JP2008194548A - Exhaust gas filtering device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exhaust gas filtering device capable of efficiently removing a solidified component and solid matter from the exhaust gas in a vacuum treatment device and capable of being extended in its continuous usable period by a relatively simple and inexpensive constitution. <P>SOLUTION: A filter unit is constituted so that a pipe member, of which the outer peripheral wall is surrounded by a filter element and which is closed on its one end side and opened on its other end side and has a plurality of gas passing holes provided to its peripheral wall, is arranged in a hollow cylindrical container, which has a first gas passing port on its one end side and a second gas passing port on its other end side, so that the exhaust gas flows between the first and second gas passing ports of the hollow cylindrical container through the opening on the other end side of the pipe member and a plurality of the gas passing holes provided to the peripheral wall of the pipe member. At least two filter units are arranged in series in a gas flow direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an exhaust gas filtering device, and more particularly to an exhaust gas filtering device provided in an exhaust path of a vacuum processing device used for manufacturing electronic components and the like for removing solidified components and solids generated in the manufacturing processing process. It can be used suitably.

  Conventionally, a vacuum processing apparatus using a chemical vapor deposition (hereinafter referred to as “CVD” in this specification) method has been used for manufacturing electronic components and the like. In the CVD method, a desired gas is introduced into a processing chamber of a CVD apparatus on which an object to be processed such as a silicon wafer or a glass substrate is placed, and wiring material or protection is applied on the object to be processed using plasma or heat energy. This is a method of forming a film.

Here, in a vacuum processing apparatus using plasma, for example, a CVD apparatus using plasma, a product is deposited on a processing chamber wall other than the object to be processed in the processing step. Since the product deposited on the inner wall of the processing chamber causes generation of particles, an operation for removing the product is appropriately performed. In the case of a CVD apparatus in which a-Si film formation, SiN film formation, or the like is performed, a plasma cleaning method using NF ₃ gas is suitably used for this kind of removal operation. In this plasma cleaning method, when NF ₃ is introduced into the processing chamber and plasma cleaning is performed, a gaseous product (solidified component) mainly composed of Si ₂ F ₆ (NH ₄ ) ₃ .F ^* is generated. This solidified component is heated by the plasma energy during and immediately after the treatment, and is in a gas phase state. However, the solidified component is cooled in the exhaust process and becomes a solid phase state. Therefore, in the exhaust path connected to the processing chamber, powdered solids mainly composed of Si ₂ F ₆ (NH ₄ ) ₃ · F ^* are accumulated and accumulated.

  In order to prevent clogging of pipes due to the accumulation of these solid substances, an exhaust gas filtration device is usually provided in the exhaust path to remove solidified components and solid substances in the exhaust gas.

  Conventional exhaust gas filtration devices include a trap mechanism as shown in FIGS. 4 (a) and 4 (b). This type of trapping mechanism includes a hollow cylindrical container 51 having a gas inlet 53 at one end and a gas outlet 54 at the other end, as shown in FIGS. Inside the hollow cylindrical container 51 is provided a shielding plate 52 made of a tube member whose one end is closed and the other end is open, and a cooling tube 55 is provided inside the shielding plate 52. The cooling pipe 55 is provided so as to penetrate the hollow cylindrical container 51, and includes an inlet and an outlet for flowing in and out a coolant such as water outside the hollow cylindrical container 51. A cooling pipe 56 is also provided outside the hollow cylindrical container 51 through which a coolant such as water flows.

  Exhaust gas exhausted from a processing chamber such as a CVD apparatus is introduced into the hollow cylindrical container 51 through a gas inlet 53. Then, the gas flows out from the gas outlet 54 through the space between the inner wall of the hollow cylindrical container 21 and the shielding plate 22. This exhaust gas is heated by processes such as CVD and plasma cleaning. On the other hand, the hollow cylindrical container 51 and the shielding plate 52 are cooled through cooling pipes 55 and 56 in which a coolant such as water circulates. Therefore, the exhaust gas flowing through the trap device is cooled, and the solidified component condenses on the inner wall of the hollow cylindrical container 51, the shielding plate 52 and the cooling pipe 55.

  On the other hand, there is a filter mechanism as shown in FIGS. 5 (a) and 5 (b) for removing the solid matter in the exhaust gas. As shown in FIGS. 5 (a) and 5 (b), this filter mechanism has a filter mesh 63 disposed inside a hollow cylindrical container provided with a gas inlet 61 on one end and a gas outlet 62 on the other end. It is what has been. The filter mesh 63 is obtained by winding a stainless steel plain weave mixed wire mesh 64 (hereinafter simply referred to as “mesh 64”) around the stainless steel hollow cylindrical frame 65. For example, as shown in FIG. 5B, a hollow cylindrical frame 65 in which a mesh 64 is inserted in an arrow direction 66 in the drawing is preferably used.

  When this type of filter mechanism is provided in the exhaust path of the CVD apparatus, the exhaust gas exhausted from the processing chamber flows into the filter mechanism from the gas inlet 61 and passes through the mesh 64 and then passes through the gas outlet 62. Through the filter mechanism. Therefore, the solid matter in the exhaust gas is captured by the filter mesh 63 and removed. As a matter of course, the finer the mesh (mesh) of the mesh 64, the more effective the solid removal.

In addition, as an exhaust gas filtration apparatus, what was equipped with both the above trap mechanisms and filter mechanisms is used suitably.
JP2005-13866

  However, the conventional exhaust gas filtering device has the following problems. That is, in the case of the trap mechanism, the exhaust gas flowing through the trap mechanism may flow out of the trap device without sufficiently removing the solidified component therein. The reason for this is that there is an exhaust gas (solidified component) that does not circulate in the vicinity of the cooled component inside the trap mechanism and is not sufficiently cooled, or the circulation speed of the exhaust gas that circulates in the trap device is too high.

  In the case of the filter mechanism, solids in the exhaust gas are captured (removed) when trying to pass through the filter. However, clogging occurs in the mesh with a small amount of capture (removal), and the conductance of the exhaust path is increased. It will be significantly reduced. Normally, when the conductance decreases to a certain extent, the filter mechanism is cleaned or replaced.

  The continuous usable time of the filter mechanism is determined by the fineness of the mesh and the effective surface area for removing solids. That is, the continuous usable time can be extended to some extent by making the mesh coarse or increasing the effective surface area of the mesh. Here, the effective surface area of the mesh means the size of the mesh outer shape including the region through which the exhaust gas passes. However, as a matter of course, if the eyes are roughened, solids finer than the eyes cannot be captured, and if the effective surface area of the mesh portion is increased, the entire filter mechanism is enlarged. New problems arise.

  The above-described problems related to the trap mechanism and the filter mechanism also occur in the exhaust gas filtration apparatus including both the trap mechanism and the filter mechanism. Therefore, in addition to the solid matter in the exhaust gas, the solidified component that could not be removed by the trap mechanism reaches the filter mechanism, and the solidified component and solid matter are captured (removed) by the mesh part, but this is due to clogging of the mesh Thus, this type of exhaust gas filtration device could not be used continuously for a long time.

  Thus, for example, when a vacuum processing apparatus such as a CVD apparatus is used in the manufacture of electronic components, and when this type of conventional exhaust gas filtering apparatus is used in the exhaust path from the processing chamber of such an apparatus, Since the exhaust gas filtration device cannot be used continuously for a long time, the time during which the vacuum treatment device can be used continuously has been short.

  In view of the above-described problems, the present invention efficiently removes solidified components and solids from exhaust gas in a vacuum processing apparatus such as a CVD apparatus, and extends the time that can be continuously used with a relatively simple and inexpensive configuration. An object of the present invention is to provide an exhaust gas filtration device that can be used.

  In order to achieve the above-mentioned object, the exhaust gas filtering device proposed by the present invention has a peripheral wall outer periphery surrounded by a filter element, one end side is closed, the other end side is opened, and a plurality of gas passage holes are formed in the peripheral wall. A tube member having a first gas passage port on one end side and a second gas passage port on the other end side, the gas is in the first of the hollow tubular container Arranged between the gas passage port and the second gas passage port so as to be able to flow through the opening on the other end side of the tube member and a plurality of gas passage holes provided in the peripheral wall of the tube member At least two or more filtration units are arranged in series in the gas flow direction.

  Here, the filter element is a close-packed structure member or a porous chamber member in which a large number of band-like and / or thread-like metal members are collected, and when gas passes through the close-packed structure member and the porous chamber member, gas molecules The thing of the structure distribute | circulating while colliding with a strip | belt-shaped and / or thread-like metal member is said.

  According to the exhaust gas filtration apparatus of the present invention, for example, the exhaust gas flowing into the hollow cylindrical container from the first gas passage port or the second gas passage port of the hollow cylindrical container constituting the filtration unit is hollow. After being diffused to some extent in the internal space in the cylindrical container, it is filtered through the filter element, and then enters the inside of the tube member through a plurality of gas passage holes provided in the peripheral wall of the tube member. And it is discharged | emitted from the opening side of a pipe member to the outer side of a filtration unit via the 2nd gas passage port of a hollow cylindrical container, or a 1st gas passage port. Alternatively, for example, the first gas passage port of the hollow cylindrical container constituting the filtration unit or the exhaust gas flowing into the hollow cylindrical container from the second gas passage port is immediately opened on the side of the tube member. Then, it enters the inside of the pipe member, is discharged out of the peripheral wall of the pipe member through a plurality of gas passage holes provided in the peripheral wall of the pipe member, and is filtered through the filter element. And after diffusing to some extent in the internal space in the hollow cylindrical container, it is discharged to the outside of the filtration unit via the second gas passage port of the hollow cylindrical container or the first gas passage port.

  Thus, the exhaust gas discharged from the upstream filtration unit constituting the exhaust gas filtration apparatus of the present invention is the first of the hollow cylindrical container constituting the downstream filtration unit constituting the exhaust gas filtration apparatus of the present invention. It flows into the hollow cylindrical container from the gas passage port or the second gas passage port, is filtered in the same manner as described above, and is discharged downstream.

  Therefore, according to the exhaust gas filtration device of the present invention, a sufficient area for capturing the solidified components and solids in the exhaust gas is ensured, and the solidified components and solids in the exhaust gas are efficiently removed every time the filter element is passed. it can.

  The above-described exhaust gas filtration device of the present invention is preferably configured such that, in at least two or more filtration units arranged in series in the gas flow direction, the filter element of the filtration unit arranged on the upstream side in the gas flow direction. It is desirable that the density is lower than the density of the filter element of the filtration unit arranged on the downstream side in the gas flow direction (so as to have a low density).

  For example, when the filter element is composed of a close-packed structure member formed by collecting a large number of band-like and / or thread-like metal members, the filter element of the upstream filtration unit has a line width larger than that of the filter element of the downstream filtration unit. By making it processed thickly, it is made lower density than the downstream filter element. If it does in this way, the gas molecule in exhaust gas will collide with the strip | belt-shaped and / or thread-like metal member of an upstream filter element rather than the frequency | count of colliding with the strip | belt-shaped and / or thread-like metal member of a downstream filter element. More times.

  Thereby, the solidification component and solid substance in the gas residence time filter element exhaust gas in the filtration unit can be dispersed and captured (removed) for each size, and the continuous use time of the filtration device can be prolonged.

  Furthermore, it can be set as the structure by which the hollow cylindrical container of the filtration unit is connected with the cooling mechanism with which the exterior of the said filtration unit is equipped so that heat conduction is possible. Thereby, in particular, the coagulation action can be improved with respect to the solidified component in the exhaust gas.

  The exhaust gas filtration apparatus according to the present invention can efficiently and sufficiently remove solidified components and solids in exhaust gas with a relatively simple and inexpensive configuration.

  In addition, the filter elements of each filtration unit are coarse on the upstream side of the exhaust gas flow path and finer on the downstream side, so that solidified components and solids in the exhaust gas can be dispersed and captured and accumulated according to their sizes. Further, the continuous use time of the exhaust gas filtering device can be extended.

  Furthermore, by configuring the exhaust gas filtration apparatus with a plurality of filtration units, only the filtration units that need to be cleaned and replaced are selected according to the amount of solidified components and solids accumulated. It is possible to improve the maintainability related to the cleaning and replacement.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In addition, about the structure and arrangement | positioning relationship of illustration, it is only what was shown schematically to such an extent that this invention can be understood, and about the material (composition) of each structure, it is only an illustration. Therefore, the present invention is not limited to the following embodiments, and various modifications can be made within the technical scope grasped from the description of the scope of claims.

  FIG. 1 is a schematic view showing an example of an exhaust gas filtration apparatus of the present invention in which two filtration units A and B are arranged in series in the flow direction of exhaust gas, and FIG. 2 is a cross-sectional view thereof.

  As shown in FIGS. 1 and 2, the filtration unit A constituting the exhaust gas filtration apparatus of the present invention has a first gas passage port (in the illustrated case, a gas inlet 4) on one end side and a second gas passage on the other end side. A hollow cylindrical container 1 having a gas passage port (in the case of illustration, a gas outlet 5) is provided. In the embodiment shown in FIG. 2, a bottom plate 2 and a top plate 3 are provided on both ends of the hollow cylindrical container 1, and the gas outlet 5 is formed in the center of the top plate 3. . Inside the hollow cylindrical container 1, the outer periphery of the peripheral wall 7 is surrounded by a filter element 8, one end side is closed by a bottom plate 9, an opening 10 is provided on the other end side, and a plurality of gas passage holes 11 are provided on the peripheral wall 7. A pipe member 12 is disposed.

  In the pipe member 12, the outer periphery of the peripheral wall 7 is surrounded by the filter element 8, and the exhaust gas passes through the first gas passage port (gas inlet 4) and the second gas passage port ( Between the gas outlet 5), it is arranged in the hollow cylindrical container 1 so as to be able to flow through the opening 10 of the pipe member 12 and the plurality of gas passage holes 11 provided in the peripheral wall 7. .

  In the embodiment shown in FIG. 2, the opening 10 of the tube member 12 is fitted to the gas outlet 5 formed in the center of the top plate 3 of the hollow cylindrical container 1. 10 and the gas outlet 5 of the hollow cylindrical container 1 are substantially the same.

  In FIG. 2, reference numeral 14 denotes a support member that holds the filter element 8 so as not to be detached from the outer periphery of the pipe member 12. In the example shown in FIG. 2, the support member 14 has a bottomless cylindrical shape, and a plurality of gas passage holes 15 are provided on the peripheral wall so that the exhaust gas can flow in the direction of arrow 16 or in the opposite direction. I have. That is, the exhaust gas can flow in a direction indicated by an arrow 17 in FIG.

  In the exhaust gas filtration apparatus shown in FIG. 2, filtration units B having the same configuration as the filtration unit A described above are arranged in series in the gas flow direction.

  The filtration unit B has a first gas passage port on one end side (in the case of illustration, a gas inlet 24, and in the embodiment shown in FIG. 2, this also serves as the gas outlet 5 of the filtration unit A). A hollow cylindrical container 21 having a second gas passage port (in the case of illustration, a gas outlet port 25) on the other end side. In the embodiment shown in FIG. 2, the bottom plate 22 (which also serves as the top plate 3 of the filtration unit A in the embodiment shown in FIG. 2), the top plate 23, Are provided, and the gas outlet 25 is formed in the central portion of the top plate 23. Inside the hollow cylindrical container 21, the outer periphery of the peripheral wall 27 is surrounded by a filter element 28, one end side is closed by a bottom plate 29, an opening 30 is provided on the other end side, and a plurality of gas passage holes 31 are provided on the peripheral wall 27. A pipe member 32 is disposed.

  In the pipe member 32, the exhaust gas is passed through the first gas passage port (gas inlet port 24) and the second gas passage port (the second gas passage port) of the hollow cylindrical container 21 with the outer periphery of the peripheral wall 27 surrounded by the filter element 28. Between the gas outlet 25) and the gas outlet 25), it is arranged in the hollow cylindrical container 21 so as to be able to flow through the opening 30 of the pipe member 32 and the plurality of gas passage holes 31 provided in the peripheral wall 27. .

  In the embodiment shown in FIG. 2, the opening 30 of the tube member 32 is fitted to the gas outlet 25 of the hollow cylindrical container 21, and the opening 30 of the tube member 32 and the gas of the hollow cylindrical container 21 are fitted. The outflow port 25 is substantially the same.

  In FIG. 2, reference numeral 34 denotes a support member that holds the filter element 28 so as not to be detached from the outer periphery of the pipe member 32. In the example shown in FIG. 2, the support member 34 has a bottomless cylindrical shape, and a plurality of gas passage holes 35 are formed on the peripheral wall so that the exhaust gas can flow in the direction of the arrow 36 or in the opposite direction. I have. Therefore, the exhaust gas can flow in the direction indicated by the arrow 37 in FIG. 2 or in the opposite direction.

  The filter elements 8 and 28 are a close-packed structure member or a porous chamber member in which a large number of band-like and / or thread-like metal members are collected, and when exhaust gas passes through the close-packed structure member and the porous chamber member, It is structured to flow while colliding with a band-like and / or thread-like metal member.

  The plurality of gas passage holes 11, 31 provided in the peripheral walls 7, 27 of the pipe members 12, 32 are such that the solidification components and solids are captured and removed uniformly and effectively by the filter elements 8, 28. In addition, it is desirable to provide the pipe members 12 and 32 symmetrically with a predetermined interval with respect to the radial direction and the longitudinal direction.

  The gas passage holes 15 and 35 provided in the peripheral walls of the support members 14 and 34 are also supported by the filter elements 8 and 28 so that the solidified components and solids can be captured and removed equally and effectively. 34 are desirably provided symmetrically with a predetermined interval with respect to the radial direction and the longitudinal direction.

  As described above, the filtration units A and B have the same configuration, but the filter elements 8 and 28 included in the filtration units A and B have different density (density), and the density The filter element 8 of the filtration unit A arranged upstream in the gas flow direction is smaller. That is, the filter element 8 is more densely packed, and the filter element 28 is more densely packed.

  In addition, each structural member of this exhaust gas filtration apparatus can be comprised with metals, such as stainless steel.

  When the exhaust gas filtration apparatus of the present invention shown in FIGS. 1 and 2 is provided in the exhaust path of a vacuum processing apparatus such as a CVD apparatus used in a manufacturing apparatus such as an electronic component, the exhaust gas from the processing chamber of the vacuum processing apparatus It flows in the direction of the arrow 40 in FIG.

  That is, the exhaust gas first flows into the hollow cylindrical container 1 from the gas inlet 4 of the hollow cylindrical container 1 of the filtration unit A, diffuses to some extent in the internal space 13 in the hollow cylindrical container 1, and then passes through the filter. It is filtered through the element 8 and then enters the inside of the pipe member 12 through a plurality of gas passage holes 11 provided in the peripheral wall 7 of the pipe member 12. And it is discharged | emitted from the opening 10 of the pipe member 12, ie, the gas outflow port 5 of the hollow cylindrical container 1. FIG.

  The discharge from the gas outlet 5 of the hollow cylindrical container 1 is simultaneously performed in the hollow cylindrical container 21 from the gas inlet 24 of the hollow cylindrical container 21 of the filtration unit B on the downstream side (right side in FIG. 2). It becomes an inflow of exhaust gas to.

  In the embodiment shown in FIG. 2, the top plate 3 of the hollow cylindrical container 1 constituting the filtration unit A also serves as the bottom plate 22 of the hollow cylindrical container 21 constituting the filtration unit B. The opening 10 of the tube member 12 constituting the gas outlet 5 of the hollow cylindrical container 1 and the gas inlet 24 of the hollow cylindrical container 21 constituting the filtration unit B are substantially the same. .

  Thus, the exhaust gas flowing into the hollow cylindrical container 21 of the filtration unit B diffuses to some extent in the internal space 33 in the hollow cylindrical container 21 and then passes through the filter element 28 to be filtered. It enters the inside of the tube member 32 through a plurality of gas passage holes 31 provided in the peripheral wall 27 of the 32. And it is discharged | emitted from the opening 30 of the pipe member 32, ie, the gas outflow port 25 of the hollow cylindrical container 21, and flows out out of an exhaust gas filtration apparatus (downstream side of an exhaust gas filtration apparatus).

  When the exhaust gas flowing through the exhaust gas filtering device passes through the filter element 8 of the filtration unit A, the larger solidified components and solids contained in the exhaust gas are removed. Small solidification components and solids are removed. Therefore, the solidified component and solid matter in the exhaust gas can be efficiently dispersed and removed according to the size, and the continuous usable time until the filter elements 8 and 28 are cleaned and replaced can be prolonged. .

  1 and 2, reference numerals 18 and 19 denote support means for stably supporting the support member 34 of the filtration unit B. A support member 34 is attached to the distal end of the support leg 19 whose base end is fixed to the top plate 3 of the hollow cylindrical container 1 constituting the filtration unit A (that is, the bottom plate 22 of the hollow cylindrical container 21 constituting the filtration unit B). The support ring (or support disk) 18 attached to the left end side in FIG. 2 is attached and fixed.

  In the filtration unit A, the right end of the support member 14 in FIG. 2 is attached to the inner wall of the top plate 3 of the hollow cylindrical container 1 so that it can be removed or fixed. We are aiming for proper support.

  Also in the filtration unit B, as in the case of the filtration unit A, the right end in FIG. 2 of the support member 34 is attached to the inner wall of the top plate 23 of the hollow cylindrical container 21 so that the support member 14 can be attached or detached. If stable support is provided, it is possible not to use the support means indicated by reference numerals 18 and 19 in FIGS.

  In the embodiment shown in FIGS. 1 and 2, the hollow cylindrical container 21 constituting the filtration unit B is obtained by extending the peripheral wall portion of the hollow cylindrical container 1 constituting the filtration unit A in the downstream direction. ing. That is, the first gas passage port (gas inlet 4) and the top plate 23 are provided on the end portion side of the single hollow cylinder having the bottom plate 2 and the top plate 23 at both ends, where the bottom plate 2 is provided. A second gas passage port (gas outlet 25) is opened on the end side, and an opening that serves as both the gas outlet 5 and the gas inlet 24 is provided in the central portion of the inner space of this single hollow cylinder. The partition plate (which serves as the top plate 3 of the hollow cylindrical container 1 and the bottom plate 22 of the hollow cylindrical container 21) is partitioned, and the upstream side constitutes the filtration unit A and the downstream side constitutes the filtration unit B. Yes.

  The exhaust gas filtration device of the present invention can be made compact by having such a configuration, but the top plate 3 of the hollow cylindrical container 1 and the bottom plate 22 of the hollow cylindrical container 21 are combined with one plate body. Without any modification, the gas outlet 5 formed in the top plate 3 of the hollow cylindrical container 1 constituting the upstream filtration unit A and the bottom plate 22 of the hollow cylindrical container 21 constituting the downstream filtration unit B are provided. Of course, the exhaust gas filtering apparatus of the present invention can also be connected to the gas inlet 24 formed by a pipe through which the exhaust gas passes.

  Further, if the filter elements 8 and 28 that surround the outer periphery of the peripheral wall 7 of the pipe member 12 and the peripheral wall 27 of the pipe member 32 can maintain the shape by themselves, it is particularly necessary to provide the support members 14 and 34. Will disappear.

  Further, in the embodiment shown in FIGS. 1 and 2, the internal spaces 13 and 33 exist between the outer periphery of the filter elements 8 and 28 and the inner peripheral wall of the hollow cylindrical containers 1 and 21. However, a structure in which the internal spaces 13 and 33 do not exist is also possible. The exhaust gas flowing into the hollow cylindrical container from the first gas passage port or the second gas passage port located on the upstream side of the hollow cylindrical container constituting the filtration unit, and the opening of the pipe member, In the process of flowing to the second gas passage on the downstream side, or the first gas passage through the plurality of gas passage holes provided in the peripheral wall and being discharged from there, This is because it is sufficient if it is filtered through the filter element.

  However, according to the embodiment shown in FIGS. 1 and 2, the exhaust gas diffuses to some extent in the internal spaces 13 and 33 and then passes through the filter elements 8 and 28 to be filtered. In order to more effectively remove the solidified components and solids contained in the inner space 13, 33, as in the embodiment shown in FIG. 1 and FIG. 2, the exhaust gas is present in each filtration unit. It is desirable to have a structure that diffuses to some extent in the internal space, passes through the filter element, is filtered, and is discharged downstream.

  In the embodiment shown in FIG. 1 and FIG. 2, the filtration unit B is connected downstream of the filtration unit A to form the exhaust gas filtration device of the present invention. A configuration in which the filtration unit A is subsequently connected downstream of the filtration unit B illustrated in FIG. 2, and a configuration in which the filtration unit A and the filtration unit B are continuously connected downstream from the filtration unit B illustrated in FIG. Is possible.

  Further, the exhaust gas flowing into the hollow cylindrical container from the first gas passage port or the second gas passage port located on the upstream side of the hollow cylindrical container constituting the filtration unit is connected to the opening of the pipe member, Until flowing through the plurality of gas passage holes provided in the peripheral wall of the member to the second gas passage opening located on the downstream side or the first gas passage opening and being discharged from there. 1 and FIG. 2, the density of the filter element 28 of the filtration unit B is set to the density of the filter element 8 of the filtration unit A in the embodiment shown in FIG. It is also possible to reduce the flow rate so that the exhaust gas flows from the direction opposite to the arrow 40 in FIG. 2 (that is, the filtration unit B is set upstream in the arrangement state shown in FIG. 2).

  In this case, the exhaust gas that has flowed into the hollow cylindrical containers 21, 1 from the upstream gas passage ports of the hollow cylindrical containers 21, 1 constituting the filtration unit passes through the openings 30, 10 of the pipe members 32, 12 from the pipes The pipe members 32, 12 enter the inside of the members 32, 12 and pass through the plurality of gas passage holes 31, 11 provided in the peripheral walls 27, 7 of the pipe members 32, 12, opposite to the direction of the arrow 16. It is discharged outside the peripheral wall. Then, it is filtered through the filter elements 28 and 8, and is discharged into the internal spaces 33 and 13 in the direction opposite to the direction of the arrow 17, and after being diffused to some extent in the internal spaces 33 and 13, the hollow cylindrical container 21, 1 is discharged from the downstream gas passage port to the downstream side.

  Further, in FIG. 2, the direction in which the filtration unit B is connected to the filtration unit A can be reversed to the left and right in the state shown in FIG. In this case, the exhaust gas to be filtered passes through the filtration unit A in the manner described above with reference to FIGS. The exhaust gas filtered by the filtration unit A from the gas outlet 5 of the filtration unit A (that is, the opening 10 of the tube member 12) is used for gas inflow provided in the hollow cylindrical container 21 of the filtration unit B. The gas passage port (the opening 30 of the pipe member 32 is fitted) enters the pipe member 32 from the inside of the pipe member 32 through the plurality of gas passage holes 31 provided in the peripheral wall 27 of the pipe member 32. It is discharged outside the peripheral wall. Then, it is filtered through the filter element 28, and is discharged to the downstream side from the gas outlet for gas outflow provided in the hollow cylindrical container 21 of the filtration unit B through the internal space 33. .

  However, as described above, in order to more effectively remove the solidified component and the solid matter contained in the exhaust gas, the exhaust gas is separated from the internal spaces 13 and 33 as in the embodiment shown in FIGS. In FIG. 1, it is desirable that the air is diffused to some extent and then filtered through the filter elements 8 and 28, so that a plurality of filtration units A and B are connected in the downstream direction with reference to FIGS. 1 and 2. It is more preferable to use the above-described form.

  FIG. 3 is a diagram corresponding to the state shown in FIG. 2 in another embodiment of the present invention. It arrange | positions so that the piping 41 which consists of material excellent in heat transferability, such as copper, may contact the outer periphery of the hollow cylindrical container length 21 which comprises the filtration units A and B, and refrigerant | coolants, such as water, flow into this piping 41 For example, it can be circulated and flowed. That is, the hollow cylindrical container of the filtration unit is connected to a cooling mechanism provided outside the filtration unit so as to be able to conduct heat.

  When water is caused to flow into the pipe 41, the peripheral walls of the hollow cylindrical containers 1 and 21 are cooled. Accordingly, the bottom plate 2, the top plate 3 (bottom plate 22), the top plate 23, the support members 14, 34, the support legs 19, and the support ring (or support disk) 18 of the hollow cylindrical containers 1 and 21 made of metal such as stainless steel. The filter elements 8 and 28 are sequentially cooled. Thereby, the removal performance of the solidified component in the exhaust gas can be improved.

  Since the other components and their actions are the same as those described above with reference to FIGS. 1 and 2, the same components as those shown in FIGS. 1 and 2 are shown in FIG. The same reference numerals as those in the case of FIG.

  If the hollow cylindrical container of the filtration unit can be configured to be connected to the cooling mechanism provided outside the filtration unit so as to be able to conduct heat, the hollow cylindrical container 1 as shown in FIG. In addition, the present invention is not limited to the structure and configuration in which the pipe 41 made of a material having excellent heat transfer properties such as copper is in contact with the outer periphery of the plate 21, and various forms can be adopted.

  In addition, the above-described exhaust gas filtration apparatus of the present invention can be used in place of an exhaust gas filtration unit constituted by a conventional trap device and filter apparatus, but the upstream side, the downstream side, or both of the exhaust gas filtration apparatus of the present invention. A conventional trap device and filter device may be arranged in the exhaust path to further improve solid component and solid matter removal.

FIG. 3 is a schematic front view of a part of the exhaust gas filtering device according to the present invention when two filtration units are provided. FIG. 2 is a cross-sectional view of the exhaust gas filtering device shown in FIG. 1. Furthermore, sectional drawing of the waste gas filtration apparatus which concerns on this invention at the time of providing a cooling means. It is a figure explaining the structure of the conventional trap apparatus, (a) is a cross-sectional view, (b) is a longitudinal cross-sectional view. It is a figure explaining the structure of the conventional filter apparatus, Comprising: (a) is a schematic front view which broke off and appeared, (b) is a front view explaining the structure of a filter mesh.

Explanation of symbols

A, B Filtration unit 1, 21 Hollow cylindrical container 2, 22 Bottom plate 3, 23 Top plate 4, 24 Gas inlet 5, 25 Gas outlet 7, 27 Perimeter wall 8, 28 Filter element 9, 29 Bottom plate 10, 30 Open 11 , 31 Gas passage hole 12, 32 Pipe member 14, 34 Support member 15, 35 Gas passage hole 41 Piping

Claims (3)

The outer peripheral wall is surrounded by the filter element, one end side is closed, the other end side is opened, and a pipe member provided with a plurality of gas passage holes in the peripheral wall,
Inside the hollow cylindrical container having the first gas passage port on one end side and the second gas passage port on the other end side,
Gas is provided between the first gas passage port and the second gas passage port of the hollow cylindrical container, the opening on the other end side of the tube member, and the peripheral wall of the tube member. A filtration unit arranged to be able to flow through the gas passage hole,
An exhaust gas filtering device, wherein at least two or more in series in the gas flow direction are arranged in series. In at least two or more filtration units arranged in series in the gas flow direction, the density of the filter elements in the filtration unit arranged upstream in the gas flow direction is arranged downstream in the gas flow direction. The exhaust gas filtering device according to claim 1, wherein the exhaust gas filtering device is lower than a density of the filter element in the filtration unit. The exhaust gas filtration apparatus according to claim 1 or 2, wherein the hollow cylindrical container of the filtration unit is connected to a cooling mechanism provided outside the filtration unit so as to be able to conduct heat.

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