JP2008191079A - Contact probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact probe capable of preventing breakage of a contact end of an electrode and damages to an object body to be probed. <P>SOLUTION: The contact probe comprises a center electrode 4a and an outer electrode 3a that are disposed so as to allow movement relative with respect to a base part 2a in the probing directions (directions of the arrows A and B), and that are mutually insulated; a spring 6a energizing the center electrode 4a and the outer electrode 3a in the directions opposite to the probing directions; and a spring 5a energizing the outer electrode 3a and a base part 2 in the directions opposite to the probing directions. The outer electrode 3a includes a base part member 31 energized by the spring 5a; a tip part member 32 in which a contact end is formed; and a spring 33 energizing the base part member 31 and the tip part member 32 in the directions opposite to the probing directions. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a contact probe provided with a pair of electrodes of a first electrode and a second electrode.

  For example, in the measurement by the four-terminal method, a contact probe having a pair of electrodes of a voltage measurement electrode and a current measurement electrode that can be separately and independently contacted with a measurement object conductor (probing object) is used. As this type of contact probe, a spring-type contact probe is disclosed in JP-A-5-232137. The contact probe disclosed as the second conventional example in this publication is a voltage measuring pin (voltage measuring electrode) and a hollow (cylindrical) current measuring device configured to allow insertion of the voltage measuring pin. A pair of electrodes (pins for current measurement) is provided.

  In this case, in this contact probe, the voltage measurement pin measures the current through an insulator (cylinder made of an insulator: hereinafter also referred to as “cylindrical insulator”) disposed in the current measurement pin. It is slidably held with respect to the pins for use. Further, the current measuring pin and the voltage measuring pin are biased in opposite directions in the probing direction by the spring disposed in the cylindrical insulator. Furthermore, this contact probe is configured so that the current measuring pin can slide within a cylinder (hereinafter also referred to as a “base part” to distinguish it from the aforementioned cylindrical insulator) for holding the contact probe in the probing device. Has been. The current measuring pin and the base portion are biased in opposite directions in the probing direction by a spring disposed outside the current measuring pin.

  When probing using the contact probe, the contact probe is attached to the probing apparatus so that the holding portion of the moving mechanism holds the base portion. Next, when the start of probing is instructed, the moving mechanism moves the base portion toward the probing object (in the probing direction). In this case, first, the tip of the voltage measurement pin contacts the probing object, and in this state, the base portion is further moved, so that the voltage measurement pin is in the probing direction with respect to the current measurement pin. Is relatively moved in the opposite direction. At this time, when the spring in the cylindrical insulator is compressed, the tip of the voltage measuring pin is urged toward the surface of the probing object by the repulsive force.

Next, when the moving mechanism further moves the base part, the tip of the current measuring pin comes into contact with the probing object, and the base part is further moved from that state, so that the base part is used for current measurement. The pin is moved relative to the probing direction. At this time, the spring disposed outside the current measuring pin is pressed and shrunk, and the repulsive force biases the tip of the current measuring pin toward the surface of the probing object. In this state, an electrical inspection is performed using the voltage measurement pin and the current measurement pin that are in contact with the probing object.
JP-A-5-232137 (2nd page, FIG. 3)

  However, the conventional contact probe has the following problems. That is, in the conventional contact probe, the current measuring pin is formed in a cylindrical shape so that the voltage measuring pin can be inserted, and the current measuring pin and the voltage measuring pin are insulated from each other while being insulated from each other. A cylindrical insulator that allows the voltage measurement pin to slide relative to the measurement pin is attached to the inside of the current measurement pin. Therefore, in the conventional contact probe, the mass of the current measurement pin (the total mass of the mass of the current measurement pin and the mass of the cylindrical insulator) is very large. For this reason, even after the tip of the current measuring pin comes into contact with the probing object, the large force that the current measuring pin continues to move in accordance with the law of inertia keeps the tip of the current measuring pin and the probing object. Will be added to the contact area. As a result, the contact portion of the current measurement pin on the surface of the probing object is large in the conventional contact probe because the tip of the current measurement pin is pressed against the probing object with an excessively strong force. There is a problem that dents (scratches) occur or the tip of the current measuring pin is damaged.

  In this case, in the case of a contact probe in which the mass of the voltage measuring pin is larger than the mass of the current measuring pin, voltage measurement is performed according to the law of inertia even after the tip of the voltage measuring pin contacts the probing object. The force that the working pin continues to move is applied to the contact portion between the tip of the voltage measuring pin and the probing object. As a result, in the same manner as the conventional contact probe described above, even in this type of contact probe, the probing target object is caused by the fact that the tip of the voltage measuring pin is pressed against the probing object with an excessively strong force. There arises a problem that a large dent (scratch) is generated on the surface of the wire and that the tip of the voltage measuring pin is damaged.

  The present invention has been made in view of such problems, and a main object of the present invention is to provide a contact probe that can prevent damage to a contact side end portion of an electrode and damage to a probing target.

  In order to achieve the above object, the contact probe according to claim 1 is provided with a first electrode and a second electrode which are arranged so as to be relatively movable in a probing direction with respect to a base portion and are insulated from each other; A first urging member that urges one electrode and the second electrode in opposite directions in the probing direction; and a second urging member that urges the second electrode and the base portion in opposite directions in the probing direction. The second electrode includes a first member biased by the second biasing member, a second member having a contact-side end formed thereon, the first member, and the second member. And a third urging member for urging in opposite directions in the probing direction.

  The contact probe according to claim 2 is the contact probe according to claim 1, wherein the contact-side end portion of the first electrode protrudes closer to the probing direction than the contact-side end portion of the second electrode in a non-probing state. ing.

  A contact probe according to claim 3 is the contact probe according to claim 1 or 2, further comprising a pin-shaped center electrode as the first electrode and a cylindrical outer electrode as the second electrode, The center electrode is inserted into the outer electrode.

  The contact probe according to claim 4 is the contact probe according to claim 1 or 2, further comprising a cylindrical outer electrode as the first electrode and a pin-shaped center electrode as the second electrode, The center electrode is inserted into the outer electrode.

  The contact probe according to claim 1, wherein the first member biased by the second biasing member, the second member formed with the contact-side end portion, and the first member and the second member conflict with each other in the probing direction. A second electrode is configured including a third biasing member biasing in the direction. Therefore, according to this contact probe, since the mass of the second member that contacts the probing object is sufficiently small, the force that the second member tries to move toward the probing object according to the law of inertia during probing is sufficient. As a result, the situation where the tip of the second electrode (second member) is pressed against the probing object by an excessively strong force is avoided, and a large dent (scratch) is formed on the surface of the probing object. It is possible to reliably avoid the occurrence of occurrence or the breakage of the tip of the second electrode (second member).

  In the contact probe according to claim 2, in the non-probing state, the contact side end portion of the first electrode protrudes more in the probing direction side than the contact side end portion of the second electrode. Therefore, according to this contact probe, the first electrode is brought into contact with the probing target body before the tip of the second electrode (second member) comes into contact with the probing target body. The tip of the second electrode (second member) can be brought into contact with the probing object in a state in which the moving speed is sufficiently lowered along with the elastic deformation of the probe, resulting in the contact of the second electrode. A situation in which a large dent (scratch) is generated on the surface of the probing object or the tip of the second electrode (second member) is damaged can be avoided more reliably.

  Furthermore, the contact probe according to claim 3 includes a pin-shaped center electrode as the first electrode and a cylindrical outer electrode as the second electrode, and the center electrode is inserted into the outer electrode. Therefore, according to this contact probe, the tip portion of the second electrode (second member) and the tip portion of the first electrode are separately and independently within a very narrow range on the probing object, although the configuration is relatively simple. Can be contacted.

  The contact probe according to claim 4 includes a cylindrical outer electrode as the first electrode and a pin-shaped center electrode as the second electrode, and the center electrode is inserted into the outer electrode. Therefore, according to this contact probe, the tip portion of the second electrode (second member) and the tip portion of the first electrode are separately and independently within a very narrow range on the probing object, although the configuration is relatively simple. Can be contacted.

  Hereinafter, the best mode of a contact probe according to the present invention will be described with reference to the accompanying drawings.

  First, the configuration of the contact probe 1A and its operating principle will be described with reference to the drawings.

  A contact probe 1A shown in FIG. 1 is an example of a contact probe according to the present invention, and includes a base portion (holder) 2a, an outer electrode 3a, a center electrode 4a, and springs 5a and 6a, and is formed in an elongated rod shape as a whole. ing. In FIG. 2 and FIGS. 2 and 3 to be referred to later, in order to facilitate understanding of the contact probe according to the present invention, the configuration of the contact probe 1A is conceptually illustrated. Therefore, the length of each member in these drawings, the position where the protrusions are formed, and the size thereof are different from those of the actual contact probe 1A (not shown). In addition, an insulator disposed between the outer electrode 3a and the center electrode 4a, a connection cable for electrically connecting the outer electrode 3a and the center electrode 4a to a probing device (not shown), and the like are illustrated. The description is omitted.

  The base portion 2a is a member for attaching the contact probe 1A to the moving mechanism in the probing apparatus (for holding the contact probe 1A in the holding portion of the moving mechanism), and is formed in a cylindrical shape as an example. The outer electrode 3a is an example of the second electrode in the present invention, and includes a base portion side member 31 corresponding to the first member in the present invention, a tip portion side member 32 corresponding to the second member in the present invention, A spring 33 corresponding to the third urging member in the invention is provided and formed in a cylindrical shape as a whole. The base portion side member 31 is formed in a cylindrical shape that allows the center electrode 4a to be inserted therein, and is biased in the direction of the arrow A (probing direction) with respect to the base portion 2a by the spring 5a during probing. . The tip end side member 32 is formed in a cylindrical shape as a whole, and a contact side end portion in the present invention is formed on one end side (the lower end side in the figure), so that the lower end side of the base portion side member 31 is formed. It is slidably arranged on. The spring 33 is composed of a compression-type string-wound spring and urges the base portion side member 31 and the tip portion side member 32 in opposite directions.

  The center electrode 4a is an example of the first electrode in the present invention, and is formed in a pin shape (bar shape) as a whole and is inserted into the base portion side member 31 in the outer electrode 3a. In this case, in the contact probe 1A, in the non-probing state (a state where both the outer electrode 3a and the center electrode 4a are not in contact with the probing object X) shown in FIG. The lower end portion in the figure protrudes in the probing direction (the direction of arrow A) from the contact side end portion (lower end portion in the same figure) of the outer electrode 3a (tip end side member 32). The spring 5a is an example of a second urging member in the present invention, and is composed of a compression-type coiled spring to urge the base portion 2a and the outer electrode 3a (base portion side member 31) in opposite directions. The spring 6a is an example of a first urging member in the present invention, and is composed of a compression-type string spring, and urges the outer electrode 3a (base portion side member 31) and the center electrode 4a in opposite directions.

  When probing using the contact probe 1A, the contact probe 1A is mounted on the probing device so that the base portion 2a is held by a holding portion (not shown) of a moving mechanism in the probing device. Next, when the start of probing is instructed, the moving mechanism moves the base portion 2a toward the probing object X in the direction of arrow A. In this case, first, the tip of the center electrode 4a abuts on the probing object X, and in this state, the base 2a is further moved in the direction of the arrow A, so that the center electrode is moved with respect to the outer electrode 3a. 4a is relatively moved in the direction opposite to the probing direction (direction of arrow B). At this time, when the springs 5a and 6a are compressed, the tip of the center electrode 4a is urged toward the surface of the probing object X in the direction of arrow A by the repulsive force.

  Next, when the moving mechanism further moves the base portion 2a, the distal end portion of the distal end side member 32 in the outer electrode 3a contacts the probing target body X as shown in FIG. At this time, since the moving speed of the outer electrode 3a moving toward the probing target body X gradually decreases with the elastic deformation of the spring 6a, the tip side member 32 of the outer electrode 3a is moved to the probing target object X. The situation of contacting at an excessively high speed is avoided. In the contact probe 1A, unlike the conventional contact probe, the outer electrode 3a is divided into two members, that is, a base portion side member 31 and a tip portion side member 32. Therefore, the mass of the tip end side member 32 in contact with the probing target body X is sufficiently smaller than the current measuring pin in the conventional contact probe.

  For this reason, in this contact probe 1A, after the distal end portion of the outer electrode 3a (the distal end side member 32) contacts the probing target body X, the force that the distal end side member 32 continues to move according to the law of inertia. Is small enough. As a result, the force applied to the contact portion between the distal end portion of the distal end side member 32 and the probing target body X is sufficiently smaller than that of the conventional contact probe. In this case, the applicant, in the contact probe 1A having the same size as that of the conventional contact probe, the tip end side member 32 has a mass of about 1/8 of the current measuring pin in the conventional contact probe, and the outside. It has been confirmed that the impact force applied to the surface of the probing object X at the time of contact of the electrode 3a (current measurement pin) is about ½.

  Subsequently, when the base portion 2a is further moved by the moving mechanism, as shown in FIG. 3, the outer electrode 3a (base portion side member 31) is opposite to the probing direction with respect to the base portion 2a (arrow B). (Relative direction). At this time, the spring 33 is compressed as the tip end side member 32 moves relative to the probing direction relative to the base portion side member 31 (direction of arrow B). As a result, since the moving speed of the base part side member 31 that moves to the tip part side member 32 side according to the law of inertia gradually decreases with the elastic deformation of the spring 33, a force corresponding to the mass of the base part side member 31 is obtained. Is prevented from being rapidly transmitted to the tip end side member 32.

  Further, when the spring 5a is compressed and contracted, the base member 31 is moved in the probing direction (arrow A) by the repulsive force, and the spring 33 is compressed and contracted accordingly. The tip of the tip side member 32 is urged toward the surface of the probing target body X by force, and the spring 6a is compressed and contracted, so that the tip of the center electrode 4a is pulled by the repulsive force. It is energized with a stronger force toward the surface. In this state, an electrical inspection using the outer electrode 3a (tip portion side member 32) and the center electrode 4a that are in contact with the probing target body X is performed.

  Thus, in this contact probe 1A, the base part side member 31 (first member) urged by the spring 5a (second urging member) and the contact side end part brought into contact with the probing target body X are formed. A distal end side member 32 (second member), and a spring 33 (third biasing member) that biases the base side member 31 and the distal end side member 32 in opposite directions in the probing direction. An electrode 3a (second electrode) is configured. Therefore, according to the contact probe 1A, since the mass of the distal end side member 32 that contacts the probing target body X is sufficiently small, the distal end side member 32 is directed toward the probing target body X according to the law of inertia during probing. As a result of sufficiently reducing the force to move, a situation in which the tip portion of the outer electrode 3a (tip portion side member 32) is pressed against the probing subject X with an excessively strong force is avoided, and the probing subject X It is possible to surely avoid a situation in which a large dent (scratched) is generated on the surface of the electrode 3 or a tip portion of the outer electrode 3a (tip portion side member 32) is damaged.

  In the contact probe 1A, in the non-probing state, the contact side end portion of the center electrode 4a (first electrode) is more than the contact side end portion (tip portion of the tip end side member 32) of the outer electrode 3a (second electrode). Also protrudes in the probing direction. Therefore, according to the contact probe 1A, the center electrode 4a is brought into contact with the probing target body X before the tip of the outer electrode 3a (tip end side member 32) comes into contact with the probing target body X. The tip of the outer electrode 3a (tip portion side member 32) can be brought into contact with the probing target body X in a state where the moving speed is sufficiently lowered with the elastic deformation of the spring 6a. It is possible to more reliably avoid a situation in which a large dent (scratch) is generated on the surface of the probing target body X due to contact, or the tip portion of the outer electrode 3a (tip portion side member 32) is damaged. it can.

  The contact probe 1A further includes a pin-shaped center electrode 4a as the first electrode in the present invention and a cylindrical outer electrode 3a as the second electrode in the present invention. A central electrode 4a is inserted in the member 31). Therefore, according to the contact probe 1A, the tip portion of the outer electrode 3a (tip portion side member 32) and the tip portion of the center electrode 4a are arranged in a very narrow range on the probing target body X with a relatively simple configuration. Can be contacted separately and independently.

  Next, the configuration of the contact probe 1B and its operating principle will be described with reference to the drawings.

  A contact probe 1B shown in FIG. 4 is another example of the contact probe according to the present invention, and includes a base portion (holder) 2b, an outer electrode 3b, a center electrode 4b, and springs 5b and 6b, and is formed into an elongated rod shape as a whole. Is formed. In FIG. 5 and FIGS. 5 and 6 referred later, the configuration of the contact probe 1B is conceptually illustrated in order to facilitate understanding of the contact probe according to the present invention. Therefore, the length of each member in these drawings, the position where the protrusions are formed, and the size thereof are different from those of the actual contact probe 1B (not shown). In addition, an insulator disposed between the outer electrode 3b and the center electrode 4b, a connection cable for electrically connecting the outer electrode 3b and the center electrode 4b to a probing device (not shown), and the like are illustrated. The description is omitted.

  The base portion 2b is a member for attaching the contact probe 1B to the moving mechanism in the probing apparatus (for holding the contact probe 1B in the holding portion of the moving mechanism). As an example, the base portion 2b is formed in a cylindrical shape and has a central electrode 4b. It is slidably attached to one end of the. The outer electrode 3b is another example of the first electrode in the present invention, and is formed in a cylindrical shape through which the center electrode 4b can be inserted. The center electrode 4b is another example of the second electrode in the present invention, and includes a base portion side member 41 corresponding to the first member in the present invention, and a tip portion side member 42 corresponding to the second member in the present invention. And a spring 43 corresponding to the third urging member in the present invention. The base portion side member 41 is formed in a cylindrical shape in which the base portion 2b and the tip end side member 42 can be inserted, and at the time of probing, the direction of the arrow A with respect to the base portion 2b by the spring 5b (probing direction) ). The tip end side member 42 is formed in a pin shape (bar shape) as a whole, and a contact side end portion in the present invention is formed on one end side (lower end portion side in the figure) of the base portion side member 41. It is slidably inserted on the lower end side. The spring 43 is composed of a compression-type string-wound spring and biases the base part side member 41 and the tip part side member 42 in opposite directions.

  In this case, in the contact probe 1B, in the non-probing state (a state in which both the outer electrode 3b and the center electrode 4b are not in contact with the probing object X) shown in FIG. The lower end portion in the figure protrudes in the probing direction (the direction of arrow A) from the contact side end portion (lower end portion in the figure) of the center electrode 4b (front end side member 42). The spring 5b is an example of a second urging member in the present invention, and is composed of a compression-type string spring, and urges the base portion 2b and the center electrode 4b (base portion side member 41) in opposite directions. The spring 6b is an example of a first urging member in the present invention, and is composed of a compression-type string spring, and urges the outer electrode 3b and the center electrode 4b (base part side member 41) in opposite directions.

  When probing using the contact probe 1B, the contact probe 1B is mounted on the probing device so that the base portion 2b is held by a holding portion (not shown) of a moving mechanism in the probing device. Next, when the start of probing is instructed, the moving mechanism moves the base portion 2b toward the probing object X in the direction of arrow A. In this case, first, the distal end portion of the outer electrode 3b contacts the probing target body X, and in this state, the base portion 2b is further moved in the direction of the arrow A, whereby the center electrode 4b (base portion side member) 41), the outer electrode 3b is moved in a direction opposite to the probing direction (direction of arrow B). At this time, the springs 5b and 6b are pressed and contracted, so that the repulsive force biases the tip of the outer electrode 3b toward the surface of the probing object X in the direction of arrow A.

  Next, when the moving mechanism further moves the base portion 2b, the distal end portion of the distal end side member 42 in the center electrode 4b comes into contact with the probing target body X as shown in FIG. At this time, since the moving speed of the center electrode 4b moving toward the probing target body X gradually decreases with the elastic deformation of the spring 6b, the distal end side member 42 of the center electrode 4b is moved to the probing target object X. The situation of contacting at an excessively high speed is avoided. In the contact probe 1B, the center electrode 4b is divided into two members, that is, a base portion side member 41 and a tip portion side member 42. Therefore, the mass of the tip end side member 42 that comes into contact with the probing target body X is sufficiently small.

  Therefore, in this contact probe 1B, after the tip of the center electrode 4b (tip portion side member 42) contacts the probing target body X, the force that the tip portion side member 42 continues to move according to the law of inertia. Is small enough. As a result, the force applied to the contact portion between the tip portion of the tip portion side member 42 and the probing target body X is sufficiently smaller than that of the conventional contact probe. In this case, as compared with a conventional contact probe in which the center electrode is composed of one member, the applicant has a mass that the tip side member 42 in the contact probe 1B is about 1/8 of the center electrode in the conventional contact probe. In addition, it has been confirmed that the impact force applied to the surface of the probing object X when the center electrode 4b is in contact is about ½.

  Subsequently, when the base portion 2b is further moved by the moving mechanism, as shown in FIG. 6, the center electrode 4b (base portion side member 41) is opposite to the probing direction with respect to the base portion 2b (arrow B). (Relative direction). At this time, the spring 43 is compressed and contracted as the tip end side member 42 moves relative to the probing direction relative to the base side member 41 (direction of arrow B). As a result, the moving speed of the base part side member 41 that moves to the tip part side member 42 side in accordance with the law of inertia gradually decreases with the elastic deformation of the spring 43, so that the force according to the mass of the base part side member 41 Is prevented from being rapidly transmitted to the tip end side member 42.

  Further, when the spring 5b is compressed and contracted, the repulsive force moves the base portion side member 41 in the direction of the probing direction (arrow A), and accordingly, the spring 43 is compressed and contracted. The tip of the tip side member 42 is urged toward the surface of the probing target body X by force, and the spring 6b is pressed and contracted, so that the tip of the outer electrode 3b is pushed by the repulsive force. It is energized with a stronger force toward the surface. In this state, an electrical inspection is performed using the outer electrode 3b and the center electrode 4b (tip portion side member 42) in contact with the probing target body X.

  Thus, in this contact probe 1B, the base part side member 41 (first member) urged by the spring 5b (second urging member) and the contact side end part brought into contact with the probing target body X are formed. A central portion including a distal end side member 42 (second member) and a spring 43 (third biasing member) that biases the base side member 41 and the distal end side member 42 in opposite directions in the probing direction. An electrode 4b (second electrode) is configured. Therefore, according to the contact probe 1B, since the mass of the tip end side member 42 that contacts the probing target body X is sufficiently small, the tip end side member 42 faces the probing target body X according to the law of inertia during probing. As a result of sufficiently reducing the force to move, a situation in which the tip of the center electrode 4b (tip side member 42) is pressed against the probing object X with an excessively strong force is avoided, and the probing object X is avoided. It is possible to reliably avoid a situation in which a large dent (scratch) is generated on the surface of the metal electrode or a tip portion of the center electrode 4b (tip portion side member 42) is damaged.

  In the contact probe 1B, in the non-probing state, the contact side end of the outer electrode 3b (first electrode) is more than the contact side end of the center electrode 4b (second electrode) (the tip of the tip end side member 42). Also protrudes in the probing direction. Therefore, according to the contact probe 1B, the outer electrode 3b is brought into contact with the probing target body X before the front end of the center electrode 4b (tip end side member 42) comes into contact with the probing target body X. The tip of the center electrode 4b (tip end side member 42) can be brought into contact with the probing target body X in a state where the moving speed is sufficiently lowered with the elastic deformation of the spring 6b. It is possible to more reliably avoid a situation in which a large dent (scratch) is generated on the surface of the probing target body X due to the contact, or the tip portion of the center electrode 4b (tip portion side member 42) is damaged. it can.

  Further, the contact probe 1B includes a cylindrical outer electrode 3b as the first electrode in the present invention and a pin-shaped center electrode 4b as the second electrode in the present invention, and the center electrode is disposed in the outer electrode 3b. 4b is inserted. Therefore, according to the contact probe 1B, the tip portion of the outer electrode 3b and the tip portion of the center electrode 4b (tip portion side member 42) are arranged in a very narrow range on the probing target body X with a relatively simple configuration. Can be contacted separately and independently.

  In addition, this invention is not limited to said structure. For example, the contact probes 1A and 1B using compression-type string-wound springs as the springs 5a, 5b, 6a, 6b, 33, and 43 have been described. However, the configuration of each urging member in the present invention is not limited to this. A tension spring (a spring that attempts to return elastically in the contraction direction) can be used. In the case of adopting this configuration, the arrangement position of each urging member, the position of the protruding portion with which the urging member is engaged, and the like are appropriately changed. In addition, each urging member in the present invention is not limited to an urging member such as a string-wound spring, and may be constituted by an elastic member such as foamed resin.

It is side surface sectional drawing of the contact probe 1A in a non-probing state. FIG. 4 is a side cross-sectional view of the contact probe 1A in a state where the distal end portion of the outer electrode 3a (the distal end portion side member 32) and the distal end portion of the center electrode 4a are in contact with the probing target body X. 4 is a side cross-sectional view of the contact probe 1A in a state in which the distal end portion of the outer electrode 3a (the distal end side member 32) and the distal end portion of the center electrode 4a are urged toward the probing target body X. FIG. It is side surface sectional drawing of the contact probe 1B in a non-probing state. FIG. 4 is a side cross-sectional view of the contact probe 1B in a state in which the distal end portion of the outer electrode 3b and the distal end portion of the center electrode 4b (tip end side member 42) are in contact with the probing target body X. FIG. 4 is a side cross-sectional view of the contact probe 1B in a state in which the distal end portion of the outer electrode 3b and the distal end portion of the center electrode 4b (tip end side member 42) are biased toward the probing target body X.

Explanation of symbols

1A, 1B Contact probe 2a, 2b Base part 3a, 3b Outer electrode 4a, 4b Center electrode 5a, 5b, 6a, 6b, 33, 43 Spring 31, 41 Base part side member 32, 42 Tip part side member X Probing object

Claims (4)

A first electrode and a second electrode, which are arranged to be relatively movable in the probing direction with respect to the base portion and insulated from each other, and directions in which the first electrode and the second electrode are opposite to each other in the probing direction A first urging member for urging the second electrode and the base portion in a direction opposite to each other in the probing direction,
The second electrode includes a first member urged by the second urging member, a second member having a contact-side end formed therein, and the first member and the second member that are opposite to each other in the probing direction. A contact probe comprising a third urging member that urges in a direction to perform.   2. The contact probe according to claim 1, wherein in the non-probing state, a contact-side end portion of the first electrode protrudes closer to the probing direction side than the contact-side end portion of the second electrode.   The contact according to claim 1, comprising a pin-shaped center electrode as the first electrode and a cylindrical outer electrode as the second electrode, wherein the center electrode is inserted into the outer electrode. probe.   The contact according to claim 1, further comprising a cylindrical outer electrode as the first electrode and a pin-shaped center electrode as the second electrode, wherein the center electrode is inserted into the outer electrode. probe.

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