JP2008202799A - Gasket filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To offer a gasket filter which makes it easy to remove deposited moisture and to undergo a surface treatment. <P>SOLUTION: The gasket filter has an annular gasket main body 62 and a filter 63 prepared in this in one piece, wherein the filter 63 is formed by opening many holes 45 in a metal disk-like material 64. The hole 45 of the filter 43 is formed by etching. The filter 63 has a disk-like part 64 and at least one lug 65 projected radially from the circumference, and the gasket main body 62 has a recess 66 which houses the disk-like part 64 of the filter 63, an annular projection 67 fitted along the periphery of the recess 66, and a notch 68 which is cut in the annular projection 67 to store lug 65 of filter 63. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a gasket filter that is disposed between butted end surfaces of two joint members to ensure sealing performance and also to perform a filter function.

  In order to prevent the entry of dust, which is the main cause of fluid leakage from the valve section, and to prevent clogging of the pores when a single pore such as an orifice is a flow path, a gasket filter is placed in front of it. is set up.

Conventionally, as the gasket filter, those formed by sintering metal fibers and those formed by laminating a wire mesh are known. Patent Document 1 discloses a gasket filter in which the gasket body is made of rubber or synthetic resin instead of metal.
Japanese Unexamined Patent Publication No. 7-71761

  Gasket filters formed by laminating metal fibers and gasket filters formed by laminating wire mesh are used in semiconductor manufacturing equipment where moisture that becomes impurities for the flowing fluid must be excluded In addition, there is a problem that the surface area on which impurities can adhere is large, and moisture trapped in the minute space inside the filter is difficult to escape. Further, it is necessary to perform surface treatment on the gasket filter to improve the corrosion resistance and moisture removal property. However, the conventional filter has a problem that it is difficult to perform the surface treatment. In addition, when the gasket body is made of rubber or synthetic resin, the gasket body itself may cause contamination. When the gasket main body is made of metal, how to join the gasket main body and the filter becomes a problem.

  An object of the present invention is to provide a gasket filter that can easily remove adhering moisture and can be subjected to surface treatment even if the gasket body is made of metal.

  The gasket filter according to the present invention includes an annular gasket main body and a filter provided integrally therewith, and the filter is formed by opening a large number of holes in a metal disk-like body. It is what.

  According to the gasket filter of the present invention, since the filter has a large number of holes in a metal disk-like body, the surface treatment can be simplified, and the surface area on which impurities can adhere as compared with the conventional one. Becomes small and there is no minute space inside the filter, so that the attached moisture is easily removed. Further, since it is easy to obtain the opening area, the pressure loss can be easily predicted based on this, and both end faces are flat, so that mirror polishing for improving the sealing property can be easily performed. Moreover, since it can be installed in place of the gasket of the pipe joint, the space for the filter can be omitted, and the structure is simple, and the manufacturing cost can be reduced.

  In order to make a hole in a metal disk-like body, machining, etching, laser processing, electric discharge processing, press processing, or the like can be performed. Etching is preferable when the thickness of the metal disc-shaped body is 20 to 100 μm and the diameter of the hole is equal to or larger than this thickness.

  The gasket body and the filter are preferably integrated by welding. As a welding method, resistance welding, YAG laser welding, or the like is possible. When the filter thickness is 50 μm or more, any of the above welding methods can be used. However, when the filter thickness is about 30 μm, direct laser welding cannot be performed due to the surface tension of the material. Good. Moreover, when the thickness of a filter is about 30 micrometers, it can also be set as the following 1 to 3.

  1. A filter housing recess deeper than the thickness of the filter is provided on one end face of the gasket body, and the filter is placed on the bottom surface. A pressing ring inserted along the peripheral surface of the filter housing recess includes a filter The gasket is closely attached to the bottom surface of the filter housing recess, and the gasket body and the pressing ring are welded. If it does in this way, since a filter is clamped by a gasket main part and a press ring, what is necessary is just to weld a gasket main part and a press ring, and this welding can be performed easily.

  2. The filter has a disc part and at least one projecting part projecting radially from the peripheral edge of the disc part, and the gasket body is provided with a recess for accommodating the disc part of the filter, along the peripheral part of the recess. And a notch that is provided on the annular projection and accommodates the protruding portion of the filter. If it does in this way, the notch part of an annular protrusion and the protrusion part of a filter will fit, positioning will be made and the movement of the filter with respect to a gasket main body will be suppressed. In this case, when the filter is press-fitted into the gasket body by press, the protruding part of the filter is caulked and placed in the notch part of the gasket body, and the filter and the gasket body are welded. preferable. If it does in this way, since caulking will fulfill the function of temporary attachment, welding with a filter and a gasket main part can be performed easily. Note that a filter with holes formed by etching is supplied in a state where a large number of filters are arranged on one sheet, and this is cut one by one by pressing. When press-fitting with a press, the cutting by the press is also performed, so that the trouble of cutting the filter and setting it on the gasket main body can be saved, and the positioning of the filter with respect to the gasket main body becomes more accurate.

  3. The gasket body is composed of an annular first half and an annular second half, and the first half and the second half are abutted via the peripheral edge of the filter. That is, as the two members interposing the gasket filter are attracted to each other, the two halves are attracted to each other, whereby the filter is sandwiched between the two halves, thereby performing welding. The gasket main body and the filter can be integrally joined without any problem. In this case, it is preferable that an annular protrusion for holding the filter is provided on at least one abutting surface of the first half and the second half. Also, a leak port for confirming fluid leakage may be formed between the abutting surface of the first half and the abutting surface of the second half.

  In addition to the above, the gasket filter of the present invention has a plurality of holes formed by laser processing in a portion excluding the peripheral portion of the disk-like body, so that the peripheral portion is made a gasket body and a large number of holes are formed. It is good also as a structure by which the made part is used as the filter. In this case, the hole formed by laser processing is a bottomed hole opened on one end surface side of the disk-shaped body, and the other end surface side of the disk-shaped body is shaved so that the filter hole is also opened on the other end surface side. It is good also as a structure made to do.

The gasket filter is preferably subjected to surface treatment, and plating, electropolishing, chromium passivation treatment, fluorination passivation treatment, and the like are suitable as the surface treatment. It is also possible to form NiF ₂ on the surface by subjecting Ni—P to electroless plating as the base plating and then performing a fluorination passivation treatment. It is also possible to improve the corrosion resistance by combining chromium-passive treatment after electroless plating of Ni-P and then chromium plating. And it is possible to make a hole large and to make it into a required size by plating, and the size of the hole after the surface treatment can be controlled by the thickness of the plating. In this case, since chromium cracks when the thickness is 0.5 μm or more, the hole diameter is adjusted by Ni—P base plating, and then chromium passivation is performed by chromium plating of about 0.1 μm. Is preferred.

  A fluid controller comprising the gasket filter, wherein a block-like body having an inlet passage and an outlet passage is provided with a sensor for detecting either a pressure or a flow rate of the fluid, and a fluid based on a signal from the sensor. An actuator for controlling the degree of opening and closing of the flow path is attached, and a passage block having an introduction passage leading to the inlet passage of the main body is abutted against the main body. Those fitted with the gasket filter are useful as members constituting a fluid control apparatus for semiconductor manufacturing or the like.

  A filter formed by etching a large number of holes in a metal disk-like body is useful as a component of the gasket filter.

  According to the gasket filter of the present invention, even if the gasket main body is made of metal, it is easy to integrate the gasket main body and the filter, and it is possible to easily remove the attached water and to perform surface treatment.

  Embodiments of the present invention will be described below with reference to the drawings. In the following description, the left and right in FIG. Also, the front side of the drawing in the figure is the front and the back side of the drawing is the back.

  FIG. 1 shows an example of a fluid control device in which the gasket filter of the present invention is used. This fluid control device (1) is used in a semiconductor manufacturing device or the like, and includes a mass flow controller (2), an inlet side shut-off portion (3) provided on the left side of the mass flow controller (2), and a mass flow controller. It consists of an outlet side shut-off part (4) provided on the right side of (2).

  The lower left surface of the mass flow controller (2) is provided with a rectangular parallelepiped left extending block (first fluid control member) (5) having an inlet passage (5a) that opens to the lower surface. A rectangular parallelepiped right extending block (second fluid control member) (6) having an outlet passage (6a) that opens is provided. Both overhanging blocks (5) and (6) are fixed to the main body of the mass flow controller (2) by screws from the side.

  The inlet side blocking opening (3) has four fluid control members (7), (8), (9), (10) arranged in the upper stage, and five rectangular joints (11), (12) arranged in the lower stage. (13) (14) (15).

  The third fluid control member (7) disposed at the left end of the inlet-side blocking / opening portion (3) is provided integrally with the block-shaped body (16) having a downward inlet passage (16a) and an outlet passage (16b). And a first on-off valve (17) that shuts off and opens the communication between the passages (16a) and (16b).

  The fourth fluid control member (8) arranged second from the left end of the inlet side shut-off part (3) has a downward inlet passage (18a) and an outlet passage (18b), and has an inclined surface on the upper left portion. A substantially rectangular parallelepiped block-shaped main body (18), and a pressure regulator which is provided on the inclined surface of the main body (18) and is arranged in a communication portion between the inlet passage (18a) and the outlet passage (18b) to adjust the pressure (19) and a pressure sensor (20) that measures the fluid pressure through a passage that is provided in a flat portion on the right upper surface of the main body (18) and communicates with the outlet passage (18b). A filter (21) is provided in the inlet passage (18a) of the main body (18).

  The fifth fluid control member (9) arranged third from the left end of the inlet side shut-off part (3) is a second and third on-off valve provided integrally with one rectangular parallelepiped block body (22). (23) Consists of (24). The main body (22) has a downward first inlet passage (22a) provided at the left end, and a rightward outlet passage (22b) communicating with the first inlet passage (22a) via the second on-off valve (23). ) And a downward second inlet passage (22c) communicating with the outlet passage (22b) via the third on-off valve (24).

  The sixth fluid control member (10) arranged fourth from the left end of the inlet side blocking / opening portion (3) is composed of one rectangular parallelepiped passage block. The sixth fluid control member (10) is provided with a communication passage (10a) having one end communicating with the outlet passage (22b) of the fifth fluid control member main body (22) and the other end opened downward. .

  The first joint (11) arranged at the left end of the inlet-side shut-off part (3) has an L-shaped upstream that leads to the inlet passage (16a) of the third fluid control member body (16) and opens to the left. A side communication passage (11a) and an L-shaped downstream communication passage (11b) that opens to the right and communicates with the outlet passage (16b) of the third fluid control member main body (16) are provided. On the left surface of the first joint (11), a first inlet pipe connection portion (25) communicating with the upstream communication passage (11a) is provided.

  The second joint (12) arranged second from the left end of the upstream shut-off part (3) has an outlet passage (11b) of the first joint (11) and an inlet of the fourth fluid control member body (18). An L-shaped upstream communication passage (12a) communicating with the passage (18a) and an L-shape having one end communicating with the outlet passage (18b) of the fourth fluid control member body (18) and the other end opened to the right. And a downstream communication passage (12b).

  The third joint (13) arranged third from the left end of the upstream shut-off opening (3) includes the outlet passage (12b) of the second joint (12) and the fifth fluid control member main body (22). An L-shaped communication path (13a) communicating with the one inlet path (22a) is provided.

  One end of the fourth joint (14) arranged fourth from the left end of the upstream shut-off part (3) communicates with the second inlet passage (22c) of the fifth fluid control member body (22), and the other end. Is provided with a communication passage (14a) that opens rearward. A rear surface of the fourth joint (14) is provided with a second inlet pipe connecting portion (not shown) that communicates with the communication passage (14a).

  One end of the fifth joint (15) arranged fifth from the left end of the upstream shut-off part (3) is connected to the outlet of the communication passage (10a) of the sixth fluid control member (10), and the other end is mass flow. A V-shaped communication path (15a) communicating with the inlet path (5a) of the left extension block (5) of the controller (2) is provided.

  The downstream blocking / opening portion (4) includes a seventh fluid control member (26) arranged at the upper stage and sixth and seventh rectangular parallelepiped joints (27) (28) arranged at the lower stage. The seventh fluid control member (26) is provided integrally with the block-shaped main body (29) having the downward inlet passage (29a) and the outlet passage (29b) and communicates between the passages (29a) and (29b). It consists of a fourth on-off valve (30) that shuts off and opens. One end of the sixth joint (27) arranged on the left side of the downstream cutoff opening (4) leads to the outlet passage (6a) of the right extension block (6) of the mass flow controller (2), etc. A V-shaped communication passage (27a) whose end communicates with the inlet passage (29a) of the seventh fluid control member main body (29) is provided. One end of the seventh joint (28) arranged on the right side of the downstream shut-off opening (4) communicates with the outlet passage (29b) of the seventh fluid control member body (29), and the other end opens rearward. A communication path (28a) is provided. On the rear surface of the seventh joint (28), an outlet pipe connecting portion (not shown) that leads to the communication passage (28a) is provided.

  Communication parts between fluid control members (5) (6) (7) (8) (9) (10) (26), communication parts between joints (11) (12) (13) (14) (15) Seals are provided at the communication parts between the fluid control members (5) (6) (7) (8) (9) (10) (26) and the joints (11) (12) (13) (14) (15). A portion (33) is provided.

  The bottom surfaces of the fluid control members (5), (6), (7), (8), (9), (10), and (26) are all flush and each joint (11) (12) (13) (14) ( 15) are also flush with each other, and the joints (11) (12) (13) (14) (15) (27) (28) are fixed to the substrate (31), and each fluid control member (5) ( 6) (7) (8) (9) (10) (26) are connected to the joint (11) (12) (13) (14) (15) (27) (28) by the screw (32) from above. It is fixed.

  In this way, different fluids are introduced from the first inlet pipe connection part (25) of the first joint (11) and the second inlet pipe connection part of the fourth joint (14), and these fluids are switched appropriately so that the mass flow controller is switched. The fluid control device (1) discharged from the outlet pipe connection portion of the seventh joint (28) through (2) is configured.

  In the fluid control device (1), a gasket is arranged at each seal portion (33), but the mass flow controller (2) and the like are fluid controllers that are prone to clogging. Accordingly, a normal gasket is replaced with the gasket filters (41), (51), (61), (81), (91), and (92) of the present invention to prevent clogging.

  As shown in FIG. 2, the gasket filter (41) according to the first embodiment of the present invention comprises an annular gasket body (42) and a filter (43) provided integrally therewith.

  As shown in FIG. 3, the filter (43) is formed by etching a large number of holes (45) in a portion excluding the peripheral portion of the thin metal disk (44). As the etching method, double-sided etching or single-sided etching is appropriately employed depending on the material of the filter (43) and the diameter of the hole (45). In the case of double-sided etching, the shape of each hole (45) has the largest diameter at both end faces of the disk (44) and the diameter at the center of the thickness of the disk (44) as shown in FIG. It is the minimum. In the case of single-sided etching, although not shown, the shape of each hole (45) has the largest diameter on the front surface and the smallest diameter on the back surface.

  An annular recess (46) coaxial with the gasket body (42) is provided on one end surface of the gasket body (42), and a filter housing recess having a smaller diameter is formed on the bottom surface of the recess (46). (47) is provided. The filter housing recess (47) has a depth substantially equal to the thickness of the filter (43) and a diameter substantially equal to the outer diameter of the filter (43), and the filter (43) is provided with the filter housing recess (47). ) And welded to the gasket body (42).

  As a welding method, resistance welding, YAG laser welding, or the like is possible. When the thickness of the filter (43) is 50 μm or more, any of these welding methods can be used. However, when the thickness of the filter (43) is about 30 μm, direct laser welding is performed due to the surface tension of the material. Resistance welding is preferred because it cannot.

  When the thickness of the filter (43) is about 30μm and direct welding is difficult due to the surface tension of the material, the gasket body (52) (62) (82) and the filter (43) (63) are joined together. The form to do is shown below.

  The gasket filter (51) of the second embodiment shown in FIG. 4 is welded by using a pressing ring (55), and an end surface of the gasket body (52) has an annular shape coaxial with the gasket body (52). A recess (53) is provided, and a filter housing recess (54) having a smaller diameter is provided on the bottom surface of the recess (53). The filter housing recess (54) has a diameter deeper than the thickness of the filter (43) and substantially equal to the outer diameter of the filter (43), and the filter (43) is placed on the bottom surface. Then, a pressing ring (55) having an outer diameter substantially equal to the diameter of the filter housing recess (54) is inserted along the peripheral surface of the filter housing recess (54), and the peripheral portion of the filter (43) Is in close contact with the bottom surface of the filter housing recess (54). Welding is performed between the gasket body (52) and the pressing ring (55).

  The gasket filter (61) of the third embodiment shown in FIGS. 5 and 6 is a filter (63) which is welded after crimping with a press. The filter (63) is a filter (43) shown in FIG. ) And a disk portion (64) with a large number of holes (45) and two projecting portions (65) projecting radially from the periphery thereof. The gasket body (62) has a recess (66) for storing the disc portion (64) of the filter (63), an annular protrusion (67) provided along the peripheral edge of the recess (66), and an annular protrusion. A notch (68) is formed in the (67) to accommodate the protrusion (65) of the filter (63).

  The filter (63) of the gasket filter (61) is manufactured in a state where a large number of filters (63) are arranged on one sheet, and the protrusion (65) of the filter (63) is formed by the filter (63). (63) It is a bridge part that connects each other. Therefore, after cutting the filter (63) one by one so as to include this bridge part, the filter (63) is easily separated by placing the filter (63) on the gasket body (62) and caulking with a press. It is attached to the gasket body (62) so that there is no. Therefore, tack welding can be omitted, and this gasket filter (61) can be obtained by laser welding. Also, as shown in FIG. 7, a large number of filters (63) are placed on one sheet (69), placed on the gasket body (62), and cut and caulked one by one by a press. You may make it carry out simultaneously. In this case, the press die (71) includes an inner cutting punch (72) and an outer bending punch (73) protruded downward from the cutting punch (72) by a spring (74). A double structure is assumed. Then, when the protrusion (65) of the filter (63) is aligned with the notch (68) of the annular protrusion (67) of the gasket body (62), the removal allowance formed during the etching is removed from the gasket body (62). The sheet (69) is held by the gasket body (62) by being aligned with the annular protrusion (67). When the press is operated in this state, first, the filter (63) is separated from the sheet (69) by the cutting punch (72) and received by the gasket body (62), and then the filter (by the bending punch (73) ( 63) the protrusion (63) is caulked. Thus, the filter (63) is attached to the gasket main body (62) so that it is not easily separated, and a similar gasket filter (61) is obtained by laser welding in this state. According to the method shown in FIG. 7, the trouble of setting the filters (63) on the gasket body (62) one by one is saved, and the positioning of the filter (63) with respect to the gasket body (62) is performed with high accuracy.

  The gasket filter (81) of the fourth embodiment shown in FIG. 8 does not require welding, and the gasket body (82) is the same as the annular first half (83) shown on the left side of FIG. It consists of the annular second half (84) shown on the right side of the figure, and the first half (83) and the second half (84) pass through the periphery of the filter (43) shown in FIG. It is what has been abutted.

  The first half (83) has a receding butting surface (83b) that is radially outward from the reference butting surface (83a) that is in contact with the peripheral edge of the filter (43) and that is receded from this. . The second half (84) has a projecting butting surface (84b) that is radially outward from the reference butting surface (84a) that is in contact with the peripheral edge of the filter (43) and protrudes further than this. . A filter pressing annular protrusion (85) is provided on the reference abutting surface (84a) of the second half (84). Further, a leak port (86) for confirming fluid leakage is formed between the receding butting surface (83b) and the projecting butting surface (84b). A holding allowance (87) exists between the first half (83) and the second half (84), and the two members with the gasket filter (81) interposed therebetween are attracted to each other. Along with this, the pressing margin (87) becomes zero, and the gasket filter (81) is sandwiched between the two members.

  The gasket filters (91) and (92) shown in FIG. 9 (c) do not require welding and do not require filter etching. That is, a number of bottomed holes (94) are formed by laser processing from the upper surface side in the portion excluding the peripheral edge of the disc (93) shown in FIG. 9 (a), and the bottomed holes shown in FIG. After obtaining the disk (93) with (94), by processing the outer shape of this disk (93), the peripheral portion is the gasket body (95) (98), a large number of holes (97) (100) Gasket filters (91) and (92) are formed in which the gaps are formed as filters (96) and (99). When cutting from the lower surface side, the entire surface may be cut flat like the gasket of (91), and the hole of the filter (99) with respect to the total thickness of the gasket (92) like the gasket of (92) ( 100) may be sharpened so that the bottom surface is concave. Note that the gasket (92) may be formed so that the hole (100) is formed in a penetrating manner after the outer shape is processed first.

  In addition, each gasket filter of the said 1st-4th embodiment is used also in the state incorporated in the fluid controller as follows.

  A fluid controller (101) shown in FIG. 10 has a rectangular parallelepiped block-shaped body (102) in which an inlet passage (103) and an outlet passage (104) are formed, and detects the pressure of the fluid in the outlet passage (104). A sensor (105), a piazo actuator (106) that controls the degree of opening and closing of the inlet passage (103) based on a signal from the pressure sensor (105), and a temperature sensor (112) that detects the temperature near the outlet passage (104) ) And an introduction passage block (107) in which an introduction passage (108) leading to the inlet passage (103) of the main body (102) is formed is abutted against the surface on the inlet side of the main body (102). The gasket filters (41), (51), (61) of the first to fourth embodiments are arranged at the abutting portion between the inlet passage (103) of (102) and the introduction passage (108) of the introduction passage block (107). 81) (91) (92) is installed. An orifice (111) is formed in the outlet passage (104) of the main body (102), and a discharge passage (110) leading to the outlet passage (104) is formed on the outlet side surface of the main body (102). The discharge passage block (109) is abutted.

  A fluid controller (121) shown in FIG. 11 is a mass flow controller, and a fluid in the inlet passage (123) is formed in a rectangular parallelepiped block-shaped main body (122) in which an inlet passage (123) and an outlet passage (124) are formed. A flow sensor (125) for detecting the flow rate of the fluid and a piazo actuator (126) for controlling the opening / closing degree of the outlet passage (124) based on a signal from the flow sensor (125) are attached to the inlet of the main body (122). An introduction passage block (127) in which an introduction passage (128) leading to the passage (123) is formed is abutted against the surface on the inlet side of the main body (122), and the inlet passage (123) of the main body (122) and the introduction passage Any one of the gasket filters (41), (51), (61), (81), (91), and (92) of the first to fourth embodiments is disposed at the abutting portion between the block (127) and the introduction passage (128). It is what is installed. An orifice (131) is formed in the outlet passage (124) of the main body (122), and a discharge passage (130) leading to the outlet passage (124) is formed on the outlet side surface of the main body (122). The discharge passage block (129) is abutted.

It is a figure which shows one example of the fluid control apparatus in which the gasket filter by this invention is used. It is a longitudinal cross-sectional view of 1st Embodiment of the gasket filter by this invention. It is a figure which shows the filter of the gasket filter by this invention, (a) is the front view, (b) is an expanded sectional view of a hole. It is a longitudinal cross-sectional view of 2nd Embodiment of the gasket filter by this invention. It is a longitudinal cross-sectional view of 3rd Embodiment of the gasket filter by this invention. It is the same front view. It is a longitudinal cross-sectional view which shows the outline of the apparatus which manufactures the gasket filter of 3rd Embodiment. It is a longitudinal cross-sectional view of 3rd Embodiment of the gasket filter by this invention. It is a figure which shows 4th Embodiment of the gasket filter by this invention, and its manufacturing process. It is a figure which shows an example of the fluid controller which uses the gasket filter by this invention. It is a figure which shows the other example of the fluid controller which uses the gasket filter by this invention.

Explanation of symbols

(41) (51) (61) (81) (91) (92) Gasket filter
(42) (52) (62) (82) (95) (98) Gasket body
(43) (63) (96) (99) Filter
(44) Disc
(45) (97) (100) Hole
(54) Filter storage recess
(55) Press ring
(64) Disc part
(65) Protrusion
(66) Recess
(67) Annular projection
(68) Notch
(83) 1st half
(83a) (83b) Butting surface
(84) Second half
(84a) (84b) Butting surface
(85) Annular projection for holding filter
(86) Leak Port
(93) Disc
(94) Hole by laser processing
(101) (121) Fluid controller
(102) (122) Block body
(103) (123) Entrance passage
(104) (124) Exit passage
(105) (125) Sensor
(106) (126) Actuator
(107) (127) Passage block
(108) (128) Introduction passage

Claims (11)

A gasket filter comprising an annular gasket body and a filter provided integrally therewith, wherein the filter is formed by making a number of holes in a metal disk-like body. The gasket filter according to claim 1, wherein the pores of the filter are formed by etching. The filter has a disc part and at least one projecting part projecting radially from the peripheral edge of the disc part, and the gasket body is provided with a recess for accommodating the disc part of the filter, along the peripheral part of the recess. The gasket filter according to claim 2, wherein an annular projection provided on the annular projection and a cutout portion provided on the annular projection for receiving the protruding portion of the filter are formed. 4. The gasket filter according to claim 3, wherein the filter is press-fitted into the gasket main body by press so that the projecting portion of the filter is caulked and placed in the notch portion of the gasket main body, and the filter and the gasket main body are welded. . The gasket filter according to claim 2, wherein the gasket main body includes an annular first half and an annular second half, and the first half and the second half are abutted via a peripheral edge of the filter. The gasket filter according to claim 5, wherein an annular protrusion for holding a filter is provided on at least one abutting surface of the first half and the second half. The gasket filter according to claim 6, wherein a leak port for fluid leakage confirmation is formed between the butted surface of the first half and the butted surface of the second half. 2. A plurality of holes are formed by laser processing in a portion excluding the peripheral portion of the disk-shaped body, whereby the peripheral portion is made a gasket body, and the portion where the many holes are made is a filter. Gasket filter. The hole by laser processing is a bottomed hole that opens to one end surface side of the disk-shaped body, and the hole of the filter is also opened to the other end surface side by scraping the other end surface side of the disk-shaped body. The gasket filter according to claim 8. The gasket filter according to claim 1, wherein a surface treatment is applied. A sensor that detects either the pressure or the flow rate of the fluid and an actuator that controls the degree of opening and closing of the fluid passage based on a signal from the sensor are attached to the block-shaped body in which the inlet passage and the outlet passage are formed. A fluid control in which a passage block having an introduction passage leading to an inlet passage of the main body is abutted against the main body, and the gasket filter according to claim 1 is attached to a butt portion between the inlet passage of the main body and the introduction passage of the passage block. vessel.

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