JP2008121038A - Apparatus for applying patterning film and vacuum deposition apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture a plate for forming an oil film by using a rigid material and to constitute the whole of an apparatus for applying patterning films with a rigid material so as to enhance the durability and to continuously form various oil masking patterns stably. <P>SOLUTION: The apparatus for applying patterning films is equipped with: an inner pipe 2 having an opening part 6 for passing oil vaporized for forming a patterning film in the inner pipe 2; an outer pipe frame 10 which is provided to cover the outer periphery of the inner pipe 2 and in which opening parts 7 are provided; and rigid nozzle plates 4 which are provided so as to be each superposed with respective opening parts 7 of the outer pipe frame 10 and each have a through-hole group 9 comprising a plurality of through-holes 5 for spraying vaporized oil. The shape or alignment pattern of the through-holes 5 constituting the through-hole group 9 is made different in each rigid nozzle plate 4. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a patterning film coating apparatus that forms a patterned film on a substrate in a vacuum and a vacuum deposition apparatus including the same.

  When manufacturing a film capacitor, it is necessary to form a non-metal film portion called a margin. The margin is formed by the following method.

  First, the film is fed out from a feeding roller in a vacuum and traveled, and masking oil is sprayed from a patterning film coating device to a portion that becomes a margin on the film to form an oil film in a strip shape. Next, metal deposition is performed on a film having an oil film formed in a band shape on the surface. Then, metal is deposited on the portion where the oil film is not formed, and an electrode film is formed. On the other hand, no metal is deposited on the portion where the oil film is formed. In this way, a non-metal film portion called a margin is formed.

  A conventional patterning film coating apparatus will be described with reference to FIGS.

  The conventional example shown in FIG. 8 has a structure in which a plurality of same-shaped through holes 82 that can be sprayed with masking oil are formed in a metal pipe 81 supplied with masking oil so as to form a through hole group 83. .

  In addition, as shown in FIGS. 9A and 9B, generally, the width of the margin and the distance between adjacent margins differ depending on the product type. Therefore, it is necessary to change the oil film arrangement pattern (margin width Lc and distance Ld between adjacent margins) for forming a margin in the films 90 and 91. That is, it is necessary to replace the patterning film coating apparatus every time the product type is switched, and there is a problem that it takes much time. In addition, since vacuum equipment is used, it takes time to evacuate each time the patterning film coating apparatus is replaced, resulting in a problem that production efficiency is extremely deteriorated.

As a solution to this problem, in the invention described in Patent Document 1, as shown in the explanatory view of FIG. 10, a tubular masking roll 101 to which masking oil is supplied is provided, and the masking roll 101 has a peripheral surface. The masking oil 105 that is provided and from which the masking oil 105 supplied to the inside of the masking roll 101 is discharged is overlapped with the opening 102 on the outer periphery of the masking roll 101. Patterning provided with a nozzle plate (hereinafter referred to as a flexible nozzle plate) 104 made of a flexible material provided with several types of through-hole groups (each of the through-holes may be rectangular or circular) 103 provided therethrough. Using the film coating apparatus 100, the flexible nozzle plate 104 is moved to the arrow in FIG. By feed direction, by changing the pattern of Toruanagun 103, a method of producing continuously a plurality of varieties one raw film employed was to improve production efficiency.
JP 2001-279425 A

  However, the conventional patterning film coating apparatus 100 as disclosed in Patent Document 1 has a problem in heat resistance because the flexible nozzle plate 104 is weak in strength as a component, and the flexible nozzle plate 104 is heated when the masking oil is heated. There existed a subject that it deform | transformed and a through-hole part will spread. Furthermore, the corner | angular part of the through-hole part stood up and the base film might be damaged. Because of the above durability issues, it had to be replaced after several productions.

  The present invention solves the above-mentioned conventional problems, and makes it possible to produce a plate for forming an oil film with a rigid material, and to make the patterning film coating apparatus all rigid. Another object of the present invention is to provide a patterning film coating apparatus capable of improving durability and stably forming many types of oil masking patterns in succession, and a vacuum deposition apparatus including the same.

  In order to achieve the above object, the invention according to claim 1 is a patterning film coating apparatus for forming a film patterned in a predetermined shape on a substrate in a vacuum, and is used as a raw material for the patterning film therein. An inner pipe having a supply section to which a liquid is supplied and having an opening for discharging the liquid; an outer pipe provided so as to cover the inner pipe; and the liquid supplied to the inside of the inner pipe At least one through-hole that is formed in a row in the longitudinal direction of the outer tube, and a plurality of the through-hole groups are provided on the outer tube peripheral surface, The shape or arrangement pattern of the through holes forming the group is different, the outer tube is rotatable, the outer tube is rotated, and the opening of the inner tube is aligned with the group of the through holes. The type of the through hole group is switched by the above.

  With such a configuration, a patterning film coating apparatus having excellent durability can be provided, and a patterning film having a plurality of array patterns can be formed.

  According to a second aspect of the present invention, in the patterning film coating apparatus according to the first aspect, the outer tube includes an outer tube frame having a plurality of openings on the peripheral surface, and a plurality of nozzle plates having a group of through holes. The plurality of nozzle plates are installed in alignment with the openings of the outer tube frame, and the nozzle plates are detachable.

  With such a configuration, it is possible to cope with the formation of patterning films having many patterns by replacing the nozzle plate provided with the through hole rows.

  The patterning film coating apparatus according to claim 3 is the patterning film coating apparatus according to claim 1 or 2, wherein a heater is embedded in the outer pipe so that the temperature of the inner pipe and the outer pipe can be controlled independently. It is characterized by that.

  With such a configuration, when the liquid supplied to the inner tube is heated to become vapor, the patterning film is stably formed without the vapor condensing on the outer tube peripheral surface or the rigid nozzle plate surface. be able to.

  The vacuum deposition apparatus according to claim 4, wherein a feeding roller that feeds out a base film, a patterning film coating unit that forms a patterning film in a predetermined shape on the base film that is fed from the feeding roller and travels, A vacuum deposition apparatus comprising: a vapor deposition unit that deposits metal on the base film that is fed from a feed roller and travels; and a winding roller that winds the base film on which the metal is deposited. The patterning film coating apparatus according to any one of claims 1 to 3 is mounted as the film coating unit.

  According to the patterning film coating apparatus and the vacuum deposition apparatus according to the present invention, the durability of the patterning film coating apparatus can be improved by making all the constituent members of the patterning film coating apparatus rigid. A patterning film having a plurality of array patterns can be continuously formed.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below by taking, as an example, the formation of a margin in a film capacitor and the formation of a light emitting layer of an organic EL device, while explaining the structure of a patterning film coating apparatus in detail with reference to the drawings.

  FIG. 1 is a perspective view showing a part of an embodiment of a patterning film coating apparatus according to the present invention in a longitudinal section, and FIG. 2 is a perspective view showing an outer tube frame and a rigid nozzle plate which are the main parts of this embodiment. .

  As shown in FIGS. 1 and 2, the patterning film coating apparatus 1 according to the present embodiment is configured such that oil (not shown) for forming a patterning film supplied to the inner tube 2 is evaporated by heating and is evaporated. The inner tube 2 provided with an opening 6 through which the outer tube can pass, the outer tube frame 10 provided so as to cover the outer periphery of the inner tube 2 and provided with the opening 7, and the opening 7 of the outer tube frame 10 A rigid nozzle plate 4 made of a rigid body having a plurality of through holes 5 in which a plurality of through holes 5 for spraying vaporized oil are provided in a row, and for heating the rigid nozzle plate 4. And a heater 8.

  The shape or arrangement pattern of the through holes 5 forming the through hole group 9 is different in each rigid nozzle plate 4.

  When the oil film is formed, the opening 6 provided in the inner tube 2 and the opening 7 provided in the outer tube frame 10 are assembled in alignment. The oil is supplied to the inner tube 2, is vaporized by heating the inner tube 2, and is sprayed from each through hole 5 of the through hole group 9 provided in the rigid nozzle plate 4 through the opening 6 and the opening 7. The In addition, the directly evaporated oil may be supplied to the inside of the inner pipe 2.

  Although not shown, the base film is running so as to be in contact with the rigid nozzle plate 4, and an oil film is formed on the film.

  Hereinafter, margin formation in the film capacitor will be described with reference to FIG. FIG. 3 is a schematic configuration diagram of an embodiment of a vacuum deposition apparatus provided with a patterning film coating apparatus according to the present invention.

  In the vacuum vapor deposition apparatus 30 shown in FIG. 3, a film 35 using a polymer film such as polyethylene terephthalate, polyethylene naphthalate, polystyrene, and polypropylene as a base film is fed from a feeding roller 31, and paraffinic oil or fluorinated oil. An oil film is formed on one surface of the film 35 when it passes through the patterning film coating unit 32 having the same configuration as that of the patterning film coating apparatus of the embodiment.

  Next, when passing through the metal deposition unit 33, a metal such as aluminum or copper is deposited. At this time, the metal film is formed on the portion where the oil film is not formed, but the metal film is not formed on the portion where the oil film is formed because the oil film serves as a mask. The portion where the metal film is not formed becomes a margin of the film capacitor.

  Then, the film 35 continues to run as indicated by the arrow in FIG. 3, and a metal film with a margin is formed in the same manner as the surface opposite to the surface on which the metal film is formed, It is wound up by a winding roller 34.

  Details of the formation of the oil film will be described below. The oil is vaporized by heating the inner pipe 2 to which the oil is supplied at a temperature (for example, about 100 ° C. to 200 ° C.) at which the amount of oil evaporation becomes a certain level or more. The vaporized oil is sprayed through the openings 6 of the inner tube 2, the openings 7 of the outer tube frame 10, and the through holes 5 of the through hole group 9 provided in the rigid nozzle plate 4.

  At this time, if the temperature of the rigid nozzle plate 4 is low, the vaporized oil aggregates on the surface of the rigid nozzle plate 4 and stable vapor spraying cannot be performed. Therefore, it is necessary to control the temperature of the rigid nozzle plate 4 by the heater 8. The temperature of the rigid nozzle plate 4 is preferably set to be equal to or higher than the temperature of the oil in consideration of avoiding the aggregation of the vaporized oil. The sprayed oil vapor radiates heat after adhering to the film to form a solid or viscous liquid oil film.

  Next, the superiority when producing using the patterning film coating apparatus 1 of the present embodiment as compared with the case where the margin is formed using the patterning film coating apparatus 100 shown in FIG. 10 will be described. In addition, the non-defective product judgment is two points that the margin width is within the specification and that the film is not damaged.

  FIG. 4 shows a schematic view of a rigid nozzle plate 4 which is one of the components of the patterning film coating apparatus 1 of this embodiment. The width La of the through hole 5 of the rigid nozzle plate 4 is 0.35 mm ( The design value of the margin width to be formed is 0.4 mm). In general, since the margin width becomes larger than the width La of the through hole 5, it is general to design the through hole width La slightly smaller than the designed margin width.

  FIG. 5 shows the measurement result of the margin width when the margin is formed using the patterning film coating apparatus 1 of the present embodiment. The rigid nozzle plate used was La = 0.35 mm shown in FIG. At this time, the allowable dimension specification of the margin width is 0.4 ± 0.1 mm. As can be seen from FIG. 5, the margin width is within the specifications in all the margins in the three experiments.

  On the other hand, the measurement result of the margin width when the margin is formed by using the patterning film coating apparatus 100 shown in FIG. 10 is shown in FIG. 6, and there is a margin that is out of spec in three experiments. I understand.

  The through-hole of the patterning film coating apparatus corresponding to the spec-out margin is considered to have widened the margin width because it was deformed by heat. In addition, many scratches are formed on the film, and these scratches are considered to be caused by the flexible nozzle plate of the patterning film coating apparatus which is deformed and square. From these experiments, it can be said that the patterning film coating apparatus 1 of this embodiment is excellent in durability and can stably form a margin.

  Next, an oil film pattern switching method will be described. In the patterning film coating apparatus 1 of the present embodiment, several types of rigid nozzle plates 4 are provided in which through holes 9 having different widths La of the through holes 5 or different intervals Lb between adjacent through holes 5 are formed. . In FIG. 1, four types of rigid nozzle plates 4 are provided. However, the number of rigid nozzle plates 4 is not limited to this and may be any number.

  The outer tube 3 is driven by a driving means (not shown) such as a motor when the oil film pattern is switched, and the rigid nozzle plate 4 in which the desired through hole group 9 is formed is positioned with the opening 6 of the inner tube 2. By installing them together, the pattern of the oil film formed on the film can be easily changed.

  For example, as shown in FIGS. 7A and 7B, four different types of margin patterns (A), (B), (C), and (D) are continuously formed on one original film 71. can do. In margin patterns (A), (B), (C), and (D) shown in FIG. 7B, the black portions are margins (non-metal film portions), and the white portions are metal film portions.

  The number of rigid nozzle plates 4 that can be attached to the outer tube frame 10 is structurally limited. However, since the rigid nozzle plates 4 can be attached and detached, the patterning film coating apparatus of this embodiment is used. 1, it is possible to form an oil film having an infinite number of patterns.

  In FIG. 3, margins are formed on both surfaces of the film 35 using two sets of patterning film coating apparatuses. However, by providing another opening on the side opposite to the opening 6 of the inner tube 2, It is also possible to form a margin on both sides of the film with a pair of patterning film coating apparatuses.

  Further, in the embodiment of the present invention described above, an example in which the margin of the film capacitor is formed by using the patterning film coating apparatus has been shown. However, the liquid supplied to the inner tube 2 does not remain in the oil, for example, It is also possible to supply a π-conjugated polymer such as a polyparaphenylene vinylene solution, a polyfluorene solution, a polythiophene solution, or a polyparaphenylene solution to the inner tube to form a light emitting layer of the organic EL element.

  In the patterning film coating apparatus and the vacuum deposition apparatus including the same according to the present invention, since all the constituent members of the apparatus can be constructed from rigid ones, the durability is excellent and the rigid nozzle plate can be attached and detached. Therefore, it can cope with the formation of many kinds of patterning films. Therefore, one patterning film coating apparatus can be used for a very long time. Furthermore, when forming a margin for a film capacitor, the oil film pattern can be easily changed by switching the rigid nozzle plate, so that different types of margin patterns can be formed on one original film, which is very efficient. A variety of film capacitors can be produced.

  Further, by appropriately selecting the liquid to be supplied to the inner tube, it can be used for a wide range of applications, for example, it becomes possible to form a light emitting layer of an organic EL element.

1 is a perspective view showing a part of an embodiment of a patterning film coating apparatus according to the present invention in a longitudinal section. The perspective view which shows the outer tube | pipe frame and the rigid nozzle plate which are the principal parts of this embodiment. Schematic configuration diagram of a vacuum deposition apparatus provided with a patterning film coating apparatus according to the present invention Schematic diagram of a rigid nozzle plate that is one of the components of the patterning film coating apparatus of the present embodiment The figure which shows the measurement result of the margin width | variety when forming a margin using the patterning film coating device of this embodiment The figure which shows the measurement result of the margin width when forming a margin using the conventional patterning film coating device (A) is the whole perspective view of a raw film, (b) is a top view which shows a film surface A perspective view showing a metal pipe to which masking oil is supplied in a conventional patterning film coating apparatus In (a) and (b), the upper figure is an overall perspective view of the original film, and the lower figure is a plan view showing the film surface. The perspective view which shows the principal part in the conventional patterning film coating device

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Patterning film coating device 2 Inner tube 3 Outer tube 4 Rigid nozzle plate 5 Through-hole 6 Inner tube opening 7 Outer tube frame opening 8 Heater 9 Through-hole group 10 Outer tube frame 30 Vacuum deposition device 31 Feeding roller 32 Patterning Film coating unit 33 Metal vapor deposition unit 34 Winding roller 35 Film

Claims (4)

In a patterning film coating apparatus for forming a film patterned into a predetermined shape on a substrate in a vacuum,
An inner tube having a supply portion for supplying a liquid as a raw material for the patterning film and having an opening for discharging the liquid, an outer tube provided so as to cover the inner tube, and the inner tube And at least one through-hole that discharges the liquid supplied to the inside of the outer tube, and a group of through-holes provided in a row in the longitudinal direction of the outer tube,
A plurality of the through hole groups are provided on the outer circumferential surface of the outer tube, and the shape or arrangement pattern of the through holes constituting each of the through hole groups are made different so that the outer tube can be rotated and the outer tube is rotated. And the type of said through hole group is switched by aligning the position of the said opening of the said inner tube, and the said through hole group, The patterning film coating apparatus characterized by the above-mentioned.   The outer tube includes an outer tube frame having a plurality of openings on a peripheral surface, and a plurality of nozzle plates having the through hole group, and the plurality of nozzle plates are connected to the openings of the outer tube frame. The patterning film coating apparatus according to claim 1, wherein the patterning film coating apparatus is installed in a matched position and the nozzle plate is detachable.   The patterning film coating apparatus according to claim 1 or 2, wherein a heater is embedded in the outer tube so that the temperature of the inner tube and the outer tube can be controlled independently. A feeding roller that feeds the base film; a patterning film coating unit that forms a patterning film in a predetermined shape on the base film that runs while being fed from the feeding roller; and the base material that is fed from the feeding roller and travels A vacuum deposition apparatus comprising a deposition unit for depositing a metal on a film and a take-up roller for winding the base film on which the metal is deposited,
A vacuum deposition apparatus comprising the patterning film coating apparatus according to claim 1 as the patterning film coating unit.

Images