JP2008207856A - Tray for semiconductor apparatus - Google Patents

Tray for semiconductor apparatus Download PDF

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Publication number
JP2008207856A
JP2008207856A JP2007048208A JP2007048208A JP2008207856A JP 2008207856 A JP2008207856 A JP 2008207856A JP 2007048208 A JP2007048208 A JP 2007048208A JP 2007048208 A JP2007048208 A JP 2007048208A JP 2008207856 A JP2008207856 A JP 2008207856A
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tray
semiconductor device
outer peripheral
peripheral wall
mark
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JP2008207856A5 (en
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Koushiyo Akiyama
幸章 秋山
Kenya Ono
建也 大野
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Renesas Technology Corp
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Renesas Technology Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a tray for a semiconductor apparatus which prevents erroneous storage of the semiconductor apparatus and mixture of different kinds among a plurality of trays from occurring by a simple constitution. <P>SOLUTION: The tray for the semiconductor apparatus has the outer peripheral frame and a semiconductor storing part surrounded by the outer peripheral frame and divided into a latticed shape. The outlines of respective trays are unified and a plurality of kinds of the semiconductor apparatus are respectively carried. A mark which enables discrimination from the trays on which the other kinds of semiconductor apparatus are carried is provided on the tray on which a kind of the semiconductor apparatus is carried. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は、半導体装置用トレイに適用して有効な技術に関し、例えば特定の規格に適合されるよう外形が統一されて複数種類の半導体装置が搭載される半導体装置用トレイに利用して有効な技術に関するものである。   The present invention relates to a technique that is effective when applied to a semiconductor device tray. For example, the present invention is effective when applied to a semiconductor device tray on which a plurality of types of semiconductor devices are mounted with a uniform outer shape so as to conform to a specific standard. It is about technology.

半導体装置用トレイは、外周枠に設けられたリブによって格子状に区画された半導体装置収納部を有している。上記半導体装置収納部には、それに適合された半導体装置が搭載され、かかる半導体装置の出荷搬送時に用いられる。このようなトレイに関しては、例えば特開平11−349087号公報、特開2005−067693号公報がある。また、トレイ設計基準としてJEDEC規格がある。
特開平11−349087号公報 特開2005−067693号公報
The tray for a semiconductor device has a semiconductor device storage section partitioned in a lattice shape by ribs provided on the outer peripheral frame. A semiconductor device adapted to the semiconductor device storage unit is mounted in the semiconductor device storage unit, and is used when the semiconductor device is shipped and transported. With regard to such a tray, there are, for example, Japanese Patent Application Laid-Open Nos. 11-349087 and 2005-067693. In addition, there is a JEDEC standard as a tray design standard.
Japanese Patent Laid-Open No. 11-349087 JP 2005-067693 A

トレイ設計基準であるJEDEC(Joint Electron Device Engineering Council)規格では、各部のサイズ等が細かく決められているだけである。半導体装置は、様々な大きさ及び形態のパッケージに関する規格が用意されている。例えば、BGA、LGA、SOPあるいはQFPのように外観が異なるパッケージでも同じ大きさのものが存在するので、誤って本来とは異なるトレイに収納して出荷してしまうことがある。更に、QFPパッケージでは、厚みのみが2.7mm、1.4mm及び1.0mmのように異なる複数通りのパッケージ(QFP,LQFP及びTQFP)があり、それぞれを区別してトレイに収納して出荷するには細心の注意が必要である。また、個々の半導体装置がそれぞれ正しいトレイに収納されていても、複数を積み重ねたときに異なるトレイを混在させてしまうという誤出荷や、実装機に搭載する際に半導体装置が収納された別のトレイを誤って搭載してしまうことにより、誤った実装を行ってしまうという問題を有する。そこで、本願発明者においては、異品種混入の発見を容易にした半導体装置用トレイの開発に至った。   The JEDEC (Joint Electron Device Engineering Council) standard, which is a tray design standard, only determines the size of each part in detail. Standards relating to packages of various sizes and forms are prepared for semiconductor devices. For example, packages having different sizes such as BGA, LGA, SOP, or QFP exist with the same size, and may be stored in a different tray by mistake and shipped. Furthermore, QFP packages are available in several different packages (QFP, LQFP, and TQFP) such that only the thickness is 2.7 mm, 1.4 mm, and 1.0 mm. You need to be careful. In addition, even if each semiconductor device is stored in the correct tray, different shipments in which different trays are mixed when a plurality of semiconductor devices are stacked, or another semiconductor device is stored when mounted on a mounting machine. There is a problem that incorrect mounting is performed by erroneously mounting the tray. Therefore, the inventors of the present application have developed a tray for a semiconductor device that facilitates the discovery of mixing of different varieties.

この発明の目的は、簡単な構成により半導体装置の誤収納や複数トレイ間での異品種混入を防止した半導体装置用トレイを提供することにある。この発明の前記ならびにそのほかの目的と新規な特徴は、本明細書の記述および添付図面から明らかになるであろう。   SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor device tray that prevents erroneous storage of semiconductor devices and mixing of different products among a plurality of trays with a simple configuration. The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

本願において開示される発明の一実施例を簡単に説明すれば、下記の通りである。すなわち、半導体装置用トレイは、外周枠とかかる外周枠によって囲まれ格子状に区画された半導体装置収納部とを有し、その外形が統一されて複数種類の半導体装置が搭載される。1つの種類の半導体装置が搭載されるトレイは、他の種類の半導体装置が搭載されるトレイとの識別を可能とする目印が設けられる。   An embodiment of the invention disclosed in the present application will be briefly described as follows. That is, the tray for a semiconductor device has an outer peripheral frame and a semiconductor device storage section surrounded by the outer peripheral frame and partitioned in a lattice shape, and the outer shape is unified and a plurality of types of semiconductor devices are mounted. A tray on which one type of semiconductor device is mounted is provided with a mark that enables discrimination from a tray on which another type of semiconductor device is mounted.

上記目印により半導体装置の誤収納や複数トレイ間での異品種混入を防止することができる。   With the above mark, it is possible to prevent erroneous storage of the semiconductor device and mixing of different types of products among a plurality of trays.

図1には、この発明に係る半導体装置用トレイの一実施例の平面図が示されている。半導体装置用トレイは、長方形からなる外壁部1と、短辺側の両側に設けられた把手部2及びトレイ識別用の目印としての複数からなる凹部(切欠)3を有する。上記外壁部1は、トレイ設計基準であるJEDEC規格に適合するよう形成される。上記外壁部1は、脚部又はスカート部とも呼ばれるものであり、かかる外壁部1に対して内側に格子状にリブが設けられて半導体装置の収納部が形成される。この収納部は、収納される半導体装置の大きさに対応して上記格子状に形成される図示しないリブによって個々の半導体装置を収納する収納部が構成される。   FIG. 1 shows a plan view of an embodiment of a tray for a semiconductor device according to the present invention. The tray for a semiconductor device has a rectangular outer wall portion 1, a grip portion 2 provided on both sides of the short side, and a plurality of concave portions (notches) 3 as tray identification marks. The outer wall 1 is formed so as to conform to the JEDEC standard, which is a tray design standard. The outer wall portion 1 is also referred to as a leg portion or a skirt portion, and ribs are provided on the inner side of the outer wall portion 1 to form a housing portion for a semiconductor device. The storage unit includes a storage unit that stores individual semiconductor devices by ribs (not shown) formed in a lattice shape corresponding to the size of the semiconductor device to be stored.

図2には、この発明に係る半導体装置用トレイの一実施例の平面図及び側面図が示されている。側面図は、長手方向の側面及び短手方向の側面がそれぞれ示されている。上記外壁部1により設けられたリブにより1つの半導体装置の収納部は、4×10のように区分けされている。外壁部1は、下部外壁部11と上部外壁部12に分けられている。上部外壁部12の外側周囲は、下部外周壁11の内側周囲よりも小さくされて、他の同様な半導体装置用トレイの上記下部外周壁11を嵌合して積み重ね可能にされる。つまり、上側トレイの上記下部外壁部11は、下側トレイの上部外壁部12に嵌め込んで多段積み重ね可能とされる。このような積み重ね可能であるという条件を満足させつつ、上記外周壁1の上記下部外周壁11の一部に、縦方向に設けられた上記複数の凹部3が設けられる。   FIG. 2 shows a plan view and a side view of an embodiment of a tray for a semiconductor device according to the present invention. In the side view, the side surface in the longitudinal direction and the side surface in the lateral direction are shown. A housing portion of one semiconductor device is divided into 4 × 10 by ribs provided by the outer wall portion 1. The outer wall portion 1 is divided into a lower outer wall portion 11 and an upper outer wall portion 12. The outer periphery of the upper outer wall portion 12 is made smaller than the inner periphery of the lower outer peripheral wall 11, and the lower outer peripheral wall 11 of another similar semiconductor device tray can be fitted and stacked. That is, the lower outer wall portion 11 of the upper tray is fitted into the upper outer wall portion 12 of the lower tray and can be stacked in multiple stages. The plurality of concave portions 3 provided in the vertical direction are provided in a part of the lower outer peripheral wall 11 of the outer peripheral wall 1 while satisfying such a condition that they can be stacked.

この実施例では、同図に示したように上記下部外壁部11の中点を基準にして左右に最大で5個ずつの上記凹部3が設けられ、特定のトレイ識別のために上記合計10個の凹部のうち、設けられる数とその位置の組み合わせにより複数通りの目印が付加される。例えば、1個の凹部3だけを用いてもそれが設けられる位置を異ならせることにより10通りの識別ができる目印を形成することができ、更に2個の凹部を用いた組み合わせでは9+8+7+…+1のように45通りの識別ができる目印を形成することができる。このようにして、トレイ側面部分に設けられる凹部の数と位置を管理することで、バーコードのように同一のコードを回避して一品一様のトレイを形成することができる。   In this embodiment, as shown in the figure, a maximum of five concave portions 3 are provided on the left and right with respect to the midpoint of the lower outer wall portion 11, and a total of ten concave portions are provided for specific tray identification. Among the recesses, a plurality of marks are added depending on the combination of the number provided and the positions thereof. For example, even if only one recess 3 is used, it is possible to form marks that can be identified in 10 ways by changing the positions where the recesses are provided, and in the combination using two recesses, 9 + 8 + 7 +. Thus, marks that can be identified in 45 ways can be formed. In this way, by managing the number and positions of the concave portions provided in the side surface portion of the tray, it is possible to avoid the same code as a bar code and form a uniform tray.

JEDEC規格では、搭載される半導体装置(パッケージ)の形状差異に係わらず、全てその外形が同一である。例えば、上記4×10のような収納部のうち*印を付した6箇所は、穴無しとされる(6positions without holes)。また、図3の一部拡大図に示したように、トレイの1つの角には、トレイインデックスが設けられる。このトレイインデックスを基準にしてトレイの方向が決められる。このトレイインデックスを基準にして、収納部に収納される半導体装置のICインディックスの位置が決められる。つまり、トレイのインディックス(図2の右下部、図3の左下部)に対して半導体装置(IC)の1ピンが同じ方向(図3では左下)になるように配列させて収納される。そして、静電気対策として、成形材料にカーボンが練り込まれたものが大半を占め、色調が黒で同一であるために、前記のような目印が無いと誤って異なる種類のトレイが積み重ねられた場合でも、これを見分けることが困難となるものである。しかしながら、上記のような目印を付すことによりその発見が容易になる。   In the JEDEC standard, the outer shape is the same regardless of the shape difference of the mounted semiconductor device (package). For example, six locations marked with * in the storage section such as 4 × 10 are considered to have no holes (6 positions without holes). Also, as shown in the partially enlarged view of FIG. 3, a tray index is provided at one corner of the tray. The tray direction is determined based on the tray index. Based on the tray index, the position of the IC index of the semiconductor device stored in the storage unit is determined. That is, one pin of the semiconductor device (IC) is arranged and stored in the same direction (lower left in FIG. 3) with respect to the tray index (lower right in FIG. 2, lower left in FIG. 3). And as a countermeasure against static electricity, most of the molding materials are kneaded with carbon, and because the color tone is black and the same, if different types of trays are mistakenly stacked without the above-mentioned mark However, it is difficult to distinguish this. However, the discovery is facilitated by attaching the mark as described above.

図4には、この発明に係る半導体装置用トレイの部分拡大した凹部の一実施例の説明図が示されている。この実施例では、上記目印としてのキリコミ(凹部)3が設けられる下部外壁部11は、上記トレイインデックスが左側に設けられる下部外壁部11とされる。つまり、長手方向の下部外壁部11であって、図1のように中央部の凹部を中心にして左右の特定の位置に前記のように最大で5個ずつの凹部が設けられるように決められる。   FIG. 4 is an explanatory view of an embodiment of a partially enlarged recess of the semiconductor device tray according to the present invention. In this embodiment, the lower outer wall portion 11 where the mark (concave portion) 3 as the mark is provided is the lower outer wall portion 11 where the tray index is provided on the left side. In other words, the lower outer wall portion 11 in the longitudinal direction is determined such that a maximum of five concave portions are provided at specific positions on the left and right with the central concave portion as shown in FIG. 1 as described above. .

図5には、この発明に係る半導体装置用トレイが装着される実装機の一実施例の概略説明図が示されている。実装機(マウンター)は、部品収納部を有する。部品収納部は、同図に拡大透視図として示されているように、前記のようにそれぞれに半導体装置が収納され、積み重ねられた複数のトレイ(外壁1がトレイの代表として示されている)が収納(装着)される。このように装着されたトレイ束の下部(又は上部)からトレイ1を1枚づつ切り出し、スライド治具4に載せられて水平移動し装置内部に移動させられる。上記スライド治具4は、アルミニュウム等の金属製の部品である。このように、複数のトレイが積み重ねられて装着されるので、前記目印により異種トレイを混合を簡単に見つけ出すことができる。   FIG. 5 is a schematic explanatory view of one embodiment of a mounting machine to which the semiconductor device tray according to the present invention is mounted. The mounting machine (mounter) has a component storage unit. As shown in the figure as an enlarged perspective view, the component storage section includes a plurality of trays in which semiconductor devices are stored and stacked as described above (the outer wall 1 is shown as a representative of the tray). Is stored (mounted). The trays 1 are cut out one by one from the lower part (or upper part) of the tray bundle thus mounted, placed on the slide jig 4 and moved horizontally to be moved into the apparatus. The slide jig 4 is a metal part such as aluminum. In this way, since a plurality of trays are stacked and mounted, it is possible to easily find a mixture of different types of trays using the mark.

図6には、この発明に係る半導体装置用トレイを重ねた状態の一例の側面図が示されている。この実施例では、目印は前記のような凸部に代えて梨地が利用される。つまり、トレイは、その表面が滑らかであるので、そこに細かな凹凸による梨地を設けて前記凹部と同等の縦方向の帯状とする。1つだけ種類の異なる、つまりは梨地の数及び位置が異なるパターンが設けられるトレイが混合した場合には、上記一様なパターンとならずに目視において簡単に発見することができる。このように、異なる型番(=異なるパターン)のトレイは、上記トレイインデックスで特定された側面の目視により異品種混入の発見が容易となる。   FIG. 6 shows a side view of an example of a state in which semiconductor device trays according to the present invention are stacked. In this embodiment, the mark is made of satin instead of the convex portion as described above. That is, since the surface of the tray is smooth, a textured surface with fine unevenness is provided on the tray so as to have a vertical belt shape equivalent to the concave portion. When trays with different patterns, i.e., patterns with different numbers and positions, are mixed, they can be easily found by visual inspection without the uniform pattern. In this way, trays of different model numbers (= different patterns) can easily find mixed different types of products by visually observing the side surface specified by the tray index.

図7には、この発明に係る半導体用トレイを用いた半導体装置の出荷梱包の説明図が示されている。半導体装置が収納された複数のトレイは、積み重ねられて長辺両側に設けられたバンドで纏められる。上部には、乾燥材と湿度インジケータが載置され、防湿袋に入れられる。防湿袋の上面には、内装ラベルが貼られられる。そして、内装箱に入れられテープで封印される。この時、本願発明に係るトレイを用いた場合、前記図7に示したように異なるトレイの誤った混合が簡単に見分けることができる。   FIG. 7 shows an explanatory view of the shipping packaging of the semiconductor device using the semiconductor tray according to the present invention. The plurality of trays in which the semiconductor devices are stored are stacked and collected by bands provided on both sides of the long side. A desiccant and a humidity indicator are placed on the top and placed in a moisture-proof bag. An interior label is affixed to the top surface of the moisture-proof bag. Then it is put in an interior box and sealed with tape. At this time, when the tray according to the present invention is used, erroneous mixing of different trays can be easily distinguished as shown in FIG.

この発明に係る半導体用トレイは、リユーストレイ運用時の選別作業を容易にすることが可能となり、異品種品の誤納入の軽減に繋がる。リユーストレイとは、半導体メーカが一度顧客(実装メーカ)に製品を搭載して納入したトレイを、専門の業者が回収して再利用できるように選別・洗浄等を施し、再度半導体メーカに納めることをいい、資源有効利用に供するシステムである。このような洗浄等において、前記凹部や梨地によるマークは、耐久性を確保することができるし、洗浄の障害にはならない。   The semiconductor tray according to the present invention can facilitate the sorting operation when the reuse tray is operated, leading to reduction of erroneous delivery of different products. A reuse tray is a tray that a semiconductor manufacturer has once mounted and delivered to a customer (mounting manufacturer). The tray is sorted and washed so that it can be collected and reused by a specialist, and then delivered again to the semiconductor manufacturer. This is a system for effective use of resources. In such cleaning and the like, the mark by the concave portion or the satin can ensure durability and does not become an obstacle to cleaning.

以上、本発明者によってなされた発明を実施態様にもとづき具体的に説明したが、本発明は上記実施態様に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能であることはいうまでもない。例えば、上記トレイに設けられる識別用の目印としての凹部は、凸部であってもよい。このように識別のための目印は、種々の実施形態を採ることができるものである。上記トレイに設けられる凹部の形状は、三角形の他に半円形、四角形等種々の実施形態を採ることができる。この発明は、前記JEDEC規格に適合されるもの他、JEDEC規格のように外壁部が上部と下部に分けられて上記同様に嵌合可能にされるものであれば何であってもよい。この発明は、半導体装置用トレイに広く利用することができる。   As mentioned above, the invention made by the present inventor has been specifically described based on the embodiments. However, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. Not too long. For example, the concave portion as an identification mark provided on the tray may be a convex portion. As described above, the identification mark can take various embodiments. The shape of the concave portion provided in the tray can take various embodiments such as a semicircular shape and a rectangular shape in addition to the triangular shape. The present invention may be anything as long as the outer wall is divided into an upper part and a lower part and can be fitted in the same manner as described above, in addition to the one that conforms to the JEDEC standard, as in the JEDEC standard. The present invention can be widely used for a tray for a semiconductor device.

この発明に係る半導体装置用トレイの一実施例を示す平面図である。It is a top view which shows one Example of the tray for semiconductor devices which concerns on this invention. この発明に係る半導体装置用トレイの一実施例の平面図及び側面図である。It is the top view and side view of one Example of the tray for semiconductor devices which concern on this invention. 図2のトレイの一部拡大図である。FIG. 3 is a partially enlarged view of the tray of FIG. 2. この発明に係る半導体装置用トレイの部分拡大した凹部の説明図である。It is explanatory drawing of the recessed part to which the partial expansion of the tray for semiconductor devices which concerns on this invention was carried out. この発明係る半導体装置用トレイが装着される実装機の一実施例を示す概略説明図である。It is a schematic explanatory drawing which shows one Example of the mounting machine with which the tray for semiconductor devices which concerns on this invention is mounted | worn. この発明に係る半導体装置用トレイを重ねた状態の一例を示す側面図である。It is a side view showing an example of the state where the tray for semiconductor devices concerning this invention was piled up. この発明に係る半導体用トレイを用いた半導体装置の出荷梱包の説明図である。It is explanatory drawing of the shipping packaging of the semiconductor device using the tray for semiconductors concerning this invention.

符号の説明Explanation of symbols

1…外壁部、11,…下部外壁部、12…上部外壁部、13…天面、2…把手、3…目印(凹部、梨地)   DESCRIPTION OF SYMBOLS 1 ... Outer wall part, 11 ... Lower outer wall part, 12 ... Upper outer wall part, 13 ... Top surface, 2 ... Grip, 3 ... Mark (recessed part, satin)

Claims (5)

外周壁と、
上記外周枠によって囲まれ、格子状に区画された半導体装置収納部とを有し、
外形が統一されて複数種類の半導体装置が搭載される半導体装置用トレイであって、
1つの種類の半導体装置が搭載されるトレイは、他の種類の半導体装置が搭載されるトレイとの識別を可能とする目印を有する半導体装置用トレイ。
An outer wall,
A semiconductor device housing portion surrounded by the outer peripheral frame and partitioned in a lattice shape;
A semiconductor device tray in which a plurality of types of semiconductor devices are mounted with a uniform outer shape,
The tray on which one type of semiconductor device is mounted is a tray for a semiconductor device having a mark that enables discrimination from a tray on which another type of semiconductor device is mounted.
請求項1において、
上記外周壁は、
上部外周壁と下部外周壁とに分けられ、
上記上部外周壁の外側周囲は、下部外周壁の内側周囲よりも小さくされて、他の半導体装置用トレイの上記下部外周壁を嵌合して積み重ね可能にされ、
上記外周壁の外側の同じ箇所に上記目印を有する半導体装置用トレイ。
In claim 1,
The outer peripheral wall is
It is divided into an upper outer peripheral wall and a lower outer peripheral wall,
The outer periphery of the upper outer peripheral wall is made smaller than the inner periphery of the lower outer peripheral wall, and can be stacked by fitting the lower outer peripheral wall of another semiconductor device tray,
The tray for semiconductor devices which has the said mark in the same location outside the said outer peripheral wall.
請求項2において、
上記目印は、外周壁面に縦方向に設けられた複数の突起又は溝の数、位置、間隔の組み合わせである半導体装置用トレイ。
In claim 2,
The mark is a tray for a semiconductor device that is a combination of the number, position, and interval of a plurality of protrusions or grooves provided in the vertical direction on the outer peripheral wall surface.
請求項2において、
上記目印は、外周壁面に縦方向に設けられた複数の帯状の梨地の数、位置、間隔の組み合わせである半導体装置用トレイ。
In claim 2,
The mark is a tray for a semiconductor device, which is a combination of the number, position, and interval of a plurality of belt-like satin finishes provided in the vertical direction on the outer peripheral wall surface.
請求項3又は4において、
上記半導体装置用トレイは、成形材料にカーボンが練り込まれて色調が同一であり、JEDEC規格を適合する半導体装置用トレイ。
In claim 3 or 4,
The semiconductor device tray is a semiconductor device tray that has the same color tone by kneading carbon into the molding material and conforms to the JEDEC standard.
JP2007048208A 2007-02-28 2007-02-28 Tray for semiconductor apparatus Pending JP2008207856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007048208A JP2008207856A (en) 2007-02-28 2007-02-28 Tray for semiconductor apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007048208A JP2008207856A (en) 2007-02-28 2007-02-28 Tray for semiconductor apparatus

Publications (2)

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JP2008207856A true JP2008207856A (en) 2008-09-11
JP2008207856A5 JP2008207856A5 (en) 2010-04-02

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110246790A (en) * 2018-03-07 2019-09-17 美国莱迪思半导体公司 Chip tray and its manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290288U (en) * 1988-12-28 1990-07-17
JP2004059083A (en) * 2002-07-30 2004-02-26 Sumitomo Chem Co Ltd Tray for semi-conductor integrated circuit device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290288U (en) * 1988-12-28 1990-07-17
JP2004059083A (en) * 2002-07-30 2004-02-26 Sumitomo Chem Co Ltd Tray for semi-conductor integrated circuit device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110246790A (en) * 2018-03-07 2019-09-17 美国莱迪思半导体公司 Chip tray and its manufacturing method
CN110246790B (en) * 2018-03-07 2023-11-24 美国莱迪思半导体公司 Chip tray and manufacturing method thereof

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