JP2008175594A - Linear scale probe used for substrate inspection system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that conventional probes have required space for the arrangement of wirings and can have caused the fracture of coatings and the breakage of wires, when inspection panels are produced or due to bending and extending, when repaired since the conventional probes are wirings in a free state lead out of a casing. <P>SOLUTION: A linear scale probe is constituted of: a movable shaft having a magnetic substance movable in the casing; a primary coil opposed to the magnetic substance for generating electric fields; a secondary coil for capturing induced current by the movement of the magnetic substance; a contact part, provided with first and second electrodes for lead terminals to be electric connected to the primary coil and the secondary coil; and a housing part, provided with lead terminals to be fitted in and removed from a housing part of an external apparatus, capable of connecting to contact pins, and electrically connected to the first and second electrodes for lead terminals. The movable shafts are brought into contact with a plurality of electronic components mounted on a substrate to detect its state of mounting in the linear scale probe to be used for inspection panels of a substrate inspection system. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a linear scale probe used in a board inspection system for inspecting the mounting state of components mounted on a printed wiring board or the like.

  In recent years, in the field of manufacturing electronic devices, automation using a robot apparatus has been attempted in order to reduce work costs and increase the number of products manufactured in a short period of time. For example, automation is also achieved in mounting components on a printed wiring board or the like. In addition, electrical inspection is performed on components mounted on a printed wiring board or the like. First, an inspection jig is connected to the connection terminal of the board, and it is automatically tested according to a predetermined sequence. Based on the result, good products are selected, and defective products are returned to the production line or discarded again. Yes. However, whether the mounted parts are attached or not is confirmed by an inspection worker's direct observation or a visual inspection using a photographed image as described in Patent Document 1 for an incorrect attachment position or a missing part.

  Various systems for inspecting the mounting state of mounted components are considered. For example, a laser beam for measuring the distance may be scanned, the distance from the reflected light to the component may be calculated, and the quality may be inspected by comparing the calculated distance data with measurement data of a good product measured in advance.

A small probe that can be used for inspection is also known. As a small-sized probe, a small-sized probe is known in which a movable shaft is accommodated in an outer case, the movable shaft is brought into contact with an inspection object, and an electric signal is generated by movement of the movable shaft. For example, a micro-miniature spring-loaded LVDT (Silver Instruments & Control Ltd.) is known. The LVDT is a linear variable differential transformer.
Japanese Patent Laid-Open No. 5-249045

  The above-described ultra-small spring-loaded LVDT has a configuration in which one detector is assigned to one probe. Therefore, even if it is intended to be used for mounting component inspection that requires the use of a large number of probes, it can be used as an inspection system. Cannot be constructed because the scale of the device is large and the cost is high. Further, when high frequency power is used as the excitation power, the number of turns of the excitation coil and the detection coil can be reduced, and the cost of the probe itself can be kept low. That is, when high frequency (for example, 1 MHz) excitation power is supplied to the excitation coil, an induced current as shown in FIGS. 4 (a) and 4 (b), that is, eddy current loss, increases and is converted into heat. Therefore, each output of the detection coils 12a and 12b decreases due to eddy current loss, and may not be detected accurately. For this reason, the above-described LVDT uses a relatively low frequency band with an excitation voltage of 40 Hz to 20 KHz for the recommended alternating voltage applied to the primary winding.

  In addition, the excitation power supply line and the output signal line drawn from the LVDT casing are each one wire drawn directly from the coil. Accordingly, when a large number of probes are arranged on the inspection panel for inspecting the mounted parts, the connection operation must be performed by arranging them so as to face the connection terminals of the detector. In particular, when repair or replacement work is performed on the probe placed in the middle of the inspection panel, it is complicated and time-consuming, and requires space for wiring and downsizing. Becomes difficult.

  Further, when the power supply line and the output signal line are drawn out, the wiring hole is in a free state. Therefore, when bending and stretching is performed for a long time, a situation where the coating is broken or disconnected is assumed. In addition, when a load such as a tension is applied to these wirings during the production or repair of the inspection panel, it is also assumed that the internal wire core is disconnected even if the coating is not damaged.

  SUMMARY OF THE INVENTION The present invention provides a linear scale probe that is suitable for a board inspection system for mounted parts having a large number of inspection points, that can be easily repaired and replaced, and that realizes downsizing of an inspection unit. .

  In order to achieve the above-mentioned object, it is used for an inspection panel of a substrate inspection system that contacts a plurality of electronic components mounted on a substrate and detects the mounting state, and can be moved within the housing, with one end extending to the outside, and the like. A movable shaft provided with a magnetic body at the end, a primary coil that generates an electric field by applying excitation power to a position facing the magnetic body, and an induced current generated by the movement of the magnetic body in the electric field 2 A divided secondary coil; a first lead terminal electrode electrically connected to the primary coil; and a contact portion provided with a second lead terminal electrode electrically connected to the secondary coil; A housing provided with a lead terminal that can be connected to an internal contact pin by fitting and detaching from a housing part of an external device and is electrically connected to the first and second lead terminal electrodes of the contact part If, to provide a linear scale probe for use in a substrate inspection system comprising.

  ADVANTAGE OF THE INVENTION According to this invention, it is suitable for the board | substrate inspection system of the mounted components which has many test | inspection points, can repair easily, such as replacement | exchange, and can provide the linear scale probe which implement | achieves size reduction of a test | inspection part.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1A shows a configuration example of a linear scale probe used in the substrate inspection system. FIG.1 (b) has shown the cross-sectional structure of the AA linear scale probe in Fig.1 (a).

  The linear scale probe 1 has a cylindrical probe case 2 as an exterior, and a movable shaft 3 that can move in the probe case 2 in the longitudinal direction (or the generatrix direction) and has one end (tip) extending outside. A magnetic body 4 made of ferrite or the like attached to the other end (rear end portion) side of the movable shaft 3 in the probe case 2, a spring guide 5 attached to the rear end portion of the movable shaft 3, and a movable shaft 3 is formed with a spring 6 attached to the rear end of 3, a head portion 7 provided at the tip of the movable shaft 3, and a hole through which the movable shaft 3 is movably penetrated by sealing the tip side of the probe case 2. A flange 8, a fixed bush 9 that seals the rear end side of the probe case 2 to open a wiring hole, and a protrusion provided in the probe case 2 that fits into a groove provided in the fixed bush 9. The fixed part 10 of the shape and the normal position An exciting coil 11 which is a primary winding facing the substantially central portion of the magnetic body 4 and is mounted on the inner peripheral surface of the probe case 2, and extends from both ends of the opposing magnetic body 4 disposed on both sides of the exciting coil 11. It comprises detection coils 12a and 12b that are secondary windings of a length that does not come out.

  The movable shaft 3 of the present embodiment has a cylindrical shape with a diameter of about 2 mm, and the probe case 2 has a cylindrical shape with a diameter of about 3 mm. The length of the probe case 2 (bus length) is about 40 and several mm, the movable shaft 3 is about 30 and several mm, and the length of the shaft extending to the outside is about 10 and several mm. Including the length of the shaft extending to the outside of the movable shaft 3, it is about 60 mm or so. Of course, it is not limited to this dimension, and is appropriately changed according to the design and specifications depending on the measurement object.

  The movable shaft 3 and the probe case 2 are preferably made of metal, and from the viewpoint of rigidity, for example, steel materials such as brass, stainless steel material, titanium material, or alloys thereof are preferred. Moreover, if the size is slightly larger depending on the application, aluminum or an aluminum alloy can be used. Further, the metal material may be a single material, a combination of a plurality of metal materials, or a layer structure of different metals. Also, magnetic metal, iron, nickel, chromium metal or the like is not suitable for this embodiment.

  The magnetic body 4 has a cylindrical shape, is fitted around the rear end of the movable shaft 3, and is fixed with an adhesive or the like. Of course, the magnetic body 4 may have a plurality of cylindrical shapes, for example, a shape divided into two in the generatrix direction, and may be attached and fixed so as to surround the movable shaft 3. The length of the magnetic body 4 in the generatrix direction is appropriately set according to the moving distance of the movable shaft 3.

  The spring guide 5 is disposed in the spring 6 and prevents the movable shaft 3 from colliding with the fixed bushing 9 when the movable shaft 3 is retracted and the spring 6 is contracted. Functions as a stopper to prevent damage. The head unit 7 is a member that comes into contact with an inspection object (for example, an electronic component) at the time of detection, and the size and length of the head part 7 can be appropriately selected and attached depending on the inspection object. However, the size and weight of the head portion 7 are limited, and as shown in FIG. 2, the position where the side surface of the magnetic body 4 and the exciting coil 11 and the detection coils 12a and 12b face each other is not maintained. Must not. For example, if a slight displacement occurs when the head portion of the linear scale probe 1 is mounted vertically downward, the position may be corrected by replacing the spring constant with a spring coil. it can. The movable range of the movable shaft 3 is fixed by the internal structure.

  Since the collar portion 8 becomes a fixed portion when it is inserted into and mounted on a resin inspection panel, which will be described later, the strength is required to maintain a fixed state, such as a hard member such as stainless steel or titanium. It is made of metal material or hard resin material. Of course, a plurality of members may be combined, and a two-layer structure in which a resin material is used for a disk-shaped portion in contact with the movable shaft 3 and covered with a thin metal plate as an exterior may be used.

  The fixed bush 9 is made of, for example, a resin material, and at least one wiring hole is opened, and the power supply line 14 connected to the excitation coil 11 and the output signal line 13 connected to the detection coils 12a and 12b pass therethrough. To the output terminal 15. The power supply line 14 and the output signal line 13 are connected to the system side, and high frequency power is supplied from the AC power supply 16 through the power supply line 14 to the exciting coil 11 of the primary coil, and the detected coils 12a and 12b of the detected secondary coil. The output (output voltage) is sent to the detection unit described later through the output terminal 15.

Next, an inspection object detection method using the excitation coil 11 and the detection coils 12a and 12b will be described.
As shown in FIG. 2, the linear scale probe 1 of the present embodiment generates a magnetic field by applying a high-frequency sine wave AC voltage (current) of about 1 MHz to an excitation coil disposed at a substantially central portion of the magnetic body 4. Let As shown in FIG. 2, when the magnetic body 4 is not in direct contact with the detection coils 12a and 12b, the outputs of the detection coils 12a and 12b are balanced, and the movable shaft position “ 0 ”(reference position where the vehicle stops during normal operation) and the voltage difference becomes“ 0 ”.

  When the linear scale probe 1 is further pressed to a fixed position after the distal end portion of the movable shaft 3 abuts on the inspection object, the movable shaft 3 moves backward toward the probe case 2 while being urged by the spring 6. Along with this movement, the magnetic body 4 is moved so as not to face the detection coil 12a, and is kept facing the detection coil 12b. Due to the movement of the facing position, an induced current is generated in the detection coils 12a and 12b. However, the left and right balance is uneven in the outputs of the detection coils 12a and 12b, and is generated as an output voltage according to the deviation. When the magnetic body 4 moves backward (dotted line portion in FIG. 2), the output of the detection coil 12a decreases and the detection coil 12b maintains the output. Therefore, it moves to the arrow side shown in FIG. 3, and an output voltage (V) is generated. Note that the characteristic curves of the amplitude output and the phase output shown in FIG. 3 show the characteristics, respectively, and the value of the output voltage is not described at the same level.

  Further, for example, when the movable shaft 3 moves from the front end portion to the rear end portion of the probe case 2, roughly three states are generated and linearly fluctuate. First, the magnetic body 4 is opposed to the detection coil 12a, moved from a position away from the detection coil 12b to a position opposed to the detection coil 12b, and is further away from the detection coil 12a and is opposed to the detection coil 12b. Move to the directly facing position. In the amplitude output characteristic shown in FIG. 3, the output voltage becomes the minimum value at the movable axis position “0”, and the output value is switched from the high level to the low level in the phase output. In the amplitude output characteristic, since a voltage value corresponding to the amount of movement of the movable shaft 3 is output, the movement distance of the tip of the movable shaft 3 can be calculated from the detected voltage value.

Next, the slit provided in the probe case 2 of the linear scale probe 1 will be described.
Excitation power of high frequency (for example, 1 MHz) is applied to the excitation coil 11 of the present embodiment through the power supply line 14. This is because when the high frequency power is used as the excitation power, the number of turns of the excitation coil and the detection coil can be reduced, and the cost of the probe itself can be kept low.

  However, when high frequency power is used as the excitation power, an induced current as shown in FIGS. 4 (a) and 4 (b), that is, eddy current loss, increases and is converted into heat. Therefore, the detected outputs of the detection coils 12a and 12b may be reduced due to eddy current loss and may not be detected accurately. In the conventional small probe (LVDT) described above, in order to avoid such a situation, the AC voltage applied to the primary winding uses a relatively low frequency band in the excitation frequency range of 40 Hz to 20 KHz.

  Therefore, in this embodiment, as shown in FIGS. 4C and 4D, a slit 21 (insulation region by space) is provided for the current path of the eddy current to block the current path of the eddy current. To do. When this slit is applied to the linear scale probe 1, as shown in FIGS. 5A and 5B, in the probe case 2, at least one slit 21 is provided in the direction of the bus. In the present embodiment, two slits 21 are provided at opposing positions. The length of the slits 21 preferably covers the range in which the magnetic body 4 moves, and is at least a range that covers the excitation coil 11 and the detection coils 12a and 12b. The width of the slit 21 may be any width as long as the eddy current path can be cut off, and may be appropriately set based on the actual design.

Further, such a slit 21 is formed longer in the generatrix direction of the probe case 2 and the strength of the probe case 2 decreases as the number of slits increases.
Therefore, as shown in FIG. 6, a slit 22 that is longitudinally cut in the generatrix direction of the probe case 2 is provided, and a coupling spacer 23 is sandwiched between both ends of the slit and fixed with an adhesive. This is a structure in which both ends of the slit are connected by the connecting spacer 23 and the strength is not lowered. The connecting spacer 23 is formed of an insulator. For example, hard resin (insulating), hard rubber (insulating), oxidized metal thin plate such as alumina, and the like are conceivable.

  As described above, by providing the slit that cuts off the current path, the eddy current loss can be reduced and the excitation AC power in the high frequency band can be applied to the excitation coil that is the primary winding. Therefore, the number of turns of the excitation coil and the detection coil can be reduced, and the cost of the probe itself can be kept low.

  Next, a configuration example of the contact portion provided in the linear scale probe 1 will be described. 7A is a conceptual diagram of the configuration as viewed from the front of the contact portion, FIG. 7B is a conceptual diagram of the configuration as viewed from the side of the contact portion, and FIG. 7C is the housing portion side of the contact portion. It is a conceptual diagram of the structure seen from.

  In FIG. 1 described above, the power supply line 14 connected to the exciting coil 11, the output signal line 13 connected to the detection coils 12 a and 12 b, and the wiring hole of the fixed bush 9 are drawn to the outside. However, in an actual product, when the power supply line 14 and the output signal line 13 are drawn out, the wiring hole is free, so that the coating breaks or breaks when bent over for a long time. A situation is assumed. Furthermore, when a load such as a tension is applied to these wirings during the manufacture and use of an inspection panel, which will be described later, an internal wire core may be disconnected even if the coating is not damaged.

In the present embodiment, a contact portion 30 is provided at the rear end of the linear scale probe 1.
The contact part 30 includes a hard printed wiring board (hereinafter referred to as a board) 31, a cap part 35, and a housing part 36. A plurality of lead terminal electrodes and wiring electrodes are formed on the front and back main surfaces of the substrate 31. As shown in FIG. 7A, the substrate 31 of the present embodiment has two long lead terminal electrodes 32 (32a to 33d) formed on the front and back main surfaces, and the other end of the front main surface. Six wiring electrodes 33 (33a to 33f) are provided.

  In the wiring electrodes 33, if the coil configuration shown in FIG. 1 is used, the two wiring electrodes 33a and 33b are short-circuited and connected to one end of the detection coils 12a and 12b by soldering. The The wiring electrodes 33c and 33d are connected to the other ends of the detection coils 12a and 12b by soldering, and the wiring electrodes 33e and 33f are connected to the exciting coil 11 by soldering. The wiring electrodes 33 a and 33 b are connected to the lead terminal electrodes 32 a and 32 b by the pattern wiring 40 on the front main surface. The wiring electrodes 33c and 33d are connected to the lead terminal electrodes 32c and 32d on the back main surface by the pattern wiring 41 through via holes. The substrate 31 is fitted into the cap portion 35 from the lead terminal electrode 32 side after the soldering is completed, and resin is embedded and fixed so that the wiring electrode 33 is buried in the cap portion. Thereafter, the lead terminals 37 of the housing portion 36 are in contact with and electrically connected to the lead terminal electrodes 32 on both sides. As the connection method, the lead terminal 37 may be elastic so that the electrical connection state is maintained and fixed by the elastic force, or a separate elastic member is provided to maintain and fix the connection state. May be. Further, as a method of reliably maintaining the connection state, the lead terminal 37 may be fixed to the lead terminal electrode 32 by the connecting portion 42 by soldering.

  The housing portion on the system side is fitted to the housing portion configured as described above, high-frequency excitation power is applied to the excitation coil 11, and the detection signals are read from the detection coils 12a and 12b, respectively.

  In addition, the diameter of the cap part 35 and the width | variety of the board | substrate 31 are smaller in diameter than the diameter (phi) 3 mm of the probe case 2 mentioned above in principle. This is because the contact portion 30 is inserted into a mounting hole opened in an inspection panel, which will be described later, and is fixed by the collar portion 8.

  As described above, by providing a contact portion at the rear end of the linear scale probe, when producing an inspection panel or the like using this probe, electrical connection can be easily performed simply by fitting the housing portion. Further, since the power supply line 14 and the output signal line 13 are not exposed to the outside, disconnection due to bending or stretching or a load during assembly is eliminated.

Next, a substrate inspection system using the linear scale probe 1 will be described.
The board inspection system of the present embodiment is a system that inspects whether or not all electronic components are mounted and whether or not the mounting posture is good by performing a single inspection using an inspection panel on a printed wiring board on which a large number of electronic components are mounted. It is.

  FIG. 8 is a block diagram of the substrate inspection system. This substrate inspection system includes an inspection panel 51 in which a plurality of linear scale probes 1 are fitted, and application of high-frequency power and propagation of a detection signal (output voltage) to these linear scale probes 1, respectively. For example, an interface (IF) unit 52 including a multiplexer, a power source unit 53 that generates high-frequency power to be applied to the linear scale probe 1, and a detection unit that receives a detection signal from each linear scale probe 1 and generates an output voltage 54, a determination unit 55 that determines the presence / absence of mounting in all the electronic components and the quality of the mounting posture based on the output signal, and a control unit 56 that performs control of the entire system such as determination criterion setting in the determination unit 55 and an operation instruction An input unit 5 including an operation panel such as a keyboard and a touch panel for inputting instructions by the examiner When the determination result to the display unit 58 and having, for example, a liquid crystal display screen for displaying an input instruction or the like, and a sound unit 59 which performs notification by the input or voice by voice.

  FIGS. 9A and 9B are views showing the state of the inspection panel 51 in which the linear scale probe 1 is inserted. The linear scale probe 1 is inserted into the fixing hole 65 opened in the inspection panel 51 from the contact portion 30 side, and is pushed into the collar portion 8 to be inserted. Next, the system-side housing portion 36 is inserted into the contact portion 30.

  In this way, the linear scale probe 1 can be easily produced simply by being inserted into the inspection panel 51. Accordingly, when a large number of linear scale probes 1 are arranged on the inspection panel for mounting component inspection, connection with the detection unit 54 becomes easy.

  Further, as shown in FIG. 9 (a), a U-shaped cut portion is put in a part of the probe case 2 of the linear scale probe 1, and the tip portion of the cut portion is protruded and inserted. A stopper that functions as a fixing reinforcement and a drop-off prevention may be formed. Further, as shown in FIG. 9B, for example, among electronic components, there are a large number of lead terminals such as the CPU 68, and for an electronic component having a large mounting area, for example, the linear scale probe 1 is provided at four corners. Deploy. With such an arrangement, it is possible to inspect not only the presence / absence of mounting, but also the mounting posture, for example, whether or not the mounting posture is inclined.

Here, FIGS. 10A and 10B show and explain a first example of an inspection panel in which the linear scale probe 1 is fitted.
As shown in FIG. 10A, the electronic component group 72 mounted on the substrate 71 has not only different mounting areas but also different heights. For example, capacitors and the like are relatively high, but CPUs and the like are low. Therefore, when using the linear scale probe 1 of the movable shaft having the same stroke length, it is necessary to attach the spacer 73 for height adjustment to the inspection panel 51 so as to adapt to the mounted components. For example, as shown in FIG. 10A, spacers 73 having different thicknesses are attached to the inspection panel 51, a fixing hole is opened at the probe placement position, and the linear scale probe 1 is inserted.

  As described above, by attaching a spacer in accordance with the height of the electronic component to be inspected to the flat inspection panel 51, a highly flexible inspection panel that can be applied to any mounting board can be manufactured. .

  Further, when a large number of linear scale probes 1 are arranged on an inspection panel for inspecting a mounted component, connection with a detector becomes easy. In particular, the inspection panel can be easily removed from the apparatus even when repair or replacement work is performed on the linear scale probe 1 arranged in the middle of the inspection panel. Furthermore, the space for wiring from the linear scale probe 1 required for the repair work is eliminated, and the miniaturization is facilitated.

  Although the number of linear scale probes 1 or the number of probes that can be detected by the inspection unit 54 (the number of housing units) is limited, the inspection unit 54 is replaced with an inspection panel of another specification, and the programs of the detection unit 54 and the control unit 56 are rewritten. Therefore, it is possible to easily cope with mounting boards having different component arrangements in a short time and efficiently.

  Further, since the power supply line and the output signal line are not drawn out in a free state, the disconnection due to crossing and stretching is eliminated. In particular, the coating breakage or the wire core is not broken due to a load such as pulling during the production or repair of the inspection panel.

FIG. 1A is a diagram showing a configuration example of a linear scale probe used in the substrate inspection system, and FIG. 1B is a diagram showing a cross-sectional configuration of the AA linear scale probe in FIG. . It is a figure for demonstrating the positional relationship between the magnetic body in a linear scale probe, an exciting coil, and a detection coil, and the voltage which generate | occur | produces. It is a figure for demonstrating the position of a movable axis | shaft, an amplitude output, and a phase output. It is a figure for demonstrating the relationship between an eddy current and a slit. It is a figure which shows the structural example of the linear scale probe provided with the slit. It is a figure which shows the structural example of the linear scale probe provided with the slit in which a connection spacer is pinched | interposed. FIGS. 7A to 7C are diagrams illustrating a configuration example of the contact portion provided in the linear scale probe. It is a figure which shows the block configuration of a board | substrate inspection system as embodiment. FIGS. 9A and 9B are diagrams showing an inspection panel in which a linear scale probe is inserted. FIGS. 10A and 10B are diagrams illustrating a configuration example of an inspection panel in which a linear scale probe is fitted.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Linear scale probe, 2 ... Probe case, 3 ... Moving shaft, 4 ... Magnetic body, 5 ... Spring guide, 6 ... Spring, 7 ... Head part, 8 ... Collar part, 9 ... Fixed bush, 10 ... Fixed part, DESCRIPTION OF SYMBOLS 11 ... Excitation coil, 12a, 12b ... Detection coil, 30 ... Contact part, 36 ... Housing part, 51 ... Inspection panel, 52 ... IF part (multiplexer), 53 ... Power supply part, 54 ... Inspection part, 55 ... Determination part, 56: Control unit, 57, 85, 87 ... Input unit, 58, 84, 86 ... Display unit, 59 ... Audio unit, 61 ... Lifting mechanism, 62 ... Inspection table, 65 ... Fixed hole.

Claims (2)

Used for an inspection panel of a substrate inspection system that contacts a plurality of electronic components mounted on a substrate and detects the mounting state,
A movable shaft that is movable within the housing and has one end extending to the outside and a magnetic body provided at the other end;
A primary coil that generates an electric field by applying excitation power to a position facing the magnetic body;
A secondary coil divided into two to capture an induced current generated by the movement of the magnetic body in the electric field;
A first lead terminal electrode electrically connected to the primary coil, and a contact portion provided with a second lead terminal electrode electrically connected to the secondary coil;
A housing part provided with a lead terminal that can be fitted to and detached from a housing part of an external device and can be connected to an internal contact pin and electrically connected to the first and second lead terminal electrodes of the contact part;
A linear scale probe used in a substrate inspection system, comprising:   The width of the contact of the linear scale probe is formed to be narrower than the diameter of the casing, and is inserted into a mounting hole opened in the inspection panel from the contact side and fixed to the inspection panel. The linear scale probe used for the board | substrate inspection system of Claim 1 characterized by the above-mentioned.

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