JP2008146082A - Optical transmitter and its adjustment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To automatically adjust, from remoteness, optical axes of an optical transmission line for which mirrors are combined. <P>SOLUTION: The optical transmitter 10 comprises: an optical transmission 12 that composes the optical transmission line 11 by combining mirrors; a mirror adjustment devices 30, 31 that control the inclined angle of at least one mirror constituting this optical transmitting means; an electronic optical imaging means 55 installed on the extension of the optical axis on a light source side to be propagated on the optical transmission line 11; image processing targets 33-36 that are arranged near the mirror; an image processor 55 that arithmetically processes image information from the electronic optical imaging means 55 and that measures angular deviation of the mirror from a normal position based on the positional information of the image processing targets 33-36 contained in this image information; and a controller 29 that, with the angular deviation of the mirror input, makes the mirror adjustment devices driven. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an optical transmission technology for transmitting light in an optical transmission path combined with a mirror, and in particular, when transmitting light accurately to a target irradiation position of an object such as a nuclear power plant, the optical axis of the optical transmission path. The present invention relates to an optical transmission apparatus capable of performing adjustment automatically and stably and an adjustment method thereof.

  In the case of an optical transmission device that transmits laser light using several mirrors, it is common to manually adjust the angle of the mirror while visually checking the position of the mirror that is transmitted sequentially from the mirror near the laser device. It is. Also, in places where people are not accessible, such as in a radiation environment or high temperature environment, or when adjustments must be made remotely, install an optical monitoring device such as a CCD camera at the location where you want to view the images. A method of automatically adjusting the mirror while watching is adopted.

  When the above-described optical transmission device is applied to maintenance and repair work in a nuclear power plant, there are the following problems when transmitting and irradiating a laser beam to a reactor internal structure or the like.

  Since the inside of the nuclear reactor has a large work space and the reactor internals are installed in the reactor, the optical transmission device has a complicated transmission path and a long transmission distance. For this reason, there are many transmission mirrors and the number of places that must be observed increases, and the number of installed optical monitoring devices such as CCD cameras increases accordingly.

  In addition, when there is an environmental change during optical transmission using the optical transmission device, there is a possibility that the optical axis of the optical transmission path may be shifted due to the environmental change, and the optical transmission device is sequentially adjusted according to the environmental change. There is a need.

  Further, when the optical transmission device is used for long-distance transmission, the laser beam is affected by air fluctuations in the middle of the transmission path, and is further influenced by the vibration of peripheral devices via the transmission mirror. As a result, the laser beam shakes, and there is a problem that the laser beam cannot be stably transmitted to the target transmission point.

  In addition, if the number of CCD cameras installed in the optical transmission device is large, adjustment takes time, and there is a problem that electronic components such as a CCD camera cannot be used in an environment where the intensity of radiation is high.

  The present invention has been made in consideration of the above-described circumstances, and provides an optical transmission apparatus and an adjustment method thereof that can automatically and stably adjust the optical axis of an optical transmission path combined with a mirror from a remote location. The purpose is to provide.

  Another object of the present invention is to easily and easily adjust the optical axis to a target irradiation position when transmitting light in an optical transmission path, and to perform air fluctuations and mechanical vibrations of peripheral devices. It is an object of the present invention to provide an optical transmission apparatus and an adjustment method therefor that can correct the fluctuation of the optical axis caused by the above and can stably supply light to an irradiation position for a long time.

  Still another object of the present invention is to automate all optical axis adjustments up to the final irradiation point so that it can be used even in places where it is difficult for humans to approach, such as in-reactor structures. An object of the present invention is to provide an optical transmission apparatus capable of adjusting an optical path and an adjustment method thereof.

  Another object of the present invention is that even when transmitting light to a place where the radiation intensity is strong, there is no need to install an electronic device such as a CCD camera having low radiation resistance in the optical path. An object of the present invention is to provide an optical transmission apparatus and an adjustment method thereof that can easily adjust the optical axis.

  In order to solve the above-described problems, an optical transmission device according to the present invention includes, as described in claim 1, an optical transmission unit that forms an optical transmission path by combining mirrors, and at least the optical transmission unit that constitutes the optical transmission unit. A mirror adjusting device for controlling the tilt angle of one mirror, an electro-optical imaging means installed on an extension of the optical axis on the light source side transmitted through the optical transmission path, and an image arranged in the vicinity of the mirror An image for processing the image information from the processing target and the electro-optical imaging means, and measuring the amount of angular deviation of the mirror from the normal position based on the position information of the image processing target included in the image information The apparatus includes a processing device and a control device that inputs an angle deviation amount of the mirror and drives the mirror adjusting device.

  According to a second aspect of the present invention, in order to solve the above-described problem, the light transmission means covers the light transmission path with a light guide shield tube such as a light guide tube or a light guide tube. One or more mirrors are arranged in the middle.

  In order to solve the above-described problems, an optical transmission device according to a third aspect has a light passage hole formed in the image processing target.

  In order to solve the above-described problem, the optical transmission device according to claim 4 is configured such that the image processing target is installed so as to cross the optical transmission path, and each target is configured in a different shape. is there.

  According to a fifth aspect of the present invention, in order to solve the above-described problem, the optical transmission means includes an illumination device that can illuminate the vicinity of the mirror or the image processing target.

  According to a sixth aspect of the present invention, in order to solve the above-described problem, the mirror adjustment device is a stepping motor drive type or servo motor drive type automatic mirror device.

  According to a seventh aspect of the present invention, in order to solve the above-described problem, the image processing apparatus compares a pre-registered image pattern with an image photographed at the time of mirror adjustment, and detects a positional deviation amount of the photographed image. It is equipped with a possible pattern matching device.

  In addition, in order to solve the above-described problem, the optical transmission device adjustment method according to the present invention is provided with an electro-optical imaging unit on an extension line of the light source side optical axis of an optical transmission path combined with a mirror, and the electro-optical imaging The image information from the means is processed, the angle shift amount of the mirror from the normal position is measured by an image processing device, the mirror angle is input and the mirror tilt angle is controlled by the mirror adjustment device. The mirror image of the target for image processing through the first automatic adjustment mirror on the light source side is observed by the electro-optical imaging means, and the first automatic adjustment mirror is used by the mirror adjustment device so that the observed mirror image is centered. After adjusting the first automatic adjustment mirror, the automatic adjustment mirror is sequentially adjusted by the same mirror adjustment method to adjust the optical axis of the optical transmission path.

  An optical transmission apparatus according to the present invention includes an electro-optical imaging unit installed on an extension of an optical axis on a light source side that is transmitted through an optical transmission line, an image processing target arranged in the vicinity of a mirror, and an electro-optical imaging. An image processing device that calculates image information from the means and measures an amount of angular deviation of the mirror from a normal position based on positional information of the image processing target included in the image information; and angular deviation of the mirror Because it is equipped with a control device that inputs the amount and drives the mirror adjustment device, it is not necessary to install an electronic device such as a CCD camera in the middle of the optical transmission path, and the optical axis can be remotely controlled even in a radiation-intensive environment. It becomes possible to adjust. In addition, it is possible to remotely adjust the optical transmission path by the electro-optical imaging means without installing an electronic optical imaging means such as a CCD camera in the middle of the optical transmission path. In addition, since the image processing apparatus is provided, it becomes possible to automatically adjust the mirror by automatically measuring the deviation amount of the mirror based on the image taken by the electro-optical imaging means.

  In the optical transmission device according to the present invention, the optical transmission path of the optical transmission means is covered with a light guide shield tube such as a light guide tube or a light guide tube, and one or more mirrors are provided in the middle of the light guide shield tube. Since it is arranged, a complicated optical transmission path can be configured with a combination of mirrors to transmit in the air inside the shield tube, and the optical transmission is efficient without being affected by ambient influences such as air fluctuations. Can be done well.

  Furthermore, in the optical transmission apparatus according to the present invention, the optical transmission means is provided with an image processing target in the vicinity of the mirror, and a light passage hole is formed in the target. Therefore, the mirror in the optical transmission path is remotely adjusted. In this case, the position to be adjusted and transmitted can be clarified, and the processing contents in the image processing can be simplified.

  Further, in the optical transmission apparatus according to the present invention, the image processing target is installed so as to cross the optical transmission line, and each target is configured in a different shape. It is possible to clearly determine the positions of the target mirror and target on the optical axis, to easily determine the position to be adjusted, and to accurately measure the mirror displacement.

  Furthermore, in the optical transmission device according to the present invention, the optical transmission means includes an illumination device that can illuminate the vicinity of the mirror or the image processing target. Since the image of the mirror or target can be further clearly separated, the adjustment position can be easily determined, and the amount of mirror displacement can be accurately measured.

  Further, in the optical transmission device according to the present invention, the mirror adjusting device is configured by an automatic mirror device of a stepping motor driving method or a servo motor driving method, so that it is driven when the mirror is driven based on image processing information. The automatic adjustment mirror can be accurately driven according to the power amount, and the mirror can be adjusted at once without repeatedly adjusting the same mirror, so that faster optical axis adjustment is possible.

  Furthermore, in the optical transmission device according to the present invention, the image processing device compares a pre-registered image pattern with an image captured at the time of mirror adjustment, and a pattern matching device capable of detecting the amount of positional deviation of the captured image. By using a pattern matching processing device, it is possible to easily evaluate the shape and positional deviation of the target to be adjusted based on a pattern registered in advance when the target is adjusted once. The speed and accuracy of the axis adjustment can be improved, and the frequency with which the apparatus malfunctions can be reduced due to an erroneous recognition result of the image processing apparatus.

  In the method for adjusting an optical transmission device according to the present invention, an electro-optical imaging unit is provided on an extension line of the light source side optical axis of the optical transmission path combined with a mirror, and image information from the electro-optical imaging unit is processed. Then, the angle shift amount of the mirror from the normal position is measured by an image processing device, the mirror angle is input as the shift amount, the mirror tilt angle is controlled by a mirror adjustment device, and the electro-optic imaging means uses a light source. The first automatic adjustment mirror is observed through the first automatic adjustment mirror on the side, and the first automatic adjustment mirror is adjusted by the mirror adjustment device so that the observed mirror image is at the center. After mirror adjustment, the optical axis of the optical transmission path is adjusted by sequentially adjusting the automatic adjustment mirror using the same mirror adjustment method, so there is no need to install an electronic device such as a CCD camera in the optical transmission path. Even in such a strong environment lines, it is possible to adjust the optical axis remotely. Further, it is possible to perform remote adjustment with an electro-optical imaging means such as a single CCD camera without installing a CCD camera for each mirror location in the optical transmission path, and further includes an image processing device. Therefore, it becomes possible to automatically adjust the automatic adjustment mirror by automatically measuring the deviation amount of the mirror based on the image taken by the electro-optical imaging means.

  Embodiments of an optical transmission apparatus and an adjustment method thereof according to the present invention will be described with reference to the accompanying drawings.

[First Embodiment]
FIG. 1 is a basic configuration diagram showing a first embodiment of an optical transmission apparatus according to the present invention.

  In FIG. 1, reference numeral 10 denotes an optical transmission apparatus that transmits laser light in the air. This optical transmission device 10 combines a mirror and outputs an optical transmission means 12 as a laser light guiding means constituting the optical transmission path 11, and outputs a main laser beam for processing, inspection, preventive maintenance or repair to this optical transmission path 11. And a guide laser device 14 that outputs guide laser light as guide light for adjusting the optical axis of the optical transmission path 11.

  The main laser light output from the main laser device 13 is guided to the optical transmission path 11 via the dichroic mirror 15 which is a light synthesizing means, is transmitted through the optical transmission path 11 in the air, and is guided to the laser irradiation head 16. The object 17 is irradiated from the laser irradiation head 16 so that the object 17 is processed, inspected, prevented, or repaired.

  FIG. 1 shows an example in which a YAG laser device is adopted as the main laser device 13. An example is shown in which main laser light oscillated from a YAG laser device is guided in an optical transmission line 11 by an optical transmission device 10 and an object 13 is irradiated with, for example, a reactor internal structure in a radiation environment. In addition to the YAG laser, various laser devices such as a carbon dioxide gas laser and a pulse laser are employed for the main laser device 13.

  The light transmission path 11 constituting the light transmission means 12 is covered with a shield tube 18 such as a laser light guide tube or a light guide tube, and the laser light is transmitted through the shield tube 18 in the air. The guide laser beam output from the guide laser device 14 is guided to the optical transmission path 11 on the upstream side optical transmission path 11 of the dichroic mirror 15 through the half mirror guide means 19. The guide laser device 14 is a He—Ne laser that outputs circularly polarized guide laser light. Other than the He—Ne laser, any laser beam having a wavelength different from that of the main laser beam may be used, and the guide laser beam may be a non-polarized laser beam.

  The dichroic mirror 15 constitutes a light synthesizing mirror means, and is designed to have a large reflectance for laser light in the vicinity of the wavelength of the main laser light and to transmit most of the other wavelength laser light. The half mirror of the half mirror guide means 19 is designed to have a reflectivity of about 50% with respect to the guide laser beam and to have high transmission characteristics with respect to laser beams of other wavelengths.

  A plurality of, for example, six automatic mirrors and one fixed mirror are incorporated in the optical transmission path 11. In FIG. 1, four (first to fourth) automatic adjustment mirrors 21, 22, 23, and 24 in the optical transmission path 11, and an automatic angle adjustment mirror (automatic adjustment mirror) 25 as two angle fine adjustment mirrors. 26 and one fixed mirror 27 are arranged. Each of the automatic adjustment mirrors 21, 22, 23, 24 is adjusted in mirror tilt angle by a mirror adjustment device 30 driven by a control device 29, while each of the automatic angle adjustment mirrors 25, 26 is also a mirror driven by the control device 29. The mirror tilt angle is adjusted by an angle adjusting device (mirror adjusting device) 31.

  Each of the automatic angle adjustment mirrors 25 and 26 constituting the optical transmission line 11 is installed on the upstream side of the first and second automatic adjustment mirrors 21 and 22, while the automatic angle adjustment mirror 26 and the third The first to fourth image processing targets 33, 34, 35, and 36 are disposed on the optical transmission path 11 near the fourth automatic adjustment mirrors 23 and 24 and the fixed mirror 27.

  Each of the targets 33, 34, 35, and 36 is a plate material made of aluminum, the surface of which is blasted and arranged so as to cross the optical transmission path 11. Each target 33, 34, 35, 36 is formed in various shapes such as a torus shape, a washer shape, a ring shape, and a square shape, and transmits light, for example, a light transmission hole is formed in the central portion.

  The light transmission path 11 is provided with lamps 38, 39, 40, and 41 as illumination devices so that the vicinity of the respective image processing targets 33, 34, 35, and 36 can be irradiated. Each of the lamps 38, 39, 40, 41 is individually turned on or off by the lamp blinking control means 43 in accordance with a control command from the control device 11.

  Further, the third automatic adjustment mirror 24 provided in the middle of the optical transmission path 11 constitutes a sampling separation mirror means 24. The separation mirror means 24 is composed of a half mirror or a wavelength separation mirror that separates the guide laser light from the optical transmission path 11. The separation mirror means 24 is a mirror having a transmittance of about 50% in the vicinity of the wavelength of the guide laser light and having a high reflectivity with respect to the main laser light and the like other than the guide laser light.

  On the optical path 44 separated by the separation mirror means 24, a quarter wavelength plate 45 as a polarization optical means and a retro reflector 46 as a parallel reflection optical means are installed. The quarter wavelength plate 45 performs polarization of the laser light guided to the separation optical path 44. For example, when the quarter wavelength plate 45 is passed, the circularly polarized laser light is converted into linearly polarized light, and the linearly polarized laser light is converted into linearly polarized laser light. It is converted to circularly polarized light.

  Further, the retroreflector 46 uses a parallel reflection optical element such as a corner cube prism or a hollow corner cube formed by combining three mirrors, but uses a parallel reflection optical element represented by a cat's eye optical system. Also good.

  When the laser beam is incident on the center, the retroreflector 46 reflects the reflected beam through the same path as the incident beam. When the laser beam is incident off the center, the retroreflector 46 reflects the incident beam from a position symmetrical to the center. Reflected in parallel.

  The fixed mirror 27 arranged on the optical transmission path 11 near the laser irradiation head 16 also constitutes a separation mirror means. As this fixed mirror 27, a mirror having a high transmittance with respect to the main laser beam and a high reflectance with respect to the guide laser beam is used. A retro-reflector 49 as parallel reflection optical means is disposed on the optical path 48 separated by the separation mirror means 27. The retro-reflector 49 reflects the circularly polarized incident laser beam with its polarization rotation direction reversed, and constitutes a laser beam misalignment detecting means.

  By the way, the detection guide optical path 51 in which the reflected guide laser light from the retroreflectors 46 and 49 is guided in the vicinity of the half mirror guide means 19 for guiding the guide laser light that is the output guide light from the guide laser device 14 is optically transmitted. A CCD camera 52 that is formed as an extension of the light source side optical axis of the path 11 and that constitutes a camera system as an electro-optical imaging means is installed in the detection guide optical path 51. The CCD camera 52 includes a notch filter 53 that transmits light other than the wavelengths of the main laser light and the guide laser light, and a lens 54 that can electrically adjust a focal length and a focal position. The optical axis is adjusted so that it is coaxial with the main laser beam. Image information detected by the CCD camera 52 is input to the image processing device 55 and processed.

  In the image processing device 55, a reference image is registered in advance, and the registered image and the camera image observed by the CCD camera 52 are compared by pattern matching processing, and target positional deviation information on the image is controlled. It is output to the device 29. The image processing device 55 is provided with a pattern matching device. The control device 29 inputs positional deviation information, and drives the mirror adjusting device 30 in a direction to eliminate or minimize the positional deviation.

  A dichroic sampling mirror 57 is installed in the middle of the detection guide optical path 51, and the sampling optical path 58 is branched by the dichroic sampling mirror 57. The sampling optical path 58 is formed as an extension of the optical axis on the light source side of the optical transmission path 11, and this sampling optical path 58 is guided by parallel reflection optical means such as retroreflectors 46 and 49 installed in the optical transmission apparatus. Laser light is guided.

  In the sampling optical path 58 through which the reflected guide laser light is guided, a quarter wavelength plate 60 that is a polarization optical means, an interference filter 61 that passes only the reflected guide laser light, and the reflected guide laser light that has passed through the interference filter 61 are received. And a polarization beam splitter 62 as a light separating means to be split. Each reflected guide laser beam divided by the polarization beam splitter 62 is input to each optical position detection device 63, 64, and the optical position detection device 63, 64 detects the incident position of the guide laser beam to calculate the optical axis deviation amount. It is calculated by processing.

  As the optical position detection devices 63 and 64, there are a four-quadrant detector, a pointing detector, and a CCD element. The 4-quadrant detector converts the equilibrium state of the incident power of the reflected guide laser light on the photocathode divided into 4 quadrants as a beam incident position, and detects the positional deviation amount of the optical transmission line 11. The positional deviation amount of the guide laser light detected by the optical position detection devices 63 and 64 is converted into an electrical signal by the signal processing device 65 and input to the control device 29, and the direction in which the positional deviation amount is eliminated by the control device 29 or The operation of the mirror adjusting device 30 or the mirror angle adjusting device 31 is controlled so that the amount of positional deviation is minimized.

  The automatic adjustment mirrors 21 to 24 that are controlled by the mirror adjustment device 30 are automatic mirrors in which a mirror is installed on a biaxial tilting stage driven by a stepping motor. The automatic adjustment mirrors 21 to 24 are supplied from the control device 29. The mirror adjusting device 30 drives a stepping motor driver (not shown) in accordance with the control command so that the mirror angle can be adjusted. The automatic adjustment mirrors 21 to 24 driven by the stepping motor have a feature that they have a wide driving range although their operation speed is slow. A drive mechanism such as a servo motor may be used instead of the stepping motor.

  The automatic angle adjustment mirrors (automatic adjustment mirrors) 25 and 26 controlled by the mirror angle adjustment device 31 are automatic fine adjustment mirrors, and the automatic angle adjustment mirrors 25 and 26 are driven by an electrostrictive element (PZT). This is a PZT automatic mirror in which a mirror is installed on the two-axis tilt stage, and the mirror angle adjustment device 31 can finely adjust the mirror angle according to a control command from the control device 29.

  When electrostrictive element driving mirrors are used as the automatic angle adjusting mirrors 25 and 26, the mirror operating range is narrow, but the mirror angle can be adjusted at high speed and with high accuracy. Even if a galvanometer-driven mirror is employed as the automatic angle adjusting mirror instead of the electrostrictive element driving mirror, the same function is achieved.

  The automatic angle adjustment mirrors 25 and 26 have a high reflectance with respect to main laser light (for example, YAG laser light), guide laser light (for example, He-Ne laser light), and light in a wavelength region observed by the CCD camera 52. Mirrored. The distance between the automatic angle adjustment mirror 25 and the first automatic adjustment mirror 21 and the distance between the automatic angle adjustment mirror 26 and the second automatic adjustment mirror 22 are sufficiently larger than the transmission distance of the optical transmission line 11. A close approaching relationship is maintained.

[Operation of optical transmission equipment]
Next, the operation of the optical transmission apparatus according to the present invention will be described.

  Before performing laser processing, inspection, preventive maintenance, or repair of an object using the optical transmission apparatus 10, alignment adjustment of the optical transmission path 11 of the optical transmission apparatus 10 is performed. The alignment adjustment includes rough adjustment work for the purpose of securing the rough optical transmission path 11, fine adjustment using the parallel reflection optical means 46 and 49 after the rough adjustment work, vibration of the optical transmission path 11, and the like. This is performed separately from the vibration correction work for compensating for the positional deviation caused by. In this sense, the optical transmission apparatus 10 is provided with an optical path coarse adjustment means for roughly adjusting the optical transmission path 11 and an optical path fine adjustment means for finely adjusting the optical transmission path 11, both of which are remotely operated. By doing so, it can be performed automatically. The optical path fine adjustment means is a control means for performing feedback control of the automatic adjustment mirrors 25 and 26 at high speed, and can also perform vibration correction work by external vibration.

[Coarse adjustment of optical transmission line]
Since the CCD camera 52 coincides with the optical axis of the laser light guided through the optical transmission path 11, the optical axis of the laser light is at the center of the image photographed by the CCD camera 52. For this reason, if the CCD camera 52 is photographed while changing the focal position and focal distance, the transmission position of the laser light at an arbitrary position of the optical transmission path 11 can be confirmed. Coarse adjustment of the optical transmission line 11 is performed by sequentially adjusting the automatic adjustment mirrors 21 to 24.

[Adjustment work of automatic adjustment mirror]
First, the adjustment procedure of the first automatic adjustment mirror 21 will be described.

  The optical transmission line 11 is covered with a shield tube 18 so that light does not leak outside, and the image processing target 33 cannot be observed without illumination. For this reason, the lamp flashing control means 43 is operated by the control device 29, the lamp 38 located on the downstream side of the first automatic adjustment mirror 21 is turned on, and only the image processing target 33 is illuminated. By illumination of the target 33, the target 33 can be selectively observed with the CCD camera 52, and a mirror image of the first automatic adjustment mirror 21 can be observed.

  Simultaneously with the illumination of the lamp 38, in response to a command from the signal processing device, the zoom position and the focal position of the CCD camera 52 can be grasped in advance so that the shape of the image processing target 33 and thus the mirror image of the first automatic adjustment mirror 21 can be sufficiently grasped. Adjust to the set position.

  By setting the zoom position and the focal position of the CCD camera 52, the target 33 can be observed by the CCD camera 52 via the automatic adjustment mirrors 25 and 21. At this time, if the installation angle of the automatic adjustment mirror 21 is deviated, the position of the target 33 on the photographed image appears to deviate from the center of the photographing screen.

  The image processing device 55 registers in advance a reference image when the target 33 appears to be centered, and compares this registered image with an observed camera image by pattern matching processing. The amount of the target position on the image shifted from the center is calculated by the pattern matching process, and the calculation result (image shift amount) is output from the image processing device 55 to the control device 29. The control device 29 drives the mirror adjusting device 30 based on the image shift information to adjust the mirror angle of the automatic adjustment mirror 21 so that the image shift amount is eliminated or minimized. By this mirror angle adjustment, the target 33 is adjusted to be at the center position on the image photographed by the CCD camera 52.

  By adjusting the mirror angle of the automatic adjustment mirror 21, the target 33 becomes visible at the center of the image taken by the CCD camera 52, which means that the laser beam passes through the center position of the target 33. To do. Coarse adjustment of the automatic adjustment mirror 21 is completed by positioning the target 33 at the center of the captured image of the CCD camera 52.

  After the rough adjustment of the automatic adjustment mirror 21 is completed, the next rough adjustment operation of the automatic adjustment mirror 22 is performed. This rough adjustment basically conforms to the adjustment work of the automatic adjustment mirror 21.

  That is, after the coarse adjustment of the automatic adjustment mirror 21, the lamp blinking means 43 is operated by a command from the control device 29 to turn off the lamp 38 and turn on only the next lamp 39.

  Simultaneously with the lighting of the lamp 39, the zoom position and the focal position of the CCD camera 52 are adjusted to preset positions so that the shape of the target 34 can be sufficiently grasped by a command from the signal processing device.

  After adjusting the zoom position and focus position of the CCD camera 52, the image processing target 34 can be observed through the automatic adjustment mirrors 25, 21, 26, and 22, and the mirror image of the automatic adjustment mirror 22 can be observed. If the installation angle of the automatic adjustment mirror 22 is deviated, the position of the target 34 on the image photographed by the CCD camera 52 appears to deviate from the center of the photographing screen.

  The image processing device 55 registers in advance a reference image when the target 34 appears to be centered, and compares this registered image with an observed camera image (mirror image) by pattern matching processing. The result of calculating how far the position of the target 34 on the image is off the center by pattern matching processing (image shift amount, angle shift amount) is output from the image processing device 55 to the control device 29.

  Based on the image shift information, the control device 29 drives the mirror adjusting device 30 so that the target 34 is positioned at the center of the image captured by the CCD camera 52 and adjusts the angle of the automatic adjustment mirror 22.

  By adjusting the mirror angle of the automatic adjustment mirror 22, the target 34 can be seen at the center of the image taken by the CCD camera 52. This means that the laser beam passes through the center position of the target 34. By positioning the target 34 at the center of the image captured by the CCD camera 52, the rough adjustment of the automatic adjustment mirror 22 is completed.

  After the rough adjustment of the automatic adjustment mirror 22 is completed, the same rough adjustment operation is performed with the combination of the lamp 40, the target 35, and the automatic adjustment mirror 23, and the rough adjustment operation of the automatic adjustment mirror 23 is performed. When the rough adjustment of the automatic adjustment mirror 23 is completed, the same rough adjustment operation is performed by the combination of the lamp 41, the target 36, and the automatic adjustment mirror 24, and the rough adjustment of the automatic adjustment mirror 24 is performed.

  By sequentially adjusting each of the automatic adjustment mirrors 21, 22, 23, and 24, there is no need for an operator to approach each point (bending point) of the optical transmission path 11, and rough adjustment of the optical transmission path 11 is automatically performed. be able to. By this rough adjustment, the main laser beam can be transmitted to the target point in the optical transmission line 11.

[Fine adjustment of optical transmission line]
Next, the fine adjustment operation of the optical transmission line 11 and the function of correcting the vibration of the optical transmission line will be described.

  After the rough optical path adjustment of the optical transmission path 11 is completed by the rough adjustment work, the fine adjustment work and the vibration correction function of the optical transmission path 11 are operated.

  First, for example, a He—Ne laser is used in the guide laser device 14 of FIG. 1 so that the guide laser light as the emitted guide light is adjusted in advance so as to be a clockwise circularly polarized beam.

  This circularly polarized guide laser beam is branched into two laser beams, a reflected beam and a transmitted beam, at the position of an automatic adjustment mirror 24 as a sampling separation mirror means. When the guide laser light that has passed through the automatic adjustment mirror 24 passes through the quarter-wave plate 45, the polarization direction defined by this polarization characteristic axis is converted into a linearly polarized laser beam.

  The linearly polarized laser beam is subsequently reflected by the retroreflector 46 and returns to the quarter-wave plate 45 again. The retro-reflector 46 has a light characteristic of reflecting the incident laser beam in parallel with the incident beam regardless of the angle.

  That is, when the light enters the center of the retroreflector 46, the reflected laser beam is reflected through the same path as the incident laser beam. When the light is incident from the center, the light is reflected in parallel with the incident laser beam from a position shifted to a symmetrical position with respect to the center.

  In this embodiment, the retroreflector 46 is configured by a parallel reflection optical element having a hollow corner cap in which three mirrors are combined. The polarization of the reflected laser beam from the retroreflector 46 has the same polarization direction as that of the incident laser beam. Reflected as linearly polarized light.

  Since the linearly polarized laser beam reflected by the retroreflector 46 reenters the quarter-wave plate 45 from the opposite direction, it is returned as a circularly polarized reflected laser beam having the same rotational direction as the incident light. The return laser beam travels back along the incident optical transmission path 11 and returns to the light source side of the guide laser device 14.

  On the light source side of the guide laser device 14, only the reflected guide beam is reflected by the dichroic sampling mirror 57 to the sampling optical path 58 and sampled. The reflected guide laser beam guided to the sampling optical path 58 is converted by the quarter wavelength plate 60 into a linearly polarized laser beam. Here, when the incident laser beam is circularly polarized, the positional relationship between the quarter wavelength plate 60 and the polarizing beam splitter 62 depends on the rotational direction of the circularly polarized light, that is, whether it is clockwise or counterclockwise circularly polarized. Adjustment is made so as to be distributed to the position detection device 63 or 64.

  Further, since the interference filter 61 is installed in the middle of the sampling light path 58, light other than the wavelength of the guide laser light cannot reach the position detection devices 63 and 64.

  By the way, when the reflected laser beam from the retro reflector 46 is reflected by the dichroic sampling mirror 57, it is clockwise circularly polarized with respect to the traveling direction.

  As a result, only the reflected beam of the guide laser light from the retroreflector 46 is incident on one position detection device 63.

  The incident position of the laser beam incident on the optical position detection device 63 is converted into an electric signal by the signal processing device 65 and is taken into the control device 29 as control information.

  On the other hand, the guide laser light reflected by the automatic adjustment mirror 24 travels in the direction of the fixed mirror 27, and only the He—Ne laser light of the guide laser light is reflected by the fixed mirror 27 toward the retroreflector 49, and the remaining lasers The light is transmitted and guided to the laser irradiation construction head 16.

  Like the retro reflector 46, the retro reflector 49 is a combination of three plane mirrors. Therefore, light incident as circularly polarized light is reflected with its polarization direction reversed. The guide laser light reflected by the retroreflector 49 returns in the opposite direction to that of the incident beam, and reaches the dichroic sampling mirror 57 through the optical transmission path 11.

  At this time, the direction of the circularly polarized light of the reflected guide laser light returned from the retroreflector 49 is opposite to the direction of the circular deflection of the reflected guide laser light returned from the other retroreflector 46.

  For this reason, the reflected guide laser light from the retroreflector 49 is incident on the optical position detection device 64 side, and the positional deviation information of the guide laser beam at the position of the retroreflector 49 is sent to the control device 29 via the signal processing device 65. Can be given.

  In the fine adjustment work of the optical transmission line 11, it becomes possible for the control device 29 to recognize the positional deviation information at the positions of the retroreflector 46 and the retroreflector 49 by separating them by detecting the reflected guide beam. .

  Based on the light (beam) positional deviation information at these two locations, the control device 29 drives the mirror angle adjusting device 31 so that the positional deviation of the reflected laser beam is eliminated or minimized, and the automatic angle adjusting mirror is driven. Feedback control for adjusting the angles of 25 and 26 is performed.

  The position detection devices 63 and 64, the signal processing device 65, the control device 29, and the automatic angle adjustment mirrors 25 and 26 that are used for fine adjustment of the optical transmission line 11 all have fast response characteristics. Depending on the speed, it is possible to correct a beam position shift caused by vibrations of the automatic angle adjustment mirrors 25 and 26. Further, the transmission position of the laser beam can be controlled according to the accuracy of the retro reflectors 46 and 49 and the position detection devices 63 and 64 and the control accuracy of the automatic angle adjustment mirrors 25 and 26.

  In the optical transmission device 10 of the present embodiment, the fluctuation of the laser beam due to air and mechanical vibration generated during long distance transmission using the automatic adjustment mirror can be corrected, so that the object 17 can be stably stably for a long time. A laser beam can be transmitted to the irradiation point.

  In the optical transmission device 10 of the present embodiment, the optical axis of the laser light transmission path 11 and the measurement axis of the CCD camera 52 to be observed are the same as the common axis. Can be observed linearly from the exit side to the exit side, the angle deviation of the optical axis can be calculated from the positional deviation on the exit side, and the optical axis can be roughly adjusted by using the automatic adjustment mirrors 21 to 24 by the amount of deviation. . For this reason, it is not necessary to install an electronic imaging device such as the CCD camera 52 in the middle of the optical transmission path 11, and the optical axis of the optical transmission path 11 is automatically and stably adjusted remotely even in an environment with strong radiation. It becomes possible.

  Further, it is possible to perform remote adjustment with one CCD camera 52 without installing a CCD camera for each position of the automatic adjustment mirror in the optical transmission path 11. Since the image information input to the CCD camera 52 is input to the image processing device 55 and image shift information is obtained, the angle shift amounts of the automatic adjustment mirrors 21 to 24 are automatically set based on the images taken by the CCD camera 52. It is possible to automatically adjust the self-adjusting mirrors 21 to 24.

  Further, the optical transmission device 10 is provided with image processing targets 33 to 36 in the vicinity of mirrors 26, 23, 24, and 27 used for optical transmission, and the optical axis angular deviation from the positional deviation of the targets 33 to 36. Thus, the optical axis can be adjusted using only the mirrors 26, 23, 24, and 27 immediately before the targets 33 to 36 where the positional deviation has occurred. That is, when the automatic adjustment mirrors 21 to 24 in the optical transmission path 11 are remotely adjusted, the position to be adjusted and transmitted can be clarified, and the processing contents can be simplified in the image processing.

  Further, the positions of the mirror and the target on the optical axis of the optical transmission path 11 that is currently being adjusted are clearly determined according to the shapes of the image processing targets 33 to 36, and the position to be adjusted can be easily determined. Thus, it is possible to accurately measure the shift amount of the automatic adjustment mirrors 21 to 24.

  In the optical transmission device 10 according to the present embodiment, lamps 38 to 41 as illumination devices are installed in the vicinity of the mirrors 26, 23, 24, and 27 used for transmission, and each target 33 observed by the CCD camera 52 is observed. If only the illumination of ˜36 is turned on, it is possible to know what target deviation is corrected, and it is possible to calculate the positional deviation with a clearer camera image. That is, since the positions of the targets 33 to 36 at the positions downstream of the automatic adjustment mirrors 21 to 24 that are currently being adjusted can be clearly separated from other mirrors and target images, the position of the mirror image to be adjusted is determined. It is possible to easily measure the amount of mirror displacement.

  In this optical transmission device 10, the mirror adjustment device 30 driven by the control device 29 is a stepping motor drive type or servo motor drive type automatic mirror device, and the automatic adjustment mirrors 21 to 24 are based on image processing information. Since the automatic adjustment mirrors 21 to 24 can be accurately driven in accordance with the amount to be driven, the same automatic adjustment mirrors 21 to 24 can be adjusted once without being repeatedly adjusted. Since the mirror angle can be adjusted, the optical axis can be adjusted more quickly.

  Further, since the optical transmission device 10 has a pattern matching function added to the image processing device 55 of the CCD camera 52, the registered image of the optical transmission path 11 recorded in advance can be compared with the observed image. Even when the laser beam irradiation point cannot be observed by the CCD camera 52, the angular deviation of the optical axis can be calculated and the optical axis can be adjusted. That is, by providing the image processing device 55 with a pattern matching processing device, the shapes and positional deviations of the targets 33 to 36 corresponding to the automatic adjustments 21 to 24 that are currently being adjusted are registered when they are once adjusted. It becomes possible to easily evaluate based on the pattern. For this reason, the speed and accuracy of the optical axis adjustment of the optical transmission path 11 can be improved, and furthermore, the frequency with which the optical transmission apparatus 10 malfunctions due to an erroneous image recognition result of the image processing apparatus 55 can be reduced. It becomes possible.

  Furthermore, the optical transmission device 10 according to the present embodiment includes an optical transmission unit 12 that configures the optical transmission path 11 by combining one or more mirrors, and includes a part of the mirrors or the entire mirror that configures the optical transmission path 11. The mirror includes mirror adjusting devices 30 and 31 that can remotely control the tilt angle of the mirror. The optical transmission apparatus 10 uses a part of the mirrors on the optical transmission line 11 as semi-transmission mirrors or wavelength separation mirrors as the separation mirror means 24 and 27, and the reflected light of the guide laser light divided by the separation mirror means 24 arrives. A control device 29 for driving an automatic mirror device as the mirror angle adjusting device 31 by calculating the position information output from the optical position detection devices 63 and 64 and installing the optical position detection devices 63 and 64 at the positions to be operated. Therefore, the accuracy can be made higher than that of the mirror displacement measurement method using the CCD camera 52. In addition, since the position measurement speed can be made much faster than when the CCD camera 52 is used, even in the case where the optical axis is shaken due to the vibration of the device, the automatic angle adjustment mirror is in a direction to cancel the optical axis deviation caused by this. 25 and 26 can be driven at high speed to eliminate the influence of external vibration.

  Since this optical transmission device 10 includes a guide laser device 14 in addition to the main laser device 13 that outputs the main laser light, the main laser light that is the laser light to be transmitted has a variable element such as a low repetition pulse laser. Even in this case, since the optical path can be adjusted with reference to the guide laser beam emitted from the separate guide laser device 14 for adjusting the optical axis, stable light transmission is possible.

  Further, in the optical transmission device 10, a part of the automatic adjustment mirror 24 and the fixed mirror 27 on the optical transmission line 11 are constituted by separation mirror means such as a semi-transmission mirror or a wavelength separation mirror. Parallel cube optical prisms 46 and 49 typified by corner cube prisms, hollow corner cubes and cat's eye optical elements installed at the position where the divided guide laser beam reaches, and half mirrors installed on the guide laser device 14 side Means 19, optical position detectors 63 and 64 installed after the half mirror means 19, and a control device for driving the automatic mirror device 31 by calculating the position information output from the optical position detectors 63 and 64 29, the amount of misalignment of light can be measured without installing electro-optical components such as the optical position detectors 63 and 64 in the optical transmission line 11. It becomes possible to. For this reason, complicated wiring becomes unnecessary, and it can be applied even in an environment where radiation is strong, and the generation of nozzles can be prevented and the S / N ratio can be increased.

  Further, the optical transmission device 10 of the present embodiment includes a guide laser device 14 that oscillates with non-polarized light or circularly polarized light separately from the main laser device 13 that outputs laser light to be transmitted. Separation mirror means 24 and 27 such as semi-transmission mirrors or wavelength separation mirrors are installed on some of the mirrors on the optical transmission line 11 at the portions. While a polarizing optical element 45 installed at a position where the guide laser beam divided by the separation mirror means 24 and a parallel reflection optical element 46 represented by a corner cube prism, a hollow corner gap, and a cat's eye optical element are installed, The half mirror means 19 and 57 installed on the guide laser device 14 side, the polarizing optical element 60 installed following the half mirror means 19 and 57, the two optical position detectors 6 and 64, and the optical position detection thereof. A control device 29 for driving the automatic mirror device 31 as the mirror angle adjusting means by processing the position information output from the devices 63 and 64 is provided. For this reason, it becomes possible to provide two places where the position deviation of the guide laser beam is measured by one type of guide laser device 14 using the polarization characteristics of light.

  Further, an automatic mirror device driven by an electrostrictive element or an automatic mirror device driven by a galvanometer is used for the automatic mirror device 31 as a mirror angle adjusting means, and a PSD (Position Sensitive Detectors) device is used for the optical position detection devices 63 and 64. Alternatively, since the optical position detection element using the split type photodiode element is used, even when the optical transmission device 10 is affected by vibration having a higher frequency component from the outside, the influence of the optical axis deviation due to vibration is also affected. It becomes possible to lose. The optical transmission apparatus 10 can be consistently automated from rough optical path adjustment of the optical transmission path 11 to fine adjustment of the optical path and removal of the influence of vibration.

  Further, even when the main laser device 13 is installed at a place away from a place where material processing or inspection of the object 17 is performed, stable laser processing and inspection can be performed. Furthermore, the optical transmission device 10 can stably transmit a high-power laser beam to the optical transmission line 11 when the object 17 is a reactor internal structure and the object 17 is repaired. In addition to the reliable construction, the CCD camera 52 can remotely photograph the transmission position using the same optical transmission path 11.

[Second Embodiment]
FIG. 2 is a basic configuration diagram showing a second embodiment of the optical transmission apparatus according to the present invention.

  The optical transmission device 70 shown in the second embodiment is different from the optical transmission device 70 shown in the first embodiment in that a plurality of guide laser devices 71 and 72 having different oscillation wavelengths of laser light are provided. On the other hand, the plurality of guide laser devices 71 and 72 are basically provided, so that the polarization optical means becomes unnecessary and the configuration of the sampling detection path 73 is different. Since other configurations are not substantially different from those of the optical transmission apparatus 10 shown in the first embodiment, the same reference numerals are given and the description will be simplified.

  FIG. 2 shows an example in which two guide laser devices 71 and 72 are provided. The He-Ne laser device for causing the first guide laser device 71 to oscillate He-Ne laser light and the other second guide laser device are shown. Reference numeral 72 shows an example in which a He—Cd laser device having an oscillation wavelength different from that of the He—Ne laser beam is provided.

  The red guide laser light (He—Ne laser light) output from the first guide laser device 71 is combined with the purple guide laser light (He—Cd laser light) output from the second guide laser device 72 by the light combining means. The light is combined by a certain dichroic mirror 74 and is input to the optical transmission path 11 from the half mirror which is the half mirror guide means 19 through the dichroic mirror 15 of the light combining means.

  On the other hand, the main laser device 13 as a light source is, for example, a carbon dioxide laser device, and the main laser light (carbon dioxide laser light) output from the main laser device 13 passes through the dichroic mirror 15 which is a light combining means to the optical transmission path 11. It is guided and transmitted in the air through the optical transmission path 11 combined with a mirror and guided to a laser irradiation head (laser irradiation construction head) 16, from which an object such as an in-reactor structure that is the object 17. The laser irradiation unit is irradiated to perform processing, inspection, preventive maintenance or repair of the object 17. In addition to the carbon dioxide gas laser, a YAG laser, a pulse laser, or another laser is selected as the main laser device 13 according to applications such as processing, inspection, preventive maintenance, or repair of the object 17.

  Two guide laser beams are guided by the synthesis dichroic mirror 15 so as to have a common axis with the main laser beam guided to the optical transmission path 11. The dichroic mirror 15 is designed so that only light in the vicinity of the wavelength of carbon dioxide laser light, which is main laser light, has a large reflectance, and most of light of other wavelengths can be transmitted.

  The half mirror of the half mirror means 19 for guiding the guide laser light as the guide light from the first and second guide laser devices 71 and 72 to the optical transmission path 11 side is He-Cd laser light which is guide laser light and It is designed to have a partial reflection characteristic with a reflectance of about 50% at the wavelength of the He—Ne laser beam and to increase the transmission characteristic at other wavelengths.

  The guide laser beams output from the first and second guide laser devices 71 and 72 are guided into the optical transmission path 11 by the dichroic mirrors 73 and 15 and the half mirror optical means 19 which are light combining means, and are transmitted into the optical transmission path 11. Is scanned. The guide laser beam scanned in the optical transmission path 11 is guided, for example, by a first guide laser beam (He-Ne laser beam) to the separation optical path 44 by the automatic adjustment mirror 24 which also functions as a separation mirror unit, and also by the separation mirror unit. For example, the second guide laser beam (He-Gd laser beam) is guided to the separation optical path 48 by a certain fixed mirror 27.

  The automatic adjustment mirror 24 constituting the separation mirror means has transmission and reflection characteristics with a high wavelength transmittance with respect to the first guide laser beam (He-Ne laser beam), for example, light of other wavelengths, main laser beam, This is a mirror having a high reflectance with respect to the second guide laser beam. The fixed mirror 27, which is another separation mirror means, is a mirror having a high wavelength reflectance of the second guide laser light and a high transmittance with respect to light of other wavelengths and the main laser light.

  The guide laser beams guided to the separation optical paths 44 and 48 are reflected in parallel by retroreflectors 46 and 49 as parallel reflection optical means and returned to the original optical transmission path 11. The retroreflectors 46 and 49 are prism type parallel reflection elements, but instead of the retro reflectors 46 and 49, parallel reflection optical elements such as a cat's eye optical system may be used.

  The guide laser light returned through the optical transmission path 11 is transmitted to the dichroic sampling mirror 57 through the dichroic mirror 15 and the half mirror means 19, and is guided to the sampling detection path 73 side by the dichroic sampling mirror 57.

  The first and second guide laser beams are transmitted through the sampling detection path 73, an interference filter 76 that cuts light having a wavelength other than the first and second guide laser beams, and a light separating unit that divides the transmitted guide laser beam into two. A dichroic mirror 77 is provided. The dichroic mirror 77 separates the wavelength of the transmitted guide laser beam into a first guide laser beam (He—Ne laser beam) and a second guide laser beam (He—Ge laser beam). For example, the first guide laser beam is transmitted and the second guide laser beam is reflected.

  The wavelength-separated first guide laser light is guided to the optical position detection device 79 through the interference filter 78, and the optical position detection device 79 detects the amount of optical position deviation of the first guide laser light, and the signal processing device 65 It is supposed to be sent. The interference filter 78 transmits only light in the vicinity of the wavelength of the first guide laser light and cuts other light.

  Further, the second guide laser light wavelength-separated by the dichroic mirror 77 of the light separation means is guided to the optical position detection device 81 through the interference filter 80 that allows only the second guide laser light to pass therethrough. The amount of optical displacement of the second guide laser beam is detected, and the detection signal is sent to the signal processing device 65.

  In the signal processing device 65, the detection signal of the optical position (optical axis) deviation amount of both guide laser beams is signal-processed, converted into an electrical signal, and input to the control device 29. The control device 29 and the mirror adjusting means 30 and The drive of the mirror angle adjustment (fine adjustment) means 31 is controlled, and the operation of the automatic adjustment mirrors 21, 22, 23, and 24 and the automatic angle adjustment (fine adjustment) mirrors 25 and 26 are controlled to eliminate the optical axis deviation amount. Or adjusted to minimize.

  Further, the reflected guide laser beam that is not reflected by the dichroic sampling mirror 57 toward the sampling detection path 73 but is transmitted is guided to a CCD camera 52 as an electro-optical imaging means. The CCD camera 52 is a camera system including a notch filter 52 capable of transmitting light other than the wavelengths of main laser light (carbon dioxide laser light) and guide laser light, and a lens 53 capable of electrically adjusting the focal length and position. The optical axis direction that can be adjusted is set so as to be coaxial with the main laser beam.

  The image output from the CCD camera 52 is captured by the image processing device 55 and processed. The center position image of the target is registered in the image processing device 55 in advance, and the registered image and the image observed by the CCD camera 52 are compared by pattern matching processing, and the amount of deviation of the observed image from the reference registered image Is detected. The detected image shift amount is input to the control device 29 and processed. The control device 29 drives and controls the mirror adjustment device 30 to adjust the angles of the automatic adjustment mirrors 21, 22, 23, and 24 so that the image shift amount is eliminated or minimized.

  On the other hand, the optical transmission line 11 is configured by combining, for example, six automatic mirrors and fixed mirrors capable of remotely adjusting the reflection angle of light. The automatic mirror includes, for example, four automatic adjustment mirrors 21, 22, 23, and 24 and automatic angle adjustment (fine adjustment) mirrors 25 and 26.

  Among these, the automatic adjustment mirrors 21, 22, 23, and 24 are automatic mirrors in which a mirror is installed on a biaxial tilting stage driven by a stepping motor, and configure the mirror adjustment device 30 in accordance with a control command from the control device 29. The mirror angle can be adjusted by a stepping motor driver. An automatic mirror driven by a stepping motor has a low operating speed, but can have a wide driving range.

  Moreover, you may make it have a drive mechanism, such as a servomotor, instead of a stepping motor.

  The automatic angle adjustment mirrors 25 and 26 are PZT automatic mirrors in which a mirror is installed on a biaxial tilt stage driven by an electrostrictive element (PZT). Each of the automatic angle adjustment mirrors 25 and 26 is controlled by a control device 29. The operation of the mirror angle adjusting device 31 is controlled in accordance with a command so that the mirror angle can be adjusted. An electrostrictive element (PZT) drive mirror is a fine adjustment mirror that generally has a narrow operating range but very high accuracy.

  Further, instead of the PZT automatic mirror, a galvanometer driven mirror or the like may be adopted for the automatic angle adjustment mirrors 25 and 26. The automatic angle adjusting mirrors 25 and 26 are mirrors having high reflectance in the wavelength of the guide laser light, the wavelength of the main laser light, and the wavelength region observed by the CCD camera 52.

  The distance between the automatic adjustment mirrors 25 and 21 and the distance between the automatic adjustment mirrors 26 and 22 are sufficiently close to the entire transmission distance of the optical transmission line 11.

  Further, targets 33 to 36 are respectively installed immediately before the automatic mirrors 26, 23, 24 and the laser irradiation head 16. Each of the targets 33 to 36 is a plate made of aluminum whose surface is blasted, and a donut shape having a hole in a light passage portion, a square shape, or other shapes are used.

  In the vicinity of each of the targets 33 to 36, lamps 38 to 41 as illumination devices are installed at positions where only the vicinity of the target can be brightly illuminated. These lamps 38 to 41 can be individually turned on or off by the lamp blinking control means 43 in accordance with a control command from the control device 29.

[Operation of optical transmission equipment]
In the optical transmission device 70 shown in FIG. 2, the main laser light output from the main laser device 13 is guided to the optical transmission means 12 by the dichroic mirror 15, passes through the optical transmission path 11 of the optical transmission means 12, and the laser irradiation head. 16, and the laser irradiation head 16 irradiates the target object 17, for example, a reactor internal structure. Processing, inspection, preventive maintenance, or repair work of the object 17 is performed by this laser light irradiation.

  Before the main laser beam from the main laser device 13 is transmitted in the inside of the light transmission means 12 and the object is irradiated from the laser irradiation head 16, the optical path of the light transmission path 11 constituting the light transmission means 12 is adjusted. The optical path adjustment of the optical transmission path 11 is divided into a rough adjustment operation using the targets 33 to 36 and the illumination device, and a fine adjustment operation using the guide laser devices 71 and 72 and parallel reflection optical means.

[Coarse adjustment of optical transmission line]
The rough adjustment work of the optical transmission path 11 is performed by installing a CCD camera 52 as an electro-optical imaging means so as to coincide with the optical axis of the laser light of the optical transmission path 11, It is set so that the optical axis is located. The CCD camera 52 can automatically adjust the position and distance of the focal point. If the CCD camera 52 is photographed by changing the position and distance of the focal point of the CCD camera 52, the laser light at an arbitrary position of the optical transmission path 11 is passed through. Can be recognized.

  First, the mirror angle adjustment procedure of the automatic adjustment mirror 21 will be described.

  The optical transmission line 11 is usually covered with a shield cylinder 18 and constitutes an air transmission means 12 for air transmission in which light does not leak outside. For this reason, since the target 33 cannot be observed without illumination, first, only the lamp 38 is turned on by the lamp blinking control means 43 in accordance with a command from the control device 29. Since only the target 33 is illuminated by the lighting of the lamp 38, only the target 33 can be selectively observed by the CCD camera 52.

  Along with the illumination of the target 33, the zoom position and the focal position of the CCD camera 52 are adjusted in accordance with a command from the signal processing device, and are set in advance so that the shape of the target 33 can be sufficiently grasped.

  By adjusting the zoom position and focal position of the CCD camera 52, the image processing target 33 can be observed as a mirror image via the automatic adjustment mirrors 25 and 21. At this time, if the installation angle of the automatic adjustment mirror 21 is deviated, the position of the target 33 on the photographed image of the CCD camera 52 appears to deviate from the center of the photographing screen. The captured image is sent from the CCD camera 52 to the image processing device 55.

  The image processing device 55 registers in advance an image when the target 33 appears to be centered, and the registered image is compared with the observed camera image (mirror image), and pattern matching processing is performed. By this pattern matching processing, the image processing device 55 performs arithmetic processing to determine how far the target position on the image is off the center, and this processing signal is output from the image processing device 55 to the control device 29. The control device 29 drives and controls the mirror adjustment device 30 based on the image processing information to drive the automatic adjustment mirror 21. By adjusting the mirror angle of the automatic adjustment mirror 21, the target 33 is adjusted to be positioned at the center on the image captured by the CCD camera 52.

  As a result, the center of the target 33 can be seen at the center of the image photographed by the CCD camera 52. The center of the target 33 being positioned at the center of the observation image of the CCD camera 52 corresponds to the laser beam passing through the center of the target 33. Thereby, the rough adjustment of the automatic adjustment mirror 21 is completed.

  When the rough adjustment of the automatic adjustment mirror 21 is completed, the next rough adjustment of the automatic adjustment mirror 22 is performed. The rough adjustment of the automatic adjustment mirror 22 is performed according to the rough adjustment of the automatic adjustment mirror 21.

  In the rough adjustment operation of the automatic adjustment mirror 22, the lamp blinking means 43 is operated by a command from the control device 29 to turn off the lamp 38 and turn on only the lamp 39. At the same time, the zoom position and the focal position of the CCD camera 52 are adjusted according to a command from the signal processing device and set in advance so that the shape of the target 34 can be grasped sufficiently.

  When the lamp 39 is turned on, the CCD camera 52 can observe the target 34 via the automatic mirrors 25, 21, 26, 22. At this time, if the installation angle of the automatic adjustment mirror 22 is deviated, the position of the target 34 on the photographed image of the CCD camera 52 appears to deviate from the center of the photographing screen. The captured image of the CCD camera 52 is input to the image processing device 55 and processed.

  In the image processing device 55, an image when the target 34 appears to be centered is registered in advance, and the registered image is compared with the observed camera image by pattern matching processing. A comparison is made between the registered image and the observed image to determine how far the target position on the image is from the center and output from the image processing device 55 to the control device 29.

  Based on the image processing information from the image processing device 55, the control device 29 drives the mirror adjustment device 30 so that the target 34 is positioned at the center on the image captured by the CCD camera 52, and the mirror of the automatic adjustment mirror 22. Adjust the angle.

  By adjusting the angle of the automatic adjustment mirror 22, the center of the image processing target 34 can be seen at the center of the image captured by the CCD camera 52. This means that the laser beam has passed through the center position of the target 34, and the rough adjustment of the automatic adjustment mirror 22 has been completed.

  After the rough adjustment of the automatic adjustment mirror 22, the same rough adjustment operation is performed by the combination of the lamp 40, the target 35, and the automatic adjustment mirror 23 to perform the rough adjustment of the automatic adjustment mirror 23. Then, after the rough adjustment of the automatic adjustment mirror 23, the same operation is further performed by the combination of the lamp 41, the target 36, and the automatic adjustment mirror 24 to adjust the automatic adjustment mirror 24.

  Rough adjustment of the automatic adjustment mirrors 21 to 24 is sequentially performed by the control device 29 using the CCD camera 52 and the image processing device 55, so that it is not necessary for a person to approach each point of the optical transmission path 11 and automatic by remote control. Thus, the optical path of the optical transmission path 11 up to the target point can be adjusted, and the carbon dioxide laser light as the main laser light can be guided into the optical transmission path 11 whose optical path has been adjusted.

[Fine adjustment of optical transmission line]
Next, functions of fine adjustment of the optical transmission device 70 and vibration correction of the optical transmission path 11 will be described.

  Guide laser light (He—Ne laser light and He—Cd laser light) oscillated from the guide laser devices 71 and 72 is optically adjusted coaxially by the light combining means 74.

  The He—Ne laser beam and the He—Cd laser beam adjusted coaxially are guided and scanned in the optical transmission line 11. The guide laser beam guided through the optical transmission path 11 is wavelength-separated at the position of the automatic adjustment mirror 24 in the middle, is transmitted only through the beam of He-Ne laser light, and is guided to the separation optical path 44. It is reflected in the direction of the fixed mirror 27 and transmitted.

  The He—Ne laser light guided to the separation optical path 44 is reflected by a retroreflector 46 as a parallel reflection optical means. The retro-reflector 46 has a characteristic of reflecting in parallel with the incident beam regardless of the angle of the incident beam.

  That is, if it enters the center of the retroreflector 46, it is reflected through the same path (optical transmission path) 11 as the incident beam. When the light is incident from the center, the light is reflected in parallel with the incident beam from a position shifted to a symmetrical position with respect to the center.

  The He—Ne beam reflected by the retro-reflector 46 follows the incident optical transmission path 11 and returns to the guide laser devices 71 and 72 side of the light source.

  A dichroic sampling mirror 57 is provided on the light source side, and only the reflected guide beam is reflected and sampled to the sampling detection path 73 side by the sampling mirror 57 and further transmitted through the dichroic mirror 77 which is a light separation means, and a position detection device 79. Is incident on.

  At this time, since the interference filters 76 and 78 are installed in the sampling detection path 73, light other than the wavelength of the He—Ne guide laser light cannot reach the position detection device 79. As a result, only the reflected beam of He—Ne guide laser light from the retroreflector 46 is incident on the position detection device 79.

  The beam incident on the optical position detection device 79 is converted into an electric signal at the incident position by the signal processing device 65 and is taken into the control device 29 as control information.

  On the other hand, the guide laser light reflected by the automatic adjustment mirror 24 of the optical transmission path 11 travels in the direction of the fixed mirror 27, where only the He-Cd laser light, which is the guide laser light, is reflected in the direction of the retroreflector 49, and the rest. The light is transmitted and guided to the laser irradiation head 16.

  The guide laser beam (He-Cd laser beam) reflected by the fixed mirror 27 and guided to the separation optical path 48 is reflected by a retro reflector 49 which is a parallel reflection optical means. The light reflected by the retro-reflector 49 returns in the opposite direction to that of the incident light, passes through the light transmission path 11, and reaches the dichroic sampling mirror 57.

  The reflected guide laser light from the retroreflector 49 is wavelength-separated by a dichroic mirror 77 as light separating means and incident on the optical position detection device 81 side, and the positional deviation information of the guide laser beam at the position of the retroreflector 49 is a signal. The data is input to the control device 29 via the processing device 65. At this time, since the interference filters 76 and 80 are installed in the sampling detection circuit 73, only the He—Cd laser beam is guided to the optical position detection device 81.

  As described above, the reflected guide laser beams from the retroreflectors 46 and 49 are returned through the optical transmission path 11 and individually incident on the optical position detection devices 79 and 81. Therefore, by detecting the first and second reflected laser beams with the optical position detectors 79 and 81, both the reflected laser beams can be detected individually, and the positions of the retro reflector 46 and the retro reflector 49 at the respective positions are detected. The control device 29 can recognize the deviation information separately.

  The control device 29 controls the operation of the mirror angle adjustment device 31 and feedback controls the automatic angle adjustment mirrors 25 and 26 so as to eliminate or minimize these position shifts based on the information on the light position shift at two locations. To do.

  The detection control adjustment system that detects the positional deviation of the reflection guide laser light and adjusts the mirror angle of the automatic angle adjustment mirrors 25 and 26 includes position detection devices 79 and 81 that detect the position of the reflection guide laser light, and a signal processing device 65. The control device 29 and the mirror angle adjusting means 31 both have fast response characteristics. In accordance with the speed of the feedback loop of the detection control adjustment system, it is possible to correct the positional deviation of the beam due to the vibration of each mirror.

  Further, the beam transmission position can be controlled in accordance with the accuracy of the retro reflectors 46 and 49 and the position detection devices 79 and 81 and the control accuracy of the automatic angle adjustment mirrors 25 and 26.

  In this optical transmission device 70, it is possible to correct fluctuations in laser light due to air and mechanical vibrations that occur during long-distance transmission using an automatic adjustment mirror. A laser beam can be transmitted.

  In the optical transmission apparatus 70 of the present embodiment, the optical axis of the laser light transmission path 11 and the measurement axis of the CCD camera 52 to be observed are the same common axis. The angle deviation of the optical axis is calculated from the positional deviation of the laser irradiation point, and the optical axis can be adjusted by using the automatic adjustment mirrors 21 to 24 by the deviation amount. That is, it is not necessary to install an electronic imaging device such as the CCD camera 52 in the middle of the transmission path, and the optical axis can be adjusted remotely even in an environment with strong radiation.

  Further, it is possible to perform remote adjustment with one CCD camera 52 without installing a CCD camera for each location of the automatic adjustment mirror in the optical transmission path 11. The image information input to the CCD camera 52 is sent to the image processing device 55, where it is compared with a registered image serving as a reference and subjected to pattern matching processing. By this pattern matching processing, it becomes possible to automatically measure the shift amount of the mirror image based on the image taken by the CCD camera 52 and automatically adjust the automatic adjustment mirrors 21 to 24.

  The optical transmission device 70 installs the image processing targets 33 to 36 in the vicinity of the mirrors 26, 23, 24, and 27 used for optical transmission, and calculates the angle deviation of the optical axis from the positional deviation of the targets 33 to 36. Thus, the optical axis can be adjusted using only the mirrors 26, 23, 24, and 27 immediately before the targets 33 to 36 where the positional deviation has occurred. That is, when the automatic adjustment mirrors 21 to 24 in the light transmission path 11 are remotely adjusted, the position to be adjusted and light transmission can be clarified, and the processing contents can be simplified in the image processing.

  Further, the positions of the automatic adjustment mirrors 21 to 24 and the targets 33 to 36 on the optical axis of the optical transmission line 11 currently being adjusted should be clearly determined and adjusted according to the shape of the image processing targets 33 to 36. The position can be easily determined, and the amount of shift of the automatic adjustment mirrors 21 to 24 can be accurately measured.

  In the optical transmission device 70 according to the present embodiment, lamps 38 to 41 as illumination devices are installed in the vicinity of the mirrors 26, 23, 24 and 27 used for transmission, and each target 33 observed by the CCD camera 52 is observed. If only the illumination of ˜36 is turned on, it is possible to know what number of target deviation is corrected, and it is possible to calculate the positional deviation with a clearer camera image. That is, the positions of the image processing targets 33 to 36 corresponding to the automatic adjustment mirrors 21 to 24 that are currently adjusted are more clearly separated from the images of the other automatic adjustment mirrors 21 to 24 that are not adjustment targets and the targets 33 to 36. Therefore, it is possible to easily determine the position to be adjusted, and to accurately measure the shift amount of the automatic adjustment mirrors 21 to 24.

  In the optical transmission device 70, the mirror adjustment device 30 driven by the control device 29 is an automatic mirror device of a stepping motor drive system or a servo motor drive system, and the automatic adjustment mirrors 21 to 24 are provided based on image processing information. When driving, since the automatic adjustment mirrors 21 to 24 can be accurately driven according to the amount to be driven, the adjustment can be performed at once without repeatedly adjusting the same mirror. For this reason, there is an effect that the optical axis of the optical transmission line 11 can be adjusted earlier.

  Furthermore, since the optical transmission device 70 of the present embodiment has a pattern matching function added to the image processing device 55 of the CCD camera 52, it can be compared with a registered image that is a reference of the optical transmission path 11 recorded in advance. Even if the laser beam irradiation point cannot be observed by the CCD camera 52, the angle deviation of the optical axis can be calculated and the optical axis can be adjusted. That is, by providing the image processing device 55 with the pattern matching processing device, the reference pattern (registered image) registered when the shape and positional deviation of the targets 33 to 36 that are currently adjusted are adjusted once. It becomes possible to easily evaluate based on the original. For this reason, the speed and accuracy of the optical axis adjustment of the optical transmission path 11 can be improved, and the frequency with which the apparatus malfunctions due to the erroneous recognition result of the image processing apparatus 55 can be reduced.

  The optical transmission device 70 according to the present embodiment includes an optical transmission unit 12 that configures the optical transmission path 11 by combining one or more mirrors, and mirror tilt is applied to some or all of the mirrors that configure the optical transmission path 11. Mirror adjustment devices 30 and 31 that can remotely control the angle are used. Then, a part of the mirrors on the optical transmission line 11 of the optical transmission device 70 is a half mirror or a wavelength separation mirror as the separation mirror means, and the position where the reflected light of the guide laser light divided by the separation mirror means 24 and 27 arrives And a control device 29 for driving the mirror angle adjusting device 31 by calculating the position information output from the optical position detecting devices 79 and 81 and driving the mirror angle adjusting device 31. The mirror angle adjustment of the automatic angle adjustment mirror can be performed with higher accuracy than the mirror position deviation measurement method using 52, and the speed of the position measurement can be made much faster than with a CCD camera. Even when the optical axis is deviated, the automatic angle adjustment mirrors 25 and 26 are driven in a direction to cancel the optical axis deviation. Te, it is possible to eliminate the influence of vibration.

  Since this optical transmission device 70 includes a plurality of guide laser devices 71 and 72 in addition to the main laser device 13 that outputs the main laser light, the main laser light has a repetitive variation element such as a pulse laser. Even in this case, the optical axis of the optical transmission line 11 can be adjusted with reference to the laser beam as the guide light emitted from the guide laser devices 71 and 72 for adjusting the optical axis, thereby enabling stable optical transmission. Become.

  Further, in the optical transmission device 70 of the present embodiment, a part of the automatic adjustment mirror 24 and the fixed mirror 27 on the optical transmission path 11 are constituted by separation mirror means such as a half mirror or a wavelength separation mirror, and the separation mirror means 24 , 27 are arranged at the position where the guide laser beam reaches the collimated reflection optical elements 46, 49 represented by the corner cube prism, the hollow corner cube, and the cat's eye optical element, and the light sources of the guide laser devices 71, 72. The mirror angle adjusting device by computing the position information output from the half mirror means 19 installed on the side, the optical position detectors 79 and 81 installed following the half mirror, and the optical position detectors 79 and 81 And a control device 29 that drives the light source 31 so that the optical transmission line 11 can be used without installing electronic components such as an optical position detection device. Since the displacement amount can be measured at a remote place, complicated wiring is not necessary, and no electronic component is installed in the middle of the optical transmission line 11, so that it can be applied even in an environment with strong radiation. There is an effect that becomes possible.

  Further, the optical transmission device 70 of the present embodiment includes a plurality of, for example, two or more guide laser devices 71 and 72 that oscillate at a wavelength different from that of the main laser light to be transmitted and have different oscillation wavelengths. Corresponding to the number of installed light sources 71 and 72, a plurality of mirrors in the middle of the optical transmission line 11 are used as wavelength separation mirrors, and corner cube prisms installed at positions where guide laser beams divided by the wavelength separation mirrors reach, Wavelength-separated by the parallel reflection optical elements 46 and 49 typified by hollow corner cubes and cat's eye optical elements, the half mirror means 19 and the wavelength separation mirror means 77 installed on the light source side of the guide laser devices 71 and 72 A plurality of optical position detection devices 79 and 81 for individually detecting the guide laser light, and position information output from each of the optical position detection devices 79 and 81 Since the control device 29 that drives the mirror angle adjusting means 31 as an automatic mirror device is provided as an automatic mirror device, the polarization of the laser beam is adjusted when adjusting the amount of beam misalignment at a plurality of locations along the optical transmission path 11. It is not necessary to consider the influence of the collapse of the beam, and it is possible to measure the beam misalignment at a plurality of locations with good separation performance. Even when there are three or more points where the amount of beam misalignment is to be measured, it is possible to cope with this by simply increasing the types of guide laser light.

  Further, the optical transmission device 70 of the present embodiment uses an electrostrictive element driven automatic mirror device or a galvanometer driven automatic mirror device with quick response characteristics for the mirror angle adjusting means (automatic mirror device) 31 driven by the control device 29. Since the optical position detection devices 79 and 81 use optical position detection elements using PSD elements (Position Sensitive Detectors) or split-type photodiode elements, the optical transmission device 70 vibrates with a higher frequency component from the outside. Even under the influence of the above, it becomes possible to eliminate the influence of the optical axis shift due to vibration.

  The optical transmission device 70 according to the present embodiment can consistently automate the optical axis adjustment of the optical transmission line 11 from rough coarse adjustment to fine adjustment and removal of the influence of vibration.

  Further, the optical transmission device 70 can adjust the optical axis of the optical transmission path 11 from a remote location, and stable processing and inspection even when the laser device is installed at a location away from a location where material processing or inspection is performed. Is possible.

  Furthermore, the optical transmission device 70 of the present embodiment can stably transmit a high-power laser beam when performing preventive maintenance and repair of the reactor internal structure, and can perform reliable construction. Using the same optical transmission line 11, the transmission position can be remotely photographed with a CCD camera.

  The optical transmission apparatus 10 according to the present invention includes an electro-optical imaging unit 52 installed in a direction coaxial with the optical axis of light transmitted through the optical transmission path 11 of the optical transmission unit 12, and the electro-optical imaging unit 52. An image processing device 55 that calculates image angle information from the normal position and measures the amount of angular deviation of the mirror from a normal position, and a controller that inputs the amount of angular deviation of the mirror and drives the mirror adjustment device. Therefore, it is not necessary to install an electronic device such as a CCD camera in the optical transmission path, and the optical axis can be adjusted remotely even in an environment with strong radiation. Further, it is possible to remotely adjust the optical transmission path 11 by the electro-optical imaging means 52 without installing the electronic optical imaging means 52 such as a CCD camera in the middle of the optical transmission path 11. Further, since the image processing device 55 is provided, it is possible to automatically measure the mirror displacement amount based on the image taken by the electro-optical imaging means 52 and automatically adjust the mirror.

  In the optical transmission device 10 according to the present invention, the optical transmission path of the optical transmission means 12 is covered with a light guide shield cylinder 18 such as a light guide cylinder or a light guide tube, and a mirror is provided in the middle of the light guide shield cylinder 18. Since one or more of these are arranged, a complicated optical transmission path can be configured by a combination of mirrors, and can be transmitted in the air within the light guide shield cylinder 18, and the optical transmission can be influenced by ambient influences such as air fluctuations. It can be carried out efficiently without being affected.

  Further, in the optical transmission device 10 according to the present invention, the optical transmission means 12 is provided with the image processing targets 33 to 36 in the vicinity of the mirror, respectively, and a light passage hole is formed in the image processing targets 33 to 36. Therefore, when the mirror in the optical transmission path is remotely adjusted, the position to be adjusted and transmitted can be clarified, and the processing contents in the image processing can be simplified.

  In the optical transmission device 10 according to the present invention, the image processing targets 33 to 36 are installed so as to cross the optical transmission path 11, and the image processing targets 33 to 36 have different shapes. Since it is configured, the positions of the mirror on the optical axis that is currently being adjusted and the image processing targets 33 to 36 are clearly determined according to the shape of the image processing targets 33 to 36, and the position to be adjusted can be easily determined. In addition, the amount of mirror displacement can be accurately measured.

  Furthermore, in the optical transmission device 10 according to the present invention, the optical transmission means 12 includes illumination devices 38 to 41 that can illuminate the vicinity of the mirrors or the image processing targets 33 to 36, so Since the position of the image processing targets 33 to 36 can be further clearly separated from the image of another mirror or the image processing targets 33 to 36, the adjustment position can be easily determined. Can be measured accurately.

  Furthermore, in the optical transmission device 10 according to the present invention, the mirror adjustment devices 30 and 31 are configured by stepping motor drive type or servo motor drive type automatic mirror devices, so when driving the mirror based on image processing information. In addition, the automatic adjustment mirrors 21 to 27 can be accurately driven according to the amount to be driven, and the mirror can be adjusted at once without repeatedly adjusting the same mirror. Adjustment is possible.

  Furthermore, in the optical transmission device according to the present invention, the image processing device compares a pre-registered image pattern with an image taken at the time of mirror adjustment, and can detect a positional deviation amount of the taken image. Therefore, by using the pattern matching processing device 55, it becomes possible to easily evaluate the shape and positional deviation of the target currently being adjusted based on a previously registered pattern when it has been adjusted once. The speed and accuracy of the optical axis adjustment can be improved, and the frequency with which the apparatus malfunctions can be reduced due to the erroneous recognition result of the image processing apparatus.

  In the method for adjusting an optical transmission apparatus according to the present invention, an electro-optical imaging unit 52 is provided on an extension line of the light source side optical axis of the optical transmission path 11 combined with a mirror, and image information from the electro-optical imaging unit 52 is provided. , The angle deviation amount of the mirror from the normal position is measured by the image processing device 55, the mirror angle is input as the deviation amount, and the mirror tilt angle is controlled by the mirror adjustment devices 30, 31; The electro-optic imaging means 52 observes the mirror image of the image processing target through the first automatic adjustment mirror on the light source side, and the first automatic adjustment mirror is used by the mirror adjustment device 30 so that the observed mirror image is centered. After adjusting the first automatic adjustment mirror, the optical axis of the optical transmission path 11 is adjusted by sequentially adjusting the automatic adjustment mirror by the same mirror adjustment method. It is not necessary to install in the transmission path, even in such strong radiation environment, it is possible to adjust the optical axis remotely. Further, it is possible to perform remote adjustment with an electro-optical imaging means such as a single CCD camera without installing a CCD camera for each mirror location in the optical transmission path, and further includes an image processing device. Therefore, it becomes possible to automatically adjust the automatic adjustment mirror by automatically measuring the deviation amount of the mirror based on the image taken by the electro-optical imaging means.

1 is a basic configuration diagram showing a first embodiment of an optical transmission apparatus according to the present invention. The basic block diagram which shows 2nd Embodiment of the optical transmission apparatus which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Optical transmission apparatus 11 Optical transmission path 12 Optical transmission means 13 Main laser apparatus 14 Guide laser apparatus 15 Dichroic mirror (photosynthesis means)
16 Laser irradiation head 17 Object 18 Shield tube (laser light guide tube, light guide tube)
19 Half mirror guide means 21 to 23 Automatic adjustment mirror 24 Automatic adjustment mirror (sampling separation mirror means; half mirror, wavelength separation mirror)
25, 26 Automatic angle adjustment mirror (PZT automatic mirror; Galvanometer drive mirror)
27 Fixed mirror (wavelength separation mirror means)
29 Control device 30 Mirror adjustment device 31 Mirror angle adjustment device (mirror fine adjustment device, mirror adjustment device)
33-36 Image processing target 38-41 Lamp (lighting device)
43 Lamp blinking control means 44 Separation optical path 45 1/4 wavelength plate (polarization optical means)
46 Retro reflector (Parallel reflection optical means, Cat's eye optical system)
48 Separation light path 49 Retro-reflector (parallel reflection optical means)
51 Guide optical path for detection 52 CCD camera (electro-optical imaging means, camera system)
53 Notch filter 54 Lens 55 Image processing device (pattern matching device)
57 Dichroic sampling mirror 58 Sampling detection path 60 1/4 wavelength plate 61 Interference filter 62 Polarizing beam splitter 63, 64 Optical position detector (4-quadrant detector, pointing detector, CCD element)
65 Signal processing device 70 Optical transmission device 71 First guide laser device 72 Second guide laser device 73 Sampling detection path 74 Photosynthesis means (dichroic mirror)
76 Interference filter 77 Dichroic mirror (wavelength separation mirror means)
78 Interference filter 79 Optical position detection device 80 Interference filter

Claims (8)

An optical transmission means for configuring an optical transmission path by combining mirrors;
A mirror adjusting device for controlling the tilt angle of at least one mirror constituting the light transmission means;
Electro-optical imaging means installed on an extension of the optical axis on the light source side transmitted through the optical transmission path;
An image processing target disposed in the vicinity of the mirror;
An image processing device that performs image processing on the image information from the electro-optical imaging means, and measures the amount of angular deviation of the mirror from the normal position based on the position information of the image processing target included in the image information;
An optical transmission device comprising: a control device that inputs an angle deviation amount of the mirror and drives the mirror adjustment device. 2. The light transmission means according to claim 1, wherein the light transmission path is covered with a light guide shield tube such as a light guide tube or a light guide tube, and one or more mirrors are arranged in the middle of the light guide shield tube. Optical transmission device. The optical transmission device according to claim 1, wherein a light passage hole is formed in the image processing target. 4. The optical transmission apparatus according to claim 3, wherein the image processing target is installed so as to cross the optical transmission path, and each target is formed in a different shape. 5. The optical transmission device according to claim 1, wherein the optical transmission unit includes an illumination device capable of illuminating the vicinity of the mirror or the image processing target. 2. The optical transmission device according to claim 1, wherein the mirror adjusting device is a stepping motor driving type or servo motor driving type automatic mirror device. The optical transmission device according to claim 1, wherein the image processing device includes a pattern matching device capable of comparing a pre-registered image pattern and an image photographed during mirror adjustment and detecting a positional deviation amount of the photographed image. An electro-optic imaging means is provided on the extension line of the optical axis on the light source side of the optical transmission path combined with the mirror,
The image information from this electro-optical imaging means is arithmetically processed, and the angle deviation amount of the mirror from the normal position is measured by an image processing device,
Input the angle deviation amount of the mirror and control the tilt angle of the mirror with the mirror adjustment device,
An image processing target is installed in the vicinity of the mirror,
Observing the mirror image of the image processing target through the first automatic adjustment mirror on the light source side with the electro-optical imaging means;
Adjust the first automatic adjustment mirror with the mirror adjustment device so that the observed mirror image is at the center,
An adjustment method of an optical transmission device, wherein after the first automatic adjustment mirror adjustment, the automatic adjustment mirror is sequentially adjusted by a similar mirror adjustment method to adjust the optical axis of the optical transmission path.

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