JP2011094778A - Flange and method of manufacturing flange - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flange manufacturable at a low cost, and a method of manufacturing the same. <P>SOLUTION: The method of manufacturing the flange includes steps for: preparing a laminate having a first metal layer composed of an Al-based material and a second metal layer joined to the first metal layer and composed of a Ti-based material; and forming a seal layer having a mounting face and an annular edge formed on the mounting face by processing the second metal layer. The flange has advantages such as light weight, non-magnetism and low discharge gas as the body is composed of the Al-based material, and can prevent the wear of the edge since the edge is composed of the Ti-based material. The flange can be formed by processing the laminate in which the first metal layer composed of the Al-based material is joined to the second metal layer composed of the Ti-based material in advance. By using a used Ti target as the laminate for instance, the flange can be manufactured at a low cost. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a flange formed by joining two metal plates and a manufacturing method thereof.

  A flange used for connecting pipes, connecting pipes and chambers, or sealing pipes is fixed in a state of being pressed against a connection object, thereby sealing the flow path. As the flange, there is a knife-edge type metal seal flange having an edge that abuts against a gasket interposed between the flange and a connection object.

  The flange is required to be hard and not easily damaged because the metal gasket that contacts the flange is deformed to seal the flow path. In addition, when the flange is provided in a pipe connected to a vacuum chamber, a process chamber or the like, it is preferable that the amount of gas released from a portion in contact with the fluid is small. Furthermore, if the magnetic property of the constituent material is small, it can be used in a high magnetic field environment.

  For example, a flange made of aluminum is generally used for a high vacuum system. Aluminum emits less gas because of its oxide film, and has advantages such as light weight, low price, and non-magnetism. However, since aluminum is soft, the edge is damaged when it comes into contact with the gasket, and the sealing performance may decrease with the number of uses.

  For this reason, a flange that protects the edge by forming a hard film such as TiN, CrN, or carbon on the surface of aluminum has been developed. For example, Patent Literature 1 discloses an aluminum alloy flange in which a knife edge portion is covered with a hard surface layer made of a hard carbon film.

Japanese Unexamined Patent Publication No. 63-57989

  However, when forming a hard (dense, high durability) film on the surface of aluminum like the aluminum alloy flange disclosed in Patent Document 1, equipment for film formation such as a vacuum chamber is required, High cost.

  In view of the circumstances as described above, an object of the present invention is to provide a flange that can be manufactured at low cost and a manufacturing method thereof.

In order to achieve the above object, a flange according to an embodiment of the present invention includes a main body and a seal layer.
The main body is made of an Al-based material.
The seal layer has an attachment surface and an annular edge portion formed on the attachment surface, is joined to the main body, and is made of a Ti-based material.

In order to achieve the above object, a flange manufacturing method according to an aspect of the present invention includes a first metal layer made of an Al-based material, and a second material made of a Ti-based material joined to the first metal layer. Providing a laminate having a metal layer.
A seal layer having an attachment surface and an annular edge portion formed on the attachment surface is formed by processing the second metal layer.

It is a sectional side view which shows the flange which concerns on embodiment of this invention. It is a sectional side view explaining the usage aspect of the said flange. It is a sectional side view of each process explaining the manufacturing method of the above-mentioned flange. It is a sectional side view which shows the modification of the said flange. It is a sectional side view which shows the modification of the said flange.

The flange which concerns on one Embodiment of this invention comprises a main body and a sealing layer.
The main body is made of an Al-based material.
The seal layer has an attachment surface and an annular edge portion formed on the attachment surface, is joined to the main body, and is made of a Ti-based material.

  Since the main body is made of an Al-based material (Al, Al alloy, etc.), the flange has advantages such as low emission gas, light weight, low price, non-magnetism, etc. It is possible to prevent wear of the edge portion. The flange can be used as a joint for connecting the pipe to the connection object, a closing plug for closing the flow path provided in the connection object, or the like.

  The main body may have a first flow path, and the seal layer may have a second flow path that communicates with the first flow path and is formed inside the edge portion.

  The flange can circulate fluid (vacuum exhaust, process gas, cooling water, etc.) through the first flow path and the second flow path, and can be used as a joint that connects the connection object and the pipe. Can do.

  The main body may have a piping portion that communicates with the first flow path.

  The flange can connect a pipe via a pipe section. Thereby, it is possible to prevent heat from reaching the edge part and deforming the edge part by connecting the pipe to the pipe part by welding or the like.

A flange manufacturing method according to an embodiment of the present invention includes a first metal layer made of an Al-based material and a second metal layer made of a Ti-based material joined to the first metal layer. Including preparing the body.
A seal layer having an attachment surface and an annular edge portion formed on the attachment surface is formed by processing the second metal layer.

  According to the manufacturing method, in order to manufacture the flange by processing a laminated body in which the first metal layer and the second metal layer are already joined, a hard film is formed on a portion that becomes a main body of the flange. The film forming step is unnecessary, and the flange can be manufactured at a low manufacturing cost.

  The laminate may be a sputtering target.

  The flange can be manufactured by processing a laminate in which a first metal layer made of an Al-based material and a second metal layer made of a Ti-based material are joined. Here, a sputtering target can be used as the stacked body. The sputtering target is configured by bonding a target material to a backing plate. Since the sputtering target generally has a target material having an appropriate thickness and area, the above-mentioned flange is formed by processing a sputtering target having a Ti-based material as a target material according to the size of the flange to be manufactured. Can be manufactured. The flange can also be manufactured by processing a sputtering target in which a target material made of a Ti-based material is bonded to a backing plate made of a material other than an Al-based material, for example. In this case, a laminated body can be obtained by separating the target material from the backing plate and bonding it to a plate made of an Al-based material.

  The sputtering target may be a used sputtering target.

  According to this manufacturing method, since the used sputtering target can be reused, the flange can be manufactured at a low manufacturing cost.

  In the method of manufacturing the flange, further, in the step of forming the main body penetrating the first flow path by processing the first metal layer and processing the second metal layer, the edge You may further form the 2nd flow path which penetrates the said sealing layer inside a part, and connects with the said 1st flow path.

  According to this manufacturing method, it is possible to manufacture a flange that has a flow path and can be used as a joint that connects a connection object and piping.

  In the method for manufacturing the flange, a pipe portion communicating with the first flow path may be formed in the first metal layer.

  According to this manufacturing method, when the pipe is connected to the pipe part by welding or the like, it is possible to prevent heat from reaching the edge part and the edge part from being deformed.

  In the method of manufacturing the flange, the step of forming the pipe portion further includes adding a third metal layer of an Al-based material to the first metal layer, and forming the third metal layer into a pipe shape. May be processed.

  In the case of manufacturing a flange having a pipe part, when the thickness of the first metal layer is insufficient to form the pipe part, the third metal layer made of an Al-based material is formed on the first metal layer. By adding, it is possible to compensate for the thickness required for forming the piping part.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view showing a flange 1 according to an embodiment of the present invention.

As shown in the figure, the flange 1 has a main body 2 and a seal layer 3.
The main body 2 and the seal layer 3 are bonded to each other by diffusion bonding, explosion bonding, brazing, or the like.

  The main body 2 is made of an Al-based material such as Al or an Al alloy. The main body 2 has a flange portion 2a and a piping portion 2b. The flange portion 2a and the piping portion 2b may be made of materials having the same composition, or may be made of materials having different compositions. The piping part 2b can be made into a cylindrical shape, for example. The flange portion 2a has a shape protruding in a direction perpendicular to the central axis direction of the piping portion 2b. For example, the flange portion 2a can have a thickness of 5 mm and a diameter of 200 mm. The main body 2 has a flow path 2c capable of communicating with a connection object. Examples of the connection object include a chamber port, a pipe having a flange portion, and the like.

  The seal layer 3 is made of a Ti-based material such as Ti, a Ti-based alloy, or TiN. As a constituent material of the sealing layer 3, for example, a sputtering target material made of a Ti-based material can be used. Since this type of material has a highly uniform and dense crystal structure, it is possible to stably obtain desired material properties (for example, hardness and strength) required for the seal layer. The seal layer 3 has a mounting surface 3a and an edge portion 3b.

  The attachment surface 3a is the surface of the seal layer 3 opposite to the side bonded to the main body 2, and is a surface connected to the connection object.

  The edge portion 3b is a portion that is formed in an annular shape on the lower surface 3d that is one step lower than the attachment surface 3a, and a gasket that will be described later contacts. The edge portion 3b can be, for example, a protrusion having a triangular cross section and protruding toward the connection target, and faces the edge of the connection target via a gap slightly smaller than the thickness of the gasket. As shown in the drawing, the apex of the edge portion 3b is located on the lower side of the mounting surface 3a, but may be located on the upper side. The shape of the edge portion 3b (edge angle) is not limited to that shown in the figure. The seal layer 3 can have a thickness of 10 mm, for example.

  The seal layer 3 has a flow path 3c that is formed inside the edge portion 3b and communicates with the flow path 2c. The flow path 2c and the flow path 3c have the same diameter, and it is possible to reduce the flow resistance of fluid (vacuum exhaust, process gas, cooling water, etc.). In addition, the diameter of the flow path 2c and the flow path 3c may differ.

  A plurality of bolt holes 4 penetrating both the seal layer 3 and the flange portion 2a are formed on the outer periphery of the edge portion. The bolt holes 4 can be arranged at equal intervals on the same circumference, for example. Note that the bolt hole 4 is not necessarily provided when other fastening means (clamp or the like) is used. The flange 1 and the flange of the connection object are fixed while being pressed by the fastening means.

Next, how the flange 1 is used will be described.
FIG. 2 is a diagram illustrating a usage mode of the flange 1.

  The figure shows a state where the flange 1 is attached to the connection object S. The connection object S is, for example, an exhaust port of a vacuum chamber, and has a flange portion Sa and a piping portion Sb. The vacuum chamber is used for, for example, heat treatment, film formation processing, and the like. Further, the connection object S is not limited to the vacuum chamber, and may be a piping component in addition to the positive pressure chamber. The flange 1 is connected to not only the exhaust port but also a gas introduction port. The connection object S can be made of stainless steel, for example. An edge portion Sc is formed in the flange portion Sa.

  The flange 1 has an attachment surface 3a abutted against the flange portion Sa of the connection object S via an annular gasket G abutted against the edge portion 3b, and the connection object S by a fastener C such as a bolt and a nut. Pressed. Thereby, the gasket G is pinched by the edge part 3b and the edge part Sc of a connection target object, and deform | transforms, and a flow path is sealed. In addition, the gasket G can be made of a soft metal such as Al or Cu as compared with the material of the edge portion 3b and Sc.

  As described above, since the gasket G is pressed against the edge portion 3b, when the edge portion 3b is a soft material of an Al-based material, the edge portion 3b is worn by repeated mounting, and the sealing performance may be deteriorated. On the other hand, the flange 1 according to the present embodiment has the edge portion 3b made of a Ti-based material that is harder than the Al-based material. Is possible.

  Also, the Al-based material that is the material of the main body 2 and the Ti-based material that is the material of the seal layer 3 are both completely non-magnetic (relative magnetic permeability 1.001 or less) material with a small amount of released gas. It can be a non-magnetic flange. Further, since the flange 1 has a main body 2 made of an Al-based material, the flange 1 can be made lightweight, and in addition, since the Al-based material is suitable for welding, a pipe is connected to the pipe portion 2b. It becomes easy. Further, the Al-based material is excellent in workability, and the main body 2 can be processed and formed with high accuracy.

Next, a method for manufacturing the flange 1 will be described.
FIG. 3 is a diagram for explaining a method of manufacturing the flange 1.

  FIG. 3A is a diagram showing the stacked body 1 ′. Here, as the stacked body 1 ′, a used sputtering target that has already been subjected to sputtering is used. The stacked body 1 ′ is formed by joining the second metal layer 3 ′ and the first metal layer 2 ′. The second metal layer 3 'is made of a Ti-based material, and the first metal layer 2' is made of an Al-based material. The second metal layer 3 ′ only needs to have a thickness necessary for manufacturing the seal layer 3. The stacked body 1 ′ is not limited to the used sputtering target, and an unused sputtering target can be used. However, the manufacturing cost can be reduced by using the used sputtering target. For example, the laminated body 1 ′ can be obtained by cutting out only the non-erosion region (region where the progress of sputtering is small) of the sputtering target.

  Next, as shown in FIG. 3B, the third metal layer 5 is added to the first metal layer 2 'by casting. The third metal layer 5 is made of the same material as the first metal layer 2 ′, but may be made of a different material. The third metal layer 5 can have a thickness corresponding to the length of the piping portion 2b (FIG. 1). By this step, even if the first metal layer 2 ′ does not have the thickness necessary for manufacturing the pipe portion 2b or the pipe portion 2b and the flange portion 2a, the thickness can be compensated. is there. The third metal layer 5 can also be added by welding, molten metal forging, or the like. By adding the third metal layer 5, the strength of the first metal layer 2 ′ can be supplemented and handling can be facilitated. Since the first metal layer 2 ′ is a backing plate, the cooling water passage may be formed inside.

  Next, as shown in FIG. 3C, the surface of the second metal layer 3 'is planarized. Since the second metal layer 3 'is sputtered, it has a non-uniform surface, but is flattened by this process to form the attachment surface 3a. For the planarization, methods such as polishing and cutting can be used. Finally, the flange 1 shown in FIG. 1 can be manufactured by processing the laminate 1 ′.

  The laminated body 1 ′ can be processed by a method such as cutting or grinding with a machine tool such as a lathe or a drilling machine. As an example of processing, the laminated body 1 ′ is cut out into a disk shape, and the third metal layer 5 is subjected to outer diameter grinding to form a portion that becomes the pipe portion 2 b. Next, a hole penetrating the second metal layer 3 ′, the first metal layer 2 ′, and the third metal layer 5 is formed in the center of the stacked body 1. By expanding the hole by grinding the inner diameter, the flow path 3 c is formed in the second metal layer 3 ′, and the flow path 2 c is formed in the first metal layer 2 ′ and the third metal layer 5. Polishing etc. if necessary. Next, the edge part 3b and the surface 3d are formed by grinding the surface of the first metal layer 2 '. Next, a plurality of bolt holes 4 penetrating the seal layer 3 and the flange portion 2a are formed. The processing method of the laminated body 1 ′ is not limited to this. For example, since the edge portion 3 b needs high processing accuracy in order to improve the sealing performance, a processing method such as electric discharge processing or etching may be used.

  According to the manufacturing method of the flange 1 as described above, the flange 1 is manufactured by processing the laminated body 1 ′ composed of the second metal layer 3 ′ and the first metal layer 2 ′ that are already bonded. Can do. That is, it is not necessary to separately join the portion that becomes the seal layer 3 and the portion that becomes the main body 2 or the step of forming a hard film, and the manufacturing cost can be reduced. In particular, since the used target is used as the stacked body 1 ′, the used target can be reused, and the manufacturing cost can be further reduced.

  Further, the flange 1 can be manufactured from a sputtering target having a backing plate made of, for example, Cu and a target material made of a Ti-based material. In this case, in the used sputtering target, the target material made of Ti-based material is separated from the backing plate, and it is joined to the plate made of Al-based material. In this way, it is possible to prepare a laminate 1 ′ having a first metal layer 2 ′ made of an Al-based material and a second metal layer 3 ′ made of a Ti-based material, and manufacture the flange 1. is there.

  The present invention is not limited only to the above-described embodiment, and can be changed within a range not departing from the gist of the present invention.

  As shown in FIG. 4, the flange 1 may not have the piping portion 2 b. In this case, when the first metal layer 2 ′ has a thickness necessary for forming the flange portion 2a, the step of adding the third metal layer 5 to the first metal layer 2 ′ is unnecessary. . Moreover, as shown in FIG. 5, the flange 1 can also be used as a block for closing the flow path of the connection object. Also in this case, when the first metal layer 2 ′ has a thickness necessary for forming the flange portion 2a, the step of adding the third metal layer 5 to the first metal layer 2 ′ is unnecessary. is there.

  In the above-described embodiment, the step of adding the third metal layer 5 is performed before the planarization step. However, it may be performed after the planarization step or after the processing step. . Further, when the first metal layer 2 'has a sufficient thickness for forming the pipe portion 2b, the third metal layer 5 may not be added.

  In the above-described embodiment, the used sputtering target is used as the stacked body 1 ′, but is not limited thereto. An unused sputtering target can be used as the laminate 1 ′. When the unused sputtering target is used as the stacked body 1 ′, the above-described step of planarizing the second metal layer 3 ′ is not necessary. As an unused sputtering target, for example, a non-standard sputtering target can be used, and the manufacturing cost of the flange 1 can be reduced.

  In the above-described embodiment, the third metal layer 5 is added to the first metal layer 2 ′, and then the third metal layer 5 is processed to form the pipe portion 2 b. However, the present invention is not limited to this, and it is also possible to form the pipe part 2b by directly connecting a member processed into the shape of the pipe part 2b to the first metal layer 2 'by welding or the like.

DESCRIPTION OF SYMBOLS 1 Flange 1 'Laminated body 2 Main body 2a Flange part 2b Piping part 2c Flow path 2' 1st metal layer 3 Seal layer 3a Mounting surface 3b Edge part 3c Flow path 3 '2nd metal layer 5 3rd metal layer

Claims (9)

A main body made of an Al-based material;
A flange having an attachment surface and an annular edge portion formed on the attachment surface, and a seal layer made of a Ti-based material joined to the main body. The flange according to claim 1,
The body has a first flow path;
The seal layer has a second flow path that communicates with the first flow path and is formed inside the edge portion. The flange according to claim 2, wherein
The main body has a piping portion communicating with the first flow path. Preparing a laminate having a first metal layer made of an Al-based material and a second metal layer made of a Ti-based material joined to the first metal layer;
A flange manufacturing method in which a seal layer having an attachment surface and an annular edge portion formed on the attachment surface is formed by processing the second metal layer. A method of manufacturing a flange according to claim 4,
The said laminated body is a sputtering target The manufacturing method of a flange. A method of manufacturing a flange according to claim 5,
The sputtering target is a used sputtering target. The method of manufacturing a flange according to claim 6, further comprising:
By processing the first metal layer, a main body penetrating the first flow path is formed,
In the step of processing the second metal layer, a flange is further formed by penetrating the seal layer inside the edge portion and communicating with the first channel. The flange manufacturing method according to claim 7, further comprising:
A method for manufacturing a flange, wherein a pipe portion communicating with the first flow path is formed in the first metal layer. The method for manufacturing a flange according to claim 8, further comprising:
The step of forming the pipe part includes adding a third metal layer of an Al-based material to the first metal layer, and processing the third metal layer into a pipe shape.

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