JP2008209295A5 - - Google Patents

Claims (3)

Comprising a plurality of imaging head includes a recipe creation unit for measuring a dimension of a pattern formed on the sample to be measured, and have groups Dzu to the created recipe, and imaged by any of the plurality of imaging heads In a dimension measuring apparatus that measures the dimension of the pattern formed on the sample to be measured from the obtained image signal,
The recipe creation unit measures dimensions based on image signals obtained by imaging the same measurement area of the same sample to be measured with the plurality of imaging heads, and the measured pattern dimension is between the imaging heads. A dimension measuring apparatus that creates a recipe by changing control parameters of each imaging head so as to be the same. A multi-imaging head type dimensional measurement apparatus comprising a plurality of imaging heads for imaging a pattern formed on a sample to be measured,
The measured value of the pattern measured based on the image signal obtained by imaging with the microscope camera of each imaging head using the pattern formed on the substrate of the sample to be measured is different for each imaging head. Regardless of this, a dimension measuring apparatus comprising a recipe creating unit that sets control parameters for each imaging head so as to be substantially the same between the imaging heads. A recipe creation method in a multi-imaging head type dimension measuring apparatus comprising a plurality of imaging heads equipped with a microscope camera for imaging a pattern formed on a sample to be measured,
A plurality of first dimensions having the dimensions of the pattern based on a plurality of first image signals obtained by repeatedly imaging the pattern formed on the sample to be measured with a microscope camera of a first imaging head a plurality of times. Aggregate the measured values, check if the reproducibility and measurement error of the aggregated first aggregated values are within specified values, and if within the specified values, calculate an average value from the plurality of first measured values Based on a reference value creation process to be calculated and used as a reference value, and a plurality of second image signals obtained by repeatedly imaging the same pattern as the sample to be measured with a microscope camera of the second imaging head a plurality of times. Then, a plurality of second measurement values of the dimension of the pattern are aggregated, and it is confirmed whether reproducibility and measurement error are within a prescribed value in the aggregated second aggregation value. The average of the multiple second measurements And calculating a difference between the calculated average value of the plurality of second measurement values and the reference value, and calculating the difference with respect to the second imaging head based on the first imaging head. A recipe creating method in a dimension measuring device, comprising: a recipe creating process set as an offset value.