JP2008138966A - Air shower device and air shower method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air shower device and an air shower method carrying out dusting of a necessary range with respect to a body to be cleaned (an entrant), efficiently discharging dusted and floating dust, and preventing reattachment. <P>SOLUTION: The air shower device is provided with plural air nozzles 11a, 12a, blowing out air, an exhaust port 13 discharging floating powder dust to the exterior, and a control part controlling operation of the air nozzles to carry out dusting of the dust from the body to be cleaned, and discharge of the dusted and floating powder dust on the basis of shape information of the body A to be cleaned. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an air shower apparatus and an air shower method that can be used in an air shower room placed in front of a clean room or the like.

  A clean room is mainly used in the manufacturing process of industrial products such as display devices such as semiconductors, liquid crystals and plasmas, precision equipment, electronic equipment, and optical equipment. It is used in the field of biotechnology for medical / laboratory animal facilities / pharmaceuticals / food / biohazard prevention facilities, etc., and mainly provides a space where airborne microorganisms are managed. An air shower room is usually installed at the entrance of such a clean room in order to remove foreign matter such as dust and floating substances adhering to the clothes of the room occupant before entering the room.

  Accordingly, it is necessary to improve the dust removal efficiency of the air shower room and prevent the entry of dust and the like into the clean room communicating with the air shower room. For example, the following Patent Document 1 discloses the object to be cleaned in the air shower room. On the other hand, an air shower device is disclosed in which, when air is blown, foreign matter adhering to an object to be cleaned can be efficiently removed by ejecting a rotating / pulsating airflow.

  The following Patent Document 2 has a first nozzle that continuously discharges air and a second nozzle that discharges air intermittently, and the first and second nozzles discharge air in the same direction. An air shower nozzle is disclosed.

  In Patent Document 3 below, from the end of the dust removal operation to the start of leaving the room, the exhaust fan continues to operate in the set output mode, and the air operates in the low output mode. Operate in the low power mode so that the supply amount and the exhaust amount by the fan for shower injection are competing with each other, and suppress the dust removed by the laminar flow from the ceiling, and the laminar flow flowing down in the air shower room, Disclosed is an air shower device that sucks air from an almost entire surface of a floor by an exhaust fan and exhausts the air outdoors.

  Patent Document 4 listed below includes an air shower having a plurality of sensors for detecting a predetermined movement position of a human body and clothes or a product, and having a blowing direction changing means for changing a blowing air flow direction of a blowing portion in accordance with the movement position detection by the sensor. An apparatus is disclosed.

  The following Patent Document 5 discloses an air shower device that measures the height with an optical sensor when using an air shower, changes the wind direction with a blind wing, supplies air to a portion not exposed to air, and removes dust.

  In Patent Document 6 below, when a person carrying a non-contact type ID card enters the air shower room and the door is closed, the reader / writer starts to operate periodically, and the reader / writer is in contact with the non-contact type ID card. When the identification signal transmitted from the card is received continuously, the air shower device is operated to remove dust adhering to the occupant, and the measured value of the dust amount measured by the dust counter is below the reference value. A clean room entrance management method is disclosed in which the operation of the air shower device is stopped.

Moreover, the following nonpatent literature 1 discloses the preferable time which blows clean air from an air nozzle with respect to to-be-cleaned bodies, such as a resident.
Japanese Patent Laid-Open No. 06-291003 JP 2000-245650 A JP 2005-90763 A JP 2004-286405 A Japanese Patent Laid-Open No. 04-313632 JP 2002-250551 A Keisuke Hirasawa, Yoshihide Isobe, Eiichi Sudo “The number of air showers and their effects”, 3rd Air Cleaning and Contamination Control Conference, 83-88, 1984

  However, Patent Document 1 is only for the purpose of improving the efficiency of dust removal, and does not consider reattachment of dust to the object to be cleaned. Patent Documents 2 and 3 combine nozzles for preventing diffusion, but the airflow direction of spraying and the airflow direction of wiping off cross, not only reducing the spraying effect, but also promoting reattachment. There is a fear.

  In Patent Documents 4 and 5, it is unclear which part of the human body is sensed and where air is blown when tracking with a sensor. Patent Document 6 relates to the operation control of an air shower device using an ID card, and does not disclose the reattachment of dust to the object to be cleaned.

  As described above, the conventional technology focuses on how to efficiently blow off dust by directing the air blowing means toward the object to be cleaned and blowing the clean air, and the dust blown into the air. There is a need to further study and improve the reattachment to the object to be cleaned.

  In view of the problems of the prior art as described above, the present invention performs the ejection of the necessary range for the object to be cleaned (room occupant), efficiently ejects the dust that is ejected and floats, and prevents reattachment. An object of the present invention is to provide an air shower device and an air shower method.

  In order to achieve the above object, the air shower device according to the present invention separately discharges dust from the object to be cleaned and discharges the dust that is blown and floated by an air nozzle that blows out air. It is characterized by comprising.

  According to this air shower device, the dust from the object to be cleaned is ejected separately and the dust that has been ejected and floated is separately discharged, so that the dust that has been ejected and floated can be efficiently ejected. It is possible to prevent re-adhesion of the discharged dust to the object to be cleaned. In this case, it is preferable to perform the ejection and the discharge of the floating dust based on the shape information of the object to be cleaned, thereby enabling the ejection of a necessary range, omitting a blowout to a useless range, Energy saving operation can be realized. Further, it is preferable to perform the ejection and the discharge of the floating dust by setting the blowout ranges of the air nozzles to be different.

  Another air shower device according to the present invention includes an air nozzle that blows out air, an exhaust port that discharges floating dust to the outside, and a dust discharge from the object to be cleaned based on shape information of the object to be cleaned. And a control unit that controls the operation of the air nozzle so as to perform the discharge of the dust that is blown out and floats.

  According to this air shower device, it is possible to separately eject dust from the object to be cleaned and discharge dust that has been ejected and floated, so that the dust that has been ejected and floated can be efficiently exhausted. It can be discharged from the mouth, and re-adhesion of dust that has been blown off to the object to be cleaned can be prevented. In addition, since the operation of the air nozzle is controlled based on the shape information of the object to be cleaned, it is possible to knock out a necessary range, and it is possible to realize an energy saving operation by omitting a blowout to a useless range.

  In addition, it is preferable that the said air shower apparatus is used in the air shower room installed in front of a clean room etc.

  In the air shower apparatus, the air nozzle can be configured to include a nozzle exclusively for blowing to the object to be cleaned and a nozzle exclusively for floating dust discharge that blows toward the exhaust port. This is a special nozzle. A plurality of air nozzles are preferable.

  In addition, the air nozzle includes an air nozzle that can be switched between blowing to the object to be cleaned and discharging floating dust. When there are a plurality of air nozzles, at least one of the plurality of air nozzles is used for blowing and discharging floating dust. It is good also as a combined use nozzle which serves as.

  Note that the floating dust discharge nozzle, whether dedicated or combined, does not blow directly against the object to be cleaned, but instead is directed around and / or in the vicinity of the object to be cleaned to discharge floating dust. Controlled to blow out.

  Further, by setting the blowing pattern and / or blowing range of the air nozzle to the cleaned object based on the shape information of the cleaned object input to the control unit, the necessary range can be knocked out, Dust can be efficiently ejected from the object to be cleaned.

  Further, by dividing the blowing range based on the shape information of the object to be cleaned, each air nozzle shares the divided blowing ranges, so that the blowing to the object to be cleaned becomes efficient.

  Further, it is preferable that the air nozzle blowing time is set in advance. For example, the blowing time for the object to be cleaned is preferably in the range of 5 to 20 seconds.

  Further, it is preferable that a dust amount measuring means for measuring the dust amount in the room is provided, and the air nozzle blowing is controlled based on the dust amount measurement result. For example, when the measured amount of dust in a room in which an air shower device is installed is equal to or less than a preset amount, it is possible to control such that the air nozzle stops blowing. Further, by measuring the amount of dust in the room, the relationship between the blowing time of the air nozzle and the amount of generated dust may be obtained in advance, and the blowing time may be set with the measured amount of dust.

  In addition, the blowing of the air nozzle can be set to either continuous flow or intermittent flow. For example, a continuous flow or an intermittent flow may be used for the nozzle for blowing out the object to be cleaned, but a continuous flow is preferable for the nozzle for discharging the floating dust discharged toward the exhaust port.

  Moreover, it is preferable that at least one of the air nozzles can change the blowing range. Thereby, the blowing range can be changed to a range corresponding to the shape information (shape and size) of the object to be cleaned. Such a change in the blowing range can be realized, for example, by configuring the air nozzle to move up and down and / or move left and right.

  Moreover, it is preferable to change the blowing range of the floating dust discharge nozzle corresponding to the blowing range of the blowing nozzle to the object to be cleaned. Thereby, the dust which is knocked out and floats can be efficiently discharged. In this case, it is preferable that the floating dust discharge nozzle is configured to be movable up and down and / or left and right.

  In the air shower method according to the present invention, the first step of blowing air from the first air nozzle to the object to be cleaned to expel dust from the object to be cleaned and the air blowing from the second air nozzle to explode and float the air. And a second step of discharging the dust to the outside through the exhaust port.

  According to this air shower method, the dust from the object to be cleaned is ejected separately and the dust that has been ejected and floated is separately discharged, so that the dust that has been ejected and floated can be efficiently ejected. It is possible to prevent re-adhesion of the discharged dust to the object to be cleaned. In this case, it is preferable to control the operation of the air nozzle on the basis of the shape information of the object to be cleaned, thereby enabling ejection of a necessary range, eliminating blowing to a useless range, and realizing energy saving operation. it can. Moreover, it is preferable that the first step and the second step are performed by setting the blowing range of the first air nozzle and the second blowing range to be different.

  In addition, it is preferable that the said air shower method is used for the air shower room put ahead etc. in a clean room etc.

  In the air shower method, by setting a blowing pattern and / or a blowing range of the air nozzle to the cleaned object based on the shape information of the cleaned object, dust can be efficiently ejected from the cleaned object. In addition, the blowing range is divided based on the shape information of the object to be cleaned, and the plurality of air nozzles share the divided blowing ranges, so that the blowing to the object to be cleaned becomes efficient.

  In addition, after the first step of knocking out dust from the object to be cleaned, the second step of discharging the dust that has been blown out and floated is performed, so that the dust is knocked out after the dust is discharged from the object to be cleaned. The dust that floats can be discharged.

  In this case, the second step may be performed using the first air nozzle, and this is performed by changing the blowing range by using, for example, an air nozzle capable of moving up and down and / or moving left and right as the first air nozzle. This can be achieved.

  In addition, by operating the first and second air nozzles almost simultaneously, it is possible to discharge dust that is blown out and floats while knocking out dust from the object to be cleaned. In this case, for example, the operation of discharging the suspended dust by the second air nozzle may be terminated slightly later than the operation of blowing out the object to be cleaned.

  Further, it is preferable to measure the amount of dust in the room and control the operation of the air nozzle based on the measurement result. For example, the amount of dust in the room is measured, and the air nozzle can be controlled to continue blowing until the measured dust amount is equal to or less than a preset amount.

  Further, a relationship between the air nozzle blowing time and the measured amount of dust in the room may be obtained in advance, and the operation of the air nozzle may be controlled by the blowing time obtained from the relationship. In this case, the blowout time of the first air nozzle is preferably a time in which the amount of dust ejected is increased and unnecessary blowout is omitted, and the blowout time of the second air nozzle is reduced in amount of dust and wasteful blowout. The time when is omitted is preferable.

  Further, it is preferable to further include a step of inputting shape information of the object to be cleaned, and to control the air nozzle to be operated after the shape information is input.

  According to the air shower apparatus and the air shower method of the present invention, the necessary range of the object to be cleaned such as the occupant is ejected, and the dust that is ejected and floated is efficiently discharged, and the object to be cleaned is discharged. Reattachment can be prevented. Thereby, for example, the dust removal efficiency in the air shower room placed in front of the clean room can be increased, and the entry of dust and the like into the clean room communicating with the air shower room can be prevented.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  <First Embodiment>

  FIG. 1 is a diagram schematically showing a control system of the air shower apparatus according to the first embodiment. FIG. 2 is a perspective view schematically showing the apparatus for explaining the operation of the air shower apparatus according to the first embodiment. FIG. 3 is a top view schematically showing the operation of the air shower device of FIG.

  The air shower apparatus shown in FIGS. 1-3 is installed in the air shower room R, and the blower 10 which sends clean air into the air shower room R via an air purifying filter (not shown), and the room To blow out air from the blower 10 to the person A and blow out the dust from the first air nozzle part 11 and blower 10 to discharge the dust that is blown out from the person A and floats in the room. The second air nozzle part 12, the wall exhaust ports 13, 14 that are arranged on the upper side wall of the air shower chamber R and discharge dust floating in the room, and the exhaust fan that sucks and exhausts air from the wall exhaust ports 13, 14. 15. In addition, it is good also as a structure which the air blower 10 and the exhaust fan 15 serve as combined.

  The air shower room R is installed on the entrance side of a clean room for providing a space in which suspended microorganisms are managed and a space in which suspended particulates are managed in various applications.

  As shown in FIG. 1, the air shower device has, as a control system, an input unit 101 composed of a pointing device such as a mouse and a keyboard for inputting body shape information (height, shoulder width, etc.) of the occupant, a blower 10 and a drain. An operation switch 104 for turning on / off the fan 15 and the like, a dust amount measuring unit 107 for measuring the amount of dust in the room, a memory 108 for storing various information such as range information and pattern information from which each air nozzle blows air, and input The control unit 100 includes a central processing unit (CPU) that receives signals from the unit 101, the dust amount measurement unit 107, the memory 108, and the like and controls the operations of the air nozzle units 11 and 12.

  The first air nozzle portion 11 includes air nozzles 11a and 11b that move up and down and move left and right as the tip portion rotates in order to change the range and pattern for blowing out air. The second air nozzle section 12 includes air nozzles 12a and 12b that move up and down and move left and right so that the tip portion rotates to change the air blowing range and pattern.

  In addition, the first air nozzle unit 11 and the second air nozzle unit 12 are switched to be reversed and the second air nozzle unit 12 blows out air to the occupant A to blow out dust, and the first air nozzle unit 11 exhausts the air. Control can be performed so that air is blown out toward the mouth 13 or 14 to discharge floating dust. In this case, switching can be performed in units of air nozzles 11a, 11b, 12a, and 12b, and the blowing range is changed by changing the blowing direction by moving up and down and moving left and right so that the tip portion rotates.

  Based on the air blowing range information and pattern information stored in the memory 108, the control unit 100 uses the body shape information (height, shoulder width, etc.) of the room occupant input from the input unit 101, To decide.

  The operation flow of the air shower device of FIGS. 1 to 3 will be described with reference to FIG. FIG. 4 is a flowchart for explaining the operation steps S01 to S09 of the air shower device according to the first embodiment.

  1 to 4, when a person A enters the air shower room R, the person A enters the height and shoulder width (S01) and turns on the operation switch 104 (S02). The wind machine 15 operates.

  As shown in FIG. 3, the first air nozzle unit 11 is turned on in a state where the occupant A is located at the approximate center of the air shower chamber R, and the air nozzle 11 b blows air toward the back B side toward the occupant A. 11a sprays on the chest / abdomen C side in the direction G (S03).

  In this case, the spraying range to the back B side and the chest / abdominal C side by the air nozzles 11b, 11a is determined based on the height / shoulder width input in step S01. The air nozzles 11a and 11b are moved up and down and left and right to spray the chest / abdomen C and back B of the occupant A in a substantially S-shaped pattern, as shown in FIG.

  Then, the second air nozzle portion 12 is turned on almost simultaneously, and the dust D which is blown out and floated by the air nozzle 11b is blown toward the exhaust port 13 in the direction F, and is blown out by the air nozzle 11a. The air nozzle 12a blows out the dust E floating in the direction F 'toward the exhaust port 13 (S04).

  In this case, the air nozzles 12a and 12b are not directly blown out to the occupant A, but around the occupant A so that the dust E and D that are blown out of the occupant A and float are discharged from the exhaust port 13. Blow out toward the vicinity. Specifically, the blowout range of the air nozzles 12a and 12b is determined to move up and down in the height direction around and in the vicinity of the blowout range of each air nozzle 11a and 11b that blows out dust, and to move left and right in the horizontal direction.

  In steps S03 and S04, the air nozzles 11a, 11b, 12a, and 12b are controlled so as to blow out air in a continuous flow. However, the air nozzle that discharges floating dust may be a continuous flow. Is preferred.

  After operating the first air nozzle part 11 and the second air nozzle part 12 for a preset time (S05), the first air nozzle part 11 is turned off (S06), and the second air nozzle part 12 is turned off (S07). In this case, the second air nozzle unit 12 may be turned off in order to more effectively discharge the dust that is blown out and floats.

  Next, the dust amount in the air shower chamber R is measured (S08), and the control unit 100 determines whether the measured dust amount is equal to or less than a predetermined value stored in the memory 108 (S09). Returns to step S03 and repeats the same steps, but in this case, control may be made to return to step S04 as indicated by the broken line in FIG. If the measured amount of dust is less than or equal to a predetermined value, the process ends.

  According to the operation of the air shower device of FIG. 4, the dust from the occupant A is spit out and the dust that is spit out and floats separately, so that the dust that is spit out and floats efficiently It can be discharged, and re-adhesion of the dust that has been knocked out to the occupant A can be prevented. Moreover, since operation | movement of the air nozzle parts 11 and 12 is controlled based on the body type information of the occupant A, the required range can be knocked out, and the energy saving operation of the air shower device can be realized.

  Next, the range and pattern in which each of the air nozzles blows air will be described with reference to FIGS.

  FIG. 5 is a diagram schematically illustrating a range in which the air nozzle stored in the memory 108 of FIG. 1 blows air toward the occupant. FIG. 5A is a diagram in which the range of blowing air in FIG. b). FIG. 5B also shows the spray pattern in each divided range. FIG. 6 is a diagram schematically showing examples (a) to (d) of patterns in which the air nozzle stored in the memory 108 of FIG. 1 blows air toward the occupant.

  As shown in FIG. 5A, the air nozzles 11a, 11b, 12a, and 12b blow air to the occupants based on the body shape information (height and shoulder width) input from the input unit 101 in FIG. A range S is set.

  When the spraying range S is divided as shown in FIG. 5 (b), it is divided into upper and lower parts based on the waist, and further, the front is divided into left and right parts, which are divided ranges S1, S2, S3 and S4. Air nozzles 21, 22, 23, and 24 that blow air separately on S1, S2, S3, and S4 can be arranged. The position of the waist can be determined from the height.

  The spraying range S in FIG. 5A is set based on the occupant's body shape information (height and shoulder width) input from the input unit 101, but the body shape information is input from the occupant's ID card. You may make it read by the card reader 102 shown with the broken line of FIG.

  In addition, the image sensor / position sensor 103 indicated by the broken line in FIG. 1 disposed at the entrance of the air shower room R detects the position of the head and both shoulders of the occupant and converts them into body type information of height and shoulder width. May be input.

  The pattern in which each air nozzle blows air toward the occupant may be substantially S-shaped as shown in FIG. 2, but is substantially Z-shaped as shown in FIG. 6 (a), as shown in FIG. 6 (b). A substantially N (mirror image) shape, a substantially U-shape as shown in FIG. 6 (c), and a substantially U-shape as shown in FIG. 6 (d) obtained by rotating the substantially U-shape as shown in FIG. 6 (c) by 90 °. It may be a letter shape.

  Further, regarding the patterns of the divided ranges S1 to S4, as shown in FIG. 5B, in the divided ranges S1 and S2 above the waist, from the waist to the shoulder upward along the arm, diagonally downward from the shoulder. From the waist to the lower part, in the divided range S3, S4 from the waist to the head, from the foot to the waist, from the foot to the waist, from the waist to the foot It can be done in such an order.

  <Second Embodiment>

  An operation flow according to the second embodiment using the same air shower apparatus as in FIGS. 1 to 3 will be described with reference to FIGS. 7, 8, and 9.

  FIG. 7 is a flowchart for explaining the operation steps S11 to S19 of the air shower apparatus according to the second embodiment.

  FIG. 8 is a perspective view (a) and an upper surface part (b) schematically showing the air shower device in order to explain the dust ejection operation in the second embodiment. FIG. 9 is a perspective view (a) and an upper surface part (b) schematically showing the air shower device in order to explain the discharging operation of the floating dust that has been knocked out.

  The operation according to the second embodiment is such that a single air nozzle performs a dust ejection operation, followed by a floating dust discharge operation.

  The occupant A inputs the height and shoulder width (S11), and turns on the operation switch 104 (S12), the blower 10 and the exhaust fan 15 are activated.

  Next, as shown in FIGS. 8A and 8B, the air nozzle 12a of the second air nozzle portion 12 is turned on in a state in which the room occupant A is positioned substantially in the center of the air shower room R. The air nozzle 12a sprays on the chest / abdomen C side in the direction H (S13). The range of spraying to the chest / abdominal C side by the air nozzle 12a is determined based on the height / shoulder width input in step S11, and the air nozzle 12a is moved up and down and moved left and right as shown in FIG. In the same way, spray the occupant A's chest / abdomen C and back B in a substantially S-shaped pattern. In this case, you may spray in any pattern of Fig.6 (a)-(d).

  After the air nozzle 12a is operated for a preset time (S14), the air nozzle 12a is moved up and down and left and right to switch the blowing direction (S15), and then the air nozzle is moved as shown in FIGS. 9 (a) and 9 (b). 12a blows out the dust E which is blown out and floats as described above toward the exhaust port 13 in the direction H '(S16).

  Next, the dust amount in the air shower chamber R is measured (S17), and the control unit 100 determines whether the measured dust amount is equal to or less than a predetermined value stored in the memory 108 (S18). Returns to step S13 and repeats the same steps. In this case, control may be performed so as to return to step S16 as indicated by a broken line in FIG.

  If the measured dust amount is less than or equal to the predetermined value, the air nozzle 12a is turned off and the process is terminated (S19).

  According to the operation of the air shower device of FIG. 7, dust discharge from the occupant A and discharge of the dust that is blown out and floated are performed separately, so that the dust that is blown out and floats efficiently It can be discharged, and re-adhesion of the dust that has been knocked out to the occupant A can be prevented. Further, since the operation of the air nozzle unit 12 is controlled based on the body shape information of the room occupant A, the necessary range can be knocked out, and the energy saving operation of the air shower device can be realized.

  As described above, according to the first and second embodiments, it is efficient by separately ejecting the necessary range for the occupant and quickly discharging the dust that is ejected and floated. Therefore, it is possible to reliably prevent the dust from adhering to the occupant in the air shower room.

  Thereby, the dust removal efficiency in the air shower room R placed in front of the clean room can be increased, and entry of dust or the like into the clean room communicating with the air shower room R can be prevented.

  Moreover, since the spraying to the occupant is performed based on the shape and size of the occupant (object to be cleaned), it is not necessary to blow out air from all the air nozzles as in the prior art, which can contribute to the realization of energy saving operation. In addition, the occupant (the object to be cleaned) does not need to move the body because dust is knocked off. Furthermore, the optimum spraying and floating dust discharge are possible regardless of the shape of the air shower room.

  In FIGS. 7 to 9, dust is ejected by the air nozzle 12 a and then the floating dust discharge operation is performed. However, the air nozzle 11 a may be used. Further, the same operation may be performed on the back C side by the air nozzle 11b or 12b.

  Further, when the blowing range is divided into divided ranges S1 to S4 as shown in FIG. 5B, each air nozzle 21 to 24 sprays each divided range S1 to S4 in the pattern of the same figure, and then FIG. Similarly, control can be performed so that floating dust is discharged by the same air nozzles 21 to 24.

  Next, with reference to FIG. 10, FIG. 11, two examples of the specific arrangement | positioning of the exhaust port of the air shower chamber of FIG. 2, FIG. 3 are demonstrated. FIG. 10 is a schematic perspective view (a) of the inside of the air shower chamber and the entrance side of the air shower chamber in order to explain a first arrangement example of the exhaust port of the air shower chamber of FIGS. It is the schematic figure (b) which looked at the inside from.

  FIG. 11 is a schematic perspective view of the inside of the air shower chamber for explaining a second arrangement example of the exhaust ports of the air shower chamber of FIGS. 2 and 3.

  10 (a) and 10 (b) are arranged in the air shower room R as seen from the occupant A walking in the traveling direction I as shown in FIG. 10 (b). And a wall exhaust port 26 is arranged above the right side wall R2. When each air nozzle 11a, 11b, 12a, 12b is operated so as to discharge dust that is blown out from the occupant A and floats, as shown in the figure, the air outlet 26 on the upper side of the side wall R2 facing the air nozzles 11a, 11b. The air is blown out toward the air outlet, and the air is blown out toward the exhaust port 25 at the lower part of the side wall R1 facing the air nozzles 12a, 12b.

  In the arrangement example of FIG. 11, in the air shower room R, a floor exhaust port 28 is arranged below the floor, and a ceiling exhaust surface 27 is arranged on the ceiling. When each air nozzle 11a, 11b, 12a, 12b is operated so as to discharge dust that is ejected from the occupant A and floats, for example, the air nozzles 11a, 11b are directed toward the ceiling exhaust surface 27 as shown in the figure. Air is blown out, and the air nozzles 12 a and 12 b blow out air toward the floor exhaust port 28.

  Next, four examples of arrangement of a plurality of air nozzles will be described with reference to FIG. FIG. 12 is a schematic perspective view (a) to (d) of the inside of the air shower chamber for explaining the positions of a plurality of air nozzles arranged in the air shower chamber of FIGS.

  In the example of FIG. 12A, air nozzles A1 and A2 are arranged on the left side wall R1 of the air shower chamber R on the front side in the traveling direction I (similar to FIG. 10B), and the rear side on the top and bottom. Air nozzles A3 and A4 are arranged. Further, on the right side wall R2, air nozzles A5 and A6 are arranged above and below the front side in the traveling direction I, and air nozzles A7 and A8 are arranged above and below the rear side. Each of the air nozzles A1 to A8 can be used for both discharging dust and discharging floating dust.

  In the example of FIG. 12B, air nozzles B1 and B2 are arranged above and below the corner K1 on the front left side in the traveling direction I of the air shower chamber R, and air nozzles B3 and B4 are arranged above and below the corner K2 on the rear left side. Air nozzles B5 and B6 are arranged above and below the front right corner K3, and air nozzles B7 and B8 are arranged above and below the rear right corner K4. Each of the air nozzles B1 to B8 can be used for both discharging dust and discharging floating dust.

  12 (a) and 12 (b), the air is divided from the air nozzles A1 to A8 or B1 to B8 toward the chest / abdominal side and back side of the occupant A as shown in FIG. 5 (b), for example. After spraying each of the ranges S1 to S4 with the pattern shown in the figure, the air nozzles A1 to A8 or B1 to B8 can be blown out toward the exhaust port in order to discharge dust that is blown out and floats. .

  In the example of FIG. 12C, the air nozzles C1 to C4 are arranged on the left side wall R1 of the air shower chamber R, the air nozzles C5 to C8 are arranged on the right side wall R2, and further, between the height directions of the air nozzles C1 and C2. Air nozzle CC1, air nozzle CC2 between the height directions of air nozzles C3 and C4, air nozzle CC3 between the height directions of air nozzles C5 and C6, and air nozzle CC4 between the height directions of air nozzles C7 and C8, respectively. The air nozzles C1 to C8 are exclusively used for dust discharge, and the air nozzles CC1 to CC4 are exclusively used for discharging floating dust.

  In the example of FIG. 12D, air nozzles D1 to D4 are arranged in the corners K1 and K2 on the front and rear left sides of the air shower chamber R, and air nozzles D5 to D8 are arranged in the corners K3 and K4 on the front and rear right sides. Furthermore, the air nozzle DD1 is disposed between the air nozzles D1 and D2, the air nozzle DD2 is disposed between the air nozzles D3 and D4, the air nozzle DD3 is disposed between the air nozzles D5 and D6, and the air nozzle D7. The air nozzles DD4 are respectively arranged between the height directions of D8, the air nozzles D1 to D8 are dedicated to dust discharge, and the air nozzles DD1 to DD4 are dedicated to discharging floating dust.

  12 (c) and 12 (d), the air is divided from the air nozzles C1 to C8 or D1 to D8 toward the chest / abdominal side and back side of the occupant A as shown in FIG. 5 (b), for example. After spraying each of the ranges S1 to S4 in the pattern shown in the figure, the air nozzles CC1 to CC4 or DD1 to DD4 can be blown out toward the exhaust port in order to discharge the dust that is blown out and floats. Further, the air nozzles CC1 to CC4 or DD1 to DD4 may blow out floating dust almost simultaneously with the air nozzles C1 to C8 or D1 to D8.

  Note that air nozzles C1 to C8, CC1 to CC4, DD1 to DD4, and D1 to D8 in FIGS. it can.

  Next, the spraying time from each air nozzle described above to the occupant will be described. According to the above-mentioned Non-Patent Document 1, it has been found that if air is blown to the object to be cleaned for 5 seconds or more, the dust removal efficiency becomes almost constant and does not depend on the blowing time, and generally about 20 seconds. Since it is sprayed, it is preferable that the time for blowing air to the object to be cleaned is about 5 to 20 seconds.

  In addition, by using the dust amount measuring unit 107 in FIG. 1, the relationship between the blowing time of the air nozzle and the measured dust amount in the room is obtained in advance, and the air nozzle is operated at the blowing time obtained from the relationship. Also good.

  As described above, the best mode for carrying out the present invention has been described. However, the present invention is not limited to these, and various modifications are possible within the scope of the technical idea of the present invention. For example, in the present embodiment, the object to be cleaned is a human, but the present invention is not limited to this, and it is needless to say that the object may have various shapes carried into a clean room.

  In addition, the air shower apparatus and the air shower method of the present invention can be used in an air shower room placed in a clean room for various uses, but the present invention is not limited to this. May be used. In the present specification, the clean room refers to a space in which suspended particulates and suspended microorganisms are managed regardless of the allowable amount of suspended matter such as dust.

  For example, in the operation flow of FIG. 4, after step S07 is completed, the process returns to step S03 so that the second air nozzle unit 12 discharges dust and the first air nozzle unit 11 discharges floating dust. The second air nozzle 12 and the first air nozzle unit 11 may be operated in the same manner by changing the blowing direction from the air nozzle to the occupant A in this order.

  Moreover, in FIG. 1, although the air blower 10, the exhaust fan 15, etc. were turned on / off with the operation switch 104, as shown with the broken line of FIG. 1, the door sensor 105 for automatic doors is provided in the entrance of an air shower room, A human sensor 106 composed of an infrared sensor or the like may be provided on the side surface of the shower room and the like, and the door sensor 105 or the human sensor 106 may be turned on / off upon detection of a person entering the room.

It is a figure which shows roughly the control system of the air shower apparatus by 1st Embodiment. It is a perspective view which shows the apparatus roughly in order to demonstrate operation | movement of the air shower apparatus by 1st Embodiment. It is a top view which shows the apparatus roughly in order to demonstrate operation | movement of the air shower apparatus of FIG. It is a flowchart for demonstrating operation | movement step S01 thru | or S09 of the air shower apparatus by 1st Embodiment. FIG. 6A is a diagram schematically illustrating a range in which the air nozzle stored in the memory 108 in FIG. 1 blows air toward the occupant, and FIG. 5B is a diagram in which the range of blowing air in FIG. . It is a figure which shows typically the example (a)-(d) of the pattern from which the air nozzle memorize | stored in the memory 108 of FIG. It is a flowchart for demonstrating operation | movement step S11 thru | or S19 of the air shower apparatus by 2nd Embodiment. FIG. 6 is a perspective view (a) and an upper surface part (b) schematically showing an air shower device in order to explain dust dusting operation in the second embodiment. FIG. 9 is a perspective view (a) and an upper surface part (b) schematically showing the air shower device for explaining the discharging operation of the floating dust ejected as shown in FIG. 8. 2 and 3, a schematic perspective view (a) of the inside of the air shower chamber and the inside of the air shower chamber viewed from the entrance side in order to explain the first arrangement example of the exhaust port of the air shower chamber. It is a schematic diagram (b). It is the schematic perspective view which looked at the inside of an air shower room in order to demonstrate the 2nd example of arrangement | positioning of the exhaust port of the air shower room of FIG. 2, FIG. FIG. 4 is a schematic perspective view (a) to (d) of the inside of the air shower chamber, for explaining the positions of a plurality of air nozzles arranged in the air shower chamber of FIGS. 2 and 3.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 1st air nozzle part 11a, 11b Air nozzle 12 2nd air nozzle part 12a, 12b Air nozzle 13, 14, 25, 26 Wall exhaust port 21-24 Air nozzle 27 Ceiling exhaust surface 28 Floor surface exhaust port 100 Control part 101 Input part 102 Card reader 107 Dust measurement unit 108 Memory A Entering room (object to be cleaned)
A1 to A8 Air nozzles B1 to B8 Air nozzles C1 to C8 Air nozzles CC1 to CC4 Air nozzles D1 to D8 Air nozzles DD1 to DD4 Air nozzles E and D Dust R Air shower chamber R1 Left side wall R2 Right side wall S Blowing range S1, S2, S3, S4 S1, S2, S3, S4 each divided range

Claims (17)

  An air shower apparatus characterized in that the air nozzle that blows out air separately discharges dust from the object to be cleaned and discharges the dust that is blown out and floats. An air nozzle that blows out air;
An exhaust port for discharging floating dust to the outside;
A controller that controls the operation of the air nozzle so as to eject dust from the object to be cleaned and to discharge dust that has been ejected and floated based on the shape information of the object to be cleaned; An air shower device.   The air shower apparatus according to claim 2, wherein the air nozzle includes a nozzle exclusively for blowing out the object to be cleaned and a nozzle exclusively for discharging floating dust that blows out toward the exhaust port.   The air shower apparatus according to claim 2, wherein the air nozzle includes an air nozzle that can be switched between blowing air to the object to be cleaned and discharging floating dust.   The air according to any one of claims 2 to 4, wherein a blowing pattern and / or a blowing range of the air nozzle to the cleaned object is set based on shape information of the cleaned object input to the control unit. Shower equipment.   The air shower device according to claim 5, wherein the blowing range is divided based on shape information of the object to be cleaned.   The air shower apparatus according to any one of claims 1 to 6, wherein a blowing time of the air nozzle is set in advance.   The air shower apparatus according to any one of claims 1 to 7, further comprising a dust amount measuring unit that measures the amount of dust in the room, and the blowout of the air nozzle is controlled based on the dust amount measurement result.   The air shower device according to any one of claims 1 to 8, wherein a blowout range of the floating dust discharge nozzle is changed in correspondence with a blowout range of the blowout nozzle to the cleaning target. A first step of blowing out air from the first air nozzle to the object to be cleaned and discharging dust from the object to be cleaned;
A second step of discharging air from a second air nozzle and discharging the dust that is blown out and floated.   The air shower method of Claim 10 which sets the blowing pattern and / or blowing range with respect to the said to-be-cleaned body of the said air nozzle based on the shape information of the to-be-cleaned body.   The air shower method according to claim 10 or 11, wherein after the first step of knocking out dust from the object to be cleaned, a second step of discharging dust that is blown out and floats is performed.   The air shower method according to claim 12, wherein the second step is performed using the first air nozzle.   The air shower method according to claim 10 or 11, wherein the first and second air nozzles are operated substantially simultaneously.   The air shower method according to any one of claims 10 to 14, wherein the amount of dust in the room is measured, and the operation of the air nozzle is controlled based on the measurement result.   The relationship between the blowing time of the air nozzle and the amount of dust measured in the room is obtained in advance, and the operation of the air nozzle is controlled by the blowing time obtained from the relationship. Air shower method. The method further includes inputting shape information of the object to be cleaned.
The air shower method according to claim 10, wherein the air nozzle is operated after the shape information is input.

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