JP3379928B2 - measuring device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring device for measuring the height and position of a subject.

[0002]

2. Description of the Related Art In recent years, semiconductor parts have tended to become more highly integrated and larger in size, and accordingly, BGA packages and the like have been considered as electric part mounting for mounting bare chips and the like. As for such BGA packages as well, recently, there are some that have adopted bumps by FC bonding on the bare chip itself, and for such mounting, more accurate position measurement and height measurement of minute objects are required. There is.

Therefore, conventionally, when mounting an electric component using such a bump, an operator performs position measurement, height measurement, etc. while observing each one using a real-life microscope.

Further, in order to capture a high quality image from the subject, it is necessary to optimally adjust the light quantity of the laser diode which is the light source.

Therefore, conventionally, as a method of controlling the light quantity of the laser light of the laser diode, a method of controlling the light quantity of the laser light by changing the power supply voltage of the laser diode or an ND filter in which the transmission quantity is sequentially changed By arranging it in front of the diode and moving the ND filter from this state to change the amount of transmission for laser light,
A method of controlling the amount of light is used.

[0006]

In the conventional method for mounting electrical components using bumps, the operator performs position measurement and height measurement while observing each one using a microscope. It takes a lot of time to perform a visual inspection for mounting one electric component, which not only lowers the work efficiency but also puts a heavy burden on the operator.

On the other hand, as a method of controlling the light quantity of the laser light of the laser diode, if the power supply voltage of the laser diode is changed, the wavelength of the laser light becomes unstable and it is difficult to capture a high quality image. Since the amount of transmitted laser light changes in sequence, the laser light corresponding thereto has a cross section of a predetermined size, so ND
The laser light that has passed through the filter has a problem in that the amount of light varies at various points in its cross section, and a uniform amount of light cannot be obtained.

A polarizing plate is provided in the optical path of the light beam,
There is also a technology that changes the intensity of the light beam that passes through the polarizing plate by rotating this, but the optimal brightness also changes when the measurement location or measurement conditions of the subject change, so a high-quality image is always stable. However, there is a problem that it is difficult to capture it.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a measuring apparatus capable of performing various highly accurate measurements in a short time and reducing the burden on the operator. To do.

It is another object of the present invention to provide a measuring device which can always stably capture an image having an optimum brightness even if the measurement location or measurement condition of the subject is changed.

[0011]

According to one aspect of the present invention, a measurement light source that emits measurement light, and an objective lens that is arranged so as to face a subject and focuses the measurement light on the subject are provided.
Wherein through the objective lens and the scanning means for scanning the measurement light irradiated to the subject two-dimensionally on a subject, said subject
At a position away from the center of the light flux reflected by the body
The objective lens is provided with an aperture for passing a part of the light flux.
The light that is placed at a position conjugate with the pupil plane of
An image forming lens for condensing a bundle; a light position detecting means arranged on a convergent surface of the image forming lens for detecting a variation amount of a light spot whose position changes according to the height of the subject; First measurement means having height calculation means for obtaining the height of the subject from the amount of fluctuation detected by the position detection means, and illuminating light from the illumination light source onto the subject and reflecting from the subject. Second measuring means for receiving two-dimensional information by receiving light or scattered light through the objective lens, wherein the objective lens has an optical axis in the first measuring means and an optical axis in the second measuring means. There is provided a measuring device characterized in that and are provided at positions overlapping with each other.

[0012]

[0013]

[0014]

[0015]

[0016]

[0017]

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a schematic configuration of a detection device to which the present invention is applied. In the figure, 101 is a subject (sample), and this subject 101 is placed on a stage 102.

The stage 102 includes a stage driving section 2
05, it is possible to move in the Z direction, the X direction, and the Y direction (depth direction in the drawing) shown in the drawing as necessary.

An objective lens 103 is arranged for the subject 101 on the stage 102. This objective lens 10
3 uses an object-side telecentric lens of infinity design.

A ring-shaped illumination 131 is arranged between the objective lens 103 and the stage 102. The ring-shaped illumination 131 is connected to a light source 133 via an optical fiber 132, and light from the light source 133 emits illumination light from around the objective lens 103 toward the subject 101.
A dark field image of the subject 101 is acquired.

A dichroic mirror 134 is arranged between the objective lens 103 and a galvanometer mirror 104, which will be described later, and a half mirror 136 is arranged in the reflection optical path of this dichroic mirror 134.

Further, in the transmission optical path of the half mirror 136,
A light source 137 for epi-illumination is arranged. This light source 13
7 is a half mirror 136 and a dichroic mirror 13
Epi-illumination light is emitted toward the subject 101 through the lens 4 and the objective lens 103, and a bright-field image of the subject 101 is acquired.

Here, the dichroic mirror 134 is
As shown in FIG. 2, the dark field image by the ring-shaped illumination 131 and the bright field image by the light source (for epi-illumination) 137 exhibit a low transmission amount (high reflection) with respect to the wavelength region of each observation system, In addition, a laser diode 1 described later
A material having a characteristic of exhibiting a high transmission amount in the wavelength range of the measurement light from 05 is used.

The dark-field image or bright-field image of the subject 101 passes through the objective lens 103, is reflected by the dichroic mirror 134, and is further reflected by the half mirror 136.
Line sensor camera 13 arranged at the condensing position of this imaging lens 135.
It is designed to be taken in by 8.

Here, the line sensor camera 138 uses the imaging lens 1 from the reflection optical path of the dichroic mirror 134.
A dark-field image or a bright-field image of the subject 101 captured via the image pickup device 35 is captured. Further, the line sensor camera 138 shifts the imaging position for each line from the scanning position of the galvano mirror 104 described later to eliminate the influence of the laser light and to obtain a good dark field image or bright field image. .

Then, the dark field image picked up by the line sensor camera 138 is input to the position calculation section 139 of the control device 121 as luminance image information. The position calculation unit 139 calculates the position of the subject 101 from the two-dimensional image information captured by the line sensor camera 138, and the optimum image processing algorithm corresponding to illumination and defects is executed to detect foreign matters, chips, It enables defect inspection such as stains and size.

The bright field image taken by the line sensor camera 138 is also used as luminance image information in the control device 1.
21 is input. In this case, the control device 121 executes the optimum image processing algorithm corresponding to the illumination and the defect based on the brightness image information of the line sensor camera 138, and detects the foreign matter, chip, stain, size, etc. of the subject 101. I also have.

By the way, the half mirror 2 is placed in the optical path between the dichroic mirror 134 and the half mirror 136.
01 is provided. This mirror 201 is the subject 1
The light of the dark field image or the bright field image from 01 is reflected and guided to the light receiving element 203 via the imaging lens 202. The output of the light receiving element 203 is input to the control device 121. In addition,
In the figure, the half mirror 201 is shown as an achromatic mirror 134.
Although the case where it is provided in the optical path between the half mirror 136 and the half mirror 136 is shown, it may be provided in the optical path between the half mirror 136 and the imaging lens 135 instead.

Based on the output of the light receiving element 203, the control device 121 keeps the light quantity within a preset range (between the upper limit value and the lower limit value) so that a brightness that allows two-dimensional measurement can be obtained. As described above), the light amount of the light source 133 or 137 is feedback-controlled.

Further, a filter 140 is arranged in front of the light source 133 of the ring-shaped illumination 131. This filter 140 converts the light from the light source 133 into a single wavelength,
The dark field image of the subject 101 is efficiently reflected by the dichroic mirror 134 so that it can be captured by the line sensor camera 138. A filter 141 is arranged on the image pickup surface of the line sensor camera 138.
This filter 141 is used for the laser diode 10 described later.
A part of the laser light from the laser beam 5 reflected by the surface of the subject 101 is further reflected by the dichroic mirror 134,
This is for preventing the line sensor camera 138 from entering.

On the other hand, a galvano mirror 104 as a scanning means is arranged on the pupil plane 103 'of the objective lens 103 via a dichroic mirror 134. The galvano mirror 104 is driven by the mirror driving unit 120 so that the pupil plane 10
3'is oscillated about the center of the pupil, reflects the measurement light, and scans the surface of the subject 101 in the X and Y directions (depth direction in the drawing) shown in the drawing. You can do it.

Although scanning in both the X and Y directions is realized by swinging the galvano mirror 104 here, instead, scanning in the X direction is realized by swinging the galvano mirror 104 and then in the Y direction. The scanning may be realized by moving the stage. Further, scanning in the X direction may be realized by moving the stage, and scanning in the Y direction may be realized by swinging the galvanometer mirror 104.

Reference numeral 105 denotes a laser diode, and the collimating lens 10 is provided in front of the laser diode 105.
6, 1/2 wavelength plate 3, polarization beam splitter 107, 1
Galvano mirror 10 described above via the quarter wave plate 108.
4 is arranged, the laser light from the laser diode 105 is collimated by the collimator lens 106, and the 1/2 wavelength plate 3, the polarization beam splitter 107, and the 1/4 wavelength plate 108 are arranged.
To the subject 1 through the dichroic mirror 134 and the objective lens 103 as the measurement light.
The light is focused on the 01 plane.

The half-wave plate 3 is a laser diode 10
It is arranged substantially orthogonal to the optical axis of the laser light from the laser beam 5. In this case, it is desirable that the half-wave plate 3 is not orthogonal (90 degrees) to the optical axis of the laser light, but is tilted in the range of 0 to 10 degrees from this. This is to prevent the adverse effect that the light emitting portion of the laser diode 105 is irradiated with the laser light reflected by the half-wave plate 3. The half-wave plate 3 has a circular shape and forms a gear 3a along its peripheral edge. The gear 3a is meshed with the gear 13a of the rotation shaft of the motor 13, and is rotated by using this motor 13 as a drive source. It is possible. The motor 13 is connected to the control device 121, and sets the rotation angle of the half-wave plate 3 by a control signal from the control device 12, and makes the amount of laser light transmission variable according to this rotation angle. There is.

The dichroic mirror 134 is reflected by the galvanometer mirror 104 as shown in FIG.
It is preferable to set an angle smaller than 45 ° with respect to the surface orthogonal to the optical axis of the objective lens 103 that guides the measurement light to the surface, and here, it is set to 35 ° shown by the solid line. That is, by setting the incident angle to the measurement light smaller than 45 °, the loss of the measurement light at the dichroic mirror 134 is minimized.

The measuring light on the object 101 is the objective lens 1
The convergent light of NA determined by the pupil diameter of 03 and the focal length is converged telecentrically at an arbitrary position on the subject 101.

The measuring light reflected by the surface of the subject 101 is converted into the objective lens 103 and the dichroic mirror 13.
4 and after being reflected by the galvanometer mirror 104,
Polarization beam splitter 10 through quarter-wave plate 108
The light beam is incident on the polarization beam splitter 7 and reflected by the polarization beam splitter 107. Then, the luminous flux of the measurement light reflected by the polarization beam splitter 107 is the first imaging lens 1
The light is focused on the primary image plane 110 by 09.

The light flux passing through the primary image plane 110 passes through a pupil relay lens 112 as a second objective lens designed to an infinite system, enters a prism 113 having a half mirror surface 113a, and is reflected. Is split into a light beam L2 that transmits.

Half mirror surface 113a of the prism 113
The light flux L1 reflected by the mirror 113 and the first diaphragm 11
2 through 4, the separator lens 1 which is the second imaging lens
15, an optical position detecting element (hereinafter, PSD (Position
(Referred to as Sensing Device) 116.

The PSD 116 outputs a current signal that changes depending on the photometric position (spot position) S. The spot position S moves left and right by an amount proportional to the height change of the subject 101. This is based on the principle of triangulation which will be described in detail later.

The output from the PSD 116 is used as the brightness image information of the bright field image of the subject 101 in the control device 1.
21 and the height calculation unit 122. The height calculation unit 122 measures the measurement position coordinates x, y on the surface of the subject 101 according to the swing angle of the galvanometer mirror 104.
The height z on the surface of the subject 101 is calculated based on the (position coordinates in the X and Y directions) and the spot position signal obtained from the PSD 116.

By the way, when the surface of the object 101 is uneven, the spot on the PSD 116 has a certain spread, which may prevent accurate detection. In this case, the PSD 116 can detect only the peripheral portion of the light spot, which causes a considerable detection error.

Therefore, in such a case, it is appropriate to discard the detection result because the height of the subject 101 cannot be detected. In this embodiment, in order to determine whether or not the measurement is possible, the light flux L2 that has passed through the half mirror surface 113a of the prism 113 is mirror surface 113b provided on the rear end side of the prism 113, and the second diaphragm 124.
Through the divided light receiving element 125.

The output (light quantity) of the divided light receiving element 125 is input to the measurement propriety judging section 126. The measurement propriety determination unit 126 determines, based on the output of the divided light receiving element 125, whether or not the brightness is such that the height can be measured. Specifically, measurable range (lower limit value, upper limit value)
Is set, and it is determined whether or not the light amount is within the range.

Further, the control device 121 controls the divided light receiving element 1
Based on the output of 25, the laser diode 105 is provided so that the brightness capable of measuring the height is obtained (the light amount is within the preset range (between the upper limit value and the lower limit value)).
Feedback control is performed on the light amount of the laser light.

Specifically, the control device 121 activates the motor 13 by sending a control signal, and the half-wave plate 3 is activated.
To rotate. Then, the half-wave plate 3 arranged substantially orthogonal to the laser light is rotated by the rotation angle set by the control signal from the control device 121, and the laser light is transmitted according to the rotation angle at this time. The amount is set. As a result, after passing through the half-wave plate 3, the stage 102
The laser light with which the upper object 101 is irradiated as the spot light is set to a desired optimum light amount.
As a result, on the control device 121 side, an image of the subject 101 measured with optimum brightness is obtained.

The front focal plane of the first imaging lens 109 is placed on the pupil plane of the first objective lens 103 or its conjugate plane 103 '. On the other hand, the separator lens 11
Reference numeral 5 is arranged on the rear focal plane of the pupil relay lens 112 which is the second objective lens. Therefore, the separator lens 115 serves as the pupil plane 103 ′ of the first objective lens 103.
It means that it is in the conjugate position with. Therefore, the separator lens 115 forms the measurement spot on the PSD 116 by the light flux that has passed through the same portion of the objective pupil plane 103 ′ among the measurement light reflected from all the measurement points.

Further, the first diaphragm 114 is arranged at the edge of the pupil (a position separated from the center by a certain distance h) as shown in FIG. In this way, the subject 10
Due to the unevenness of 1, the position of the spot incident on the PSD 116 moves in a desired direction based on the principle of triangulation.

The first diaphragm 114 and the second diaphragm 124 facing the divided light receiving element 125 are provided at conjugate positions. By doing so, the light beam projected on the divided light receiving element 125 is not reflected by the PSD 116.
It becomes a light beam projected above and a light beam that has passed through the same portion of the objective pupil plane 103 '.

Next, the operation of the embodiment thus constructed will be described.

First, when illumination light is emitted from the periphery of the objective lens 103 toward the subject 101 by the ring-shaped illumination 131, the light reflected by the subject 101 passes through the objective lens 103 as a dark field image and passes through the dichroic mirror 134.
Is reflected by the half mirror 136, transmitted through the imaging lens 135, and imaged by the line sensor camera 138 arranged at the condensing position of the imaging lens 135.
Then, the dark field image captured by the line sensor camera 138 is input to the position calculation unit 139 of the control device 121 as brightness image information, and the position calculation unit 139 calculates the position of the subject 101, etc. The measurement is taken.

Next, when the illumination light is emitted from the light source 137, this light is emitted from the half mirror 136 and the imaging lens 13.
5, dichroic mirror 134 and objective lens 10
It is irradiated toward the subject 101 through the beam path 3. Then,
This time, the light reflected by the subject 101 passes through the objective lens 103 as a bright-field image, and is dichroic mirror 134.
Is reflected by the half mirror 136, transmitted through the imaging lens 135, and imaged by the line sensor camera 138 arranged at the condensing position of the imaging lens 135.
Then, the bright-field image captured by the line sensor camera 138 is input to the control device 121 as brightness image information, and an optimum algorithm corresponding to various defects of the subject 101 is selected and defect detection is performed.

By doing so, these ring-shaped illuminations 1
31 and the light source 137 are selectively turned on, and the subject 101
By inputting the brightness image information of the dark-field image or the bright-field image to the control device 121, it is possible to improve the position measurement of the subject 101 and the inspection accuracy of various defects, and reduce the false detection.
In addition, the ring-shaped illumination 131 and the light source 137 are turned on at the same time, and the brightness image information obtained by superimposing the dark-field image and the bright-field image of the subject 101 is input to the control device 121. Various measurements of the subject 101 can be performed by various algorithm processes described above.

Next, when laser light is emitted from the laser diode 105, the laser light is emitted from the collimator lens 10.
6, polarization beam splitter 107, quarter-wave plate 108
The light reflected by the galvanometer mirror 104 is incident on the surface of the subject 101 through the dichroic mirror 134 and the objective lens 103 as measurement light. Further, the measurement light reflected on the surface of the subject 101 is the objective lens 103 and the dichroic mirror 1.
34, is reflected by the galvanometer mirror 104, and
The light is reflected by the polarization beam splitter 107 through the four-wave plate 108, and the primary image plane 1 is reflected by the first imaging lens 109.
It is focused on 10. The light flux that has passed through the primary image plane 110 passes through the pupil relay lens 112, is incident on the prism 113 having the half mirror surface 113a, and is reflected by the half mirror surface 113a.
The light is focused on the PSD 116 via the first diaphragm 114 and the separator lens 115.

The output from this PSD 116 is
The control device 1 is used as the brightness information of the bright-field image of the subject 101.
21 and the height calculation unit 122.

The control device 121 executes various inspections on the subject 101 on the basis of the brightness information of the bright field image of the subject 101, and the height calculator 122 responds to the swing angle of the galvanometer mirror 104. Based on the measurement position coordinates x and y on the surface of the subject 101 and the spot position signal obtained from the PSD 116, the height z on the surface of the subject 101.
Is calculated.

Note that such height measurement may be performed independently or simultaneously with the acquisition of the brightness image information of the dark field image or the bright field image of the subject 101 described above.

Next, the operation of the height calculator 122 will be described in detail.

First, the principle of height calculation by the height calculator 122 and its specific method will be described in detail.

FIG. 4 shows only the portion after the primary image plane 110 in FIG. 1, and the subject image on the primary image plane 110 is newly considered as the subject plane 101 '.

As system parameters, the focal length of the pupil relay lens (second objective lens) 112 is fp, the focal length of the separator lens 115 is fs, the imaging magnification of the primary image is M, and the center of the separator lens 115 from the optical axis. Up to h, pupil relay lens 112 and separator lens 1
The distance of 15 is D, and the NA of the first imaging lens 109 is NA.
_OB

The defocus amount (height) Z ′ of the primary image is ZM ² where Z is the height of the subject, and a light spot is formed on the PSD 116 at a position δ from the center. At this time, δ is as follows from the figure: δ = fs · tan α (1) tan α = h / (b−D) (2)

Therefore, the following equation is derived.

Δ = fs · h / (b−D) (3) h = fp · NA _OB / MP (4) Here, P is the pupil relay lens 11 as shown in FIG.
Ratio of the center of the diaphragm calculated on the pupil of 2 and the radius of the pupil P = Φ / h
Is.

Next, when b is calculated, since 1 / b = (1 / fp)-(1 / (fp + M ² Z)) (5), b = fp (fp + M ² Z) / M ² Z … (6) Putting these expressions together,

[Equation 1]

It becomes Further, as described above, the distance D between the separator lens 115 and the pupil relay lens 112 is f
p, so

[Equation 2]

Therefore, δ and Z have a completely linear relationship.

The actual measured quantity is δ. Therefore, by transforming equation (8),

[Equation 3]

It becomes

Next, based on such a principle, the subject 1
In order to specifically calculate the height Z of 01, the height calculation unit 122 provided in the control device 121 has the PSD 1
The spot position signal δ is received from 16. Then, the height calculator 122 calculates the spot position signal δ, the system parameters f, β, θ, and the mirror driver 12.
Using the measurement position information x and y sequentially input from 0, the height Z of each measurement position is continuously output.

According to this, height measurement having a wide measurement area and a wide dynamic range can be performed at an extremely high speed without moving up and down each optical system or the subject 101.

Therefore, in this way, the height of the surface of the subject 101 can be measured at high speed based on the principle of triangulation using the measuring light from the laser diode 105, and the ring-shaped illumination 131 and the light source 137 are used. By measuring the dark field image or the bright field image of the subject 101 with the line sensor camera 138 and acquiring the respective luminance image information, the position measurement of the subject 101 and the defect inspection are performed under the optimum conditions corresponding to the defect. Since it is also possible to perform the above, it is possible to perform various measurements such as height measurement and position measurement with high accuracy and efficiently in a short time. Further, by incorporating into the same objective lens 103, two-dimensional measuring means for obtaining two-dimensional image information such as dark-field image or bright-field image and three-dimensional measuring means by triangulation (at least measuring means for measuring height) are provided. Since a plurality of measuring means can be executed without moving the subject 101, the displacement of the subject 101 does not occur when switching the measuring means, and the burden on the operator can be greatly reduced. At the same time, the troublesome adjusting mechanism can be eliminated.

Further, in the above embodiment, the ½ wavelength plate 3 is rotatably and substantially orthogonal to the laser beam in front of the laser diode 105 for generating the laser beam, and the control signal from the controller 121 is used. Since the half-wave plate 3 is rotated by the motor 13 by the set rotation angle and the transmission amount of the laser light is set according to the rotation angle at this time, the power supply voltage of the conventional laser diode is changed. Compared with the conventional one, it is possible to capture a high-quality image without causing a change in the wavelength of the laser light, and in comparison with the one using the conventional ND filter of the related art, the laser light has various cross sections. In (1), there is no variation in the amount of light, a uniform amount of laser light can be continuously obtained, and stable dimming control of laser light can be realized.

[0075]

As described above, according to the present invention, various highly accurate measurements can be performed in a short time and the burden on the operator can be reduced. Further, even if the measurement location or the measurement condition of the subject is changed, it is possible to always stably capture the image with the optimum brightness.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of an embodiment of the present invention.

FIG. 2 is a diagram for explaining characteristics of a dichroic mirror used in one embodiment.

FIG. 3 is a diagram for explaining an arrangement state of dichroic mirrors used in one embodiment.

FIG. 4 is a schematic diagram for explaining the principle of triangulation in one embodiment.

FIG. 5 is a plan view showing a diaphragm for a light receiving element according to an embodiment.

[Explanation of symbols]

3 ... 1/2 wave plate 3a ... Gear 13 ... Motor 13a ... Gear 101 ... Subject 103 ... Objective lens 104 ... Galvano mirror 105 ... Laser diode 106 ... Collimating lens 107 ... Polarization beam splitter 108 ... Quarter wave plate 109 ... Imaging lens 110 ... Primary image surface 112 ... Pupil relay lens 113 ... Prism 113a ... Half mirror surface 113b ... Mirror surface 114 ... First diaphragm 115 ... Separator lens 116 ... Optical position detecting element (PSD: Positioning sensor) 120 ... Mirror Drive unit 121 ... Control device 122 ... Height calculation unit 124 ... Second diaphragm 125 ... Divided light receiving element 126 ... Measureability determination unit 131 ... Ring-shaped illumination 132 ... Optical fiber 133 ... Light source 134 ... Dichroic mirror 135 ... Imaging lens 136 ... Half mirror 137 ... Light source 138 ... Sensor camera 139 ... position calculating unit 140, 141 ... filter 201 ... half mirror 202 ... imaging lens 203 ... light receiving element 205 ... stage driver

Claims (11)

(57) [Claims] 1. A measurement light source that emits measurement light, an objective lens that is arranged so as to face the subject and converges the measurement light on the subject, and the measurement light that illuminates the subject through the objective lens. Scanning means for two-dimensionally scanning above and a certain distance from the center of the light beam reflected by the subject.
Is placed at a position where the diaphragm passes through a part of the light flux and a position conjugate with the pupil plane of the objective lens.
An imaging lens for condensing a light beam that has passed therethrough, and a light position detection means arranged on the converging surface of the imaging lens for detecting a variation amount of a light spot whose position changes according to the height of the subject. A first measuring means having a height calculating means for obtaining the height of the subject from the amount of fluctuation detected by the light position detecting means; and illuminating the subject with illumination light from an illumination light source, Second measuring means for receiving two-dimensional information by receiving reflected light or scattered light from the subject through the objective lens, wherein the objective lens has an optical axis in the first measuring means and the second measuring means. The measuring device, wherein the measuring device is provided at a position where the optical axis of the measuring means overlaps. 2. The measurement according to claim 1, wherein the two-dimensional information obtained by the second measuring means includes luminance image information of at least one of a dark field image and a bright field image of the subject. apparatus. 3. The two-dimensional information obtained by the second measuring means includes both luminance image information of a dark field image and luminance image information of a bright field image of the subject. The measuring device described. 4. A dichroic mirror for separating reflected light or scattered light from the subject into the first measuring means side and the second measuring means side, the surface of the dichroic mirror being The measuring apparatus according to claim 1, wherein the angle is set to be smaller than 45 ° with respect to a plane orthogonal to the optical axis of the objective lens. 5. The second measuring means, for each scanning line in the longitudinal direction of the scanning means on the subject,
The measuring device according to claim 1, further comprising a line sensor camera that captures a one-dimensional image deviated from a scanning line of the scanning unit. 6. The measuring device according to claim 1, wherein the illumination light source includes an epi-illumination light source. 7. The measuring device according to claim 1, wherein the illumination light source includes a light source that emits illumination light for dark-field images and a filter that converts the illumination light from the light source into a single wavelength. . 8. The measuring apparatus according to claim 1, wherein the first measuring means also obtains two-dimensional information of the subject. 9. The measuring apparatus according to claim 1, further comprising: a unit that detects a light amount of the reflected light of the illumination light; and a unit that controls the illumination light according to the detected light amount. . 10. The wavelength plate is further provided rotatably arranged in the optical path of the measurement light, and the wavelength plate has a portion corresponding to the reflection of the measurement light from the measurement light source. The measuring device according to claim 1, wherein the angle is set so as not to hit. 11. The second measuring means captures a dark field image or a bright field image of the subject, and the height measurement of the subject by the first measuring means and the second measuring means are performed. Dark field image or bright image of the subject
6. The field image is picked up at the same time.
The measuring device described.