JP2008209295A5 - - Google Patents
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- Publication number
- JP2008209295A5 JP2008209295A5 JP2007047264A JP2007047264A JP2008209295A5 JP 2008209295 A5 JP2008209295 A5 JP 2008209295A5 JP 2007047264 A JP2007047264 A JP 2007047264A JP 2007047264 A JP2007047264 A JP 2007047264A JP 2008209295 A5 JP2008209295 A5 JP 2008209295A5
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- measured
- sample
- recipe
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims 23
- 238000005259 measurement Methods 0.000 claims 7
- 238000000034 method Methods 0.000 claims 2
- 238000004220 aggregation Methods 0.000 claims 1
- 230000002776 aggregation Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007047264A JP2008209295A (ja) | 2007-02-27 | 2007-02-27 | 寸法測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007047264A JP2008209295A (ja) | 2007-02-27 | 2007-02-27 | 寸法測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008209295A JP2008209295A (ja) | 2008-09-11 |
| JP2008209295A5 true JP2008209295A5 (ko) | 2010-04-02 |
Family
ID=39785722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007047264A Pending JP2008209295A (ja) | 2007-02-27 | 2007-02-27 | 寸法測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008209295A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5243980B2 (ja) * | 2009-01-28 | 2013-07-24 | 新東エスプレシジョン株式会社 | 二次元測定装置 |
| CN103940344B (zh) * | 2014-04-11 | 2017-08-11 | 西安敏文电子科技有限公司 | 一种高精度远程位移传感器 |
| JP7220625B2 (ja) * | 2019-06-05 | 2023-02-10 | 東京エレクトロン株式会社 | 基板検査方法、基板検査システム及び制御装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040086166A1 (en) * | 2002-11-01 | 2004-05-06 | Photon Dynamics, Inc. | Method and apparatus for flat patterned media inspection |
| DE102004021601B4 (de) * | 2004-05-03 | 2020-10-22 | Heidelberger Druckmaschinen Ag | Inline-Messung und Regelung bei Druckmaschinen |
| JP4551164B2 (ja) * | 2004-09-09 | 2010-09-22 | 株式会社 ソキア・トプコン | 測定装置 |
-
2007
- 2007-02-27 JP JP2007047264A patent/JP2008209295A/ja active Pending
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