JP2008170400A - Inspection device, control method therefor, and inspection device control program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device or the like not required to change a reference for quality determination, even when changing an operation condition. <P>SOLUTION: An inspection part 34 of this inspection device for inspecting a rotor is provided with a sensor information acquisition part 33 for acquiring a vibration signal from an objective device including the rotor of an inspection object, an objective period pulse generation part 42 for acquiring an objective period pulse generated in every one rotation of a reference position in the rotor, a frame extraction part 45 for extracting, as frames, the vibration signals in a period of acquiring the objective period pulses of prescribed number, out of the vibration signals, and a representative feature amount calculation part 49 for calculating a representative feature amount, using the plurality of frames, to determine quality. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an inspection apparatus that inspects a rotating body, a control method thereof, and an inspection apparatus control program.

For example, in a product inspection of a device called a rotating body such as an engine or a transmission, the quality is determined based on vibrations generated when the product is operated. Conventionally, this pass / fail determination is performed by an inspector listening to the vibration sound or touching the device. However, in this case, since the above pass / fail judgment is performed by the sensory evaluation of the inspector, it is difficult to quantify the judgment criteria, and it is difficult to show logical validity. Therefore, recently, an inspection apparatus has been developed that detects the vibration with a sensor and automatically performs the quality determination based on the detected signal (see, for example, Patent Documents 1 to 5).
JP-A-8-43257 (published February 16, 1996) JP 2001-21455 A (published January 26, 2001) Japanese Patent Laid-Open No. 2001-221683 (released on August 17, 2001) Japanese Utility Model Publication No. 63-90128 (published on June 11, 1988) JP-A-61-66140 (published on April 4, 1986)

  Most of the characteristics of defects desired to be detected in the inspection of the rotating body can be detected under stable operating conditions, for example, the rotation speed (rotation speed) is constant. However, there are some that need to be detected by changing the operating conditions, such as order tracking analysis. In order to detect such a characteristic, in the conventional inspection apparatus, the criterion for pass / fail judgment is changed according to the change in the operating condition.

  However, in this case, since it is premised on detecting a defective characteristic under a stable operating condition, it is not possible to use an existing inspection apparatus that cannot change the criteria for the quality determination.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide an inspection apparatus and the like that do not require a change in pass / fail judgment criteria even when operating conditions are changed.

  An inspection apparatus according to the present invention is an inspection apparatus that inspects a rotating body, and in order to solve the above problem, a vibration signal acquisition unit that acquires a vibration signal from a target apparatus including the rotating body to be inspected; A target period pulse acquiring means for acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation, and a vibration signal for a period of acquiring a predetermined number of the target period pulses among the vibration signals. An extraction means for extracting as a frame and an inspection means for performing the inspection using a plurality of the frames are provided.

  The inspection apparatus control method according to the present invention is an inspection apparatus control method for inspecting a rotating body, and in order to solve the above problems, a vibration signal from an object apparatus including the rotating body to be inspected. A vibration signal acquisition step for acquiring a target period pulse for acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation, and a predetermined number of the target period pulses among the vibration signals. The method includes an extraction step of extracting a vibration signal during a period of acquiring the signal as a frame, and an inspection step of performing the inspection using a plurality of the frames.

  According to the above-described configuration and method, the vibration signal is extracted in units of pulse of the target periodic pulse. Therefore, each of the plurality of extracted frames is generated while the rotating body to be inspected rotates a predetermined number of times. Contains vibration components. Therefore, by using these frames, it is possible to inspect with the same criterion.

  By the way, normally, when the rotational speed of the rotating body increases, the amplitude of the generated vibration also increases. For this reason, even if the extracted waveform of each frame is similar, the magnitude of the amplitude may be significantly different.

  Therefore, the inspection apparatus according to the present invention further includes normalization means for normalizing the frame, and the inspection means preferably performs the inspection using a plurality of normalized frames. By normalizing, for example, the magnitudes of the amplitudes can be made uniform, so that the inspection can be performed with higher accuracy based on the same criterion.

  By the way, depending on the apparatus to be inspected, the rotation of the rotating body to be inspected cannot be detected, but the rotation of another rotating body may be detected.

  Therefore, in the inspection apparatus according to the present invention, the target device includes a plurality of rotating bodies, and among the plurality of rotating bodies, a reference rotation pulse generated corresponding to the rotation of a reference rotating body is generated. Reference rotation pulse acquisition means for acquiring is further provided, and the target period pulse acquisition means uses the rotation ratio between the reference rotating body and the rotating object to be inspected, to calculate the target period from the reference rotation pulse. Pulses may be generated. In this case, even if the rotation of the rotating body to be inspected cannot be detected, the target periodic pulse can be acquired by detecting the rotation of another rotating body. Here, the rotation ratio refers to the number of rotations that the rotating body to be inspected rotates while the reference rotating body rotates once.

  In the inspection apparatus according to the present invention, a phase range acquisition means for acquiring a phase range indicated by a phase from the reference position at and around the position where the vibration to be inspected occurs in the rotating body, and the vibration signal Among these, it is preferable to further include a filter unit that allows only the vibration signal in the section corresponding to the phase range to pass.

  According to the above configuration, since the position where the vibration to be inspected occurs and its surroundings are indicated by the phase from the reference position, even if the period of the target period pulse changes, the period corresponds to the phase range. The vibration signal of the section includes a vibration component to be inspected. Therefore, the inspection can be performed with higher accuracy by passing the vibration signal including the vibration component to be inspected and blocking the other vibration signals.

  An inspection apparatus according to the present invention is an inspection apparatus that inspects a rotating body, and in order to solve the above problem, a vibration signal acquisition unit that acquires a vibration signal from a target apparatus including the rotating body to be inspected; , A target periodic pulse acquisition means for acquiring a target periodic pulse generated every time the reference position of the rotating body makes one rotation, and a position where the vibration to be inspected occurs in the rotating body and its surroundings. A phase range acquisition means for acquiring a phase range indicated by a phase from a filter means, a filter means for passing only a vibration signal in a section corresponding to the phase range in the period of the target periodic pulse, among the vibration signals, and the filter And inspection means for performing the inspection using the vibration signal passed by the means.

  The inspection apparatus control method according to the present invention is an inspection apparatus control method for inspecting a rotating body, and in order to solve the above problems, a vibration signal from an object apparatus including the rotating body to be inspected. A vibration signal acquiring step for acquiring the target periodic pulse, a target periodic pulse acquiring step for acquiring a target periodic pulse generated every time the reference position of the rotating body makes one rotation, and a position where vibration to be inspected occurs in the rotating body A phase range acquisition step of acquiring a phase range indicated by a phase from the reference position and the periphery thereof, and only a vibration signal in a section corresponding to the phase range in the period of the target periodic pulse among the vibration signals. It includes a filter step for passing, and an inspection step for performing the inspection using the vibration signal passed through the filter step.

  According to the configuration and method described above, the position where the vibration to be inspected occurs and its surroundings are indicated by the phase from the reference position. Therefore, even if the period of the target period pulse changes, the position is within the phase range. The vibration signal in the corresponding section includes a vibration component to be inspected. Therefore, even if the operating conditions change, it is possible to inspect with the same criterion by passing only the vibration signal including the vibration component to be inspected.

  In addition, each means in the said inspection apparatus can be functioned on a computer by an inspection apparatus control program. Furthermore, the inspection apparatus control program can be executed on an arbitrary computer by storing the inspection apparatus control program in a computer-readable recording medium.

  As described above, in the inspection apparatus according to the present invention, the vibration signal is extracted in units of pulse of the target periodic pulse. Therefore, the rotating body to be inspected rotates a predetermined number of times in each of the extracted frames. The vibration component generated during the operation is included, and by using these frames, it is possible to inspect with the same criterion.

  Further, in the inspection apparatus according to the present invention, the position where the vibration to be inspected occurs and its periphery are indicated by the phase from the reference position, so even if the period of the target period pulse changes, the phase in the period The vibration signal of the section corresponding to the range includes the vibration component to be inspected, and as a result, only the vibration signal including the vibration component to be inspected is allowed to pass even if the operating condition changes. Thus, there is an effect that inspection can be performed with the same criterion.

  An embodiment of the present invention will be described with reference to FIGS. FIG. 2 shows a schematic configuration of the inspection system of the present embodiment. The inspection system 10 performs inspection (good / bad determination) of the product 11 using vibration generated when the product 11 having a rotating body such as an engine is operated.

  The vibration of the product 11 is detected by the vibration sensors 12 and 13, and time series data of the detected vibration (hereinafter abbreviated as “vibration data”) is transmitted to the inspection device 14. Further, the operation state of the product 11 is detected by the operation state detection sensor 15, and the detection result is transmitted to the operation control device 16 as operation state data. The operation control device 16 drives and controls the product 11 based on the received operation state data, and transmits the operation state data to the inspection device 14.

  The inspection device 14 calculates the vibration feature value using the vibration data received from the vibration sensors 12 and 13 and the inspection parameter set by the inspector 17, and the quality of the product 11 is determined based on the calculated feature value. Make a decision.

  In the present embodiment, the inspection device 14 uses the operation state data received from the operation control device 16 and the structure information of the product 11 input from the outside by the inspector 17 or the like to calculate the vibration feature value. Corrections are made so that they do not depend on the condition. FIG. 3 shows the time variation of the rotational speed indicating the operating state of the product 11 and the vibration feature value corrected by the inspection device 14 (hereinafter referred to as “correction feature value”) in the inspection system 10 of the present embodiment. The change with time is shown conceptually. The alternate long and short dash line in FIG. FIG. 23 is a comparative example of FIG. 3. In the conventional inspection system, FIG. 23 conceptually shows the time variation of the rotational speed indicating the operation state of the product and the time variation of the vibration feature value calculated by the inspection device. Show.

  Here, examples of the feature amount include an average value, standard deviation, maximum value, peak value, bottom value, waveform rate, impact index, crest factor, skewness, and kurtosis of vibration data.

  As shown in FIG. 23, in the conventional inspection system, the feature amount also changes in accordance with the change in the rotation speed. For this reason, it is necessary to change the pass / fail judgment criteria in accordance with the change in the rotational speed. On the other hand, in the inspection system 10 of this embodiment, as shown in FIG. 3, it can be understood that the correction feature quantity does not change even if the rotation speed changes. Therefore, even if the operating state changes, it is not necessary to change the quality criterion.

  Next, details of the inspection apparatus 14 will be described with reference to FIG. FIG. 4 shows a schematic configuration of the inspection apparatus 14. As illustrated, the inspection apparatus 14 includes a control unit 21, a storage unit 22, a reception unit 23, an input unit 24, and a display unit 25.

  The control unit 21 comprehensively controls the operation of each unit in the inspection apparatus 14, and is configured by, for example, a PC-based computer. And operation control of each part is performed by making a computer run a control program. The storage unit 22 stores various types of information, and is configured by a nonvolatile recording medium such as a hard disk device. Details of the control unit 21 and the storage unit 22 will be described later.

  The receiving unit 23 receives a signal from the outside, and transmits the received signal to the control unit 21. Specifically, the receiving unit 23 receives vibration data from the vibration sensors 12 and 13 and also receives driving state data from the driving control device 16. The receiving unit 23 may receive the signal by wire or wirelessly.

  The input unit 24 receives an instruction input, information input, and the like from the inspector 17 and includes, for example, a key input device such as a keyboard and buttons, and a pointing device such as a mouse. In addition to the input unit 24 or in place of the input unit 24, it is recorded on a scanner device that reads printed information, a reception device that receives a signal via a wireless or wired transmission medium, or a recording medium inside or outside the apparatus. The input of information from the outside may be received using a playback device for playing back the recorded data.

  The display unit 25 displays information based on an instruction from the control unit 21, and includes a display device such as an LCD (Liquid Crystal Display), a PDP (Plasma Display Panel), or a CRT (Cathode Ray Tube). The Data is recorded on the print output device for printing information on a print medium such as paper, the transmission device for transmitting a signal via the transmission medium, and the recording medium together with the display unit 25 or instead of the display unit 25. Information may be output to the outside using a recording device or the like.

  Next, details of the control unit 21 and the storage unit 22 will be described. As shown in FIG. 4, the control unit 21 includes a structure information acquisition unit 31, an inspection parameter acquisition unit 32, a sensor information acquisition unit 33, an inspection unit 34, and an inspection result display control unit 35. The storage unit 22 stores structure information 36 and inspection parameters 37.

  The structure information acquisition unit 31 acquires the structure information of the product 11 from the inspector 17 through the input unit 24 and stores the acquired structure information in the storage unit 22. In the present embodiment, the structure information 36 of the product 11 is referred to as a rotating body to be inspected (hereinafter referred to as “target rotating body”) for one rotation of a rotating body serving as a reference (hereinafter referred to as “reference rotating body”). ) To indicate the rotation ratio, the tooth structure indicating the tooth structure provided in the reference rotator to detect the operating state, and the position where the defect factor occurs from the reference position in the target rotator And a phase shift indicating the angle up to. Here, when the product 11 is an internal combustion engine, a camshaft can be cited as an example of the reference rotating body.

  The inspection parameter acquisition unit 32 acquires inspection parameters, which are various parameters used for inspection, from the inspector 17 via the input unit 24, and stores the acquired inspection parameters in the storage unit 22. To do. In the present embodiment, the type of weighting function, the width of the phase filter section, the number of rotations of the pulse signal per frame, the number of rotations of the pulse signal indicating the frame shift, and the necessity of normalization are used as the inspection parameters 37. Use no.

  The sensor information acquisition unit 33 acquires sensor information from the sensor via the reception unit 23, and performs predetermined processing such as amplification and shaping on the acquired sensor information. In the present embodiment, vibration data from the vibration sensors 12 and 13 and driving state data from the driving state detection sensor 15 through the driving control device 16 are acquired as the sensor information. The sensor information acquisition unit 33 sends the acquired and processed sensor information to the inspection unit 34.

  The inspection unit 34 inspects the target rotating body using the sensor information received from the sensor information acquisition unit 33, the structure information 36 and the inspection parameters 37 stored in the storage unit 22. The inspection unit 34 sends the inspection result to the inspection result display control unit 35. The inspection result display control unit 35 controls the display unit 25 so as to display the inspection result from the inspection unit 34.

  Next, the detail of the test | inspection part 34 is demonstrated with reference to FIG. 1 and FIG. FIG. 1 shows a schematic configuration of the inspection unit 34. As illustrated, the inspection unit 34 includes a frequency filter unit 41, a target periodic pulse generation unit 42, a phase filter waveform generation unit 43, a phase filter unit 44, a frame extraction unit 45, a normalization unit 46, and a periodicity enhancement unit 47. The frame feature amount calculation unit 48 and the representative feature amount calculation unit 49 are provided.

  FIG. 5 shows the flow of the inspection process in the inspection unit 34 having the above-described configuration. As shown in the figure, in the inspection step, the frequency filter unit 41 performs frequency filter processing on the vibration data acquired from the sensor information acquisition unit 33 (step S11. Hereinafter, it may be simply referred to as “S11”. The same applies to the steps.), The phase filter unit 44 executes the phase filter process (S12), the frame extraction unit 45 executes the frame extraction process (S13), and the periodicity enhancing unit 47 sets the periodicity. The emphasis process (S14) is executed, the frame feature quantity calculation unit 48 executes the frame feature quantity calculation process (S15), and the representative feature quantity calculation unit 49 executes the representative feature quantity calculation process (S16). One representative feature amount serving as a determination index is calculated.

  The frequency filter unit 41 acquires the vibration data detected by the vibration sensors 12 and 13 from the sensor information acquisition unit 33, and among the acquired vibration data, is specific to the vibration to be inspected (hereinafter referred to as “target vibration”). In the other frequency band is allowed to pass, and the other band is cut off. As a result, vibration components other than the inspection target can be removed to some extent from the vibration data. The frequency filter unit 41 sends the processed vibration data to the phase filter unit 44.

  The target period pulse generation unit 42 generates a target period pulse that is a pulse generated corresponding to one rotation period of the target rotating body. The target periodic pulse is generated using the operation state data acquired by the sensor information acquisition unit 33, the structure information 36 and the inspection parameter 37 stored in the storage unit 22. The target period pulse generation unit 42 sends the generated target period pulse to the phase filter waveform generation unit 43 and the frame extraction unit 45. Note that the target period pulse generation unit 42 may generate the generation time of the target period pulse instead of generating the target period pulse.

  The phase filter waveform generation unit 43 specifies the phase from the reference position to the target vibration generation position in the target rotating body, and generates waveform data for passing vibration data of a predetermined section including the specified phase. is there. This waveform data is generated using the target period pulse generated by the target period pulse generation unit 42, the structure information 36 and the inspection parameter 37 stored in the storage unit 22. The phase filter waveform generation unit 43 sends the generated phase filter waveform data to the phase filter unit 44.

  The phase filter unit 44 uses the waveform data from the phase filter waveform generation unit 43 to pass vibration data from the frequency filter unit 41 in the predetermined section. As a result, vibration components other than the inspection target can be reliably removed from the vibration data. The phase filter unit 44 transmits the processed vibration data to the frame extraction unit 45 as filtered data.

  The frame extraction unit 45 extracts a frame that is a subset of the filtered data from the filtered data from the phase filter unit 44 in synchronization with the rotation of the target rotating body. The frame is cut out using the target period pulse from the target period pulse generation unit 42 and the inspection parameter 37 stored in the storage unit 22. The frame extraction unit 45 sends the cut frame to the normalization unit 46.

  The normalization unit 46 normalizes the filtered data of the frame from the frame extraction unit 45. The normalization unit 46 sends the normalized frame to the periodicity enhancement unit 47. Note that the normalization can be omitted. The necessity for normalization is included in the inspection parameter 37.

  The periodic emphasis unit 47 emphasizes a component having periodicity with respect to the filtered data of the frame from the normalization unit 46. The periodic emphasis unit 47 sends the emphasized frame to the frame feature amount calculation unit 48. The periodic component is emphasized when the characteristics of the filtered data are not remarkable.

  The frame feature value calculation unit 48 calculates the statistical feature value of the frame by performing statistical processing on the filtered data of the frame from the periodic emphasis unit 47. The frame feature value calculation unit 48 sends the calculated feature value to the representative feature value calculation unit 49.

  The representative feature amount calculation unit 49 calculates, as a representative feature amount, one value indicating temporal transition of the frame feature amount for all frames received from the frame feature amount calculation unit 48. Examples of the representative feature amount include a maximum value and a minimum value of the feature amount. The representative feature quantity calculation unit 49 sends the calculated representative feature quantity to the inspection result display control unit 35.

  Next, details of the target period pulse generation unit 42, the phase filter waveform generation unit 43, and the phase filter unit 44 in the inspection unit 34 will be described with reference to FIGS. FIG. 6 shows an outline of information used and generated information in the frequency filter unit 41, the target periodic pulse generation unit 42, the phase filter waveform generation unit 43, and the phase filter unit 44. FIG. 7 shows the flow of processing executed by the target periodic pulse generation unit 42 in the phase filter processing (S12) shown in FIG. FIG. 8 shows a flow of processing executed by the phase filter waveform generation unit 43 and the phase filter unit 44 in the phase filter processing (S12).

  First, as shown in FIG. 6, the sensor information acquisition unit 33 performs predetermined processing such as amplification and shaping on the vibration data acquired from the vibration sensors 12 and 13, and then sends it to the frequency filter unit 41. is doing. In addition, the sensor information acquisition unit 33 performs predetermined processing such as amplification and shaping on the operation state data acquired from the operation control device 16, and then sends it to the target period pulse generation unit 42.

  The target period pulse generation unit 42 uses the operation state data acquired from the sensor information acquisition unit 33 and the rotation ratio information and the sensor tooth information included in the structure information 36 stored in the storage unit 22 as described above. The target period pulse is generated. Specifically, as illustrated in FIG. 7, the target period pulse generation unit 42 generates a reference period pulse (S21), generates a target period pulse (S22), and generates a target period pulse. A process of calculating time (S23) is performed. Here, the reference period pulse is a pulse generated corresponding to the period of one rotation of the reference rotator.

  First, the process (S21) which produces | generates a reference period pulse is demonstrated with reference to FIG. 9 and FIG. FIG. 9 shows an outline of a sensor element that is a component of the driving state detection sensor 15. FIG. 10 shows the time change of two pulses.

  The sensor element rotates together with the reference rotator, and one or a plurality of teeth are provided in the circumferential direction in order to detect the rotation amount of the reference rotator. When a plurality of teeth are provided, the intervals between adjacent teeth may be equal or may not be equal. Moreover, the structure by which one part tooth | gear was abbreviate | omitted among the several teeth provided at equal intervals may be sufficient.

  In the example shown in FIG. 9, the sensor element 61 is provided with teeth 62 at 11 locations out of 12 locations that are equally spaced in the circumferential direction. Such a sensor element 61 is provided on a camshaft, for example, in an automobile engine in order to take ignition timing and the like.

  By driving the sensor element 61 configured as described above, irradiating the sensor element 61 with light, receiving the reflected light, or applying a voltage to the sensor element 61, the operation control device 16 can detect the sensor element 61. A pulse generated corresponding to the tooth 62 of the element 61 can be acquired. When the sensor element 61 rotates at a high speed, the pulse interval and the pulse width become shorter, and when the sensor element 61 rotates at a low speed, the pulse interval and the pulse width become longer. That is, the pulse is generated in correspondence with the rotation of the reference rotator, and is hereinafter referred to as “reference rotation pulse”. The operation control device 16 transmits time-series data of the reference rotation pulse (hereinafter abbreviated as “reference rotation pulse data”) to the inspection device 14 as operation state data.

  The target period pulse generation unit 42 of the inspection apparatus 14 generates the reference period pulse using the reference rotation pulse data acquired from the operation control apparatus 16 via the reception unit 23 and the sensor information acquisition unit 33. FIG. 10 shows the time change of the reference rotation pulse in the upper stage and the time change of the reference period pulse in the lower stage. As shown in the figure, 11 reference rotation pulses are generated while the sensor element 61 makes one rotation, and one reference rotation pulse is left.

  Therefore, the target period pulse generation unit 42 first obtains the structure information of the sensor element 61 from the structure information 36 of the storage unit 22, that is, the number of teeth 62 installed and the number of vacancies in the sensor element 61. Next, the target period pulse generation unit 42 searches the reference rotation pulse data for a pulse pattern corresponding to the acquired number of installed teeth 62 and the number of empty teeth, and at the rising time of the first reference rotation pulse in the found pattern, Is generated. As a result, the target periodic pulse generating unit 42 can generate a reference periodic pulse that is a pulse generated corresponding to the period of one rotation of the reference rotating body (sensor element 61) as shown in the lower part of FIG. it can.

  Next, the process (S22) for generating the target periodic pulse shown in FIG. 7 and the process (S23) for calculating the generation time of the target periodic pulse will be described. Usually, the number of rotations, that is, the rotation ratio, at which the target rotating body rotates during one rotation of the reference rotating body is constant. Therefore, the rotation speed per unit time of the target rotation body is obtained by multiplying the rotation speed per unit time of the reference rotation body by the rotation ratio. That is, the number of occurrences of the target periodic pulse per unit time is the number of occurrences of the reference periodic pulse per unit time multiplied by the rotation ratio.

Therefore, the target period pulse generation unit 42 first calculates the number of generated reference period pulses per unit time. Next, the target periodic pulse generation unit 42 calculates the current generation number of the target periodic pulse per unit time by multiplying the calculated generation number by the rotation ratio acquired from the structure information 36 of the storage unit 22. . Thereby, the target period pulse generation unit 42 can generate time-series data q (t) of the target period pulse (hereinafter abbreviated as “target period pulse data q (t)”) based on the calculated number of occurrences. At the same time (S22), the generation time q _i of the i-th target pulse (i is a natural number) can be calculated (S23).
FIG. 11 shows, in order from the top, the time change of the reference periodic pulse, the time change of the target periodic pulse when the rotation ratio is 0.5, and the time change of the target periodic pulse when the rotation ratio is 1.5. It shows. Referring to the figure, it can be understood that the target period pulse can be generated from the reference period pulse and the rotation ratio.

Returning to FIG. 6, the phase filter waveform generation unit 43 stores the generation time q _i of the target period pulse generated by the target period pulse generation unit 42, the phase shift included in the structure information 36 of the storage unit 22, and the memory The phase filter waveform data is generated using the width of the phase filter section included in the inspection parameter 37 of the unit 22 and the type of the weight function. Specifically, as illustrated in FIG. 8, the phase filter waveform generation unit 43 includes a process of specifying the occurrence time of a failure factor (S24), a process of setting a phase filter section (S25), and a phase filter. The process (S26) which produces | generates for-use waveform data is performed. Here, the failure factor is a factor in which a periodic impact component is generated among the failure factors in the parts included in the product 11.

First, the process (S24) for specifying the occurrence time of the failure factor and the process (S25) for setting the phase filter section will be described with reference to FIG. 12 and FIG. 12 and 13 show the timing q _i at which the target periodic pulse is generated and the timing q ′ at which the impact component of the j-th defect factor (j is a natural number) to be inspected is generated when the target rotating body 65 is rotated. _{i, j,} and an interval l _j where the impact component of the j-th defect factor is highly likely to occur.

As shown in FIGS. 12 and 13, when the target rotating body 65 rotates by a predetermined angle after the target periodic pulse is generated, an impact component as a failure factor is generated. That is, there is a phase shift d _j (unit: degree) between the timing q _{i at} which the target period pulse is generated and the timing q ′ _{i, j at} which the impact component as the failure factor is generated. Therefore, the phase filter waveform generation unit 43 uses the generation time q _i of the target periodic pulse and the phase shift d _j of the failure factor to calculate the time q ′ _{i, j at} which the impact component of the failure factor is generated as follows: Can be obtained.

Here, T _i is the current generation period of the target period pulse. Note that the phase shift _dj is a numerical value determined by a defect factor. Further, the phase shift _dj is proportional to the rotation period of the target rotating body 65, that is, proportional to the generation period of the target period pulse.

Also, as shown in FIGS. 12 and 13, the interval l _{j in} which the impact component of the failure factor is generated is finite and determined for each failure factor. Therefore, the phase filter waveform generation unit 43 sets the section l _j as the phase filter section as follows.

Next, the process (S26) for generating the phase filter waveform data will be described with reference to FIGS. The phase filter waveform generation unit 43 generates phase filter waveform data using the set phase filter section l _j and the weight function included in the inspection parameter 37 of the storage unit 22.

The weight function is a mask function applied to the vibration data in order to emphasize the waveform measured in the phase filter section l _j . A plurality of weight functions are stored in the inspection device 14, and the weight function selected by the inspector 17 is stored in the inspection parameter 37 of the storage unit 22.

  FIGS. 14A to 14C show an example of the weight function w (τ, a). FIGS. 9A to 9C show the weight function w (τ, a) of a rectangle, a triangle, and a Gauss function, respectively. Each weight function w (τ, a) is expressed by the following equation.

Accordingly, the phase filter waveform data g _j (t) for emphasizing the impact component of a certain failure factor is expressed by the following equation.

Then, the phase filter waveform generation unit 43 creates the entire phase filter waveform data g (t) using the phase filter waveform data g _j (t) regarding each failure factor. FIG. 15 shows, in order from the top, examples of phase filter waveform data g ₁ (t) and g ₂ (t) related to two failure factors, and overall phase filter waveform data g (t). . In the illustrated example, a triangle is used as the weight function.

As shown in FIG. 15, the phase filter waveform data g (t) calculates the maximum value at a certain time t with respect to the phase filter waveform data g _j (t) related to each failure factor, The time t is also generated by repeating. In the illustrated example, the entire phase filter waveform data g (t) includes the time q ′ _{i, 1} when the impact component of the first failure factor occurs, and the time q when the impact component of the second failure factor occurs. 'Phase filter waveform data g ₁ (t) relating to the first failure factor is selected before a time intermediate between _{i and 2} , and after that time, phase filter waveform data g ₂ relating to the second failure factor is selected. (T) is selected.

Returning to FIG. 6, the phase filter unit 44 uses the phase filter waveform data g (t) from the phase filter waveform generation unit 43, and among the vibration data x (t) from the frequency filter unit 41, Filter data y (t) is generated by passing the signal in the phase filter section. Specifically, the filtered data y (t) is calculated according to the following equation.
y (t) = g (t) × x (t).

  FIG. 16 is a graph showing an example of temporal changes in the phase filter waveform data g (t), vibration data x (t), and filtered data y (t). In the illustrated example, a rectangle is used as the weight function. In the graph of the vibration data x (t), a broken line indicates vibration data input to the frequency filter unit 41, and a solid line indicates vibration data output from the frequency filter unit 41. Referring to the figure, it can be understood that only the vibration relating to the section where the failure factor occurs remains, and the vibration in the other sections is almost zero.

  Next, details of the frame extraction unit 45 and the normalization unit 46 in the inspection unit 34 will be described with reference to FIGS. 17 to 22. FIG. 17 shows an outline of information used and generated information in the frame extraction unit 45 and the normalization unit 46. FIG. 18 shows the flow of processing executed by the frame extraction unit 45 in the frame extraction processing (S13) shown in FIG.

  First, as illustrated in FIG. 17, the frame extraction unit 45 includes the filtered data acquired from the phase filter unit 44, the target period pulse data acquired from the target period pulse generation unit 42, and the inspection parameter 37 of the storage unit 22. The above-described frame is cut out using the number of pulses per frame and the amount of frame shift included in the frame. The normalization unit 46 normalizes the frame extracted by the frame extraction unit 45 based on the necessity of normalization included in the inspection parameter 37 of the storage unit 22. Specifically, as illustrated in FIG. 18, the frame extraction unit 45 performs processing for obtaining the number of frames (S31), frame cutout processing (S33), normalization determination processing (S34), and normalization processing (S35). ) Is repeated for the number of frames (S32).

  Here, the frame shift amount is a shift amount between adjacent frames, and is set by the number of target period pulses in the present embodiment. FIG. 19 shows an example of a certain measurement waveform and adjacent frames cut out from the measurement waveform. In the measurement waveform graph, the target period pulse is indicated by a bar. In the example shown in the figure, measurement waveforms for 13 target periodic pulses (corresponding to 13 rotations of the target rotating body) are cut out as one frame. The frame shift amount is two target periodic pulses.

First, the process (S31) for obtaining the number of frames will be described. This process is a process for obtaining the number of frames that can be acquired from the entire filtered data. The frame number N _f is obtained by the following equation.

Here, N _q is the number of target periodic pulses, n is the number of target periodic pulses per frame, and m is a frame shift amount. The floor function truncates the decimal part.

Next, the frame cutout process (S33) will be described. First, the number of the target cyclic pulses per frame, and a frame shift, k-th (k is a natural number of 1 to N _f) start time _{q (k-1)} of the frame _{m + 1} and the end time _{q (k- 1)} Calculate _{m + n + 1} . Then, based on the calculated start time and end time, the kth frame is cut out from the filtered data. That is, k-th frame data x _k (t _k ) is cut out from the filtered data x (t) by the following equation.
_{x k (t k) = x} (t k + q (k-1) m + 1)
Incidentally, the filtered data from the measurement start time to the first frame q _1, and the last frame q _(Nf-1) filtering data from _{m + n + 1} to the measurement end time are ignored.

  Next, normalization determination processing (S34) and normalization processing (S35) will be described. The normalization unit 46 determines whether normalization is necessary based on the setting information on the necessity of normalization included in the inspection parameter 37. When normalization is necessary, the normalization unit 46 performs normalization processing. For this normalization processing, various statistical methods can be used. In this embodiment, division by standard deviation is performed. That is, the normalization unit 46 applies the following expression to the kth frame.

Here, P _k is as follows.

  20 to 21 are for explaining the frame cutout process (S33) and the normalization process (S35). FIG. 20 shows the vibration data and the time change of the rotational speed of the reference rotating body in synchronization with the upper and lower stages. Referring to the figure, it can be understood that the frequency of the vibration data is increased by the increase in the rotational speed.

  FIGS. 21A and 21B respectively show frames F1 and F2 cut out from the vibration data of FIG. 20A and 20B are compared, it can be understood that the amplitudes and the time widths of the frames are greatly different, but the waveforms are similar.

  22 (a) and 22 (b) are obtained by performing the normalization process on the frames of FIGS. 21 (a) and 21 (b). Comparing FIGS. 22A and 22B, it can be understood that the frequency distribution is similar.

  The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims. That is, embodiments obtained by combining technical means appropriately changed within the scope of the claims are also included in the technical scope of the present invention.

  Finally, each block of the inspection device 14, particularly the control unit 21, may be configured by hardware logic, or may be realized by software using a CPU as follows.

  That is, the inspection device 14 includes a CPU (central processing unit) that executes instructions of a control program that realizes each function, a ROM (read only memory) that stores the program, a RAM (random access memory) that expands the program, A storage device (recording medium) such as a memory for storing the program and various data is provided. An object of the present invention is a recording medium on which a program code (execution format program, intermediate code program, source program) of a control program of the inspection apparatus 14 which is software that realizes the above-described functions is recorded so as to be readable by a computer. This can also be achieved by supplying the inspection device 14 and reading and executing the program code recorded on the recording medium by the computer (or CPU or MPU).

  Examples of the recording medium include tapes such as magnetic tapes and cassette tapes, magnetic disks such as floppy (registered trademark) disks / hard disks, and disks including optical disks such as CD-ROM / MO / MD / DVD / CD-R. Card system such as IC card, IC card (including memory card) / optical card, or semiconductor memory system such as mask ROM / EPROM / EEPROM / flash ROM.

  The inspection apparatus 14 may be configured to be connectable to a communication network, and the program code may be supplied via the communication network. The communication network is not particularly limited. For example, the Internet, intranet, extranet, LAN, ISDN, VAN, CATV communication network, virtual private network, telephone line network, mobile communication network, satellite communication. A net or the like is available. Also, the transmission medium constituting the communication network is not particularly limited. For example, even in the case of wired such as IEEE 1394, USB, power line carrier, cable TV line, telephone line, ADSL line, etc., infrared rays such as IrDA and remote control, Bluetooth ( (Registered trademark), 802.11 wireless, HDR, mobile phone network, satellite line, terrestrial digital network, and the like can also be used. The present invention can also be realized in the form of a computer data signal embedded in a carrier wave in which the program code is embodied by electronic transmission.

  The inspection apparatus according to the present invention can be inspected according to the same criteria even if the operating condition of the apparatus to be inspected changes. For example, the inspection apparatus can be applied to any apparatus having a rotating body such as a printer, a copier, a motor, and a turbine. can do.

It is a block diagram which shows schematic structure of the test | inspection part of the test | inspection apparatus in the test | inspection system which is one Embodiment of this invention. It is a schematic diagram of the above-mentioned inspection system. In the said inspection system, it is a graph which shows notionally the time change of the rotation speed which shows the driving | running state of a product, and the time change of the feature-value of the vibration which the said inspection apparatus correct | amended. It is a block diagram which shows schematic structure of the said inspection apparatus. It is a flowchart which shows the flow of the test process in the said test | inspection part. It is a block diagram which shows the outline | summary of the information utilized in the frequency filter part of the said test | inspection part, the object period pulse generation part, the waveform generation part for phase filters, and the phase filter part, and the produced | generated information. It is a flowchart which shows the flow of the process which the said object period pulse generation part performs in the phase filter process of the said test | inspection process. It is a flowchart which shows the flow of the process which the said waveform production | generation part for phase filters and the said phase filter part perform in the phase filter process of the said test | inspection process. It is a schematic diagram of the sensor element which is a component of the driving | running state detection sensor in the said inspection system. It is a graph which shows the time change of a reference rotation pulse, and the time change of a reference period pulse. It is a graph which shows the time change of the reference period pulse, the time change of the object period pulse when the rotation ratio is 0.5, and the time change of the object period pulse when the rotation ratio is 1.5. It is a schematic diagram of a target rotator, and at the time of rotation of the target rotator, the timing at which the target period pulse is generated, the timing at which the impact component of the failure factor is generated, and the impact component of the failure factor are highly likely to occur It is a figure which shows an area. It is a graph which shows the time when the said target period pulse generate | occur | produces, the time when the impact component of the said failure factor generate | occur | produces, and the area where the impact component of the said failure factor is high. FIGS. 9A to 9C are graphs showing weight functions of rectangles, triangles, and Gaussian functions, respectively. It is a graph which shows an example of the waveform data for phase filters regarding two defect factors, and an example of the waveform data for phase filters of the whole. It is a graph which shows an example of the time change of the waveform data for phase filters, vibration data, and filtered data, respectively. It is a block diagram which shows the outline | summary of the information utilized in the frame extraction part of the said test | inspection part, and the normalization part, and the information produced | generated. It is a flowchart which shows the flow of the process which a frame extraction part performs in the frame extraction process of the said inspection process. It is a graph which shows an example of a certain measurement waveform and the adjacent frame cut out from this measurement waveform. It is a graph which synchronizes and shows vibration data and the time change of the rotation speed of a reference | standard rotary body. FIGS. 9A and 9B are graphs respectively showing frames cut out from the vibration data. FIGS. 9A and 9B are graphs showing normalization processing performed on each of the frames. In the conventional inspection system, it is a graph which shows notionally the time change of the number of rotations which shows the operation state of a product, and the time change of the feature-value of the vibration which the above-mentioned inspection device inspects.

Explanation of symbols

14 Inspection apparatus 33 Sensor information acquisition part (vibration signal acquisition means, reference | standard rotation pulse acquisition means)
42 target period pulse generator (target period pulse acquisition means)
43 Phase filter waveform generator (phase range acquisition means)
44 Phase filter section (filter means)
45 Frame extraction unit (extraction means)
46 Normalization part (normalization means)
49 Representative feature amount calculation unit (inspection means)

Claims (9)

An inspection device for inspecting a rotating body,
Vibration signal acquisition means for acquiring a vibration signal from a target device including the rotating body to be inspected;
Target period pulse acquisition means for acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation;
An extraction means for extracting a vibration signal of a period of acquiring a predetermined number of the target period pulses from the vibration signal as a frame;
An inspection apparatus comprising: inspection means for performing the inspection using a plurality of the frames. A normalization unit for normalizing the frame;
The inspection apparatus according to claim 1, wherein the inspection unit performs the inspection using a plurality of normalized frames. The target device includes a plurality of rotating bodies,
Of the plurality of rotating bodies, further comprising reference rotation pulse acquisition means for acquiring a reference rotation pulse generated corresponding to the rotation of the reference rotating body,
2. The target period pulse acquisition means generates the target period pulse from the reference rotation pulse by using a rotation ratio between a reference rotating body and an inspection target rotating body. The inspection device described. A phase range acquisition means for acquiring a position where the vibration to be inspected in the rotating body occurs and its surroundings by a phase range indicated by a phase from the reference position;
The inspection apparatus according to claim 1, further comprising a filter unit that allows only a vibration signal in a section corresponding to the phase range to pass in the period of the target periodic pulse among the vibration signals. An inspection device for inspecting a rotating body,
Vibration signal acquisition means for acquiring a vibration signal from a target device including the rotating body to be inspected;
Target period pulse acquisition means for acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation;
A phase range acquisition means for acquiring a position where the vibration to be inspected in the rotating body occurs and its surroundings by a phase range indicated by a phase from the reference position;
Filter means for passing only the vibration signal of the section corresponding to the phase range in the period of the target periodic pulse among the vibration signals,
An inspection apparatus comprising: inspection means for performing the inspection using the vibration signal passed by the filter means. An inspection device control program for operating an inspection device that inspects a rotating body,
Vibration signal acquisition means for acquiring a vibration signal from a target device including the rotating body to be inspected;
Target period pulse acquisition means for acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation;
An extraction means for extracting a vibration signal of a period of acquiring a predetermined number of the target period pulses from the vibration signal as a frame;
An inspection device control program for causing a computer to function as inspection means for performing the inspection using a plurality of the frames. An inspection device control program for operating an inspection device that inspects a rotating body,
Vibration signal acquisition means for acquiring a vibration signal from a target device including the rotating body to be inspected;
Target period pulse acquisition means for acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation;
Filter means for passing only the vibration signal of the section centered on a predetermined phase from the reference position among the vibration signals;
An inspection apparatus control program for causing a computer to function as inspection means for performing the inspection using the vibration signal passed by the filter means. A method for controlling an inspection apparatus for inspecting a rotating body,
A vibration signal acquisition step of acquiring a vibration signal from a target device including the rotating body to be inspected;
A target period pulse acquisition step of acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation;
An extraction step of extracting a vibration signal in a period of acquiring a predetermined number of the target periodic pulses from the vibration signal as a frame;
And a test step for performing the test using a plurality of the frames. A method for controlling an inspection apparatus for inspecting a rotating body,
A vibration signal acquisition step of acquiring a vibration signal from a target device including the rotating body to be inspected;
A target period pulse acquisition step of acquiring a target period pulse generated every time the reference position of the rotating body makes one rotation;
A phase range acquisition step of acquiring a phase range indicated by a phase from the reference position, and a position where the vibration to be inspected occurs in the rotating body and its periphery;
Among the vibration signals, a filter step for passing only vibration signals in a section corresponding to the phase range in the period of the target periodic pulse;
And a test step for performing the test using the vibration signal passed through the filter step.

Images