JPH11114967A - Manufacture of mold, method and apparatus for processing fine pattern - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately and efficiently form an insert having a fine pattern by previously forming the pattern, forming a transfer mold from a cutting master by using a product molding method, and then molding the insert from the transfer mold by using a precise casting method. SOLUTION: A cutting master 10 is mounted in a container 12, a silicone rubber 14 is cast in the container 12 to form a transfer mold 16, and then the master 10 is removed from the mold 16. In this case, an inverting pattern 15 corresponding to a fine pattern 11 is formed in the mold 16. Then, a metal 18 to become a material of an insert 21 is melted and cast in the mold 16. And, it is cooled for a predetermined time to cure the metal 18. Then, it is removed from the mold 16, thereby forming an insert 20. In this case, since the pattern 15 is formed in the mold 16, the pattern 15 is transferred to the insert 20, and hence the pattern 11 is formed at the insert 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a metal mold, a method for processing a fine pattern, and an apparatus for processing a fine pattern, and more particularly to a method suitable for forming a nest having a fine pattern disposed in a metal mold. The present invention relates to a method for manufacturing a fine mold, a method for processing a fine pattern, and a device for processing a fine pattern.

[0002]

2. Description of the Related Art For example, a prism sheet or a prism light guide used in a backlight device of a liquid crystal display is formed of a resin, and the surface of the prism sheet or the light guide has a good state of emitted light (for example, a scattering state). Therefore, a fine pattern (specifically, a saw-like pattern) is formed.

[0003] Generally, this kind of prism sheet or prism light guide is manufactured using a mold. Further, since a prism sheet or a prism light guide usually has a complicated shape, a mold using a nest is used as a mold. Furthermore, the fine pattern on the mold side corresponding to the fine pattern formed in the nest is formed on the nest side,
Therefore, it is necessary to form a fine pattern for nesting.
At this time, a mold for a plastic optical component having a fine pattern requires extremely high shape accuracy and mirror finish.

As described above, since the nest needs to be formed with high precision, conventionally, as a method of forming this nest,
Electroforming and precision machining (precision cutting) have been used. In addition, since it is difficult to obtain a large number of pieces by the conventional manufacturing method, nests are manufactured by individually processing each one. Specifically, when manufacturing the nest using the electroforming method, the nest having a relatively thick thickness is integrally manufactured,
Therefore, the nest formed by the electroforming method has a configuration having a thick electroformed layer.

[0005] When nesting is manufactured using precision cutting, cutting is usually performed using a cutting tool. Light oil or kerosene is used as the cutting oil for this cutting. Had been. Further, when supplying the cutting oil to the cutting position, the cutting oil is mixed with air by air blow to form a mist, and the mist-shaped cutting oil is supplied to the cutting position.

Further, since the fine pattern is a saw-like pattern as described above, it is necessary to form a large number of triangular groove-like patterns. For this reason, conventionally, when forming a fine pattern using precision cutting, after processing one triangular groove pattern, raise the cutting tool once and separate it from the nest, until the position of the next pattern to be formed The cutting tool was moved, and the next triangular groove pattern was processed on the tool. That is, conventionally, it was necessary to move the cutting tool in both the plane direction and the vertical direction with respect to the nested processing surface.

In the case where pre-processing is performed on the nesting surface before performing precision cutting, grinding has conventionally been performed in the longitudinal direction of the material. Further, as a material of the nest, a soft material having good machinability, such as aluminum, copper, or brass, is generally applied, thereby improving the machinability. In addition, a machining apparatus for performing precision cutting is provided with a feed mechanism for feeding a nest as a workpiece. The feed mechanism has a stage on which a nest is mounted, and a driving device for driving the stage. Conventionally, a ball screw mechanism has been used as a driving device, and a configuration using a roller guide surface has been generally used as a configuration for guiding the movement of a stage.

Further, at the time of machining, it is necessary to align the tip of the cutting tool with the machining start position with high accuracy. Conventionally, this alignment has been performed using a microscope.

[0009]

However, in the above-described conventional method, since the nesting is performed individually one by one, a processing error necessarily occurs in each nest manufactured. However, in a plastic optical component having a fine pattern, a change of about 1/10 μm also affects the optical characteristics, so that the conventional manufacturing method has a problem that the reproducibility of the optical characteristics is deteriorated.

When a plurality of plastic optical parts are obtained by mounting a plurality of nests having such processing variations in a mold, the flow error of the resin in the mold cavity is not uniform due to the processing error. Therefore, man-hours were required to adjust the gate balance. Conventionally, when nesting is manufactured using an electroforming method,
Since an integrated mold nest having a thick electroformed layer has been manufactured, it generally takes a long time of about 30 to 50 days to manufacture the nest, and there is a problem that the manufacture of the nest is troublesome. Was.

In the case where nests are manufactured by precision cutting, conventionally, light oil or kerosene is used as cutting oil, mixed with air blow and supplied in the form of mist. On the contrary, in the case of micro-mirror cutting with a diamond tool or the like, the gap (flank face, rake face) in the area being cut is small and the supply of cutting oil is insufficient, so there is a lot of local heat generation. However, there is a problem that it is easily worn or damaged.

Conventionally, when a fine pattern is formed by precision cutting, one triangular groove-shaped pattern is processed, and then the tool is once raised upward, separated from the nest, and then formed. The cutting tool was moved to the position of the pattern to process the next pattern. However, in this processing method, the cutting tool involves an operation of moving the cutting tool in the vertical direction. Therefore, even if the patterns are adjacent to each other, the cutting tool height and the posture (angle) slightly change, so that a change in gloss occurs on the processing surface. There was a problem that it would.

Conventionally, grinding has been performed in the longitudinal direction of the material as pre-processing. However, if a fine mirror pattern is cut while the grinding is being performed, irregularities on the surface due to the grinding traces and abrasive grains that have been cut off are intermittently cut. In this case, the cutting edge was damaged and the life of the cutting tool was shortened. Conventionally, soft materials with good machinability, such as aluminum, copper, and brass, were used as the material of the nest, but these metals are soft and deteriorate quickly when used directly in a mold. There is a problem that the number of formed resin molded articles is small and the mold life is short.
In addition, since aluminum, copper, brass, and the like are easily oxidized, some materials have already started to be oxidized during processing, and the mirror finish has already been reduced when processing is completed.

Conventionally, a feed mechanism for feeding a nest as a workpiece is provided with a ball screw mechanism and a roller guide surface is used to guide the movement of the stage. Due to the generated vibration, there is a problem in that a streak that vibrates the cutting tool or the insert and intersects the slope of the triangular groove at an angle close to a right angle to the cutting tool feeding direction occurs.

Further, since a microscope is conventionally used to align the tip of the cutting tool with the processing start position, it is difficult to determine a reference portion when a fine pattern already exists on the entire surface of the nest. Was. The present invention has been made in view of the above points, and provides a mold manufacturing method, a fine pattern processing method, and a fine pattern processing apparatus capable of forming a nest having a fine pattern with high accuracy and efficiency. With the goal.

[0016]

The above-mentioned object can be attained by taking the following means. According to the first aspect of the present invention, in the method for manufacturing a mold having a nest on which a fine pattern is formed, when manufacturing the nest, first, a cutting master on which a fine pattern is formed in advance is formed, A transfer mold is formed from the cutting master using a molding method, and subsequently, a nest is formed from the transfer mold using a precision casting method.

According to a second aspect of the present invention, in the method of manufacturing a mold having a nest on which a fine pattern is formed, when manufacturing the nest, first, a cutting master on which a fine pattern has been formed is first formed. Then, a transfer master is formed from the cutting master by hot pressing, and subsequently, a nest is formed from the transfer master by using an electroforming method.

According to a third aspect of the present invention, in the fine pattern processing method of forming a fine pattern using a cutting tool on a cutting master used for forming a nest, the cutting master is cut by the cutting tool. At this time, cutting is performed using a cutting oil to which a surfactant is added.

According to a fourth aspect of the present invention, in a fine pattern processing method for forming a fine pattern using a cutting tool on a cutting master used for forming a nest, the cutting master is cut by the cutting tool. In this case, the cutting tool is characterized in that the cutting tool is allowed to move in the plane direction, and is processed in a state where the cutting tool is fixed in the height direction.

According to a fifth aspect of the present invention, in a fine pattern processing method of forming a fine pattern using a cutting tool on a cutting master used for forming a nest, first, the surface of the cutting master in a blank state is removed. The pre-processing for flattening is performed in the same direction as the feed direction of the cutting tool, and thereafter, the cutting master is cut by the cutting tool to form the fine pattern.

According to a sixth aspect of the present invention, in the fine pattern processing method for forming a fine pattern using a cutting tool on a cutting master used for forming a nest, first, the surface of the cutting master in the blank state is formed. Forming a nickel layer to which at least one of phosphorus and selenium is added, and thereafter cutting the nickel layer formed on the surface of the cutting master with the cutting tool to form the fine pattern. It is.

According to a seventh aspect of the present invention, in the fine pattern processing method according to the sixth aspect, the nickel layer formed on the surface of the cutting master is cut by the cutting tool to form a fine pattern. Thereafter, a heating process is performed on the cutting master on which the fine pattern is formed, and subsequently, a slow cooling process is performed.

In the fine pattern processing apparatus for forming a fine pattern using a cutting tool on a cutting master used for forming a nest, a cutting oil is directed toward a cutting position of the cutting tool. A cutting oil supply unit for supplying, and a rust prevention oil supply unit for supplying rust prevention oil toward the cutting position of the cutting tool, wherein the cutting oil and the rust preventing oil are simultaneously supplied to the cutting position of the cutting tool. It is characterized by having.

According to the ninth aspect of the present invention, there is provided a feed mechanism having a table on which a cutting master used for forming the nest is mounted, and a driving device for moving the table. While sending the cutting master through a table, in a fine pattern processing apparatus that forms a fine pattern on the cutting master using a cutting tool, the feed mechanism, while using a hydraulic cylinder as a driving means to move the table, The table is provided with a hydrostatic guide surface.

Further, according to the tenth aspect of the present invention, in a fine pattern processing apparatus for forming a fine pattern using a cutting tool on a cutting master used when forming a nest, a processing position of the cutting master is imaged. It is provided that the image pickup device configured includes a byte image superimposing device that superimposes the image of the byte on the imaging region of the image capturing device, and a position adjusting device that can move and adjust the byte position with respect to the image superimposing device. It is a feature.

Each of the above means operates as follows.
According to the invention described in claim 1, a cutting master on which a fine pattern is formed in advance is formed, a transfer mold is formed from the cutting master by using a molding method, and a precision casting method is further formed from the transfer mold. The use of nesting makes it possible to form many nests from the same transfer mold.

Further, since the plurality of nests to be formed are formed from the same transfer mold, the nests to be formed all have the same shape and there is no processing error. Therefore, when an optical component is formed using the nest, the reproducibility of the optical characteristics can be improved. In addition, when a plurality of nests are mounted on a mold to take a large number of resin-formed products, the flow balance of the resin in the cavity of the mold is made uniform, so that adjustment of the gate balance can be eliminated.

According to the second aspect of the present invention, a cutting master on which a fine pattern is formed in advance is formed, a transfer master is formed from the cutting master by hot pressing, and subsequently, an electroforming method is used. By forming nests from the transfer master, it is possible to form many nests from the same transfer mold.

Further, since the plurality of nests to be formed are formed from the same transfer mold, the nests to be formed all have the same shape and there is no processing error. Therefore, when an optical component is formed using the nest, the reproducibility of the optical characteristics can be improved. In addition, when a plurality of nests are mounted on a mold to take a large number of resin-formed products, the flow balance of the resin in the cavity of the mold is made uniform, so that it is not necessary to adjust the gate balance. Furthermore, in small-scale molding such as trial production, a thin electroformed plate can be manufactured in a short turn.

According to the third aspect of the present invention, when the cutting master is machined by the cutting tool, the cutting is performed by using a cutting oil to which a surfactant is added. In the processing section, it becomes possible to supply the cutting oil deeper into the gap between the cutting tool and the cutting master, and it is possible to prevent local heat generation and wear and damage of the cutting tool.

According to the fourth aspect of the invention, when cutting the cutting master with the cutting tool, the cutting tool is allowed to move in the plane direction, and the cutting is performed in a state where the movement of the cutting tool in the height direction is fixed. Thus, the variation in the height direction of the cutting tool can be eliminated, and the gloss change of the fine pattern can be prevented.

According to the fifth aspect of the present invention, first, pre-processing for flattening the surface of the blank cutting master is performed in the same direction as the feed direction of the cutting tool, and thereafter, the cutting master is cut by the cutting tool. By forming a fine pattern in this manner, surface irregularities and the like can be removed by pre-processing, and the occurrence of cutting edge damage can be reduced.

According to the invention, a nickel layer to which at least one of phosphorus and selenium is added is formed on the surface of the cutting master in a blank state, and then the nickel layer formed on the surface of the cutting master is formed. By cutting the layer with a cutting tool to form a fine pattern,
The nickel layer having the above composition has a high specularity, is hard and hard to be damaged, and has a high machinability, so that the cutting tool is hardly damaged and a machining with a very long cutting length can be performed.

According to the seventh aspect of the present invention, the nickel layer formed on the surface of the cutting master is cut with a cutting tool to form a fine pattern. By carrying out the heat treatment and the subsequent slow cooling treatment, the curing treatment can be carried out without causing stress cracking and deterioration of the mirror surface.

According to the eighth aspect of the present invention, there is provided a cutting oil supply section for supplying cutting oil toward a cutting position of the cutting tool,
A rust-preventive oil supply unit that supplies rust-preventive oil toward the cutting position of the cutting tool is provided, and this cutting oil and rust-preventing oil are simultaneously supplied to the cutting position of the cutting tool. Oxidation can be prevented from occurring.

According to the ninth aspect of the present invention, a feed mechanism having a table on which a cutting master is mounted and a driving device for moving the table uses a hydraulic cylinder as a driving means for moving the table and a table. By providing the hydraulic static pressure guide surface on the surface, it is possible to suppress the occurrence of vibration at the time of feeding, and to prevent the occurrence of streaks on the surface to be processed.

Further, according to the tenth aspect of the present invention, there is provided an imaging unit configured to image a processing position of the cutting master, a byte image superimposing unit configured to superimpose an image of the cutting tool on an imaging area of the imaging unit, With the provision of the position adjusting means capable of moving and adjusting the bite position with respect to the image superimposing means, the bite position can be adjusted while displaying the bite position and the machining position of the cutting master on the same screen. Therefore, the position adjustment processing can be easily performed.

[0038]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a diagram showing a method for manufacturing a mold according to a first embodiment of the present invention. The mold 22 to which the present embodiment is applied is formed by resin molding with the nests 21 and 22 incorporated therein. Specifically, a prism sheet or a prism light guide (hereinafter, referred to as a backlight device of a liquid crystal display) is used. , Optical component 26).

The optical component 26 to be molded in the present embodiment needs to form a fine pattern 26a for scattering light (see FIG. 1 (G)) on one surface thereof. The fine pattern 11 corresponding to the fine pattern 26a is formed. The present embodiment is characterized by a method of manufacturing the nest 21 having the fine pattern 11, and the other configuration is not different from the conventional manufacturing method. The explanation will be centered.

In order to manufacture the nest 21, first, FIG.
A cutting master 10 shown in (A) is prepared. The cutting master 10 is manufactured by a manufacturing method according to each embodiment described later, and a fine pattern 11 corresponding to the fine pattern 26a is formed on one surface thereof with high precision.
This cutting master 10 is, as shown in FIG.
It is mounted in the container 12. Then, the transfer die 16 is formed by pouring the silicone rubber 14 into the container 12 (molding method). When the transfer die 16 is formed, the cutting master 10 is subsequently removed from the transfer die 16 as shown in FIG. At this time, an inverted pattern 15 corresponding to the fine pattern 11 is formed on the transfer die 16.

Subsequently, as shown in FIG. 1D, the metal 18 serving as the material of the nest 21 is melted and poured into the transfer mold 16 (precision casting method). After cooling for a predetermined time, the metal 1
After hardening 8, it is removed from transfer mold 16 to form nest 20. At this time, the transfer mold 16
Since the reverse pattern 15 is formed on the nest 20, the reverse pattern 15 is transferred to the nest 20, whereby the fine pattern 11 is formed on the nest 20.

As in this embodiment, the fine pattern 11
Is formed, a transfer mold 16 is formed from the cutting master 10 using a molding method, and a nest 20 is formed from the transfer mold 16 using a precision casting method. This makes it possible to form a large number of nests 20 from the same transfer mold 16. Therefore, the nest 20 can be efficiently formed,
Also, a large number of nests 20 are formed in the same transfer mold 16.
Nest 20 formed from
Have the same shape, and there is no possibility that a processing error exists.

FIGS. 1F and 1G show a molding process for manufacturing an optical component 26 using the nest 20 manufactured as described above. The mold 22 shown in the present embodiment includes:
This is a configuration in which two optical components 26 are manufactured at the same time, that is, a so-called multi-piece manufacturing is performed. In order to manufacture the optical component 26 using the mold 22, a pair of mold halves 22a and 22b is used.
Is clamped, and as shown in FIG.
The mold resin 24 is charged into a cavity formed between the nest 20 disposed on the mold a and the nest 21 disposed on the mold half 22b.

At this time, the mold resin 24 moves in the cavity, but is disposed in the mold 22 as described above.
Since the individual nests 20 have the same shape, the flow balance of the mold resin 24 in the mold 22 is uniform, so that it is not necessary to adjust the gate balance. FIG. 1G shows a state where the optical component 26 is molded and the pair of mold halves 22a and 22b are separated. Since the optical components 26 formed in this way are formed by the same nest 20, the reproducibility of the optical characteristics can be improved.

Next, a method of manufacturing a mold according to a second embodiment of the present invention will be described. FIG. 2 is a view showing a method of manufacturing a mold 23 according to a second embodiment of the present invention. The mold 23 to which the present embodiment is applied is used when forming a prototype of the optical component 26 by mounting a nest 34 for trial operation. In FIG. 2, the same components as those shown in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted.

In order to manufacture the insert 21 in this embodiment, as in the first embodiment, a fine pattern 11 corresponding to the fine pattern 26a is formed on one surface with high precision.
A cutting master 10 shown in (A) is prepared. And FIG.
As shown in (B), the cutting master 10 is disposed so as to face the acrylic plate 28 and the acrylic plate 2
The holding plate 30 is provided on the back surface of the base plate 8. That is, the cutting master 10 and the holding plate 30 are arranged so as to sandwich the acrylic plate 28.

Subsequently, as shown in FIG. 2C, the acrylic plate 28 is pressed by the cutting master 10 and the pressing plate 30 while performing the heat treatment, and the transfer master 32 is formed. Subsequently, as shown in FIG. 2D, the transfer master 32 is removed from the cutting master 10 and the pressing plate 30 by separating the cutting master 10 from the pressing plate 30. At this time, the transfer pattern 32 is formed on the transfer master 32 by transferring the fine pattern formed on the cutting master 10.

As shown in FIG. 2E, the transfer master 3
2 is formed, electroforming is performed based on the transfer master 32, and a nest 34 (so-called electroformed plate) is formed as shown in FIGS. 2 (F) and 2 (G). At this time, in this embodiment, since the nest 34 is a trial operation, its plate thickness is reduced. Specifically, the thickness of the nest 34 is 0.1
The nest 34 has a sheet-like shape.

In this embodiment, as in the first embodiment,
The cutting master 10 on which the fine pattern 11 is formed is formed in advance, the transfer master 32 is formed from the cutting master 10, and the nest 34 is formed from the transfer mask 32 by using an electroforming method. It is possible to form a large number of nests 34 from the transfer master 32.

Therefore, the nest 34 can be formed efficiently, and since a plurality of nests 34 are formed from the same transfer master 32,
The nests 34 to be formed all have the same shape, and there is no processing error. In addition, the nest 34
Since is a thin sheet, it has high productivity and can be formed in a short turn. However, in the mounting to the mold 23, the mounting property deteriorates due to the thinness. Therefore, in the present embodiment, this problem is solved by adopting a configuration in which the insert 34 is sucked to the mold 23.

FIGS. 2H and 2I show a molding process for manufacturing the optical component 26 using the nest 34 manufactured as described above. The mold 23 shown in this embodiment is also
The configuration is such that two optical components 26 are manufactured at the same time, that is, a so-called multi-cavity is manufactured. The mold 23 includes a pair of mold halves 23a and 23b, and a sheet-shaped insert 34 is mounted on the mold half 23a. At this time, a suction pipe 36 is provided in the mold half 23a, and its outer end is connected to a suction device (not shown), and its inner end is open to the mounting position of the insert 34. I have.

Thus, the nest 34 is attached to the mold half 23a, and then a negative pressure is applied to the suction pipe 36 by the suction device so that the nest 34 is adsorbed to the mold half 23a. With this configuration, even the thin sheet-shaped nest 34 can be reliably mounted on the mold 23 (the mold half 23a). In order to manufacture the optical component 26 using the mold 23 having the above configuration, a pair of mold halves 23a,
2H is clamped, and as shown in FIG. 2H, a mold is formed in a cavity formed between a nest 34 provided in the mold half 23a and a nest 21 provided in the mold half 23b. The resin 24 is loaded.

At this time, the mold resin 24 moves in the cavity, but also in this embodiment, since the two inserts 34 disposed in the mold 23 have the same shape, the mold 23
Since the flow balance of the mold resin 24 in the inside is uniform, it is not necessary to adjust the gate balance. FIG. 2I shows a state in which the optical component 26 is molded and the pair of mold halves 23a and 23b are separated. Since the optical components 26 formed in this manner are formed by the same nest 34, the reproducibility of the optical characteristics can be improved.

Next, a method for forming a fine pattern according to a first embodiment of the present invention will be described. The method of forming a fine pattern according to the present embodiment is applied when forming the fine pattern 11 on the cutting mask 10 described above.
FIG. 3 is a diagram for explaining a method for forming the fine pattern 11 according to the first embodiment of the present invention. In this embodiment, as shown in the figure, a cutting tool 40 (diamond cutting tool) is used to form a fine pattern 11 on a cutting mask 10 made of metal.

Specifically, the surface of the cutting mask 10 is cut with a cutting tool 40 to form a triangular groove pattern.
This operation was repeated a plurality of times to arrange a plurality of triangular groove patterns in parallel, thereby forming the fine pattern 11 (see FIG. 5A). When the cutting mask 10 made of metal is cut with the cutting tool 40 as described above, the purpose is to suppress the temperature rise at the cutting position, to improve the workability by the cutting tool 40, and to extend the life of the cutting tool 40. 44
(Shown in satin). The cutting oil 44 enters the gap formed between the cutting tool 40 and the surface of the cutting master 10 and the gap formed between the cutting tool 40 and the cutting tool 42 and performs the above-described functions.

Conventionally, light oil or kerosene has been used as the cutting oil, mixed with air blow and supplied to the cutting position in the form of a mist. On the contrary, in the case of micro-mirror surface cutting with a diamond tool or the like, the gap (flank, rake face) in the cutting area is small, and the cutting oil is the arrow A in FIG.
Only the position indicated by B2 and B2 was supplied, and the supply was insufficient, causing local heat generation and wear and damage of the cutting tool due to the heat generation.

On the other hand, the present embodiment is characterized in that cutting is performed using a cutting oil 44 to which a surfactant is added. Specifically, it has low viscosity such as electric discharge machining oil.
A surfactant is added to the base oil having a high flash point, mixed with air blow, and supplied to the tip of a cutting tool in the form of a mist. In addition, a highly volatile solvent such as IPA (isopropyl alcohol) is mixed to enhance the heat radiation effect by utilizing the volatility.

By using the cutting oil 44 configured as described above, it becomes possible to supply the cutting oil 44 deeper into the gap between the cutting tool and the cutting master in the cutting part. That is, the cutting oil 44 which can be supplied only up to the position indicated by arrows A2 and B2 in FIG.
It is possible to supply to the position indicated by 1 and B1, so that local heat generation and wear and damage of the cutting tool can be prevented.

Next, a method for forming a fine pattern according to a second embodiment of the present invention will be described. FIG. 4A is a view for explaining a fine pattern forming method according to a second embodiment of the present invention, and FIG. 4B shows a conventional fine pattern forming method for comparison. ing. First, FIG.
A conventional method for forming a fine pattern will be described with reference to FIG. In the figure, the movement trajectory of the cutting tool is indicated by an arrow. As shown in the figure, when a fine pattern is formed using a cutting tool, first, the cutting tool 10 is processed by moving the cutting tool relatively in the direction of arrow Y1 to form one triangular groove pattern.

When the processing of this triangular groove pattern is completed, the cutting tool moves the cutting tool upward by a predetermined amount in the direction of arrow Z1 (ie, upward), and then moves the cutting tool in the directions of arrow Y2 and arrow Z2 (downward). Direction), and sequentially move in the direction of arrow X2,
The cutting tool is moved to the next cutting start position on the cutting master 10. Then, the next triangular groove-shaped pattern is processed by moving the cutting tool in the direction of the arrow Y1, and thereafter, this operation is repeatedly performed to form a fine pattern.

However, in this conventional method, since the cutting tool involves an operation of moving the cutting tool in the vertical direction (Z1 and Z2 directions), the cutting tool height and posture (angle) slightly change even if the patterns are adjacent to each other. As described above, there is an inconvenience that a change in gloss occurs on the surface. On the other hand, in the processing method according to the present embodiment, as shown in FIG. 4A, when the cutting master 10 is cut by the cutting tool, the cutting tool 10 is cut in the plane direction (the directions of the arrows X1 and X2 and the arrows Y1 and Y1).
Movement in two directions is allowed, and the height direction of the cutting tool (arrow Z)
The movement in the (1, Z2 direction) is characterized in that processing is performed in a fixed state.

That is, when the machining of one triangular groove-shaped pattern is completed, the cutting tool moves in the direction of arrow X1 so as to move along the trajectory around the outer periphery of the cutting master 10 indicated by arrow D, and reaches the next cutting start position. Moving. As described above, the method of forming the fine pattern without moving the cutting tool in the height direction (the directions of the arrows Z1 and Z2) makes it possible to eliminate the variation in the cutting tool height direction. This makes it possible to prevent a change in gloss.

Next, a method of forming a fine pattern according to a third embodiment of the present invention will be described. FIG. 5A is a diagram for explaining a fine pattern forming method according to a third embodiment of the present invention, and FIG. 5B is a diagram showing a conventional fine pattern forming method for comparison. ing. First, FIG.
A conventional method for forming a fine pattern will be described with reference to FIG. The cutting master 10 is formed by casting or the like, but since the surface roughness is large in a blank state immediately after being formed, the cutting master 10 is generally subjected to a grinding process before performing a fine pattern processing. You.

However, when a process of forming a fine pattern using the cutting tool 10 is performed on the cutting master 10 in a state where the grinding process is performed, as shown in FIG. Since fine irregularities due to grinding marks and abrasive grains are present, the cutting tool intermittently hits these irregularities and abrasive grains, causing cutting edge damage and shortening the life of the cutting tool.

On the other hand, in the present embodiment, the cutting master 10 in a blank state in which fine irregularities and abrasive grains are present exists.
Is characterized in that a pre-process for removing a surface layer is performed on the surface. That is, in this embodiment, before performing the processing of the fine pattern, for example, the R bit is sent in the same direction as the feeding direction of the bit for forming the fine pattern, and the surface layer (the layer containing fine irregularities and the cut-in abrasive grains) is formed. The removal process (this process is called self-cut) is performed.

By performing this pre-processing, the surface of the cutting master 10 is flattened, and a smooth surface 52 is formed. Therefore, at the time of processing the fine pattern shown in FIG. 5A, the cutting tool performs cutting on the smooth surface 52 on which fine irregularities and abrasive grains do not exist. As a result, the cutting tool does not intermittently hit these irregularities or abrasive grains, so that damage to the cutting edge can be prevented and the cutting tool life can be extended.

Next, a method for forming a fine pattern according to a fourth embodiment of the present invention will be described. In this embodiment, first, a nickel layer to which at least one of phosphorus and selenium is added is formed on the surface of the cutting master 10 in a blank state,
Thereafter, the nickel layer formed on the surface of the cutting master 10 is cut with a cutting tool 40 to form a fine pattern.

More specifically, electroless nickel plating of 13% of phosphorus is applied to the cutting master 10 made of pre-hardened steel by 0.3%.
A film having a thickness of about mm is formed, and the nickel layer is cut with a cutting tool 40 to form a fine pattern. That is, in the present embodiment, a fine pattern is formed not by directly cutting the cutting master 10 but by cutting the nickel layer formed on the cutting master 10.

The nickel layer having the above composition has a high specularity, is hard and is not easily damaged, and has a high machinability. Therefore, the cutting tool is hardly damaged and a machining with a very long cutting length can be performed. FIG. 6 is a diagram for demonstrating the effect of the method for forming a fine pattern according to the present embodiment. FIG.
(C) shows that the cutting master 10 made of pre-hardened steel is
It is a figure which expands and shows the cutting edge 46 of the cutting tool 40 (40A-40C) when forming various nickel films of about 3 mm, and performing cutting processing with a diamond cutting tool with a cutting length of 25.5 m.

FIG. 6 (A) relates to the present embodiment, and shows a cutting length of 25.5 m for an electroless nickel plating of 13% phosphorus formed on a cutting master 10 made of pre-hardened steel to a thickness of about 0.3 mm. The cutting edge 46 of the cutting tool 40A when the cutting process is performed is shown in an enlarged manner. FIG.
(B) shows a comparative example, in which a cutting master 10 made of pre-hardened steel is formed by electroless nickel plating of phosphorus 7%.
The cutting edge 46 of the cutting tool 40B when a cutting process with a cutting length of 25.5 m is performed on a film having a thickness of about 0.3 mm is shown on an enlarged scale.

FIG. 6C also shows a comparative example, in which a cutting length of 25.5 m was obtained by forming an electroless nickel plating containing no phosphorus on a cutting master 10 made of pre-hardened steel to a thickness of about 0.3 mm. The cutting edge 46 of the cutting tool 40C when the cutting process is performed is shown in an enlarged manner. FIG.
As is clear from (A), when a nickel layer containing 13% of phosphorus is formed on the cutting master 10 according to the present embodiment, no chipping or wear occurs on the cutting tool 40A. Has proven to be less susceptible to damage.

On the other hand, as shown in FIG. 6 (B), when a nickel layer containing 7% of phosphorus is formed on the cutting master 10, a cutting part 48 is formed on the cutting tool 40 B. . Further, as shown in FIG. 6C, when the cutting master 10 is formed with a nickel layer that does not contain phosphorus, a curved blade wear portion 50 is generated in the cutting tool 40C. Therefore, by forming a nickel layer containing 13% of phosphorus on the cutting master 10 as in the present embodiment and performing a cutting process on the nickel layer to form a fine pattern, the tool life can be extended.

Next, a method for forming a fine pattern according to a fifth embodiment of the present invention will be described. In this embodiment, the cutting master 10 is implemented by implementing the fourth embodiment.
After a fine pattern is formed by cutting the nickel layer formed on the surface of the substrate with a cutting tool, a heating process is performed on the cutting master 10 on which the fine pattern is formed, and then a slow cooling process is performed. It is characterized by the following.

FIG. 7 shows the relationship between the heating time and the Vickers hardness when the above-mentioned nickel layer was subjected to the heat treatment, and FIG. 8 shows the Vickers hardness and the Vickers hardness when the heat treatment was performed and then the cooling. It is a figure which shows a mode of a stress crack. In the present embodiment, the nickel plating layer (phosphorus 1
3%), and then cut at 300 ° C for 9
A heat treatment for holding for 0 minutes was performed, and then a heat treatment for gradually cooling to room temperature in a heating furnace was performed. As a result, as shown in FIG. 8, the Vickers hardness was 700 to 900, and the composition could be cured to a Vickers hardness of about 750 without generating stress cracking.

As described above, by performing an appropriate heat treatment after processing the nickel layer, it is possible to form the cutting master 10 having a high hardness without stress cracking or deterioration of the mirror surface, and thus high accuracy and high reliability. Nesting can be manufactured. Next, a fine pattern processing apparatus according to a first embodiment of the present invention will be described. FIG. 9 is an enlarged view showing a main part of the fine pattern processing apparatus 63 according to the first embodiment of the present invention.

The fine pattern processing apparatus 63 according to this embodiment
Is a cutting oil supply nozzle 60 (cutting oil supply unit) that supplies the cutting oil 44 toward the cutting position of the cutting tool 40, and a rust prevention oil supply nozzle 62 (which also supplies the rust preventing oil 58 toward the cutting position of the cutting tool 40). And a cutting oil 44 and a rust preventing oil 58 are simultaneously supplied from the nozzles 60 and 62 to the cutting position of the cutting tool 40.

More specifically, the cutting oil supply nozzle 60 is disposed on the front side (arrow Y2 side) with respect to the feed direction of the cutting tool 40, and the rust-preventive oil supply nozzle 62 is arranged in the feed direction of the cutting tool 40. It is arranged on the rear side (arrow Y1 side).
With this configuration, the cutting oil 44 is supplied to the front portion of the cutting tool 40 with respect to the processing position, so that the cutting position can be cooled and workability can be improved. Also, a rust preventive oil 5
Since 8 is supplied, it is possible to prevent oxidation from occurring in the cut portion of the cutting master 10, and it is possible to perform long-time processing while preventing oxidation of the processed surface.

Next, a fine pattern processing apparatus according to a second embodiment of the present invention will be described. FIG. 10 is an enlarged view showing a main part of a fine pattern processing apparatus 64 according to a second embodiment of the present invention, and specifically shows a feed mechanism 70 for feeding the cutting master 10 during cutting. . The feed mechanism 70 is disposed on a table 68, and roughly includes a sub-table 72, a feed table 74, a hydraulic cylinder 78, and the like. The cutting tool 40 is fixed to a chuck 66 disposed above the feed mechanism 70.

Then, the cutting master 1 is moved by the feed mechanism 70.
By sending 0 relatively to the cutting tool 40 in the direction indicated by the arrow X in the figure, a fine pattern is formed on the upper surface of the cutting master 10. FIG. 10 shows a state in which the cutting tool 40 is at a position moved upward with respect to the cutting master 10.
Hereinafter, each component of the feed mechanism 70 will be described.

The sub-table 72 is configured to fix the cutting master 10 thereon by a fixing mechanism (not shown). The sub-table 72 is configured to be able to move in the direction of the arrow X above the feed table 74. The feed table 74 is fixed to a table 68 by a fixture 75. The present embodiment is characterized in that a hydraulic cylinder 78 is used as a means for driving the sub-table 72, and a hydrostatic guide surface 76 is provided as a guide means for moving the sub-table 72 on the feed base 74. It is. The hydraulic cylinder 78 is configured to directly expand and contract the drive shaft 79 by the supplied hydraulic pressure to directly drive the sub-table 72, so that the vibration generated is reduced as compared with a conventional drive via a ball screw mechanism. be able to.

The hydraulic static pressure guide surface 76 has a pair of inclined surfaces, and has a V-shaped groove shape in which the lower portion has an angle of approximately 90 degrees. Further, a triangular projection having an inclined surface corresponding to the hydraulic static pressure guide surface 76 is formed on the sub-table 72, and the triangular projection engages with and is guided by the V-shaped groove shape. The sub-table 72 moves on the feed table 74.

Further, an oil film is provided on each inclined surface of the hydraulic static pressure guide surface 76, so that the sub-table 72 is received by the feed base 74 with the static oil pressure. Therefore, even if the hydraulic static pressure guide surface 76 is provided, the sub-table 72 can be moved to the feed plate 74 in comparison with the configuration in which the conventionally used sub-table is guided by the roller guide surface.
It is possible to suppress the occurrence of vibration when moving up.

As described above, according to the present embodiment, it is possible to suppress the occurrence of vibration when the sub-table 72 moves on the feed table 74, so that the surface of the cutting master 10 is vibrated when the fine pattern is cut. It is possible to prevent the occurrence of streaks caused by the above. Next, a fine pattern processing apparatus according to a third embodiment of the present invention will be described. FIG.
FIGS. 1 and 12 are enlarged views of a main part of a fine pattern processing apparatus according to a third embodiment of the present invention. Specifically, the vicinity of a cutting tool 40 is enlarged.

In this embodiment, the cutting position of the cutting tool 40 is determined by using the CCD camera 80 (imaging means). Also, the CCD camera 80 and the cutting master 1
A prism 82 (byte image superimposing means) is disposed between the cutting master 10 and the position 0, so that the state on the cutting master 10 is imaged by the CCD camera 80 via the prism 82.

The prism 82 is disposed so as to be substantially parallel to the cutting tool 40, and a fixed focal lens 86 is provided on an incident surface 84 formed at the lower end thereof. The image light indicating the state on the cutting master 10 is a fixed focus lens 86
The light enters the prism 82 from the incident surface 84 via the incident surface 84, passes through the prism 82, and enters the CCD camera 80.
The fixed focus lens 86 has a predetermined focal length.

The lower end of the prism 82 has an incident surface 8.
4, a reflection surface 88 is formed. The reflecting surface 88 is a surface in which the prism 82 is inclined by 45 ° with respect to the optical axis of the image light, and functions as a half mirror by forming a metal thin film on the surface, for example. The reflection surface 88 is provided so that the image of the cutting tool 40 can be captured by the CCD camera 80.

Therefore, in this embodiment, the CCD camera 80
Means that the upper surface of the cutting master 10 and the cutting tool 40 are imaged in three types. That is, an image formed by light passing through the fixed focus lens 86 indicated by an arrow a in FIG.
7A and 7B are an image based on light passing through the incident surface 84 indicated by an arrow and an image indicating the cutting tool 40 reflected by the reflecting surface 88 indicated by an arrow c.

FIG. 13 shows an image screen 94 imaged by the CCD camera 80 in this embodiment. In the example shown in the figure, the upper part of the imaging screen 94 is the reflection surface area, and the side surface of the cutting tool 40 is displayed. The lower part of the imaging screen 94 is the incident surface area, and the cutting master 1
0 is displayed. Further, a lens enlargement area by the fixed focus lens 86 is formed inside the incident surface area, and the state of the surface of the cutting master 10 is displayed in an enlarged state in the lens enlargement area. The striped pattern in the incident surface area shown in FIG. 13 is obtained by capturing the fine pattern 11a.

In this embodiment, the prism 82 can be moved in the horizontal and vertical directions by operating the prism positioning dial 90, and the tool 40 is moved to the prism 82 by the tool moving device 92. On the other hand, it is configured to be movable in the vertical direction. Note that the cutting tool 40 is configured to move integrally with the prism 82 when the prism 82 is moved in the horizontal direction.

In the fine pattern processing apparatus having the above-described structure, the tip end portion 40a of the cutting tool 40 is positioned at a predetermined cutting start position by using the cutting tool moving device 92 so as to have the same height as the height of the incident surface 84. The height of the tip portion 40a of the cutting tool 40 is determined, and the vertical position is adjusted so that the focal point of the fixed focus lens 86 is positioned on the surface of the cutting master 10.

Subsequently, while looking at the imaging screen 94, byte 4
0 in the horizontal direction together with the prism 82,
The positioning process is performed so that the zero tip portion 40a coincides with the cutting start position at which the cutting process is to be started. On this occasion,
Since the cutting tool 40 and the cutting master 10 are displayed on the same imaging screen 94, this positioning process can be easily performed.

When the positioning between the tip 40a of the cutting tool 40 and the cutting start position is completed, the cutting tool 40 is subsequently moved downward by the focal length of the fixed focus lens 86,
As a result, the cutting tool 40 comes into contact with the cutting start position in a state of being positioned with high precision (that is, a state in which cutting can be started).

[0093]

According to the present invention as described above, the following various effects can be realized. According to the first aspect of the present invention, it is possible to form a large number of nests from the same transfer mold, so that all the nests formed have the same shape and there is no machining error. In the case where an optical component is formed by using, the reproducibility of optical characteristics can be improved.

Further, when a plurality of nests are mounted on a mold to take a large number of resin-formed products, the flow balance of the resin in the cavity of the mold is made uniform, so that it is not necessary to adjust the gate balance. it can. Claim 2
According to the described invention, it is possible to form a large number of nests from the same transfer mold, so that all the nests formed have the same shape and there is no processing error, and using this nest, When an optical component is formed, the reproducibility of optical characteristics can be improved.

Further, when a plurality of nests are mounted on a mold to take a large number of resin-formed products, the flow balance of the resin in the cavity of the mold is made uniform, so that it is not necessary to adjust the gate balance. it can. Furthermore, in small-scale molding such as trial production, a thin electroformed plate can be manufactured in a short turn. According to the third aspect of the present invention, the addition of the surfactant makes it possible to supply the cutting oil deeper into the gap between the cutting tool and the cutting master in the cutting part of the cutting tool, resulting in local heat generation and wear of the cutting tool. -The occurrence of damage can be prevented.

According to the fourth aspect of the present invention, it is possible to eliminate variations in the height direction of the cutting tool, thereby preventing a change in gloss of a fine pattern.
According to the fifth aspect of the present invention, it is possible to remove irregularities on the surface by the pre-processing, thereby reducing the occurrence of damage to the cutting edge. According to the invention as set forth in claim 6, the nickel layer has a high specularity, is hard and is not easily scratched, and has a high machinability, so that the cutting tool is hardly damaged, and therefore, a machining with a very long cutting length can be performed. It becomes possible.

According to the seventh aspect of the present invention, the hardening treatment can be performed without causing stress cracking and deterioration of mirror finish. According to the invention of claim 8, it is possible to prevent the cutting master from being oxidized during the processing. Further, according to the ninth aspect of the invention, it is possible to suppress the occurrence of vibration during feeding, and thus to prevent the occurrence of streaks on the work surface.

Further, according to the tenth aspect of the present invention, the position of the cutting tool can be adjusted while displaying the position of the cutting tool and the processing position of the cutting master on the same screen. Can be performed.

[Brief description of the drawings]

FIG. 1 is a diagram for explaining a method for manufacturing a mold and a method for molding an optical component according to a first embodiment of the present invention.

FIG. 2 is a view for explaining a method of manufacturing a mold and a method of molding an optical component according to a second embodiment of the present invention.

FIG. 3 is a view for explaining a fine pattern processing method according to the first embodiment of the present invention.

FIG. 4 is a view for explaining a fine pattern processing method according to a second embodiment of the present invention.

FIG. 5 is a view for explaining a fine pattern processing method according to a third embodiment of the present invention.

FIG. 6 is a diagram for explaining an effect when a fine pattern processing method according to a fourth embodiment of the present invention is performed.

FIG. 7 is a view for explaining an effect when a fine pattern processing method according to a fifth embodiment of the present invention is performed (part 1).

FIG. 8 is a view for explaining an effect when a fine pattern processing method according to a fifth embodiment of the present invention is performed (part 2).

FIG. 9 is a view for explaining a fine pattern processing apparatus according to the first embodiment of the present invention.

FIG. 10 is a view for explaining a fine pattern processing apparatus according to a second embodiment of the present invention.

FIG. 11 is a view for explaining a fine pattern processing apparatus according to a third embodiment of the present invention.

FIG. 12 is a view for explaining a fine pattern processing apparatus according to a third embodiment of the present invention, and is a view showing a configuration near a prism arrangement position.

FIG. 13 is a view for explaining a fine pattern processing apparatus according to a third embodiment of the present invention, and is a view showing an example of an imaging screen of a CCD.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Cutting master 11 Fine pattern 15 Inversion pattern 16 Transfer type 20, 34 Nesting 22 Die 26 Optical component 28 Acrylic plate 32 Transfer master 36 Suction piping 40, 40A-40C byte 42 Cut piece 44 Cutting oil 46 Cutting edge 48 Cutting edge 50 Blade wear part 52 Smooth surface 58 Rust preventive oil 60 Cutting oil supply nozzle 62 Rust preventive oil supply nozzle 64 Fine pattern processing device 68 Table 70 Feed mechanism 72 Sub table unit 74 Feeder 76 Hydraulic static pressure guide surface 78 Hydraulic cylinder 80 CCD camera 82 Prism 84 Incident surface 86 Fixed focus lens 88 Reflective surface 90 Prism positioning dial 92 Byte moving mechanism 94 Imaging screen

Claims (10)

[Claims] 1. A method of manufacturing a mold having a nest on which a fine pattern is formed, wherein, when manufacturing the nest, first, a cutting master on which a fine pattern is formed is formed in advance, followed by a molding method Forming a transfer mold from the cutting master by using a mold, and then forming a nest from the transfer mold by using a precision casting method. 2. A method for manufacturing a mold having a nest with a fine pattern formed thereon, wherein, when manufacturing the nest, first, a cutting master on which a fine pattern is formed is formed in advance, and then a hot press is performed. A method for manufacturing a mold, comprising: forming a transfer master from the cutting master; and subsequently forming a nest from the transfer master by using an electroforming method. 3. A fine pattern processing method for forming a fine pattern using a cutting tool on a cutting master used when forming a nest, wherein a surfactant is added when the cutting master is cut by the cutting tool. A fine pattern processing method characterized by performing cutting using cutting oil. 4. A fine pattern processing method for forming a fine pattern using a cutting tool on a cutting master used for forming a nest, wherein the cutting master is cut by the cutting tool in a plane direction of the cutting tool. A method of processing a fine pattern, characterized in that the movement is allowed, and processing is performed in a state where the movement of the cutting tool in the height direction is fixed. 5. A fine pattern processing method for forming a fine pattern by using a cutting tool on a cutting master used for forming a nest, wherein a pre-processing for flattening a surface of the cutting master in a blank state is first performed by the cutting tool. A fine pattern is formed by cutting the cutting master with the cutting tool to form the fine pattern. 6. A fine pattern processing method for forming a fine pattern using a cutting tool on a cutting master used when forming a nest, wherein at least one of phosphorus and selenium is first applied to the surface of the cutting master in the blank state. A fine pattern processing method, comprising: forming an added nickel layer; and thereafter, cutting the nickel layer formed on the surface of the cutting master with the cutting tool to form the fine pattern. 7. The fine pattern processing method according to claim 6, wherein the nickel layer formed on the surface of the cutting master is cut by the cutting tool to form a fine pattern, and then the fine pattern is formed. A fine pattern processing method characterized by performing a heating process on a cutting master and subsequently performing a slow cooling process. 8. A fine pattern processing apparatus for forming a fine pattern using a cutting tool on a cutting master used when forming a nest, a cutting oil supply unit for supplying cutting oil to a cutting position of the cutting tool, A rust-preventive oil supply unit for supplying rust-preventive oil toward the cutting position of the cutting tool, wherein the cutting oil and the rust-preventing oil are simultaneously supplied to the cutting position of the cutting tool. Pattern processing equipment. 9. A feed mechanism having a table on which a cutting master used for forming a nest is mounted, and a driving device for moving the table, wherein the feeding mechanism moves the cutting master through the table. In a fine pattern processing apparatus that forms a fine pattern on the cutting master using a cutting tool while feeding, a hydraulic cylinder is used as a driving unit for moving the table, and a hydrostatic guide surface is provided on the table. A micropattern processing apparatus characterized by being provided. 10. A fine pattern processing apparatus that forms a fine pattern using a cutting tool on a cutting master used when forming a nest, wherein: an imaging unit configured to image a processing position of the cutting master; A fine pattern processing apparatus, comprising: a byte image superimposing means for superimposing a byte image on an imaging region of the imaging means; and a position adjusting means capable of moving and adjusting the bit position with respect to the image superimposing means.