JP2008201899A - Surface-protecting adhesive tape for solid state image pickup device and method for mounting solid state image pickup device - Google Patents
Surface-protecting adhesive tape for solid state image pickup device and method for mounting solid state image pickup device Download PDFInfo
- Publication number
- JP2008201899A JP2008201899A JP2007039641A JP2007039641A JP2008201899A JP 2008201899 A JP2008201899 A JP 2008201899A JP 2007039641 A JP2007039641 A JP 2007039641A JP 2007039641 A JP2007039641 A JP 2007039641A JP 2008201899 A JP2008201899 A JP 2008201899A
- Authority
- JP
- Japan
- Prior art keywords
- adhesive tape
- solid state
- meth
- image pickup
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002390 adhesive tape Substances 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000007787 solid Substances 0.000 title abstract description 7
- 239000002734 clay mineral Substances 0.000 claims abstract description 16
- 239000012790 adhesive layer Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 42
- 238000003384 imaging method Methods 0.000 claims description 21
- 230000001070 adhesive effect Effects 0.000 claims description 19
- 239000000853 adhesive Substances 0.000 claims description 18
- 239000010410 layer Substances 0.000 claims description 18
- 230000001681 protective effect Effects 0.000 claims description 13
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 16
- 239000012298 atmosphere Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000011109 contamination Methods 0.000 abstract description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 32
- -1 polyethylene terephthalate Polymers 0.000 description 23
- 239000000178 monomer Substances 0.000 description 17
- 238000002834 transmittance Methods 0.000 description 10
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 229910052901 montmorillonite Inorganic materials 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229920000058 polyacrylate Polymers 0.000 description 6
- 239000003431 cross linking reagent Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 4
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 239000011112 polyethylene naphthalate Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical group CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007334 copolymerization reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- MHDVGSVTJDSBDK-UHFFFAOYSA-N dibenzyl ether Chemical compound C=1C=CC=CC=1COCC1=CC=CC=C1 MHDVGSVTJDSBDK-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- IVSZLXZYQVIEFR-UHFFFAOYSA-N m-xylene Chemical group CC1=CC=CC(C)=C1 IVSZLXZYQVIEFR-UHFFFAOYSA-N 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920001230 polyarylate Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920006290 polyethylene naphthalate film Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- OXHNLMTVIGZXSG-UHFFFAOYSA-N 1-Methylpyrrole Chemical compound CN1C=CC=C1 OXHNLMTVIGZXSG-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- XLPJNCYCZORXHG-UHFFFAOYSA-N 1-morpholin-4-ylprop-2-en-1-one Chemical compound C=CC(=O)N1CCOCC1 XLPJNCYCZORXHG-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 1
- BEWCNXNIQCLWHP-UHFFFAOYSA-N 2-(tert-butylamino)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCNC(C)(C)C BEWCNXNIQCLWHP-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- PTTPXKJBFFKCEK-UHFFFAOYSA-N 2-Methyl-4-heptanone Chemical compound CC(C)CC(=O)CC(C)C PTTPXKJBFFKCEK-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- 229940093475 2-ethoxyethanol Drugs 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- NDVWOBYBJYUSMF-UHFFFAOYSA-N 2-methylcyclohexan-1-ol Chemical compound CC1CCCCC1O NDVWOBYBJYUSMF-UHFFFAOYSA-N 0.000 description 1
- AUZRCMMVHXRSGT-UHFFFAOYSA-N 2-methylpropane-1-sulfonic acid;prop-2-enamide Chemical compound NC(=O)C=C.CC(C)CS(O)(=O)=O AUZRCMMVHXRSGT-UHFFFAOYSA-N 0.000 description 1
- YYIOIHBNJMVSBH-UHFFFAOYSA-N 2-prop-2-enoyloxynaphthalene-1-sulfonic acid Chemical compound C1=CC=C2C(S(=O)(=O)O)=C(OC(=O)C=C)C=CC2=C1 YYIOIHBNJMVSBH-UHFFFAOYSA-N 0.000 description 1
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 1
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 1
- VGVHNLRUAMRIEW-UHFFFAOYSA-N 4-methylcyclohexan-1-one Chemical compound CC1CCC(=O)CC1 VGVHNLRUAMRIEW-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NOWKCMXCCJGMRR-UHFFFAOYSA-N Aziridine Chemical compound C1CN1 NOWKCMXCCJGMRR-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 description 1
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 241001595840 Margarites Species 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- NYXVMNRGBMOSIY-UHFFFAOYSA-N OCCC=CC(=O)OP(O)(O)=O Chemical compound OCCC=CC(=O)OP(O)(O)=O NYXVMNRGBMOSIY-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 229920006243 acrylic copolymer Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- HPTYUNKZVDYXLP-UHFFFAOYSA-N aluminum;trihydroxy(trihydroxysilyloxy)silane;hydrate Chemical compound O.[Al].[Al].O[Si](O)(O)O[Si](O)(O)O HPTYUNKZVDYXLP-UHFFFAOYSA-N 0.000 description 1
- 229940072049 amyl acetate Drugs 0.000 description 1
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 1
- 230000003712 anti-aging effect Effects 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910001919 chlorite Inorganic materials 0.000 description 1
- 229910052619 chlorite group Inorganic materials 0.000 description 1
- QBWCMBCROVPCKQ-UHFFFAOYSA-N chlorous acid Chemical compound OCl=O QBWCMBCROVPCKQ-UHFFFAOYSA-N 0.000 description 1
- 229910052620 chrysotile Inorganic materials 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- GCFAUZGWPDYAJN-UHFFFAOYSA-N cyclohexyl 3-phenylprop-2-enoate Chemical compound C=1C=CC=CC=1C=CC(=O)OC1CCCCC1 GCFAUZGWPDYAJN-UHFFFAOYSA-N 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 229910001649 dickite Inorganic materials 0.000 description 1
- YGANSGVIUGARFR-UHFFFAOYSA-N dipotassium dioxosilane oxo(oxoalumanyloxy)alumane oxygen(2-) Chemical compound [O--].[K+].[K+].O=[Si]=O.O=[Al]O[Al]=O YGANSGVIUGARFR-UHFFFAOYSA-N 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- UIWXSTHGICQLQT-UHFFFAOYSA-N ethenyl propanoate Chemical compound CCC(=O)OC=C UIWXSTHGICQLQT-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 239000011086 glassine Substances 0.000 description 1
- 229910052621 halloysite Inorganic materials 0.000 description 1
- 229910000271 hectorite Inorganic materials 0.000 description 1
- KWLMIXQRALPRBC-UHFFFAOYSA-L hectorite Chemical compound [Li+].[OH-].[OH-].[Na+].[Mg+2].O1[Si]2([O-])O[Si]1([O-])O[Si]([O-])(O1)O[Si]1([O-])O2 KWLMIXQRALPRBC-UHFFFAOYSA-L 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 229910052622 kaolinite Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229910052630 margarite Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052627 muscovite Inorganic materials 0.000 description 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229930014626 natural product Natural products 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229940078552 o-xylene Drugs 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 229910052628 phlogopite Inorganic materials 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- UIIIBRHUICCMAI-UHFFFAOYSA-N prop-2-ene-1-sulfonic acid Chemical compound OS(=O)(=O)CC=C UIIIBRHUICCMAI-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000003578 releasing effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- CWBIFDGMOSWLRQ-UHFFFAOYSA-N trimagnesium;hydroxy(trioxido)silane;hydrate Chemical compound O.[Mg+2].[Mg+2].[Mg+2].O[Si]([O-])([O-])[O-].O[Si]([O-])([O-])[O-] CWBIFDGMOSWLRQ-UHFFFAOYSA-N 0.000 description 1
- 229940096522 trimethylolpropane triacrylate Drugs 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2433/00—Presence of (meth)acrylic polymer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Inorganic Chemistry (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Adhesive Tapes (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Studio Devices (AREA)
Abstract
Description
本発明は、固体撮像デバイス用表面保護粘着テープ及びこれを用いた固体撮像デバイスの実装方法、に関するものである。 The present invention relates to a surface protective adhesive tape for a solid-state imaging device and a method for mounting a solid-state imaging device using the same.
固体撮像デバイスの製造工程において、実装および製造工程における映像センサ表面へのゴミの付着、傷つきを防止するために、映像センサの受光部側に対して粘着剤層を有する表面保護粘着テープを貼り合せる手法が取られている。 In the manufacturing process of a solid-state imaging device, a surface protective adhesive tape having an adhesive layer is bonded to the light receiving part side of the image sensor in order to prevent dust from adhering to the surface of the image sensor during mounting and manufacturing processes. The method is taken.
このとき、部品実装工程は、映像センサの端子部と実装基板を位置合わせした状態で半田リフロー炉へ投入することで一度に接続実装する方法が用いられることが多くなり、半田付け等の高温領域での工程が含まれるため、基材であるフィルムおよび粘着剤層には、耐熱性が要求される。しかし、現状の表面保護粘着テープの多くは、上記工程に相当する耐熱性を有さないため、部品実装工程の際に、一度、表面保護粘着テープが剥され、部品実装工程後に、再度、別途表面保護粘着テープを貼り合せることになる。 At this time, in the component mounting process, a method of connecting and mounting at a time by using a solder reflow furnace in a state where the terminal portion of the image sensor and the mounting substrate are aligned is often used, and a high temperature region such as soldering is used. Therefore, heat resistance is required for the film and the pressure-sensitive adhesive layer that are base materials. However, since many of the current surface protective adhesive tapes do not have the heat resistance equivalent to the above process, the surface protective adhesive tape is once peeled off during the component mounting process, and again after the component mounting process. A surface protective adhesive tape will be attached.
現在その改善策として、ポリイミドを主成分とした高耐熱性を有するフィルムを用いた表面保護用粘着テープを用いる手法も採用されているが、ポリイミドフィルムが茶褐色の色相を有するために、視認性が悪く、部品実装後の光学検査を行う際の全光線透過率が低い。そのため、テープ貼付形態での光学検査は困難である。 Currently, as an improvement measure, a method using a surface-protective adhesive tape using a high heat-resistant film mainly composed of polyimide is also adopted, but the visibility is low because the polyimide film has a brownish hue. Unfortunately, the total light transmittance is low when performing optical inspection after component mounting. For this reason, optical inspection in a tape application form is difficult.
そこで、ポリエチレンテレフタラートやポリエチレンナフタレートのような透明性に秀でたフィルムを使用する手法が提案されている(特許文献1)。 Then, the method of using the film excellent in transparency like a polyethylene terephthalate and a polyethylene naphthalate is proposed (patent document 1).
しかし、高温雰囲気での工程において、粘着剤層の耐熱性が低い場合には、映像センサ表面から粘着テープが剥がれ、傷付きやゴミの付着などの問題を生ずる場合がある。 However, if the heat resistance of the pressure-sensitive adhesive layer is low in a process in a high-temperature atmosphere, the pressure-sensitive adhesive tape may be peeled off from the surface of the image sensor, which may cause problems such as scratches and dust adhesion.
本発明は、高温雰囲気下における固体撮像デバイスの製造工程において、映像センサ表面を異物による汚染、傷つきから保護するとともに、映像センサから、粘着テープが剥離しない固体撮像デバイス用表面保護用粘着テープ、およびこの粘着テープを用いた固体撮像デバイスの実装方法を提供することを目的とする。 The present invention protects the surface of a video sensor from contamination and scratches due to foreign matters in the manufacturing process of a solid-state imaging device in a high-temperature atmosphere, and the adhesive tape for surface protection for a solid-state imaging device in which the adhesive tape does not peel from the video sensor, and It aims at providing the mounting method of the solid-state imaging device using this adhesive tape.
本発明者らは、前記課題を解決すべく鋭意検討を重ねた結果、以下粘着テープにより、上記目的を達成することができることを見出し、本発明を完成するに至った。 As a result of intensive studies to solve the above problems, the present inventors have found that the above object can be achieved with an adhesive tape, and have completed the present invention.
すなわち、本発明は、基材の片面に粘着剤層を有する固体撮像デバイス用表面保護粘着テープであって、前記粘着剤層が親油性層状粘土鉱物を含有することを特徴とする。 That is, the present invention is a surface protective adhesive tape for a solid-state imaging device having an adhesive layer on one side of a substrate, wherein the adhesive layer contains a lipophilic layered clay mineral.
本発明の固体撮像デバイス用表面保護粘着テープは、前記粘着剤層が、粘着剤100重量部に対して親油性層状粘土鉱物を1〜40重量部含有することが好ましい。 In the surface protective pressure-sensitive adhesive tape for a solid-state imaging device of the present invention, the pressure-sensitive adhesive layer preferably contains 1 to 40 parts by weight of a lipophilic layered clay mineral with respect to 100 parts by weight of the pressure-sensitive adhesive.
本発明の固体撮像デバイス用表面保護粘着テープは、前記親油性層状粘土鉱物が、層状珪酸塩であることが好ましい。 In the surface protective adhesive tape for a solid-state imaging device according to the present invention, the lipophilic layered clay mineral is preferably a layered silicate.
本発明の固体撮像デバイスの実装方法は、前記固体撮像デバイス用表面保護粘着テープを用いることを特徴とする。 The solid-state imaging device mounting method of the present invention is characterized by using the surface protective adhesive tape for a solid-state imaging device.
本発明の固体撮像デバイス用表面保護粘着テープは、粘着剤層に親油性の層状粘土鉱物を含有することにより、粘着剤の凝集力が高まり、部品実装工程での高温条件下において、被着体、例えば映像センサの受光部側に対して、粘着力を保持することができるため、映像センサから剥がれることなく、映像センサ表面を異物による汚染、傷つきから保護することができる。また、180℃程度の高温加熱処理後であっても、映像センサに対して、糊残りを生じさせることなく、剥離することができ、有効である。 The surface protective pressure-sensitive adhesive tape for solid-state imaging device of the present invention contains a lipophilic layered clay mineral in the pressure-sensitive adhesive layer, so that the cohesive force of the pressure-sensitive adhesive is increased, and the adherend is subjected to high temperature conditions in the component mounting process. For example, since the adhesive force can be maintained with respect to the light receiving portion side of the image sensor, the surface of the image sensor can be protected from contamination and scratches by a foreign substance without being peeled off from the image sensor. Even after high-temperature heat treatment at about 180 ° C., the image sensor can be peeled off without causing adhesive residue, which is effective.
以下、本発明の実施の形態について説明する。 Embodiments of the present invention will be described below.
本発明の粘着テープは、基本的に、基材および基材の片面に設けられた粘着剤層から形成されるが、少なくとも片方の面に離型処理を施した離型フィルムを、粘着剤層を介して貼り合わせても良い。 The pressure-sensitive adhesive tape of the present invention is basically formed of a base material and a pressure-sensitive adhesive layer provided on one side of the base material, and a release film having a release treatment applied to at least one side is used as a pressure-sensitive adhesive layer. You may stick together.
粘着テープの基材は、特に限定されないが、高温条件下、例えば100〜200℃の温度範囲において耐熱性を有するフィルムであることが好ましい。具体的には、ポリエチレンテレンテレフタレート(PET)フィルム、ポリエチレンナフタレートフィルム(PEN)、ポリエーテルサルフォン(PES)フィルム、ポリエーテルイミド(PEI)フィルム、ポリサルフォン(PSF)フィルム、ポリフェニレンサルファイド(PPS)フィルム、ポリエーテルエーテルケトン(PEEK)フィルム、ポリアリレート(PAR)フィルム、アラミドフィルム、ポリイミドフィルム、又は液晶ポリマー(LCP)フィルムからなることが好ましい。 Although the base material of an adhesive tape is not specifically limited, It is preferable that it is a film which has heat resistance in high temperature conditions, for example in the temperature range of 100-200 degreeC. Specifically, polyethylene terephthalate (PET) film, polyethylene naphthalate film (PEN), polyethersulfone (PES) film, polyetherimide (PEI) film, polysulfone (PSF) film, polyphenylene sulfide (PPS) film , A polyetheretherketone (PEEK) film, a polyarylate (PAR) film, an aramid film, a polyimide film, or a liquid crystal polymer (LCP) film.
基材の厚さは、10〜50μmが好ましく、より好ましくは30〜45μm、さらに好ましくは35〜40μmであることが望ましい。基材の厚さが10μm未満の場合、剥離する際に剥離し難い。また、50μmを超える場合には、高温雰囲気中において、センサから剥がれてしまう。 As for the thickness of a base material, 10-50 micrometers is preferable, More preferably, it is 30-45 micrometers, More preferably, it is desirable that it is 35-40 micrometers. When the thickness of the substrate is less than 10 μm, it is difficult to peel off when peeling. Moreover, when exceeding 50 micrometers, it will peel from a sensor in a high temperature atmosphere.
基材の熱収縮率は、1.0%以下であることが好ましく、より好ましくは0.5%以下であり、更に好ましくは、0.3%以下である。熱収縮率の測定方法は、テープ形態にて、粘着テープを20mm角にカットし、BA板に貼り合わせ、180℃の温度条件下で1時間放置し、その加熱前後のテープのサイズを、投影機(ミツトヨ製:PROFILE PROJECTOR PJ−H300F)を用いてMD方向およびTD方向のいずれもについて測定する。なお、BA板とは、JIS「BA仕上げ」に準じ、BA5号に表面仕上げしたSUS304板(日本金属(株)製BA5号仕上げSUS304)をいう。なお、基材の収縮率や映像センサへの貼り付けを鑑みると、耐熱性と貼り合わせの際の視認性を併せ持つポリエチレンナフタレートを主成分とする基材からなることが好ましい。 The heat shrinkage rate of the substrate is preferably 1.0% or less, more preferably 0.5% or less, and still more preferably 0.3% or less. The heat shrinkage rate is measured in the form of a tape by cutting the adhesive tape into 20 mm square, pasting it on a BA plate, leaving it at 180 ° C. for 1 hour, and projecting the tape size before and after the heating. Both MD direction and TD direction are measured using a machine (Mitutoyo: PROFILE PROJECTOR PJ-H300F). The BA plate refers to a SUS304 plate (BA5 finish SUS304 manufactured by Nippon Metal Co., Ltd.) surface-finished to BA5 in accordance with JIS “BA finish”. In view of the shrinkage rate of the base material and sticking to the image sensor, the base material is preferably made of a base material mainly composed of polyethylene naphthalate having both heat resistance and visibility at the time of pasting.
本発明の粘着剤層については、粘着性及び耐熱性を有するものであれば、特に限定されないが、例えば、アクリル系粘着剤などが挙げられる。アクリル系粘着剤としては、具体的には、少なくともアルキル(メタ)アクリレートを含むモノマーの共重合から得られたアクリル系ポリマーからなる粘着剤である。ここでいうアルキル(メタ)アクリレートの例としては、メチル(メタ)アクリレート,エチル(メタ)アクリレート,ブチル(メタ)アクリレート,イソアミル(メタ)アクリレート,n−ヘキシル(メタ)アクリレート,2−エチルヘキシル(メタ)アクリレート,イソオクチル(メタ)アクリレート,イソノニル(メタ)アクリレート,デシシル(メタ)アクリレート,ドデシル(メタ)アクリレートなどが挙げられる。前記アクリル系粘着剤は比較的耐熱性も高く、本発明に最も好適な粘着剤である。 Although it will not specifically limit about the adhesive layer of this invention if it has adhesiveness and heat resistance, For example, an acrylic adhesive etc. are mentioned. Specifically, the acrylic pressure-sensitive adhesive is a pressure-sensitive adhesive made of an acrylic polymer obtained by copolymerization of a monomer containing at least an alkyl (meth) acrylate. Examples of the alkyl (meth) acrylate herein include methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, isoamyl (meth) acrylate, n-hexyl (meth) acrylate, 2-ethylhexyl (meth) ) Acrylate, isooctyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, dodecyl (meth) acrylate, and the like. The acrylic pressure-sensitive adhesive has relatively high heat resistance and is the most suitable pressure-sensitive adhesive for the present invention.
前記アクリル系ポリマーは、凝集力、耐熱性などの改質を目的として、必要に応じ、前記(メタ)アクリル酸アルキルエステルと共重合可能な他のモノマー成分に対応する単位を含んでいてもよい。このようなモノマー成分として、例えば、アクリル酸、メタクリル酸、カルボキシエチル(メタ)アクリレート、カルボキシペンチル(メタ)アクリレート、イタコン酸、マレイン酸、フマル酸、クロトン酸などのカルボキシル基含有モノマー;無水マレイン酸、無水イタコン酸などの酸無水物モノマー;(メタ)アクリル酸2−ヒドロキシエチル、(メタ)アクリル酸2−ヒドロキシプロピル、(メタ)アクリル酸4−ヒドロキシブチル、(メタ)アクリル酸6−ヒドロキシヘキシル、(メタ)アクリル酸8−ヒドロキシオクチル、(メタ)アクリル酸10−ヒドロキシデシル、(メタ)アクリル酸12−ヒドロキシラウリル、(4−ヒドロキシメチルシクロヘキシル)メチル(メタ)アクリレートなどのヒドロキシル基含有モノマー;スチレンスルホン酸、アリルスルホン酸、2−(メタ)アクリルアミド−2−メチルプロパンスルホン酸、(メタ)アクリルアミドプロパンスルホン酸、スルホプロピル(メタ)アクリレート、(メタ)アクリロイルオキシナフタレンスルホン酸などのスルホン酸基含有モノマー;2−ヒドロキシエチルアクリロイルホスフェートなどのリン酸基含有モノマー;(メタ)アクリル酸グリシジルエステル、(メタ)アクリルアミド、(メタ)アクリル酸N−ヒドロキシメチルアミド、(メタ)アクリル酸アルキルアミノアルキルエステル(例えば、ジメチルアミノエチルメタクリレート、t−ブチルアミノエチルメタクリレート等)、N−ビニルピロリドン,アクリロイルモルフォリン、酢酸ビニル、プロピオン酸ビニル、スチレン、アクリロニトリル;(メタ)アクリル酸シクロアルキルエステル(例えば、シクロペンチルエステル、シクロヘキシルエステルなど)などがあげられる。これら共重合可能なモノマー成分は、1種又は2種以上使用できる。前記共重合可能なモノマーの使用量は、全モノマー成分の70重量%以下が好ましく、40重量%以下がより好ましい。 The acrylic polymer may contain units corresponding to other monomer components copolymerizable with the (meth) acrylic acid alkyl ester, if necessary, for the purpose of modifying cohesive force, heat resistance and the like. . Examples of such monomer components include carboxyl group-containing monomers such as acrylic acid, methacrylic acid, carboxyethyl (meth) acrylate, carboxypentyl (meth) acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid; maleic anhydride Acid anhydride monomers such as itaconic anhydride; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate Hydroxyl group-containing monomers such as 8-hydroxyoctyl (meth) acrylate, 10-hydroxydecyl (meth) acrylate, 12-hydroxylauryl (meth) acrylate, (4-hydroxymethylcyclohexyl) methyl (meth) acrylate; The Sulfonic acid groups such as lensulfonic acid, allylsulfonic acid, 2- (meth) acrylamide-2-methylpropanesulfonic acid, (meth) acrylamidepropanesulfonic acid, sulfopropyl (meth) acrylate, (meth) acryloyloxynaphthalenesulfonic acid Containing monomer; Phosphoric acid group-containing monomer such as 2-hydroxyethylacryloyl phosphate; (meth) acrylic acid glycidyl ester, (meth) acrylamide, (meth) acrylic acid N-hydroxymethylamide, (meth) acrylic acid alkylaminoalkyl ester (For example, dimethylaminoethyl methacrylate, t-butylaminoethyl methacrylate, etc.), N-vinylpyrrolidone, acryloylmorpholine, vinyl acetate, vinyl propionate, styrene, acryloni Lil; (meth) acrylic acid cycloalkyl esters (e.g., cyclopentyl ester and cyclohexyl ester) and the like, such as. One or more of these copolymerizable monomer components can be used. The amount of the copolymerizable monomer used is preferably 70% by weight or less, more preferably 40% by weight or less based on the total monomer components.
さらに、前記アクリル系ポリマーは、架橋させるため、多官能性モノマーなども、必要に応じて共重合用モノマー成分として含むことができる。このような多官能性モノマーとして、例えば、ヘキサンジオールジ(メタ)アクリレート、(ポリ)エチレングリコールジ(メタ)アクリレート、(ポリ)プロピレングリコールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ペンタエリスリトールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、エポキシ(メタ)アクリレート、ポリエステル(メタ)アクリレート、ウレタン(メタ)アクリレートなどがあげられる。これらの多官能性モノマーも1種又は2種以上用いることができる。多官能性モノマーの使用量は、粘着特性等の点から、全モノマー成分の70重量%以下がこのましく、30重量%以下がより好ましい。 Furthermore, since the acrylic polymer is crosslinked, a polyfunctional monomer or the like can be included as a monomer component for copolymerization as necessary. Examples of such polyfunctional monomers include hexanediol di (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, (poly) propylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, Pentaerythritol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) Examples include acrylates. These polyfunctional monomers can also be used alone or in combination of two or more. The amount of the polyfunctional monomer used is preferably 70% by weight or less, more preferably 30% by weight or less, based on the adhesive properties and the like.
また、これらのアクリル系粘着剤には適宜な架橋剤を含有しうる。例えば一例として、イソシアネート架橋剤、エポキシ架橋剤、アジリジン系化合物、キレート系架橋剤などである。 Further, these acrylic pressure-sensitive adhesives can contain an appropriate crosslinking agent. For example, an isocyanate crosslinking agent, an epoxy crosslinking agent, an aziridine-based compound, a chelate-based crosslinking agent and the like are examples.
架橋剤の使用量は特に制限されるものではないが、例えば、前記アクリル系ポリマー100重量部に対して、0.1〜15重量部が好ましく、1〜10重量部がより好ましい。 Although the usage-amount of a crosslinking agent in particular is not restrict | limited, For example, 0.1-15 weight part is preferable with respect to 100 weight part of said acrylic polymers, and 1-10 weight part is more preferable.
親油性の層状粘土鉱物としては、特に限定されないが、層状珪酸塩を用いることが好ましい態様である。層状珪酸塩としては、例えば、サボナイト、ソーコナイト、スチブンサイト、ヘクトライト、マーガライト、タルク、金雲母、白雲母、クリソタイル、緑泥石、バーミキュライト、カオリナイト、ザンソフィライト、ディッカイト、ナクライト、バイロフィライト、モンモリロナイト、ハイデライト、ノントナイト、テトラシリリックマイカ、ナトリウムテニオライト、アンチゴライト、ハロイサイトなどが挙げられる。前記層状珪酸塩は、天然物又は合成物のいずれであってもよく、これらの1種類あるいは2種類以上を同時に使用しても問題ないが、特に、モンモリロナイトを使用することが好ましい態様である。 Although it does not specifically limit as a lipophilic layered clay mineral, It is a preferable aspect to use a layered silicate. Examples of layered silicates include sabonite, saconite, stevensite, hectorite, margarite, talc, phlogopite, muscovite, chrysotile, chlorite, vermiculite, kaolinite, zansophyllite, dickite, nacrite, bayophyllite, Examples include montmorillonite, hydelite, nontonite, tetrasilic mica, sodium teniolite, antigolite, and halloysite. The layered silicate may be either a natural product or a synthetic product, and even if one or more of these are used at the same time, there is no problem, but it is particularly preferable to use montmorillonite.
前記層状珪酸塩の平均粒径は、0.01〜100μmが好ましく、より好ましくは0.05〜10μmであり、アスペクト比は20〜500が好ましく、より好ましくは50〜200である。 The average particle size of the layered silicate is preferably 0.01 to 100 μm, more preferably 0.05 to 10 μm, and the aspect ratio is preferably 20 to 500, more preferably 50 to 200.
前記層状粘土鉱物の使用量は、特に限定されるものではいが、被着体に応じて耐熱性及び離型効果が得られるようにするため、使用量が適宜決定される。例えば、前記アクリル系共重合体100重量部に対して、1〜40重量部含有することが好ましく、より好ましくは10〜30重量部である。使用量が1重量部未満であると、耐熱性が発現されにくくなる。上記使用量をもとに、剥離効果に応じて、適宜調整することが好ましい態様である。また、粘着剤の塗工や粘着力の調製が困難になるという理由から、使用量は100重量部未満であることが好ましい態様であるが、上記使用量に特に限定されるものではなく、100重量部以上添加することも可能である。 The amount of the layered clay mineral used is not particularly limited, but the amount used is appropriately determined in order to obtain heat resistance and a releasing effect according to the adherend. For example, it is preferable to contain 1-40 weight part with respect to 100 weight part of said acrylic copolymers, More preferably, it is 10-30 weight part. When the amount used is less than 1 part by weight, the heat resistance is hardly exhibited. It is a preferable aspect to adjust appropriately according to the peeling effect based on the amount used. In addition, the amount used is preferably less than 100 parts by weight because it is difficult to apply the pressure-sensitive adhesive or to adjust the adhesive strength, but the amount used is not particularly limited. It is possible to add more than parts by weight.
さらに、必要に応じて他の添加剤として、例えば、開始剤、充填剤、老化防止剤、顔料、染料、シランカップリング剤等の各種添加剤を添加することができる。 Furthermore, as necessary, various additives such as an initiator, a filler, an antiaging agent, a pigment, a dye, and a silane coupling agent can be added as necessary.
前記粘着剤の調製に用いる溶媒は特に制限されないが、通常は、有機溶媒が用いられる。有機溶媒としては、粘着剤組成物を均一に溶解できるものが、製膜時の塗膜安定性の面でよい。有機溶媒としては、例えば、ブタン、ヘキサン、ヘプタン、トルエン、o‐キシレン、m‐キシレン、p‐キシレン、シクロヘキサン、メタノール、エタノール、イソプロピルアルコール、1‐ペンタノール、シクロヘキサノール、2‐メチルシクロヘキサノール、ジエチルエーテル、イソプロピルエーテル、ジブチルエーテル、ジベンジルエーテル、テトラヒドロフラン、アセトン、メチルエチルケトン、メチルイソブチルケトン、2‐ヘプタノン(メチルペンチルケトン)、ジイソブチルケトン、シクロヘキサノン、メチルシクロヘキサノン、シクロペンタノン、酢酸アミル、酢酸メチル、酢酸エチル、酢酸プロピル、酢酸ブチル、N,N‐ジメチルホルムアミド(DMF)、N,N‐ジメチルアセトアミド(DMAc)、N‐メチルピロリドン、2‐メトキシエタノール、2‐エトキシエタノール、2‐ブトキシエタノールなどがあげられる。前記有機溶媒としては、酢酸エチル、トルエン、キシレン等が好ましい。溶媒により、粘着剤組成物は、通常、固形分濃度が、5〜50重量%、好ましくは5〜30重量%、さらに好ましくは10〜25重量%の溶液に調製される。 The solvent used for preparing the pressure-sensitive adhesive is not particularly limited, but an organic solvent is usually used. As an organic solvent, what can melt | dissolve an adhesive composition uniformly may be sufficient at the surface of the coating-film stability at the time of film forming. Examples of the organic solvent include butane, hexane, heptane, toluene, o-xylene, m-xylene, p-xylene, cyclohexane, methanol, ethanol, isopropyl alcohol, 1-pentanol, cyclohexanol, 2-methylcyclohexanol, Diethyl ether, isopropyl ether, dibutyl ether, dibenzyl ether, tetrahydrofuran, acetone, methyl ethyl ketone, methyl isobutyl ketone, 2-heptanone (methylpentyl ketone), diisobutyl ketone, cyclohexanone, methylcyclohexanone, cyclopentanone, amyl acetate, methyl acetate, Ethyl acetate, propyl acetate, butyl acetate, N, N-dimethylformamide (DMF), N, N-dimethylacetamide (DMAc), N-methylpyrrole Down, 2-methoxyethanol, 2-ethoxyethanol, and 2-butoxyethanol and the like. As the organic solvent, ethyl acetate, toluene, xylene and the like are preferable. Depending on the solvent, the pressure-sensitive adhesive composition is usually prepared in a solution having a solid concentration of 5 to 50% by weight, preferably 5 to 30% by weight, and more preferably 10 to 25% by weight.
粘着剤層の形成方法は、アクリル系粘着剤を、基材上に塗布して、粘着剤組成物層を形成する。当該形成方法としては、各種方法を採用できる。例えば、粘着剤組成物層の形成に連続塗工装置を用いる場合は、粘着剤組成物(溶液)を連続的に供給して、装置先端に取り付けたダイスなどの吐出手段より連続的にシート基材上に薄層に押出してする方法が挙げられる。また、粘着剤組成物層を形成する方法として、バッチ方式を採用する場合には、基材上に粘着剤組成物(溶液)を基材上に流延して、アプリケーターや、マイヤーバー、ナイフコーターで成形する方法が挙げられる。このようにして、薄層化した粘着剤組成物を基材上に積層した後、加熱して、溶媒を除去する。 The pressure-sensitive adhesive layer is formed by applying an acrylic pressure-sensitive adhesive on a base material to form a pressure-sensitive adhesive composition layer. Various methods can be adopted as the forming method. For example, when a continuous coating apparatus is used for forming the pressure-sensitive adhesive composition layer, the pressure-sensitive adhesive composition (solution) is continuously supplied, and the sheet base is continuously formed by a discharge means such as a die attached to the front end of the apparatus. The method of extruding to a thin layer on a material is mentioned. When a batch method is adopted as a method for forming the pressure-sensitive adhesive composition layer, the pressure-sensitive adhesive composition (solution) is cast on the base material, and an applicator, a Meyer bar, or a knife is used. A method of forming with a coater is mentioned. Thus, after laminating | stacking the thinned adhesive composition on a base material, it heats and removes a solvent.
粘着剤層の厚さは、3〜20μmが好ましく、より好ましくは5〜15μm、さらに好ましくは8〜12μmであることが望ましい。3μm未満の場合、高温雰囲気中においてセンサから剥がれてしまう。また、20μmを超える場合には、剥離する際に、剥離することができない。 The thickness of the pressure-sensitive adhesive layer is preferably 3 to 20 μm, more preferably 5 to 15 μm, and still more preferably 8 to 12 μm. If it is less than 3 μm, it will be peeled off from the sensor in a high temperature atmosphere. Moreover, when exceeding 20 micrometers, when peeling, it cannot peel.
本発明の粘着テープの厚さは、折れや裂けを防止するため少なくとも5μm以上が好ましく、さらに、好適なハンドリング性に鑑みると10〜100μmが好ましい。 The thickness of the pressure-sensitive adhesive tape of the present invention is preferably at least 5 μm or more in order to prevent breakage or tearing, and further preferably 10 to 100 μm in view of suitable handling properties.
さらに、本発明では、粘着テープの熱収縮率が、1.0%以下であることが好ましく、より好ましくは0.5%以下であり、さらに好ましくは0.3%以下であることが好ましい。ここでいう熱収縮率は、粘着テープ形態にて、BA板に貼り合せ、180℃の温度条件下にて1時間放置した後の値が基準となる。具体的な熱収縮率の測定方法は、粘着テープを20mm角にカットし、BA板に貼付け、180℃の温度条件下で加熱し、その加熱前後のテープのサイズを、投影機(ミツトヨ製:PROFILE PROJECTOR PJ−H300F)を用いてMD方向およびTD方向のいずれもについて測定するものである。 Furthermore, in this invention, it is preferable that the thermal contraction rate of an adhesive tape is 1.0% or less, More preferably, it is 0.5% or less, More preferably, it is preferable that it is 0.3% or less. The heat shrinkage referred to here is based on the value after bonding to a BA plate in the form of an adhesive tape and leaving it at 180 ° C. for 1 hour. Specifically, the heat shrinkage rate is measured by cutting an adhesive tape into 20 mm square, sticking it to a BA plate, heating it at a temperature of 180 ° C., and measuring the size of the tape before and after the heating by a projector (Mitutoyo: Both the MD direction and the TD direction are measured using PROFILE PROJECTOR PJ-H300F).
また、本発明においては、180℃の加熱を1時間実施した後の粘着テープの粘着力が、0.5N/19mm以上であることが好ましく、より好ましくは0.5〜5.0N/19mmであり、更に好ましくは1.0〜2.5N/19mmである。0.5N/19mmを下回ると、加熱中の工程において映像センサより粘着テープの剥離を生じる可能性がある。5.0N/19mmを超える粘着力では、被着体からのテープ剥離が工程上困難かつ、被着体表面に粘着剤層を残存させる可能性がある。ここでいう粘着力は、JIS Z0237に準じて測定した値が基準となる。 Moreover, in this invention, it is preferable that the adhesive force of the adhesive tape after implementing a heating at 180 degreeC for 1 hour is 0.5 N / 19mm or more, More preferably, it is 0.5-5.0 N / 19mm. More preferably, it is 1.0 to 2.5 N / 19 mm. If it is less than 0.5 N / 19 mm, the adhesive tape may be peeled off from the image sensor during the heating process. When the adhesive strength exceeds 5.0 N / 19 mm, it is difficult to remove the tape from the adherend in the process, and the adhesive layer may remain on the adherend surface. The adhesive force here is based on a value measured according to JIS Z0237.
本発明における粘着テープの光透過率は、50%以上であることが好ましく、より好ましくは70%以上であることが望まれる。部品実装後の内部を光学検査する際にも、粘着テープの光透過率を所定値以上確保することで、粘着テープの剥離を伴うことなく検査を行うことができるためである。ここでいう光透過率とは、可視光領域での光透過性を示しており、波長領域としては400〜700nmでの透過率を意味する。本発明においては、この波長領域でのいずれの透過率も50%以上であることが好ましい。50%を下回る透過率の場合は、粘着テープを介しての固体撮像デバイスの有する結線工程等の確認が困難になるためである。ここでいう光透過率は以下の測定方法による値が基準となる。 The light transmittance of the pressure-sensitive adhesive tape in the present invention is preferably 50% or more, and more preferably 70% or more. This is because, even when optically inspecting the interior after component mounting, the optical tape can be inspected without peeling of the adhesive tape by securing the light transmittance of the adhesive tape to a predetermined value or more. Here, the light transmittance means light transmittance in the visible light region, and means a light transmittance in the wavelength range of 400 to 700 nm. In the present invention, any transmittance in this wavelength region is preferably 50% or more. This is because, when the transmittance is less than 50%, it is difficult to confirm the connection process or the like of the solid-state imaging device via the adhesive tape. The light transmittance here is based on the value measured by the following measurement method.
<光透過率の測定方法>
(1)測定装置:分光光度計(島津製作所製、MPS−2000)
(2)測定範囲:波長域400nm〜700nmの範囲
(3)サンプルサイズ:測定装置に対し適切な大きさに切断
(4)粘着テープの測定は粘着剤側から測定を行った。なお、基材の測定については、粘着剤が塗布あるいは存在する側から測定を行った。
<Measurement method of light transmittance>
(1) Measuring apparatus: spectrophotometer (manufactured by Shimadzu Corporation, MPS-2000)
(2) Measurement range: Wavelength range of 400 nm to 700 nm (3) Sample size: Cut to an appropriate size for the measuring device (4) Measurement of the adhesive tape was performed from the adhesive side. In addition, about the measurement of a base material, it measured from the side in which an adhesive was apply | coated or exists.
また、粘着テープに離型フィルムを使用する場合、離型フィルムは、公知のいずれのものを使用してもよい。具体的には、離型フィルムの基材の、粘着剤層との接合面に、離型コート層、例えばシリコーン層が形成されたものを用いることができる。離型フィルムの基材としては、例えば、グラシン紙のような紙材や、ポリエチレン、ポリプロピレン、ポリエステル等よりなる樹脂フィルムが挙げられる。 Moreover, when using a release film for an adhesive tape, you may use any well-known thing as a release film. Specifically, it is possible to use a release film base material having a release coat layer, for example, a silicone layer formed on the bonding surface with the pressure-sensitive adhesive layer. Examples of the substrate for the release film include paper materials such as glassine paper and resin films made of polyethylene, polypropylene, polyester, and the like.
また、本発明の粘着テープは、対象とする固体撮像デバイスのサイズに応じて加工されていてもよい。加工方法に関しては、均一な形状が保たれ、かつ、加工断面部に粘着剤を残さない方法であれば、特に限定されないが、生産性を鑑みて打ち抜き加工が好ましい。 The pressure-sensitive adhesive tape of the present invention may be processed according to the size of the target solid-state imaging device. The processing method is not particularly limited as long as it is a method that maintains a uniform shape and does not leave a pressure-sensitive adhesive in the processed cross section, but punching is preferable in view of productivity.
以下、本発明の構成と効果を具体的に示す実施例等について説明する。また、実施例等における評価方法は下記のように行った。なお、本発明がかかる実施例、評価方法に限定されるものでないことはいうまでもない。 Examples and the like specifically showing the configuration and effects of the present invention will be described below. Moreover, the evaluation method in an Example etc. was performed as follows. In addition, it cannot be overemphasized that this invention is not limited to this Example and evaluation method.
<実施例1>
厚さが25μmのポリエチレンナフタレート(基材の熱収縮率0.4%:150℃−30分)からなる基材を用いた。また、粘着剤層としては、アクリル酸ブチル50重量部、アクリル酸エチル50重量部、アクリル酸2−ヒドロキシエチル0.1重量部、トリメチロールプロパントリアクリレート0.3重量部、アクリル酸5重量部からなるモノマー混合液から得たベースポリマーであるアクリル系ポリマーを調製した。このアクリル系ポリマー100重量部に対して、層状粘土鉱物のモンモリロナイト(クニミネ工業製、クニピアG、平均粒径0.1μm)10重量部、架橋剤としてポリイソシアネート化合物(日本ポリウレタン工業製、商品名:コロネートL)1重量部、ポリエポキシ化合物(三菱瓦斯化学製、商品名:テトラッドC)4重量部、溶剤をメチルエチルケトンとして、溶液濃度を19重量%に調製した。得られたアクリル系粘着剤溶液を前記基材上に塗布し、更に乾燥して、厚さが10μmの粘着剤層を有する粘着テープを作成した。この粘着テープを180℃の加熱を1時間程実施した後、JIS Z0237に準じて粘着力を測定すると、1.00N/19mmであり、粘着テープの熱収縮率は0.15%であった。
<Example 1>
A substrate made of polyethylene naphthalate having a thickness of 25 μm (thermal shrinkage of substrate 0.4%: 150 ° C.-30 minutes) was used. Moreover, as an adhesive layer, butyl acrylate 50 weight part, ethyl acrylate 50 weight part, 2-hydroxyethyl acrylate 0.1 weight part, trimethylol propane triacrylate 0.3 weight part, acrylic acid 5 weight part An acrylic polymer, which is a base polymer obtained from a monomer mixed solution consisting of With respect to 100 parts by weight of this acrylic polymer, 10 parts by weight of layered clay mineral montmorillonite (Kunimine Industries, Kunipia G, average particle size 0.1 μm), polyisocyanate compound (manufactured by Nippon Polyurethane Industry, trade name: 1 part by weight of Coronate L), 4 parts by weight of a polyepoxy compound (manufactured by Mitsubishi Gas Chemical Co., Ltd., trade name: Tetrad C) and methyl ethyl ketone as a solvent were prepared to a solution concentration of 19% by weight. The obtained acrylic pressure-sensitive adhesive solution was applied onto the substrate and further dried to prepare a pressure-sensitive adhesive tape having a pressure-sensitive adhesive layer having a thickness of 10 μm. After the adhesive tape was heated at 180 ° C. for about 1 hour, and the adhesive strength was measured according to JIS Z0237, it was 1.00 N / 19 mm, and the thermal shrinkage of the adhesive tape was 0.15%.
<実施例2>
実施例1の層状粘土鉱物のモンモリロナイトの含有量が1重量部である点以外は、同様の方法で粘着テープを作成した。この粘着テープの粘着力を測定すると、0.55N/19mmであり、粘着テープの熱収縮率は0.15%であった。
<Example 2>
An adhesive tape was prepared in the same manner except that the content of montmorillonite of the layered clay mineral of Example 1 was 1 part by weight. When the adhesive strength of this adhesive tape was measured, it was 0.55 N / 19 mm, and the thermal shrinkage of the adhesive tape was 0.15%.
<実施例3>
実施例1の層状粘土鉱物のモンモリロナイトの含有量が40重量部である点以外は、同様の方法で粘着テープを作成した。この粘着テープの粘着力を測定すると、0.75N/19mmであり、粘着テープの熱収縮率は0.15%であった。
<Example 3>
A pressure-sensitive adhesive tape was prepared in the same manner except that the content of montmorillonite of the layered clay mineral of Example 1 was 40 parts by weight. When the adhesive strength of this adhesive tape was measured, it was 0.75 N / 19 mm, and the thermal shrinkage rate of the adhesive tape was 0.15%.
<実施例4>
実施例1の層状粘土鉱物のモンモリロナイトの含有量が30重量部である点以外は、同様の方法で粘着テープを作成した。この粘着テープの粘着力を測定すると、1.20N/19mmであり、粘着テープの熱収縮率は0.15%であった。
<Example 4>
A pressure-sensitive adhesive tape was prepared in the same manner except that the content of montmorillonite in the layered clay mineral of Example 1 was 30 parts by weight. When the adhesive strength of this adhesive tape was measured, it was 1.20 N / 19 mm, and the thermal shrinkage rate of the adhesive tape was 0.15%.
<比較例1>
実施例1の層状粘土鉱物のモンモリロナイトを含有しない点以外は、同様の方法で粘着テープを作成した。この粘着テープの粘着力を測定すると、0.03N/19mmであり、粘着テープの熱収縮率は0.15%であった。
<Comparative Example 1>
An adhesive tape was prepared in the same manner except that it did not contain the layered clay mineral montmorillonite of Example 1. When the adhesive strength of this adhesive tape was measured, it was 0.03 N / 19 mm, and the thermal shrinkage of the adhesive tape was 0.15%.
<比較例2>
実施例1の層状粘土鉱物のモンモリロナイトの含有量が1000重量部である点以外は、同様の方法で粘着剤層の作成を試みたが、粘着剤としての塗工が困難で、均一に粘着剤層を作成することができなかった。
<Comparative example 2>
Except that the content of the montmorillonite of the layered clay mineral of Example 1 is 1000 parts by weight, an attempt was made to create an adhesive layer by the same method, but coating as an adhesive was difficult, and the adhesive was uniformly applied. The layer could not be created.
以上の結果より、本発明の固体撮像デバイス用表面保護粘着テープによれば、180℃という高温雰囲気下の部品実装工程で使用した場合であっても、粘着力及び熱収縮率に優れ、映像センサから粘着テープが剥がれることがなく、センサを好適に保護できることが確認できた。
From the above results, according to the surface protective adhesive tape for solid-state imaging device of the present invention, even when used in a component mounting process under a high temperature atmosphere of 180 ° C., the adhesive film and the heat shrinkage rate are excellent. It was confirmed that the adhesive tape could not be peeled off and the sensor could be suitably protected.
Claims (4)
前記粘着剤層が粘着剤及び親油性層状粘土鉱物を含有することを特徴とする固体撮像デバイス用表面保護粘着テープ。 A surface protective adhesive tape for a solid-state imaging device having an adhesive layer on one side of a substrate,
A surface protective adhesive tape for a solid-state imaging device, wherein the adhesive layer contains an adhesive and a lipophilic layered clay mineral.
The mounting method of the solid-state imaging device using the surface protection adhesive tape for solid-state imaging devices in any one of Claims 1-3.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007039641A JP2008201899A (en) | 2007-02-20 | 2007-02-20 | Surface-protecting adhesive tape for solid state image pickup device and method for mounting solid state image pickup device |
PCT/JP2008/051337 WO2008102617A1 (en) | 2007-02-20 | 2008-01-30 | Surface-protective adhesive tape for solid-state imaging device, and method for mounting solid-state imaging device |
TW097104307A TW200838971A (en) | 2007-02-20 | 2008-02-04 | Surface-protective adhesive tape for solid-state imaging device, and method for mounting solid-state imaging device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007039641A JP2008201899A (en) | 2007-02-20 | 2007-02-20 | Surface-protecting adhesive tape for solid state image pickup device and method for mounting solid state image pickup device |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2008201899A true JP2008201899A (en) | 2008-09-04 |
Family
ID=39709896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007039641A Pending JP2008201899A (en) | 2007-02-20 | 2007-02-20 | Surface-protecting adhesive tape for solid state image pickup device and method for mounting solid state image pickup device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2008201899A (en) |
TW (1) | TW200838971A (en) |
WO (1) | WO2008102617A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013135041A (en) * | 2011-12-26 | 2013-07-08 | Lintec Corp | Dicing sheet with protective film forming layer and chip manufacturing method |
WO2014034579A1 (en) * | 2012-08-31 | 2014-03-06 | 日東電工株式会社 | Surface protection sheet |
WO2016002974A3 (en) * | 2014-07-03 | 2016-02-25 | リンテック株式会社 | Surface protective film |
KR20220160594A (en) | 2020-04-01 | 2022-12-06 | 닛토덴코 가부시키가이샤 | foam composite |
JP7407719B2 (en) | 2017-11-08 | 2024-01-04 | ザ プロボスト フェローズ スカラーズ アンド アザー メンバーズ オブ ボード オブ トリニティ カレッジ ダブリン | adhesive formulation |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002167557A (en) * | 2000-12-01 | 2002-06-11 | Sekisui Chem Co Ltd | Composition for pressure-sensitive adhesive, pressure- sensitive adhesive and pressure-sensitive adhesive sheet |
JP2005344008A (en) * | 2004-06-03 | 2005-12-15 | Nitto Denko Corp | Releasable pressure-sensitive adhesive sheet |
JP2006332419A (en) * | 2005-05-27 | 2006-12-07 | Nitto Denko Corp | Adhesive tape for protecting solid-state imaging device and image sensor mounting method using the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002138207A (en) * | 2000-08-25 | 2002-05-14 | Sekisui Chem Co Ltd | Resin composition for tape base material, tape base material therewith and adhesive tape therewith |
JP2002294209A (en) * | 2001-03-30 | 2002-10-09 | Sekisui Chem Co Ltd | Pressure-sensitive adhesive composition, process for preparation thereof, and pressure-sensitive adhesive tape |
JP4081094B2 (en) * | 2004-04-07 | 2008-04-23 | 松下電器産業株式会社 | Manufacturing method of semiconductor device |
-
2007
- 2007-02-20 JP JP2007039641A patent/JP2008201899A/en active Pending
-
2008
- 2008-01-30 WO PCT/JP2008/051337 patent/WO2008102617A1/en active Application Filing
- 2008-02-04 TW TW097104307A patent/TW200838971A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002167557A (en) * | 2000-12-01 | 2002-06-11 | Sekisui Chem Co Ltd | Composition for pressure-sensitive adhesive, pressure- sensitive adhesive and pressure-sensitive adhesive sheet |
JP2005344008A (en) * | 2004-06-03 | 2005-12-15 | Nitto Denko Corp | Releasable pressure-sensitive adhesive sheet |
JP2006332419A (en) * | 2005-05-27 | 2006-12-07 | Nitto Denko Corp | Adhesive tape for protecting solid-state imaging device and image sensor mounting method using the same |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013135041A (en) * | 2011-12-26 | 2013-07-08 | Lintec Corp | Dicing sheet with protective film forming layer and chip manufacturing method |
WO2014034579A1 (en) * | 2012-08-31 | 2014-03-06 | 日東電工株式会社 | Surface protection sheet |
WO2014034580A1 (en) * | 2012-08-31 | 2014-03-06 | 日東電工株式会社 | Surface protection sheet |
WO2016002974A3 (en) * | 2014-07-03 | 2016-02-25 | リンテック株式会社 | Surface protective film |
JP7407719B2 (en) | 2017-11-08 | 2024-01-04 | ザ プロボスト フェローズ スカラーズ アンド アザー メンバーズ オブ ボード オブ トリニティ カレッジ ダブリン | adhesive formulation |
KR20220160594A (en) | 2020-04-01 | 2022-12-06 | 닛토덴코 가부시키가이샤 | foam composite |
Also Published As
Publication number | Publication date |
---|---|
TW200838971A (en) | 2008-10-01 |
WO2008102617A1 (en) | 2008-08-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI684633B (en) | Adhesive sheet | |
JP6797077B2 (en) | Polarizing film with adhesive layer, its manufacturing method, and image display device | |
WO2019065375A1 (en) | Reinforced film | |
WO2013011770A1 (en) | Protective sheet for glass etching | |
JP2007314636A (en) | Pressure-sensitive adhesive sheet | |
JP2010189545A (en) | Double-sided self-adhesive sheet and self-adhesive optical member | |
JP2010516856A (en) | Surface protection film | |
JP5759729B2 (en) | Adhesive tape for surface protection of semiconductor parts | |
KR20150135258A (en) | Thermally conductive sheet | |
JP2008201899A (en) | Surface-protecting adhesive tape for solid state image pickup device and method for mounting solid state image pickup device | |
JP6848076B2 (en) | Film-like firing material and film-like firing material with support sheet | |
WO2019065376A1 (en) | Reinforcing film | |
KR102332014B1 (en) | Carrier film for transparent electroconductive film, and laminate | |
WO2015037626A1 (en) | Thermally conductive sheet | |
JP4970862B2 (en) | Cleaning layer manufacturing method, cleaning sheet, conveying member with cleaning function, and cleaning method | |
JP2012017377A (en) | Active energy ray-curable pressure-sensitive adhesive for re-release | |
JP3376198B2 (en) | Protective member for semiconductor wafer | |
KR20200039735A (en) | Film-like baking material, and film-like baking material having a support sheet | |
JP5631081B2 (en) | Active energy ray curable adhesive for re-peeling | |
JP7080721B2 (en) | Film-shaped firing material and film-shaped firing material with support sheet | |
CN109517543B (en) | Thermosetting adhesive composition and adhesive sheet | |
KR20170065885A (en) | Antistatic and adhesive composition and polarizing plate using the composition | |
KR101386914B1 (en) | Method for preparing a complex substrate film and backgrinding tape for semiconductor wafer comprising a complex substrate film prepared by the same | |
WO2019054237A1 (en) | Film-shaped firing material and support-sheet-equipped film-shaped firing material | |
JP7080725B2 (en) | A film-like firing material with a support sheet and a method for manufacturing a semiconductor device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20091116 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120713 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20121128 |