JP2008142590A - Scrub washing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scrub washing apparatus which is capable of efficiently and surely eliminating the fouling of the surface of a ring-like work piece having central apertures and the fouling difficult to strip especially attached on the edge of the aperture by using a roll brush provided with spiral projections at the outer peripheral surface. <P>SOLUTION: A pair of roll brushes 4a, 4b having projections 22 on the outer peripheral surface are brought into contact with the proximal position to the lower end portion of the central aperture 1a of both surfaces of the work piece 1 rotating in the washing liquid 3. The projection 22 is formed by a straight line part 22a straightforwardly extending to the axis line direction of the brush and spiral parts 22b, 22c which are each spirally extended from both ends of the straight line part 22a and in which the spirally wound direction are opposite direction with each other. The fouling attached to the edge of the aperture is eliminated by tangentially sliding and contacting the straight line part 22a with the edge of the aperture of the central aperture 1a of the work piece 1 and the fouling of the annular surface 1b is eliminated by sliding and contacting the spiral parts 22b, 22c with the annular surface 1b of the work piece 1. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a scrub cleaning apparatus for cleaning a disk-shaped workpiece such as a magnetic disk substrate, an optical disk substrate, or a glass disk substrate, particularly an annular workpiece having a central hole, using a roll brush.

  A scrub cleaning device for cleaning an annular workpiece having a central hole in a cleaning liquid with a roll brush is known, for example, from Japanese Patent Application Laid-Open No. 2004-151867. In this cleaning apparatus, a rotating workpiece held vertically in a cleaning liquid is sandwiched from both sides by a pair of horizontally arranged roll brushes, and both sides of the workpiece are rubbed and cleaned with these rotating roll brushes. To do.

  Roll brushes used in this type of cleaning device are usually formed into a cylindrical shape with a smooth surface made of a flexible synthetic resin, and come into contact with the workpiece in a slightly compressed state by being pressed against the workpiece. The dirt on the surface of the workpiece is removed by scraping or transferring to the brush surface. At this time, most of the dirt adhering to the surface of the brush is immediately washed with the cleaning liquid. However, depending on the type of dirt, some dirt remains on the brush for a while and comes into contact with the work again. It may reattach.

In addition, when the work is an annular work having a central hole, dirt attached to the inner peripheral edge thereof, that is, the hole edge of the central hole, tends to be particularly difficult to remove. It has been pointed out that the quality of the work has been reduced.
For this reason, conventionally, dirt on the inner periphery of the workpiece is removed by increasing the pressing pressure of the brush, but the increase in pressing pressure is also the cause of causing scratches on the surface of the workpiece due to dirt remaining on the brush. Therefore, it was difficult to balance them.

On the other hand, Patent Document 2 and Patent Document 3 disclose a roll brush in which spiral cleaning hairs or spiral grooves are formed on the outer periphery, and the workpiece is cleaned with this roll brush. Among these, Patent Document 2 also describes that the direction of the spiral of the cleaning hair is reversed between the right half and the left half of the brush.
When such a roll brush is used, the spiral portion (the cleaning hair, or the portion between the spiral groove and the spiral groove) slides obliquely on the surface of the workpiece, and the slide contact portion is rotated by the rotation of the brush. Since the brush moves in the axial direction, dirt on the surface of the work is pushed and moved in the lateral direction, preventing the reattachment of dirt compared to using a normal roll brush with a smooth surface. You can win the effect.

However, even when the roll brush is used for cleaning an annular workpiece, the spiral portion crosses the hole edge of the center hole of the workpiece diagonally and contacts the hole edge in a dotted manner. The slidable contact length and the slidable contact time are short, and therefore, the dirt attached to the hole edge cannot be reliably removed.
JP 2001-137790 A JP-A-8-150377 JP-A-9-103748

  Therefore, an object of the present invention is to use a novel roll brush having a spiral cleaning protrusion for removing dirt on the surface of an annular workpiece having a center hole, particularly dirt that adheres to the hole edge of the center hole. Thus, the removal can be performed efficiently and reliably.

  In order to achieve the above object, according to the present invention, an annular surface having a central hole is rotated in the cleaning liquid, and the annular surface is scrubbed by sandwiching the workpiece from both sides with a pair of rotating roll brushes. The roll brush has a flexible synthetic resin rubbing portion having an axial length equal to or greater than the diameter of the workpiece and is close to the upper end portion or the lower end portion of the central hole. A plurality of cleaning ridges are formed on the outer peripheral surface of the rubbing portion, and these ridges are formed at the center of the rubbing portion. A straight portion that extends straight in the axial direction of the brush and slidably contacts the edge of the center hole of the workpiece, and extends spirally from both ends of the linear portion toward both ends of the rubbing portion, and the spiral winding direction Consist of spirals that are opposite to each other Scrubbing apparatus is provided which is characterized.

In the present invention, it is desirable that the length of the linear portion of the protrusion in the roll brush is shorter than the diameter of the central hole of the workpiece.
Further, the roll brush may have a plurality of rubbing portions, and a plurality of workpieces may be scrubbed and cleaned simultaneously with these rubbing portions.

  In the present invention, a plurality of drive rollers that contact the upper outer end of the work and rotate the work are provided, and the work is pressed against the drive roller by a frictional force during cleaning by the roll brush. Has been.

  In addition, according to the present invention, as a roll brush for scrub cleaning the surface of an annular workpiece having a central hole, it has a cylindrical rubbing portion made of a soft synthetic resin, and the rubbing portion is The length of the axial direction is equal to or greater than the diameter of the workpiece, and a plurality of cleaning ridges are formed on the outer peripheral surface of the rubbing portion so as to be in sliding contact with the workpiece. A linear portion that is located in the axial center of the rubbing portion and extends straight in the axial direction, and extends spirally from both ends of the linear portion toward both ends of the rubbing portion. There is provided a roll brush characterized in that it is composed of a spiral portion having a reverse direction.

According to the present invention, a plurality of cleaning ridges composed of a straight portion and a spiral portion are formed on the outer periphery of the roll brush, and the roll brush is placed on the workpiece at a position close to the upper end or lower end of the center hole of the workpiece. Since the scrub cleaning is performed by abutting, the spiral portion functions to scrape off dirt on the annular surface of the work and push it laterally to release it to the outside of the annular surface. The straight portion functions to slidably contact the edge of the central hole at the end of the central hole of the workpiece in a tangential manner, and to remove the dirt attached to the hole edge.
As a result, due to the action of the spiral portion and the straight portion of the protrusion, the dirt adhering to the annular surface and the inner peripheral surface of the workpiece is reliably and efficiently removed. Since the dirt is rubbed in contact with the hole edge of the hole and the dirt is rubbed off, reliable rubbing is performed with a long sliding contact length, and the effect of removing the dirt is excellent. In addition, since the removed dirt is discharged into the cleaning liquid through the outer peripheral portion and the inner peripheral portion of the work, it does not reattach to the work from the brush, and the anti-reattachment effect is also excellent.

1 and 2 schematically show a main part of a scrub cleaning apparatus according to the present invention. In this cleaning apparatus, an annular work 1 having a circular central hole 1a is accommodated in a cleaning tank 2. FIG. While rotating in the cleaning liquid 3, the workpiece 1 is sandwiched from both sides with a pair of rotating roll brushes 4a and 4b for scrub cleaning.
Examples of the work 1 include a magnetic disk substrate, an optical disk substrate, and a glass disk substrate. The cleaning liquid 3 may be pure water, a detergent solution, a chemical solution, or the like according to the type of the work 1 or the purpose of cleaning. Used selectively.

  The cleaning liquid 3 is a uniform flow that flows laterally from the one side toward the other side in the cleaning tank 2. Accordingly, the cleaning tank 2 is formed in a substantially groove shape, and a liquid supply unit for supplying the cleaning liquid in a uniform flow is provided on the upstream side, and the cleaned cleaning liquid is discharged on the downstream side. A drainage part is provided for this purpose. However, since those configurations are already known and are not directly related to the gist of the present invention, the illustration is omitted.

  The workpiece 1 is arranged in the cleaning liquid 3 in parallel with the flow of the cleaning liquid, and is rotated by a plurality of driving rollers 5 that are in contact with the outer ends thereof. In the illustrated example, the workpiece 1 is arranged vertically (vertically), and is rotated about a horizontal axis by being driven by two driving rollers 5 and 5 that are in contact with the upper outer end. These drive rollers 5 and 5 have a V-shaped circumferential groove 5a on the outer periphery, and the upper end portion of the work 1 is fitted in the circumferential groove 5a.

  The drive roller 5 is supported by a support device 6 disposed on the upper portion of the cleaning tank 2 and is driven by a motor 7 mounted on the support device 6. That is, the roller support arm 10 extends downward from one end of the support device 6 into the cleaning tank 2, and the roller shaft 11 is supported horizontally and in a cantilever shape at the lower end of the roller support arm 10. The driving roller 5 is attached to the tip of the roller shaft 11. A pulley 12 is attached to the base end portion of the roller shaft 11, and the pulley 12 is connected to a transmission mechanism (not shown) provided in the support device 6 via a belt 13, and this transmission mechanism is connected to the motor 7. The two driving rollers 5 and 5 are driven and rotated in the same direction by the motor 7.

The support device 6 also supports the pair of roll brushes 4 a and 4 b so that the roll brushes 4 a and 4 b are driven by motors 8 a and 8 b mounted on the support device 6. It has become. That is, from the support device 6, a pair of front and rear brush support arms 15a and 15b extend downward into the cleaning tank 2 so as to be positioned on the upstream side and the downstream side with the work 1 interposed therebetween. The above-mentioned roll brushes 4a and 4b whose axis is directed horizontally and parallel to the flow of the cleaning liquid 3 are attached to the lower ends of the brush support arms 15a and 15b by rotatably supporting both ends of the brush shaft 16. . And one 1st roll brush 4a is connected with the 1st motor 8a via the transmission mechanism provided in one 1st brush support arm 15a and support device 6, and the other 2nd roll brush 4b is The second brush support arm 15b and the support device 6 on the opposite side are connected to the second motor 8b through a transmission mechanism, and the two roll brushes 4a and 4b are individually and individually connected by these motors 8a and 8b. It is driven and rotated synchronously.
However, the two roll brushes 4a and 4b can be driven through one brush support arm by any one motor.
In an actual cleaning apparatus, it goes without saying that the roller support arm 10 and the brush support arms 15a and 15b are configured so as not to disturb the flow of the cleaning liquid 3 as much as possible.

The position where the two roll brushes 4a and 4b are arranged is not the center of the work 1, but a position slightly below the center hole 1a and close to the lower end edge of the center hole 1a. At such positions, the roll brushes 4a and 4b are disposed so as to cross the workpiece 1 horizontally while being in contact with the workpiece 1.
Further, the rotation directions of the roll brushes 4a and 4b are opposite to each other, and the workpiece 1 is pushed upward by the rotational force. As a result, the workpiece 1 is pressed against the driving roller 5 and held at that position, and in this state, both surfaces are cleaned by the pair of roll brushes 4a and 4b. Therefore, these roll brushes 4 a and 4 b also serve as pressing means for pressing the work 1 against the driving roller 5.
It is desirable that the distance between the two roll brushes 4a and 4b can be adjusted, whereby not only the clamping and releasing operation of the workpiece 1 is facilitated, but also the cleaning pressure is adjusted. be able to.

As can be seen from FIGS. 4 and 5, the roll brushes 4 a and 4 b have a cylindrical rubbing portion 18 for removing dirt on the surface of the work 1, and the brushes are provided from both sides of the rubbing portion 18. A shaft 16 extends.
The rubbing portion 18 is configured by providing a flexible cylindrical member 20 suitable for cleaning, such as a synthetic resin sponge body, on the outer periphery of a hard core material 19 made of metal, synthetic resin, or the like. Therefore, the axial length L of the rubbing portion 18 is formed to be equal to or larger than the diameter of the workpiece 1, and the outer diameter D of the rubbing portion 18 is set to the annular surface 1 b of the workpiece 1. It is formed smaller than the width H.
Accordingly, when these roll brushes 4a and 4b are brought into contact with the work 1 at a position close to the lower end of the central hole 1a of the work 1, both ends of the rubbing portion 18 extend from the work 1 to the outside. Will do.

  On the outer peripheral surface of the rubbing portion 18, a plurality of cleaning protrusions 22 that are in sliding contact with the workpiece 1 are formed integrally with the cylindrical member 20. These ridges 22 are located in the center of the rubbing portion 18 and extend straight in the axial direction of the roll brush, and extend spirally from both ends of the straight portion 22a toward both ends of the rubbing portion 18. The spiral winding direction is composed of two spiral portions 22b and 22c whose directions are opposite to each other, and a spiral groove 23 is defined and formed between adjacent ridges 22 and 22. In the example shown in the figure, the three ridges 22 are alternately formed in the manner of a triple screw, and the three straight portions 22a of these ridges 22 are arranged at 120 ° intervals on the outer periphery of the central portion of the rubbing portion 18. positioned. However, the ridge 22 may be two or four or more. Further, the shape of the top portion of the protrusion 22 may be flat as shown in the figure, or may be an arcuate curved surface.

  The straight portion 22a is a portion for removing dirt from the hole edge by sliding in tangential contact with the hole edge of the center hole 1a at the end of the center hole 1a of the work 1, and its length is: It is shorter than the diameter of the central hole 1a.

On the other hand, the spiral portions 22b and 22c are parts for slidingly contacting the annular surface 1b of the work 1 to remove dirt on the annular surface 1b, and moving the removed dirt laterally to discharge it out of the annular surface 1b. The first spiral portion 22b connected to one of the linear portions 22 is a right-handed spiral portion that goes clockwise in the axial direction, and the second spiral portion 22c connected to the other of the linear portions 22 is This is a left-handed spiral portion that goes counterclockwise in the counterclockwise direction.
As can be seen from FIG. 3, the pair of roll brushes 4a and 4b are arranged with the first spiral portion 22b and the second spiral portion 22c having different winding directions facing each other. That is, the right-handed first spiral portion 22b and the left-handed second spiral portion 22c of the first roll brush 4a, and the left-handed second spiral portion 22c and the right-handed first spiral portion 22b of the second roll brush 4b are provided. Are arranged so as to face each other. This means that two roll brushes 4a and 4b having the same configuration are arranged symmetrically with the workpiece 1 in between.

  In the cleaning apparatus having the above-described configuration, when the workpiece 1 to be cleaned is supplied between the pair of roll brushes 4a and 4b, the workpiece 1 is rotated in the direction indicated by the arrow in FIG. , The upper end of the driving roller 5 is pushed up to a position where the driving roller 5 obtains the rotational driving force, and is held at that position. While being driven and rotated around the center, both surfaces of the cleaning liquid 3 are rubbed and cleaned by the roll brushes 4a and 4b.

  In addition, about the method of conveying the said workpiece | work 1 to the position of roll brush 4a, 4b and supplying between these roll brush 4a, 4b, already well-known various methods can be used. For example, a carrier and its transport mechanism as disclosed in Japanese Patent Laid-Open No. 2001-137790, and a lifting mechanism that lifts the work held by the carrier to the position of the roll brush can be used. However, since those configurations and methods are not directly related to the gist of the present invention, illustration and description thereof are omitted here.

  During the cleaning of the workpiece 1, the two spiral portions 22 b and 22 c of the protrusion 22 formed on the outer periphery of each roll brush 4 a and 4 b have protrusions that are in contact with the annular surface 1 b of the workpiece 1. As it rotates, it changes in the axial direction of the brush along the annular surface 1b, scrubs the dirt on the surface of the work 1, and moves the removed dirt laterally to release it from the annular surface 1b. Further, since this action is performed in the cleaning liquid 3, a part of the removed dirt is washed away by the cleaning liquid 3 flowing through the spiral groove 23 formed between the protrusions 22 and released into the cleaning tank 2, It rides on the flow of the cleaning liquid 3 and is discharged downstream.

Here, the two roll brushes 4a and 4b are oriented in the direction shown in FIGS. 1 and 3, that is, when the roll brush is viewed from the front, the right-handed first spiral portion 22b is positioned on the right side of the straight portion 22a. When the left-handed second spiral portion 22c is disposed on the left side of the straight portion 22a, the protruding portion that contacts the annular surface 1b of each spiral portion 22b, 22c Since it moves toward the inner peripheral side, the dirt on the annular surface 1b is moved toward the inner peripheral side of the work 1 and discharged into the cleaning liquid 3 through the central hole 1a.
Accordingly, the directions of the two roll brushes 4a and 4b are reversed left and right so that the right-handed first spiral portion 22b is positioned on the left side of the straight portion 22a and the left-handed second spiral portion 22c is on the right side of the straight portion 22a. When positioned, the dirt on the annular surface 1b is moved to the outer peripheral side of the workpiece 1 and discharged into the cleaning liquid 3 from the outer peripheral end.

  On the other hand, the linear portion 22a located at the center of the rubbing portion 18 of the roll brushes 4a and 4b is slidably contacted with the hole edge of the central hole 1a at the end of the central hole 1a of the work 1, and the hole edge Scrub off any dirt on the surface. The removed dirt is discharged into the cleaning liquid 3 through the central hole 1a.

  As a result, the dirt adhering to the inner peripheral surface (hole edge of the central hole 1a) and the annular surface 1b of the work 1 by the action of the linear portion 22a of the protrusion 22 and the spiral portions 22b and 22c is surely and efficiently. In particular, since the straight portion 22a slidably contacts the edge of the central hole 1a in a tangential manner to rub off dirt, a long sliding contact length ensures reliable rubbing and removal of dirt. You can win the effect. In addition, since the removed dirt is released into the cleaning liquid 3 through the outer peripheral part or inner peripheral part (central hole 1a) of the work 1, it does not reattach to the work 1 and the effect of preventing reattachment is also excellent.

  FIG. 6 shows a different configuration example of the roll brush. The roll brush 4 has a plurality of rubbing portions 18, 18, and the scrubbing portions 18, 18 scrub a plurality of workpieces 1 simultaneously. It is comprised so that it can wash. The configuration of the ridge 22 in the plurality of rubbing portions 18, 18, that is, the configuration related to the linear portion 22 a and the two spiral portions 22 b, 22 c are the same as each other, and the configuration is the roll brush 4 a shown in FIG. 4. , 4b.

In the illustrated embodiment, the two roll brushes 4a and 4b are disposed on the lower end side of the central hole 1a of the work 1, but these roll brushes 4a and 4b are arranged at the upper end of the central hole 1a. It may be arranged on the side.
Further, the two roll brushes 4a and 4b are arranged symmetrically with the work 1 in between, but the roll brushes 4a and 4b are in the same direction, that is, between the first spiral portions 22b and the second. The spiral portions 22c may be arranged in opposite directions.
Further, the cleaning tank may be of an overflow type in which the cleaning liquid flows upward from the bottom side of the tank and overflows from the tank wall.

1 is a cross-sectional view schematically showing one embodiment of a scrub cleaning apparatus according to the present invention. It is sectional drawing in the AA of FIG. It is a top view of the principal part of FIG. It is a top view of a roll brush. It is sectional drawing of a roll brush. It is a top view which shows the structural example from which a roll brush differs.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Work 1a Center hole 1b Annular surface 3 Cleaning liquid 4a, 4b Roll brush 18 Rub part 22 Projection 22a Straight part 22b, 22c Spiral part

Claims (5)

A cleaning device for scrub cleaning an annular surface with a pair of rotating roll brushes sandwiching the workpiece from both sides while rotating an annular workpiece having a central hole in the cleaning liquid,
The roll brush has a sliding portion made of a flexible synthetic resin having an axial length equal to or greater than the diameter of the workpiece, and the workpiece is positioned close to the upper end or the lower end of the central hole. Abutting and traversing the workpiece,
A plurality of cleaning ridges are formed on the outer peripheral surface of the rubbing portion, and these ridges extend straight in the axial direction of the rubbing portion and slide on the edge of the central hole of the workpiece. The linear portion is in contact with each other, and the spiral portion extends spirally from both ends of the linear portion toward both ends of the rubbing portion, and the spiral winding directions are opposite to each other.
A scrub cleaning device.   2. The scrub cleaning apparatus according to claim 1, wherein the length of the straight portion of the ridge in the roll brush is shorter than the diameter of the central hole of the workpiece.   3. The scrub cleaning according to claim 1, wherein the roll brush has a plurality of rubbing portions, and the plurality of workpieces are scrubbed and cleaned simultaneously by the rubbing portions. apparatus.   It has a plurality of driving rollers that contact the upper outer end of the workpiece and rotate the workpiece, and is configured to be pressed against the driving roller by the frictional force at the time of cleaning by the roll brush. The scrub cleaning apparatus according to any one of claims 1 to 3, wherein A roll brush for cleaning the surface of an annular workpiece having a central hole, having a cylindrical rubbing portion made of a flexible synthetic resin,
The rubbing portion has an axial length equal to or greater than the diameter of the workpiece, and a plurality of cleaning protrusions that are in sliding contact with the workpiece are formed on the outer peripheral surface of the rubbing portion. A ridge is located at the center of the rubbing portion in the axial direction and extends straightly in the axial direction, and extends spirally from both ends of the straight portion toward both ends of the rubbing portion. A roll brush comprising a spiral portion in which spiral winding directions are opposite to each other.

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