JP2008161019A - Linear motor device and exposure device using same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problems that a moving member is provided on a stator constituting one stroke and only one current driver for supplying a current to the stator can not deal with two or more moving members, and that the loss of supplied power becomes large, if a plurality of moving members is mounted in a manner which are the same as those of the conventional structures and currents are supplied to a series of arranged stator coils on the stroke, and alternatively, if currents are selectively supplied to the stator, there is a worry that many switches and wirings for controlling whether currents should be supplied are required. <P>SOLUTION: This linear motor device includes a plurality of moving members, excitation switching type stator, consisting of a plurality of coils, and switching means which supply excitation currents to the coils. The switching means supply a plurality of excitation currents to a common coil portion, which can selectively drive at least two or more moving members of a plurality of the moving members, according to the positions of a plurality of the moving members. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a linear motor device, a driving device using the same, an exposure device, and the like, and more particularly to a moving magnet type linear motor device for a driving circuit for driving a plurality of movable elements.

  A moving magnet type linear motor device with a magnet on the mover side and a coil on the stator side supplies current for driving the linear motor in sequence with the movement of the mover to the coil on the stator side. By doing so, the structure which gives drive force to the needle | mover corresponding to it is taken. Therefore, there is no need to supply current to the movable element side, and there is no troublesome wiring and connection. On the other hand, heat is generated mainly due to the exciting current of the coil on the stator side. However, since cooling on the stator side can be performed with a cooling pipe or the like, high accuracy such as a semiconductor exposure apparatus that requires high accuracy and high reliability is required. It is adopted in the function combination type device.

  In this moving magnet type (MM type) linear motor, normally, a plurality of coils are arranged and fixed in accordance with the stroke so as to move on a stroke that is sufficiently longer than the length of the mover. Let it be a child. In addition, current is not passed through the stator coils that are not directly related to the application of thrust to the mover, but the current is detected only when the position of the mover is detected and only the corresponding coil is passed. For example, Japanese Patent Application Laid-Open No. 2001-119916 proposes a reduction.

On the other hand, recent high-function composite devices are required to have higher functions and higher accuracy, and there are a plurality of moving magnet type linear motors that move on a single stator. There has been a demand for simultaneous driving of the movers.
JP 2001-119916 A

However, as in the prior art, a single mover is provided on a stator that constitutes one stroke, and a current driver for supplying a current to the stator also has two or more movers. Can not cope with.
In addition, when a plurality of movers are mounted as they are in the conventional configuration and current is supplied to a series of arranged stator coils on the stroke, the supply power loss increases or selectively. In the case of supplying current to the stator, there is a concern that a large number of switches and wirings for controlling whether to supply current are required.

  A linear motor device according to the present invention is a linear motor device including a plurality of movers, an excitation switching type stator including a plurality of coils, and energization means for supplying excitation current to the coils. A plurality of exciting currents are selectively supplied according to the positions of the plurality of movable elements to a common coil part where at least two or more movable elements among the plurality of movable elements can move.

In the linear motor device according to the present invention, preferably, the energizing means supplies two or more exciting currents by two or more current amplifiers and / or two or more drivers, and selects two or more exciting currents for the common coil. Excitation current switching means is provided for switching and supplying, and the length of the common coil portion in the direction of the mover moving axis is shorter than the distance between the movers.
In the linear motor device according to the present invention, preferably, a plurality of coils are excited by three-phase alternating current, and a neutral point of the plurality of coils is short-circuited between coils to which only one excitation current is supplied. The first short-circuit portion described above and a second short-circuit portion short-circuited between the shared coils to which two or more exciting currents are supplied, one of the two or more first short-circuit portions, and the second short-circuit portion Short circuit switching means capable of selectively switching and connecting the short circuit is provided.

  An exposure apparatus according to the present invention is a linear motor apparatus comprising a plurality of movers, an excitation switching type stator composed of a plurality of coils, and energization means for supplying an excitation current to the coils. And a linear motor driving device that selectively supplies a plurality of exciting currents to a common coil part to which at least two or more of the plurality of movable elements can move according to the positions of the plurality of movable elements.

In the exposure apparatus according to the present invention, preferably, the energization means supplies two or more excitation currents by two or more current amplifiers and / or two or more drivers, and selectively supplies two or more excitation currents to the shared coil. Exciting current switching means for switching and supplying is provided, and the length of the common coil portion in the direction of the mover moving axis is provided with a linear motor driving device shorter than the distance between the movers.
In the exposure apparatus according to the present invention, preferably, the plurality of coils are excited by three-phase alternating current, and the neutral points of the plurality of coils are two or more short-circuited between the coils to which only one excitation current is supplied. A first short-circuit portion and a second short-circuit portion short-circuited between the shared coils to which two or more exciting currents are supplied, and one of the two or more first short-circuit portions and the second short-circuit portion And a linear motor driving device provided with short-circuit switching means capable of selectively switching between and connecting to each other.

  Another linear motor driving apparatus according to the present invention provides a stator composed of a plurality of coils, a plurality of movers composed of magnets that move relative to the coils, and a current command value to the coils. Based on the position information detected by the plurality of drivers, the plurality of movers, and the position information detected by the position detection device, only each drive coil within the magnetic field range of the magnets of the plurality of movers A moving magnet type linear motor drive device comprising: a coil unit that is used only by a single mover of a plurality of movers; and two or more And a switch unit that can selectively supply power from a plurality of drivers.

In addition, preferably, at both ends of each coil, energizing means for connecting to each of the plurality of drivers is provided, and the energizing means at both ends of each coil corresponding to the position of the mover based on the position information detected by the position measuring device. Are simultaneously turned on / off.
Preferably, a line shorting switch for short-circuiting between wirings at both ends of the coil is provided between the driver and the energizing means at both ends of the coil.

  A moving magnet type linear motor apparatus capable of simultaneously driving a plurality of movable elements on the same stator with reduced space and switches and wiring can be realized.

(First embodiment)
In this embodiment, a terminal connected to the neutral point of a stator coil used by two movers and a neutral point of a coil used by only one of the movers are separated from each other. Furthermore, the neutral point of the coil used by both of the movers can be switched in the same manner as the stator switching coil in accordance with the position of each mover, so that the linear mode on the side where the mover exists is set. Switch to the neutral point of the stator.

  As a result, the plurality of movers are driven by a plurality of independent motor drive circuits, respectively, and the movers can be driven with a substantially constant interval. Also, since both the movers do not come to the position where a common coil is used at the same time, only the neutral point of these commonly used coils is separated and only one stator uses the stator. Switch and connect to the neutral point of the coil. Accordingly, the additional wiring and switches that are newly required are only two sets when there are two movable elements. In addition, since the motor driving circuits are independent from each other in neutral point, they can be operated independently without interfering with each other, so that high reliability can be ensured.

  Here, it demonstrates in detail below based on the stator coil conceptual diagram concerning embodiment of this invention shown in FIG. In FIG. 1, a case where there are two movers (not shown) is described as a typical example, and 21 single coils are arranged on the stator coil 1. The stator coil 1 is composed of seven groups of 1-1, 1-2, 1-3,... 1-6, 1-7 in order, and each group has three corresponding to three phases of U, V, and W. A single coil is provided. For example, the stator coil 1-1 is provided with three coils of U1, V1, and W1 in order.

  Further, assuming that the two movers (not shown) are the mover R and the mover L, respectively, each mover is movable from the respective ends of the stator 1 to the vicinity of the center portion with a constant interval. In this case, the stator coil 1-4 is overlapped as a movable region of both the movable elements R and L. That is, the stator coil 1-4 is used both when the mover R is driven and when the mover L is driven.

  In this embodiment, each of the mover R and the mover L is excited by energizing each U-phase, V-phase, and W-phase stator coil 1 corresponding to the position of the mover. A current is supplied to the stator coil 1 by the motor drive circuit 2. The motor drive circuit 2 includes a motor drive circuit 2-1 and a motor drive circuit 2-2 for driving the mover L and the mover R, respectively. It is configured to drive. The total number of coils, the number of stator coils that are energized and excited during driving, and the number of stator coils that are commonly used by the mover may be arbitrarily designed.

The motor drive circuits 2-1 and 2-2 are current amplifiers 2-1U, 2-1V, 2-1W, 2- for supplying a three-phase current of U phase, V phase, and W phase, respectively. 2U, 2-2V, 2-2W. The motor drive circuit 2 is supplied with a current drive command signal 4 for controlling the energization excitation to the stator coil 1 to drive the mover from the host computer side of the main body (not shown).
Thereby, the designated current based on the current drive command signal 4 is obtained from each U-phase, V-phase, and W-phase current amplifier 2-1U, 2-1V, 2-1W, 2-2U, 2-2V, 2-2W. Is supplied to the stator coil 1. In addition, by supplying and controlling the current independently for each mover, accurate and highly accurate drive control can be performed for each mover. That is, regardless of whether or not both movers L and R are the same, the current value necessary for driving each mover can be supplied independently.

  The switch box 3 is provided between the motor drive circuit 2 and the stator coil 1, and determines which coil of the stator coil 1 the current supplied from the motor drive circuit 2 is supplied to. Determined by switch switching. This switch is composed of a MOS-FET-SW or the like. For example, for the stator coil 1-1, the switches are referred to as SW-U1, SW-V1, and SW-W1 according to the U phase, V phase, and W phase, respectively. Thus, each stator coil 1-2, 1-3,... Is provided for each phase.

  For the stator coil 1-4 shared by both the movers L and R, both the motor drive circuit 2-1 and the motor drive circuit 2-2 for each mover are driven when each mover is driven. Therefore, it is necessary to configure each to be energized. That is, when the mover L is positioned on the stator 1-4, the stator 1-4 is energized and excited by the supply current from the motor drive circuit 2-1. Further, when the mover R is positioned on the stator 1-4, the stator 1-4 is energized and excited by the supply current from the motor drive circuit 2-2.

  Since each of the movers L and R is independently driven and controlled, it is normally movable while maintaining a distance of one set of stator coils or more. Therefore, both the movers L and R are not simultaneously positioned in the stator coil 1-4, and the stator coil 1-4 is energized simultaneously from both the motor drive circuits 2-1 and 2-2. There is nothing. Therefore, two switches for determining the energization of the stator coil 1-4 are provided for each phase as SW-U4, SW-V4, and SW-W4 corresponding to the U-phase, V-phase, and W-phase. Thus, the current from the motor drive circuits 2-1 and 2-2 can be selectively supplied.

Further, the switch box 3 has each of the stator coils 1-1 to 1-7 from the current position of the movers L and R and the next driving direction from the host computer side of the main body. An excitation switching signal 5 for selecting a coil to be energized is input.
Based on the excitation switching signal 5, the switches SW-U1, SW-V1, SW-W1,.

  Here, in the stator coil 1, the stator coils 1-1, 1-2, 1, 1 driven only by the motor drive circuit 2-1 on the neutral point NL, NB, NR side of the stator coil 1. -3, stator coils 1-5, 1-6, 1-7 driven only by the motor drive circuit 2-2, and neutral points NL of the stator coils 1-4 driven from both, NR and NB are wired so as to be short-circuited in SW-N.

That is, the short-circuited neutral point NB of the stator coil 1-4 can be switched and connected to the switch box 3 to the short-circuited neutral points NL and NR on the mover L side and the mover R side. A switch SW-N is provided.
For example, when the mover L is in the U1-phase, V1-phase, and W1-phase positions of the stator coil 1-1, the switches SW-U1, SW-V1, and SW-W1 of the switch box 3 are turned on. At this time, since the mover R is located in the U4 phase, the V4 phase, and the W4 phase of the stator coil 1-4, the switches SW-U4, SW-V4, and SW-W4 of the switch box 3 are motor driven. The contacts are switched to the motor drive circuit 2-2 side so that the circuit 2-2 is energized.

Further, the switch SW-N of the switch box 3 is switched off so that the neutral point NB of the stator 1-4 is opened from the neutral point NL on the mover L side, so that the motor drive circuit 2- 2 makes it possible to energize the stator 1-4 with an exciting current.
On the other hand, when the mover R is at the position of the stator coil 1-7, the mover L is positioned on the stator coil 1-4. Therefore, the neutral point NB of each phase coil of the stator coil 1-4 is connected to the neutral point NL. Therefore, even when the stator L is positioned on the stator coil 1-4, it is possible to receive an exciting current from the motor driving circuit 2-1, and further receive an excited magnetic field. Thus, regardless of which mover is positioned on the stator coil 1-4, the excitation current corresponding to each mover is supplied. This can be switched by SW-N.

By connecting the neutral point NL or NR corresponding to the mover using the stator coil 1-4 and the neutral point NB of the stator coil 1-4, the stator coil is connected. While 1-4 is connected, a series of integrated circuits can be constructed with the connected side.
In this embodiment, for example, when the mover L is positioned in the W phase of the stator coil 1-3, the U phase, and the V phase of the stator coil 1-4, the switch SW-W3 of the switch box 3 is turned on, and the switch The motor drive circuit 2-1 is configured so that both SW-U4 and SW-V4 pass the current of the U-phase current amplifier 2-1U and V-phase current amplifier 2-1V of the motor drive circuit 2-1. A switch is selected on the side. Further, in this case, the stator coil 1-4 is used for driving the mover L, and the current of the motor drive circuit 2-1 is supplied. Therefore, the neutral point NB is the neutral point NL. SW-N is selected to connect.

  By this series of SW-N operations, the shared stator coil 1-4 can operate as a stator coil integrated with the side used at that time (L side or R side). . In the case described above, the mover R is substantially at the position of W6 of the stator coil 1-6 and the positions of U7 and V7 of the stator coil 1-7. Therefore, the corresponding switches SW-W6, SW-U7, SW When -V7 is turned on, the excitation current for driving the mover R is supplied from the motor drive circuit 2-2.

Next, the driving of the mover will be described using the conceptual diagram of the relationship between the mover and the stator according to the embodiment of the present invention shown in FIG. This figure is a conceptual diagram of a linear motor 23 provided with two movers, a mover L and a mover R. The movable element L can be freely reciprocated within the L movement range 25, and the movable element R can be freely reciprocated within the R movement range 26.
Here, the stator coils of the stator 24 corresponding to the L movement range 25 of the mover L are U1 to U5, V1 to V5, W1 to W4, and the stator 24 corresponding to the R movement range 26 of the mover R. The stator coils are U4 to U7, V3 to V7, and W3 to W7. Therefore, this portion of the stator coil functions as an L excitation coil and an R excitation coil, respectively.

Here, the L movement range 25 and the R movement range 26 extend from the ends of the stator 24 excluding the dummy coils to the vicinity of the center of the stator, and both the movers L and R can move near the center. A common shared range 27 is formed.
Accordingly, in this common range 27, any drive current of the movers L and R can be selectively energized to the coils in the common range 27 portion so as to be able to handle any drive of the movers L and R. Next, a switch and wiring are configured. The configuration of the switch and wiring is omitted here because it overlaps with the above description. In a linear motor that operates synchronously with a constant interval between the two movable elements, the common range 27 can be made wider than the distance between the two movable elements by increasing the distance between the movable elements L and R. preferable. If this is small, since both the movers are not simultaneously located in the common range 27, stable drive control can be achieved in terms of control of separate and independent excitation currents.

  In this description, the example in which the movers L and R move with a constant interval is shown, but the excitation current for driving each mover is supplied from each phase amplifier provided in the motor drive circuit. Since it is switch-driven, it becomes a separate and independent drive. Therefore, it is also possible to operate independently. For example, only one of the movable elements may be driven, or the distance between the movable elements may be driven without being constant.

However, even in this case, in order to avoid the collision between the movers and to ensure the stability of the drive control, the distance between both movers is kept more than the continuous UVW coil (in random order) interval, and the common range It is preferable that the two movers are not positioned at the same time.
In this embodiment, the excitation of the stator coil corresponding to each mover has been described as three stator coils having a continuous UVW phase, but this is designed as appropriate according to the length and size of the mover. can do. In this case, the two or more movers may be arbitrarily independent in size and length, and the number of stator coils to be excited may be designed independently.
(Second embodiment)
Next, a second embodiment according to the present invention shown in FIG. 3 will be described. In this embodiment, a case where two linearly movable movers are provided in a linear motor driving circuit will be described.

  In this figure, the stator 31 is composed of N coil arrays, the coils 31 (1) to 31 (b) are set in the moving range 34 of the mover 32, and the coils 31 (a) to 31 are set. (N) is set to the movement range 36 of the mover 33. The mover 32 and the mover 33 are made of permanent magnets, and the moving magnet type linear motor is constituted by these and the stator 31.

Therefore, the coil 31 (a) to the coil 31 (b) become a common range 35 in which both the mover 32 and the mover 33 move. Although the common range 35 is illustrated in the vicinity of the center of the coil row of the stator 31 in FIG. 3, it may be set at an arbitrary location.
The position of the mover 32 is detected by the position detection device 37, and the position of the mover 33 is detected by the position detection device 38. Further, the current output from the driver 3c for supplying the exciting current for driving the movable element 32 and the driver 3d for supplying the exciting current for driving the movable element 33 is connected and wired so as to be supplied to the switch box 3e. Yes.

  The switch box 3e is provided with a switch made of a MOS-FET or the like that can turn on / off the excitation current connected to each coil of the stator 31. A selection changeover switch 3e (a) is provided so that the excitation current can be selectively supplied to the coil of the stator 31 located in the common range 35 of the mover 32 and the mover 33 from either the driver 3c or the driver 3d. To 3e (b).

  Further, the control device 3f calculates the drive current values of the driver 3c and the driver 3d based on the position detection information of the position detection device 37 and the position detection device 38, and according to the positions of the mover 32 and the mover 33. The magnetic field suitable for driving the movable element 32 and the movable element 33 is supplied by switching each switch of the switch box 3e. At this time, the stator coil to be driven may be determined from the relative positional relationship between the movers 32 and 33 and the stator 31 by detecting the position of the stator 31.

When any one of the mover 32 and the mover 33 enters the common range 35, the excitation current of any one of the drivers 3c and 3d corresponding to the entered mover becomes the coil 31 (a). -Switch 3e (a)-switch 3 (b) are switched so that it may be supplied to coil 31 (b).
Further, if the mover 32 and the mover 33 are sequentially moved at equal intervals, the switches of the coils of the stator 31 over the range covered by the magnetic field of each mover are sequentially turned on, and the range where the magnetic field is no longer applied. By sequentially turning off the coil switches, it becomes possible to control the drive of each mover. In addition, the moving direction of the mover may be predicted in advance, or only the coil in the planned moving direction may be selectively energized.

  In addition, since the excitation current of either the driver 3c or the driver 3d can be supplied to the common range 35, both the mover 32 and the mover 33 can move smoothly within the moving range of each mover. Can do. In this configuration, since the selection changeover switches 3e (a) to 3e (b) are provided only in the common movement range of the movable element 32 and the movable element 33, the wiring routing and the switch installation are minimized and reduced. This can contribute to space saving and cost saving.

Further, for example, in the case of the ring-shaped stator 31, when both end portions are not provided and the coil array is arranged in an annular shape, the selection changeover switches 3e (a) to 3e (b) are applied to all the coil switches. Also good.
Further, in the case of a coil array of linear or curved stators 31, there are usually both ends, so at least the length of each movable element from both ends is a selection changeover switch 3 e (a) to 3 e. It is not necessary to provide (b). That is, if one mover 32 is at the end, the other mover 33 cannot be positioned at the same end position, and the length of the mover 32 and the set interval provided between both movers are added. The movable element 33 is positioned only up to a position away from the end by a certain distance.

For this reason, the selection changeover switches 3e (a) to 3e are provided for the coil 31 (1) and the like of the stator 31 corresponding to the distance obtained by adding the length of the mover 32 and the set interval provided between the movers. It is not necessary to provide (b), and a normal on / off switch may be formed of a MOS-FET or the like, so that wasteful arrangement of switches and wirings can be avoided.
If one mover 33 is at the end, the other mover 32 cannot be overlapped at the same end position, and the length of the mover 33 and the set interval provided between both movers are added. The movable element 32 is located only up to a position away from the end by a certain distance.

For this reason, the selection changeover switches 3e (a) to 3e are provided for the coil 31 (N) or the like of the stator 31 corresponding to the distance obtained by adding the length of the mover 33 and the set interval provided between the movers. It is not necessary to provide (b), and a normal on / off switch may be formed of a MOS-FET or the like, so that wasteful arrangement of switches and wirings can be avoided.
Further, in the embodiment shown in FIG. 3, a different brake switch 3g that acts as a so-called dynamic brake is provided. When the brake switch 3g is turned on, both ends of the coil 31 (1) and the like of the stator 31 to be connected are short-circuited, so that a coil electromotive force is generated so as to suppress fluctuations in magnetic flux due to movement of the mover. As a result, the brake of the mover can be obtained. Since the brake switch 3g is provided independently for each of the driver 3c and the driver 3d, it is possible to separately brake the movable element 32 and the movable element 33 corresponding thereto.

According to this embodiment, in the moving magnet type linear motor, independent driving of the two movers can be realized at low cost, low power consumption, and space saving. Moreover, in this embodiment, although the case where there were two movers was illustrated, this technical idea may be applied as appropriate even if there are three or more movers.
The number of current drivers may be the same as the number of movers, or a driver may be provided for each coil of the stator 31 and connected to the current driver with the same number of amplifiers as the number of movers.

  That is, in the case of this embodiment, it is not necessary to provide a plurality of changeover switches (or switch boxes) for switching the motor coils between all the output terminals of the motor coils and the output of the motor drive circuit. By providing a plurality of switches only at necessary locations where the mover may move redundantly, it is possible to switch the motor coil according to the command signal on the host side according to the position of the mover. Become.

  Also, when driving a plurality of movers with a constant interval on the stator of a single linear motor, multiple switches are provided by providing a plurality of motor drive circuits corresponding to each mover. In this case, for example, in the vicinity of the center of one stator, and the two stators are used together, except for the shared stator coil portion, each corresponding single This can be handled only by the current supply circuit of the mover and the switch.

  In such a case, with respect to the coil located near the center on the single stator, there are cases where two movers having a constant interval are used together. Therefore, the neutral point of the reverse side terminal of the motor coil terminal to be switched is also changed by changing the connection by providing a switch in the same manner, or all the reverse side terminals are connected and connected. It is desirable to use either the neutral point of each linear motor drive circuit connected to the same potential (short circuit).

In the case of switching all the reverse terminals of the former, not only double the number of wires of the stator coil of the linear motor is required, but also the wiring space and wiring trouble associated therewith are required. Furthermore, since the number of changeover switches increases twice, it is not preferable from the viewpoint of space saving, cost, and power consumption.
Further, in the system in which all the neutral points on the opposite side are connected as in the latter case, the neutral points of the two three-phase linear motor drive circuits are driven at the same potential. For this reason, there is a concern that a current corresponding to an error flows from one drive circuit to the other drive circuit through each neutral point. In addition, when only one of them is stopped, the potential balance at the neutral point is disrupted, and there is a concern that an unfavorable situation may occur such that the current drive runs out of control and current control becomes impossible, or the drive element is destroyed. The

In this regard, this embodiment does not unnecessarily increase the number of spaces, such as the number of wires and switches, and is a moving magnet type excitation switching system having a plurality of movers with high operational reliability. A linear motor drive circuit can be provided.
In addition, a linear motor having a single stator and a plurality of movable elements of the excitation switching method can be saved by using a simple motor drive circuit and reducing the total number of parts. It can be realized at low cost. Further, by simplifying the apparatus, it is possible to provide a motor driving apparatus with high cost performance and high reliability.

  This embodiment can also be applied to linear motor driving such as a voice coil motor (VCM) having a relatively short stroke. Furthermore, it can be particularly suitably used for a wafer stage driving device and a reticle driving device of a semiconductor exposure apparatus, and a blind blind motor for limiting exposure light. In an exposure apparatus or the like to which this embodiment is applied, the entire apparatus is reduced in size, space saving and cost reduction, and the number of parts is reduced to achieve high reliability, high precision control and light weight. It can be.

  The present invention is applicable to various apparatuses such as a linear motor apparatus, a linear motor driving apparatus, a stage driving apparatus of an exposure apparatus using the linear motor apparatus, a slit driving apparatus, and a semiconductor exposure apparatus.

The stator coil conceptual diagram concerning embodiment of this invention Conceptual diagram of relationship between mover and stator according to an embodiment of the present invention Second embodiment according to the present invention

Explanation of symbols

1 .... Stator coil 2 .... Motor drive circuit 3 .... Switch box 4 .... Current drive command signal 5 .... Excitation switching signal 21 ... Mover L L22 ... Mover R , 23-Linear motor, 24-Stator, 25-L movement range, 26-R movement range, 27-Shared range

Claims (8)

A plurality of movers,
An excitation switching type stator composed of a plurality of coils;
A linear motor device comprising energization means for supplying an exciting current to the coil,
The energization means selectively supplies a plurality of excitation currents to a common coil part to which at least two or more movers among the plurality of movers can move according to the positions of the plurality of movers.
A linear motor device characterized by that. The energizing means is
Supplying two or more excitation currents by two or more current amplifiers and / or two or more drivers;
Exciting current switching means for selectively switching the two or more exciting currents to be supplied to the common coil unit,
The length of the common coil portion in the direction of moving the mover is shorter than the distance between the movers.
2. The linear motor device according to claim 1, wherein The plurality of coils are excited by three-phase alternating current,
The neutral points of the plurality of coils are two or more first short-circuit parts short-circuited between the coils to which only one exciting current is supplied, and
A second short-circuit portion short-circuited between the shared coils to which two or more excitation currents are supplied,
One of the two or more of the first short-circuit portion and the second short-circuit portion are provided with a short-circuit portion switching means capable of selectively switching connection.
The linear motor device according to claim 1, wherein the linear motor device is characterized. A plurality of movers,
An excitation switching type stator composed of a plurality of coils;
A linear motor device comprising energization means for supplying an exciting current to the coil,
The energizing means selectively supplies a plurality of exciting currents to a common coil portion where at least two of the plurality of movable elements can move according to the positions of the plurality of movable elements. An exposure apparatus comprising a driving device. The energizing means is
Supply two or more exciting currents with two or more current amplifiers and / or two or more drivers,
Excitation current switching means for selectively supplying the two or more excitation currents to the shared coil and supplying them,
An exposure apparatus comprising a linear motor driving device in which the length of the shared coil portion in the direction of the mover moving axis is shorter than the distance between the movers. The plurality of coils are excited by three-phase alternating current,
The neutral points of the plurality of coils are two or more first short-circuit parts short-circuited between the coils to which only one exciting current is supplied, and
A second short-circuit portion short-circuited between the shared coils to which two or more excitation currents are supplied,
An exposure apparatus provided with a linear motor driving device provided with a short-circuit portion switching means capable of selectively switching and connecting one of the two or more first short-circuit portions and the second short-circuit portion. A stator composed of a plurality of coils;
A plurality of movers made of magnets that move relative to the coil;
A plurality of drivers for providing a current command value to the coil;
A position detection device for detecting the position of each of the plurality of movers;
Energization means for selecting and energizing only each drive coil within the magnetic field range of the magnets of the plurality of movers based on the position information detected by the position detection device;
A moving magnet type linear motor drive device comprising:
The stator includes a coil portion used only by a single mover of the plurality of movers;
It consists of a shared coil part used by two or more of the plurality of movers,
A linear motor driving apparatus comprising a switch unit that can selectively supply power from the plurality of drivers. Energization means for connecting to each of the plurality of drivers is provided at both ends of each coil, and energization is performed at both ends of each coil corresponding to the position of the mover based on position information detected by the position detection device. Turn on / off means simultaneously,
The linear motor drive device according to claim 7.

Images