JP2008183711A - Micropattern working device and method of manufacturing optical part - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micropattern working device preferably used for forming a nest disposed in a metal mold and having a micropattern, and a method of manufacturing optical part using the device, whereby the nest having the micropattern is formed with high accuracy and efficiently. <P>SOLUTION: This micropattern working device for forming a micropattern on a cutting master 10 used in forming the nest 20, using a cutting tool 40, includes: a CCD camera 80 adapted to image a working position of the cutting master 10; a prism 82 for superposing an image of the cutting tool 40 on an imaging area of the CCD camera 80; and a cutting tool moving device 92 for moving and adjusting the position of the cutting tool 40 to the prism 82. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine pattern processing apparatus and an optical component manufacturing method, and more particularly to a fine pattern processing apparatus suitable for use in forming a nest having a fine pattern while being disposed in a mold. It relates to the manufacturing method.

  For example, prism sheets and prism light guides used in backlight devices for liquid crystal displays are made of resin, and the surface thereof is fine to improve the state of emitted light (for example, the scattering state). A pattern (specifically, a saw-shaped pattern) is formed.

  In general, this type of prism sheet or prism light guide is manufactured using a mold. In addition, since a prism sheet and a prism light guide have a complicated shape, a mold using a nesting is used as a mold.

  Furthermore, the fine pattern on the mold side corresponding to the fine pattern formed in the nesting is formed on the nesting side, and therefore it is necessary to form the fine pattern in the nesting. At this time, the mold of the plastic optical component having a fine pattern requires very high shape accuracy and specularity.

  As described above, since the nest needs to be formed with high accuracy, electrocasting, precision machining (precision cutting), and the like have been conventionally used as a method for forming the nest. In addition, since it is difficult to obtain a large number of pieces in the conventional manufacturing method, the nesting is manufactured by performing processing individually one by one.

  Specifically, when the nest is manufactured using the electroforming method, a relatively thick nest is manufactured integrally, so that the nest formed by the electroforming method is thick. The structure had a cast layer.

  Moreover, when manufacturing a nest using precision cutting, cutting is performed using a cutting tool as disclosed in Patent Document 1, for example. Light oil and kerosene were used as the oil. Moreover, when supplying this cutting oil to a cutting position, air was mixed with cutting oil by air blow, and it was made mist shape, and this mist-shaped cutting oil was supplied to the cutting position.

  Further, since the fine pattern is a saw-shaped pattern as described above, it is necessary to form a large number of triangular groove-shaped patterns. For this reason, in the past, when forming a fine pattern using precision cutting, after processing one triangular groove-shaped pattern, the tool is once lifted upward and separated from the nest, until the next pattern position to be formed The cutting tool was moved to process the next triangular groove pattern. That is, conventionally, it has been necessary to move the cutting tool in both the plane direction and the vertical direction with respect to the processing surface of the nesting.

  Further, in the case where pre-processing is performed on the nesting surface before performing precise cutting, grinding has been conventionally performed in the longitudinal direction of the material. Moreover, as a material of the nesting, generally, a soft material having good machinability such as aluminum, copper, and brass is applied, thereby improving the machinability.

  In addition, a processing device that performs precision cutting is provided with a feed mechanism for feeding a nest serving as a workpiece. This feed mechanism has a stage on which a nesting is mounted and a drive device that drives the stage. Conventionally, a ball screw mechanism has been used as a drive device, and a configuration using a roller guide surface has been common as a configuration for guiding the movement of the stage.

Furthermore, at the time of processing, it is necessary to align the tip of the cutting tool with the processing start position with high accuracy. Conventionally, this alignment is performed using a microscope.
Japanese Patent Laid-Open No. 01-127215

  However, in the above-described conventional method, since the nesting is individually performed one by one, a processing error is inevitably generated in each manufactured nesting. However, in a plastic optical component having a fine pattern, a change of about 1/10 μ has an effect on the optical characteristics, and the conventional manufacturing method has a problem that the reproducibility of the optical characteristics is deteriorated.

  In addition, when a plurality of plastic optical components are taken by attaching a plurality of inserts with processing variations to the mold, the flow balance of the resin in the mold cavity becomes uneven due to this processing error, Therefore, it took time to adjust the gate balance.

  Further, in the case of producing a nest by using an electroforming method in the past, since an integral mold nest with a thick electroformed layer has been produced, the production of this nest generally requires a long period of about 30 to 50 days. There was a problem that it was necessary and the manufacture of the nesting was troublesome.

  In the case of producing a nest using precision cutting, conventionally, light oil or kerosene is used as cutting oil, which is mixed with an air blow and supplied in a mist form. On the other hand, in fine mirror cutting with a diamond cutting tool or the like, the clearance (flank, rake face) of the cutting area is small and the supply of cutting oil is insufficient. However, there was a problem that it was easily worn and damaged.

  Conventionally, when a fine pattern is formed using precision cutting, after processing one triangular groove pattern, the bit is lifted upward and separated from the nest, and then the position of the pattern to be formed next The next pattern was processed by moving the tool to the end.

  However, this processing method involves the movement of the cutting tool in the vertical direction, so even if it is a pattern between adjacent tools, the tool height and posture (angle) change slightly, which causes a change in gloss on the processed surface. There was a problem of end.

  Conventionally, grinding was performed in the longitudinal direction of the material as a pre-processing, but when a fine mirror pattern was cut while grinding, the surface irregularities and the abrasive grains that were caused by grinding traces intermittently hit the cutting edge. The cutting edge was damaged, and the tool life was shortened.

  Conventionally, soft materials with good machinability such as aluminum, copper, and brass have been applied as nesting materials. However, these metals are soft and therefore deteriorate quickly when used directly in a mold. There is a problem that the number of molded resin molded products is small and the mold life is short. In addition, since aluminum, copper, brass, and the like are easily oxidized, some materials have already started to be oxidized during processing and have already lost their specularity when the processing is completed.

  Conventionally, a feed mechanism for feeding a nest serving as a workpiece is called a ball screw mechanism, and a roller guide surface is used as a configuration for guiding the movement of the stage. As a result, the cutting tool or the insert vibrates, and there is a problem that a streak that intersects the inclined surface of the triangular groove at an angle close to a right angle to the cutting tool feeding direction occurs.

  Further, conventionally, since a microscope is used to align the tip of the cutting tool with the processing start position, it is difficult to determine a reference site when a fine pattern is already present on the entire surface of the insert.

  The present invention has been made in view of the above points, and provides a fine pattern processing apparatus capable of forming a nesting having a fine pattern with high accuracy and efficiency, and a method of manufacturing an optical component using the same. Objective.

From the first aspect of the present invention, the above problem is
In a fine pattern processing apparatus that forms a fine pattern using a cutting tool for a cutting master used when forming a nest,
Imaging means configured to image the machining position of the cutting master;
Byte image superimposing means for superimposing the image of the byte on the imaging region of the imaging means;
This can be solved by a fine pattern processing apparatus comprising a position adjusting means capable of moving and adjusting the position of the bit with respect to the image superimposing means.

According to the present invention,
As described above, according to the present invention, it is possible to perform the tool position adjusting process while displaying the tool position and the machining position of the cutting master on the same screen, so that the position adjusting process can be easily performed.

  Next, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a diagram showing a mold manufacturing method as a first reference example. The mold 22 that is the object of this reference example is one in which inserts 20 and 21 are incorporated and resin-molded. Specifically, a prism sheet or prism light guide (hereinafter referred to as a prism light guide) used in a backlight device of a liquid crystal display is used. , Referred to as an optical component 26).

  Further, since the optical component 26 to be molded in this reference example needs to form a fine pattern 26a for scattering (see FIG. 1G) on one surface, the fine pattern 26a is formed in one insert 21. A fine pattern 11 corresponding to the above is formed. This reference example is characterized by the manufacturing method of the nest 20 having the fine pattern 11, and other configurations are not different from the conventional manufacturing method. Therefore, in the following description, the manufacturing method of the nest 20 will be described. The description will be centered.

  In order to manufacture the insert 20, first, the cutting master 10 shown in FIG. This cutting master 10 is manufactured by a manufacturing method according to each reference example to be described later, and a fine pattern 11 corresponding to the fine pattern 26a is formed on one surface thereof with high accuracy.

  This cutting master 10 is mounted in the container 12 as shown in FIG. Then, the transfer mold 16 is formed by pouring silicon rubber 14 into the container 12 (molding method). When the transfer mold 16 is formed, the cutting master 10 is subsequently detached from the transfer mold 16 as shown in FIG. At this time, a reverse pattern 15 corresponding to the fine pattern 11 is formed on the transfer mold 16.

  Subsequently, as shown in FIG. 1D, the metal 18 that is the material of the insert 20 is melted and poured into the transfer mold 16 (precise casting method). Then, after cooling for a predetermined time to cure the metal 18, the metal 18 is removed from the transfer mold 16, thereby forming the insert 20. At this time, since the reversal pattern 15 is formed on the transfer mold 16, the reversal pattern 15 is transferred to the nest 20, whereby the fine pattern 11 is formed on the nest 20.

  As in the present reference example, the cutting master 10 on which the fine pattern 11 is formed is formed in advance, and then the transfer mold 16 is formed from the cutting master 10 by using a die-cutting method. By forming the nesting 20 using the precision casting method, a large number of nestings 20 can be formed from the same transfer mold 16. Therefore, it is possible to efficiently form the nests 20, and the many nests 20 that are formed are formed from the same transfer mold 16. There is no such thing.

  FIGS. 1F and 1G show a molding process for manufacturing the optical component 26 using the insert 20 manufactured as described above. The mold 22 shown in this reference example is configured to perform so-called multi-cavity manufacturing, in which two optical components 26 are manufactured simultaneously.

  In order to manufacture the optical component 26 using the mold 22, the pair of mold halves 22a and 22b are clamped, and the insert 20 and the mold disposed in the mold halves 22a as shown in FIG. A mold resin 24 is loaded into a cavity formed between the insert half 21 disposed in the mold half 22b.

  At this time, the mold resin 24 moves in the cavity, but since the two inserts 20 arranged in the mold 22 have the same shape as described above, the flow balance of the mold resin 24 in the mold 22 is as follows. Are uniform, so that it is not necessary to adjust the gate balance.

  FIG. 1G shows a state in which the optical component 26 is molded and the pair of mold halves 22a and 22b are separated. Since the optical component 26 formed in this way is formed by the same insert 20, the reproducibility of the optical characteristics can be improved.

  Then, the manufacturing method of the metal mold | die which is a 2nd reference example is demonstrated.

  FIG. 2 is a diagram illustrating a method for manufacturing the mold 23 according to the second reference example. The mold 23 that is the object of this reference example is used when a prototype insert 34 is mounted to form a prototype of the optical component 26. 2, the same components as those shown in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted.

  In order to manufacture the insert 21 in this reference example, the cutting master 10 shown in FIG. 2 (A) in which the fine pattern 11 corresponding to the fine pattern 26a is formed on one side with high accuracy is obtained as in the first reference example. prepare. As shown in FIG. 2B, the cutting master 10 is disposed so as to face the acrylic plate 28, and a pressing plate 30 is disposed on the back surface of the acrylic plate 28. That is, the cutting master 10 and the pressing plate 30 are disposed so as to sandwich the acrylic plate 28.

  Subsequently, as shown in FIG. 2C, the acrylic plate 28 is pressed by the cutting master 10 and the pressing plate 30 while performing the heat treatment to form the transfer master 32. Subsequently, as shown in FIG. 2D, the transfer master 32 is removed from the cutting master 10 and the pressing plate 30 by separating the cutting master 10 and the pressing plate 30. At this time, the transfer pattern 15 is formed on the transfer master 32 by transferring the fine pattern formed on the cutting master 10.

  When the transfer master 32 is formed as shown in FIG. 2 (E), electrocasting is performed based on the transfer master 32, and as shown in FIGS. Cast plate) is formed.

  At this time, in the present reference example, since the prototype insert 34 is used, the plate thickness is reduced. Specifically, the thickness of the nesting 34 is about 0.1 to 0.5 mm, and thus the nesting 34 has a sheet shape.

  In this reference example, similarly to the first reference example, the cutting master 10 on which the fine pattern 11 is formed in advance is formed, the transfer master 32 is formed from the cutting master 10, and the electroforming from the transfer master 32 is performed. By forming the nestings 34 by using the method, a large number of nestings 34 can be formed from the same transfer master 32.

  Therefore, it is possible to efficiently form the inserts 34, and since a large number of formed inserts 34 are formed from the same transfer master 32, the formed inserts 34 all have the same shape and a processing error. There is no such thing.

  Further, since the prototype insert 34 is in the form of a thin sheet, it is rich in mass productivity and can be formed in short numbers. However, in the mounting to the mold 23, the deterioration of the mounting property becomes a problem due to the thinness. For this reason, this reference example solves this problem by adopting a configuration in which the insert 34 is attracted to the mold 23.

  2 (H) and 2 (I) show a molding process for manufacturing the optical component 26 using the insert 34 manufactured as described above. The mold 23 shown in this reference example is also configured to perform so-called multi-cavity manufacturing, in which two optical components 26 are manufactured simultaneously.

  The mold 23 is composed of a pair of mold halves 23a and 23b, and the sheet-like insert 34 is attached to the mold halves 23a. At this time, a suction pipe 36 is disposed in the mold half 23 a, the outer end portion thereof is connected to a suction device (not shown), and the inner end portion is opened to the mounting position of the insert 34. Yes.

  Therefore, after the nest 34 is mounted on the mold half 23a, a negative pressure is applied to the suction pipe 36 by the suction device, whereby the nest 34 is adsorbed to the mold half 23a. With this configuration, even a thin sheet-like insert 34 can be securely attached to the mold 23 (mold half 23a).

  In order to manufacture the optical component 26 using the mold 23 having the above-described configuration, the pair of mold halves 23a and 23b are clamped and disposed on the mold half 23a as shown in FIG. The mold resin 24 is loaded into a cavity formed between the nest 34 and the nest 21 disposed in the mold half 23b.

  At this time, the mold resin 24 moves in the cavity, but the flow of the mold resin 24 in the mold 23 is the same because the two nestings 34 arranged in the mold 23 have the same shape in this reference example. The balance is uniform, so that it is not necessary to adjust the gate balance.

  FIG. 2I shows a state in which the optical component 26 is molded and the pair of mold halves 23a and 23b are separated. Since the optical component 26 formed in this way is formed by the same insert 34, the reproducibility of the optical characteristics can be improved.

  Subsequently, a fine pattern forming method as a first reference example will be described. The fine pattern forming method according to this reference example is applied when the fine pattern 11 is formed on the cutting master 10 described above.

  FIG. 3 is a diagram for explaining a method of forming the fine pattern 11 as the first reference example. In this reference example, as shown in the figure, a cutting tool 40 (diamond cutting tool) is used to form a fine pattern 11 on a cutting master 10 made of metal.

  Specifically, a triangular groove pattern is formed by cutting the surface of the cutting master 10 with a cutting tool 40, and this is repeated a plurality of times to arrange a plurality of triangular groove patterns, whereby the fine pattern 11 is formed. It was formed (see FIG. 5A).

  When cutting the cutting master 10 made of metal with the cutting tool 40 as described above, for the purpose of suppressing the temperature rise of the cutting position, extending the workability of the cutting tool 40, and extending the life of the cutting tool 40, the cutting position includes a cutting oil. 44 (shown in satin) is supplied. The cutting oil 44 enters the gap formed between the cutting tool 40 and the surface of the cutting master 10 and the gap formed between the cutting tool 40 and the cutting element 42 and exhibits the above-described functions.

  Conventionally, light oil or kerosene has been used as the cutting oil, and this was mixed with air blow and supplied to the cutting position as a mist. However, in fine mirror surface cutting with a diamond tool or the like, the gaps (flank and rake face) in the cutting area are small, and the cutting oil is supplied only to the positions indicated by arrows A2 and B2 in FIG. Occurred locally and generated wear and damage to the bite due to heat generation.

  On the other hand, this reference example is characterized in that cutting is performed using a cutting oil 44 to which a surfactant is added. Specifically, a surfactant is added to a base oil having a low viscosity and a high flash point such as electric discharge machining oil, mixed in an air blow, and supplied as a mist to the tip of the cutting tool. Further, a highly volatile solvent such as IPA (isopropyl alcohol) is mixed, and the heat dissipation effect is enhanced by utilizing the volatility.

  By using the cutting oil 44 having the above-described configuration, it is possible to supply the cutting oil 44 deeper in the gap between the cutting tool and the cutting master in the cutting tool portion. That is, it is possible to supply the cutting oil 44 that has been conventionally supplied only to the positions indicated by the arrows A2 and B2 in FIG. 3 to the positions indicated by the arrows A1 and B1. Wear and damage can be prevented.

  Subsequently, a fine pattern forming method as a second reference example will be described. FIG. 4A is a view for explaining a fine pattern forming method as a second reference example, and FIG. 4B shows a conventional fine pattern forming method for comparison.

  First, a conventional fine pattern forming method will be described with reference to FIG. The arrow indicates the movement trajectory of the bite. As shown in the figure, when forming a fine pattern using a cutting tool, first, a single triangular groove pattern is processed by moving the cutting tool relatively in the direction of arrow Y1 on the cutting master 10.

  When the processing of this single triangular groove pattern is completed, the cutting tool moves the cutting tool upward by a predetermined amount in the direction of arrow Z1 (ie, upward), and then moves the cutting tool in the direction of arrow Y2, arrow Z2 (downward), The tool is sequentially moved in the direction of the arrow X2, and the cutting tool is moved to the next cutting start position on the cutting master 10. Then, the next triangular groove pattern is processed by moving the cutting tool in the direction of the arrow Y1, and the fine pattern is formed by repeating this operation thereafter.

  However, since this conventional method involves the movement of the cutting tool in the vertical direction (Z1, Z2 direction), the tool height and the posture (angle) slightly change even in the adjacent patterns, and the processed surface is thus glossy. As described above, there is an inconvenience that this change occurs.

  On the other hand, in the machining method according to this reference example, as shown in FIG. 4A, when cutting the cutting master 10 with a cutting tool, the plane direction of the cutting tool (arrow X1, X2 direction and arrow Y1, Y2 direction). The movement is allowed, and the movement in the height direction of the tool (in the directions of arrows Z1 and Z2) is performed in a fixed state.

  That is, when the processing of one triangular groove pattern is completed, the cutting tool moves in the direction of the arrow X1 to move along the trajectory around the outer periphery of the cutting master 10 indicated by the arrow D, and moves to the next cutting start position.

  Thus, by adopting a method for forming a fine pattern without moving the cutting tool in the height direction (in the directions of arrows Z1 and Z2), variations in the cutting tool height direction can be eliminated. It is possible to prevent the gloss change of the material.

  Subsequently, a fine pattern forming method as a third reference example will be described. FIG. 5A is a diagram for explaining a fine pattern forming method as a third reference example, and FIG. 5B shows a conventional fine pattern forming method for comparison.

  First, a conventional fine pattern forming method will be described with reference to FIG. Although the cutting master 10 is formed by casting or the like, since the surface roughness is large in the blank state immediately after the forming, the cutting master 10 is generally ground before the fine pattern is processed. The

  However, when a process of forming a fine pattern using the cutting tool 40 is performed on the cutting master 10 in a state where the grinding process is performed, the surface of the cutting master 10 is caused by grinding marks as shown in FIG. Since there are fine irregularities and engraved abrasive grains, the cutting tool intermittently hits these irregularities and abrasive grains, causing cutting edge damage and shortening the tool life.

  On the other hand, this reference example is characterized in that a pre-processing for removing the surface layer is performed on the surface of the blank cutting master 10 in which fine irregularities and indented abrasive grains exist.

  That is, in this reference example, before processing a fine pattern, for example, an R bit is fed in the same direction as the feed direction of the bit for forming a fine pattern, and a surface layer (a layer containing fine irregularities and bite abrasive grains) is formed. A removal process (this process is called self-cutting) is performed.

  By performing this pre-processing, the surface of the cutting master 10 is flattened and a smooth surface 52 is formed. Therefore, at the time of processing the fine pattern shown in FIG. 5A, the cutting tool performs cutting on the smooth surface 52 on which there are no fine irregularities or bite abrasive grains. As a result, the cutting tool does not intermittently contact these irregularities and abrasive grains, and therefore, the cutting edge damage can be prevented and the tool life can be extended.

  Subsequently, a fine pattern forming method as a fourth reference example will be described. In this reference example, first, a nickel layer to which at least one of phosphorus or selenium is added is formed on the surface of the blank cutting master 10, and then the nickel layer formed on the surface of the cutting master 10 is cut by the cutting tool 40. Thus, a fine pattern is formed.

  Specifically, an electroless nickel plating of 13% phosphorus is formed on a cutting master 10 made of prehardened steel to a thickness of about 0.3 mm, and the nickel layer is cut by a cutting tool 40 to form a fine pattern. In other words, in the present reference example, the cutting master 10 is not directly cut, but a fine pattern is formed by cutting the nickel layer formed on the cutting master 10.

  The nickel layer having the above composition has high specularity, is hard and not easily damaged, and further has high machinability, so that the cutting tool is not easily damaged, and processing with a very long cutting length can be performed.

  FIG. 6 is a diagram demonstrating the effect of the fine pattern forming method according to the present reference example. 6 (A) to 6 (C) show a cutting tool in which various nickel films of about 0.3 mm are formed on a cutting master 10 made of pre-hardened steel, and a cutting process with a cutting length of 25.5 m is performed with a diamond cutting tool. It is a figure which expands and shows the cutting blade 46 of 40 (40A-40C).

  FIG. 6 (A) relates to the present reference example, and a cutting process with a cutting length of 25.5 m is applied to an electroless nickel plating of 13% phosphorus formed on a cutting master 10 made of pre-hardened steel. The cutting edge 46 of the cutting tool 40A when performing the above is shown enlarged.

  FIG. 6B shows a comparative example, in which a cutting process of 25.5 m in cutting length is performed on an electroless nickel plating of 7% phosphorus formed on a cutting master 10 made of pre-hardened steel with a thickness of about 0.3 mm. The cutting edge 46 of the cutting tool 40B when performing the above is shown enlarged.

  Further, FIG. 6C also shows a comparative example, in which an electroless nickel plating not containing phosphorus is formed on a cutting master 10 made of pre-hardened steel to a thickness of about 0.3 mm, and a cutting process with a cutting length of 25.5 m is performed. The cutting edge 46 of the cutting tool 40C when performing the above is shown enlarged.

  As apparent from FIG. 6 (A), when a nickel layer containing 13% phosphorus is formed on the cutting master 10 of this reference example, the cutting tool 40A has no chipping or wear, Therefore, it was proved that the bite is hardly damaged.

  On the other hand, as shown in FIG. 6B, when a nickel layer containing 7% phosphorus is formed on the cutting master 10, a cutting edge 48 is generated in the cutting tool 40B. As shown in FIG. 6C, when a nickel layer that does not contain phosphorus is formed in the cutting master 10, a curved blade wear part 50 is generated in the cutting tool 40C. Therefore, the tool life can be extended by forming a nickel layer containing phosphorus 13% on the cutting master 10 as in this reference example and cutting the nickel layer to form a fine pattern.

  Subsequently, a fine pattern forming method as a fifth reference example will be described. In this reference example, a nickel master formed on the surface of the cutting master 10 by cutting the surface of the cutting master 10 by performing the above-described fourth reference example to form a fine pattern, and then a cutting master on which the fine pattern is formed. 10 is subjected to heat treatment, followed by slow cooling treatment.

  FIG. 7 shows the relationship between the heating time and the Vickers hardness when the nickel layer is heat-treated, and FIG. 8 shows the Vickers hardness and stress cracking when cooling is performed after the heat treatment. It is a figure which shows a mode.

  In this reference example, after the fine pattern is cut on the nickel plating layer (containing 13% phosphorus), a heat treatment is performed for 90 minutes at 300 ° C., followed by a slow cooling to room temperature in a heating furnace. It was. As a result, as shown in FIG. 8, the Vickers hardness was 700 to 900, and the Vickers hardness was about 750 and could be cured without causing stress cracking.

  In this way, by performing an appropriate heat treatment after the nickel layer processing, it is possible to form a high-hardness cutting master 10 free from stress cracking or specularity deterioration. Manufacturing can be performed.

  Subsequently, a fine pattern processing apparatus as a first reference example will be described. FIG. 9 is an enlarged view showing a main part of the fine pattern processing apparatus 63 as the first reference example.

  The fine pattern processing apparatus 63 according to this reference example includes a cutting oil supply nozzle 60 (cutting oil supply unit) that supplies the cutting oil 44 toward the cutting position of the cutting tool 40, and a rust preventive oil 58 that is also directed toward the cutting position of the cutting tool 40. The rust preventive oil supply nozzle 62 (rust preventive oil supply section) is provided, and the cutting oil 44 and the rust preventive oil 58 are simultaneously supplied from the nozzles 60 and 62 to the cutting position of the cutting tool 40. It is characterized by.

  Specifically, the cutting oil supply nozzle 60 is disposed on the front side (arrow Y2 side) with respect to the feed direction of the cutting tool 40, and the rust preventive oil supply nozzle 62 is on the rear side (with respect to the feed direction of the cutting tool 40). Arranged on the arrow Y1 side).

  With this configuration, the cutting oil 44 is supplied to the front portion of the cutting tool 40 with respect to the machining position, so that the cooling and workability of the cutting position can be improved. Further, since the rust preventive oil 58 is supplied to the rear portion of the cutting tool 40 with respect to the processing position, it is possible to prevent oxidation from occurring in the cut portion of the cutting master 10 and to prevent oxidation of the processed surface. Long processing time is possible.

  Subsequently, a fine pattern processing apparatus as a second reference example will be described. FIG. 10 is an enlarged view showing a main part of the fine pattern processing apparatus 64 as the second reference example, and specifically shows a feed mechanism 70 that sends the cutting master 10 during cutting.

  The feed mechanism 70 is disposed on a table 68, and roughly includes a sub-table 72, a feed base 74, a hydraulic cylinder 78, and the like. The cutting tool 40 is fixed to a chuck 66 disposed on the upper part of the feeding mechanism 70.

  Then, when the cutting master 10 is fed relative to the cutting tool 40 in the direction indicated by the arrow X in the drawing by the feeding mechanism 70, a fine pattern is formed on the upper surface of the cutting master 10. FIG. 10 shows a state in which the cutting tool 40 is in a position where it is moved upward with respect to the cutting master 10.

  Hereinafter, each component of the feed mechanism 70 will be described.

  The subtable 72 is configured to fix the cutting master 10 to the upper part thereof by a fixing mechanism (not shown). The sub-table 72 is configured to be movable in the direction of the arrow X in the upper part of the feed base 74. Further, the feed base 74 is fixed to the table 68 by a fixing tool 75.

  In this reference example, a hydraulic cylinder 78 is used as means for driving the sub-table 72, and a hydrostatic pressure guide surface 76 is provided as guide means for moving the sub-table 72 on the feed base 74. It is. The hydraulic cylinder 78 has a configuration in which the drive shaft 79 is expanded and contracted by the supplied hydraulic pressure to directly drive the sub-table 72, so that vibration generated compared to driving via the ball screw mechanism as in the prior art is reduced. can do.

  Further, the hydrostatic guide surface 76 has a pair of inclined surfaces, and has a V-shaped groove shape with a lower angle of approximately 90 degrees. Further, the sub-table 72 is formed with a triangular protrusion having an inclined surface corresponding to the hydraulic / static pressure guide surface 76, and the triangular protrusion engages and is guided by the V-shaped groove shape. The sub table 72 moves on the feed base 74.

  In addition, an oil film is provided on each inclined surface of the hydraulic hydrostatic guide surface 76, so that the sub-table 72 is configured to be received by the hydrostatic pressure with respect to the feed base 74. Therefore, even when the hydraulic hydrostatic guide surface 76 is provided, the occurrence of vibrations when the sub table 72 moves on the feed base 74, compared to the configuration in which the conventionally used sub table is guided by the roller guide surface. Can be suppressed.

  As described above, according to the present reference example, it is possible to suppress the occurrence of vibration when the sub-table 72 moves on the feed base 74, and thus, due to the vibration on the surface of the cutting master 10 when the fine pattern is cut. Generation of streaks can be prevented.

  Subsequently, a fine pattern processing apparatus according to an embodiment of the present invention will be described. 11 and 12 are enlarged views showing the main part of the fine pattern processing apparatus according to an embodiment of the present invention. Specifically, the vicinity of the cutting tool 40 is shown enlarged.

  In this embodiment, the cutting position of the cutting tool 40 is positioned using a CCD camera 80 (imaging means). Also, a prism 82 (bite image superimposing means) is disposed between the CCD camera 80 and the cutting master 10, so that the state on the cutting master 10 is imaged by the CCD camera 80 via the prism 82. It has become.

  The prism 82 is disposed so as to be substantially parallel to the cutting tool 40, and a fixed focus lens 86 is provided on an incident surface 84 formed at the lower end thereof. The image light indicating the state on the cutting master 10 enters the prism 82 from the incident surface 84 through the fixed focus lens 86, passes through the prism 82, and enters the CCD camera 80. The fixed focus lens 86 has a predetermined focal length determined in advance.

  A reflecting surface 88 is formed at the lower end of the prism 82 so as to be continuous with the incident surface 84. The reflecting surface 88 is a surface in which the prism 82 is inclined by 45 ° with respect to the optical axis of the image light, and functions as a half mirror by forming, for example, a metal thin film on the surface. The reflecting surface 88 is provided so that the CCD camera 80 can capture the image of the bite 40.

  Therefore, in the present embodiment, the CCD camera 80 images the upper surface of the cutting master 10 and the cutting tool 40 in three types. That is, the image by the light passing through the fixed focus lens 86 indicated by the arrow a in FIG. 12, the image by the light passing through the incident surface 84 indicated by the arrow b, and the bite 40 reflected by the reflecting surface 88 indicated by the arrow c are shown. It is the image shown.

  FIG. 13 shows an imaging screen 94 imaged by the CCD camera 80 in this embodiment. In the example shown in the figure, the upper part of the imaging screen 94 is the reflection surface area and the side surface of the cutting tool 40 is displayed. Moreover, the lower part of the imaging screen 94 is an incident surface area, and the state of the surface of the cutting master 10 is displayed.

  Further, a lens enlargement area by the fixed focus lens 86 is formed inside the entrance surface area, and the state of the surface of the cutting master 10 is displayed in an enlarged state in this lens enlargement area. The striped pattern in the incident surface area shown in FIG. 13 is obtained by imaging the fine pattern 11a.

  In this embodiment, the prism 82 can be moved in the horizontal direction and the vertical direction by operating the prism alignment dial 90, and the cutting tool 40 is moved vertically with respect to the prism 82 by the cutting tool moving device 92. It is configured to be movable. The cutting tool 40 is configured to move integrally with the prism 82 when the prism 82 is moved in the horizontal direction.

  In the fine pattern processing apparatus having the above-described configuration, in order to position the tip 40a of the cutting tool 40 at a predetermined cutting start position, the cutting tool 40 is used by using the cutting tool moving device 92 so that the height of the incident surface 84 is the same. The height of the tip end portion 40 a is positioned, and the vertical position adjustment is performed so that the in-focus position of the fixed focus lens 86 is positioned on the surface of the cutting master 10.

  Subsequently, the cutting tool 40 is moved in the horizontal direction together with the prism 82 while looking at the imaging screen 94, and positioning processing is performed so that the tip 40a of the cutting tool 40 coincides with the cutting start position at which cutting processing is to be started. At this time, since the cutting tool 40 and the cutting master 10 are displayed on the same imaging screen 94, this positioning process can be easily performed.

  Thus, when the positioning of the tip 40a of the cutting tool 40 and the cutting start position is completed, the cutting tool 40 is subsequently moved down by the focal length of the fixed focus lens 86, whereby the cutting tool 40 is moved to the cutting start position with high accuracy. In this state, the abutting is performed (that is, the cutting can be started).

FIG. 1 is a diagram for explaining a mold manufacturing method and a method for molding an optical component, which are first reference examples. FIG. 2 is a view for explaining a mold manufacturing method and a method of molding an optical component, which are second reference examples. FIG. 3 is a diagram for explaining a fine pattern processing method as a first reference example. FIG. 4 is a diagram for explaining a fine pattern processing method as a second reference example. FIG. 5 is a diagram for explaining a fine pattern processing method as a third reference example. FIG. 6 is a diagram for explaining the effect when the fine pattern processing method according to the fourth reference example is performed. FIG. 7 is a diagram for explaining the effect when the fine pattern processing method as the fifth reference example is carried out (No. 1). FIG. 8 is a diagram for explaining the effect when the fine pattern processing method as the fifth reference example is performed (part 2). FIG. 9 is a diagram for explaining a fine pattern processing apparatus as a first reference example. FIG. 10 is a view for explaining a fine pattern processing apparatus as a second reference example. FIG. 11 is a diagram for explaining a fine pattern processing apparatus according to an embodiment of the present invention. FIG. 12 is a view for explaining a fine pattern processing apparatus according to an embodiment of the present invention, and is a view showing a configuration in the vicinity of a prism arrangement position. FIG. 13 is a diagram for explaining a fine pattern processing apparatus according to an embodiment of the present invention, and is a diagram illustrating an example of an image pickup screen of a CCD.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Cutting master 11 Fine pattern 15 Reverse pattern 16 Transfer mold 20,34 Nest 22 Mold 26 Optical component 28 Acrylic board 32 Transfer master 36 Suction piping 40, 40A-40C Bit 42 Cutting element 44 Cutting oil 46 Cutting edge 48 Cutting edge part 50 Blade wear part 52 Smooth surface 58 Antirust oil 60 Cutting oil supply nozzle 62 Antirust oil supply nozzle 64 Fine pattern processing device 68 Table 70 Feed mechanism 72 Sub table unit 74 Feed table 76 Hydraulic static pressure guide surface 78 Hydraulic cylinder 80 CCD camera 82 Prism 84 Incident surface 86 Fixed focus lens 88 Reflective surface 90 Prism alignment dial 92 Byte moving mechanism 94 Imaging screen

Claims (3)

In a fine pattern processing apparatus that forms a fine pattern using a cutting tool for a cutting master used when forming a nest,
Imaging means configured to image the machining position of the cutting master;
Byte image superimposing means for superimposing the image of the byte on the imaging region of the imaging means;
A fine pattern processing apparatus, comprising: a position adjusting unit capable of moving and adjusting the position of the bit with respect to the image superimposing unit.   An optical component manufacturing method, wherein an optical component is manufactured using a mold having a fine pattern formed by using the fine pattern processing apparatus according to claim 1. In the manufacturing method of the optical component according to claim 2,
The method of manufacturing an optical component, wherein the optical component is a prism sheet or a prism light guide.

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