JP2005090763A - Air shower device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air shower device capable of quickly performing the air shower treatment, and preventing the dust once brushed off from attaching to a human body again and being carried to a clean room. <P>SOLUTION: This air shower device operates an exhausting fan 5 in a low output mode from the termination of brushing-off of dust to the start of leaving a room, so that an air supply volume and an air exhaust volume by a laminar flow blowout fan 3 continuously operated in a set output mode and an air shower blast fan 4 means operated in a low output mode are antagonistic to each other, whereby the dust brushed off by the laminar flow from a ceiling 11 is reduced, and further the laminar flow flowing down in the air shower room 2 is sucked from the approximately whole face of a floor face and exhausted to the outside by the exhausting fan 5. This air shower device prevents the outflow of the dust to the outside of the air shower room 2 in leaving the room by applying the negative pressure to the air shower room 2, and an exhaust hole 19 for communicating an exhaust duct 20 and an exhaust chamber 23 is formed on a side wall 15 of the air shower room 2 to quickly exhaust the dust floating in the air shower room 2 to the outside. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an air shower device installed at the entrance of a clean room.

The air shower device installed at the entrance of the clean room ejects air shower from the overhead and side ejection nozzles at a wind speed of about 18 m per second to wipe off dust adhering to the human body and clothes. And the dust which exhausted and exhausted indoor air from the floor surface is collected with a filter. However, the dust that has been swept away by the air shower descends and reattaches to the human body. Furthermore, it takes time to completely collect floating dust due to exhaust from the floor. Further, as disclosed in JP-A-5-248678 and JP-A-7-293958, since it is a system for circulating indoor air, it takes time to completely collect dust. In addition, there is a problem in that supply and exhaust are stopped simultaneously by stopping the circulation fan, and dust remains in the room and flows into the clean room.
JP-A-5-248678 Japanese Patent Laid-Open No. 7-293958

  The problem to be solved by the invention is to perform air shower processing promptly and prevent dust that has been removed from reattaching to the human body and being brought into the clean room.

  An air shower apparatus according to claim 1 of the present invention for solving the above-described problems is provided with an air shower injection means for injecting an air shower from a side wall of the air shower chamber, and substantially directly below the entire ceiling of the air shower chamber. An air shower device comprising laminar air jetting means for jetting laminar air and exhaust means for sucking air in the air shower chamber from substantially the entire floor surface of the air shower chamber and exhausting it to the outside, In the dust removal operation after entering the air shower chamber and closing the door, the air shower injection means, the laminar flow injection means and the exhaust means are operated in the set output mode, respectively, and the dust removal is performed. From the end of operation to the start of leaving the room for leaving the room, the air shower injection means is operated in a lower output mode than the set output mode, and The exhaust means so that the supply amount by the laminar flow ejecting means that continues to operate in the defined output mode and the air shower injection means that operates in the low output mode and the exhaust amount of the exhaust means antagonize Is operated in a lower output mode than the set output mode.

  According to a second aspect of the present invention, in the configuration of the first aspect, the air shower apparatus stops either the laminar flow ejecting means or the air shower ejecting means from the start of leaving the room to the completion of leaving the door. The exhaust means is operated at an output higher than the output of either the laminar flow ejecting means or the air shower ejecting means for which the operation is continued, and the air shower chamber has a negative pressure. To do.

  According to a third aspect of the present invention, there is provided the air shower apparatus according to the first or second aspect, wherein an exhaust hole communicating with the exhaust means is provided in a side wall of the air shower chamber.

  According to the air shower device of the first aspect, the air shower injection means, the laminar flow injection means and the exhaust means are operated in the set output mode, respectively, from the end of the dust removal operation to the start of the room exit. The shower jetting means operates in a lower output mode than the set output mode, and the laminar flow jet means that continues to operate in the output mode in which the exhaust amount of the exhaust means is set, and an air shower that operates in the low output mode The exhaust means is operated in a lower output mode than the set output mode so as to antagonize the supply amount by the injection means. Therefore, the dust flowed off by the laminar flow ejected from the ceiling is suppressed to prevent the air from rising, and the laminar flow flowing down the air shower chamber is sucked from the entire surface of the floor as it is and exhausted to the outside. Therefore, the dust that has been wiped off is not reattached to the human body and brought into the clean room.

  According to the air shower device of the second aspect, from the start of leaving the room to the completion of closing the door, either the laminar flow ejecting means or the air shower ejecting means is stopped and the exhaust means is continuously operated. Since the air shower chamber is operated at a higher output than the output of either the laminar flow ejecting means or the air shower ejecting means to make the air shower chamber have a negative pressure, it is possible to prevent the dust from flowing out of the air shower chamber when leaving the room.

  According to the air shower device of the third aspect, since the exhaust hole communicating with the exhaust means is provided in the side wall of the air shower chamber, the dust that is blown off and floats in the air shower chamber is quickly exhausted to the outside. The air shower processing time can be shortened. Then, during the period from the end of the dust removal operation to the start of leaving the room, the air shower jetting means continues to operate in a lower output mode than the set output mode, thereby generating a laminar flow in the horizontal direction. It is possible to facilitate exhaust from the exhaust holes.

  The purpose of the air shower treatment is to prevent the dust that has been removed from reattaching to the human body and being brought into the clean room. Supplied by a laminar flow jet means that operates in a lower output mode than the set output mode and continues to operate the exhaust means in the set output mode, and an air shower jet means that operates in the low output mode The engine was operated in an output mode in which the exhaust volume antagonized. From the start of the exit to the completion of the exit, the air shower chamber was made negative, and an exhaust hole communicating with the exhaust means was provided on the side wall of the air shower chamber.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a configuration diagram schematically showing an air shower device 1 according to the present invention. The air shower device 1 includes an air shower chamber 2, a laminar flow ejection fan 3, an air shower ejection fan 4, an exhaust fan 5, and the like.

  The air shower chamber 2 is kept airtight when a door (not shown) is closed. A ceiling chamber 13 closed with a filter 12 is formed inside the ceiling 11. The ceiling chamber 13 is connected to an air supply pipe 14 having a laminar flow fan 3 interposed therebetween. On the side wall 15 of the air shower chamber 2, a number of nozzles 16 for injecting the air shower substantially horizontally are arranged. Each nozzle 16 is connected to an air supply pipe 17 having an air shower jet fan 4 interposed therebetween. One end of each of the air supply pipe 14 and the air supply pipe 17 is connected to the filter box 18. A number of exhaust holes 19 are formed in the side wall 15 of the air shower chamber 2. Each exhaust hole 19 communicates with an exhaust duct 20 formed around the side wall 15.

  Exhaust holes 22 are formed in substantially the entire surface of the floor 21 of the air shower chamber 2. An exhaust chamber 23 is formed on the lower surface of the floor 21. An exhaust duct 20 is connected to the exhaust chamber 23, and an outdoor exhaust pipe 24 with an exhaust fan 5 interposed is connected. The laminar jet fan 3, the air shower jet fan 4, and the exhaust fan 5 are controlled according to a predetermined air shower processing program by a control device (not shown).

  FIG. 2 is a timing chart showing air shower processing by the air shower device 1 having the above-described configuration. When it is detected that the door (not shown) is closed after entering the air shower room 2, the dust removal operation is started. In the dust removal operation, the laminar flow ejection fan 3, the air shower ejection fan 4, and the exhaust fan 5 are turned on, and each is operated in the set output mode.

  The air supplied from the air supply pipe 14 to the ceiling chamber 13 when the laminar flow fan 3 is turned on passes through the filter 12 that closes the ceiling chamber 13 to become a laminar flow, and is almost directly below at a wind speed of about 2 m per second. To erupt. The air supplied from the air supply pipe 17 when the air shower jet fan 4 is turned on is jetted substantially horizontally from each nozzle 16 at a wind speed of about 35 m / sec. The jetted air hits the human body and removes dust adhering to the human body and clothes, and becomes turbulent and causes the dust to rise into the air shower chamber 2. The soaring dust is suppressed by the laminar flow that passes through the filter 12 of the ceiling chamber 13 and is jetted almost directly below, and does not scatter to the vicinity of the ceiling 11.

  When the exhaust fan 5 is turned on, the air in the air shower chamber 2 is sucked into the exhaust chamber 23 from the exhaust hole 22 formed on the entire surface of the floor 21 and exhausted through the outdoor exhaust pipe 24. The exhaust chamber 23 communicates with the exhaust duct 20 formed around the side wall 15 of the air shower chamber 2, and the exhaust duct 20 communicates with the exhaust hole 19 formed in the side wall 15. The air in the air shower chamber 2 is sucked and exhausted.

  During the period from the end of the dust removal operation that has continued for a predetermined time to the start of exit that opens the door, the laminar flow fan 3 continues to operate in the set output mode. The air shower jet fan 4 is operated in a lower output mode than the set output mode. The exhaust fan 5 has an exhaust amount that antagonizes the amount of air supplied by the laminar jet fan 3 and the amount of air supplied by the air shower injection fan 4 operated in the low output mode. In addition, the engine is operated in a lower output mode than the set output mode. Thereby, the dust floating in the air shower chamber 2 is suppressed by the laminar flow ejected from the ceiling 11 and is exhausted to the outdoors by a so-called push-pull action sucked from the exhaust holes 19 and 22.

  Then, during the period from the start of leaving the room to the time when the door is closed, the laminar jet fan 3 is stopped, and the exhaust fan 5 has a lower output than the low output mode and the low output mode. The operation is performed at a higher output than the output of the air shower injection fan 4 that continues the operation. Thereby, the inside of the air shower chamber 2 is kept at a negative pressure.

  The air shower apparatus 1 configured as described above starts leaving the room after the dust removal operation for operating the laminar flow ejection fan 3, the air shower ejection fan 4 and the exhaust fan 5 in the set output mode is completed. Until the air shower injection fan 4 operates in a lower output mode than the set output mode, and the exhaust fan 5 continues to operate in the set output mode, Since the operation is performed in the low output mode rather than the set output mode so that the supply amount and the exhaust amount by the air shower injection fan 4 operating in the low output mode compete with each other, the air is ejected from the ceiling 11. The laminar flow suppresses the dust that has been removed to prevent the air from rising, and the laminar flow that flows down in the air shower chamber 2 is caused by the exhaust fan 5 to be substantially the entire floor surface. By being sucked push-pull effect is exhausted to the outdoors, that the dust shaken off is brought into the clean room and re-attached to the human body can be prevented.

  Also, from the start of the room exit to the completion of the room exit, the laminar jet fan 3 is stopped and the exhaust fan 5 is operated at an output higher than the output of the air shower jet fan 4 that continues to operate in the low output mode. Since the air shower chamber 2 has a negative pressure, it is possible to prevent the dust from flowing out of the air shower chamber 2 when leaving the room.

  Incidentally, during the period from the start of the exit to the completion of the exit when the door is closed, either the laminar jet fan 3 or the air shower jet fan 4 is stopped and the exhaust fan 5 is continuously operated. It is also possible to operate at a higher output than the output of either the laminar flow ejection fan 3 or the air shower ejection fan 4 to make the air shower chamber 2 have a negative pressure.

  Further, since the exhaust hole 19 communicating with the exhaust duct 20 and the exhaust chamber 23 is provided in the side wall 15 of the air shower chamber 2, the dust that is blown off and floats in the air shower chamber 2 can be quickly exhausted to the outside. The air shower treatment time can be shortened. Then, during the period from the end of the dust removal operation to the start of the room exit, the air shower jet fan 4 is continuously operated in a lower output mode than the set output mode, thereby generating a horizontal laminar flow. Thus, the exhaust from the exhaust hole 19 of the side wall 15 can be facilitated.

It is the block diagram which showed the air shower apparatus typically. It is the timing chart which showed the air shower process by an air shower apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Air shower apparatus 2 ... Air shower room 3 ... Laminar jet fan 4 ... Air shower jet fan 5 ... Exhaust fan 11 ... Ceiling 15 ... Side wall 16 ... Nozzles 19, 22 ... Exhaust hole 20 ... Exhaust duct 21 ... Floor 23 ... Exhaust chamber

Claims (3)

Air shower jetting means for jetting an air shower from the side wall of the air shower chamber;
Laminar flow ejecting means for ejecting laminar air from substantially the entire surface of the ceiling of the air shower chamber;
An air shower apparatus comprising exhaust means for sucking air in an air shower room from substantially the entire floor surface of the air shower room and exhausting the air to the outside,
In the dust removal operation after entering the air shower chamber and closing the door, the air shower injection means, laminar flow injection means and exhaust means are operated in the set output mode,
From the end of the dust removal operation to the start of leaving the door for leaving,
The air shower injection means is operated in a lower output mode than the set output mode, and laminar flow injection means for continuing operation in the set output mode, and an air shower injection operating in the low output mode An air shower device characterized in that the exhaust means is operated in a lower output mode than the set output mode so that the supply amount by the means and the exhaust amount of the exhaust means are in competition with each other .   From the start of leaving the room to the completion of leaving the door, the laminar flow ejecting means or the air shower injecting means in which either the laminar flow ejecting means or the air shower ejecting means is stopped and the exhaust means is continuously operated. The air shower device according to claim 1, wherein the air shower device is operated at an output higher than any one of the outputs so that the air shower chamber has a negative pressure.   The air shower apparatus according to claim 1 or 2, wherein an exhaust hole communicating with the exhaust means is provided in a side wall of the air shower chamber.

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