JP2008203592A5 - - Google Patents
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- Publication number
- JP2008203592A5 JP2008203592A5 JP2007040424A JP2007040424A JP2008203592A5 JP 2008203592 A5 JP2008203592 A5 JP 2008203592A5 JP 2007040424 A JP2007040424 A JP 2007040424A JP 2007040424 A JP2007040424 A JP 2007040424A JP 2008203592 A5 JP2008203592 A5 JP 2008203592A5
- Authority
- JP
- Japan
- Prior art keywords
- color filter
- substrate
- color
- manufacturing
- filter material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 17
- 239000000463 material Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 9
- 238000005192 partition Methods 0.000 claims 9
- 238000005498 polishing Methods 0.000 claims 5
- 239000000126 substance Substances 0.000 claims 5
- 230000015572 biosynthetic process Effects 0.000 claims 3
- 238000005755 formation reaction Methods 0.000 claims 3
- 238000007599 discharging Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000000638 solvent extraction Methods 0.000 claims 1
Claims (7)
前記基板上に形成した隔壁形成層に対して、カラーフィルタを形成すべき領域に凹部を形成する凹部形成工程と、
前記凹部内を埋めるように所定色のカラーフィルタ材を前記基板上に配置するカラーフィルタ材配置工程と、
前記隔壁形成層の上面が露出するまで化学機械研磨を行なって前記凹部の外側にある前記カラーフィルタ材を除去する化学機械研磨工程と、
を行なうことにより、前記凹部内に所定色のカラーフィルタを形成するとともに、
前記凹部形成工程、前記カラーフィルタ材配置工程および前記化学機械研磨工程を複数回繰り返し、前記基板上に各色のカラーフィルタを配置することを特徴とするカラーフィルタ基板の製造方法。 In the manufacturing method of the color filter substrate provided with the color filter of each color on the substrate,
A recess forming step for forming a recess in a region where a color filter is to be formed with respect to the partition wall forming layer formed on the substrate,
A color filter material arrangement step of arranging a color filter material of a predetermined color on the substrate so as to fill the concave portion;
A chemical mechanical polishing step of removing the color filter material outside the recess by performing chemical mechanical polishing until the upper surface of the partition wall forming layer is exposed;
By forming a color filter of a predetermined color in the recess,
A method for producing a color filter substrate, wherein the color filter substrate of each color is arranged on the substrate by repeating the recess forming step, the color filter material arranging step, and the chemical mechanical polishing step a plurality of times.
前記基板上に、前記カラーフィルタを形成すべき領域を区画する隔壁を形成する隔壁形成工程と、
前記隔壁で区画された領域を各々埋めるように各色のカラーフィルタ材を順次配置するカラーフィルタ材配置工程と、
前記隔壁の上面が露出するまで化学機械研磨を行なって当該隔壁の上面を覆う前記カラーフィルタ材を除去する化学機械研磨工程と、
を行なうことを特徴とするカラーフィルタ基板の製造方法。 In the manufacturing method of the color filter substrate provided with the color filter of each color on the substrate,
A partition wall forming step for forming a partition wall for partitioning a region where the color filter is to be formed on the substrate;
A color filter material arrangement step of sequentially arranging the color filter materials of each color so as to fill the regions partitioned by the partition walls,
A chemical mechanical polishing step of removing the color filter material covering the upper surface of the partition wall by performing chemical mechanical polishing until the upper surface of the partition wall is exposed;
A method for manufacturing a color filter substrate, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007040424A JP4935410B2 (en) | 2007-02-21 | 2007-02-21 | A method for manufacturing a color filter substrate and a method for manufacturing an electro-optical device. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007040424A JP4935410B2 (en) | 2007-02-21 | 2007-02-21 | A method for manufacturing a color filter substrate and a method for manufacturing an electro-optical device. |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008203592A JP2008203592A (en) | 2008-09-04 |
| JP2008203592A5 true JP2008203592A5 (en) | 2009-12-24 |
| JP4935410B2 JP4935410B2 (en) | 2012-05-23 |
Family
ID=39781157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007040424A Expired - Fee Related JP4935410B2 (en) | 2007-02-21 | 2007-02-21 | A method for manufacturing a color filter substrate and a method for manufacturing an electro-optical device. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4935410B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6486848B2 (en) * | 2016-02-25 | 2019-03-20 | 株式会社ジャパンディスプレイ | Display device and manufacturing method thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002277623A (en) * | 2001-03-19 | 2002-09-25 | Canon Inc | Optical element, method for manufacturing the same, and liquid crystal element using the optical element |
| JP2002365423A (en) * | 2001-06-08 | 2002-12-18 | Canon Inc | Color filter and method for manufacturing the same, liquid crystal element using the same |
-
2007
- 2007-02-21 JP JP2007040424A patent/JP4935410B2/en not_active Expired - Fee Related
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