  As shown in FIG. 15, the measurement microscope apparatus of the present embodiment is different from the configuration of the measurement microscope apparatus of the first embodiment in that an imaging unit 81 such as a CCD camera for capturing an observation image instead of the eyepiece 13. Furthermore, a monitor 82 for displaying an observation image picked up by the image pickup unit 81 and a mark such as an arrow that temporarily indicates the measurement position (indicated position) instructed by the instruction unit 63 are used as the observation image. A mark display unit 83 that is displayed on the monitor 82 in an overlapping manner, and a trigger unit 84 that starts the movement of the irradiation position of the measurement light by the irradiation position changing mechanism including the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b. Yes. The activation unit 84 is configured by a mouse, a switch, and the like, and is connected to the calculation unit 62. The calculation unit 62 first moves the mark to the indication position on the mark display unit 83 before moving the irradiation position of the measurement light, and then marks the irradiation position of the measurement light according to the instruction from the activation unit 84. Move to position. Thereby, the operator can handle the mark displayed on the monitor 82 so as to overlap the observation image as a temporary measurement position.

  First, the operator operates the instruction unit 63 while observing the observation image displayed on the monitor 82 to move a mark that temporarily indicates the instruction position to a desired position in the observation field. Next, when the operator activates the activation unit 84 (for example, double-clicking the mouse), the calculation unit 62 performs the arrangement angle calculation process illustrated in FIG. 8, and the driver 61 calculates by the calculation unit 62. The rotation mechanisms 52a and 2b are driven according to the arranged angle, and the wedge prisms 51a and 51b are adjusted to the arranged angle. Thereby, the irradiation position of measurement light is moved to the desired position in the above-mentioned observation visual field.

[effect]
In this embodiment, when the operator indicates the measurement position, the positional relationship of the measurement positions on the observation image is confirmed on the monitor before the irradiation position of the measurement light is actually moved to the specified position. Further, the followability of the irradiation position of the measurement light with respect to the indication position by the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b is reduced (here, only one follow is sufficient). For this reason, rapid rotation of the wedge prism is suppressed, and the load on the actuator that rotates the wedge prism is reduced. Thereby, the stability of the rotation control of the wedge prism is increased, and the heat generation of the actuator is suppressed. For this reason, an expensive actuator capable of generating a large load torque is not required, and stable rotation control without step-out can be performed.

<Fifth embodiment>
[Configuration and action]
Since the configuration is the same as that of the first embodiment, detailed description thereof is omitted. The arrangement angle calculation process shown in FIG. 8 performed by the calculation unit 62 is different from the first embodiment.

  The flowchart of the process by the calculating part 62 of 5th embodiment is shown in FIG.

  First, the instruction value (x, y) from the instruction unit 63 is sampled. The sampled instruction value (x, y) is converted into polar coordinates, and the distance L from the origin is calculated.

  When L ≠ 0, the arrangement angles θa and θb are calculated according to the equation (1) described in the first embodiment, and the process proceeds to the next determination.

  It is assumed that π 1 (θ 1 θ (previous)) = θ ′.

  When θ ′ ≧ 0, the arrangement angles θa and θb calculated according to the equation (1) are calculated and output to the driver 61 together with a signal indicating the normal rotation of the rotation mechanism 52a (for example, the clockwise direction is the normal rotation). .

  When θ ′ <0, θa = (π−θ ′) − Δθ and θa = (π−θ ′) + Δθ are set and output to the driver 61 together with the reverse rotation signal of the rotation mechanism 52a. By this processing, the respective rotation mechanisms 52a and 52b rotate in the shortest time.

  When L = 0, as in the first embodiment, θa is set to the previous value and θb is set to θa + π. As a result, the combination of the arrangement angles θa and θb satisfying the instruction value (x, y) is set by the calculation unit 62 and is output to the driver 61 together with the positive rotation signal of the rotation mechanism 52a.

  The rotation direction signal of the rotation mechanism 52a and the arrangement angles θa and θb are output to the rotation mechanisms 52a and 52b via the driver 61 after waiting for a weight T time. The rotation mechanisms 52a and 52b adjust the arrangement angles of the wedge prisms 51a and 51b to the arrangement angles θa and θb, respectively. This flow is repeated.

  Thereafter, the same processing as in the first embodiment is performed.

  FIG. 9 is a flowchart of the weight T process performed by the calculation unit 62, and FIG. 10 is an image diagram of the designated position in the observation field. Similarly to the above, first, the instruction value (x, y) from the instruction unit 63 is sampled. The sampled instruction value (x, y) is converted into polar coordinates, and the distance L from the origin is calculated. By comparing and judging the magnitude of L, weight = T1, T2, T3 (wait time: T1> T2> T3) is determined. The closer to the center of the observation field, the larger the rotation amount of the wedge prism with respect to the movement amount of the designated position. Therefore, the weight T increases in the order of the outermost field → diameter B → diameter A as shown in FIG. Is set. As a result, as the designated position approaches the center of the observation field, the followability of the measurement light irradiation position by the wedge prisms 51a and 51b and the rotation mechanisms 52a and 52b is reduced with respect to the designated position.

[effect]
In the present embodiment, when the wedge prisms 51a and 51b are rotated, the two wedge prisms 51a and 51b are rotated at a necessary minimum angle. Thereby, the stability of the rotation control of the wedge prism is increased, and the heat generation of the actuator is suppressed. For this reason, an expensive actuator capable of generating a large load torque is not required, and stable rotation control can be performed.

  Of course, this embodiment may be applied to the fourth embodiment.

  The embodiments of the present invention have been described above with reference to the drawings. However, the present invention is not limited to these embodiments, and various modifications and changes can be made without departing from the scope of the present invention. Also good.

  For example, the number of weights T used in the description in each embodiment is not limited to this, and may be small or large.

1 shows a measurement microscope apparatus according to a first embodiment of the present invention. FIG. 2 shows a declination angle given to an incident light beam by one wedge prism shown in FIG. 1. FIG. FIG. 2 shows a declination angle given to an incident light beam by the two wedge prisms shown in FIG. The deflection angle vector of the emitted light from the wedge prism viewed along the optical axis is shown. The declination vector of the light emitted from the wedge prism is shown. 2 shows a specific example of the rotation mechanism shown in FIG. 1. An instruction was given to move the measurement position from position C to position C ′ along a trajectory passing through the center of the observation field. FIG. 3 shows a flowchart of arrangement angle calculation processing by the calculation unit shown in FIG. 1. FIG. FIG. 2 is a flowchart of a weight T process performed by a calculation unit illustrated in FIG. 1. FIG. An observation field of view divided into a plurality of regions is shown. The observation visual field divided into a plurality of other areas is shown. Moreover, the observation visual field divided into another plurality of regions is shown. The instructable position limited to a plurality of areas in the observation visual field is shown. The flowchart of the (x, y) sampling process by 3rd embodiment of this invention which can be substituted for the (x, y) sampling process of 1st embodiment is shown. 7 shows a measurement microscope apparatus according to a fourth embodiment of the present invention. The flowchart of the arrangement | positioning angle calculation process by the calculating part by 5th embodiment of this invention is shown. 1 shows a conventional example of a measurement microscope apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Observation optical system, 11 ... Objective lens, 12 ... Imaging lens, 13 ... Eyepiece lens, 15 ... Z stage, 17 ... Half mirror, 21 ... Subject, 22 ... XY stage, 30 ... Focus detection system, 30 ' DESCRIPTION OF SYMBOLS ... Focus detection system, 31 ... LED light source, 32 ... Beam splitter, 33 ... Condensing lens, 33 '... Condensing lens, 34 ... Beam splitter, 35a, 35b ... Aperture, 36a, 36b ... Photo detector, 41 ... Signal Processing unit 42 ... Measurement unit 51a, 51b ... Wedge prism 52a, 52b ... Rotation mechanism 55 ... Relay lens 61 ... Driver 62 ... Calculation unit 63 ... Indication unit 71a, 71b ... Pulley 72a, 72b ... belt, 73a, 73b ... pulley, 74a, 74b ... pulley, 75a, 75a ... belt, 76a, 76b ... pulley, 77a, 77b ... mode , 81 ... imaging unit, 82 ... monitor, 83 ... mark display portion, 84 ... transition section.

Claims (13)

An observation optical system including an objective lens disposed in the vicinity of the subject;
Moving means for relatively moving the subject and the objective lens along the optical axis of the observation optical system;
A focus detection system that irradiates the subject with measurement light via the objective lens and detects focus on the subject based on the measurement light reflected by the subject; and
Control means for controlling the moving means based on a detection result by the focus detection system;
Irradiation position changing means for moving the irradiation position of the measurement light with respect to the subject,
The irradiation position changing means includes
Two wedge prisms arranged at or near a position conjugate with the pupil position of the objective lens;
Two rotation mechanisms each rotating the wedge prism around an optical axis,
further,
Indicating means for indicating the measurement position in the observation field;
A calculation unit that calculates an arrangement angle of the wedge prism that matches an irradiation position of the measurement light with a measurement position instructed by the instruction unit;
Driving means for driving the rotation mechanism so as to match the arrangement angle of the wedge prism with the arrangement angle calculated by the arithmetic means;
The said calculating means changes the followability of the irradiation position of the measurement light by the said irradiation position change means according to the measurement position instruct | indicated by the said instruction | indication means.   2. The microscope apparatus according to claim 1, wherein the followability of the irradiation position of the measurement light by the irradiation position changing unit is set based on a distance from the observation field center of the measurement position instructed by the instruction unit.   2. The observation field of view according to claim 1, wherein the observation field of view is divided into a plurality of regions in advance, and the followability of the irradiation position of the measurement light by the irradiation position changing means is such that the measurement position instructed by the instruction means is the plurality of areas. A microscope device that can be changed depending on where it is located.   5. The microscope apparatus according to claim 4, wherein the observation visual field is divided into the plurality of regions based on a distance from a center of the observation visual field.   5. The microscope apparatus according to claim 4, wherein the observation visual field is divided into the plurality of regions based on a rectangle whose center of gravity is located at the center of the observation visual field.   The microscope apparatus according to claim 1, wherein followability of the irradiation position of the measurement light by the irradiation position changing unit is changed according to a difference in an arrangement angle of the wedge prism.   In Claim 1, the position which can be instruct | indicated by the said instruction | indication means is restrict | limited to the some area | region located in the intersection of the grid line which divides | segments an observation visual field into a grid | lattice form.   8. The microscope apparatus according to claim 7, wherein an intersection of the lattice lines is not arranged at the center of the observation visual field.   8. The microscope apparatus according to claim 7, wherein one of the intersections of the lattice lines is arranged at the center of the observation field.   2. The microscope apparatus according to claim 1, wherein the followability of the irradiation position of the measurement light by the irradiation position changing unit can be changed by changing a time interval of processing for calculating the arrangement angle by the calculation unit that is repeatedly performed. An observation optical system including an objective lens disposed in the vicinity of the subject;
Moving means for relatively moving the subject and the objective lens along the optical axis of the observation optical system;
A focus detection system that irradiates the subject with measurement light via the objective lens and detects focus on the subject based on the measurement light reflected by the subject; and
Control means for controlling the moving means based on a detection result by the focus detection system;
Irradiation position changing means for moving the irradiation position of the measurement light with respect to the subject,
The irradiation position changing means includes
Two wedge prisms arranged at or near a position conjugate with the pupil position of the objective lens;
Two rotation mechanisms for rotating the wedge prism around the optical axis, and
Indicating means for indicating the measurement position in the observation field;
A calculation unit that calculates an arrangement angle of the wedge prism that matches an irradiation position of the measurement light with a measurement position instructed by the instruction unit;
Driving means for driving the rotation mechanism so as to match the arrangement angle of the wedge prism with the arrangement angle calculated by the calculation means;
An imaging means for imaging an observation image;
Display means for displaying the observation image picked up by the image pickup means;
A mark display means for displaying on the display means a mark tentatively indicating the measurement position indicated by the indication means on the observation image;
The computing means moves the mark on the mark display means to the measurement position instructed by the instruction means, and then moves the irradiation position changing means to move the irradiation position of the measurement light to the position of the mark. apparatus.   The microscope apparatus according to claim 11, further comprising an activating unit that starts moving the irradiation position of the measurement light by the irradiation position changing unit.   12. The microscope apparatus according to claim 1, wherein the calculation unit rotates the wedge prism to a smaller rotation angle with respect to the calculated arrangement angle of the wedge prism.

Images