JP2008207483A - Liquid droplet ejector and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make an actuator compact and its density high without increasing the area of a flexible wiring material. <P>SOLUTION: A common electrode of the actuator 18 is exposed to its side end part 18a. The flexible wiring material 19 is connected to a surface of the actuator 18 with terminal parts of a plurality of individual electrodes arranged on its top surface. A plurality of individual conductors 19a formed to a bottom surface of the flexible wiring material 19 are connected to the terminal parts of the individual electrodes. A grounding conduction part 19b connected to the common electrode is formed to the top surface of the flexible wiring material 19 exposing a copper foil. At the same time, an earth wiring material 20 with a grounding conductor 20a connects the grounding conduction part 19b and an edge (a) of the common electrode exposed to the side end part 18a of the actuator 18 with each other. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a droplet discharge device such as a head unit used in an ink jet printer and a method for manufacturing the same.

  In an inkjet printer, an inkjet head that transports ink supplied from an ink tank and ejects ink droplets from a nozzle toward a recording sheet or the like is already known. For example, an inkjet head disclosed in Japanese Patent Application Laid-Open No. 2006-231913 is a flow in which a plurality of pressure chambers corresponding to each nozzle are provided in a flow path from a common liquid chamber connected to an ink supply port to a plurality of nozzles. A path unit and a piezoelectric actuator that is stacked on the flow path unit and selectively changes the volume of the pressure chamber are provided.

The piezoelectric actuator has a configuration in which common electrodes and individual electrodes are alternately interposed between piezoelectric sheets in which a plurality of sheets are laminated, and these individual electrodes and common electrodes are used for electrical connection with an external device. It is necessary to be conductively connected to the flexible wiring material. Therefore, the individual electrode and the common electrode are each provided with a terminal portion which is a surface electrode on the upper surface of the uppermost piezoelectric sheet of the piezoelectric actuator, and is electrically connected through the through holes from each electrode between the piezoelectric sheets. By connecting the terminal portion and the terminal portion of the flexible wiring material, the individual electrode and the common electrode are electrically connected to the external device. In addition, on the surface of the piezoelectric actuator, the terminal portions of the individual electrodes are formed in a plurality of rows corresponding to the pressure chambers (and nozzles) of the flow path unit, and the terminal portions of the common electrodes are the terminal portions of the individual electrodes. Are provided on both sides of the group (the short side of the piezoelectric actuator).
JP 2006-231913 A

  By the way, in recent years, there is a demand for a high-performance inkjet printer that is small in size and has high speed and high resolution. Accordingly, it is required to further increase the number of nozzles and the number of nozzle rows and further increase the corresponding individual electrodes without increasing the area of the inkjet head. However, like Patent Document 1, on the same surface of the piezoelectric actuator, the terminal portions of the common electrode together with the individual electrodes need to be arranged side by side on both sides of the group of the terminal portions of the individual electrodes for conduction with the flexible wiring material. Therefore, there has been a limit to increasing the density of individual electrodes without increasing the area of the piezoelectric actuator. Furthermore, the flexible wiring material is formed with a number of individual conductors connected to the terminal portions of the individual electrodes of the piezoelectric actuator and a ground conductor connected to the terminal portions of the common electrode of the piezoelectric actuator. Wiring for connecting to an external power supply is formed. Of the wires, the drive circuit that sends a drive signal to the piezoelectric actuator mounted on the surface of the flexible wiring material and the wires that connect many individual conductor groups must be routed around the wires connected to the ground conductor. However, if the number of the individual electrodes is increased without increasing the area of the flexible wiring material, the density between the wirings becomes a narrow pitch, resulting in a production limit.

  In view of the above, an object of the present invention is to increase the density of the electrodes without increasing the area of the flexible wiring material and the actuator as the electrodes of the droplet discharge device are increased in density.

  The present invention has been made in view of the circumstances as described above, and a droplet discharge device according to the present invention includes a flow path unit provided with a plurality of pressure chambers respectively corresponding to a plurality of nozzles that discharge droplets. And an actuator that is stacked on the flow path unit so as to face the pressure chamber and selectively drives a plurality of active portions corresponding to the plurality of pressure chambers, and is connected to a surface of the actuator, and includes a plurality of individual A flexible wiring material having a conductor and a ground wiring material having a ground conductor, wherein the actuator corresponds to the common electrode continuously disposed corresponding to the plurality of active portions and to the plurality of active portions, respectively. A plurality of individual electrodes arranged individually, and the plurality of individual conductors of the flexible wiring material are respectively connected to the plurality of individual electrodes of the actuator, The ground conductor of the serial ground wiring material, characterized in that it is connected to the common electrode of the actuator.

  According to the above configuration, since the ground wiring member separate from the flexible wiring member is used and the ground conductor of the ground wiring member is connected to the common electrode of the actuator, the ground conductor is formed on the flexible wiring member. There is no need. Therefore, it is possible to suppress an increase in area of the flexible wiring material. In addition, since individual conductors can be added to the area where the ground conductor was formed in the past, the individual conductors can be added without increasing the area of the flexible wiring material, and the wiring pitch of the flexible wiring material becomes narrower. This can be suppressed. Furthermore, since the ground wiring material is separate from the flexible wiring material, the layout of the ground wiring material is not restricted by individual conductors, and the degree of freedom in arranging the ground wiring material is improved. Therefore, the portion connected to the ground conductor of the ground wiring member in the common electrode of the actuator can be formed at a relatively free position, and the actuator can be downsized and the density of the individual electrodes can be increased.

  The actuator is configured to sandwich a piezoelectric body between the common electrode and the plurality of individual electrodes, and an end edge of the common electrode is exposed at a side end of the actuator, and the ground wiring member A ground conductor may be connected to the edge portion of the common electrode via a conductive adhesive.

  According to the above configuration, since the end portion of the common electrode exposed at the side end portion of the actuator is connected to the ground conductor of the ground wiring material, the common electrode needs to be provided with a terminal portion that becomes a conventional surface electrode. Therefore, the area of the actuator can be reduced. In addition, individual electrodes can be added on the surface where the common electrode is conventionally provided, and the actuator can be increased in density without increasing the area. Furthermore, since the ground conductor of the ground wiring member is connected to the end edge portion of the common electrode via the conductive adhesive, it is possible to ensure conduction stably and easily.

  The edge portions of the common electrode are exposed at the side edge portions on both sides of the actuator, and the conductive adhesive that conducts with the ground conductor of the ground wiring member includes at least the edge portions on both sides. May be applied.

  According to the above configuration, since the common electrode is grounded at both opposing side ends of the actuator, the current direction between the plurality of individual electrodes and the common electrode can be distributed to both sides so as not to be one direction. The electrical balance in the actuator is good.

  The flow path unit may be made of a conductive material, and the conductive adhesive may be in contact with the flow path unit.

  According to the above configuration, the ground conductor of the ground wiring member is electrically connected to the flow path unit via the conductive adhesive, and there is no need to separately ground the flow path unit made of a conductive material. Therefore, the number of parts, the number of manufacturing steps, and the manufacturing cost for grounding the flow path unit can be reduced.

  The actuator is overlaid on a part of the flow path unit, and a substantially frame-shaped frame plate made of a conductive material is overlaid on the flow path unit so as to surround the actuator. The agent may be applied to a gap between the side end portion of the actuator and the inner peripheral edge portion of the frame plate.

  According to the said structure, a conductive adhesive is positioned between the outer periphery of an actuator, and the inner periphery of a frame board, and can apply | coat and solidify a conductive adhesive accurately and easily. In addition, since the conductive adhesive is applied to the gap between the actuator and the frame plate, the ground conductor of the ground wiring member can be conducted to the frame plate via the conductive adhesive, and is made of a conductive material. There is no need to ground the frame plate separately. Therefore, the number of parts and the number of manufacturing steps for grounding the frame plate can be reduced.

  The flexible wiring material has a ground conductive portion exposed on a surface opposite to the surface facing the actuator, and the ground wiring material connected to the ground conductive portion has an extra length portion. Also good.

  According to the above configuration, even when the ground wiring material is bent as the flexible wiring material is bent, the bending is absorbed by the extra length portion, and the generation of excessive stress on the ground wiring material is prevented. It is possible to prevent the connection between the ground wiring material and the flexible wiring material from being peeled off.

  One end of the flexible wiring material is connected to the individual electrode of the actuator, and the other end is connected to a relay circuit board connected to an external signal source, and the ground wiring material is connected to one end of the flexible wiring material. The part may be connected to the common electrode, and the other end may be connected to the relay circuit board.

  According to the above configuration, since there is no need to provide a grounding conductive portion in the flexible wiring material, and the ground wiring material is directly grounded to the relay circuit board, the increase in the area of the flexible wiring material is suppressed, and the addition of individual conductors However, it is possible to prevent the wiring pitch from becoming narrow.

  The surface of the actuator is provided with a terminal portion of each individual electrode exposed in a row and a terminal portion of the common electrode exposed on one end side in a direction orthogonal to the row direction, and the flexible The wiring member extends to the other end side in a direction substantially parallel to the surface of the actuator and perpendicular to the row, and the individual conductors of the flexible wiring member are connected to the terminal portions of the individual electrodes. The ground conductor of the ground wiring member may be connected to the terminal portion of the common electrode.

  According to the above configuration, the terminal portion of the common electrode of the actuator is arranged at a position corresponding to one end side of the flexible wiring material, but the ground wiring is made to the terminal portion of the common electrode using the ground wiring material. Therefore, it is not necessary to provide a ground conductor that bypasses the individual conductors in the flexible wiring material. Therefore, an increase in area of the flexible wiring material can be suppressed.

  The flexible wiring material has a grounding conductive portion exposed on a surface opposite to the facing surface on the other end side, and an independent conductor exposed on both surfaces on the one end side, and the ground wiring material is the flexible wiring material. A cable module having the flexible wiring material and the ground wiring material is configured by being connected between the ground conductive portion and the independent conductor on a surface opposite to the facing surface of the wiring material. The portion of the independent conductor exposed on the facing surface of the flexible wiring member may be connected to the terminal portion of the common electrode.

  According to the above configuration, since the cable module is formed by connecting the flexible wiring material and the ground wiring material, both the flexible wiring material and the ground wiring material can be connected to the actuator by simply connecting the cable module to the actuator. They can be connected at the same time, improving manufacturing efficiency. Further, since the cable module is configured in parallel with the direction in which the flexible wiring material extends, space can be saved.

  The flexible wiring material has independent conductors exposed on both sides at the one end side, the other end side is connected to a relay circuit board connected to an external signal source, and the ground wiring material is formed of the flexible wiring material. A cable module having the flexible wiring material and the ground wiring material is configured by being connected between the independent conductor and the relay circuit board on a surface opposite to the facing surface, and the independent wiring The part exposed to the said opposing surface of the said flexible wiring material of a conductor may be connected to the terminal part of the said common electrode.

  According to the above configuration, since there is no need to provide a grounding conductive portion in the flexible wiring material, and the ground wiring material is directly grounded to the relay circuit board, the increase in the area of the flexible wiring material is suppressed, and the addition of individual conductors However, it is possible to prevent the wiring pitch from becoming narrow.

  The method for manufacturing a droplet discharge device according to the present invention is configured such that a plurality of active portions of a piezoelectric body are sandwiched between a common electrode and a plurality of individual electrodes, and the terminal portions of the individual electrodes are exposed on the surface. The common electrode is continuously arranged corresponding to the plurality of active portions, and the plurality of individual electrodes are individually arranged corresponding to the plurality of active portions, respectively. And forming a plurality of pressure chambers corresponding to a plurality of nozzles for discharging liquid droplets, and a step of forming an actuator in which the edge portion of the common electrode is exposed at a side end portion that is a cut surface. A step of causing the pressure chamber and the active portion to correspond to the flow path unit and overlapping the actuator, and connecting a plurality of individual conductors of a flexible wiring material to the terminal portions of the individual electrodes of the actuator, respectively. And a process of A step of applying a conductive adhesive to the edge of the common electrode of the serial actuators, characterized by a grounding conductor of the ground wiring member and a, a step of connecting to the conductive adhesive.

  According to the above-described method, the edge portion that becomes the terminal of the common electrode is formed only by cutting the laminated body into a required shape, and the number of manufacturing steps can be reduced by an easy method. In addition, since a ground wiring material separate from the flexible wiring material is used and the ground conductor of the ground wiring material is connected to the common electrode of the actuator, it is not necessary to form a ground conductor in the flexible wiring material. Therefore, it is possible to suppress an increase in area of the flexible wiring material. In addition, since the ground wiring material is separate from the flexible wiring material, the layout of the ground wiring material is not limited to individual conductors, and the degree of freedom in arranging the ground wiring material is improved. Therefore, the portion connected to the ground conductor of the ground wiring member in the common electrode of the actuator can be formed at a relatively free position, and the actuator can be downsized and densified.

  As is clear from the above description, according to the present invention, as the electrode density of the droplet discharge device increases, the electrode density can be increased without increasing the area of the flexible wiring material and actuator. It becomes possible.

  Embodiments according to the present invention will be described below with reference to the drawings. In the following description, the direction in which ink is ejected from the inkjet head is defined as the lower side or the lower side, and the opposite side is defined as the upper side or the upper side.

(First embodiment)
FIG. 1 is a schematic perspective view showing a main part of an ink jet printer 1 according to a first embodiment of the present invention. As shown in FIG. 1, the ink jet printer 1 has a pair of guide rails 2 and 3 arranged substantially in parallel, and a head unit 4 (droplet discharge device) slides in the scanning direction on the guide rails 2 and 3. Supported as possible. The head unit 4 is connected to a plurality of ink supply tubes 9 for supplying four colors of ink (black, cyan, magenta, yellow) from an ink tank (not shown). In the head unit 4, the nozzle 49 is exposed downward and the ink jet head 14 (see FIG. 2) is mounted. From the ink jet head 14 toward the recording paper conveyed below the nozzle unit in a direction perpendicular to the scanning direction. Ink is ejected. The head unit 4 is joined to a timing belt 7 wound around a pair of pulleys 5 and 6, and the timing belt 7 is disposed substantially parallel to the extending direction of the guide rail 3. One pulley 5 is provided with a motor 8 that drives forward and reverse rotation. When the pulley 5 is driven forward and reverse, the timing belt 7 reciprocates and the head unit 4 moves along the guide rails 2 and 3. Scanned.

  FIG. 2 is an exploded perspective view of the head unit 4 of the inkjet printer 1 shown in FIG. As shown in FIG. 2, the head unit 4 includes a buffer tank 11, a carriage 12, a frame plate 13, an ink jet head 14, and a protective cover 15 in order from the top, and further on the main body side of the ink jet printer. It further includes a relay circuit board 70 connected via a flexible cable 72 to a main control circuit board (not shown) that is fixedly installed. The inkjet head 14 having the frame plate 13 and the protective cover 15 bonded and fixed is bonded and fixed to the lower side of the bottom surface 12a of the head unit 4, and the buffer tank 11 is provided above the bottom surface 12a of the head unit 4. A relay circuit board 50 is supported on the upper surface of the carriage 12.

  The buffer tank 11 temporarily stores four colors of ink supplied from a cartridge type ink tank (not shown) via an ink supply tube 9 (see FIG. 1), and supplies the ink to the inkjet head 14 as appropriate. It has become. Four ink chambers corresponding to four colors of ink are formed inside the buffer tank 11 and communicated with an ink outlet 11 a for supplying ink in each ink chamber to the inkjet head 14. . Further, the storage amount of the buffer tank 11 is smaller than the ink amount stored in the ink tank (not shown).

  The carriage 12 is a resin case having a concave cross section having a bottom wall portion 12a and a side wall portion 12c. The ink jet head includes a buffer tank 11 accommodated in the case, and includes a frame plate 13 and a protective cover 15. 14 is fixed to the lower surface side and is slidably placed on the guide rails 5 and 6 (see FIG. 1). The bottom surface 12a is formed with a slit 12b for inserting a flexible wiring member 19 of the inkjet head 14 described later. The flexible wiring member 19 passes through the slit 12b to bring the driving IC chip 22 into contact with a heat radiating plate (not shown), and is drawn out upward between the buffer tank 11 and the side wall portion 12c of the carriage 12. It is connected to the connector 71 of the relay circuit board 70 that is connected to the flexible wiring member 72. The relay circuit board 70 is formed by printing a wiring pattern on a rigid electrically insulating board, and has a connector 71 to which a terminal at one end of the flexible wiring material 19 is detachably connected. As the connector 71, various types such as a type in which a terminal is inserted / extracted and a type in which a terminal is sandwiched by a lever member are used. The relay circuit board 70 has a common electrode terminal 73 to be described later on its upper surface.

The inkjet head 14 includes a flow path unit 17 having a plurality of nozzles 49 (see FIGS. 5 and 6) on the lowermost surface for discharging ink droplets, and is stacked on a part of the upper surface of the flow path unit 17. A piezoelectric drive actuator 18 that selectively applies a discharge pressure to the ink of the ink, a flexible flat flexible wiring member 19 having one end connected to the upper surface of the actuator 18 and the other end drawn in the scanning direction; And an earth wiring member 20 connected to a side end portion of the actuator 18. Details of the inkjet head 14 will be described later.
The protective cover 15 has a U shape in plan view, and is attached to the lower surface of the frame plate 13 so as to be disposed around the inkjet head 14. Accordingly, the nozzle 49 of the inkjet head 14 is protected by the protective cover 15 in a state where the step between the inkjet head 14 and the frame plate 13 is eliminated.

  FIG. 3 is a perspective view showing a state in which the frame plate 13 and the protective cover 15 are laminated on the inkjet head 14 shown in FIG. As shown in FIGS. 2 and 3, the frame plate 13 is a flat frame-like body made of a highly rigid conductive material such as metal, and includes a rectangular window portion 13a and four ink passage holes 13b. Have. The window portion 13a is formed so as to penetrate at a position corresponding to the actuator 18, and is formed to be larger than the outer shape of the actuator 18 in plan view and smaller than the outer shape of the flow path unit 17, and from the window portion 13a, ink jetting is performed. The other end of the flexible wiring member 19 of the head 14 is pulled out, and the actuator 18 is bonded to the flow path unit 17 so as to be exposed from the window portion 13a. Further, the ink passage hole 13b is formed so as to penetrate to an ink supply port 17a described later of the flow path unit 17.

  Further, as shown in FIG. 2, the inkjet head in which the frame plate 13 and the protective cover 15 are bonded and fixed has the lower surface of the bottom surface 12a of the carriage 12 and the frame plate 13 bonded and fixed, and the opening of the bottom surface 12a of the carriage 12 (not shown). The ink passage hole 13b is exposed from the portion. The ink passage hole 13b is provided with an elastic sealing material 23 between the ink outlet 11a of the buffer tank 11 accommodated in the carriage 12. The ink outlet 11a of the buffer tank 11 is connected to the elastic sealing material 23 and the frame. The ink supply port 17 a of the flow path unit 17 is in airtight communication with the ink passage hole 13 b of the plate 13.

  Next, the inkjet head 14 will be described. 4 is a plan view of the inkjet head 14 shown in FIG. 5 is a cross-sectional view taken along line VV in FIG. 6 is a sectional view taken along line VI-VI in FIG. For the sake of explanation, the flexible wiring member 19 is omitted.

  The inkjet head 14 has a configuration in which the flow path unit 17 and the actuator 18 are laminated and bonded as described above, the flexible wiring material 19 is joined to the upper surface of the actuator 18, and the ground wiring material 20 is further connected.

  The flow path unit 17 has a configuration in which a plurality of plates 43 to 47 having openings that form ink flow paths are laminated and bonded. In the lowermost plate 47, a plurality of nozzles 49 are formed so as to be exposed downward, arranged in a staggered pattern in the column direction (perpendicular to the scanning direction), and arranged in four columns for each ink color in the scanning direction. Yes. In the uppermost plate 43, a plurality of pressure chambers 39 are formed in an elongated shape in plan view, arranged in a staggered manner in the column direction corresponding to the plurality of nozzles 49, and arranged in four rows in the scanning direction. . One end of the pressure chamber 39 in the longitudinal direction (scanning direction) is formed to communicate with a plurality of nozzles 49 and the other end to a common liquid chamber 37 to be described later. The common liquid chambers 37 are arranged in two rows 45 and 46 in the scanning direction for each ink color, and are formed extending in the column direction. Each ink is supplied to the common liquid chamber 37 from an ink supply port 17a described later.

  Further, the plates 44, 45, and 46 are formed with ink flow paths that allow the common liquid chamber 37, the pressure chamber 39, and the nozzle 49 to communicate with each other. For example, the plate 45 is formed with an outflow passage 48 that communicates each pressure chamber 39 and each nozzle 49, and each of the common liquid chamber 37 and one end of the pressure chamber 39 communicate with the plates 44 and 46. A plurality of connection channels 38 are formed. In addition, an ink supply port 17 a to which each ink from the buffer tank 11 is supplied is formed for each ink color at one end portion in the longitudinal direction (column direction) of the flow path unit 17, and a common liquid chamber 37 is formed. Each ink is supplied. The plurality of plates 43 to 46 are made of a metal conductive material such as 42% nickel alloy steel plate, and the plate 47 is made of synthetic resin such as polyimide.

  The actuator 18 has an outer shape in plan view smaller than the outer shape of the flow path unit 17, and the periphery of the actuator 18 including the ink supply port 17 a is exposed on the upper surface of the flow path unit 17. As shown in FIGS. 4 to 6, the actuator 18 is formed by laminating a plurality of sheet-like piezoelectric bodies 30 to 33 including the lowermost piezoelectric body 30 covering the plurality of pressure chambers 39. The thickness of one piezoelectric body is about 30 μm, and is made of, for example, PZT. Among the piezoelectric bodies, narrow individual electrodes 35 are formed at locations corresponding to the pressure chambers 39 on the upper surface (wide surface) of the even-numbered piezoelectric layers 31 from the bottom, and the odd-numbered piezoelectric layers from the bottom. A common electrode 34 common to a plurality of pressure chambers is continuously provided up to both side end portions 18 a of the actuator 18 on the upper surface (wide surface) of 32. The common electrodes 34 and the individual electrodes 35 are alternately arranged with at least one piezoelectric body interposed therebetween except for the lowermost piezoelectric body, and face each other. Then, each of the individual electrodes 35 of the actuator 18 and each of the pressure chambers of the flow path unit 17 are opposed to each other, and both of them are bonded and fixed.

  In addition, the piezoelectric body is an active portion A in which a portion sandwiched between the common electrode 34 and the individual electrode 35 is deformable, that is, the common electrode 34 is continuously arranged corresponding to the plurality of active portions A. The individual electrodes 35 are individually arranged corresponding to the plurality of active portions A, respectively. The active part A is configured such that the drive IC chip 22 described later selectively applies a voltage between the individual electrode 35 and the common electrode 34 according to the print data, thereby enabling the activation corresponding to the applied individual electrode 35. The portion A is distorted in the stacking direction, and this displacement changes the volume of the pressure chamber, generates pressure and pressure waves for ejecting ink, and ejects ink from the nozzles.

  Further, the actuator 18 has an insulating sheet 33 laminated on the uppermost layer, and the individual surface electrode 35 that is electrically connected to the individual electrode 35 in the piezoelectric sheet through a conductive material filled in a known through hole. It is formed on the surface of 33 in a staggered pattern in the column direction and in four columns in the scanning direction. And on the actuator 18, the terminal part 35a of the individual electrode 35 connected with the joint surface (lower surface) of the flexible wiring material 19 mentioned later is provided. The individual electrode terminal portions 35a have the same narrow rectangular shape as the individual electrodes 35, and are alternately arranged in one row of the individual electrodes 35 closer to one end or the other end in the longitudinal direction (scanning direction) of each individual electrode 35. Has been.

  Further, in the common electrode 34, the end edges 34 a of the common electrode 34 are exposed at the side ends 18 a on both sides in the column direction of the actuator 18, and the end edges 34 a serve as connection terminals for the ground wiring member 20. Plays.

  The actuator 18 is formed by cutting a large-area laminate composed of the piezoelectric bodies 30 to 32, the common electrode 34, the individual electrode 35, and the insulating sheet 33 into a required shape after firing, and cutting the cut surface. Actuators 18 having both end edges 34a of the common electrode 34 exposed are formed on the side ends 18a on both sides in the column direction.

  The flexible wiring material 19 is provided with a plurality of wiring patterns 100, 101 a, 101 b for transmitting control signals from the outside, and one end of the flexible wiring material 19 is joined to the uppermost surface of the actuator 18. It is electrically connected and the other end is drawn out in the scanning direction. A driving IC chip 22 that selectively applies a voltage to the actuator 18 based on print data is mounted on the other end side of the flexible wiring member 19. The flexible wiring material is, for example, COF (Chip on Film), a plurality of copper foils on one side of a strip-like base material made of a flexible synthetic resin material (for example, polyimide resin) having electrical insulation. The individual conductors 19a and the plurality of wirings 100, 101a, 101b are formed of a photoresist or the like, and these surfaces are covered with a cover lay made of an electrically insulating and flexible synthetic resin (for example, polyimide resin). Covered. The drive IC chip 22 mounted on the upper surface of the base material is connected to the input-side individual wiring 101a, the output-side individual wiring 101b, and the common electrode wiring 100. The individual conductor 19a is formed on the lower surface connected to the actuator 18 at a position corresponding to the terminal portion 35a of the individual electrode 35 of the actuator 18, and is connected to the end of the wiring pattern 101b. The individual conductor 19a is exposed by forming an opening in a portion corresponding to the terminal portion 35a of the individual electrode 35 of the base material of the flexible wiring material 19, and the exposed individual conductor 19a and the terminal portion of the individual electrode 35 are exposed. 35a is fixed to the conductive brazing material.

  The wiring pattern 100 is a wiring for the common electrode, and is wired on one side of the flexible wiring material in the width direction (column direction). The cover lay is exposed at least at one portion, and the ground conduction portion 19b (FIG. 7). See). The ground conduction portion 19b is provided in a blank area where the individual conductor of the flexible wiring member 19 connected to the individual electrode terminal of the actuator 18 is not formed, and the ground conduction portion 19b is held at the ground potential. One end of the flexible wiring material 19 on the drawn side is connected to a relay circuit board 70 provided on the upper side of the buffer tank 11, and the relay circuit board 70 is connected to the main body on the printer main body side via another flexible flat cable. Connected to a control circuit board (not shown).

  The ground wiring member 20 is formed of a flat jumper cable having a surplus portion 20d by being substantially U-shaped in a plan view, and has a wide ground conductor 20a (see FIG. 7) inside, and is provided at both ends. Terminal portions 20b and 20c are provided, respectively. The ground wiring member 20 is connected to the common electrode and becomes a ground line.

  FIG. 7 is a plan view of the inkjet head 14 with the ground wiring member 20 connected thereto. In the inkjet head 14, the actuator 18 is overlapped on a part of the upper surface of the flow path unit 17, and the terminal portions 35 a (see FIG. 4) of the plurality of individual electrodes 35 exposed on the upper surface of the actuator 18 are placed on the lower surface of the flexible wiring material 19. The exposed individual conductors 19a are connected to each other by a conductive brazing material. Furthermore, the flexible wiring material 19 is pulled out from the window portion 13a of the frame plate 13, and the actuator 18 is surrounded by the window portion 13a of the frame plate 13 with the portion corresponding to the actuator 18 exposed. A terminal portion 20b on one end side of the ground wiring member 20 is connected to the ground conduction portion 19b of the flexible wiring member 19 in advance. Conductive adhesives 40 and 41 are applied to the gap S between the side end portions 18 a of the actuator 18 and the inner peripheral edge portion of the window portion 13 a of the frame plate 13. That is, the conductive adhesives 40 and 41 are applied so as to come into contact with both end edges 34 a of the common electrode 34 of the actuator 18, the upper surface of the flow path unit 17, and the inner peripheral edge of the window 13 a of the frame plate 13. The flow path unit 17 is dropped to the ground.

  A terminal portion 20 c on the other end side of the ground wiring member 20 is connected to the conductive adhesive 40. By doing so, the end edge portion 34 a on one end side (left side in FIG. 7) of the common electrode 34 of the actuator 18 is connected to the ground conductor 20 a of the ground wiring member 20 via the conductive adhesive 40. Further, an end edge portion 34 a on the other end side (right side in FIG. 7) of the common electrode 34 of the actuator 18 is grounded via the conductive adhesive 41, the flow path unit 17, the frame plate 13, and the conductive adhesive 40. The material 20 is electrically connected to the ground conductor 20a. Further, a potting agent 42 is applied to the gap S between the side end portion of the actuator 18 in the longitudinal direction and the window portion 13a of the frame plate 13. However, the potting agent 42 is replaced with a conductive adhesive, and conductive bonding is performed. By connecting the agents 40 and 41, the wiring that becomes the ground can be thickened. The conductive adhesives 40 and 41 are preferably applied to both end portions 18a of the actuator 18. However, if the conductive adhesives 40 and 41 are applied to the side end portion 18a of the ground wiring member 20 on the side connected to the ground conductor 20a, Only the side end 18a may be used. Further, in the present embodiment, the conductive adhesives 40 and 41 are applied to the gap between the frame plate 13 and the window portion 13a. However, even in the case of the configuration of the inkjet head 14 in which the frame plate 13 is not disposed, the actuator 18 is used. If the conductive adhesive 40 or 41 is applied to the side end portion 18a and the ground wiring member 20, it is possible to make an electrical connection.

  As shown in FIG. 2, the flexible wiring member 19 is inserted into the slit 12 b of the carriage 12, contacts a heat sink (not shown) and the driving IC chip 22, and passes between the buffer tank 11 and the side wall portion 12 c of the carriage 12. In order to be connected to another flexible wiring material (not shown), it is necessary to bend or bend in the carriage 12. Therefore, the ground wiring member 20 is provided with a surplus length portion 20d in order to have flexibility, and the surplus length portion 20d is arranged so as to face one end side (the right side in FIG. 7). 19 is overlapped in a plan view. By providing the extra length portion 20 d, it is possible to prevent the flexible wiring material 19 from being separated from the joint portion between the flexible wiring material 19 and the ground wiring material 20 due to the bending of the flexible wiring material 19. The shape of the ground wiring member 20 is not limited to this shape as long as the extra length portion 20d is provided.

  According to the configuration described above, the common electrode 34 is exposed at the side end portion 18 a of the actuator 18, and the ground wiring material 20 that is separate from the flexible wiring material 19 is used. Since the ground conductor 20a of the ground wiring member 20 is connected to the common electrode 34, there is no need to provide a conventional terminal portion for the common electrode 34 on the upper surface of the actuator 18, and the area of the actuator 18 can be reduced. be able to. Further, since the ground conductor 20a of the ground wiring member 20 is connected to the end edge portion 34a of the common electrode 34 through the conductive adhesives 40 and 41, conduction can be ensured stably and easily. Further, since the common electrode 34 is grounded at both of the opposing side end portions 18a of the actuator 18, the current direction between the plurality of individual electrodes 35 and the common electrode 34 is distributed to both sides so as not to be one direction. The electrical balance in the actuator 18 can be kept good. Conductive or by forming the actuator 18 by cutting the laminated body into a required shape, the edge portion 34a serving as the terminal of the common electrode 34 is formed, so there is no need to provide a special terminal portion on the common electrode 34. Manufacturing man-hours can be reduced. The common electrode 34 is not installed on the uppermost surface of the actuator 18, and only the terminal portion 35 a of the individual electrode 35 can be installed, and the number of individual electrodes can be increased without increasing the area of the actuator 19.

  In addition, since the flexible wiring member 19 only needs to be provided with at least one ground conductor connected to the common electrode of the actuator 18, the increase in the number of individual electrodes can be suppressed by suppressing an increase in the area of the flexible wiring member 19. Therefore, the wiring density need not be narrow. In addition, since the ground wiring member 20 is separate from the flexible wiring member 19, the layout of the ground wiring member 20 is not limited by the individual conductors 19a of the flexible wiring member 19, and the degree of freedom in arrangement of the ground wiring member 20 is improved. . Therefore, the terminal portion of the common electrode 34 of the actuator 18 can be formed at a relatively free position, and the actuator 18 can be reduced in size and density.

  In addition, since the ground conductor 20a of the ground wiring member 20 is electrically connected to the flow path unit 17 through the conductive adhesives 40 and 41, the flow path unit 17 that has been conventionally performed manually using silver paste is used. This eliminates the need for separate grounding, thereby reducing the number of parts, the number of manufacturing steps, and the manufacturing cost. In addition, since the ground conductor 20a of the ground wiring member 20 is electrically connected to the frame plate 13a via the conductive adhesives 40 and 41, it is not necessary to separately ground the frame plate 13, and the number of parts and the number of manufacturing steps can be reduced. Further reduction can be achieved.

  Further, since the conductive adhesives 40 and 41 are applied to the gap S between the actuator 18 and the frame plate 13, the conductive adhesives 40 and 41 are positioned from the gap S, and the conductive adhesives 40 and 41. Can be applied and solidified accurately and easily. Further, the ground wiring member 20 has an extra length portion 20d so that the entire length is longer than the distance between the ground conducting portion 19b of the flexible wiring member 19 and the end edge portion 34a of the common electrode 34 of the actuator 18. Yes. Therefore, even when the ground wiring member 20 is bent due to the bending of the flexible wiring member 19, the bending is absorbed by the extra length portion 20 d, and it is possible to prevent excessive stress from being generated in the ground wiring member 20. In this embodiment, the conductive adhesives 40 and 41 are applied to both sides of the actuator 18, but the conductive adhesive 40 may be applied only to one side.

  The ground wiring member 20 is wired only on one side (left side in FIG. 7) of the actuator 18 and the flexible wiring member 19, but may be divided on both sides (left and right sides in FIG. 7). The two ground conductive portions are provided symmetrically in the direction (column direction), the wiring 100 led to the two ground conductive portions is formed, the both side edges 34a of the side end portions 18 of the actuator and the conductive adhesive 40, 41 may be conducted, and the two ground wiring members 20 may be connected to the conductive adhesives 40 and 41 and the two ground conduction parts, respectively. With such a configuration, since it is necessary to provide the wiring 100 on both sides of the flexible wiring material, the effect is small in terms of increasing the area, but the potential difference between both sides of the actuator 18 can be reduced.

  The ground wiring member 20 is not limited to a jumper cable, and can function sufficiently as long as it is a conductive connection material having flexibility (for example, a twisted electric wire or a flexible flat cable).

  Further, as a modification of the first embodiment, the ground conductor 19b of the flexible wiring member 19 is not provided, and the flexible wiring member 19 has its individual conductor 19a connected to the terminal portion 35a of the individual electrode 35 of the actuator 18, The end portion on the side pulled out from the connected actuator 18 is connected to the relay circuit board 70, and one end of the ground wiring member 20 is connected to the end edge portion 34 a of the common electrode 34 of the side end portion 18 a of the actuator 18. On the other hand, the other end of the drawn side may be directly connected to the relay circuit board 70. As with the flexible wiring material 19, the drawn ground wiring material 20 is drawn upward along the side wall portion 12 c from the slit 12 b in the carriage 12 and connected to the common electrode terminal 73 of the relay circuit board 70. The common electrode terminal 73 may be soldered on the substrate 70 with a conductive brazing material or the like, and has the same number of contacts as the ground conductor of the ground wiring member 20, and is a type in which a terminal is inserted or removed, a lever member Various types are used, such as a type in which a terminal is sandwiched between.

  By adopting such a configuration, it is not necessary to form the common electrode wiring 100 in the flexible wiring material 19, so that the flexible wiring material 19 can not only increase the area, but also the input side individual wiring 101 a and the output side individual wiring. Only the wiring 101b can be wired, and even when individual electrodes are added, the wiring density may not be narrowed.

(Second Embodiment)
Next, a second embodiment will be described. FIG. 8 is a plan view showing an actuator 50 of an ink jet head according to the second embodiment of the present invention. 9 is a cross-sectional view taken along line IX-IX in FIG. In addition, description is abbreviate | omitted about the structure similar to 1st Embodiment. As shown in FIGS. 8 and 9, the actuator 50 includes a plurality of sheet-like piezoelectric bodies 51 to 53, a common electrode 55 is provided on the lower surface side of the piezoelectric body 52, and the upper surface side of the piezoelectric body 52. A plurality of individual electrodes 56 are provided, and a portion sandwiched between the common electrode 55 and the individual electrode 56 is an active portion A that can be deformed. That is, the common electrode 55 is continuously arranged corresponding to the plurality of active portions A, and the individual electrodes 56 are individually arranged corresponding to the plurality of active portions A, respectively.

  In addition, the insulating sheet 54 is laminated on the uppermost layer of the actuator 50, and four rows of terminal portions 56 a that are electrically connected to the individual electrodes 56 through the through holes 57 are exposed on the surface of the insulating sheet 54. Further, in the actuator 50, one row of terminal portions 55 a that are electrically connected to the common electrode 55 through the through holes 58 are exposed on the surface of the insulating sheet 54. The terminal portion 55a of the common electrode 55 is exposed side by side on one end side (lower side in FIG. 8) in a direction (scanning direction) orthogonal to the column direction, and a flexible wiring member 60 (see FIG. 10) described later is an actuator 50. Is extended and arranged on the other end side (upper side in FIG. 8) in a direction (scanning direction) that is substantially parallel to the surface of the substrate and orthogonal to the column direction.

  FIG. 10 is a plan view of the flexible wiring member 60 connected to the actuator 50 shown in FIG. As shown in FIG. 10, the flexible wiring member 60 is a COF (Chip on Film) on which a driving IC chip 63 is mounted, and is the same as that in the first embodiment. In the flexible wiring member 60, a large number of individual conductors 61 for supplying a drive voltage to each individual electrode 56 of the actuator 50 are formed at positions corresponding to the terminal portions 56 a of the individual electrodes 56 of the actuator 50. Further, a ground conduction portion 62 is formed on the upper surface of the flexible wiring member 60 (the surface on the opposite side of the surface facing the actuator 50) by opening a cover lay to expose the copper foil and maintaining the ground potential. Further, an independent conductor 64, which is an independent conductor by opening the coverlay of the flexible wiring material in an island shape on both upper and lower surfaces to expose the copper foil, is formed at a position corresponding to the terminal portion 55a of the common electrode 55 of the actuator 18. ing. The ground conduction portion 62 exposes the copper foil in a region between the individual electrode 61 group and the drive IC chip 63 in plan view. The group of the individual electrodes 61 is disposed in a region between the ground conduction portion 62 and the independent conductor 64. The wiring pattern is formed with the common electrode wiring 102, the input-side individual wiring 103a and the output-side individual wiring 103b of the driving IC chip 22, and the ground conduction portion 62 is formed by exposing the cover lay of the common electrode wiring 102. The output-side individual wiring 103b bypasses the ground conduction portion 62 and is drawn out to and connected to each individual electrode 61.

  FIG. 11 is a plan view of a cable module 66 in which a ground wiring member 65 is connected to the flexible wiring member 60 shown in FIG. As shown in FIG. 11, the ground wiring member 65 is a flat jumper cable having a substantially rectangular shape in plan view, and has a wide ground conductor 65a inside, and terminal portions 65b and 65c are provided at both ends, respectively. It has been. The ground wiring member 65 is connected so as to overlap the upper surface of the flexible wiring member 60 by connecting the terminal portion 65 b to the ground conduction portion 62 and connecting the terminal portion 65 c to the independent conductor 64. That is, the ground wiring member 65 is connected between the ground conducting portion 62 and the independent conductor 64, whereby the cable module 66 having the flexible wiring member 60 and the ground wiring member 65 is integrally formed in advance. The ground wiring member 65 is not bonded to the surface of the flexible wiring member 60 except for the terminal portions 65b and 65c, but may be surface-bonded to each other.

  The cable module 66 is placed on the upper surface of the actuator 50, the individual conductor 61 of the flexible wiring member 60 is connected to the terminal portion 56 a of the individual electrode 56 of the actuator 50, and the independent conductor 64 of the flexible wiring member 60. The portion exposed on the lower surface (the back side in FIG. 11) is connected to the terminal portion 55a of the common electrode 55 of the actuator 50 with a conductive brazing material. That is, the ground conducting portion 62 of the flexible wiring member 60 is conducted to the common electrode 55 of the actuator 50 via the ground conductor 65 a of the ground wiring member 65 and the independent conductor 64 of the flexible wiring member 60. The independent conductor 64 is formed by opening the cover lay in an island shape on the upper and lower surfaces to expose the copper foil, but exposing the copper foil only on the upper surface and providing terminals on the lower surface in the same manner as the individual electrode terminals. Also good. The independent conductor 64 only needs to expose the copper foil of the flexible wiring member 60 so that the terminal portion 55a of the actuator 50 and the ground conductor 65a of the ground wiring member 65 can be connected. It does not have to be in the shape.

  According to the configuration described above, the terminal portion 55a of the common electrode 55 of the actuator 50 is disposed at a position corresponding to one end side (the lower side in FIG. 10) of the flexible wiring member 60. Since the ground wiring is made using the ground wiring material 65 for the portion 55a, it is not necessary to provide a ground conductor that bypasses the individual conductor 61 in the flexible wiring material 60. Therefore, an increase in area of the flexible wiring member 60 can be suppressed. Further, the terminal portions 55a of the common electrode 55 of the actuator 50 are conventionally provided at both ends in the column direction. However, by arranging the terminal portions 55a at one end in the scanning direction, the length of the actuator in the column direction can be reduced. In addition, a large number of electrodes can be arranged at high density in the column direction of the actuator. Further, since the cable module 66 in which the flexible wiring member 60 and the ground wiring member 65 are connected is formed in advance, the flexible wiring member 60 and the ground wiring member 65 can be simply connected to the actuator 50 by simply connecting the cable module 66 to the actuator 50. Both can be connected to the actuator 50 at the same time, and the manufacturing efficiency is improved. Further, since the cable module 66 is provided in parallel with the direction in which the other end side of the flexible wiring member 19 is pulled out, the cable module 66 can be bent along the flexible wiring member 19 even if the inkjet head 14 is disposed on the carriage 12. Therefore, since it can be accommodated compactly without contacting other parts, it is preferable in terms of space saving.

  Further, as a modification of the second embodiment, the ground conductive portion 62 of the flexible wiring member 60 is not provided, and the flexible wiring member 60 has its individual conductor 61 connected to the terminal portion 56a of the individual electrode 56 of the actuator 50, The end on the side pulled out from the connected actuator 50 is connected to the relay circuit board 70, and one end of the ground wiring member 65 is connected to the independent conductor 64 on one end side of the flexible wiring member 60, while the lead is pulled out. The other end on the other side may be directly connected to the relay circuit board 70. The drawn ground wiring member 65 is drawn upward along the side wall portion 12 c from the slit 12 b in the carriage 12 so as to cover the upper surface of the flexible wiring member 19, and is connected to the common electrode terminal 73 of the relay circuit board 70. To do. The common electrode terminal 73 and the ground wiring member 65 may be soldered with a conductive brazing material or the like, or the common electrode terminal 73 may be connected to the ground wiring member 65 formed to be wide. Various types of contacts having the same number of contacts as the ground conductor, such as a type in which a terminal is inserted and removed, and a type in which a terminal is sandwiched by a lever member are used.

  By adopting such a configuration, it is not necessary to form the common electrode wiring 102 in the flexible wiring material 60, so that the flexible wiring material 60 can suppress an increase in area. In the second embodiment, it is necessary to route the wiring 103b by bypassing a portion where the ground conduction portion 62 is formed, but in the modified example, it is not necessary to provide the ground conduction portion 62. Only the side individual wiring 103a and the output side individual wiring 103b can be wired, and even when individual electrodes are added, the wiring density may not be narrowed.

  Since other configurations are the same as those of the first embodiment, description thereof is omitted. Each of the above-described embodiments is an application of the present invention to an ink jet head, but may be applied to a droplet discharge device that discharges liquid other than ink.

  As described above, according to the droplet discharge device and the method for manufacturing the droplet discharge device according to the present invention, the electrode of the droplet discharge device is increased without increasing the area of the flexible wiring material and the actuator as the electrode density of the droplet discharge device is increased. It is advantageous to apply to an ink jet head or the like that has an excellent effect of achieving high density and can exhibit this effect.

It is a schematic perspective view which shows the principal part of the inkjet printer which concerns on 1st Embodiment of this invention. FIG. 2 is an exploded perspective view of a head unit of the ink jet printer shown in FIG. 1. FIG. 3 is a perspective view of a state in which a frame plate is stacked on the inkjet head shown in FIG. 2. It is a top view of the actuator of the inkjet head shown in FIG. It is the VV sectional view taken on the line of FIG. It is the VI-VI sectional view taken on the line of FIG. FIG. 4 is a plan view of a state in which a ground wiring member is connected to the inkjet head shown in FIG. 3. It is a top view which shows the actuator of the inkjet head which concerns on 2nd Embodiment of this invention. It is the IX-IX sectional view taken on the line of FIG. It is a top view of the flexible wiring material connected to the actuator shown in FIG. It is a top view of the cable module by which a ground wiring material is connected to the flexible wiring material shown in FIG.

Explanation of symbols

1 Inkjet printer 4 Head unit (droplet ejection device)
13 Frame plate 14 Inkjet head 17 Flow path unit 18, 50 Actuator 18a Side end 19, 60 Flexible wiring material 19a, 61 Individual conductor 19b Grounding conductive portion 20, 65 Ground wiring material 20a, 65a Grounding conductor 34, 55 Common electrode 34a Edge portions 35 and 56 Individual electrodes 39 Pressure chambers 40 and 41 Conductive adhesive 49 Nozzle 62 Ground conduction portion 64 Independent conductor 66 Cable module A Active portion S Crevice

Claims (11)

A flow path unit provided with a plurality of pressure chambers respectively corresponding to a plurality of nozzles for discharging droplets;
An actuator that is stacked on the flow path unit so as to face the pressure chamber, and selectively drives a plurality of active portions corresponding to the plurality of pressure chambers;
A flexible wiring material connected to the surface of the actuator and having a plurality of individual conductors;
An earth wiring material having a ground conductor,
The actuator includes a common electrode continuously disposed corresponding to the plurality of active portions, and a plurality of individual electrodes individually disposed corresponding to the plurality of active portions, respectively.
The plurality of individual conductors of the flexible wiring material are connected to the plurality of individual electrodes of the actuator, respectively, and the ground conductor of the ground wiring material is connected to the common electrode of the actuator. A droplet discharge device characterized by the above. The actuator is configured to sandwich a piezoelectric body between the common electrode and the plurality of individual electrodes, and an end edge of the common electrode is exposed at a side end of the actuator,
The droplet discharge device according to claim 1, wherein the ground conductor of the ground wiring member is connected to the end edge portion of the common electrode through a conductive adhesive. The edge portions of the common electrode are exposed at side end portions on both sides of the actuator,
The droplet discharge device according to claim 2, wherein the conductive adhesive that is electrically connected to the ground conductor of the ground wiring member is applied so as to include at least edge portions on both sides.   The droplet discharge device according to claim 2, wherein the flow path unit is made of a conductive material, and the conductive adhesive is also in contact with the flow path unit. The actuator is overlaid on a part of the flow path unit,
The flow path unit is overlaid with a substantially frame-shaped frame plate made of a conductive material so as to surround the actuator,
5. The droplet discharge device according to claim 2, wherein the conductive adhesive is applied to a gap between the side end portion of the actuator and an inner peripheral edge portion of the frame plate.   The flexible wiring material has a ground conductive portion exposed on a surface opposite to the surface facing the actuator, and the ground wiring material connected to the ground conductive portion has an extra length portion. The droplet discharge device according to claim 1. The flexible wiring material has one end connected to the individual electrode of the actuator and the other end connected to a relay circuit board connected to an external signal source,
6. The droplet discharge device according to claim 1, wherein one end of the ground wiring member is connected to the common electrode, and the other end is connected to the relay circuit board. On the surface of the actuator, a terminal portion of each individual electrode exposed in a row and a terminal portion of the common electrode exposed on one end side in a direction orthogonal to the row direction are provided,
The flexible wiring member extends to the other end side in a direction substantially parallel to the surface of the actuator and perpendicular to the row,
The droplet discharge according to claim 1, wherein the individual conductor of the flexible wiring material is connected to the terminal portion of the individual electrode, and the ground conductor of the ground wiring material is connected to the terminal portion of the common electrode. apparatus. The flexible wiring material has a grounding conductive portion exposed on the surface opposite to the facing surface on the other end side, and an independent conductor exposed on both surfaces on the one end side,
The ground wiring member is connected between the ground conductive portion and the independent conductor on a surface opposite to the facing surface of the flexible wiring member, so that the flexible wiring member and the ground wiring member are A cable module comprising
The droplet discharge device according to claim 8, wherein a portion of the independent conductor exposed on the facing surface of the flexible wiring member is connected to a terminal portion of the common electrode. The flexible wiring material has independent conductors exposed on both sides at the one end side, and the other end side is connected to a relay circuit board connected to an external signal source,
The ground wiring member is connected between the independent conductor and the relay circuit board on a surface opposite to the facing surface of the flexible wiring member, so that the flexible wiring member and the ground wiring member are connected to each other. A cable module comprising
The droplet discharge device according to claim 8, wherein a portion of the independent conductor exposed on the facing surface of the flexible wiring member is connected to a terminal portion of the common electrode. A laminate in which a plurality of active portions of a piezoelectric body are sandwiched between a common electrode and a plurality of individual electrodes, and a terminal portion of each individual electrode is exposed on the surface, wherein the common electrode is the plurality of the plurality of active portions. A side end portion that is a cut surface of the laminated body that is continuously arranged corresponding to the active portion and the plurality of individual electrodes are individually arranged corresponding to the plurality of active portions, respectively, by cutting into a required shape. Forming an actuator in which an edge of the common electrode is exposed;
A step of superimposing the actuator in correspondence with the pressure chamber and the active part on a flow path unit provided with a plurality of pressure chambers respectively corresponding to a plurality of nozzles for discharging droplets;
Connecting a plurality of individual conductors of the flexible wiring material to the terminal portions of the individual electrodes of the actuator,
Applying a conductive adhesive to the edge of the common electrode of the actuator;
And a step of connecting a ground conductor of a ground wiring member to the conductive adhesive.

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